CN106003134A - Rotary joint used in vacuum high-temperature environment - Google Patents
Rotary joint used in vacuum high-temperature environment Download PDFInfo
- Publication number
- CN106003134A CN106003134A CN201610374451.0A CN201610374451A CN106003134A CN 106003134 A CN106003134 A CN 106003134A CN 201610374451 A CN201610374451 A CN 201610374451A CN 106003134 A CN106003134 A CN 106003134A
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- CN
- China
- Prior art keywords
- box base
- harmonic speed
- driving
- speed reducer
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
Abstract
The invention discloses a rotary joint used in a vacuum high-temperature environment. The rotary joint comprises a drive box base, a drive box cover, an upper rotating component, a lower rotating component, an internal drive mechanism and an internal rotating component; the drive box base and the drive box cover are connected into a whole through bolts, the drive box cover is arranged outside a rotating shaft in a nesting mode, a needle bearing is installed between the drive box cover and the rotating shaft in a relative rotation mode, the rotating shaft is fixed to the upper rotating component through bolts, the upper rotating component and the lower rotating component are connected through bolts, and the lower rotating component is installed at the protrusion part of the drive box base in a sleeving mode, rotates relative to the drive box base and is provided with a thrust bearing and a needle bearing. A motor, harmonic reducer fixing plates, harmonic reducer connectors and harmonic reducers form a joint drive mechanism fixed to the drive box cover, the input part of the rotating component is connected to the output parts of the harmonic reducers of the drive mechanism, and the output part of the rotating component is connected to the upper rotating component.
Description
Technical field
The present invention relates to Tokamak nuclear fusion experimental provision and use cradle head field, specifically a kind of for vacuum high-temperature
Cradle head under environment.
Background technology
Along with energy crisis is attacked day by day serious with environmental pollution, find the new forms of energy of green non-pollution, become pendulum people
A urgent task in face of class.Certainly, in many new forms of energy such as solar energy, wind energy, water energy, geothermal energy, nuclear fusion
The advantage that can fire one's imagination with it, becomes the optimal energy of human future.In this context, build controlled " artificial too
Sun ", become the common pursuit of countries in the world.In recent decades, domestic and international tokamak magnetic confinement nuclear fusion can be studied and achieve
The biggest progress.EAST (Experimental Advanced Superconducting Tokamak) is first as the whole world
Large-scale on-circular cross-section Superconducting tokamak nuclear fusion experimental device, the early stage for fusion energy applies the important engineering of offer and thing
Reason basis, make China magnetic confinement fusion research field enter forward position, the world and become the most important fusion research center it
One.
During EAST electric discharge, internal vacuum chamber parts are caused a certain degree of damage by high-temperature plasma cognition, thus affect
The runnability of device.For knowing clearly in the vacuum environment (10-6pa) not destroying in vacuum chamber and the ambient temperature of about 150 DEG C
Under conditions of enter vacuum chamber perform detection and maintenance task, the cradle head under a kind of vacuum available hot environment is developed out
Come.Multiple cradle heads can be linked together according to maintenance task difference and form the mechanical arm of multiple degree of freedom.
It is complicated that the maintenance joint of mechanical arm being applied in the world on tokamak device at present also exists structure, flexible big,
The shortcomings such as low precision.And in existing domestic robot research field, be difficult to find out one equally and may be used for target environment
The design of mechanical arm cradle head.It is thus desirable to design one to meet this extreme environment and own dimensions requirement also
The cradle head of output larger torque.
Summary of the invention it is an object of the invention to provide a kind of cradle head under vacuum high-temperature environment, existing to solve
There is the problem that technology joint of mechanical arm cannot meet tokamak device demand.
