CN105953029A - Composite thermal insulation material for heating of flexible pipeline - Google Patents
Composite thermal insulation material for heating of flexible pipeline Download PDFInfo
- Publication number
- CN105953029A CN105953029A CN201610414873.6A CN201610414873A CN105953029A CN 105953029 A CN105953029 A CN 105953029A CN 201610414873 A CN201610414873 A CN 201610414873A CN 105953029 A CN105953029 A CN 105953029A
- Authority
- CN
- China
- Prior art keywords
- fabric
- fiber
- thermal insulation
- glass
- silicone rubber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L59/00—Thermal insulation in general
- F16L59/02—Shape or form of insulating materials, with or without coverings integral with the insulating materials
- F16L59/029—Shape or form of insulating materials, with or without coverings integral with the insulating materials layered
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/043—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/02—Layered products essentially comprising sheet glass, or glass, slag, or like fibres in the form of fibres or filaments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B25/00—Layered products comprising a layer of natural or synthetic rubber
- B32B25/04—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B25/00—Layered products comprising a layer of natural or synthetic rubber
- B32B25/10—Layered products comprising a layer of natural or synthetic rubber next to a fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Insulation (AREA)
Abstract
The invention discloses a composite thermal insulation material for heating of a flexible pipeline. The composite thermal insulation material comprises a base material, a thermal insulation layer and an outer covering layer; the base material comprises an etching stainless steel heating film, and upper silicone rubber coating glass fabric and lower silicone rubber coating glass fabric are arranged on the two faces of the etching stainless steel heating film respectively; the thermal insulation layer comprises aerogel thermal insulation felt, and the aerogel thermal insulation felt is arranged on the outer side of the upper silicone rubber coating glass fabric and is externally provided with glass fiber felt or a foaming silicone rubber layer; the outer covering layer is arranged on the outer side of the glass fiber felt or the foaming silicone rubber layer. According to the composite thermal insulation material, the aerogel thermal insulation felt is adopted as the thermal insulation material, the heat conductivity coefficient of the aerogel thermal insulation felt is about 0.01 W/mK, and therefore production of a flexible heater with the high thermal insulation performance and the attractive appearance becomes possible. The surface temperature of the heater is lowered, the energy consumption of the heater is greatly reduced, and the service life of the heater is prolonged.
Description
Technical field
The invention belongs to flexible duct heating technique, especially relate to a kind of being combined for flexible duct heating
Insulation material.
Background technology
The heating of semiconductor vacuum pipeline has been widely used in many production process of semiconductor.Due to many half
In conductor manufacturing process, (such as CVD, PECVD, Etch) has the substantial amounts of generation coagulating product,
Heating to pipeline can avoid this type of product deposition on inner-walls of duct, thus, it is to avoid pipeline
Blocking, to ensure the properly functioning of semiconductor production equipment.The quasiconductor pipeline of one perfect heating can be big
Increase the utilization rate of oil (gas) filling device, extends the life-span of vacuum pump, improves the yield of finished product, and reduces operative employee
People and the contact of toxic gas.
Owing to pipeline regularly must be safeguarded, such as, replacement o circle, the pipeline heating of quasiconductor
Set allows for facilitating mounting or dismounting.This just significantly limit the use of insulation material.Especially must be to complexity
The heating of the parts (such as, valve) of shape.
Foamed silastic and glass fibre are the most the most frequently used insulation materials.Foamed silastic can be made non-
The heater of Chang Meiguan, but, its heat conductivity higher (about 0.1W/mK), therefore, heater
Surface temperature is higher, and heat dissipation capacity is the biggest.Such as some technique requires heat to 180 DEG C, surface temperature up to
90℃.This not only causes the loss of heat, and may cause the scald of operator.Glass fibre has
Relatively low heat conductivity, is widely used in the insulation of straight tube.But, owing to being difficult to that complex parts is wrapped
Cover.So the complex parts heater of employing glass fibre is the most ugly, and production cost is high.
Therefore, for the heating of semiconductor vacuum pipeline, how to improve the comprehensive heat-insulating property of heater with regard to pole
It is important.The challenge of the insulation of flexible heater always maximum.Because the material often flexibility of high insulation is relatively
Difference.And the material of flexibility has organic material often, not only non-refractory, and also flammable, security performance is relatively
Difference.
Summary of the invention
It is an object of the invention to provide a kind of compound insulating material for flexible duct heating, it has guarantor
Temp effect is good and the feature of good looking appearance, to solve the problems referred to above that in prior art, flexible duct heating exists.
