CN105976833A - Head assembly and magnetic disk device - Google Patents
Head assembly and magnetic disk device Download PDFInfo
- Publication number
- CN105976833A CN105976833A CN201610143596.XA CN201610143596A CN105976833A CN 105976833 A CN105976833 A CN 105976833A CN 201610143596 A CN201610143596 A CN 201610143596A CN 105976833 A CN105976833 A CN 105976833A
- Authority
- CN
- China
- Prior art keywords
- slide block
- support plate
- slider support
- vibration absorber
- counterweight part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/4826—Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/484—Integrated arm assemblies, e.g. formed by material deposition or by etching from single piece of metal or by lamination of materials forming a single arm/suspension/head unit
Landscapes
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
- Vibration Prevention Devices (AREA)
Abstract
To control the resonance generated in the head assembly and improve property on the head location controlling. A head assembly (20) includes: a slider (3) having a head element (7); a slider supporting plate (20) for holding the slider (3); a load beam (14) for holding the slider supporting plate (20); a support projection (21) which is arranged on the front end part of the load beam and on which the slider supporting plate is supported rotatably; a drive unit (16a, 16b) that rotates the slider supporting plate around the support projection; a dynamic vibration absorber (33) arranged on the slider supporting plate, wherein the dynamic vibration absorber is disposed closer to the rear end side of the load beam than the support projection and has vibration freedom in the rotating direction of the slide supporting plate.
Description
Technical field
The present invention relates to the head stack of the precision positioning mechanism with magnetic head in hard disk drive
And disk set.
Background technology
In recent years, be arranged at disk set disk packing density just make rapid progress towards
Densification develops.Patent documentation 1 proposes by piezoelectric element head support coiling machine
Structure carries out small driving and magnetic head is positioned recording track (recording track) accurately
Head support mechanism.
It addition, propose slide block in patent documentation 2 to be arranged at load beam (load beam)
Fulcrum projection pivot about and the axes of inertia of the rotating part that comprises slide block are dashed forward with fulcrum
Play the most consistent structure.
But, in the structure of patent documentation 1, a pair biasing member make slide block micro-displacement
When counteracting force make head support spring resonate.Therefore, have to magnetic head unit
The problem that part carries out being unable to extend control area etc. due to this resonance after positioning at a high speed.
It addition, the structure of patent documentation 2, at slide block with the fulcrum of load beam (load beam)
The when of being driven in rotation centered by projection, there is the yaw direction (Yaw direction) of slide block
Rotary mode.From now on, in order to further expand the control area of magnetic head location, it is necessary to enter
One step sets the resonance of the yaw mode of slide block higher.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Patent Application Laid-open 2-227886 publication
Patent documentation 2: No. 5360129 publications of Japanese Patent No.
In existing structure, magnetic head element is positioned magnetic track on a drum or a disk when, cause
The operating frequency of dynamic device (actuator) can excite the resonant frequency of head support mechanism and make magnetic
Head support mechanism produces unwanted vibration.Therefore, existing structure existence is only capable of to obtain and is not subject to
The problem of the low control area etc. of the impact of resonance.
Summary of the invention
The present invention is the invention completed in view of above-mentioned condition, it is intended that suppression produces
Resonating and improving the control characteristic that magnetic head positions in head stack.
Head stack involved in the present invention, it is characterised in that possess: slide block, has magnetic head
Element；Slider support plate, keeps slide block；Load beam (load beam), keeps slider support plate；
Fulcrum projection, is arranged at leading section and the rotatably support slipper gripper shoe of load beam；
Drive member, makes slider support plate rotate centered by fulcrum projection；Dynamic vibration absorber (dynamic
Vibration absorber), it is arranged at slider support plate；Dynamic vibration absorber is than fulcrum projection more position
In the rear end side of load beam and have the freedom of vibration relative to the direction of rotation of slider support plate
Degree.
According to the present invention, because being arranged at the dynamic vibration absorber of slider support plate than fulcrum projection
More it is positioned at the rear end side of load beam and relative to the direction of rotation of slider support plate, there is vibration
Degree of freedom, it is possible to the resonance peak of the swaying pattern (Sway mode) of suppression load beam is also
And the whirling vibration of the yaw direction of slide block can be suppressed on the antiresonance point of dynamic vibration absorber.
Thereby, it is possible to improve magnetic head location control characteristic and can reduce counterweight itself and can
Seek lightweight.
Dynamic vibration absorber preferably can have counterweight part, counterweight part is linked to slider support plate
Spring, suppression counterweight part carry out the damping of the amplitude vibrated relative to slider support plate
(damping) portion.Thereby, it is possible to damping and amortization to be additional to action and the energy of dynamic vibration absorber
Enough obtain stable characteristic.
Counterweight part preferably can have and revolved relative to fulcrum projection by the magnetic head element with slide block
The vibration in the identical direction, direction turned and carry out the first resonance point resonated, the first resonance point is
The frequency of resonant frequency higher than the swaying pattern of load arm.Thereby, it is possible to suppression load beam
Swaying pattern.
Counterweight part, spring and damper portion preferably can be by using layer to flexible element (flexure)
Laminate materials is etched processing and arranges.Thereby, it is possible to easily and at low cost power is inhaled
The device that shakes is formed in slider support plate.
Counterweight part preferably can have Mass adjust-ment portion.Thereby, it is possible to accurately power is inhaled
The antiresonant frequency of device of shaking is adjusted to the frequency being necessary to carry out suppressing.
Disk set involved in the present invention, it is characterised in that be equipped with said head assembly.
In accordance with the invention it is possible to obtain a kind of can suppress head stack produce resonance and can
Improve the disk set of the control characteristic of magnetic head location.
The present invention can suppress resonate what head stack produced and can improve magnetic head location
Control characteristic.It addition, there is no need add new operation and magnetic head element can be made with low price
Relative to recording track positioning precision improve.
Accompanying drawing explanation
Fig. 1 is the disk of the preferred embodiment involved head stack being equipped with the present invention
The general view of device.
Fig. 2 is the axonometric chart of the preferred embodiment involved head stack of the present invention.
Fig. 3 is the exploded perspective view of the preferred embodiment involved head stack of the present invention.
Fig. 4 is the flexibility that the preferred embodiment involved head stack of the present invention is possessed
The exploded perspective view of part.
Fig. 5 a is the 1 that the preferred embodiment involved head stack of the present invention is possessed
The plane graph of drive member.
Fig. 5 b is the Section A-A figure in Fig. 5 a.
Fig. 5 c is the section B-B figure in Fig. 5 a.
Fig. 6 is the preferred embodiment involved head stack of the present invention in terms of upper face side
The plane graph of front main portion.
Fig. 7 is the preferred embodiment involved head stack of the present invention in terms of following side
The plane graph of front main portion.
Fig. 8 a is the C-C sectional view in Fig. 6.
Fig. 8 b is the D-D sectional view in Fig. 6.
Fig. 8 c is the F-F sectional view in Fig. 6.
Fig. 8 d is the G-G sectional view in Fig. 6.