In order to achieve the above object, the technical solution adopted in the present invention is:
A kind of cradle head under vacuum high-temperature environment, it is characterised in that: there is the driving box base of cavity in including, and
Covering and be arranged on the driving lid driven on box base, described driving box base connects into entirety with driving lid, drives lid
Inside being provided with corrugated tube, drive lid top to be rotatablely equipped with rotating shaft by needle bearing, driving lid is stretched out in rotating shaft upper end, and turns
Axle upper end is fixedly connected with rotatable parts, forms projection, and drive bottom box base bottom described driving box base
Projection is rotatablely equipped with lower rotatable parts by needle bearing, lower rotatable parts and being equipped with between driving bottom box base
Thrust bearing, described in rotate up and down parts and extend to equidirectional side respectively, and rotate up and down parts extension and pass through spiral shell
Tether and connect；
Being provided with the harmonic speed reducer fixed plate of level in described driving box base cavity, harmonic speed reducer fixed plate top is provided with
One-level harmonic speed reducer, is provided with disc style D. C. motor, the motor of described disc style D. C. motor bottom harmonic speed reducer fixed plate
Axle is in transmission connection by the input of adaptor with one-level harmonic speed reducer, and the outfan of one-level harmonic speed reducer is fixedly connected with
Switching motherboard, is fixed with two grades of harmonic speed reducers in described driving lid, the input of two grades of harmonic speed reducers is fixedly connected with
The public plate of switching, and the public plate of switching is connected to one with the switching motherboard in driving box base, two grades of harmonic speed reducers defeated
Go out end and be fixed with two grades of harmonic speed reducer output flanges, the corrugated tube in described driving lid is embedded with the curved of form fit
Axle, cambered axle one end is fixing with two grades of harmonic speed reducer output flanges to be connected, and the cambered axle other end is fixing with upper rotatable parts to be connected, by
Cambered axle and two grades of harmonic speed reducer output flanges constitute revolving member；
Also include embedded circuit board, magnetic rotary encoder assembly, SMD temperature sensor, vacuum sealing joint, described
Embedded circuit board is arranged in driving lid, and magnetic rotary encoder assembly comprises an incremental encoder and one definitely
Formula encoder, each encoder all comprises Magnet and Hall chip, and both separate, and the Hall chip in each encoder is welded on
On embedded circuit board, the Magnet in each encoder is arranged on two grades of harmonic speed reducer output flanges, and SMD temperature passes
Sensor is sticked on disc style D. C. motor surface, and vacuum sealing plug is fixed on driving box base, described SMD temperature sensing
Device signal output part accesses embedded circuit board, the cable of described embedded circuit board and the power cable of disc style D. C. motor
It is connected with vacuum sealing joint respectively.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described driving box base with drive
It is provided with viton seal ring one between dynamic lid.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described corrugated tube left end flange
And drive and be provided with viton seal ring two between lid.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described corrugated tube right-hand member flange
And it is provided with viton seal ring three between cambered axle end face.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described cambered axle is by cambered axle leading portion
Constitute with cambered axle back segment, be bolted between two sections.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described driving box base, driving
Further respectively have hole on lid, upper rotatable parts and lower rotatable parts, connected by other cradle head of Kong Keyu, it is achieved the most certainly
By degree mechanism.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described absolute type magnetic code
The Magnet of device is the button Magnet of only a pair magnetic pole, the Magnet of increment type magnetic encoder corresponding for have 64 pairs of magnetic poles
Magnet ring, absolute type magnetic encoder provides the absolute position in joint, and increment type magnetic encoder provides higher articulation to divide
Resolution.
Described a kind of cradle head under vacuum high-temperature environment, it is characterised in that: described embedded circuit board is born
Duty gathers the temperature information on motor surface in articulation positional information and running, and transfers data to close by bus
Joint is outside.
The invention provides the close of a kind of cradle head under vacuum high-temperature environment, employing cambered axle and corrugated tube combination
Envelope mode replaces the movable sealing mode of complexity, compact overall structure, and the degree of modularity is high, can freely form multiple degrees of freedom machine
Mechanical arm.The present invention is also applicable in industrial circle, is especially useful for fine vacuum, under water or under many dust atmospheres complex environment.
The beneficial effects of the present invention is:
1, the present invention uses corrugated tube to combine the sealing means of cambered axle, simple in construction on cradle head.Many places use compact setting
Meter, overall dimensions is little, lightweight.
