CN106018917B - A kind of passive Current Voltage integrated sensor - Google Patents
A kind of passive Current Voltage integrated sensor Download PDFInfo
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- CN106018917B CN106018917B CN201610329901.4A CN201610329901A CN106018917B CN 106018917 B CN106018917 B CN 106018917B CN 201610329901 A CN201610329901 A CN 201610329901A CN 106018917 B CN106018917 B CN 106018917B
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
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Abstract
The invention proposes a kind of passive Current Voltage integrated sensors, are made of two sensing elements being located at around transfer wire, and each sensing element is made of substrate, magnetic core coil, metal layer, connecting wire, pad and fixed device.Magnetic core coil is located at the upper surface of substrate, constitutes current sensor with connecting wire and pad；Metal layer is located at the lower surface of substrate, constitutes voltage sensor with connecting wire and pad, and fixed device is located at the lower section of metal layer, two sensing elements between transfer wire at a distance from it is different, transfer wire surface is mounted on by fixation device.Sensor depends on the height of fixed device with a distance from transfer wire, easy to adjust；It is based on micrometer-nanometer processing technology, and sensing element is all made of passive measurement, can sensed current signal and voltage signal simultaneously, do not need external power supply, low in energy consumption, structure is simple, and micromation, the linearity is good, and dynamic range is big, low in cost, is conducive to mass production.
Description
Technical field
The present invention relates to electrical network fields and MEMS (Micro-Electro-Mechanical System, abbreviation
MEMS) technical field more particularly to a kind of passive Current Voltage integrated sensor.
Background technique
Currently, the current monitoring equipment for substation and user terminal is more, and for connection substation and user
The current monitoring equipment of overhead transmission line is less, with the access of the fluctuating loads such as a large amount of distributed generation resources and electric car, distribution
Significant variation will occur for the method for operation of net, bring sternness to distribution network status estimation, Optimized Operation and online fault location
Challenge.
Current sensor and voltage sensor are the important equipments for realizing electric system on-line condition monitoring.Its precision and can
Safe and reliable operation by property and electric system is closely related.Power distribution network mostly uses greatly large-scale mutual inductor to detect voltage at present
Signal and current signal, not only volume is big, and structure is complicated, expensive, and installs inconvenience.In addition, voltage transformer one
As using contact ground survey, greatly as reference potential, to be easy to cause the generation of creepage phenomenon.Therefore a kind of price is needed
Current sensor and voltage sensor cheap, easy for installation and that precision is relatively high carry out overhead transmission line Current Voltage real-time
Monitoring, so that operations staff preferably holds the real-time running state of power distribution network.
Summary of the invention
(1) technical problems to be solved
In order to solve the above problems existing in the present technology, the present invention provides a kind of integrated sensings of passive Current Voltage
Device.
(2) technical solution
The present invention provides a kind of passive Current Voltage integrated sensors, comprising: the first sensing element and the second sensing
Component；Wherein, the first surface of first sensing element and the second sensing element has a current sensor, with the first table
The opposite second surface in face has a voltage sensor；The voltage sensor is further fixed on a clamping piece, and the clamping piece is solid
It is scheduled on transfer wire surface, first sensing element and the second sensing element location matches, the voltage sensor and biography of the two
The distance of transporting line is different.
Preferably, first sensing element and the second sensing element include: substrate 1, magnetic core coil 2,4 and of connecting wire
Pad 5；The magnetic core coil 2 is located at the first surface of substrate, is connect by the connecting wire of first surface with pad, the
A current sensor is constituted on one surface, for sensing the current value of transfer wire.
Preferably, first sensing element and the second sensing element include: substrate 1, metal layer 3, connecting wire 4 and weldering
Disk 5, the metal layer 3 are located at the second surface of substrate, are connect by the connecting wire of second surface with pad, in the second table
A voltage sensor is constituted on face；The metal layer of first sensing element and the second sensing element is used as induction electrode pair
In the voltage value of sensing transfer wire, one of metal layer of the induction electrode pair is earth-free as reference potential.