For reaching this purpose, the present invention by the following technical solutions:
A kind of compound insulating material for flexible duct heating, it includes base material, thermal insulation layer and surrounding layer,
Wherein, described base material includes etching rustless steel heating film, and the two sides of described etching rustless steel heating film sets respectively
Being equipped with Silicone Rubber Coated glass-fiber-fabric and lower Silicone Rubber Coated glass-fiber-fabric, described thermal insulation layer includes aerogel heat-proof
Felt, described aerogel heat-proof felt is arranged at the outside of described upper Silicone Rubber Coated glass-fiber-fabric, and described aeroge
Heat insulation felt is outside equipped with any one of glass mat or foamed silastic layer, and described surrounding layer is arranged at described
Glass mat or the outside of foamed silastic layer.
Especially, described surrounding layer includes glass-fiber-fabric and outer Teflon coating glass-fiber-fabric, and described glass-fiber-fabric is arranged
In the outside of described glass mat, described outer Teflon coating glass-fiber-fabric is arranged at the outside of described glass-fiber-fabric.
Especially, described surrounding layer is outer Silicone Rubber Coated glass-fiber-fabric, and described aerogel heat-proof felt is wrapped in institute
Stating in foamed silastic layer, described outer Silicone Rubber Coated glass-fiber-fabric is arranged at the outside of described foamed silastic layer.
Especially, the inner side of described lower Silicone Rubber Coated glass-fiber-fabric is provided with interior Teflon coating glass-fiber-fabric.
Beneficial effects of the present invention is, compared with prior art the described complex heat-preservation for flexible duct heating
Material uses aerogel heat-proof felt as insulation material, and its heat conductivity is at about 0.01W/mK, than foaming silicon
Rubber is low 10 times, and it is used in combination with glass fibre or foamed silastic, it is adaptable to directly perceived or complicated shape
Heating.Make to produce high insulation flexible heater the most attractive in appearance to be possibly realized.So, heater is reduced
Surface temperature, greatly reduce the energy consumption of heater, add the service life of heater, have higher
Value.
Accompanying drawing explanation
Fig. 1 is the compound insulating material for flexible duct heating that the specific embodiment of the invention 1 provides
Profile；
Fig. 2 is the compound insulating material for flexible duct heating that the specific embodiment of the invention 2 provides
Profile.
Detailed description of the invention
Further illustrate technical scheme below in conjunction with the accompanying drawings and by detailed description of the invention.
Embodiment one:
Referring to shown in Fig. 1, Fig. 1 is heating for flexible duct of the specific embodiment of the invention 1 offer
The profile of compound insulating material.
In the present embodiment, a kind of for flexible duct heating compound insulating material include base material, thermal insulation layer and
Surrounding layer, described base material includes etching rustless steel heating film 1, and the two sides of described etching rustless steel heating film 1 is divided
Not being provided with Silicone Rubber Coated glass-fiber-fabric 2 and lower Silicone Rubber Coated glass-fiber-fabric 3, described thermal insulation layer uses airsetting
Glue heat insulation felt 4, and described aerogel heat-proof felt 4 is arranged at the outside of described upper Silicone Rubber Coated glass-fiber-fabric 2,
Described surrounding layer includes glass mat 5, glass-fiber-fabric 6 and outer Teflon coating glass-fiber-fabric 7, described glass fibers
Dimension felt 5 is arranged at the outside of described aerogel heat-proof felt 4, and described glass-fiber-fabric 6 is arranged at described glass fibre
The outside of felt 5, described outer Teflon coating glass-fiber-fabric 7 is arranged at the outside of described glass-fiber-fabric 6.Under described
The inner side of Silicone Rubber Coated glass-fiber-fabric 3 is provided with interior Teflon coating glass-fiber-fabric 8.
In the present embodiment, the heat-insulation layer of compound insulating material uses aerogel heat-proof felt 4, but aeroge is difficult to
Individually use in quasiconductor pipeline complex parts heater.Even if in straight tube heater, due to surface
Soft not, and relatively costly.Therefore, it is not appropriate for being used alone.By aerogel heat-proof felt 4 with
The combination of glass fibre forms compound insulating material, it is adaptable in straight tube heater.
Embodiment two:
Referring to shown in Fig. 2, Fig. 2 is heating for flexible duct of the specific embodiment of the invention 2 offer
The profile of compound insulating material.