2, can be used for being not suitable for the examination and maintenance of device in the environment of people works, be particularly well-suited to the pole such as high temperature and vacuum
End ring border, such as EAST internal vacuum chamber.Modular mode can be used to be combined into the motion of different degree of freedom.
Accompanying drawing explanation
Fig. 1 is the contour structures schematic diagram of the present invention.
Fig. 2 is the internal structure schematic diagram of the present invention.
Fig. 3 is the double reduction gear attachment structure schematic diagram of the present invention.
Fig. 4 is the revolving member structural representation of the present invention, wherein: Fig. 4 a is revolving member overall schematic, and Fig. 4 b is
Cambered axle structural representation.
Fig. 5 is the black box sectional view of the present invention.
Fig. 6 is the magnetic encoder component diagram of the present invention.
Fig. 7 is the enforcement exemplary plot of the present invention.
Detailed description of the invention
As shown in figs 1 to 6.A kind of cradle head under vacuum high-temperature environment, including driving box base 4, drives box
Have cavity in base 4, drive box base 4 to be fixedly connected into entirety by bolt with driving lid 3, corrugated tube 5 by screw thread with
Drive lid 3 to connect, drive lid 3 to be nested in rotating shaft 11 outside, and drive to relatively rotate between lid 3 and rotating shaft 11 and be provided with
Needle bearing 6, rotating shaft 11 is fixing with upper rotatable parts 1 by bolt, and upper rotatable parts 1 are by bolt with lower rotatable parts 2 even
Connecing, lower rotatable parts 2 are sleeved between the projection driving box base 4, and lower rotatable parts 2 with driving box base 4 relative
Rotate and be provided with thrust bearing 7 and needle bearing 6；It is provided with harmonic speed reducer fixed plate in described driving box base 4 cavity
14, harmonic speed reducer fixed plate 14 is towards driving side, box base 4 top to be provided with one-level harmonic speed reducer 10, and harmonic speed reducer is solid
Determining plate 14 another side and be provided with disc style D. C. motor 8, disc style D. C. motor 8 is by motor shaft adaptor 17 and one-level harmonic reduction
The input of device 10 connects, and the outfan of one-level harmonic speed reducer 10 has been bolted switching motherboard 15, and two grades of harmonic waves subtract
The input of speed device 9 has been bolted the public plate 16 of switching, and switching motherboard 15 plate 16 public with switching is bolted one
Rising, two grades of harmonic speed reducers 9 are bolted on driving lid 3；Described driving lid 3 is set with revolving member 12, institute
State revolving member 12 and include two grades of harmonic speed reducer output flanges 18 and cambered axle 19, two grades of harmonic speed reducer output flanges 18 and two
The outfan of level harmonic speed reducer 9 is bolted, and it is internal that cambered axle 19 is nested in corrugated tube 5, and cambered axle 19 by bolt with
Upper rotatable parts 1 are fixed；
Also include embedded circuit board 24, SMD temperature sensor 25, vacuum sealing joint 26, described embedded circuit board 24
Being arranged in driving lid 3, magnetic rotary encoder assembly comprises an incremental encoder 27 and an absolute type encoder
28, incremental encoder 27 comprises the Magnet 27b of Hall chip 27a and only a pair magnetic pole, and absolute type encoder 28 comprises suddenly
You are chip 28a and the magnet ring 28b having 64 pairs of magnetic poles.Hall chip 27a and 28a is welded on embedded circuit board 24, Magnet 27b
Being arranged on two grades of harmonic speed reducer output flanges 18 with 28b, SMD temperature sensor 25 is sticked on disc type electric machine 8 surface,
Vacuum sealing plug 26 is fixed on driving box base 4, and described SMD temperature sensor 25 signal accesses embedded circuit board
24, cable and the motor power cable of described embedded circuit board 24 are connected with vacuum sealing joint 26 respectively.
Drive and be provided with viton seal ring 1 between box base 4 and driving lid 3.
It is provided with viton seal ring 2 23 between corrugated tube left end flange and driving lid 3.
