CN106016826B - With the cooling high/low temperature hot oil control system of second level - Google Patents
With the cooling high/low temperature hot oil control system of second level Download PDFInfo
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- CN106016826B CN106016826B CN201610503243.6A CN201610503243A CN106016826B CN 106016826 B CN106016826 B CN 106016826B CN 201610503243 A CN201610503243 A CN 201610503243A CN 106016826 B CN106016826 B CN 106016826B
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- Prior art keywords
- cooling
- oil
- low temperature
- level
- evaporator
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B29/00—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously
- F25B29/003—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously of the compression type system
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
- F25B41/22—Disposition of valves, e.g. of on-off valves or flow control valves between evaporator and compressor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
- F25B41/31—Expansion valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
Present invention discloses a kind of high/low temperature hot oil control systems cooling with second level, it includes oil outlet pipe, oil return line, cooling device, heating device, pumping and cooling water system, the heating device and the cooling device are connected to after summarizing with the oil outlet pipe, the pumping and the oil return line, the heating device and cooling device pipeline connection, the evaporator that the cooling device includes and the pumping is connected to, the refrigerating plant being connected to the evaporator and the condenser being connected to the refrigerating plant and the evaporator, the condenser is connected to the cooling water system.The present invention can carry out heating automatically and switch with cooling, and cooling efficiency is high.
Description
[technical field]
The invention belongs to technical field of temperature control, control more particularly to a kind of high/low temperature hot oil cooling with second level
System.
[background technique]
Temperature control in modern manufacturing industry using extremely wide, such as pharmacy, cosmetics reaction kettle temperature control field.It is existing
In technology, temperature is controlled using individual heating and cooling system, carries out cold and hot exchange with the manual switching mode of the two,
The precision of control temperature is difficult to reach requirement, often results in the reaction efficiency and effect influenced in reaction kettle；And for superelevation
The control stability of mild ultralow temperature is poor.
Therefore, it is necessary to provide the new high/low temperature hot oil control system cooling with second level of one kind to solve above-mentioned ask
Topic.
[summary of the invention]
It is an object of the present invention to provide a kind of high/low temperature hot oil control systems cooling with second level, can be automatic
It carries out heating to switch with cooling, and cooling efficiency is high.
The present invention is achieved through the following technical solutions above-mentioned purpose: a kind of high/low temperature hot oil control system cooling with second level
System comprising oil outlet pipe, oil return line, cooling device, heating device, pumping and cooling water system, the heating device
Be connected to after summarizing with the cooling device with the oil outlet pipe, it is described pump and the oil return line, the heating device with
And the cooling device pipeline connection, the cooling device include pumping the evaporator being connected to and evaporator company with described
Logical refrigerating plant and the condenser being connected to the refrigerating plant and the evaporator, the condenser and the cooling water
System connectivity.
Further, it is described be pumped through the first electric T-shaped valve shunt after respectively with the cooling device, the heating
Device connection.
It further, further include PLC control device, the PLC control device and the pumping, first electric three passes
Valve is electrically connected.
Further, it is provided on the pipeline that the refrigerating plant is connected to the evaporator in parallel several expansions
Valve, the expansion valve upstream are provided with second solenoid valve.
Further, the refrigerating plant is provided with dried on shunting the pipeline before being connected to the second solenoid valve
Filter.
Further, the refrigerating plant includes the gas-liquid separator being connected to the evaporator and the gas-liquid separation
The air compressor of device pipeline connection, the oil that is connected to the air compressor and the condenser and with the condenser
The expansion drum being connected to the gas-liquid separator.
Further, the heating device includes the heating tube being connected to the pumping, the oil outlet pipe.
Further, the second oil discharge outlet is provided in the heating tube.
It further, further include expansion oil tank and gas collecting jar with ground-on cover plate, the gas collecting jar with ground-on cover plate and the expansion oil tank summarize rear and institute
State pumping duct connection.
Further, pipeline connects and is provided with exhaust electricity on the pipeline between the expansion oil tank and the gas collecting jar with ground-on cover plate
Magnet valve, the exhaust solenoid valve are electrically connected with the PLC control device.
