CN1059496C - Radiation thermometer - Google Patents
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- CN1059496C CN1059496C CN 96120694 CN96120694A CN1059496C CN 1059496 C CN1059496 C CN 1059496C CN 96120694 CN96120694 CN 96120694 CN 96120694 A CN96120694 A CN 96120694A CN 1059496 C CN1059496 C CN 1059496C
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Abstract
The present invention relates to a radiation type thermometer which comprises a sensing device, a light chopper, an electrical energy exciter and a signal processing device, wherein the sensing device is used for sensing electrical energy applied by outside power supplies for generating a first set sensing signals and sensing infrared radiation from outside a marker for generating a second set of sensing signals; the light chopper is arranged between the marker and the sensing device; the electrical energy exciter is used for applying electrical energy to the sensing device; the signal processing device is used for processing the sensing signals and calculating infrared radiation quantity received by the sensing device for calculating the temperature of the marker; a sensing element is composed of two focusing electric sensing elements which are connected in parallel or in series with opposite polarization directions for eliminating noise generated by the sensing device.
Description
The present invention relates to a kind of thermometer, particularly a kind of radiation thermometer.Its principle is to utilize electric correcting mode, the infrared radiation that produces by object that estimation heat radiation sensing element (sensing apparatus) is accepted, and according to this estimate amount of infrared radiation calculate the temperature of subject matter.
The temperature that measures object is for a long time one to being that one generally and important techniques in science and the industry.The method of measuring temperature has two classes: a class is a contact-type, and another kind of is non-contact type.The former is an actual contact of utilizing the subject matter of sensing element and temperature to be determined, and hot-fluid reaches the temperature measuring element via contacting interface, makes its meter temperature and gets induced signal.There is a segment distance in the latter between sensing apparatus and subject matter, hot-fluid shifts via the heat radiation between subject matter and sensing element.
Utilize the measuring method of radiant quantity that many advantages are arranged: (1) sensing element is little to the influence of subject matter than contact-type, and is so measurement is more accurate, hour all the more so with the thermal capacitance of subject matter especially; (2) can exempt caused trouble of contact and possible danger.The contact human body measures infection and plug-type inconvenience that can cause when for example, being located at the preventative monitoring of measurement, fire of surface temperature of big electric power facility of eminence and medical diagnosis.Therefore, for a long time, the mode that contactless measuring temp is not to use the person to wish most always.
One example of contactless measuring temp is to be the electric type radiometer of Jiao.Basically, this kind radiometer is a principle of utilizing burnt electrical effect, that is make sensing element with burnt electric material, when between this sensing element and the subject matter for the treatment of measuring temperature because temperature is different, cause radiant heat exchange to a certain degree, burnt inductance is surveyed element and is subjected to from the thermal-radiating light heating of the infrared ray of subject matter, when occurrence temperature own changes, because the characteristic of burnt electric material, induction thereon produces nonequilibrium transient state electric charge (this is so-called burnt electrical effect), and this electric charge produces an induction current via external circuits again.
Fig. 1 shows an example of the burnt electric type radiometer of commonly using of electric school formula, and Fig. 2 A shows the structure of the sensing element 10 that is adopted in this radiometer.And Fig. 2 B is the equivalent circuit diagram that burnt inductance is surveyed element shown in Fig. 2 A.Shown in two figure like this, sensing element 10 mainly comprises: a burnt material layer 11, and when being added the rising of thermic temperature, induction thereon produces nonequilibrium transient state electric charge; One resistance elements 12 is located at this first burnt material layer 11 1 sides; One first heating terminal T1 and one second heating terminal T2 are located at resistance elements 12 both sides respectively, can utilize lead-in wire 14 and extraneous power supply to link with heating resistor material layer 12; One bottom electrode 13 is located at the opposite side of burnt material layer 11, can utilize lead-in wire 15 to make burnt material layer 11 respond to the flow of charge of generation to external circuit; And a black clad 16, be attached to resistance elements 12 and burnt material layer 11 opposition sides, in order to the come from the outside infrared radiation of subject matter of absorption, conduct heat to burnt material layer 11 again.Electrode 13 has positive polarity or negative polarity, and its deciding means is as follows.When burnt material layer 11 produced electric current because of being heated, if electrode 13 constitutes the source point (source) of this electric current, then it had positive polarity.Otherwise if electrode 13 constitutes the meeting point (sink) of this electric current, then it has negative polarity.The definition of this relevant polarity is applicable to the full text of this instructions.
Secondly with reference to figure 1, the aforementioned structure of commonly using the burnt electric type radiometer of electric school formula is described.This radiometer mainly comprises: sensing element 10 in order to the light heating of accept the to come from the outside electrical heating of power supply or the subject matter 1 (radiation source) that comes from the outside, and produces an induction current in external circuits; Chopper 2, be situated between and be located between subject matter 1 and the sensing element 10, rotate by continuing, to control from subject matter 1 infrared light towards sensing element 10 radiation, only allow that it passes chopper 2 and be that sensing element 10 is received in part-time, induced signal amplifier 3 is connected with sensing element 10 by lead-in wire 15, is amplified in order to the induction current that sensing element 10 is produced; Motor 24 in order to drive chopper 2, makes its rotation; Driving circuit 25 is in order to CD-ROM drive motor 24; Power measurement device 4 is added on the size of the electric energy of sensing element 10 in order to measurement; Isolated amplifier 5 is in order to add electric energy in sensing element 10; Simulation multiplexer 9, in order to optionally in the future the signal in self-induction signal amplifier 3 or the power measurement device 4 input to A/D transducer 20; Microprocessor 21 in order to sending control signal etc. to driving circuit 25, A/D transducer 20, simulation multiplexer 9, D/A transducer 6, and handles self simulation multiplexer 9 to be transformed to the data of digital signal again through A/D transducer 20; Reservoir 22 links with microprocessor 21, uses for microprocessor 21 access datas; Display 23 links with microprocessor 21, in order to the data that show that microprocessor 21 is provided; Start button 26, in order to start microprocessor 21.Electrical heating signal by microprocessor 21 produces converts simulating signal to through D/A transducer 6, after isolated amplifier 5 is amplified, puts on sensing element 10 more again.
