CN105957920A - Preparation method for Cu<3>BiS<3> thin film - Google Patents

Preparation method for Cu<3>BiS<3> thin film Download PDF

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CN105957920A
CN105957920A CN201610452771.3A CN201610452771A CN105957920A CN 105957920 A CN105957920 A CN 105957920A CN 201610452771 A CN201610452771 A CN 201610452771A CN 105957920 A CN105957920 A CN 105957920A
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thin film
bis
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aqueous solution
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CN105957920B (en
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侯兆阳
柯三民
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Changan University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract

The invention provides a preparation method for a Cu<3>BiS<3> thin film. The preparation method comprises the following steps of step 1, dissolving a sulfur source, a copper source and a bismuth source into a solvent to be mixed uniformly to obtain a precursor solution, wherein thiuram is taken as the sulfur source; step 2, preparing a film from the precursor solution through a liquid phase method, and drying the film to obtain a precursor thin film; and step 3, performing annealing on the thin film to obtain the Cu<3>BiS<3> thin film. According to the preparation method, the preparation process is simple; the precursor solution has simple compositions; the requirement on the equipment is low; the prepared thin film is Cu<3>BiS<3> pure phase; and the selection window of the annealing process parameters is large.

Description

A kind of Cu3BiS3The preparation method of thin film
Technical field
The invention belongs to thin-film material technical field, be specifically related to a kind of Cu3BiS3The preparation side of thin film Method.
Background technology
For solving the serious energy crisis that society exists, the mankind are gradually increased and clean solar energy etc. The utilization of the energy.Solaode is the mode effectively utilizing solar energy.At second filial generation thin film solar In battery, only GIGS battery and CdTe battery have obtained actual application.But both thin film There is respective problem in battery.For CIGS solaode, the metal In reserves in material are less, Expensive, raw material supply problem is there may be when large-scale application;For CdTe solar-electricity Pond, the reserves of Te element are the most less, and the toxicity of Cd will produce potential problem of environmental pollution simultaneously.
Therefore, inexpensively, environmental protection, the absorbing layer of thin film solar cell material of rich reserves becomes everybody The target found.The material paid close attention to by everybody has CZTS and Cu3BiS3Material.Wherein Cu3BiS3In material, all elements reserves in nature are the abundantest, and environmental sound.This Outward, Cu3BiS3Material has suitable energy gap (1.4-1.5eV) and the high absorption coefficient of light (> 105cm-1), it is highly suitable as solar battery obsorbing layer material.
Existing Cu3BiS3Method for manufacturing thin film includes sputtering method, thermal evaporation, alloy after cure method Deng, the problems such as it is high that these physics class methods also exist equipment cost, area battery preparation difficulty, this A little preparation methoies are also not apparent from advancing Cu3BiS3The rapid progress of battery.For by Cu3BiS3Material exists Solaode obtains actual application, also needs to develop new Cu3BiS3The preparation method of thin film.
Summary of the invention
The technical problem to be solved is for above-mentioned the deficiencies in the prior art, it is provided that a kind of Cu3BiS3The preparation method of thin film.The method selection thiuram is as the sulfur source in precursor aqueous solution, front Driving solution composition simple, equipment requirements is low, and the thin film prepared is Cu3BiS3Pure phase, its annealing The selection window of technological parameter is big.
For solving above-mentioned technical problem, the technical solution used in the present invention is: a kind of Cu3BiS3Thin film Preparation method, it is characterised in that the method comprises the following steps:
Step one, precursor aqueous solution processed: Jiang Tongyuan, bismuth source and sulfur source are dissolved in solvent, after mix homogeneously Obtain precursor aqueous solution;Copper source is copper nitrate, copper chloride or Schweinfurt green, described bismuth source be bismuth nitrate, Bismuth chloride or bismuth acetate, described sulfur source is thiuram, and described solvent is DMF or two Methyl sulfoxide;In described precursor aqueous solution, the mol ratio in copper source, bismuth source and sulfur source is (2.8~3.5): (0.9~1.1): (0.9~1.1);
Step 2, masking: by precursor aqueous solution described in step one by liquid phase method masking, after drying To precursor thin film;
Step 3, annealing: precursor thin film described in step 2 is made annealing treatment under atmosphere protection, Obtain Cu3BiS3Thin film.
Above-mentioned a kind of Cu3BiS3The preparation method of thin film, it is characterised in that before described in step one Driving the concentration of thiuram in solution is 0.05mol/L~0.5mol/L.
Above-mentioned a kind of Cu3BiS3The preparation method of thin film, it is characterised in that liquid described in step 2 Phase method is spin-coating method.
Above-mentioned a kind of Cu3BiS3The preparation method of thin film, it is characterised in that dry described in step 2 Dry temperature is 100 DEG C~300 DEG C.