Compared with prior art, a kind of beneficial effect of the high/low temperature hot oil control system cooling with second level of the present invention exists
In: heating can be carried out automatically and is switched with cooling, and cooling efficiency is high.Specifically,
1) heating device and refrigerating plant are integrated in unified pipeline, are obtained by automatic temperature-adjusting, setting needs temperature
The first electric T-shaped valve is automatically adjusted to control between the flow direction of thermally conductive medium realizes temperature-controlled area and maintain -30 DEG C~200 DEG C；
2) two-stage refrigerating mode is set in cooling device, is on the one hand freezed by air compressor；Another reverse side
It by the cooling medium after air compressor cools down at condenser, is cooled down twice through supercooled water, this setting is significantly
Improve cooling efficiency；
3) parallel expansion valve is set in cooling device, and is unified to be connected to evaporator, is controlled and is filled by PLC
The unlatching number of control expansion valve is set to control the flowing velocity of cooling medium in cooling device, to reach control cooling efficiency
Function；
4) integrated design is used, the device space is saved, and to refrigeration system compact Layout, saves energy consumed by radiating
Amount, improves the heating efficiency and refrigerating efficiency of equipment.
[Detailed description of the invention]
Fig. 1 is the module diagram of PLC controller in the embodiment of the present invention；
Digital representation in figure:
1 expansion oil tank；2 pumpings；3 evaporators, 31 flow switches；
4 cooling devices, 41 condensers, 411 pressure-sensitive switches, 42 devices for drying and filtering, 43 expansion drums, 431 first electromagnetism
Valve, 44 expansion valves, 441 second solenoid valves, 45 gas-liquid separators, 46 air compressors, 47 oils, 48 first temperature inductors；
5 heating devices, 51 heating tubes, 511 second oil discharge outlets, 52 heat exchangers, 53 second electric T-shaped valves, 54 first pressures
Sensor, 55 overtemperature prote modules；
6 oil outlet pipe, 61 second pressure sensors, 62 pressure gauges, 63 second temperature inductors；
7 oil return lines, 71 filters, 72 third temperature inductors；
8 cooling water outlets；9 cooling water inlets；10PLC control device；11 temperature controllers；12 gass collecting jar with ground-on cover plate；13 exhaust electricity
Magnet valve；14 first oil discharge outlets；15 first electric T-shaped valves.
[specific embodiment]
Embodiment:
Fig. 1 is please referred to, the present embodiment is a kind of high/low temperature hot oil control system cooling with second level comprising expansion oil
Tank 1, pumping 2, evaporator 3, cooling device 4, heating device 5, oil outlet pipe 6, oil return line 7, cooling water outlet 8, cooling water
Entrance 9, PLC control device 10 and temperature controller 11.
Cooling water outlet 8 and cooling water inlet 9 constitute cooling water system.
Expansion oil tank 1 is connected to 2 pipelines of pumping.Expansion oil tank 1 is internally provided with liquid-level switch (not indicating in figure), liquid level
Switch is electrically connected with PLC control device 10.
Gas collecting jar with ground-on cover plate 12 is provided between pumping 2 and oil return line 7.Exhaust is provided between gas collecting jar with ground-on cover plate 12 and expansion oil tank 1
Solenoid valve 13, exhaust solenoid valve 13 are connected to gas collecting jar with ground-on cover plate 12, expansion 1 pipeline of oil tank respectively.Pumping 2 and gas collecting jar with ground-on cover plate 12 and expansion oil
The first oil discharge outlet 14 is provided between tank 1.When first oil discharge outlet 14 is mainly used for cleaning, maintenance gas collecting jar with ground-on cover plate 12 and expansion oil tank 1
Discharge temperature control oil.Exhaust solenoid valve 13 is mainly used for discharging gas collecting jar with ground-on cover plate 12 and expands the gas in oil tank 1, prevents hot oil control system
Pressure in system in pipeline is excessive and blasting phenomena occurs.
Exhaust solenoid valve 13 is electrically connected with PLC control device 10.PLC control device 10 is electrically connected with temperature controller 11.
Pumping 2, evaporator 3 and 5 three of heating device are provided with the first electric T-shaped valve 15 in its intersection, pumping 2,
Evaporator 3 and heating device 5 are connected to by pipeline with three ports of the first electric T-shaped valve 15 respectively.First electric three passes
Valve 15, pumping 2 are electrically connected with PLC control device 10.It can be realized temperature control oil by the first electric T-shaped valve 15 and enter cooling dress
It sets 4 or enters the automatic switchover of heating device 5.