Fig. 8 e is the H-H sectional view in Fig. 6.
Fig. 8 f is the E-E sectional view in Fig. 6.
Fig. 9 is the figure of the operating state representing dynamic vibration absorber.
Figure 10 a is the J-J sectional view in Fig. 6.
Figure 10 b is the I-I sectional view in Fig. 6.
Figure 11 a is a simplified the illustraton of model of one embodiment of the present of invention of the structure of Fig. 6.
Figure 11 b is to simplify slide block in one embodiment of the invention to be driven by the 1st and the 2nd
Move component and pivot about, with fulcrum projection, the model that the situation of motion is indicated
Figure.
Figure 11 c is to simplify slide block in one embodiment of the invention to be driven by the 1st and the 2nd
Move component and pivot about, with fulcrum projection, the model that the situation of motion is indicated
Figure.
Figure 11 d is to further simplify slide block, slider support in one embodiment of the invention
Plate, the illustraton of model of dynamic vibration absorber.
Figure 11 e is to represent to further simplify slide block, slide block in one embodiment of the invention
Gripper shoe, the figure of operating state of model of dynamic vibration absorber.
Figure 12 is for carrying out the control block chart that the location of magnetic head controls.
Figure 13 a is not have the blank performance plot in the case of gain margin in magnetic head locating features.
Figure 13 b is the blank characteristic in the case of gain margin is 10dB in magnetic head locating features
Figure.
Figure 13 c is the blank characteristic in the case of gain margin is 20dB in magnetic head locating features
Figure.
Figure 14 is the letter of the action for the dynamic vibration absorber in one embodiment of the present of invention is described
Easily illustraton of model.
Figure 15 a is the figure of the frequency response characteristic representing the action for dynamic vibration absorber is described.
Figure 15 b is the figure of the frequency response characteristic representing the action for dynamic vibration absorber is described.
Figure 15 c is the figure of the frequency response characteristic representing the action for dynamic vibration absorber is described.
Figure 16 is the location of the magnetic head element representing the head stack in one embodiment of the present of invention
The figure of frequency response characteristic.
Figure 17 is to represent the damping characteristic effect in the head stack in one embodiment of the present of invention
The figure of frequency response characteristic.
Figure 18 is the plane of the front main portion of the head stack of the first conventional example in terms of upper face side
Figure.
Figure 19 a is the structural model figure of the head stack of the first conventional example.
Figure 19 b is the action diagram in the structural model of the head stack of the first conventional example.
Figure 19 c is the simple diagram of the resonance for the load beam in the first conventional example is described.
Figure 19 d is that the location frequency of the magnetic head element in the head stack representing the first conventional example rings
Answer the figure of characteristic.
Figure 20 is the plane of the front main portion of the head stack of the second conventional example in terms of upper face side
Figure.
Figure 21 a is the structural model figure of the head stack of the second conventional example.
Figure 21 b is the action diagram in the structural model of the head stack of the first conventional example.
Figure 21 c is rotating part and the counterweight that further simplify slide block in the second conventional example
The illustraton of model of (counter balance).
Figure 21 d is the structure of the resonance not producing load beam for explanation in the second conventional example
Simple diagram.
Figure 21 e is that the location frequency of the magnetic head element in the head stack representing the second conventional example rings
Answer the figure of characteristic.
Detailed description of the invention
Hereinafter, referring to the drawings, preferred embodiment illustrating the present invention.Further,
The present invention is not limited to following embodiment.It addition, at following described structural element
Include the key element that those skilled in the art can easily imagine or the key element being substantially the same.Again
Having, structural element described below can be appropriately combined.It addition, without departing from the present invention's
In the range of purport, the various omissions of structural element or displacement or change are possible.
Fig. 1 is the preferred embodiment involved magnetic being diagrammatically denoted by being equipped with the present invention
The integrally-built figure of the disk set (HDD device) of the loading/unloading manner of head assembly.Root
According to Fig. 1, disk set 1 is by casing (housing) 4, revolved by spindle motor centered by axle 5
The slide block 3 turn the disk 6 driven, having magnetic head element 7 is installed in the head stack of leading section
2, the support arm 8 supporting this head stack 2 in leading section is constituted.
Rearward end at support arm 8 is provided with the coil portion of voice coil motor (VCM).Support arm
8 surface with disk 6 can rotate centered by feathering axis 9 with paralleling.VCM
It is made up of its magnet part 10 of this coil portion (do not have diagram) and covering.Data from disk 6
The outside in region is provided with slope mechanism (ramp mechanism) 11 throughout the outside of disk 6,
The table of this inclination it is stranded in by being arranged at the tab (tab) 12 foremost of head stack 2
Face thus slide block 3 separately become the state of unloading from disk 6.
When the action of disk set 1 (in the high speed rotating of disk), slide block 3 is relative to disk
The surface of 6 is in loading condition so that the float-amount of a little carries out floating.On the other hand, non-
During action (in the low speed rotation in the stopping of disk or when starting and stop), because magnetic head
The tab 12 of the leading section of assembly 2 is lifted by slope mechanism 11, so slide block 3 is in unloading
State.
Fig. 2 be diagrammatically denoted by the present invention preferred embodiment in head stack whole
The axonometric chart of body structure.Further, after, for convenience of description, by the Z axis positive direction of accompanying drawing
Be referred to as head stack 2 upper face side, Z axis negative direction is referred to as head stack 2 rear side or
Person following side.Slide block 3 is in rear end (trailing edge, the Y-axis positive direction side of Fig. 2) face of slide block 3
On possess by sensing write head element, giant magnetoresistance effect (GMR) magnetic reading head element or
The MR of tunnel magneto-resistance effect (TMR) magnetic reading head element etc. reads the magnetic that film magnetic head is constituted
Head element 7.
In fig. 2, head stack 2 possesses the base plate 13 of the structural element main as it, bears
Carrier beam (load beam) 14, flexible element (flexure) the 15, the 1st drive member 16a that is the 1st
Film piezoelectric element and the 2nd drive member 16b that is the 2nd film piezoelectric element, slide block 3.
Further, flexible element 15 is formed with dynamic vibration absorber 33.It addition, base plate 13 is with mounted
Form in the leading section of support arm 8 is constituted.
Load beam 14 is fixed on by multiple bundle pads (beam welding point) 17a
Base plate 13.It addition, leaf spring 18 is formed on load beam 14, and relative to disk by regulation
Thrust gives slide block 3.Further, load beam 14 becomes, and Bending Processing portion 19 is put on both sides also
Improve the structure of intensity.Further, and wiring substrate i.e. flexible element 15 by bundle pad 17b consolidate
Due to load beam 14.In fig. 2, the posture angle of slide block 3 represents spacing direction (pitch with Dp
Direction), represent rotating direction (roll direction) with Dr, represent yaw direction with Dy
(Yaw direction).Further, base plate 13 or load beam 14 are in various figures relative to flat
Row is that line is symmetrical in the central shaft of Y direction.