Secondly, this manner of execution of commonly using the burnt electric type radiometer of electric school formula of simple declaration.The infrared radiation that is sent by subject matter 1 imposes through chopper 2 cuts light, the preceding semiperiod in chopper 2 rotations is input to sensing element 10, and produce a burnt electro-induction signal, this signal is after signal amplifier 3 is amplified, can be selected to input to A/D transducer 20 by multiplexer 9, impose the A/D conversion, then handled by microprocessor 21 again.In the later half cycle of chopper 2 rotations, a heating voltage of attempting electric power is input to sensing element 10, will heat terminal 12 heating, makes its burnt material layer 11 produce a burnt electro-induction signal.This two burnt electro-induction signal is compared, when both reach balance (both difference is less than the tolerance deviation value), can be by the known electric heating power of artificial input, know heat radiation power from the subject matter of waiting to implement measuring temp.Because this radiometer utilizes burnt electric material to constitute the major part of sensing element 10, and adopts electric correcting mode to ask for the heat radiation power of subject matter, so be the burnt electric type radiometer of an electric school formula.Take this mode, often must alternately implement the heating of electrical heating and light, just can reach the signal-balanced situation (this is called auto zero) of aforementioned two burnt electro-induction through repeatedly attempting.
By above explanation as can be known, the burnt electric type radiometer of the electric school formula of commonly using shown in Figure 1 has following shortcoming:
(1), owing to the chopper that must establish a lasting rotation, so mechanism is bigger than complexity and volume.
(2), owing to must implement repeatedly electrical heating, and than power consumption.
(3), because auto zero must repetitiousness be implemented repeatedly electrical heating and light heating, can predict the ir radiant power that subject matter sends so must take a long time, cause this one to commonly use the electric school electric type radiometer of formula Jiao and be unsuitable for commercialization.
(4), because the capacitive coupling (with reference to figure 1) of 13 of the resistance elements 12 of sensing element and bottom electrodes, the radio-frequency component of heating voltage can run through element and be delivered to signal amplifier.This kind capacitively coupled signal is not the burnt electric signal that is produced by heating, therefore can form glitch.The burnt electric type radiometer of the electric school formula of commonly using shown in Figure 1 utilizes expensive isolated amplifier head it off, causes its manufacturing cost to improve.
The burnt electric type radiation thermometer that another is commonly used is disclosed in United States Patent (USP) the 4th, 797, in No. 840 " infrared electronic thermometer and measuring temp methods thereof ".In the mode of this patent, utilize piezoelectric effect to survey signal to proofread and correct burnt inductance, with compensation because of burnt inductance surveys that element material is aging, temperature drift or the unstable institute of electronic component are caused this Jiao's inductance survey signal to make a variation.With reference to figure 3 and Fig. 4, brief introduction its correcting circuit that is adopted and bearing calibration.As shown in Figure 3, adopt a burnt inductance to survey element 31 in the correcting circuit 30, it comprises: a piezoelectric diaphragm 35; And an outside plane electrode 32, be located at piezoelectric diaphragm 35 side outwardly, constitute by 33,34 of two electrode slices that separate.Electrode slice 33,34 forms the tandem sensing element of an anti-microphonic noise, and correcting circuit 30 comprises an amplifying circuit 37, a microprocessor 38, a switch 36 and a pumping signal circuit 39 in addition.Fig. 3 one hollow tubular wave guide 42, makes it arrive burnt inductance and surveys element 31 places by the infrared radiation that subject matter 1 sends in order to guiding.Shutter 43 (its driving mechanism is not shown) only allows that this infrared radiation surveys element 31 by arriving burnt inductance in the required time.Electrode slice 34 is connected with amplifying circuit 37, and 33 of electrode slices are connected to switch 36, and switch 36 optionally is connected to electrode slice 33 amplifying circuit 37 or is connected to pumping signal circuit 39.Pumping signal circuit 39 can produce a predetermined electric correction signal 40, in order to excitation diaphragm 35, makes it produce a mechanical stress, then produces an electrical signal of reaction 41 (see figure 4)s.The value of the electrical signal of reaction 41 of (when burnt inductance survey element 31 takes place to wear out as yet) is installed the initial stage at thermometer, has been stored and has been used as a preassigned.When carrying out correction operation, switch 36 and pumping signal circuit 39 are controlled by microprocessor 38, and pumping signal circuit 39 can be accepted the instruction of microprocessor 38, and produce a predetermined electric correction signal 40.
Secondly, aforesaid U.S. Patent the 4th, 797 is described, No. 840 disclosed correction operations of commonly using burnt electric type radiation thermometer.Before being about to carry out the measuring temp operation, under shutter 43 closed conditions, electrode slice 33 is connected to pumping signal circuit 39 with switch 36, predetermined electric correction signal 40 is applied in electrode slice 33.Because the piezoelectric properties of diaphragm 35 can cause a mechanical stress, this mechanical stress then make diaphragm 35 produce an electrical signal of reaction 41 ' at electrode 32, electrical signal of reaction 41 ' is reached amplifying circuit 37 through electrode slice 34.Because electric correction signal 40 is a predetermined value, electrical signal of reaction 41 ' becomes at burnt inductance from the departure of aforementioned preassigned electrical signal of reaction 41 surveys the index that material that element 31 produced is waited for a long time and changed, and this departure provides by microprocessor 38 and makes suitably to revise necessary control information.
Be next to after the correction operation, switch 36 is connected to amplifying circuit 37 with electrode slice 33, begins to carry out the measuring temp operation.Shutter 43 is opened, made infrared radiation that subject matter 1 produced under the guiding of wave guide 42, arrive burnt inductance and survey element 31 places, the focusing inductance is surveyed element 31 and is carried out the light heating.Suppose that it is Vt ' that burnt inductance is surveyed the energy response value of 31 pairs of light heating of element, utilize microprocessor 38 to be proofreaied and correct with the control information that is obtained via the aforementioned corrected operation, to mend reward, promptly obtain the energy response value Vt that revises because of after burnt inductance surveys that element material is aging and wait the deviation that is produced.Utilize following formula again, can calculate the temperature of subject matter 1:
Vt=f (Ta) * (Tt
4-Ta
4) wherein, Ta is an ambient temperature, Tt is the temperature of subject matter, Vt is a calibrated energy response value and f (Ta) is the function of ambient temperature Ta.