Preferably, first sensing element and the second sensing element are located at transfer wire two sides, position face and mutually
In parallel；Alternatively, first sensing element and the second sensing element are located at the same axial position of transfer wire, and there is a folder
Angle.
Preferably, first sensing element and the second sensing element are arranged side by side in transfer wire the same side and mutually flat
Row；Alternatively, first sensing element and the second sensing element are arranged along the axially different position of transfer wire, and there is a folder
Angle.
Preferably, the material of the substrate 1 be selected from silicon, glass, ceramics or organic material, and the substrate 1 with it is described
Magnetic core coil 2, thin metal layer 3, connecting wire 4 and pad 5 insulate.
Preferably, the magnetic core coil 2 is the array structure magnetic core coil of X row Y column, wherein X, Y are natural number.
Preferably, the magnetic core coil 2 include coil and magnetic core, coil be with the matched stereochemical structure of core shapes,
It is generated on substrate by fine process, material is copper or silver；Core material be silicon sheet core, permalloy or
Amorphous and nano-crystal soft magnetic alloy.
Preferably, the metal layer 3 is generated on substrate by fine process, and material is silver or copper.
Preferably, the clamping piece is fixed on the underface of metal layer, and material is ceramics, nylon or polytetrafluoroethylene (PTFE).
(3) beneficial effect
It can be seen from the above technical proposal that a kind of passive Current Voltage integrated sensor of the invention has with following
Beneficial effect:
(1) sensing element is of simple structure and low cost, is conducive to mass production；
(2) passive measurement is used, external power supply is not needed, it is low in energy consumption；
(3) it is provided simultaneously with voltage sensor and current sensor, the current signal and electricity of transfer wire can be detected simultaneously
Signal is pressed, back-up is arranged without two and does not detect voltage and current, it is easy to detect, save testing cost；
(4) voltage sensor is used as reference potential without ground connection, avoids the generation of creepage phenomenon；
(5) magnetic core coil uses array and laminated construction, substantially increases the sensitivity of sensor；
(6) sensing element is fixed on by transfer wire surface by U-shaped folder, be easily installed, easy to operate and spacing is adjusted
It is very simple and convenient；
(7) magnetic core is made of 45% ferronickel thin film alloys, is not in magnetic saturation phenomenon when detecting power distribution network, linearly
It spends, dynamic range is big；
(8) sensor of fine process is used, it is small in size, realize the micromation of sensor.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the passive Current Voltage integrated sensor of first embodiment of the invention；
Fig. 2 is the current sensor structure signal of the passive Current Voltage integrated sensor of first embodiment of the invention
Figure；
Fig. 3 is the voltage sensor structural representation of the passive Current Voltage integrated sensor of first embodiment of the invention
Figure；
Fig. 4 is the structural schematic diagram of the passive Current Voltage integrated sensor of second embodiment of the invention；
Fig. 5 is the current sensor structure signal of the passive Current Voltage integrated sensor of third embodiment of the invention
Figure.
[symbol description]
1- substrate；2- magnetic core coil；3- metal layer；4- connecting wire；5- pad；6-U type folder；7- transfer wire.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in further detail.
A kind of passive Current Voltage integrated sensor of the invention, can detect the electric current of AC distribution net passive simultaneously
Signal and voltage signal.Wherein, the working principle of current sensor is Faraday's electromagnetic induction law, exchanges letter in transfer wire
Number alternating magnetic field generated generates induced electromotive force, the electromotive force and tested electric current at magnetic core coil both ends by magnetic core coil
It is directly proportional, the size of tested electric current can be found out by the electromotive force.The working principle of voltage sensor is electrostatic induction principle,
Two metal layers between transfer wire at a distance from it is different, the electric charge number of induction is different, passes through the induction of two metal interlevels of detection
The difference of charge can find out the alternating electric field of transfer wire generation, and then obtain the size of measured voltage.In addition, magnetic core coil two
The size and the distance between magnetic core coil and transfer wire for holding the electromotive force of induction are inversely proportional, and pass through upper and lower two magnetic core coils
The ratio between electromotive force of generation can accurately find out the distance between magnetic core coil and transfer wire.
