CN105974581A - 高速动态聚焦激光振镜模组 - Google Patents
高速动态聚焦激光振镜模组 Download PDFInfo
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- CN105974581A CN105974581A CN201610562262.6A CN201610562262A CN105974581A CN 105974581 A CN105974581 A CN 105974581A CN 201610562262 A CN201610562262 A CN 201610562262A CN 105974581 A CN105974581 A CN 105974581A
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- 239000007787 solid Substances 0.000 claims 1
- 230000010354 integration Effects 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
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- 238000010147 laser engraving Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610562262.6A CN105974581B (zh) | 2016-07-15 | 2016-07-15 | 高速动态聚焦激光振镜模组 |
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CN201610562262.6A CN105974581B (zh) | 2016-07-15 | 2016-07-15 | 高速动态聚焦激光振镜模组 |
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Publication Number | Publication Date |
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CN105974581A true CN105974581A (zh) | 2016-09-28 |
CN105974581B CN105974581B (zh) | 2024-06-21 |
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CN201610562262.6A Active CN105974581B (zh) | 2016-07-15 | 2016-07-15 | 高速动态聚焦激光振镜模组 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109590611A (zh) * | 2018-12-18 | 2019-04-09 | 苏州青石光电技术有限公司 | 多卡多头协同控制系统 |
CN111618424A (zh) * | 2019-02-28 | 2020-09-04 | 深圳市大族数控科技有限公司 | 一种三轴振镜共轴调节装置及焦距确认方法 |
CN112059411A (zh) * | 2020-09-30 | 2020-12-11 | 江阴丽晶电子科技有限公司 | 一种方便移动的轻便型动态聚焦旋光模组 |
CN112828480A (zh) * | 2021-01-15 | 2021-05-25 | 西安建筑科技大学 | 一种曲线细长孔反射斜面加工装置 |
CN113319425A (zh) * | 2021-05-14 | 2021-08-31 | 华中科技大学 | 一种多轴激光扫描光学系统 |
CN113433687A (zh) * | 2021-06-29 | 2021-09-24 | 青岛金利天源智能科技有限公司 | 一种激光振镜扫描系统 |
CN113843539A (zh) * | 2021-11-23 | 2021-12-28 | 武汉华工激光工程有限责任公司 | 一种小型激光加工头 |
Citations (13)
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IL74424A0 (en) * | 1984-03-01 | 1985-05-31 | Laser Photonics Inc | Laser beam scanning device and marking system |
CA2422224A1 (en) * | 2002-03-15 | 2003-09-15 | Affymetrix, Inc. | System, method, and product for scanning of biological materials |
KR20080081734A (ko) * | 2007-03-06 | 2008-09-10 | 정용락 | 레이저프린터용 스캐닝 유니트의 포커스렌즈 조립장치 |
CN201132853Y (zh) * | 2007-10-08 | 2008-10-15 | 无锡浩波光电子有限公司 | 双束双波长激光三维微熔覆制造混合集成电路基板的设备 |
CN101407912A (zh) * | 2007-10-08 | 2009-04-15 | 无锡浩波光电子有限公司 | 双束双波长激光三维微熔覆制造混合集成电路基板的设备 |
CN101419336A (zh) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | 一种振镜式激光三维扫描系统 |
CN101439441A (zh) * | 2008-12-29 | 2009-05-27 | 广州瑞通千里激光设备有限公司 | 光纤激光动态聚焦振镜扫描式点焊系统及其焊接方法 |
DE202012008666U1 (de) * | 2012-09-11 | 2013-01-04 | Legend Laser Inc. | Lasergravurgerät |
CN103071795A (zh) * | 2013-01-23 | 2013-05-01 | 西安铂力特激光成形技术有限公司 | 移动振镜选择性激光熔化slm成形设备 |
CN203227924U (zh) * | 2013-03-18 | 2013-10-09 | 张立国 | 一种激光扫描加工装置 |
CN104191089A (zh) * | 2014-09-11 | 2014-12-10 | 苏州菲镭泰克激光技术有限公司 | 基于激光器输出光束的三维动态聚焦标刻系统及方法 |
CN204934890U (zh) * | 2015-05-21 | 2016-01-06 | 深圳英诺激光科技有限公司 | 一种亚波长增透结构的制备装置 |
CN205899130U (zh) * | 2016-07-15 | 2017-01-18 | 北京金海创科技发展有限公司 | 高速动态聚焦激光振镜模组 |
-
2016