It is provided with viton seal ring 3 22 between corrugated tube right-hand member flange and cambered axle end face.
Cambered axle is made up of cambered axle leading portion 21 and cambered axle back segment 20, is bolted between two sections.
As shown in Figure 1, Figure 2, Figure 4 shows, the present invention includes driving box base 4, driving lid 3, upper rotatable parts 1, lower rotation
Parts 2, rotating shaft 11 and the drive mechanism of inside, seal member and electric component.Box base 4 is wherein driven to pass through bolt and drive
Dynamic lid 3 connects into entirety, and corrugated tube 5 is connected with driving lid 3 by screw thread, drives lid 3 to be nested in rotating shaft 11 outside, and
Driving to relatively rotate between lid 3 and rotating shaft 11 and be provided with needle bearing 6, rotating shaft 11 is fixed with upper rotatable parts 1 by bolt,
Upper rotatable parts 1 are connected with lower rotatable parts 2 by bolt, and lower rotatable parts 2 are sleeved on the projection driving box base 4,
And lower rotatable parts 2 and drive and relatively rotate and be provided with thrust bearing 7 and needle bearing 6 between box base 4；Drive box base
Being provided with harmonic speed reducer fixed plate 14 in 4 cavitys, harmonic speed reducer fixed plate 14 is provided with towards driving side, box base 4 top
One-level harmonic speed reducer 10, harmonic speed reducer fixed plate 14 another side is provided with disc style D. C. motor 8, and disc style D. C. motor 8 leads to
Crossing motor shaft adaptor 17 to be connected with the input of one-level harmonic speed reducer 10, the outfan of one-level harmonic speed reducer 10 passes through spiral shell
Bolt is fixed with switching motherboard 15, and the input of two grades of harmonic speed reducers 9 has been bolted the public plate 16 of switching, motherboard 15 of transferring
Together with plate 16 public with switching is bolted, two grades of harmonic speed reducers 9 are bolted on driving lid 3；Drive
Lid 3 is set with revolving member 12, and wherein revolving member 12 includes two grades of harmonic speed reducer output flanges 18 and cambered axle 19, two grades
Harmonic speed reducer output flange 18 is bolted with the outfan of two grades of harmonic speed reducers 9, and cambered axle 19 is nested in corrugated tube 5
Inside, and cambered axle 19 is fixing with upper rotatable parts 1 by bolt, thus realize being driven by electric machine rotation rotating upwardly and downwardly parts
Rotate.
As shown in Figure 1, Figure 2, Figure 5, drive and fluorubber sealing is installed between box base 4 and driving 3 liang of contact surfaces of lid
Enclose 1, between corrugated tube left end flange and driving lid 3, be provided with viton seal ring 2 23, corrugated tube right-hand member flange and cambered axle
Being provided with viton seal ring 3 22 between end face, the installation of viton seal ring 13,22,23 ensure that driving box base 4 and drives
The sealing of dynamic lid 3 internal cavities.
As shown in Figure 2 and Figure 3, connecting through switching motherboard 15 and transferring public between first stage decelerator and two stage reducer
Plate completes, and switching motherboard 15 is connected with the outfan of first stage decelerator by bolt, and the public plate 16 of switching is subtracted by bolt and two grades
The input of speed device 9 is connected, and switching motherboard 15 plate 16 public with switching is fixed by draw-in groove and bolt, it is achieved the transmission of power.
As shown in Fig. 2, Fig. 4, Fig. 5, the realization of the movable sealing function of cradle head is mainly by revolving member 12, corrugated tube 5
And sealing ring 22,23 completes.Revolving member is made up of reducer output flange 18 and cambered axle 19, and cambered axle 19 is for ease of installing
Being made up of cambered axle leading portion 21 and cambered axle back segment 20 two sections, corrugated tube 5 is enclosed within cambered axle 19 outer surface, corrugated tube 5 one end and driving box
Lid 3 is threadably secured and passes through sealing ring 22 sealing contact surface, corrugated tube 5 other end by bolt and cambered axle leading portion 21 and
Upper rotatable parts 1 are fixed and pass through the contact surface of sealing ring 23 seal bellows 5 and cambered axle leading portion 21, during articulation
Corrugated tube constantly stretches, it is achieved that the sealing in whole articular cavity.