Evaporator 3 is provided with flow switch 31 in its exit, and evaporator 3 is connected to oil outlet pipe 6 by pipeline.
Cooling device 4 be a loop structure and including condenser 41, device for drying and filtering 42, expansion drum 43, in parallel
Four expansion valves 44, gas-liquid separator 45, air compressor 46 and oil 47.
Gas-liquid separator 45, air compressor 46 and oil 47 constitute refrigerating plant.
The one outlet of condenser 41 is connected to device for drying and filtering 42,43 pipeline of expansion drum respectively, device for drying and filtering 42 with
Expansion drum 43 is in parallel setting.Pressure-sensitive switch is provided between condenser 41 and device for drying and filtering 42, expansion drum 43
411.The first solenoid valve 431 is provided at the inlet port of expansion drum 43.Four expansion valves 44 and device for drying and filtering 42 are in tandem
Setting, and wherein three expansion valves 44 are connected to an inlet duct of evaporator 3, another expansion valve 44 and gas-liquid separator
The connection of 45 pipelines.Expansion drum 43 is connected to 45 pipeline of gas-liquid separator.Gas-liquid separator 45 is connected to 46 pipeline of air compressor.
Oil 47 is connected to 41 pipeline of condenser.Gas-liquid separator 45 be connected to 3 pipeline of evaporator and be provided between the two monitoring it is cold
But the first temperature inductor 48 of medium temperature.Second solenoid valve is provided between each expansion valve 44 and device for drying and filtering 42
441.Condenser 41 is connected to cooling water outlet 8,9 pipeline of cooling water inlet respectively.
PLC control device 10 and pressure-sensitive switch 411, the first solenoid valve 431, second solenoid valve 441, the first temperature sense
Device 48 is answered to be electrically connected.
In cooling device 4, cooling medium, which exchanges at condenser 41 with cooling water progress heat, reduces its temperature, and
Heat is carried out with temperature control oil at evaporator 3 and exchanges the temperature for reducing temperature control oil, to realize the refrigerating function to temperature control oil.It is cooling
Water successively carries out shuttling movement by cooling water inlet 9, condenser 41, cooling water outlet 8 and cooling water inlet 9；It is cold simultaneously
But medium successively passes through condenser 41, device for drying and filtering 42, expansion valve 44, evaporator 3, gas-liquid separator 45, air compressor
46, oil 47 arrives condenser 41 again and carries out shuttling movement.
By the way that parallel multiple expansion valves 44 are arranged, and second electromagnetism is correspondingly arranged before each expansion valve 44
Valve 441 can be realized the flow by controlling the cooling medium entered in evaporator 3 to control cooling efficiency, save resource.
Expansion drum 43 is set between condenser 41 and gas-liquid separator 45, when PLC control device 10 detects pipeline in cooling device 4
When interior pressure value is relatively low, expansion drum 43 squeezes into internal cooling medium in pipeline, feeds to pipeline, improves cooling dress
Set the pressures cycle in 4 inside pipeline.Cooling device 4 can not only control cooling effect by the unlatching number of expansion valve 44
Rate can also improve cooling efficiency by improving the flowing velocity in cooling device 4 inside pipeline.
Heating device 5 includes heating tube 51, heat exchanger 52.
Heating tube 51, heat exchanger 52 and 15 three intersection of the first electric T-shaped valve are provided with the second electric T-shaped valve
53, heating tube 51, heat exchanger 52 and the first electric T-shaped valve 15 are logical by three of pipeline and the second electric T-shaped valve 53 respectively
Mouth connection.Heating tube 51 is connected to 6 pipeline of oil outlet pipe.The second oil discharge outlet 511 is provided at heating tube 51.Heat exchanger 52 is distinguished
It is connected to cooling water outlet 8, cooling water inlet 9 by pipeline, and is connected to 51 pipeline of heating tube.Heat exchanger 52 and heating tube 51
Between be provided with first pressure sensor 54.Overtemperature prote module 55 is provided in heating tube 51.
PLC control device 10 is electrically connected with first pressure sensor 54.The 51, second electricity of temperature controller 11 and heating tube
Dynamic triple valve 53 is electrically connected.