Above-mentioned a kind of Cu3BiS3The preparation method of thin film, it is characterised in that gas described in step 3 Atmosphere is S atmosphere or H2S atmosphere.
Above-mentioned a kind of Cu3BiS3The preparation method of thin film, it is characterised in that move back described in step 3 The temperature that fire processes is 300 DEG C~500 DEG C, and the time of described annealing is 0.5h~10h.
Above-mentioned a kind of Cu3BiS3The preparation method of thin film, it is characterised in that described solvent also includes Water, the volume of described water is the 0.1%~1.5% of precursor aqueous solution cumulative volume.
The present invention compared with prior art has the advantage that
1, the present invention selects the thiuram as the sulfur source in precursor aqueous solution, the chemical name of thiuram to be Tetramethyl thiuram disulfide, chemical formula is C6H12N2S4, because a thiuram molecule has Having 4 sulphur atoms so that it is have preferable coordination ability, the precursor aqueous solution of preparation is stable, the autumn simultaneously Blue nurse can also provide sufficient sulfur source in precursor aqueous solution, particularly with Cu3BiS3Material, itself The stoichiometric proportion of element sulphur is higher, owing to there being 4 sulphur atoms in a thiuram molecule, only needs Add less amount of thiuram and can meet Cu3BiS3The requirement of stoichiometry comparison S so that forerunner In thin film, existing part element sulphur exists, and advantageously reduces the annealing temperature in subsequent annealing process and moves back The fire time.
2, the present invention i.e. has suitable viscosity and surface tension added with the precursor aqueous solution of thiuram itself, Can easier obtain suitable film thickness, it may not be necessary to add the regulation of other additives such as viscosity Agent etc., make precursor aqueous solution composition simpler.Liquid phase method masking has low cost, and easy large area produces Etc. advantage, problem present in conventional physical method can be solved.
3, the present invention can also add in precursor aqueous solution water as modifying agent, adding of appropriate water Enter and can regulate Cu3BiS3The compactness extent of thin film, is conducive to obtaining the finest and close thin film.
With embodiment, the present invention is described in further detail below in conjunction with the accompanying drawings.
Accompanying drawing explanation
Fig. 1 is the Cu of the embodiment of the present invention 1 preparation3BiS3The XRD figure spectrum of thin film.
Fig. 2 is the Cu of the embodiment of the present invention 1 preparation3BiS3The SEM photograph of thin film.
Fig. 3 is the Cu of the embodiment of the present invention 2 preparation3BiS3The XRD figure spectrum of thin film.
Fig. 4 is the Cu of the embodiment of the present invention 6 preparation3BiS3The SEM photograph of thin film.
Detailed description of the invention
Embodiment 1
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 3.2mmol Schweinfurt green, 1mmol bismuth acetate and 1mmol Thiuram adds in 2mL DMF, and ultrasonic dissolution mix homogeneously, before preparing Drive solution;
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 1500rpm spin coating 20s, then dries 2min for 300 DEG C, repeats spin coating and drying course is some Secondary, obtain precursor thin film;
Step 3, annealing: by precursor thin film under S element atmosphere in 300 DEG C anneal 30min, To Cu3BiS3Thin film.
Fig. 1 is the Cu that the present embodiment prepares3BiS3The XRD figure spectrum of thin film, can from Fig. 1 To find out, in addition to the diffraction maximum of FTO glass, remaining diffraction maximum both corresponds to Cu3BiS3Spreading out of phase Penetrate peak, illustrate to obtain for Cu3BiS3Pure phase.Fig. 2 is the Cu that the present embodiment prepares3BiS3 The SEM photograph of thin film.Particle size in thin film is submicron order as seen from Figure 2.
Embodiment 2
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 0.7mmol copper nitrate, 0.2mmol bismuth nitrate and 0.2mmol Thiuram adds in 2mL DMF, and ultrasonic dissolution mix homogeneously, before preparing Drive solution.
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 2000rpm spin coating 20s, then dries 2min for 300 DEG C, repeats this process several times, obtain Precursor thin film;
Step 3, annealing: by precursor thin film 400 DEG C of annealing 10h under S element atmosphere, obtain Cu3BiS3Thin film.
Fig. 3 is the Cu that the present embodiment prepares3BiS3The XRD figure spectrum of thin film, can from Fig. 3 To find out, the thin film that the present embodiment prepares is Cu3BiS3Pure phase.
Embodiment 3
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 1.4mmol copper chloride, 0.5mmol bismuth chloride and 0.5mmol Thiuram adds 2mL dimethyl sulfoxide, ultrasonic dissolution mix homogeneously, prepares precursor aqueous solution;
Step 2, masking: precursor aqueous solution is spun on the molybdenum film of glass substrate surface by spin-coating method, Spin coating parameters is 1500rpm spin coating 20s, then dries 5min for 200 DEG C, repeats this process several times, Obtain precursor thin film;
Step 3, annealing: by precursor thin film 300 DEG C of annealing 3h under hydrogen sulfide atmosphere, obtain Cu3BiS3 Thin film.
Embodiment 4
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 3mmol Schweinfurt green, 0.9mmol bismuth acetate and 0.9mmol Thiuram adds in 2mL DMF, and ultrasonic dissolution mix homogeneously, before preparing Drive solution;
