CN105987659A - Differential capacitance sensor fixed plate with composite structure and manufacturing method thereof - Google Patents
Differential capacitance sensor fixed plate with composite structure and manufacturing method thereof Download PDFInfo
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- CN105987659A CN105987659A CN201610537282.8A CN201610537282A CN105987659A CN 105987659 A CN105987659 A CN 105987659A CN 201610537282 A CN201610537282 A CN 201610537282A CN 105987659 A CN105987659 A CN 105987659A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a differential capacitance sensor fixed plate with a composite structure and a manufacturing method thereof, which relate to a differential capacitance sensor plate structure. The fixed plate is composed of a substrate (1), a capacitance coating (2), a shielding coating (3) and a conductive inclined plane (4), wherein the front face of the substrate (1) is provided with the capacitance coating (2); the back face of the substrate (1) is provided with the shielding coating (3); and the left end surface of the substrate (1) and the capacitance coating (2) is provided with the conductive inclined plane (4). Due to the composite structure, the capacitance sensor has a simple structure and excellent mechanical stability, can work stably in different environments, and is applicable to a high-precision capacitive displacement sensor.
Description
Technical field
The present invention relates to the electrode plate structure of a kind of differential capacitance sensor, differential capacitance sensor fixed plate particularly relating to a kind of composite construction and preparation method thereof.
Background technology
Existing dipmeter is most uses the change in displacement relative to apparatus frame for the Capacitive Displacement Sensor With High Accuracy measurement pendulum mass；And the certainty of measurement of capacitance displacement sensor and stability are closely related with the change of polar plate area, shape, surface roughness and capacitor plate spacing.The plate electrode being made up of block of metal is seldom to should have less edge effect, have less temperature expansion coefficient and a structure also with less stress deformation coefficient again.
Content of the invention
The purpose of the present invention is that and overcomes the low error brought to measurement of existing capacitance displacement sensor stability, differential capacitance sensor fixed plate that a kind of composite construction is provided and preparation method thereof, reduce edge effect, deformation when reducing temperature change and being deformed during by stress, has higher stability and higher sensitivity.
The present invention solves its technical problem and the technical scheme is that
1st, two kinds of different Material claddings are used to constitute fixed plates: substrate uses that temperature expansion coefficient is little, stress deformation coefficient is little, dielectric constant is stable, surface can be processed into the insulating materials of minute surface, it is ensured that the geometrical shape stability of sensor fixed plate and coating smooth bright and clean；Another kind of material is the good metal of good conductivity, compliance, use coating method on the positive and negative surface of substrate coating respectively；Front coating is as sensor fixed plate electrode, it is desirable to thickness is little, highly polished, the edge effect that minimizing electrode thickness brings and the noise that polar board surface roughness is brought；Back side coating plays shielding action, it is desirable to cover the back side of whole substrate, forms the electric capacity using baseplate material as medium as a part of displacement-capacitance electric bridge simultaneously；
2nd, cutting with the inclined-plane of narrow width at the top of substrate with measurement coating junction, this chamfered surface is gold-plated, is positioned at outside effective area, plays conduction；External wire is connected on inclined-plane, while wire can be made to be connected to measurement coating, does not impacts the electric capacity of sensor；Owing to substrate is insulating materials and the volume that account for the fixed plate overwhelming majority so that fixed plate has the temperature expansion coefficient identical with baseplate material and stress deformation coefficient, insensitive to temperature change and stress changes；Thickness of coating is very thin, reduces the edge effect that fixed plate thickness causes；Gold-plated inclined-plane is used to connect external wire outside effective area, it is to avoid the impact on sensor capacitance value for the connecting position of wires.
First, the differential capacitance sensor fixed plate (abbreviation fixed plate) of composite construction
Fixed plate is made up of substrate, electric capacity coating, Shielding coating and conduction inclined-plane；
The front of substrate is provided with electric capacity coating, the back side of substrate is provided with Shielding coating, the left side of substrate and electric capacity coating is provided with conduction inclined-plane.