In heating device 5, temperature control oil directly can carry out temperature adjustment to it by heating tube 51, can also be partially by changing
Hot device 52 reaches heating tube 51 again.Cooling water is successively by cooling water inlet 9, heat exchanger 52, cooling water outlet 8 and cooling water
Entrance 9 carries out shuttling movement, and temperature control oil carries out heat with cooling water at heat exchanger 52 and exchanges, to realize the temperature to temperature control oil
Degree adjustment.By temperature controller 11, it can be achieved that control to two rates of discharge in the second electric T-shaped valve 53, so as to reality
Now distribution is directly entered the flow of heating tube 51 and enters back into the flow of heating tube 51 after heat exchanger 52 according to demand, finally
Reach the function of being precisely controlled temperature control oil.
Oil outlet pipe 6 is disposed with second pressure sensing along direction of the traffic between heating device 5 and evaporator 3
Device 61, pressure gauge 62 and second temperature inductor 63.Second pressure sensor 61 is electrically connected with PLC control device 10；Second
Temperature inductor 63 is electrically connected with temperature controller 11.
Oil return line 7 is connected to by pipeline with gas collecting jar with ground-on cover plate 12 and is disposed with filter 71, third along direction of the traffic
Temperature inductor 72.Third temperature inductor 72 is electrically connected with PLC control device 10.
The present embodiment is a kind of working principle of high/low temperature hot oil control system cooling with second level are as follows: pumping 2 will control
Warm oil is pumped across the first electric T-shaped valve 15；PLC control device 10 according to the temperature feedback of third temperature inductor 72, and
The desired temperature that client needs, the judgement of PLC control device 10 carry out cooling and are still heated；If being cooled down, first
Electric T-shaped valve 15 is opened towards 4 direction of cooling device, during cooling device 4, the temperature difference size cooled down as needed,
The number and cooling medium inner flow velocity that PLC control device 10 and 11 co- controlling expansion valve 44 of temperature controller are opened are come
Realize the cooling to temperature control oil；If being heated, the first electric T-shaped valve 15 is opened towards 5 direction of heating device, is being heated
During device 5, the temperature difference size heated as needed, 11 the second electricity of co- controlling of PLC control device 10 and temperature controller
The opening degree of dynamic triple valve 53, distribution are directly entered the flow of heating tube 51 and enter back into heating tube 51 after heat exchanger 52
Flow, to realize heating to temperature control oil；Temperature control oil through apparatus for supercooling 4 or heating device 5 by oil outlet pipe 6 into
Enter into the equipment of client, is returned in gas collecting jar with ground-on cover plate 12 using oil return line 7, be exhausted by exhaust solenoid valve 13, be swollen
Swollen oil tank 1 carries out repairing, then is pumped into system by pumping 2 and carries out next circulating path.
The present embodiment is that a kind of beneficial effect of high/low temperature hot oil control system cooling with second level is: can be automatic
Temperature is detected, realizes the cooling automatic switchover with heating, and temperature control precision is high, stability is good, heating efficiency and refrigeration effect
Rate is high；It can realize that the temperature in -30 DEG C~200 DEG C sections is adjusted in a short time, and controllable precision reaches ± 0.1 DEG C.
Specifically,
1) heating device and refrigerating plant are integrated in unified pipeline, are obtained by automatic temperature-adjusting, setting needs temperature
The first electric T-shaped valve is automatically adjusted to control between the flow direction of thermally conductive medium realizes temperature-controlled area and maintain -30 DEG C~200
℃；
2) heating tube and heat exchanger are set in heating device, and are connected to by the second electric T-shaped valve, is controlled by PLC
Device controls the flow of the second electric three passes valve regulation cooling circuit and the power percentage of SCR control electric heating output,
Realize the automatic governing function of two kinds of heating modes, the temperature of systems stabilisation；
3) two-stage refrigerating mode is set in cooling device, is on the one hand freezed by air compressor；Another reverse side
It by the cooling medium after air compressor cools down at condenser, is cooled down twice through supercooled water, this setting is significantly
Improve cooling efficiency；
4) parallel expansion valve is set in cooling device, and is unified to be connected to evaporator, is controlled and is filled by PLC
The unlatching number of control expansion valve is set to control the flowing velocity of cooling medium in cooling device, to reach control cooling efficiency
Function；
5) by the way that the outlet of outlet and heating device through apparatus for supercooling is shared root canal road realization and loop exit
Connection, it is compact-sized, save space；
6) it is provided with temperature inductor at loop exit and loop head, can accurately monitors loop exit and follow
The temperature of ring inlet is precisely controlled degree of heat and cooling degree to realize, finally realizes that accurate control loop goes out
The temperature of the temperature control oil of mouth；
7) integrated design is used, the device space is saved, and to refrigeration system compact Layout, saves energy consumed by radiating
Amount, improves the heating efficiency and refrigerating efficiency of equipment.