Step 2, masking: be spun on microscope slide by precursor aqueous solution by spin-coating method, spin coating parameters is 1500rpm spin coating 20s, then dries 5min for 200 DEG C, repeats this process several times, obtain forerunner Thin film;
Step 3, annealing: by precursor thin film 300 DEG C of annealing 0.5h under S element atmosphere, obtain Cu3BiS3Thin film.
Embodiment 5
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 2.9mmol Schweinfurt green, 1.1mmol bismuth acetate and 1.1mmol Thiuram adds in 2mL DMF, and ultrasonic dissolution mix homogeneously, before preparing Drive solution;
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 1500rpm spin coating 20s, then dries 2min for 300 DEG C, repeats spin coating and drying course is some Secondary, obtain precursor thin film;
Step 3, annealing: by precursor thin film under S element atmosphere in 300 DEG C anneal 30min, To Cu3BiS3Thin film.
The Cu that the present embodiment prepares3BiS3The non-constant width of annealing process window of thin film, annealing temperature At 300~400 DEG C, annealing time all can form Cu in the scope of 0.5h~8h3BiS3Phase, the widest Annealing process window will be very beneficial for optimizing annealing parameter further, it is thus achieved that high-quality Cu3BiS3Thin film is to realize the raising of thin-film solar cells transformation efficiency.
Additionally, in precursor aqueous solution, the ratio of Cu/Bi is also one of key parameter, when in precursor aqueous solution When the ratio of Cu/Bi is less than 3.3, in the thin film obtained after annealing, the ratio of Cu/Bi is then less than 3.0, It is easier in this case obtain Cu3BiS3Pure phase, the ratio of Cu/Bi higher in thin film then can The excess of Cu is caused to generate copper sulfide dephasign, relatively big to Electrical performance impact, vulcanize cupra The generation of phase is the most disadvantageous.Therefore, the ratio of Cu/Bi should be less than 3.3, preferred Cu/Bi's Ratio is less than 3.2.
Embodiment 6
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 3.2mmol Schweinfurt green, 1mmol bismuth acetate and 1mmol Thiuram adds in 2mL DMF, adds the deionized water of 20 μ L, ultrasonic molten Solve mix homogeneously, prepare precursor aqueous solution;
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 1500rpm spin coating 20s, then dries 2min for 300 DEG C, repeats this process several times, obtain Precursor thin film;
Step 3, annealing: by precursor thin film 300 DEG C of annealing 30min under S atmosphere, obtain Cu3BiS3 Thin film.
Fig. 4 is the Cu that the present embodiment prepares3BiS3The SEM photograph of thin film.Can be seen by Fig. 4 Going out particle size in thin film is still submicron order.Compared with Fig. 4 with Fig. 2, find to add on a small quantity The Cu obtained after water3BiS3Thin film is the finest and close, and the densification that there was added beneficially thin film of a small amount of water is described Change.
Embodiment 7
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 3.2mmol Schweinfurt green, 1mmol bismuth acetate and 1mmol Thiuram adds in 2mL DMF, adds the deionized water of 10 μ L, ultrasonic molten Solve mix homogeneously, prepare precursor aqueous solution;
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 1500rpm spin coating 20s, then dries 2min for 300 DEG C, repeats this process several times, obtain Precursor thin film;
Step 3, annealing: by precursor thin film 300 DEG C of annealing 30min under S element atmosphere, obtain Cu3BiS3Thin film.
Embodiment 8
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 3.2mmol Schweinfurt green, 1mmol bismuth acetate and 1mmol Thiuram adds in 2mL DMF, adds the deionized water of 30 μ L, ultrasonic molten Solve mix homogeneously, prepare precursor aqueous solution;
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 1500rpm spin coating 20s, then dries 2min for 300 DEG C, repeats this process several times, obtain Precursor thin film;
Step 3, annealing: by precursor thin film 300 DEG C of annealing 30min under S element atmosphere, obtain Cu3BiS3Thin film.
Embodiment 9
The present embodiment Cu3BiS3The preparation method of thin film comprises the following steps:
Step one, precursor aqueous solution processed: by 3.2mmol Schweinfurt green, 1mmol bismuth acetate and 1mmol Thiuram adds in 2mL DMF, adds the deionized water of 2 μ L, ultrasonic molten Solve mix homogeneously, prepare precursor aqueous solution;
Step 2, masking: be spun on FTO glass by precursor aqueous solution by spin-coating method, spin coating is joined Number is 1500rpm spin coating 20s, then dries 2min for 300 DEG C, repeats this process several times, obtain Precursor thin film;
Step 3, annealing: by precursor thin film 300 DEG C of annealing 30min under S element atmosphere, obtain Cu3BiS3Thin film.
By embodiment 6 to 9, the addition of water is relatively big, when the addition of water on the impact of technique (more than the 3% of precursor aqueous solution volume fraction) when measuring too high, the thin film planarization that spin coating obtains is significantly Reducing, uneven situation occur, the lowest water addition is then less on compactness extent impact, water Addition is precursor aqueous solution volume 0.1%~1.5% more suitable, preferably 0.1%~1%.
The above, be only presently preferred embodiments of the present invention, not impose any restrictions the present invention.All It is that any simple modification, change and the equivalence made above example according to inventive technique essence becomes Change, all still fall within the protection domain of technical solution of the present invention.

