CN106018566B - A kind of ultrasonic transduction device - Google Patents
A kind of ultrasonic transduction device Download PDFInfo
- Publication number
- CN106018566B CN106018566B CN201610520604.8A CN201610520604A CN106018566B CN 106018566 B CN106018566 B CN 106018566B CN 201610520604 A CN201610520604 A CN 201610520604A CN 106018566 B CN106018566 B CN 106018566B
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- China
- Prior art keywords
- stainless steel
- cushion block
- pedestal
- holder
- piezoelectric ceramic
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
- G01N29/245—Ceramic probes, e.g. lead zirconate titanate [PZT] probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention belongs to supersonic imaging apparatus fields, and disclose a kind of ultrasonic transduction device, including pedestal, lower piezoelectric potsherd, cushion block, stainless steel shrapnel holder, cantilever, probe and upper piezoelectric ceramic piece, the upper surface setting of pedestal is fluted, the lower piezoelectric potsherd is installed in the groove of the pedestal, lower piezoelectric potsherd accepts the cushion block；Stainless steel shrapnel holder is accepted by the cushion block and the pedestal；Stainless steel shrapnel holder clamps one end of the cantilever with cushion block cooperation, and the probe is fixedly mounted in the other end of cantilever；Stainless steel shrapnel holder installs two upper piezoelectric ceramic pieces close to the upper surface of one end of the cushion block, and each upper piezoelectric ceramic piece is mounted on by flange electrode on the stainless steel shrapnel holder.The invention enables ultrasonic transducers and cantilever separate type to integrate, and facilitates the replacement to probe, and can generate high frequency composite ultraphonic wave.
Description
Technical field
The invention belongs to supersonic imaging apparatus fields, more particularly, to a kind of ultrasonic transduction device.
Background technology
Ultrasonic transducer is the device for realizing acoustical signal and electric signal conversion.Atomic force microscope is by mutual between atom
Effect imaging, but it may only carry out the imaging on surface can not detect inside.Ultrasonic imaging can be imaged sample interior,
But there are also problems for it, and the size due to probe cantilever in previous experiment is very small, realizes that the combination of probe and cantilever is
It is very difficult, although the techniques such as film directly growth can be used to be directly realized by, in view of being in actual experiment middle probe
Easily-consumed products need to be replaced frequently, therefore this are plated in piezoelectric material direct plating on small cantilever, or by piezoelectric material
Method cost on the small pedestal of cantilever mounted is high；Again will if piezoelectric material is plated on the small pedestal of fixed probe
It, which is fixed on external fixation device, can influence to vibrate, and further influence the generation of ultrasound, the final load for influencing signal.
Further need exist for external circuit driving piezoelectric material, by piezoelectric material direct plating above after need to draw electrode with it is outer
Portion's driving circuit is connected, probe structure it is small for it is subsequent draw electrode work cause prodigious influence, keep it very tired
It is difficult.
In addition, being typically to pressurize under cantilever electric material in existing technology, small piezoelectric patches shakes on electric drive cantilever
Movable property life ultrasound, frequency are relatively low.
Invention content
For the disadvantages described above or Improvement requirement of the prior art, the present invention provides a kind of ultrasonic transduction devices, use
Polylith piezoelectric ceramic piece drives generation high frequency composite ultraphonic to be added in cantilever tip jointly, the ultrasonic wave sent out with needle point on cantilever
It interferes, has reached and sample interior is imaged, so as to reduce the cost of product.
To achieve the above object, it is proposed, according to the invention, provide a kind of ultrasonic transduction device, which is characterized in that including pedestal,
Lower piezoelectric potsherd, cushion block, stainless steel shrapnel holder, fixinig plate, cantilever, probe and upper piezoelectric ceramic piece, wherein
The upper surface setting of the pedestal is fluted, and installs the lower piezoelectric pottery in the groove of the pedestal
Tile, the lower piezoelectric potsherd accept the cushion block；
One end of the stainless steel shrapnel holder is accepted by the cushion block and its other end is fixedly mounted on the bottom
On seat, and the height of the stainless steel shrapnel holder wherein one end is more than other end of height, to make the stainless steel
Shrapnel bracket bent simultaneously generates elastic force and is pressed on the cushion block and the pedestal；
The stainless steel shrapnel holder clamps the one of the fixinig plate close to one end of the cushion block and cushion block cooperation
One end of the cantilever is fixedly mounted in end, the other end of the fixinig plate, and the probe is fixedly mounted in the other end of the cantilever；
The stainless steel shrapnel holder installs two upper piezoelectric ceramic pieces close to the upper surface of one end of the cushion block,
Each upper piezoelectric ceramic piece is mounted on by flange electrode on the stainless steel shrapnel holder, and the flange electrode is used for
External drive circuit is connected, the flange electrode is the U-like shape structure formed through flange processing, and the upper piezoelectric ceramic piece is from institute
The open end for stating flange electrode is inserted into the flange electrode, to make flange electrode holder residence state upper piezoelectric ceramic piece,
The flange electrode is pasted onto the upper surface of the stainless steel shrapnel holder by conductive silver paste or conductive glue.