Described correction operation is that supposition is established the material aging of burnt electrical measurement element to its burnt electroresponse degree influence and in full accord to the influence of its piezoelectric modulus basically.In fact, burnt electroresponse degree is the influence that is subjected to all multiparameters (for example burnt inductance is surveyed the piezoelectric modulus of element, burnt inductance is surveyed the thermal time constant of element and the thermal conductance of burnt inductance survey element and its context etc.), piezoelectric modulus only only is one of them, so this hypothesis is not accurate.Therefore, can not expect, can obtain correct measuring temp result by correction operation based on aforementioned false supposition.When correction operation, because of original anti-microphonic noise sensor structure is no longer linked by series connection, the mechanism of former anti-microphonic noise is disappeared, cause the noise of correction to increase, can not obtain correct measurement more.
At United States Patent (USP) the 4th, 797, in 840, other discloses a kind of utilization and is subjected to the heating element that temperature control remains in constant temperature, asks for the mode of the temperature of subject matter.When shutter opening, burnt inductance survey element receives the infrared radiation from subject matter, and produces one first sympathetic signal; And work as shutter close, that is when the inductance of not focusing is surveyed element and carried out the light heating, the infrared radiation that sends of this heating element is through reflection certainly, and for same burnt inductance survey element is received, and produce one second induced signal.Utilize the temperature of known heating element and measured first induced signal and second induced signal, and calculate the temperature of subject matter.Adopt this mode, need constantly impose heating heating element, and its temperature is controlled in constant because power consumption is big, use cost height and be difficult for miniaturization not only.Desire to reach stable rather time-consuming because of the temperature of heating element again, and be unsuitable for commercialization.In addition and since the foundation of subject matter temperature computation non-be directly from the exhausted degree of subject matter to radiant quantity, but utilize the induced signal of burnt inductance survey element, so thermometer non-be the absolute radiation thermometer.
In addition, at United States Patent (USP) the 4th, 790, No. 324 and the 4th, 602, in No. 642, all utilize to be subjected to temperature control and to remain in the black matrix of constant temperature in Tc.Its shortcoming with at United States Patent (USP) the 4th, 797, in No. 840, utilize and be subjected to the heating element that temperature control remains in constant temperature, the mode of temperature of asking for subject matter is roughly the same.
At United States Patent (USP) the 4th, 900, in No. 162 the infrared radiation temperature system, be provided with a radiation detector and make the latter remain in a heating cooling unit of constant temperature in order to heat, to cool off this radiation detector, when one and the proportional radiometer signal that makes zero of temperature difference of radiation detector and subject matter when reaching zero, judge that promptly this temperature difference is zero, and can obtain the temperature of subject matter by the known radiation detector of temperature.Because heating, cooling operations must consume a large amount of electric currents, so also there is the use cost height in a thermometry system, is difficult for the problem of miniaturization.
At United States Patent (USP) the 4th, 907, in No. 895, disclose the chopper that an infrared radiation thermometer is used, this chopper is by motor driven rotation, and must expend a large amount of power supplys, thereby causes shortcoming as hereinbefore.And because of it does not implement correction, stability relies upon the expensive components of high stability for a long time, and causes manufacturing cost to improve.
At United States Patent (USP) the 4th, 993, in No. 424 the infrared medical radiation thermometer, utilize a correction plate that is articulated in probe front to be made for the usefulness of correction, this correction plate also must be subjected to heating and remain in constant temperature, and must expend a large amount of power supplys, thereby causes the use cost height, is difficult for shortcoming such as miniaturization.
At United States Patent (USP) the 5th, 127, in No. 742 the radiation thermometer, utilize one to be subjected to the shutter that temperature control remains in constant temperature, its purpose is providing a temperature not influenced by ambient temperature to take into account the measuring temperature scope that increases thermometer.This design, except the shortcoming of temperature control operation was implemented in aforementioned heating, the problem that more has was: be with the shutter that is wired to a high speed motion of heating usefulness or the thing of difficulty.
Fundamental purpose of the present invention is to provide a kind of absolute radiation amount with subject matter to try to achieve the contactless thermometer of subject matter temperature, it is by known electrically heated energy, directly estimation is imposed on the absolute radiation amount that burnt inductance is surveyed element by the infrared radiation of subject matter, and comply with the temperature that this absolute radiation amount is calculated subject matter, thereby the result of temperature measurement is not subjected to the influence of burnt electric device responsiveness (responsivity).
Two of purpose of the present invention is to provide a kind of power consumption little, the thermometer that cost is low.
Three of purpose of the present invention is to provide a kind of light heating all to be implemented on identity element with electrical heating, and can reaches the thermometer of accurate temperature measurement.
Four of purpose of the present invention is to provide a kind of sensitive thermometer of measuring, and need only aim at subject matter and can finish measuring temp one second.
The thermometer that provides a kind of noise little is provided five of purpose of the present invention, utilizes with the isolated suspension joint power supply of system power supply and implements electrical heating, and can reduce power supply noise effectively.
Of the present utility model kind of radiation thermometer comprises:
One sensing apparatus is produced first group of induced signal and induction in order to induction and comes from the outside the infrared radiation of subject matter to produce second group of induced signal by the added electric energy of extraneous power supply;
One chopper is located between subject matter and sensing apparatus, and is controlled and mobile, with the open or blocking infrared radiation path towards sensing apparatus;
One electric energy driver is in order to apply electric energy in described sensing apparatus; And
One signal processing apparatus, in order to handle second group of induced signal and first group of induced signal that sensing apparatus produced, calculating from subject matter again is the received amount of infrared radiation of sensing apparatus, and obtains the temperature of subject matter according to this.