In the present embodiment, a kind of for flexible duct heating compound insulating material include base material, thermal insulation layer and
Surrounding layer, described base material includes etching rustless steel heating film 1, and the two sides of described etching rustless steel heating film 1 is divided
Not being provided with Silicone Rubber Coated glass-fiber-fabric 2 and lower Silicone Rubber Coated glass-fiber-fabric 3, described thermal insulation layer uses airsetting
Glue heat insulation felt 4, and described aerogel heat-proof felt 4 is arranged at the outside of described upper Silicone Rubber Coated glass-fiber-fabric 2,
Described surrounding layer includes foamed silastic layer 9 and outer Silicone Rubber Coated glass-fiber-fabric 10, described aerogel heat-proof felt
4 are wrapped in described foamed silastic layer 9, and described outer Silicone Rubber Coated glass-fiber-fabric 10 is arranged at described foaming
The outside of silastic-layer 9.
In the present embodiment, the heat-insulation layer of compound insulating material uses aerogel heat-proof felt 4, passes through aerogel heat-proof
Felt 4 forms compound insulating material with the combination of foamed silastic layer 9, it is adaptable to complicated shape (such as valve,
Flange) heating, both reached to improve the purpose of insulation, again so that heater good looking appearance.
Above example simply elaborates ultimate principle and the characteristic of the present invention, and the present invention is not limited by above-mentioned example
System, without departing from the spirit and scope of the present invention, the present invention also has various change and change, these
Change and change both fall within scope of the claimed invention.Claimed scope is by appended power
Profit claim and equivalent thereof define.
Claims (4)
1., for a compound insulating material for flexible duct heating, it includes base material, thermal insulation layer and surrounding layer,
It is characterized in that, described base material includes etching rustless steel heating film, the two sides of described etching rustless steel heating film
Being respectively arranged with Silicone Rubber Coated glass-fiber-fabric and lower Silicone Rubber Coated glass-fiber-fabric, described thermal insulation layer includes airsetting
Glue heat insulation felt, described aerogel heat-proof felt is arranged at the outside of described upper Silicone Rubber Coated glass-fiber-fabric, and described
Aerogel heat-proof felt is outside equipped with any one of glass mat or foamed silastic layer, and described surrounding layer is arranged
In described glass mat or the outside of foamed silastic layer.
Compound insulating material for flexible duct heating the most according to claim 1, it is characterised in that
Described surrounding layer includes glass-fiber-fabric and outer Teflon coating glass-fiber-fabric, and described glass-fiber-fabric is arranged at described glass fibers
The outside of dimension felt, described outer Teflon coating glass-fiber-fabric is arranged at the outside of described glass-fiber-fabric.
Compound insulating material for flexible duct heating the most according to claim 1, it is characterised in that
Described surrounding layer is outer Silicone Rubber Coated glass-fiber-fabric, and described aerogel heat-proof felt is wrapped in described foamed silastic
In layer, described outer Silicone Rubber Coated glass-fiber-fabric is arranged at the outside of described foamed silastic layer.
Compound insulating material for flexible duct heating the most according to claim 1 and 2, its feature
Being, the inner side of described lower Silicone Rubber Coated glass-fiber-fabric is provided with interior Teflon coating glass-fiber-fabric.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610414873.6A CN105953029B (en) | 2016-06-14 | 2016-06-14 | A kind of compound insulating material for flexible duct heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610414873.6A CN105953029B (en) | 2016-06-14 | 2016-06-14 | A kind of compound insulating material for flexible duct heating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105953029A true CN105953029A (en) | 2016-09-21 |
| CN105953029B CN105953029B (en) | 2018-12-07 |
Family
ID=56906378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610414873.6A Active CN105953029B (en) | 2016-06-14 | 2016-06-14 | A kind of compound insulating material for flexible duct heating |