Fig. 3 is the preferred embodiment involved head stack being diagrammatically denoted by the present invention
Exploded perspective view.That is, Fig. 3 represents head stack 2 is resolved into load beam 14, flexible element
15, base plate the 13, the 1st and the 2nd drive member 16a, 16b, the state of slide block 3.Flexible element
In general 15 be that insulating barrier is coated on the thin corrosion resistant plate i.e. flexible substrate about 18 μm
On 24 and by Copper Foil plating wiring substrate thereon, by corrosion resistant plate, insulating barrier, Copper Foil
It is etched into arbitrary shape and carries out Precision Machining with the shape of regulation.
As it is shown on figure 3, slide block 3 is adhesively secured in the slider support plate being formed at flexible element 15
On 20.Fulcrum projection 21 is dashed forward on the centrage near the leading section of load beam 14 integratedly
Go out to be formed.Slider support plate 20 is highlighted prominent of support (outrigger) 22a and the 2nd by the 1st
Frame (outrigger) 22b supports, from back point contact in the center of slide block rotatable
Be supported on fulcrum projection 21.Therefore, slider support plate 20 is with pivot (pivot) structure quilt
Load beam 14 supports.It addition, the 1st and the 2nd highlights support 22a, 22b and flexibly keeps sliding
The posture of block 3.Thus, slide block 3 is corresponding to the change of posture that caused by the fluctuating of card
Smoothly follow.Further, the leaf spring 18 of load beam 14 thrust produced is in propping up
Between some projection 21 and slider support plate 20.Therefore, slider support plate 20 is in relative to X
Direction Y-direction carries out the state kept with the frictional force formed by this thrust.
It addition, the 1st drive member 16a and the 2nd drive member 16b are bonded in flexible element
On the 1st piezoelectrics supporting part 23a of 15 and the 2nd piezoelectrics supporting part 23b.1st with
And the 2nd drive member 16a, 16b is alternately flexible and by the yaw direction (Yaw along its plane
Direction) revolving force gives slider support plate 20, and makes sliding centered by fulcrum projection 21
Block gripper shoe 20 rotates.Further, the 1st piezoelectrics supporting part 23a and the 2nd piezoelectrics support
Portion 23b is formed by the insulating barrier 41 constituting flexible element 15.Further, dynamic vibration absorber 33 is set
It is placed in slider support plate 20.Further, dynamic vibration absorber 33 is more positioned at load than fulcrum projection 21
The rear end side of beam.
Fig. 4 be represent the present invention preferred embodiment in the flexibility that possessed of head stack
The exploded perspective view of part structure.In the diagram, it was the flexible element of integration originally, but, for
It is indicated, by flexible substrate 24 and magnetic head element distribution 25 (wiring part) easy to understandly
It is indicated discretely.Dynamic vibration absorber 33 by the first counterweight part 33a, the second counterweight part 33e,
Spring 33b and damper portion 33c are constituted and by losing flexible element stacking material
Carve processing to arrange.Specifically, the first counterweight part 33a and spring of dynamic vibration absorber 33
Portion 33b is made up of the Copper Foil identical with magnetic head element distribution 25.It addition, damper portion 33c is by gathering
Acid imide insulating barrier 41 is formed.Further, the second counterweight part 33e of dynamic vibration absorber 33 from
Flexible substrate 24 is etched to form.It addition, the uper side surface of the first counterweight part 33a, Copper Foil
Wiring material exposes, it is possible to the quality (Mass adjust-ment portion) of solder ball etc. is additional to this surface.
Fig. 5 a is the 1 that the preferred embodiment involved head stack of the present invention is possessed
The plane graph of drive member.It addition, Fig. 5 b is to represent the Section A-A in Fig. 5 a, Fig. 5 c is
Represent the section B-B in Fig. 5 a.Further, because the 1st drive member 16a and the 2nd drives structure
Part 16b is identical structure, so only illustrate the structure of the 1st drive member 16a at this.?
The upper face side of film piezoelectric 26 is formed with upper electrode 27a, and side below is formed with bottom electricity
Pole 27b.Because the 1st driving means 16a is the thinnest and the most damaged structure, so
It is provided as the base station 28 of the reinforcing material of softness.
1st drive member 16a for protective film piezoelectrics 26 entirety by polyimides
Insulating lid 30 covers.Further, a part for insulating lid 30 C portion in fig 5 a, D portion quilt
Remove.In C portion, lower electrode 27b exposes and is conducted with the 1st electrode pad 29a.?
D portion, upper electrode 27a exposes and is conducted with the 2nd electrode pad 29b.Thus, pass through
Voltage puts on the 1st electrode pad 29a and the 2nd electrode pad 29b such that it is able to make the 1st to drive
The film piezoelectric 26 of dynamic component 16a stretches.Further, thin film the most indicated by an arrow
The polarised direction of piezoelectrics 26.If giving electric field in polarised direction (to be put on by negative voltage
1st electrode pad 29a, puts on the 2nd electrode pad 29b by positive voltage) if then thin film pressure
Electricity body 26 is shunk on direction in the face of piezoelectric film by piezoelectric constant d31.It addition, such as
Fruit then extends if giving electric field on the contrary with polarised direction.If negative voltage is put on
Be equivalent to the 3rd electrode pad 29c of the 1st electrode pad 29a and positive voltage is put on phase
Then the 2nd drive member 16b if the 4th electrode pad 29d in the 2nd electrode pad 29b
Film piezoelectric 26 shunk on direction in the face of piezoelectric film by piezoelectric constant d31.
Fig. 6 is to see that the present invention's is preferred embodiment involved from upper face side (slide block side)
The plane graph of the front main portion of head stack.Fig. 7 is the preferred of the present invention in terms of following side
The plane graph of front main portion of the head stack involved by embodiment (in terms of rear side
The plane graph of the head stack of Fig. 6).Further, for convenience of description, load beam 14 is not illustrated.
In figure 6, magnetic head element distribution 25 (wiring part) is connected to by solder ball enclose
The magnetic head electrode terminal 31 of the slide block 3 being configured around the shape of slide block 3 carries out the magnetic head unit of correspondence
Part distribution 25 (wiring part).In the both sides being configured in slider support plate 20 the 1st and
2 highlight support (outrigger) 22a, and 22b is formed the 1st bending part 32a and the 2nd bending part
32b.Further, the 1st and the 2nd bending part 32a, 32b is with the 1st and the 2nd bending part 32a, 32b
Respective extended line L1, the intersection point of the L2 form consistent with fulcrum projection 21 is constituted.
Accordingly, because the 1st bending part 32a and the 2nd bending part 32b is easily curved so slide block
Gripper shoe 20 carries out small rotation centered by fulcrum projection 21.
This magnetic head element distribution 25 (wiring part) is partially fixed in the 1st and the 2nd and dashes forward
Go out support 22a, 22b (the C-C portion of Fig. 6) and be the most also fixed in from slider support plate
20 the 1st driving rib 36a and the 2nd extended drive rib 36b (the F-F portion of Fig. 6).