It is as follows to feature description of the present invention to reach embodiment in conjunction with the accompanying drawings:
The accompanying drawing simple declaration:
Fig. 1 is a calcspar of commonly using the formation of burnt electric type electricity school formula radiation thermometer.
Fig. 2 A be shown in Figure 1 commonly use and radiation thermometer of the present invention in the burnt inductance that all adopts survey the cut-open view of the detailed construction of element.
Fig. 2 B is the equivalent circuit diagram that burnt inductance is surveyed element shown in Fig. 2 A.
Fig. 3 commonly uses the circuit block diagram of the correcting circuit of burnt electric type radiation thermometer for showing another.
When Fig. 4 is correction operation, surveys the electric correction signal that element applied for burnt inductance and reach by the burnt inductance survey electrical signal of reaction synoptic diagram that element produced.
The circuit block diagram of the absolute radiation thermometer of Fig. 5 A one embodiment of the invention.
Fig. 5 B is the simplification calcspar of Fig. 5 A.
Fig. 6 A surveys element with burnt inductance shown in Fig. 2 A and Fig. 2 B and is improved, and makes read-out electrode and heating terminal separate the sensing apparatus synoptic diagram that is provided with.
Fig. 6 B is the synoptic diagram of the anti-microphonic noise sensing apparatus of first type that sensing apparatus shown in Fig. 6 A is improved.
The sensing apparatus synoptic diagram of Fig. 6 C for the anti-microphonic noise sensing apparatus of first type shown in Fig. 6 B is simplified.
Fig. 7 A is for slightly differing from the synoptic diagram of the anti-microphonic noise sensing apparatus of second type of Fig. 6 C.
Fig. 7 B is a distortion of sensing apparatus shown in Fig. 7 A.
Fig. 8 A is the synoptic diagram of the electric energy driver that adopted among the present invention.
Fig. 8 B is the connection diagram of electric energy driver shown in the anti-microphonic noise sensing apparatus shown in Fig. 6 C and Fig. 8 A and induced signal amplifier.
Fig. 9 is the synoptic diagram of another electric energy driver of being adopted among the present invention.
Figure 10 A is the detailed section view that the another kind of burnt inductance that adopts in the radiation thermometer of the present invention is surveyed element.
Figure 10 B is the equivalent circuit diagram that burnt inductance is surveyed element shown in Figure 10 A.
Figure 11 A surveys the synoptic diagram of the third anti-microphonic noise sensing apparatus of element for adopting burnt inductance shown in Figure 10 A and Figure 10 B.
Figure 11 B is with Figure 11 A simplified structure synoptic diagram.
Figure 12 surveys the synoptic diagram of the 4th anti-microphonic noise sensing apparatus of element for adopting burnt inductance shown in Figure 10 A and Figure 10 B.
At first, with reference to the composition of Fig. 5 A detailed description according to the radiation thermometer of one embodiment of the invention.Shown in Fig. 5 A, this thermometer comprises: a sensing element 10 in order to the light heating of accept the to come from the outside electrical heating of power supply or the subject matter 1 (radiation source) that comes from the outside, and produces an induction current in external circuits; Chopper 63 is located between subject matter 1 and the sensing element 10, can be controlled upper and lower mobile, to open or to cover from the path of subject matter 1 towards the infrared light of sensing element 10 radiation; The wave guide 90 of hollow round tubular by the infrared radiation that subject matter 1 sends, makes it arrive sensing element 10 places in order to guiding; Induced signal amplifier 51 is connected with sensing element 10, is not amplified in order to sensing there is the induction current that part 10 produced; Chopper driving mechanism 64 is in order to drive chopper 63 upper and lower moving, to open or to cover the path of infrared light; Chopper driving circuit 65 is in order to drive this chopper driving mechanism 64; Environment temperature sensor 61 is in order to measure environment temperature; Temperature signal amplifier 62 is amplified in order to the signal with environment temperature; Power measurement device 58 puts on the size of the electric energy of sensing element 10 in order to measurement; Electric energy driver 57 is in order to apply electric energy in sensing element 10; Simulation multiplexer 52 will be in order to optionally will input to A/D transducer 53 from the signal in temperature signal amplifier 62, induced signal amplifier 51 or the power measurement measuring device 58; Microprocessor 54, in order to send control signal etc. to A/D transducer 53, simulation multiplexer 52 or electric energy driver 57 or through amplifier 59 to driving circuit 65, and handle self simulation multiplexer 52 to be transformed to the data of digital signal again through A/D transducer 53; Reservoir 55 links with microprocessor 54, uses for microprocessor 54 access datas; Display 56 links with microprocessor 54, in order to the data that show that microprocessor 54 is provided; And start button 60, in order to start microprocessor 54.In addition, be provided with a big thermal capacity container 66, in order to sensing element 10 and environment temperature sensor 61 etc. is accommodated in it, to reduce the influence that variation of ambient temperature focusing inductance is surveyed the burnt electrostrictive coefficient of element.Fig. 5 B is the simplification calcspar of Fig. 5 A.In Fig. 5 B, in the calcspar that the radiation thermometer of first embodiment shown in Fig. 5 A is constituted and the more incoherent part of feature of the present invention, include in the square 80, be simply referred to as " signal processing apparatus ".
Secondly, the further improvement of constructing for sensing apparatus among the present invention is described.Survey element at the burnt inductance shown in Fig. 2 B, if the read-out electrode that the direct burnt electric signal of being responded to as the burnt material layer 11 of extraction with resistance elements 12 and bottom electrode 13 is used, then because burnt inductance is surveyed the capacitive character of element, make the electric signal of heating resistor material layer be easy to be coupled to real burnt electric signal, and upset this Jiao's electric signal.Therefore, suit as shown in Figure 6A, heating terminal T1, T2 on resistance elements 12 both sides another resistance elements (variable resistor) VR that is connected in parallel, A1, A2 pick out from its two tie point with lead-in wire, are connected to electric energy driver 57 (with reference to figure 5A, 5B) through power measurement device 58.Touch in resistance elements VR with a sliding electrode M in addition, it touches the position must be subjected to suitable adjustment, makes resistance elements VR and resistance elements 12 constitute a balanced bridge, the burnt electric signal that measures to avoid capacitively coupled signal to upset.Sliding electrode M is regarded as a virtual read-out electrode, with original read-out electrode be bottom electrode 13 respectively by the lead-in wire A3, A4 be connected to induced signal amplifier 51 (with reference to figure 5A, 5B), not being subjected under the heating signal upset situation extracting burnt electric signal, and this signal is delivered to signal amplifier 51.So, and the sensing apparatus 100A shown in the pie graph 6A.