2nd, the preparation method (abbreviation method) of the differential capacitance sensor fixed plate of composite construction
This method comprises the following steps:
1. use high precision machine tool, substrate front side and the back side are processed into minute surface；
2. use high precision machine tool, the edge that substrate is connected with electric capacity coating is cut into conduction inclined-plane；
3. use magnetron sputtering technology, the front of substrate is plated the coat of metal；
4. magnetron sputtering technology, on the back of the substrate the plating shielding coat of metal are used；
5. magnetron sputtering technology is used, gold-plated on conduction inclined-plane.
The present invention has following advantages and a good effect:
1. use the insulating materials that mechanical stability is high as baseplate material, it is ensured that the change in shape etc. that substrate is not caused by temperature and stress is affected；
2. pole plate conductive layer uses the very thin and highly polished coat of metal, while reaching Sensor Design requirement, and the error that the impact of the edge effect reducing capacitor is caused；
3. the inclined-plane outside effective area, provides the join domain that the coat of metal is connected to sensor circuit, it is possible to reduce circuit connects the error brought to pole plate.
This composite construction makes capacitor sensor structure simple, and mechanical stability is fabulous, can stably work under various circumstances, it is adaptable to Capacitive Displacement Sensor With High Accuracy.
Brief description
Fig. 1 is the structural representation of fixed plate.
In figure:
1 substrate；
2 electric capacity coating；
3 Shielding coatings；
4 conduction inclined-planes.
Detailed description of the invention
Describe in detail with embodiment below in conjunction with the accompanying drawings.
First, fixed plate
1st, overall
Such as Fig. 1, fixed plate is made up of substrate the 1st, electric capacity coating the 2nd, Shielding coating 3 and conduction inclined-plane 4；
The front of substrate 1 is provided with electric capacity coating 2, the back side of substrate 1 is provided with Shielding coating 3, be provided with conduction inclined-plane 4 in the left side of substrate 1 and electric capacity coating 2.
2nd, functional part
1) substrate 1
Substrate 1 is a kind of thermal coefficient of expansion and the little insulation cuboid of stress deformation coefficient, such as lucite cuboid.
2) electric capacity coating 2
Electric capacity coating 2 is a kind of electric conductivity and uniform, the very thin coat of metal minute surface of all excellent thickness of ductility.
3) Shielding coating 3
Shielding coating 3 is a kind of electric conductivity and uniform, the very thin coat of metal minute surface of all excellent thickness of ductility.
4) conduction inclined-plane 4
Conduction inclined-plane 4 is a kind of electric conductivity and uniform, the very thin coat of metal minute surface of all excellent thickness of ductility；
Conduction inclined-plane 4 becomes 45 jiaos with the front of substrate 1.
Use conducting resinl by external world's wire adhesion on conduction inclined-plane 4.
Claims (6)
1. the differential capacitance sensor fixed plate of a composite construction, it is characterised in that:
It is made up of substrate (1), electric capacity coating (2), Shielding coating (3) and conduction inclined-plane (4)；
The front of substrate (1) is provided with electric capacity coating (2), the back side of substrate (1) is provided with Shielding coating (3), be provided with conduction inclined-plane (4) in the left side of substrate (1) and electric capacity coating (2).
2. the differential capacitance sensor fixed plate of the composite construction as described in claim 1, it is characterised in that:
Described substrate (1) is a kind of thermal coefficient of expansion and the little insulation cuboid of stress deformation coefficient.
3. the differential capacitance sensor fixed plate of the composite construction as described in claim 1, it is characterised in that:
Described electric capacity coating (2) is a kind of electric conductivity and uniform, the very thin coat of metal minute surface of all excellent thickness of ductility.
4. the differential capacitance sensor fixed plate of the composite construction as described in claim 1, it is characterised in that:
Described Shielding coating (3) is a kind of electric conductivity and uniform, the very thin coat of metal minute surface of all excellent thickness of ductility.
5. the differential capacitance sensor fixed plate of the composite construction as described in claim 1, it is characterised in that:
Described conduction inclined-plane (4) is a kind of electric conductivity and uniform, the very thin coat of metal minute surface of all excellent thickness of ductility；
Conduction inclined-plane (4) becomes 45 jiaos with the front of substrate (1)；
Use conducting resinl by external world's wire adhesion in conduction inclined-plane (4).