1st and the 2nd drive member 16a, 16b is by applying a voltage to the 1st, the 2nd,
3, the 4th electrode pad 29a, 29b, 29c, 29d and driven.Drive distribution 37a so that voltage is defeated
The form entered to the 1st electrode pad 29a and the 4th electrode pad 29d is configured, ground connection distribution
37b connects the 2nd electrode pad 29b and the 3rd electrode pad 29c.Thus, if alternation is driven
Dynamic signal is input to drive if distribution 37a then the 1st drive member 16a and the 2nd drive member
16b carries out stretching motion on mutual rightabout.
Further, slider support plate 20 is formed for unloading from disk 6 at slide block 3
Lift the T-shaped limiting unit 34 (with reference to Fig. 6, Fig. 7) of slide block 3 from disk face when of load.Should
T-shaped limiting unit 34 is formed bending part 34a and the opposition side to slide block 3 is bent processing,
And it is engaged in the hole portion 35 (as shown in Figure 3) being formed at load beam 14.Further, at dress
When carrying the usual action beyond unloading, T-shaped limiting unit 34 does not contacts with hole portion 35.
Fig. 7 is the figure of Fig. 6 in terms of rear side.In the figure 7, the 1st chain bar (link) that rigidity is high
39a is formed between the 1st joint (joint) 40a and the 2nd joint 40b being easily deformed.
1st joint 40a and the 1st drives rib 36a to link, it addition, the 2nd joint 40b is by flexible element
The part of 15 that is the 1st fixed part 24a and be concatenated.Same, that rigidity is high the 2nd chain bar
39b is formed between the 3rd joint 40c and the 4th joint 40d being easily deformed, the 3rd joint
40c and the 2nd drives rib 36b to link, and the 4th joint 40d is by a part for flexible element 15 that is the
2 fixed part 24b and be concatenated.
It is provided with and separates the 1st drive member 16a and the 2nd joint 40b and flexible substrate 24
1st separates groove 44a.1st separates groove 44a along being equivalent to film piezoelectric 26
The scope of the length of long side direction (Y direction) is formed.Head stack 2 is for be parallel to Y
The axis of symmetry of axle reach the standard grade symmetry shape, about the 2nd separate groove 44b the most identical.
Fig. 8 a～Fig. 8 f is the figure representing the major part cross section in Fig. 6.Flexible element 15, in thickness
The insulating barrier 41 of polyimides etc. is formed on the flexible substrate 24 of the stainless steel material spending 18 μm
And by formed thereon for magnetic head element distribution 25 (wiring part), magnetic head element distribution 25 is with insulation
Or protection purpose and covered by the distribution cover layer 42 of polyimides etc..It addition, flexible element
15 by becoming arbitrary shape to guarantee the merit of necessary mechanism flexible substrate 24 etching and processing
Energy.Fig. 8 a is the sectional view representing the C-C cross section in Fig. 6.Fig. 8 b represents in Fig. 6
The sectional view in D-D cross section, Fig. 8 c is the sectional view representing the F-F cross section in Fig. 6, Fig. 8 d
Being the sectional view representing the G-G cross section in Fig. 6, Fig. 8 e is to represent the H-H cross section in Fig. 6
Sectional view, Fig. 8 f is the sectional view representing the E-E cross section in Fig. 6.
In the C-C part represented by Fig. 8 a, the 1st highlight support (outrigger) 22a by
Flexible substrate 24 constitutes and is linked to slider support plate 20.Insulating barrier 41 be formed on this
1 highlights the part on support 22a, is formed on the magnetic head element distribution formed by Copper Foil
25 (wiring parts), are formed with distribution cover layer covering the form of magnetic head distribution 25 (wiring part)
42.In the D-D part represented by Fig. 8 b, it is in magnetic head element distribution 25 (wiring part)
The flexible substrate 24 of rear side be removed by etching, and slider support plate the 20, the 1st
Prominent support 22a and magnetic head element distribution 25 (wiring part) are separated.Represented by Fig. 8 c
F-F part in, the flexible substrate 24 that is the 1st extended from slider support plate 20 drives rib
A part for 36a and magnetic head element distribution 25 (wiring part) is fixed, and magnetic head element is joined
Line 25 (wiring part) and the 1st highlights support 22a and is separated.
In the G-G part represented by Fig. 8 d, the 1st joint 40a is identical with D-D cross section
Cross sectional shape and the magnetic head element of the flexible substrate 24 that eliminated flexible element 15 by etching join
Line 25 (wiring part), insulating barrier 41, distribution cover layer 42 are formed.Represented by Fig. 8 e
In H-H part, the 2nd joint 40b is eliminated the flexible substrate 24 of flexible element 15 by etching
Magnetic head element distribution 25 (wiring part), insulating barrier 41, distribution cover layer 42 are formed.Further,
Because it is soft structure that the 1st and the 2nd joint 40a, 40b and the 1st chain bar 39a compare,
So the 1st drive member 16a stretching motion when, the 1st chain bar 39a engages with the 2nd
Small rotary motion is carried out centered by 40b.Same, at the 2nd drive member 16b stretching motion
When, the 2nd chain bar 39b carries out small rotary motion centered by the 4th joint 40d.With
This interlocks, and slider support plate 20 pivots about with fulcrum projection 21.
As illustrated in fig. 8f, the 1st drive member 16a is being overlapped in the enhancing plate of the 1st chain bar 39a
The position (part of the dotted line P of Fig. 8 f) of 43a is bonded in the 1st piezoelectrics supporting part 23a
On.It addition, the leading section of the opposing party of the 1st drive member 16a is also overlapped in flexible element 15
Flexible substrate 24 (part of the dotted line Q of Fig. 8 f) is also bonded in the 1st piezoelectrics supporting part
On 23a.2nd drive member 16b is the most identical, on the enhancing plate 43b of the 2nd chain bar 39b,
The position that the leading section of a side is overlapping is bonded on the 2nd piezoelectrics supporting part 23b.Again
Having, the leading section of the opposing party of the 2nd drive member 16b is also in the flexibility being overlapped in flexible element 15
It is bonded on the position of substrate 24 on the 2nd piezoelectrics supporting part 23b.Thereby, it is possible to it is reliable
The displacement of film piezoelectric 26 is delivered to the 1st chain bar 39a (or the 2nd chain bar 39b) by ground.
In the present embodiment, dynamic vibration absorber 33 is more positioned at load beam 14 than fulcrum projection 21
Rear end side being arranged at be between the 1st drive member 16a and the 2nd drive member 16b
The position clamped by the 1st drive member 16a and the 2nd drive member 16b.Dynamic vibration absorber
33 by the first counterweight part 33a, the second counterweight part 33e, the first counterweight part 33a is linked to slide block
Spring 33b of gripper shoe 20, the first counterweight part 33a is suppressed to enter relative to slider support plate 20
Damper portion 33c of the amplitude of row vibration, support spring 33b and the frame section of damper portion 33c
33d is constituted.First counterweight part 33a with spring 33b by identical with magnetic head element distribution 25
The etching of Copper Foil and be formed on the insulating barrier 41 of flexible element 15.It addition, damper portion 33c
It is formed a part for the insulating barrier 41 of polyimides and is etched to form.Further, second
Counterweight part 33e is formed a part for flexible element 24 and is etched to form.In such manner, it is possible to by
The etch process of flexible element 15 carrys out the structure of processing dynamics bump leveller 33, so need not new
Processing technique, and processing cost will not improve completely.