Survey at burnt inductance in the utilization of element, other has the problem of microphonic noise (Microphonic).In detail, all burnt electric materials are piezoelectric, that is, when being subjected to mechanical stress, it can produce the sensitive surface electric charge, produce piezoelectric signal simultaneously and in the load that is added on burnt inductance survey element.Not only be subjected to influence of temperature variation so survey element, also be subjected to the influence of the burnt electric material deformation that caused because of vibration, and produce the sensitive surface electric charge by the made burnt inductance of piezoelectric.The piezoelectric signal of being given birth to by load is mixed by burnt electric signal and piezoelectric signal.In order to eliminate unnecessary piezoelectric signal, the sensing apparatus 100A of Fig. 6 A can be modified to the sensing apparatus 10B of the anti-microphonic noise of first type shown in Fig. 6 B.Its mode will be that two burnt inductance are surveyed element according to its polarised direction (i.e. the direction of arrow among the figure) positive inverse parallel, and the piezoelectric signal that makes two burnt inductance survey element is cancelled each other.Because the burnt inductance on right side is surveyed element and is not subjected to electrical heating among the figure, and be not used for receiving infrared radiation, thus can exempt to establish balanced bridge, and become structure as Fig. 6 B.Or further save or its resistance elements and black clad, and Dai Yiyi top electrodes p becomes the sensing apparatus 100C shown in Fig. 6 C.This sensing apparatus 100C comprises the first burnt inductance survey element 10L in left side among the figure, the second burnt inductance on right side is surveyed element 10R and variable resistor VR.And the first burnt inductance is surveyed element 10L in order to receive from the infrared radiation of subject matter and the electric energy that is applied by the electric energy driver.The first burnt inductance is surveyed element 10L and is comprised: one first burnt material layer 11L; One first resistance elements 12 is located at this first burnt material layer 11L one side; One first heats terminal T1, is located at one side of first resistance elements 12; One second heats terminal T2, is located at the another side of first resistance elements 12; One first bottom electrode 13L is located at the opposite side of the first burnt material layer 11L; And a black clad 16, be attached to first resistance elements 12 and burnt material layer 11L opposition side, in order to the come from the outside infrared radiation of subject matter of absorption, conduct heat again to the first burnt material layer 11L.The second burnt inductance is surveyed element 10R and is comprised; One second burnt material layer 11R; One top electrodes P is located at second burnt material layer 11R one side; One second bottom electrode 13R is located at the opposite side of the second burnt material layer 11R.Variable resistor VR comprises: one second resistance elements has first end S1 and the second end S2; One sliding electrode M is slidably connected to the top of second resistance elements, and can slides between first end S1 and the second end S2 along this top; And the position of sliding electrode M falls within one between first end S1 and the second end S2 and suitably puts, and constitute a balanced bridge with first resistance elements 12 through suitably adjusting, and sliding electrode M constitutes a virtual read-out electrode.The first end S1 and the first heating terminal T1 are connected to one first contact N1, and the second terminal S2 and the second heating terminal T2 are connected to one second contact N2, and the first contact N1 and the second contact N2 all are connected to electric energy driver 57 or 57A (with reference to figure 5B or 8B).Top electrodes P has opposite polarity and is connected in one the 4th contact N4 with the first bottom electrode 13L; Virtual read-out electrode M and the 4th contact N4 are connected to the induced signal amplifier 51 (with reference to 8B) that is contained in the signal processing apparatus 80 with lead-in wire A3, A4 respectively.And the second bottom electrode 13R is connected in the first heating terminal T1 or one of in two heating terminal T2 or virtual read-out electrode M threes.Because the existing enough radiant emissivities of resistance material laminar surface, so under some situation, survey the black clad 16 that element 10L also can omit high radiant rate at the burnt inductance in left side.
Fig. 7 A is the synoptic diagram of the anti-microphonic noise sensing apparatus 100D of one second type that slightly differs from Fig. 6 C.Shown in Fig. 6 C, originally survey elements and change into and being connected in series for two burnt inductance in parallel, two burnt inductance are surveyed the element bottom electrodes and are interconnected, and lead-in wire A4 from the left side burnt inductance survey the element top electrodes and pull out.Other structures are all identical with Fig. 6 C.Fig. 7 B demonstration is out of shape another sensing apparatus 100D ' that forms by sensing apparatus 100D shown in Fig. 7 A.Originally in sensing apparatus 100D for divide be arranged about two burnt inductance survey the burnt material layer of elements, in this sensing apparatus 100D ', change into and be integral setting.
The present invention, eliminate the effect of piezoelectric signal owing to utilize aforementioned anti-microphonic noise sensing apparatus to reach for the influence of the burnt electric signal of desiring to measure, but, burnt inductance is connected (with reference to the explanation of figure 8B and back) with an input end of induced signal amplifier 51 because surveying the heating power supply of element, if this heating power supply is not isolated with the power supply of system, then must adopt expensive differential amplifying type induced signal amplifier, just can avoid heating signal to upset burnt electric signal.Example as the electric energy driver of these isolated heating power supplies is shown in Fig. 8 A and Fig. 9.