Above-described is only some embodiments of the present invention.For those of ordinary skill in the art, not
Under the premise of being detached from the invention design, various modifications and improvements can be made, these belong to protection model of the invention
It encloses.
Claims (8)
1. a kind of high/low temperature hot oil control system cooling with second level, it is characterised in that: it includes oil outlet pipe, oil return pipe
Road, cooling device, heating device, pumping and cooling water system, the heating device and the cooling device summarize rear and institute
Oil outlet pipe connection is stated, the pumping is connected to the oil return line, the heating device and the cooling device pipeline, institute
State cooling device include with it is described pump the evaporator being connected to, the refrigerating plant that is connected to the evaporator and with the refrigeration
The condenser that device is connected to the evaporator, the condenser are connected to the cooling water system, in the refrigerating plant stream
It is provided on the pipeline of the evaporator in parallel several expansion valves, the expansion valve upstream is provided with the second electromagnetism
Valve；
The sky that the refrigerating plant includes the gas-liquid separator being connected to the evaporator, is connected to the gas-liquid separator pipeline
Air compressor, the oil being connected to the air compressor and the condenser and with the condenser and the gas-liquid separation
The expansion drum of device connection；
In the expansion valve, the outlet of one of expansion valve and the evaporator converges flows to the gas-liquid separator together.
2. the high/low temperature hot oil control system cooling with second level as described in claim 1, it is characterised in that: the pumping is logical
It crosses after the first electric T-shaped valve shunts and is connected to respectively with the cooling device, the heating device.
3. the high/low temperature hot oil control system cooling with second level as claimed in claim 2, it is characterised in that: further include PLC
Control device, the PLC control device are electrically connected with the pumping, first electric T-shaped valve.
4. the high/low temperature hot oil control system cooling with second level as described in claim 1, it is characterised in that: the refrigeration dress
It sets and is provided with device for drying and filtering on shunting the pipeline before being connected to the second solenoid valve.
5. the high/low temperature hot oil control system cooling with second level as described in claim 1, it is characterised in that: the heating dress
Set the heating tube including being connected to the pumping, the oil outlet pipe.
6. the high/low temperature hot oil control system cooling with second level as claimed in claim 5, it is characterised in that: the heating tube
On be provided with the second oil discharge outlet.
7. the high/low temperature hot oil control system cooling with second level as claimed in claim 3, it is characterised in that: further include expansion
Oil tank and gas collecting jar with ground-on cover plate, the gas collecting jar with ground-on cover plate are connected to after summarizing with the expansion oil tank with the pumping duct.
8. the high/low temperature hot oil control system cooling with second level as claimed in claim 7, it is characterised in that: the expansion oil
Pipeline connects and is provided with exhaust solenoid valve on the pipeline between tank and the gas collecting jar with ground-on cover plate, the exhaust solenoid valve with it is described
The electrical connection of PLC control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610503243.6A CN106016826B (en) | 2016-06-30 | 2016-06-30 | With the cooling high/low temperature hot oil control system of second level |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610503243.6A CN106016826B (en) | 2016-06-30 | 2016-06-30 | With the cooling high/low temperature hot oil control system of second level |
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| CN106016826A CN106016826A (en) | 2016-10-12 |
| CN106016826B true CN106016826B (en) | 2019-05-21 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108594903B (en) * | 2018-07-19 | 2023-12-05 | 常州阿科牧机械有限公司 | Superheated water temperature control system capable of being directly cooled and high in safety performance |
| CN110285574A (en) * | 2019-07-11 | 2019-09-27 | 苏州奥德机械有限公司 | A kind of precise temperature control system based on indirect heating and multistage cooling |
| CN110542210A (en) * | 2019-09-12 | 2019-12-06 | 苏州奥德机械有限公司 | Ultra-high temperature oil temperature machine with cooling control |
| CN112378113B (en) * | 2020-10-29 | 2022-02-18 | 北京京仪自动化装备技术有限公司 | Semiconductor temperature control device and method |
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| Publication number | Publication date |
|---|---|
| CN106016826A (en) | 2016-10-12 |
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