In the present embodiment, the first counterweight part 33a and the second counterweight part 33e is substantially rectangular
And it is set along diagram X-direction, but, as long as relative to diagram Y-axis symmetry
Then shape can arbitrarily set.These first and second counterweight part 33a, 33e plays as power
The function of the Quality Mgmt Dept in bump leveller 33.
Frame section 33d is with around the first counterweight part 33a, spring 33b, the second counterweight part 33e
Form be configured to frame-shaped.Spring 33b is with the shape carrying out extending along the negative direction of Y-axis
Formula is set, and one end of long side direction is linked to frame section 33d, it addition, in spring 33b
Long side direction central authorities near be linked to the first counterweight part 33a.
So, the first counterweight part 33a, the second counterweight part 33e, spring 33b, damper portion 33c
The shape of substantially H type is presented as entirety.By this structure, dynamic vibration absorber 33 is relative to cunning
The direction of rotation of block gripper shoe 20 has the degree of freedom of vibration.Here, damper portion 33c takes on phase
Direction of rotation for slider support plate 20 suppresses the role of vibration.
Fig. 9 is the figure of the operating state representing dynamic vibration absorber.At slide block 3 with fulcrum projection 21
The when of pivoting about, the first counterweight part 33a (the second counterweight part 33e) is in accompanying drawing institute
Carry out of reciprocating vibration in the direction of arrow represented.Further, this direction of arrow and the magnetic head of slide block 3
The direction of the transversal recording track of element 7 is consistent.In the resonance mode of the big amplitude resonance of slide block 3,
First and second counterweight part 33a of dynamic vibration absorber 33,33e absorb the vibration of slide block 3 and go forward side by side
The action of row suppression resonance.
Figure 10 a, Figure 10 b are the figures in the cross section representing dynamic vibration absorber 33, and Figure 10 a is to represent
The sectional view in the J-J cross section in Fig. 6.Figure 10 b is the sectional view representing the I-I cross section in Fig. 6.
Spring 33b is arranged at the upper face side of damper portion 33c formed by insulating barrier 41.It addition,
First counterweight part 33a is arranged at the upper face side of insulating barrier 41, and the second counterweight part 33e is set
Rear side in insulating barrier 41.Because the resonant frequency of dynamic vibration absorber 33 is matched the suitableeest
Value, it is possible at random determine the first counterweight part 33a and the shape of the second counterweight part 33e.
It addition, the first counterweight part 33a can also have Mass adjust-ment portion.Specifically, can will weld
Pellet 33f is additional to the first counterweight part 33a and is finely adjusted resonant frequency whole.Additional solder ball
The position of 33f can by arranging at one on the axis of symmetry (Y-axis) of fulcrum projection 21, then
Have can also with substantially symmetrical about its central axis arrange multiple.Further, distribution on the first counterweight part 33a
Cover layer 42 is not provided with in the position of additional solder ball 33f.
[embodiment]
Hereinafter, according to present embodiment, specifically represent that there is the track direction at magnetic head element
On there is not the head stack of frequency response characteristic of resonance.
(conventional example)
First, the structure of the first conventional example and the second conventional example is illustrated.Figure 18 is table
Show the figure of the head stack of the first conventional example.Figure 20 is the head stack representing the second conventional example
Figure.Further, the head stack involved by the first existing structure represented by Figure 18 is a kind of from figure
The structure of the head stack 2 of the present embodiment represented by 6 eliminates dynamic vibration absorber 33
Head stack, other structure is identical with the structure represented by Fig. 6.It addition, represented by Figure 20
The head stack involved by the second conventional example be a kind of head stack being equivalent to patent documentation 2,
And be present embodiment represented by alternate figures 6 head stack 2 structure in power inhale
Shake device 33 and the counterweight (counter balance) 60 of centre of gravity adjustment is installed on slide block
Center of gravity Gr of rotating part is also matched the structure of fulcrum projection 21 by gripper shoe 20.Other knot
Structure is identical with the structure represented by Fig. 6, so omitting the description.
The illustraton of model of the first conventional example that Figure 19 a is a simplified in Figure 18.Figure 19 b is to represent
By alternating voltage being put on the 1st drive member and the 2nd drive member in first conventional example
Thus slide block carries out the figure of state of crankmotion centered by fulcrum projection.Comprise slide block 3
And center of gravity Gr of the rotating part of slider support plate 20 is in from fulcrum projection 21 towards magnetic head unit
One side distance of separation S of part 71Position.Therefore, be rotated by slide block 3 thus
Center of gravity Gr moves in the X direction.The retroaction caused by the movement of this center of gravity Gr via
Fulcrum projection 21 and be delivered to load beam 14, thus wave load beam 14 in the X direction.
Figure 19 d is to represent in the first conventional example relative to the input electricity being applied in drive member
The figure of the response characteristic of the X-direction displacement of the magnetic head element 7 of pressure.For this response characteristic,
The big peak value of gain 20dB is presented under the frequency of 25kHz.Comprise slide block 3 and slide block props up
Center of gravity Gr of the rotating part of fagging 20 from fulcrum projection 21 separately, is produced by this rotary motion
The counteracting force of X-direction is delivered to load beam 14 via fulcrum projection 21.If this rotation is transported
Then can excite if dynamic frequency is consistent with the swaying pattern of load beam 14 (Sway mode)
The swaying resonance mode of load beam 14.
Then, the second conventional example is illustrated.It is second existing that Figure 21 a is a simplified in Figure 20
There is the illustraton of model of example.Figure 21 b is to represent in the second conventional example by being put on by alternating voltage
1st drive member and the 2nd drive member thus slide block are carried out back and forth centered by fulcrum projection
The figure of the state of rotary motion.Figure 21 c further simplify slide block in the second conventional example
Rotating part and the illustraton of model of counterweight.Here, M is equivalent to comprise the slide block of the first conventional example
3 and the weight of rotating part of slider support plate 20, m3Be equivalent to the quality of counterweight 60.
S1Represent the mass centre of M and the distance of fulcrum projection 21, S3Represent the matter of counterweight 60
Amount center and the distance of fulcrum projection 21.Further, if comprising slide block 3 and slider support plate 20
Rotating part and the center of gravity of counterweight 60 entirety be in the position of fulcrum projection 21 if then exist
The when that entirety carrying out crankmotion, counteracting force will not betide fulcrum projection 21.If
Then become represent the condition of position that center of gravity is in fulcrum projection 21 with simple mathematical expression if with
Under formula (1).