As shown in Figure 1 to Figure 3, first embodiment of the invention provides a kind of passive Current Voltage integrated sensor, packet
Include: identical first sensing element of structure and the second sensing element, the first, second sensing element include: substrate 1, magnetic core coil
2, metal layer 3, connecting wire 4, pad 5 and U-shaped folder 6；Magnetic core coil 2 is located at a surface of substrate, passes through the company on the surface
It connects conducting wire to connect with pad, constitutes a current sensor on a surface.
Metal layer 3 is located at another surface of substrate, is connect by the connecting wire on another surface with pad, another at this
A voltage sensor is constituted on one surface.
U-shaped folder 6 is fixed on the underface of metal layer, the first sensing element and the second sensing element and is fixed on by U-shaped folder 6
7 surface of transfer wire, the two are located at transfer wire two sides, position face and are parallel to each other, the first sensing element and the second sensing
Parts metals layer is different at a distance from transfer wire 7, and substrate 1 and magnetic core coil 2, metal layer 3, connecting wire 4 and pad 5 are exhausted
Edge.
Wherein, U-shaped folder 6 can be bonded together by adhesive and metal layer 3, be sensed by U-shaped folder 6 by first, second
Component is fixed on 7 surface of transfer wire, is easily installed, easy to operate；Sensing element may be implemented in height by changing U-shaped folder
Adjustment at a distance between transfer wire 7, spacing adjust very simple and convenient.
Preferably, the magnetic core coil 2 is the array structure of X row Y column, including X × Y magnetic core, the magnetic core of array structure
Coil substantially increases the sensitivity of sensor, wherein X, Y are natural number, and in fig. 1 and 2, the X is 1, Y 3.
Wherein, the material of substrate 1 can for example be selected from silicon, glass, ceramics, organic material, metal, metal alloy or metal
The materials such as oxide；Magnetic core coil 2 includes coil and magnetic core, and coil is to be with the matched stereochemical structure of core shapes, material
Copper perhaps silver core material can for silicon sheet core, permalloy, amorphous and nano-crystal soft magnetic alloy or other have compared with
High magnetic permeability, the magnetic material compared with high saturation and magnetic intensity, preferably 45% ferronickel thin film alloys material, with permalloy
In highest saturation magnetization, detect power distribution network when be not in magnetic saturation phenomenon, the linearity is good, and dynamic range is big.Coil
Not in contact with being separated by insulating materials between magnetic core；3 material of metal layer is copper or silver, the induction electrode as voltage sensor
Right, one of metal layer 3 is used as reference potential, does not have to ground connection, avoids the generation of creepage phenomenon.Connecting wire 4 is copper wire,
Magnetic core coil 2 and pad 5 and metal layer 3 and pad 5 will be connected respectively；5 material of pad is copper, is connected with external circuit
It connects；6 material of U-shaped folder is selected from the higher insulating materials of resistivity ratios such as ceramics, nylon, polytetrafluoroethylene (PTFE).
In order to enhance sensor sensing effect, can by increase magnetic core size, increase coil circle number and area with
And reduce sensing element between transfer wire at a distance from etc. improve the sensitivity of current sensor；Improve the spirit of voltage sensor
Sensitivity can by increase the area of metal layer and reduce sensing element between transfer wire at a distance from realize.
Preferably, the main structure of sensor, such as the coil and metal layer 3 of magnetic core coil 2, using MEMS structure,
It can be generated on substrate using fine process, such as photoetching process, sputtering technology, microplating technique, etching technics, throwing
Light technology etc.；Metal layer 3 is generated on substrate 1 by the method for microplating.It is small in size using the sensor of MEMS structure, it is real
The micromation of sensor is showed.
In the present embodiment, the first sensing element and the second sensing element can not also be parallel to each other, but have a folder
Angle, i.e. the first sensing element and the second sensing element are fixed on 7 surface of transfer wire by U-shaped folder 6, and the two is located at transfer wire
Same axial position, and have an angle, the first sensing element and the second sensing element metal layer are at a distance from transfer wire 7
It is different.