- 2016-07-15 CN CN201610562262.6A patent/CN105974581B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
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IL74424A0 (en) * | 1984-03-01 | 1985-05-31 | Laser Photonics Inc | Laser beam scanning device and marking system |
CA2422224A1 (en) * | 2002-03-15 | 2003-09-15 | Affymetrix, Inc. | System, method, and product for scanning of biological materials |
KR20080081734A (ko) * | 2007-03-06 | 2008-09-10 | 정용락 | 레이저프린터용 스캐닝 유니트의 포커스렌즈 조립장치 |
CN201132853Y (zh) * | 2007-10-08 | 2008-10-15 | 无锡浩波光电子有限公司 | 双束双波长激光三维微熔覆制造混合集成电路基板的设备 |
CN101407912A (zh) * | 2007-10-08 | 2009-04-15 | 无锡浩波光电子有限公司 | 双束双波长激光三维微熔覆制造混合集成电路基板的设备 |
CN101419336A (zh) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | 一种振镜式激光三维扫描系统 |
CN101439441A (zh) * | 2008-12-29 | 2009-05-27 | 广州瑞通千里激光设备有限公司 | 光纤激光动态聚焦振镜扫描式点焊系统及其焊接方法 |
DE202012008666U1 (de) * | 2012-09-11 | 2013-01-04 | Legend Laser Inc. | Lasergravurgerät |
CN103071795A (zh) * | 2013-01-23 | 2013-05-01 | 西安铂力特激光成形技术有限公司 | 移动振镜选择性激光熔化slm成形设备 |
CN203227924U (zh) * | 2013-03-18 | 2013-10-09 | 张立国 | 一种激光扫描加工装置 |
CN104191089A (zh) * | 2014-09-11 | 2014-12-10 | 苏州菲镭泰克激光技术有限公司 | 基于激光器输出光束的三维动态聚焦标刻系统及方法 |
CN204934890U (zh) * | 2015-05-21 | 2016-01-06 | 深圳英诺激光科技有限公司 | 一种亚波长增透结构的制备装置 |
CN205899130U (zh) * | 2016-07-15 | 2017-01-18 | 北京金海创科技发展有限公司 | 高速动态聚焦激光振镜模组 |
Non-Patent Citations (6)
Title |
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文世峰;史玉升;谢军;: "动态聚焦激光振镜扫描系统的误差分析及图形校正算法", 新技术新工艺, no. 05 * |
林小夏;高垒;余廷勋;: "降低UV激光打孔机Z轴振幅的瞬态动力学有限元分析技术研究", 印制电路信息, no. 03 * |
林盛鑫;黄丁香;钟惠球;李仪;: "基于三维动态聚焦技术的激光打标系统设计研究", 东莞理工学院学报, no. 03 * |
王兴龙, 迟泽英, 陈文建: "光纤共焦扫描显微镜的扫描系统畸变与校正的研究", 南京理工大学学报(自然科学版), no. 05 * |
王萌;刘铁根;赵玛利;王博;霍晓飞;许宝忠;张国顺;: "PBT材料三维激光表面改性系统分析", 天津大学学报, no. 11 * |
章文献;史玉升;贾和平;: "选区激光熔化成形系统的动态聚焦技术研究", 应用激光, no. 02 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109590611A (zh) * | 2018-12-18 | 2019-04-09 | 苏州青石光电技术有限公司 | 多卡多头协同控制系统 |
CN111618424A (zh) * | 2019-02-28 | 2020-09-04 | 深圳市大族数控科技有限公司 | 一种三轴振镜共轴调节装置及焦距确认方法 |
CN112059411A (zh) * | 2020-09-30 | 2020-12-11 | 江阴丽晶电子科技有限公司 | 一种方便移动的轻便型动态聚焦旋光模组 |
CN112828480A (zh) * | 2021-01-15 | 2021-05-25 | 西安建筑科技大学 | 一种曲线细长孔反射斜面加工装置 |
CN113319425A (zh) * | 2021-05-14 | 2021-08-31 | 华中科技大学 | 一种多轴激光扫描光学系统 |
CN113319425B (zh) * | 2021-05-14 | 2022-08-05 | 华中科技大学 | 一种多轴激光扫描光学系统 |
CN113433687A (zh) * | 2021-06-29 | 2021-09-24 | 青岛金利天源智能科技有限公司 | 一种激光振镜扫描系统 |
CN113843539A (zh) * | 2021-11-23 | 2021-12-28 | 武汉华工激光工程有限责任公司 | 一种小型激光加工头 |
CN113843539B (zh) * | 2021-11-23 | 2023-04-18 | 武汉华工激光工程有限责任公司 | 一种小型激光加工头 |
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Effective date of registration: 20240523 Address after: Building 29, No. 99 Dingmaojing 15th Road, Zhenjiang New District, Zhenjiang City, Jiangsu Province, China, 212016 Applicant after: SINO-GALVO (JIANGSU) TECHNOLOGY CO.,LTD. Country or region after: China Address before: Room 209, West 2nd Floor, North Building, Caihong Building, No. 11 Shangdi Information Road, Haidian District, Beijing, 100085 Applicant before: SINO-GALVO (BEIJING) TECHNOLOGY Co.,Ltd. Country or region before: China |
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