[several 1]
M×S1=m3×S3 (1)
If if the angular velocity of the rotation amount θ of rotary motion is multiplied by the both sides of formula (1), become
For below formula (2).
[several 2]
Here, because angular velocity × distance be speed, so by the angular velocity of rotation amount θ × away from
From S1It is set to speed V1And by angular velocity × distance S of rotation amount θ3It is set to speed V3If
Then can be indicated with below formula (3).
[several 3]
M×V1=m3×V3 (3)
Therefore, if obtaining M and m centered by fulcrum projection 213Momental balance
Words are not then it will be appreciated that act on fulcrum projection 21 for counteracting force.That is, because counteracting force not
Act on fulcrum projection 21, even if so load beam 14 also can be static in swaying pattern.By this shape
State is shown in Figure 21 d.
Figure 21 e is to represent in the second conventional example relative to the input electricity being applied in drive member
The figure of the response characteristic of the X-direction displacement of the magnetic head element of pressure.By additional equilibrium counterweight 60 also
The impact of minimizing counteracting force in fulcrum projection 21, thus reduce the negative of 25kHz significantly
The swaying resonance of carrier beam 14.But, the crest of new resonance is there will be at 30kHz.This resonance
Depend on slide block 3 and the quality of slider support plate 20 and the spring constant of drive member 16,
And it is the resonance of the yaw direction (Yaw direction) of slide block 3.So, existing second
In example, the resonance of the first conventional example 25kHz is enhanced, but, create the new of 30kHz
Resonance.This becomes the problem extending the control area of magnetic head location when further.
(embodiment)
Hereinafter, one embodiment of the present of invention is illustrated.Figure 11 a is a simplified Fig. 6's
The illustraton of model of one embodiment of the present of invention of structure.First counterweight part 33a (the second counterweight part
33e) it is installed in slider support plate 20 via spring 33b and damper portion 33c.1st
Drive member 16a, is fixed on the 1st chain bar 39a of L-shaped by a square end, and another square end is solid
Due to flexible substrate 24.The 1st joint 40a and it is configured with at the both ends of the 1st chain bar 39a
2 joint 40b.Same, the 2nd drive member 16b, is fixed on the of L-shaped by a square end
2 chain bar 39b, another square end is fixed in flexible substrate 24.Both ends at the 2nd chain bar 39b
It is configured with the 3rd joint 40c and the 4th joint 40d.In fig. 11 a, the 1st joint 40a is linked
With the 1st line segment L1 of the 2nd joint 40b with link the 3rd joint 40c's and the 4th joint 40d
2nd line segment L2 intersects in the fulcrum projection 21 of load beam 14.
Here, first, the function of the dynamic vibration absorber 33 involved by embodiment is illustrated.
Figure 14 is to produce by the first counterweight part (the second counterweight part), spring and damper portion for explanation
The simple model figure of the effect of raw dynamic vibration absorber.In fig. 14, main counterweight part 50 is suitable
Inertia mass in the rotating part comprising slide block 3 and slider support plate 20.Main spring portion 51 is main
Be equivalent to the first and second drive member 16a, the coefficient of elasticity of 16b.It addition, main damper portion
52 are equivalent to have the insulating lid 30 of drive member 16, base station the 28, first and second piezoelectricity
Body supporting part 23a, the summation of the damped coefficient of 23b.Secondary counterweight part 53 is by the first counterweight part 33a
With the quality of the second counterweight part 33e produce using fulcrum projection 21 as center inertia mass it
With.Auxiliary spring portion 54 is equivalent to spring 33b.Secondary damper portion 55 is equivalent to damper portion 33c.
Basal plane 56 is equivalent to the flexible substrate 24 in Figure 11 a.
Figure 15 a is the situation not having the dynamic vibration absorber in Figure 14, and is to represent periodically
The figure of external force f frequency response characteristic when put on main counterweight part.In the case, meeting
The resonant frequency ω 0, ω 0 now being exported from main counterweight part 50 and main spring portion 51 occurs
It is indicated by below formula (4).Here, quality (the inertia matter that M is main counterweight part 50
Amount), K is the spring constant in main spring portion.
[several 4]
Figure 15 b is the frequency in the case of the secondary damper portion representing the dynamic vibration absorber not having in Figure 14
The figure of rate response characteristic.In this frequency response characteristic, it may appear that 2 resonance peak ω 1, ω
3, between these resonance peaks, there will be antiresonance peak value ω 2.Here, ω 3 ＜ ω 2 ＜ ω 1,
If ignoring main damper portion 52, resonance peak ω 1 and resonance peak ω 3 by below formula
(5), (6) are indicated.It addition, antiresonance peak value ω 2 is carried out table by below formula (7)
Show.Here, the quality (inertia mass) that M is main counterweight part 50, K is the bullet in main spring portion
Spring constant, m is the quality of secondary counterweight part, and k is the spring constant of secondary counterweight part.
[several 5]
[several 6]
[several 7]
In order to suppress the resonance of ω 0 with dynamic vibration absorber 33, substantially mate with antiresonance ω 2
Form in ω 0 sets k and m of dynamic vibration absorber 33.
Figure 15 c is the figure representing the frequency response characteristic in Figure 14.Work by secondary damper portion 55
With, the resonance peak presented in Figure 15 b is eliminated, and can be from the low place of frequency
Smooth characteristic is obtained equably to high place.So, by dynamic vibration absorber 33 is added
There is the system of the resonance of ω 0 in script such that it is able to eliminate resonance ω 0 of main counterweight part 50
And obtain flat frequency response.
Then, an enforcement to the present invention that dynamic vibration absorber 33 is applied to head stack 2
The action of example illustrates.Figure 11 c be simplify in one embodiment of the invention slide block by
1st and the 2nd drive member and pivot about the situation of motion with fulcrum projection and carry out table
The illustraton of model shown.First, if the 1st drive member 16a carries out shrinking and the 2nd driving structure
Part extend if then slide block 3 by the 1st chain bar 39a and the effect of the 2nd chain bar 39b with
Small rotation counterclockwise is carried out centered by fulcrum projection 21.Relative to the driving being applied to now
The response characteristic of the X-direction displacement of the magnetic head element 7 of the input voltage of component 16 is shown in figure
16.This response characteristic shows the characteristic that resonance peak is steadily suppressed.Setting from control system
From the viewpoint of meter, if resonance peak is present in response characteristic, it is difficult to ensure that control spy
The gain margin of property.Therefore, flat frequency response characteristic is obtained throughout broadband for reality
Become important for the precision positioning of existing magnetic head element.