The passive Current Voltage integrated sensor of first embodiment of the invention, the friendship that AC signal generates in transfer wire
For varying magnetic field by the magnetic core coil of current sensor, magnetic core coil both ends generate induced electromotive force, the electromotive force and transfer wire
Electric current it is directly proportional, transmission can all be calculated by the electromotive force of any current sensor induction of two sensing elements and led
The current value of line.The voltage sensor of two sensing elements, between the metal layer and transfer wire of two voltage sensors away from
From difference, the electric charge number of induction is different, can find out transfer wire by detecting the difference of charge inducing of two metal interlevels
The alternating electric field of generation, and then obtain the voltage value of transfer wire.In addition, the electromotive force size and magnetic of the induction of magnetic core coil both ends
The distance between core coil and transfer wire are inversely proportional, the ratio between the electromotive force generated using the magnetic core coil of two sensing elements,
The distance between magnetic core coil and transfer wire can be accurately found out, and the thickness that the distance subtracts substrate can be obtained
Sensing element metal layer calculates the voltage value of transfer wire at a distance from transfer wire.
The passive Current Voltage integrated sensor of first embodiment of the invention, sensing element is of simple structure and low cost,
Be conducive to mass production, use passive measurement, does not need external power supply, it is low in energy consumption；Transfer wire can be detected simultaneously
Current signal and voltage signal are arranged back-up without two and do not detect voltage and current, easy to detect, save detection at
This；Voltage sensor is used as reference potential without ground connection, avoids the generation of creepage phenomenon.
The passive Current Voltage integrated sensor of second embodiment of the invention, in order to achieve the purpose that brief description, on
Any technical characteristic for making same application in first embodiment is stated to describe all and in this, without repeating identical narration.
Referring to fig. 4, the passive Current Voltage integrated sensor, the first sensing element and the second sensing element pass through U-shaped
Folder 6 is fixed on 7 surface of transfer wire, the first sensing element and the second sensing element be arranged side by side in transfer wire the same side and
It is parallel to each other, the metal layer of the two is different at a distance from transfer wire 7.
In the present embodiment, the first sensing element and the second sensing element can not also be parallel to each other, but have a folder
Angle, i.e. the first sensing element and the second sensing element are fixed on 7 surface of transfer wire by U-shaped folder 6, the two along transfer wire not
Coaxial position setting, and there is an angle, the first sensing element and the second sensing element metal layer are at a distance from transfer wire 7
It is different.
It is similar with first embodiment, the passive Current Voltage integrated sensor of second embodiment of the invention, transfer wire
Magnetic core coil of the alternating magnetic field that middle AC signal generates by current sensor, magnetic core coil both ends generation induced electromotive force,
The electromotive force is directly proportional to the electric current of transfer wire, is incuded by any current sensor of two sensing elements electronic
Gesture can all calculate the current value of transfer wire.The voltage sensor of two sensing elements, the metal of two voltage sensors
Layer between transfer wire at a distance from it is different, the electric charge number of induction is different, by detect two metal interlevels charge inducing it
Difference can find out the alternating electric field of transfer wire generation, and then obtain the voltage value of transfer wire.In addition, magnetic core coil both ends are felt
The electromotive force size and the distance between magnetic core coil and transfer wire answered are inversely proportional, and utilize the magnetic core coil of two sensing elements
The ratio between electromotive force of generation can accurately find out the distance between magnetic core coil and transfer wire, and the distance is subtracted lining
The thickness at bottom can obtain sensing element metal layer at a distance from transfer wire, calculate the voltage value of transfer wire.
The passive Current Voltage integrated sensor of second embodiment of the invention, sensing element is of simple structure and low cost,
Be conducive to mass production, use passive measurement, does not need external power supply, it is low in energy consumption；Transfer wire can be detected simultaneously
Current signal and voltage signal are arranged back-up without two and do not detect voltage and current, easy to detect, save detection at
This；Voltage sensor is used as reference potential without ground connection, avoids the generation of creepage phenomenon.