Fig. 8 A is the synoptic diagram of a kind of electric energy driver of being adopted among the present invention.Fig. 8 B is the synoptic diagram of the connected mode of electric energy driver 57A shown in the anti-microphonic noise sensing apparatus 100C shown in Fig. 6 C and Fig. 8 A and induced signal amplifier 51.The power supply driver 57A that Fig. 8 A shows comprises a capacitor 571 and a double-point double-throw switch 572, is located between capacitor 571 and the power measurement measuring device 58.Double-pole double-throw switch 572 can be MOS switch or mechanical switch, and can be subjected to signal processing apparatus 80 control and optionally be switched between the primary importance (position shown in the solid line among the figure) and the second place (position shown in the dotted line among the figure).When it was positioned at primary importance, capacitor 571 electrically connected with the power supply of signal processing apparatus 80 by switch 572, capacitor 571 is charged to an accurate magnitude of voltage.Shown in Fig. 8 B and 8A, when switch 572 was positioned at the second place, capacitor 571 was linked with heating terminal T1, the T2 of the anti-microphonic noise sensing apparatus 100C shown in Fig. 6 C by switch 572, power measurement device 58 and lead-in wire A1, A2.Anti-microphonic noise sensing apparatus 100C is connected to the input end of induced signal amplifier 51 in addition with lead-in wire A3, A4.
The electric energy driver that in the present invention shown in Fig. 8 A and the 8B, is adopted, only by the simple structure of forming with a capacitor 571 and a double-point double-throw switch 572, must not adopt the isolated amplifier (with reference to figure 1) and the difference amplifier of costliness used in the known techniques, can provide the focusing inductance survey device implement electricity proofread and correct institute must electrical heating, and can reach high-precision electricity correction with low manufacturing cost.And the electrical heating power that this designing institute is used is below 0.1mW, and far beyond United States Patent (USP) the 4th, 797, electric energy (more than the 100mW) spent in the known techniques such as heating element that adopt to implement temperature control in No. 840 is for low, and can reduce use cost significantly.
Fig. 9 is the organigram of the another kind of electric energy driver that adopted among the present invention.Illustrated power supply driver 57B comprises a battery 576 and a single-pole single-throw switch (SPST) 577, and switch 577 can be subjected to the control of signal processing apparatus 80 and open and close, with control battery 576 whether supply of current to the heating terminal of sensing apparatus.
At the sensing element of radiation thermometer of the present invention shown in Fig. 5 A and the 5B, except that the sensing element that can adopt pattern shown in Fig. 2 A, the 2B, also can adopt the sensing element of another pattern shown in Figure 10 A, the 10B.Figure 10 A surveys the cut-open view of the detailed construction of element 70 for the burnt inductance of second pattern that adopted among the present invention.Figure 10 B is its equivalent circuit diagram.Sensing element 70 shown in this two figure mainly comprises: a burnt material layer 71, and when being added the rising of thermic temperature, induction thereon produces nonequilibrium transient state electric charge; One top electrodes 78 is located at burnt material layer 71 1 sides; One bottom electrode 73 is located at the opposite side of burnt material layer, can utilize lead-in wire to make burnt material layer 71 respond to the flow of charge of generation to external circuit; One resistance elements 72 is located at the opposition side of top electrodes 78 with burnt material layer 71; One first heating terminal T1 and one second heating terminal T2 are located at resistance elements 72 both sides respectively; One insulation course 77 is located between resistance elements 72 and the top electrodes 78, in order to both are isolated; One black clad 76 is attached to resistance elements 72 and insulation course 77 opposition sides, in order to absorb the infrared radiation from subject matter, conducts heat to burnt material layer 71 again.
In other words, unique difference of this sensing element 70 and aforementioned sensing element 10 is that the resistance elements 72 that will accept heating usefulness was arranged with top electrodes in 78 minutes, and with insulation course 77 that both are isolated, uses and avoids piezoelectric signal and burnt electric signal mixed in together.As aforementioned, in order to eliminate unnecessary piezoelectric signal, two burnt inductance can be surveyed elements and instead be together in parallel at its top electrodes and bottom electrode (with reference to figure 11A), and obtain the anti-microphonic noise sensing apparatus 100E of the 3rd type according to its polarised direction (i.e. the direction of arrow among the figure) positive.In other words, the top electrodes of left side sensing element and the bottom electrode of right side sensing element are connected in a contact, and the top electrodes of this right side sensing element and the bottom electrode of left side sensing element are connected in another contact, and with lead-in wire A3, A4 this two contact are connected to signal processing apparatus 80 respectively.And utilize two heating terminal T1, the T2 of lead-in wire A1, A2 burnt inductance survey element to pick out, be connected to electric energy driver 57 (with reference to figure 5A, 5B) through power measurement device 58, to heat its resistance elements 72 from the left side.Because the burnt inductance on right side is surveyed element and is not subjected to electrical heating among the figure, and be not used for receiving infrared radiation,, become the sensing apparatus 100F shown in Figure 11 B so can exempt to establish insulation course, resistance elements and black clad.Again because the resistance material laminar surface has enough radiant emissivities, so under some situation, survey the black clad that element also can omit high radiant emissivity at the burnt inductance on right side.
Figure 12 is the synoptic diagram of the anti-microphonic noise sensing apparatus 100G of the 4th type that slightly differs from Figure 11 B.In Figure 11 B, for changing into, two burnt inductance survey elements in parallel are connected in series originally, and two burnt inductance are surveyed the element bottom electrodes and are interconnected.Lead-in wire A3 directly pulls out from the top electrodes of left side sensing element, and lead-in wire A4 pulls out from the top electrodes of right side sensing element.Other structures are all identical with Figure 11 B.