As shown in Fig. 2, Fig. 4, Fig. 6, electric part includes embedded circuit board 24, SMD temperature sensor 25 and vacuum
Seal nipple 26.Magnetic rotary encoder assembly comprises an incremental encoder 27 and an absolute type encoder 28, increment
Formula encoder 27 comprises the Magnet 27b of Hall chip 27a and only a pair magnetic pole, and absolute type encoder 28 comprises Hall chip
28a and the magnet ring 28b having 64 pairs of magnetic poles.Hall chip 27a and 28a is welded on embedded circuit board 24, Magnet 27b and 28b
Being arranged on two grades of harmonic speed reducer output flanges 18, SMD temperature sensor 25 is sticked on disc type electric machine 8 surface, and vacuum is close
Envelope plug 26 is fixed on driving box base 4, and described SMD temperature sensor 25 signal accesses embedded circuit board 24, embeds
It is internal that formula circuit board 24 is fixed on driving lid 3, the most resistance to 150 DEG C of high temperature of all components and parts on it, is responsible for gathering the position in joint
The temperature information on motor surface in information and running, is transferred to remotely control on card by the information processed by bus.
Cable and the motor power cable of described embedded circuit board 24 are connected with vacuum sealing joint 26 respectively.
Being illustrated in figure 7 the present invention for the multi-degree-of-freemechanical mechanical arm that modular combination becomes, this mechanical arm can realize bigger
The flexible motion of scope, is realized joint interconnected by cylinder and the inner link of band connecting hole between each module, additionally can root
Suitable motor and decelerator is may select according to loading moment size.
Claims (8)
1. the cradle head under vacuum high-temperature environment, it is characterised in that: there is the driving box base of cavity in including, with
And covering the driving lid being arranged on driving box base, described driving box base connects into entirety with driving lid, drives box
Being provided with corrugated tube in lid, drive lid top to be rotatablely equipped with rotating shaft by needle bearing, driving lid is stretched out in rotating shaft upper end, and
Rotating shaft upper end is fixedly connected with rotatable parts, forms projection, and drive at the bottom of box base bottom described driving box base
Portion's projection is rotatablely equipped with lower rotatable parts by needle bearing, lower rotatable parts and assembling between driving bottom box base
Have thrust bearing, described in rotate up and down parts and extend to equidirectional side respectively, and rotate up and down parts extension and pass through
Bolt connects；
Being provided with the harmonic speed reducer fixed plate of level in described driving box base cavity, harmonic speed reducer fixed plate top is provided with
One-level harmonic speed reducer, is provided with disc style D. C. motor, the motor of described disc style D. C. motor bottom harmonic speed reducer fixed plate
Axle is in transmission connection by the input of adaptor with one-level harmonic speed reducer, and the outfan of one-level harmonic speed reducer is fixedly connected with
Switching motherboard, is fixed with two grades of harmonic speed reducers in described driving lid, the input of two grades of harmonic speed reducers is fixedly connected with
The public plate of switching, and the public plate of switching is connected to one with the switching motherboard in driving box base, two grades of harmonic speed reducers defeated
Go out end and be fixed with two grades of harmonic speed reducer output flanges, the corrugated tube in described driving lid is embedded with the curved of form fit
Axle, cambered axle one end is fixing with two grades of harmonic speed reducer output flanges to be connected, and the cambered axle other end is fixing with upper rotatable parts to be connected, by
Cambered axle and two grades of harmonic speed reducer output flanges constitute revolving member；
Also include embedded circuit board, magnetic rotary encoder assembly, SMD temperature sensor, vacuum sealing joint, described
Embedded circuit board is arranged in driving lid, and magnetic rotary encoder assembly comprises an incremental encoder and one definitely
Formula encoder, each encoder all comprises Magnet and Hall chip, and both separate, and the Hall chip in each encoder is welded on
On embedded circuit board, the Magnet in each encoder is arranged on two grades of harmonic speed reducer output flanges, and SMD temperature passes