The passive Current Voltage integrated sensor of third embodiment of the invention, in order to achieve the purpose that brief description, on
Any technical characteristic for making same application in any embodiment is stated to describe all and in this, without repeating identical narration.
The passive Current Voltage integrated sensor of third embodiment of the invention, N the first sensing element of layer are stacked into the
One sensor group and N the second sensing element of layer, which stack, forms second sensor group, and the N is natural number, and N layer first senses
The pad of section current sensor is connected by conducting wire, constitutes a current sensor group, N layer the second sensing element current sensor
Pad pass through conducting wire connect, constitute a current sensor group.
The surface with voltage sensor of upper layer sensing element be stacked on lower layer's sensing element have current sensor
Surface on, U-shaped folder 6 is fixed on the underface of the first, second sensing element metal layer near transfer wire.First sensing
Device group and second sensor group pass through U-shaped folder 6 and are fixed on 7 surface of transfer wire.
The passive Current Voltage integrated sensor of third embodiment of the invention, the friendship that AC signal generates in transfer wire
For varying magnetic field by the magnetic core coil of current sensor, magnetic core coil both ends generate induced electromotive force, the electromotive force and transfer wire
Electric current it is directly proportional, transfer wire can all be calculated by the electromotive force that the current sensor group of any sensor group incudes
Current value.First sensor group and second sensor group are near the voltage sensor of the sensing element of transfer wire, this two
The metal layer of a voltage sensor between transfer wire at a distance from it is different, the electric charge number of induction is different, passes through two gold of detection
The difference for belonging to the charge inducing of interlayer can find out the alternating electric field of transfer wire generation, and then obtain the voltage value of transfer wire.
In addition, the electromotive force size and the distance between magnetic core coil and transfer wire of the induction of magnetic core coil both ends are inversely proportional, the is utilized
The ratio between the electromotive force that one sensor group and second sensor group are generated near the magnetic core coil of the sensing element of transfer wire, can
Accurately to find out near the distance between the magnetic core coil of transfer wire and transfer wire, and the distance is subtracted into substrate
Thickness can obtain sensing element metal layer at a distance from transfer wire, calculate the voltage value of transfer wire.
The passive Current Voltage integrated sensor of third embodiment of the invention is being passed using the N layer sensing element of stacking
In the case that sensor overall structure volume increases very little, the sensitivity of sensor is substantially increased.As shown in figure 5, the N takes 2,
That is first sensor group and second sensor group is stacked by two layers of sensing element, is fixed on the situation on transducer wire surface
Similar with Fig. 1, details are not described herein.
Adjacent two layers sensing element is bonded in one piece by seccotine, increases the feelings of very little in sensor overall structure volume
Under condition, the sensitivity of sensor is substantially increased.
So far, attached drawing is had been combined the present embodiment is described in detail.According to above description, those skilled in the art
There should be clear understanding to a kind of passive Current Voltage integrated sensor of the invention.
It should be noted that in attached drawing or specification text, the implementation for not being painted or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each component and not only limiting
Various specific structures, shape or the mode mentioned in embodiment, those of ordinary skill in the art can carry out simply more it
Change or replaces, such as:
(1) voltage sensor and current sensor can also select other structures；
(2) direction term mentioned in embodiment, such as "upper", "lower", "front", "rear", "left", "right" etc. are only ginsengs
The direction for examining attached drawing, the protection scope being not intended to limit the invention；
(3) above-described embodiment can be based on the considerations of design and reliability, and the collocation that is mixed with each other uses or and other embodiments
Mix and match uses, i.e., the technical characteristic in different embodiments can freely form more embodiments.