Referring to Fig. 2 A, the light heating imposes on black clad 16, and electrical heating imposes on resistance elements 12, and this is two-layer very approaching, as long as keep the pyroconductivity height of black clad 16, then the light heating can be " equivalence " (light heating and electrically heated equity) with electrical heating:
Et/Ee=Fr * Vt/Ve wherein
Fr=1.00 ± 0.02 (constant)
Et=light heating power
The Ee=electrical heating power
The induced signal of exporting from A/D transducer 53 when Vt=light calorifies sensing element (with reference to figure 5A)
The induced signal (with reference to figure 5A) that the Ve=electrical heating is exported from A/D transducer 53 when sensing element
The induced signal (with reference to figure 5A) of Ve=electrical heating A/D transducer 53 outputs when sensing element
Again as can be known by Stefan-Blotzmann Law
Et＝Kf×δ×(Tt
4-Ta
4)
Et=Ka * (Tt
4-Ta
4) ... (a) wherein
Ka＝Kf×δ
σ＝5.67×10
-8W/M
2/°K
4
Kf is determined that by the optical arrangement of system its value is about by one " optically-coupled constant "
As×Sin(θr)
2×εs×ιs
Wherein
The radiation absorption area of As=sensing element
The form angle Field of View of θ r=sensing element
The penetrance of ι s=sensing element form
The absorptive rate of radiation of ε s=sensing element
Employing in the present invention is described as follows in the mode of the temperature of obtaining subject matter:
The characteristic that the energy that utilizes the induced signal size of the burnt inductance survey element in the sensing apparatus and be applied thereto is directly proportional, can be by known electrically heated energy, try to achieve the energy that heats by the light of same burnt inductance survey element being done, and then calculate the temperature of subject matter from the heat radiation of subject matter.Comprise following steps:
(1), measures ambient temperature Ta;
(2), utilize this electric energy driver that sensing apparatus is applied an electric energy, make sensing apparatus produce first group of induced signal Ve;
(3), measurement puts on the size of sensing apparatus electric energy, and is recorded as a standard electric energy Ee;
(4), open chopper, make sensing apparatus receive infrared radiation, and produce second group of induced signal Vt from subject matter, chopper cuts out;
(5), utilize signal processing apparatus to calculate thermal exposure Et from subject matter.
Heat and electrically heated equity by light:
Et/Ee＝Fr×Vt/Ve
So
Et＝Ee×Fr×Vt/Ve ………(b)
(6), utilize signal processing apparatus, calculate the temperature T t of subject matter according to following formula;
Because
Et＝Ka(Tt
4-Ta
4)
Tt＝(Et/Ka+Ta
4)
1/4 ……(c)
(b) substitution (c) can solve Tt:
Tt＝((Ee×Fr×Vt/Ve)/Ka+Ta
4)
1/4
Tt=((Ee * Vt/Ve)/Kb+Ta
4)
1/4(d) wherein,
Kb=Ka/Fr is a constant, can accurately measure by a black matrix and known Tt in dispatch from the factory when calibration, and Ee also can accurately measure.
Device uses simultaneously and a high resistance of very easily change (is about 10 because drift that the temperature coefficient of the part composed component of the sensitivity of burnt electric device and drift, signal amplifier and the isoparametric drift of A/D transducer of thermal time constant, thermometer causes and frequent and burnt inductance are surveyed
9Ohm) drift of value, all according to same ratio influence Vt and Ve, so Vt/Ve can not drift about thereupon, so Tt=((Ee * Vt/Ve)/Kb+Ta
4)
1/4Also can not drift about thereupon, and can obtain the temperature T t of accurate subject matter, this for the present invention far beyond the superior part of known techniques.
Compare with the present invention, United States Patent (USP) the 4th, 797, No. 840, subject matter temperature T t asks for according to following formula:
Tt＝(Vt/f(Ta)+Ta
4)
1/4
Wherein, Vt can be influenced by aforementioned various drift value, and f (Ta) function of ambient temperature Ta more.Therefore, but with regard to operating temperature range, long-time stability and measure with regard to the each side such as accuracy of measurement, be good far beyond aforesaid U.S. Patent according to radiation thermometer of the present invention.
Other considers the non-linear of sensing apparatus, A/D transducer, simulation multiplexer etc., can measure behind Vt and the Et, remake an electrical heating, with the further precision of improving measurement.Promptly be to finish abovementioned steps (1) to (6) for the first time, and obtain the power Et of light heating from (b) formula after, the electrical heating power Ee ' who attempts of the light heating power Et that is further obtained to approach carries out abovementioned steps (1) once again to (6), so that effect of nonlinear is minimized.
Radiation thermometer of the present invention is commonly used radiation thermometer and is had following effect:
(1), is not subjected to burnt electric device sensitivity; Thermal time constant; Signal amplifier; The A/D transducer parameters Impact Deng drift. Because subject matter temperature T t is the ratio calculation with Vt/Ve, and above-mentioned all Drift all affects Vt and Ve according to same ratio, and the ratio of Vt/Ve is not subjected to the impact of every drift, mark Thing temperature T t also be not subjected to the impact of every drift. So can try to achieve the subject matter temperature with high accuracy.
(2), because the present invention need only single light pulse, each metering need only be switched chopper once, makes consumption Electricity lowers, and the simple small volume of mechanism.
(3), because light heating all is implemented on identity element with electrical heating, and can reach more accurate Temperature Quantity Survey the result.
(4), since thermometer of the present invention need only aim at subject matter and can finish measuring temp one second, not only Operation rapidly. And can eliminate the impact of variation of ambient temperature focusing electrostrictive coefficient.
Claims (10)
1, a kind of radiation thermometer comprises:
One sensing apparatus is produced first group of induced signal and induction in order to induction and comes from the outside the infrared radiation of subject matter to produce second group of induced signal by the added electric energy of extraneous power supply;
One chopper is located between subject matter and sensing apparatus, and is controlled and mobile, with the open or blocking infrared radiation path towards sensing apparatus;
One electric energy driver is in order to apply electric energy in described sensing apparatus; And
One signal processing apparatus, in order to handle second group of induced signal and first group of induced signal that sensing apparatus produced, calculating from subject matter again is the received amount of infrared radiation of sensing apparatus, and obtains the temperature of subject matter according to this.