Preferably, the stainless steel shrapnel holder includes upper bracket and lower bracket, the structure of the upper bracket and lower bracket
The projection overlapping of identical and the two on the base, the upper bracket are placed on the lower bracket, the lower bracket
One end is installed on the base by screw, and two upper piezoelectric ceramic pieces are mounted on the upper surface of the upper bracket.
Preferably, the piezoelectric tensor of the upper piezoelectric ceramic piece is d33.
Preferably, the upper piezoelectric ceramic piece is 10 times or more of its round and a diameter of thickness.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect：
1) present invention is integrated with ultrasonic transducer and cantilever, and typically by ultrasonic transducer with plated film in previous technology
Form grow in jib foot, but in view of probe is consumptive material, size is smaller, needs to be replaced frequently and big, this hair that integrates difficulty
It is bright so that ultrasonic transducer and cantilever separate type are integrated, facilitate the replacement to probe.
2) upper piezoelectric ceramic piece of the invention and the cooperation of lower piezoelectric potsherd can generate high frequency composite ultraphonic wave.
3) in contrast to existing atomic force microscope by tapering probe in cantilever impression and amplification cantilever and by sample
Active force between atom can only be in the picture of material surface atom level, and the present invention, to the penetration power of object, is realized using sound wave
To the function of material internal imaging.
4) upper piezoelectric ceramic piece and lower piezoelectric potsherd are separately mounted on stainless steel shrapnel holder and pedestal by the present invention
On, signal loading is neither influenced in this way, nor affects on the electrology characteristic and mechanical property of probe itself, and can repeat to make
With being conducive to industrialization and the practical application of product.
Description of the drawings
Fig. 1 is the structural schematic diagram under the one of visual angle of the present invention；
Fig. 2 is the exploded view of the present invention；
Fig. 3 is the structural schematic diagram under another visual angle of the invention；
The structural schematic diagram of upper bracket in Fig. 4 present invention；
Fig. 5 is the structural schematic diagram for installing probe in the present invention on cantilever.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
It does not constitute a conflict with each other and can be combined with each other.
Referring to Fig.1~Fig. 5, a kind of ultrasonic transduction device, including pedestal 1, lower piezoelectric potsherd 6, cushion block 11, stainless steel bomb
Plate rack 10, fixinig plate 8, cantilever 2, probe 9 and upper piezoelectric ceramic piece 7, wherein
The upper surface setting of the pedestal 1 is fluted, and installs the lower piezoelectric in the groove of the pedestal 1
Potsherd 6, the lower piezoelectric potsherd 6 accept the cushion block 11；
One end of the stainless steel shrapnel holder 10 is accepted by the cushion block 11 and its other end is fixedly mounted on institute
It states on pedestal 1, and the height of the wherein one end of the stainless steel shrapnel holder 10 is more than other end of height, it is described to make
Stainless steel shrapnel holder 10 is bent and generates elastic force and is pressed on the cushion block 11 and the pedestal 1；
The stainless steel shrapnel holder 10 clamps the fixation close to one end of the cushion block 11 and the cooperation of the cushion block 11
One end of the cantilever 2 is fixedly mounted in one end of piece 8, the other end of the fixinig plate 8, and the other end of the cantilever 2 fixes peace
Fill the probe 9；
The stainless steel shrapnel holder 10 installs two upper piezoelectricity potteries close to the upper surface of one end of the cushion block 11
Tile 7, each upper piezoelectric ceramic piece 7 is mounted on by flange electrode on the stainless steel shrapnel holder 10, described to turn over
For side electrode for connecting external drive circuit, the flange electrode is the U-like shape structure formed through flange processing, the upper piezoelectricity
Potsherd 7 is inserted into from the open end of the flange electrode in the flange electrode, to make flange electrode holder residence state
Piezoelectric ceramic piece 7, the flange electrode are pasted onto the upper of the stainless steel shrapnel holder 10 by conductive silver paste or conductive glue
Surface.Since the holder of supporting cantilever 2 selects stainless steel shrapnel holder 10, the stainless steel shrapnel holder 10 is electrically conductive, because
This selection conductive silver paste or conductive glue flange electrode can thus regard stainless steel shrapnel holder 10 as hearth electrode.Separately
Outside, the present invention selects stainless steel shrapnel holder 10, and flange electrode thus may be used to connect upper piezoelectric ceramic piece, greatly
Facilitate existing operation.
Further, the stainless steel shrapnel holder 10 includes upper bracket 4 and lower bracket 5, the upper bracket 4 and lower bracket 5
Structure is identical and projection that the two is on the pedestal 1 overlapping, the upper bracket 4 is placed on the lower bracket 5, described
One end of lower bracket 5 is mounted on by screw 3 on the pedestal 1, and two upper piezoelectric ceramic pieces 7 are mounted on the upper bracket
4 upper surface.Using upper bracket 4 and lower bracket 5, the upper piezoelectric ceramic piece 7 that can be convenient for changing on upper bracket 4, because of this hair
Bright is upper piezoelectric ceramic piece 7 to be sticked on upper bracket 4, then upper bracket 4 is fixed on lower bracket 5, convenient to upper piezoelectric ceramics
The direct replacement of piece 7.