6. the preparation method of the differential capacitance sensor fixed plate of the composite construction as described in claim 1-5, it is characterised in that comprise the following steps:
1. use high precision machine tool, substrate (1) front and back is processed into minute surface；
2. use high precision machine tool, the edge that substrate (1) is connected with electric capacity coating (2) is cut into conduction inclined-plane (4)；
3. use magnetron sputtering technology, the front of substrate (1) is plated the coat of metal (2)；
4. magnetron sputtering technology is used, the plating shielding coat of metal (3) on the back side of substrate (1)；
5. magnetron sputtering technology is used, upper gold-plated in conduction inclined-plane (4).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610183833 | 2016-03-29 | ||
| CN2016101838335 | 2016-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105987659A true CN105987659A (en) | 2016-10-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610537282.8A Pending CN105987659A (en) | 2016-03-29 | 2016-07-10 | Differential capacitance sensor fixed plate with composite structure and manufacturing method thereof |
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| CN (1) | CN105987659A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908943A (en) * | 2017-03-20 | 2017-06-30 | 北京航空航天大学 | A kind of high-accuracy microscope example real-time range and apparatus for measuring degree of inclination |
Citations (6)
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| DE4024052A1 (en) * | 1990-07-28 | 1992-01-30 | Karl Marx Stadt Tech Hochschul | Capacitive sensor for measuring geometric abnormalities - has differential electronic sensor stage coupled to measuring and reference capacitor electrodes |
| WO2010133006A1 (en) * | 2009-05-20 | 2010-11-25 | Norgren, Inc. | Capacitive linear displacement sensor and cylinder device |
| CN101922909A (en) * | 2010-03-09 | 2010-12-22 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision capacitance-type displacement sensor for direct non-contact detection of mirror surface high-low difference |
| CN203298719U (en) * | 2013-06-09 | 2013-11-20 | 湖北康擎重工科技有限公司 | Capacitance-type sensor capable of simultaneously measuring inclination angle and roll angle |
| CN203882298U (en) * | 2014-05-16 | 2014-10-15 | 上海科勒电子科技有限公司 | Capacitive-touch display device with film coated mirror surface |
| CN205843594U (en) * | 2016-03-29 | 2016-12-28 | 中国地震局地震研究所 | A kind of differential capacitance sensor fixed plate of composite construction |
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2016
- 2016-07-10 CN CN201610537282.8A patent/CN105987659A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4024052A1 (en) * | 1990-07-28 | 1992-01-30 | Karl Marx Stadt Tech Hochschul | Capacitive sensor for measuring geometric abnormalities - has differential electronic sensor stage coupled to measuring and reference capacitor electrodes |
| WO2010133006A1 (en) * | 2009-05-20 | 2010-11-25 | Norgren, Inc. | Capacitive linear displacement sensor and cylinder device |
| CN101922909A (en) * | 2010-03-09 | 2010-12-22 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision capacitance-type displacement sensor for direct non-contact detection of mirror surface high-low difference |
| CN203298719U (en) * | 2013-06-09 | 2013-11-20 | 湖北康擎重工科技有限公司 | Capacitance-type sensor capable of simultaneously measuring inclination angle and roll angle |
| CN203882298U (en) * | 2014-05-16 | 2014-10-15 | 上海科勒电子科技有限公司 | Capacitive-touch display device with film coated mirror surface |
| CN205843594U (en) * | 2016-03-29 | 2016-12-28 | 中国地震局地震研究所 | A kind of differential capacitance sensor fixed plate of composite construction |
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| 曹河等: "同面多电极电容传感器结构仿真研究", 《传感器与微系统》 * |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908943A (en) * | 2017-03-20 | 2017-06-30 | 北京航空航天大学 | A kind of high-accuracy microscope example real-time range and apparatus for measuring degree of inclination |
| CN106908943B (en) * | 2017-03-20 | 2019-05-10 | 北京航空航天大学 | A kind of high-accuracy microscope example real-time range and apparatus for measuring degree of inclination |
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Effective date of registration: 20161010 Address after: 430071 Hongshan Road, Wuchang District, Hubei, No. 40, No. Applicant after: Earthquake Inst., China Earthquake Bureau Applicant after: Wuhan Institute of Scientific Instruments Co., Ltd. Address before: No. 11 Changjiang industrial park at 437100 Avenue Xianning city of Hubei Province, Xian'an District Applicant before: Wuhan Institute of Scientific Instruments Co., Ltd. |
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Application publication date: 20161005 |
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