Sensor is sticked on disc style D. C. motor surface, and vacuum sealing plug is fixed on driving box base, described SMD temperature sensing
Device signal output part accesses embedded circuit board, the cable of described embedded circuit board and the power cable of disc style D. C. motor
It is connected with vacuum sealing joint respectively.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described driving
It is provided with viton seal ring one between box base and driving lid.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described ripple
It is provided with viton seal ring two between pipe left end flange and driving lid.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described ripple
It is provided with viton seal ring three between pipe right-hand member flange and cambered axle end face.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described cambered axle
It is made up of cambered axle leading portion and cambered axle back segment, is bolted between two sections.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described driving
Hole is further respectively had, by other cradle head of Kong Keyu even on box base, driving lid, upper rotatable parts and lower rotatable parts
Connect, it is achieved multiple-degree-of-freedom mechanism.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described definitely
The Magnet of formula magnetic encoder is the button Magnet of only a pair magnetic pole, the Magnet of increment type magnetic encoder corresponding for having
The magnet ring of 64 pairs of magnetic poles, absolute type magnetic encoder provides the absolute position in joint, and increment type magnetic encoder provides higher
Articulation resolution.
A kind of cradle head under vacuum high-temperature environment the most according to claim 1, it is characterised in that: described embedding
Formula circuit board is responsible for gathering the temperature information on motor surface in articulation positional information and running, and by bus by number
According to being transferred to outside joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610374451.0A CN106003134B (en) | 2016-05-26 | 2016-05-26 | Rotary joint used in vacuum high-temperature environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610374451.0A CN106003134B (en) | 2016-05-26 | 2016-05-26 | Rotary joint used in vacuum high-temperature environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106003134A true CN106003134A (en) | 2016-10-12 |
| CN106003134B CN106003134B (en) | 2020-09-29 |
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ID=57091630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610374451.0A Active CN106003134B (en) | 2016-05-26 | 2016-05-26 | Rotary joint used in vacuum high-temperature environment |
Country Status (1)
| Country | Link |
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| CN (1) | CN106003134B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830123A (en) * | 2017-10-26 | 2018-03-23 | 万鑫精工（湖南）有限公司 | A kind of high transmission ratio two-stage harmonic speed reducer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2459646A1 (en) * | 1974-01-15 | 1975-07-17 | Gachot Sa | DEVICE FOR TRANSMITTING A ROTATING MOTION OF ANY AMPLITUDE THROUGH A DENSE WALL |
| JP2007007815A (en) * | 2005-07-01 | 2007-01-18 | Sony Corp | Robot device and actuator |
| CN101130245A (en) * | 2007-09-27 | 2008-02-27 | 上海交通大学 | Active wrist mechanism used for mechanical arm or snake shaped robot |
| CN102821858A (en) * | 2009-11-23 | 2012-12-12 | 赛多利斯埃塞普蒂克公司 | Improvements to the tight connection and tight transfer between two housings in view of an aseptic transfer therebetween |
| US20110298309A1 (en) * | 2010-06-04 | 2011-12-08 | Robotis Co., Ltd. | Actuator module applicable to various forms of joint |
| CN103182712A (en) * | 2011-12-29 | 2013-07-03 | 沈阳新松机器人自动化股份有限公司 | Manipulator with gas guide ring |
| CN104812534A (en) * | 2012-11-30 | 2015-07-29 | 应用材料公司 | Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods |
| US20150224651A1 (en) * | 2014-02-11 | 2015-08-13 | Gimatic S.P.A. | Protective casing of robot grippers |
| CN203697030U (en) * | 2014-02-25 | 2014-07-09 | 北京邮电大学世纪学院 | Robot wrist mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830123A (en) * | 2017-10-26 | 2018-03-23 | 万鑫精工（湖南）有限公司 | A kind of high transmission ratio two-stage harmonic speed reducer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106003134B (en) | 2020-09-29 |
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