In the case of the first conventional example represented by Figure 19 d, produce big formant at 25kHz
Value.This resonance peak is equivalent to the swaying pattern of load beam.In the case, as controlling spy
Property, at most it is only able to guarantee the control area of about 3kHz.Represented by Figure 21 e second is existing
In the case of having example because center of gravity Gr of the rotating part of slide block 3 by counterweight 60 with
Point projection 21 is consistent, so the swaying pattern of the load beam of 25kHz does not haves.But,
The rotary mode (Yaw pattern) of slide block is there will be at 30kHz.30kHz is equivalent to Figure 15 a's
ω0.In the case, control area makes moderate progress than the situation of the first conventional example, but, really
The control area protecting 10kHz is difficult.On the other hand, of the present invention represented by Figure 16
In the case of individual embodiment, because resonance peak can be steady, it is possible to guarantee fully
The control characteristic of more than 10kHz.Here, damping system will be ignored in the characteristic of Figure 16 with solid line
Response characteristic in the case of number is shown in Figure 17.In figure, dotted line is the characteristic identical with Figure 16
Figure.According to Figure 17, it is possible to be identified through that damped coefficient is carried out optimization it is thus possible to acquisition figure
The characteristic of 16.
Use Figure 12 and Figure 13, the optimization of damped coefficient is illustrated.Figure 12 is to represent
Employ the figure of the control module of the servo controller of the first drive member and the second drive member.
The micro-actuator being made up of the first drive member 16a and the second drive member 16b and VCM are by also
Connection connects, and magnetic head location amount becomes the output sum of micro-actuator and VCM.It is connected in parallel micro-cause
The gain Cvcm of the controller of gain Cma and VCM of the controller of dynamic device.This system
Control stability substantially can be done with open-loop transfer function (open loop transfer function)
Clear.
Open-loop transfer function G is indicated with below formula (8).
[several 8]
G=Cma·Gma+Cvcm·GVCM (8)
Here, the transmission function that Gma is head support mechanism, Gvcm is the transmission letter of VCM
Number.The Bode diagram (Bode diagram) of this open-loop transfer function G is shown in Figure 13.?
In the case of this, control area becomes the 5kHz of gain=0dB.Figure 13 a represents dynamic vibration absorber
The situation that damper portion is not enough.Now, because the peak value of the first resonance point of dynamic vibration absorber 33 is
0dB, so being a kind of problematic situation in terms of control stability.Figure 13 b represents more than gain
Amount is the situation of 10dB, and Figure 13 c represents the situation that gain margin is 20dB.In general,
Guarantee that gain margin 10dB is necessary.It addition, in the case of Figure 13 c, can will control
Region is set to 10kHz.
Then, to the swaying pattern (Sway mode) suppressing load beam 14 with dynamic vibration absorber 33
Mechanism illustrates.Figure 11 b is to represent the first resonant frequency (ω 3) less than dynamic vibration absorber
Frequency range in first and second the joining of dynamic vibration absorber when make drive member action
The figure of the action in weight portion.It addition, Figure 11 c is to represent the first resonance higher than dynamic vibration absorber
First of dynamic vibration absorber when of making drive member action in the frequency range of frequency (ω 3)
And second figure of action of counterweight part.In Figure 11 b, enter in a counterclockwise direction at slide block 3
The when that row rotating, the first and second counterweight part 33a, 33e are also centered by fulcrum projection 21
The most significantly vibrate.Contrary, in Figure 11 c, at slide block 3 with counterclockwise
The when that direction rotating, the first and second counterweight part 33a, 33e with fulcrum projection 21 are
Center vibrates in the clockwise direction.So, the action pattern of dynamic vibration absorber 33 is by first altogether
Vibration frequency ω 3 is changed as border.Here, the first resonance frequency of dynamic vibration absorber 33
Rate ω 3 is the frequency of the swaying resonance mode higher than load beam 14.Further, suppress 30kHz's
The pattern of ω 0 is equivalent to Figure 11 c.
Figure 11 d is to further simplify slide block in Figure 11 a, slider support plate, dynamic vibration absorber
Illustraton of model.Figure 11 e is the illustraton of model simplified of the operating state representing Figure 11 b.At figure
In 11e, the mass M (being the most only designated as " mass M ") of slide block 3 and slider support plate 20
Rotate centered by fulcrum projection 21 and with rotation amount θ 1, be configured in away from fulcrum projection
The first counterweight part 33a (the second counterweight part 33e) of the dynamic vibration absorber 33 of the position of 21 distances S2
Quality m (being the most only referred to as " quality m ") centered by fulcrum projection 21 and with rotate
Amount θ 2 moves.The swaying pattern of load beam 14 is less than the frequency of the first resonant frequency ω 3,
So the reciprocating vibration period of the rotation amount θ 1 and the rotation amount θ 2 of quality m of mass M
Identical and delayed phase also lacks.Further, if amplitude (rotation amount) θ 1 and θ 2 is compared
The amplitude θ 2 of the then first counterweight part 33a (the second counterweight part 33e) of dynamic vibration absorber 33 if compare
Amplitude θ 1 more than slide block 3.That is, θ 1 ＜ θ 2 is become.Because shaking of mass M and quality m
The dynamic cycle is identical, so the first counterweight part 33a of dynamic vibration absorber 33 (the second counterweight part 33e)
Angular velocity (being the most only designated as " angular velocity of dynamic vibration absorber 33 ") be significantly increased.That is,
The angular velocity of amplitude (rotation amount) θ 1 and the angular velocity of amplitude θ 2 become below formula (9)
Relation.
[several 9]
If here, the quantity of motion of mass M is equal with the quantity of motion of quality m, because energy
Counteracting force is enough made not act on fulcrum projection 21, if so the speed of mass M be set to
V1And the speed of quality m is set to V2If, as long as then below formula (10), counter make
Firmly do not betide fulcrum projection.
[several 10]
M×V1=m × V2 (10)
It addition, in the present embodiment, because by slide block 3 and the mass M of slider support plate 20
Amplitude (rotation amount) as θ 1, thus speed V of mass M1Become the angle speed of amplitude θ 1
Degree × distance S1And speed V of quality m2Become angular velocity × distance S of amplitude θ 22, so
Formula (10) can be expressed as below formula (11).
[several 11]
The quantity of motion of the quantity of motion with mass M that make quality m is consistent when, formula (11)
Represent be free to set quality m, dynamic vibration absorber 33 amplitude θ 2 angular velocity and
Distance S2.That is, even if quality m is little, it is also possible to increase angular velocity or distance S of amplitude θ 22。
In the frequency response characteristic of Figure 17, the swaying pattern of load beam 14 is 25kHz, and power is inhaled
First resonant frequency (ω 3) of device 33 of shaking is 27.5kHz, so, by become the highest
Form in the frequency of the swaying pattern of load beam sets the first resonant frequency of dynamic vibration absorber 33
(ω 3) the quantity of motion of equalization quality M and the quantity of motion of quality m such that it is able to by slide block
3 and the dynamic center of gravity of slider support plate 20 be matched with fulcrum projection 21.That is, the rotation of slide block 3
Rotate the retroaction made and be not transferred to load beam 14.Thereby, it is possible to the horizontal stroke of suppression load beam 14
Swing pattern.That is, counterweight part has by the magnetic head element 7 with slide block 3 relative to fulcrum projection 21
Carry out the vibration in identical direction, the direction that rotates and carry out the first resonance point (ω 3) resonated,
First resonance point (ω 3) is above the frequency of the resonant frequency of the swaying pattern of load beam, so
The swaying that can suppress load beam 14 is resonated.If further, making this first resonance frequency further
Rate (ω 3) is close to the resonance of change dynamic vibration absorber 33 on the direction of the frequency of swaying pattern
If the setting of frequency then quality m amplitude increase and dynamic vibration absorber 33 angular velocity drastically
Become big.Consequently, because quality m can be reduced, it is possible to seek comprise slide block 3 and slide
The lightweight of the rotating part of block gripper shoe 20.