In conclusion a kind of passive Current Voltage integrated sensor of the invention, structure is simple, micromation, low in energy consumption,
The linearity is good, and dynamic range is big, and accuracy of measurement is affected by environment small, low in cost, is conducive to mass production, can answer extensively
Use power distribution network Current Voltage detection field.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (6)
1. a kind of passive Current Voltage integrated sensor characterized by comprising the first sensing element and the second detecting means
Part；Wherein,
The first surface of first sensing element and the second sensing element has a current sensor, opposite with first surface
Second surface have a voltage sensor；
The voltage sensor is further fixed on a clamping piece, and the clamping piece is fixed on transfer wire surface, first sensing
Component and the second sensing element location matches, the voltage sensor of the two are different at a distance from transfer wire；
Wherein, first sensing element and the second sensing element include: substrate (1), magnetic core coil (2), connecting wire (4) and
Pad (5)；The magnetic core coil (2) is located at the first surface of substrate, is connect by the connecting wire of first surface with pad,
A current sensor is constituted on the first surface, for sensing the current value of transfer wire；
Wherein, first sensing element and the second sensing element include: substrate (1), metal layer (3), connecting wire (4) and weldering
Disk (5), the metal layer (3) are located at the second surface of substrate, are connect by the connecting wire of second surface with pad, the
A voltage sensor is constituted on two surfaces；
The metal layer of first sensing element and the second sensing element is as induction electrode pair, for sensing the electricity of transfer wire
One of metal layer of pressure value, the induction electrode pair is earth-free as reference potential；
Wherein, first sensing element and the second sensing element are located at transfer wire two sides, position face and are parallel to each other；Or
Person, first sensing element and the second sensing element are located at transfer wire two sides, and first sensing element and second passes
Sense component is located at the same axial position of transfer wire, and has an angle；Or
First sensing element and the second sensing element are arranged side by side in transfer wire the same side and are parallel to each other；Alternatively, institute
It states the first sensing element and the second sensing element is arranged side by side in transfer wire the same side, and first sensing element and second
Sensing element is arranged along the axially different position of transfer wire, and has an angle.
2. passive Current Voltage integrated sensor as described in claim 1, which is characterized in that the material of the substrate (1)
Selected from silicon, glass, ceramics or organic material, and the substrate (1) and the magnetic core coil (2), thin metal layer (3), it connect
Conducting wire (4) and pad (5) insulation.
3. passive Current Voltage integrated sensor as described in claim 1, which is characterized in that the magnetic core coil (2) is X
The array structure magnetic core coil of row Y column, wherein X, Y are natural number.
4. passive Current Voltage integrated sensor as described in claim 1, which is characterized in that magnetic core coil (2) packet
Include coil and magnetic core, coil be with the matched stereochemical structure of core shapes, generated on substrate by fine process,
Material is copper or silver；Core material is silicon sheet core, permalloy or amorphous and nano-crystal soft magnetic alloy.
5. passive Current Voltage integrated sensor as described in claim 1, which is characterized in that the metal layer (3) passes through
Fine process generates on substrate, and material is silver or copper.
6. passive Current Voltage integrated sensor as described in claim 1, which is characterized in that the clamping piece is fixed on gold
Belong to the underface of layer, material is ceramics, nylon or polytetrafluoroethylene (PTFE).
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| EP3584589B1 (en) * | 2017-02-17 | 2021-09-22 | Alps Alpine Co., Ltd. | Current sensor |
| CN108152556B (en) * | 2018-01-18 | 2023-04-25 | 吉林大学 | Passive excitation self-powered wireless non-contact current sensing measurement device and measurement method |
| CN108761266B (en) * | 2018-06-06 | 2020-06-16 | 浙江巨磁智能技术有限公司 | Subminiature surface-mounted leakage current sensor and assembling method thereof |
| CN108918950B (en) * | 2018-07-07 | 2020-12-15 | 浙江巨磁智能技术有限公司 | Leakage current sensing chip based on MEMS (micro-electromechanical systems) process |
| CN111950682A (en) * | 2020-07-29 | 2020-11-17 | 上海优比科电子科技有限公司 | Coil type die-cut label and preparation method thereof |
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| CN203365529U (en) * | 2013-08-02 | 2013-12-25 | 上海中联伟安电气有限公司 | Sensor device for detecting high-voltage current and voltage on line |
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