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| Country | Link |
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| CN (1) | CN105953029B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107453295A (en) * | 2017-10-07 | 2017-12-08 | 江苏捷通管业科技有限公司 | A kind of power pipe with barrier hot function |
| CN107676565A (en) * | 2017-11-07 | 2018-02-09 | 西安三星加热装置有限公司 | Semiconductor technology pipe heating device |
| CN107990153A (en) * | 2017-12-25 | 2018-05-04 | 北京市热力工程设计有限责任公司 | A kind of heat distribution pipeline with optical cable |
| CN108386645A (en) * | 2017-05-17 | 2018-08-10 | 盖茨公司 | Heat fluid conduit systems |
| CN108468908A (en) * | 2018-05-15 | 2018-08-31 | 江苏杰润绝热材料科技有限公司 | A kind of production method of collet and collet |
| CN109357108A (en) * | 2018-12-14 | 2019-02-19 | 湖南星鑫航天新材料股份有限公司 | Compound heat shroud of a kind of flexibility special type and preparation method thereof |
| CN113459611A (en) * | 2021-07-03 | 2021-10-01 | 上海国玻汽车科技有限公司 | Thermal-insulation fireproof clothing for power battery and preparation method |
| CN113844135A (en) * | 2021-09-17 | 2021-12-28 | 新华盛节能科技股份有限公司 | Mesoporous silica heat-insulating wrapping material and preparation method thereof |
| CN116278195A (en) * | 2023-05-25 | 2023-06-23 | 信达科创（唐山）石油设备有限公司 | Nonmetallic composite continuous pipe with heat preservation function |
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| CN205063843U (en) * | 2015-09-25 | 2016-03-02 | 江苏联冠高新技术有限公司 | Compound incubation oil pipe |
| CN105570615A (en) * | 2016-01-19 | 2016-05-11 | 南京航空航天大学 | Gradient nano aerogel glass fiber cotton blanket used for high-temperature pipeline |
| CN205716238U (en) * | 2016-06-14 | 2016-11-23 | 无锡新辉龙科技有限公司 | A kind of compound insulating material for flexible duct heating |
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2016
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| JPH04118233A (en) * | 1990-09-10 | 1992-04-20 | Chuko Kasei Kogyo Kk | Filmy material |
| CN2295090Y (en) * | 1997-03-24 | 1998-10-21 | 淄博市临淄镭射技术研究所 | Heat-insulation valve |
| CN201582530U (en) * | 2009-12-31 | 2010-09-15 | 岑志超 | Soft body heat insulation structure |
| KR20130008813A (en) * | 2011-07-13 | 2013-01-23 | 허일규 | Method for manufacturing insulator for pipe using aerosol |
| CN103130454A (en) * | 2011-11-29 | 2013-06-05 | 航天特种材料及工艺技术研究所 | Low heat conductance silicon rubber foam material and manufacture method thereof |
| CN203892811U (en) * | 2014-05-23 | 2014-10-22 | 余开伟 | Novel compound insulation device for steam injection pipeline |
| CN205036978U (en) * | 2015-09-22 | 2016-02-17 | 东莞市有料信息技术有限公司 | Anticorrosive plastic pipe material that weatherability is strong |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108386645A (en) * | 2017-05-17 | 2018-08-10 | 盖茨公司 | Heat fluid conduit systems |
| CN107453295A (en) * | 2017-10-07 | 2017-12-08 | 江苏捷通管业科技有限公司 | A kind of power pipe with barrier hot function |
| CN107676565A (en) * | 2017-11-07 | 2018-02-09 | 西安三星加热装置有限公司 | Semiconductor technology pipe heating device |
| CN107990153A (en) * | 2017-12-25 | 2018-05-04 | 北京市热力工程设计有限责任公司 | A kind of heat distribution pipeline with optical cable |
| CN108468908A (en) * | 2018-05-15 | 2018-08-31 | 江苏杰润绝热材料科技有限公司 | A kind of production method of collet and collet |
| CN109357108A (en) * | 2018-12-14 | 2019-02-19 | 湖南星鑫航天新材料股份有限公司 | Compound heat shroud of a kind of flexibility special type and preparation method thereof |
| CN109357108B (en) * | 2018-12-14 | 2024-04-02 | 湖南星鑫航天新材料股份有限公司 | Flexible special composite heat-proof sleeve and manufacturing method thereof |
| CN113459611A (en) * | 2021-07-03 | 2021-10-01 | 上海国玻汽车科技有限公司 | Thermal-insulation fireproof clothing for power battery and preparation method |
| CN113844135A (en) * | 2021-09-17 | 2021-12-28 | 新华盛节能科技股份有限公司 | Mesoporous silica heat-insulating wrapping material and preparation method thereof |
| CN116278195A (en) * | 2023-05-25 | 2023-06-23 | 信达科创（唐山）石油设备有限公司 | Nonmetallic composite continuous pipe with heat preservation function |
| CN116278195B (en) * | 2023-05-25 | 2023-08-11 | 信达科创（唐山）石油设备有限公司 | Nonmetallic composite continuous pipe with heat preservation function |
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| CN105953029B (en) | 2018-12-07 |
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