As previously discussed, according to the present embodiment, dynamic absorber is configured by substituting counterweight
Device 33 such that it is able to suppress the yaw mode (Yaw mode) of slide block 3 and can also suppress
The swaying pattern of load beam 14, and control area can be extended significantly.Further, can be right
Quality m of the first counterweight part 33a (the second counterweight part 33e) of dynamic vibration absorber 33 is carried out gently
Quantify, and the magnetic head slide block 3 floats on disk when and disk can be reduced further
Collision.Therefore, it is possible to obtain the floating characteristic of stable slide block 3.
The explanation of symbol
1 disk set
2 head stacies
3 slide blocks
4 casing
The axle of 5 spindle motors
6 disks
7 magnetic head elements
8 support arms
The feathering axis of 9 VCM
10 magnet part
11 slope mechanisms
12 tabs
13 base plates
14 load beam
15 flexible elements
16a the 1st drive member (film piezoelectric element)
16b the 2nd drive member (film piezoelectric element)
17a, 17b restraint pad
18 leaf springs
19 Bending Processing portions
20 slider support plates
21 fulcrum projections
22a the 1st highlights support
22b the 2nd highlights support
23a the 1st piezoelectrics supporting part
23b the 2nd piezoelectrics supporting part
24 flexible substrates
24a the 1st fixed part
24b the 2nd fixed part
25 magnetic head element distributions
26 film piezoelectrics
27a upper electrode
27b lower electrode
28 base stations
29a the 1st electrode pad
29b the 2nd electrode pad
29c the 3rd electrode pad
29d the 4th electrode pad
30 insulating lids
31 magnetic head electrode terminals
32a the 1st bending part
32b the 2nd bending part
33 dynamic vibration absorbers
First counterweight part of 33a dynamic vibration absorber
The spring of 33b dynamic vibration absorber
The damper portion of 33c dynamic vibration absorber
The frame section of 33d dynamic vibration absorber
Second counterweight part of 33e dynamic vibration absorber
33f solder ball
34 T-shaped limiting units
34a bending part
The hole portion of 35 load beam
36a the 1st drives rib
36b the 2nd drives rib
37a drives distribution
37b ground connection distribution
39a the 1st chain bar
39b the 2nd chain bar
40a the 1st joint
40b the 2nd joint
40c the 3rd joint
40d the 4th joint
41 insulating barriers
42 distribution cover layers
43a, 43b strengthen plate
44a the 1st separates groove
44b the 2nd separates groove
50 main counterweight parts
51 main spring portions
52 main damper portions
53 secondary counterweight parts
54 auxiliary spring portions
55 secondary damper portions
56 basal planes
60 counterweights
Claims (6)
1. a head stack, it is characterised in that:
Possess:
Slide block, has magnetic head element；
Slider support plate, keeps described slide block；
Load beam, keeps described slider support plate；
Fulcrum projection, is arranged at the leading section of described load beam and rotatably supports institute
State slider support plate；
Drive member, makes described slider support plate rotate centered by described fulcrum projection；
Dynamic vibration absorber, is arranged at described slider support plate,
Described dynamic vibration absorber is positioned at than described fulcrum projection closer to the rear end side of described load beam
Position and there is the degree of freedom of vibration relative to the direction of rotation of described slider support plate.
2. head stack as claimed in claim 1, it is characterised in that:
Described dynamic vibration absorber has counterweight part, described counterweight part is linked to described slider support
The spring of plate, described counterweight part is suppressed to carry out the amplitude vibrated relative to described slider support plate
Damper portion.
3. head stack as claimed in claim 2, it is characterised in that:
Described counterweight part has to be entered relative to described fulcrum projection by with the magnetic head element of described slide block
Row rotate direction equidirectional on vibration and carry out the first resonance point resonated,
Described first resonance point is the frequency of the resonant frequency of the swaying pattern higher than described load arm
Rate.
4. the head stack as described in claim 2 or 3, it is characterised in that:
Described counterweight part, described spring and described damper portion are by flexible element stacking material
Material is etched processing and arranges.
5. the head stack as described in any one in claim 2～4, it is characterised in that:
Described counterweight part has Mass adjust-ment portion.
6. a disk set, it is characterised in that:
The head stack described in any one being equipped with in Claims 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910191198.9A CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-050233 | 2015-03-13 | ||
| JP2015050233 | 2015-03-13 | ||
| JP2015248121A JP6146463B2 (en) | 2015-03-13 | 2015-12-21 | Head assembly and magnetic disk drive |
| JP2015-248121 | 2015-12-21 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910191198.9A Division CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105976833A true CN105976833A (en) | 2016-09-28 |
| CN105976833B CN105976833B (en) | 2019-04-09 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910191198.9A Pending CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
| CN201610143596.XA Expired - Fee Related CN105976833B (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910191198.9A Pending CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Country Status (2)
| Country | Link |
|---|---|
| JP (3) | JP6146463B2 (en) |
| CN (2) | CN110060705A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111627467A (en) * | 2019-02-28 | 2020-09-04 | 日本发条株式会社 | Disk drive suspension |
| CN111982090A (en) * | 2019-05-24 | 2020-11-24 | 张家欧 | Structure and method for detecting position of inertia shaft of defective quartz hemispherical shell |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9773516B2 (en) * | 2015-03-13 | 2017-09-26 | Tdk Corporation | Head assembly and magnetic disk device |
| JP7301721B2 (en) * | 2019-11-14 | 2023-07-03 | 日本発條株式会社 | Disk device suspension |
| JP7314072B2 (en) * | 2020-01-31 | 2023-07-25 | 日本発條株式会社 | Disk device suspension |
| JP7314081B2 (en) * | 2020-03-11 | 2023-07-25 | 日本発條株式会社 | Disk device suspension |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111627467A (en) * | 2019-02-28 | 2020-09-04 | 日本发条株式会社 | Disk drive suspension |
| CN111982090A (en) * | 2019-05-24 | 2020-11-24 | 张家欧 | Structure and method for detecting position of inertia shaft of defective quartz hemispherical shell |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105976833B (en) | 2019-04-09 |
| JP2018028960A (en) | 2018-02-22 |
| JP2017117515A (en) | 2017-06-29 |
| CN110060705A (en) | 2019-07-26 |
| JP6146463B2 (en) | 2017-06-14 |
| JP6243070B2 (en) | 2017-12-06 |
| JP2016170852A (en) | 2016-09-23 |
| JP6390780B2 (en) | 2018-09-19 |
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