Claims (7)

1. a Cu3BiS3The preparation method of thin film, it is characterised in that the method comprises the following steps:
Step one, precursor aqueous solution processed: Jiang Tongyuan, bismuth source and sulfur source are dissolved in solvent, after mix homogeneously Obtain precursor aqueous solution;Copper source is copper nitrate, copper chloride or Schweinfurt green, described bismuth source be bismuth nitrate, Bismuth chloride or bismuth acetate, described sulfur source is thiuram, and described solvent is DMF or two Methyl sulfoxide;In described precursor aqueous solution, the mol ratio in copper source, bismuth source and sulfur source is (2.8~3.5): (0.9~1.1): (0.9~1.1);
Step 2, masking: by precursor aqueous solution described in step one by liquid phase method masking, after drying To precursor thin film;
Step 3, annealing: precursor thin film described in step 2 is made annealing treatment under atmosphere protection, Obtain Cu3BiS3Thin film.
A kind of Cu the most according to claim 13BiS3The preparation method of thin film, it is characterised in that Described in step one, in precursor aqueous solution, the concentration of thiuram is 0.05mol/L~0.5mol/L.
A kind of Cu the most according to claim 13BiS3The preparation method of thin film, it is characterised in that Liquid phase method described in step 2 is spin-coating method.
A kind of Cu the most according to claim 13BiS3The preparation method of thin film, it is characterised in that The temperature dried described in step 2 is 100 DEG C~300 DEG C.
A kind of Cu the most according to claim 13BiS3The preparation method of thin film, it is characterised in that Atmosphere described in step 3 is S atmosphere or H2S atmosphere.
A kind of Cu the most according to claim 13BiS3The preparation method of thin film, it is characterised in that Described in step 3, the temperature of annealing is 300 DEG C~500 DEG C, and the time of described annealing is 0.5h~10h.
A kind of Cu the most according to claim 13BiS3The preparation method of thin film, it is characterised in that Solvent described in step one also includes that water, the volume of described water are precursor aqueous solution cumulative volume 0.1%~1.5%.
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