Further, the piezoelectric tensor of the upper piezoelectric ceramic piece 7 is d33, goes up the vibration mode of piezoelectric ceramic piece 7 most at this time
By force.
Further, the upper piezoelectric ceramic piece 7 is circle, and such vibrating effect is relatively good and does not consider on other directions
Influence, make 10 times or more of its its a diameter of thickness of circular piezoelectric potsherd in a thickness direction of only working.
Previous imaging system uses electric drive, but frequency is relatively low, and the present invention uses below cantilever 2 plus a piece of lower piezoelectric
Potsherd 6 and on upper bracket 4 again plus two on piece piezoelectric ceramic pieces 7 come improve frequency obtain high frequency composite ultraphonic.In use, plus
The external drive voltage being downloaded on piezoelectric ceramics is identical, and the supersonic frequency of generation is identical, so superposition is exactly with regard to simple sound
Superposition, the sound intensity increase.
The two on piece piezoelectric ceramic pieces 7 of the present invention, which drive to vibrate and can generate high frequency composite ultraphonic by external circuit, to be passed through
Acoustical signal is added on the probe 9 of cantilever 2 by medium propagation, and the probe 9 on cantilever 2 sends out ultrasonic wave, by reflection signal
Processing has just achieved the purpose that be imaged sample interior, and the invention reduces the cost of product, increases frequency, improves product
Practicability.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include
Within protection scope of the present invention.
Claims (4)
1. a kind of ultrasonic transduction device, which is characterized in that including pedestal (1), lower piezoelectric potsherd (6), cushion block (11), stainless steel
Shrapnel holder (10), fixinig plate (8), cantilever (2), probe (9) and upper piezoelectric ceramic piece (7), wherein
The upper surface setting of the pedestal (1) is fluted, and installs the lower piezoelectric in the groove of the pedestal (1)
Potsherd (6)；
The lower piezoelectric potsherd (6) accepts the cushion block (11)；
One end of the stainless steel shrapnel holder (10) is accepted by the cushion block (11) and its other end is fixedly mounted on institute
It states on pedestal (1), and the height of the stainless steel shrapnel holder (10) wherein one end is more than other end of height, to make
The stainless steel shrapnel holder (10) is bent and generates elastic force and is pressed on the cushion block (11) and the pedestal (1)；
The stainless steel shrapnel holder (10) is clamped close to one end of the cushion block (11) with the cushion block (11) cooperation described solid
One end of stator (8), the other end of the fixinig plate (8) are fixedly mounted one end of the cantilever (2), the cantilever (2) it is another
The probe (9) is fixedly mounted in one end；
The stainless steel shrapnel holder (10) installs two upper piezoelectricity potteries close to the upper surface of one end of the cushion block (11)
Tile (7), each upper piezoelectric ceramic piece (7) are mounted on by flange electrode on the stainless steel shrapnel holder (10),
For the flange electrode for connecting external drive circuit, the flange electrode is the U-like shape structure formed through flange processing, described
Upper piezoelectric ceramic piece (7) is inserted into from the open end of the flange electrode in the flange electrode, to make the flange electrode holder
Piezoelectric ceramic piece (7) is stated in residence, and the flange electrode is pasted onto the stainless steel shrapnel by conductive silver paste or conductive glue
The upper surface of holder (10).
2. a kind of ultrasonic transduction device according to claim 1, which is characterized in that stainless steel shrapnel holder (10) packet
Upper bracket (4) and lower bracket (5) are included, the upper bracket (4) is identical with the structure of lower bracket (5) and the two is in the pedestal
(1) the projection overlapping on, the upper bracket (4) are placed on the lower bracket (5), and one end of the lower bracket (5) passes through spiral shell
It follows closely (3) to be mounted on the pedestal (1), two upper piezoelectric ceramic pieces (7) are mounted on the upper surface of the upper bracket (4).
3. a kind of ultrasonic transduction device according to claim 1, which is characterized in that the pressure of the upper piezoelectric ceramic piece (7)
Electric tensor is d33.
4. a kind of ultrasonic transduction device according to claim 3, which is characterized in that the upper piezoelectric ceramic piece (7) is circle
10 times or more of shape and its a diameter of thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610520604.8A CN106018566B (en) | 2016-07-05 | 2016-07-05 | A kind of ultrasonic transduction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610520604.8A CN106018566B (en) | 2016-07-05 | 2016-07-05 | A kind of ultrasonic transduction device |
Publications (2)
| Publication Number | Publication Date |
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| CN106018566A CN106018566A (en) | 2016-10-12 |
| CN106018566B true CN106018566B (en) | 2018-07-13 |
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| CN201610520604.8A Expired - Fee Related CN106018566B (en) | 2016-07-05 | 2016-07-05 | A kind of ultrasonic transduction device |
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