2, radiation thermometer according to claim 1 is characterized in that, described sensing apparatus comprises that one first burnt inductance is surveyed element and one second burnt inductance is surveyed element; The first burnt inductance is surveyed element in order to receive from the infrared radiation of subject matter and the electric energy that is applied by the electric energy driver;
The first burnt inductance is surveyed element and is comprised: one first burnt material layer; One first top electrodes is located at first burnt material layer one side; One first bottom electrode is located at the opposite side of the first burnt material layer; One resistance elements is located at the opposition side of first top electrodes with the first burnt material layer; First heats terminal, is located at one side of resistance elements; Second heats terminal, is located at the another side of described resistance elements; One insulation course is located between the described resistance elements and first top electrodes;
The second burnt inductance is surveyed element and is comprised: one second burnt material layer; One second top electrodes is located at a side of the second burnt material layer; One second bottom electrode is located at the opposite side of the second burnt material layer;
First top electrodes and second bottom electrode have opposite polarity and are connected in one the 4th contact, and second top electrodes and first bottom electrode have opposite polarity and be connected in one the 3rd contact; The 3rd contact and the 4th contact are connected to described signal place and calculate device;
The first heating terminal and the second heating terminal all are connected to described electric energy driver.
3, radiation thermometer according to claim 1 is characterized in that, described sensing apparatus comprises that the first burnt inductance is surveyed element and the second burnt inductance is surveyed element; The first burnt inductance is surveyed element in order to receive from the infrared radiation of subject matter and the electric energy that is applied by the electric energy driver;
The first burnt inductance is surveyed element and is comprised: one first burnt material layer; One first top electrodes is located at a side of this first burnt material layer; One first bottom electrode is located at the opposite side of the first burnt material layer; One resistance elements is located at the opposition side of first top electrodes with the first burnt material layer; First heats terminal, is located at one side of resistance elements; Second heats terminal, is located at the another side of resistance elements; And an insulation course, be located between the resistance elements and first bottom electrode;
The second burnt inductance is surveyed element and is comprised: one second burnt material layer; One second top electrodes is located at a side of this second burnt material layer; One second bottom electrode is located at the opposite side of the second burnt material layer;
Described first bottom electrode and second bottom electrode have identical polar and link together; First top electrodes and second top electrodes all are connected to described signal processing apparatus;
The described first heating terminal and the second heating terminal all are connected to described electric energy driver.
4, radiation thermometer according to claim 1 is characterized in that, described sensing apparatus comprises that one first burnt inductance is surveyed element and one second burnt inductance is surveyed element; This first burnt inductance is surveyed element in order to receive from the infrared radiation of subject matter and the electric energy that is applied by the electric energy driver;
The first burnt inductance is surveyed element and is comprised: one first burnt material layer; One first resistance elements is located at first burnt material layer one side, has one first heating terminal and one second heating terminal; Reach one first bottom electrode, be located at the opposite side of the first burnt material layer;
The second burnt inductance is surveyed element and is comprised: one second burnt material layer; One top electrodes is located at a side of the second burnt material layer; One second bottom electrode is located at the opposite side of the second burnt material layer;
The first heating terminal and the second heating terminal all are connected to described electric energy driver;
The described top electrodes and first bottom electrode have opposite polarity and are connected in one the 4th contact; The 4th contact is connected to described signal processing apparatus;
Described electric energy driver comprises: an energy storage device, a switchgear is connected between energy storage device and the sensing apparatus, optionally to make energy storage device sensing apparatus is applied electric energy.
5, radiation thermometer according to claim 1 is characterized in that, described sensing apparatus comprises that the first burnt inductance is surveyed element and the second burnt inductance is surveyed element; The first burnt inductance is surveyed element in order to receive from the infrared radiation of subject matter and the electric energy that is applied by the electric energy driver;
The first burnt inductance is surveyed element and is comprised: one first burnt material layer; One first resistance elements is located at first burnt material layer one side, has one first heating terminal and one second heating terminal; And one first bottom electrode, be located at the first burnt material layer opposite side;
The described second burnt inductance is surveyed element and is comprised: one second burnt material layer; One top electrodes is located at second burnt material layer one side; One second bottom electrode is located at the second burnt material layer opposite side;
The described first heating terminal and the second heating terminal all are connected to described electric energy driver;
First bottom electrode and second bottom electrode have identical polar and link together; And
Described electric energy driver comprises: an energy storage device, a switchgear is connected between energy storage device and the described sensing apparatus, optionally to make energy storage device sensing apparatus is applied electric energy.
6, radiant type double-throw thermometer according to claim 4, it is characterized in that, described energy storage device comprises a capacitor, described switchgear, comprise a double-point double-throw switch, when described electric energy driver did not apply electric energy to sensing apparatus, capacitor was electrically connected with the power supply of described signal processing apparatus through switchgear, so that capacitor is charged; And when the electric energy driver applies electric energy to sensing apparatus,, capacitor only is electrically connected with sensing apparatus through switchgear.
7, radiation thermometer according to claim 4 is characterized in that, described energy storage device comprises a battery, and described switchgear comprises a single-pole single-throw switch (SPST); The electric energy driver applies electric energy by switchgear to sensing apparatus.
8, radiation thermometer according to claim 5 is characterized in that, described energy storage device comprises a capacitor; Described switchgear comprises a double-pole throw switch; Capacitor is electrically connected with the power supply of described signal processing apparatus by switchgear.
9, radiation thermometer according to claim 5 is characterized in that, described energy storage device comprises a battery; Described switchgear comprises a single-pole single-throw switch (SPST); Described electric energy driver applies electric energy by switchgear to sensing apparatus.
10, a kind of method of utilizing each described radiation thermometer execution measuring temp among the claim 1-9 mainly comprises following each step:
(1), measures environment temperature Ta;
(2), utilize described electric energy driver that described sensing apparatus is applied an electric energy, make sensing apparatus produce first group of induced signal Ve;
(3), measurement puts on the size of the electric energy of described sensing apparatus, and is recorded as a standard electric energy Ee;
(4), open described chopper, make described sensing apparatus receive infrared radiation, and produce second group of induced signal Vt from subject matter, chopper cuts out;
(5), utilize described signal processing apparatus, calculate the temperature T t of subject matter according to following formula;
Tt＝((Ee×Vt/Ve)/Kb+Ta
4)
1/4
Wherein, Kb is a constant
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96120694 CN1059496C (en) | 1996-11-08 | 1996-11-08 | Radiation thermometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96120694 CN1059496C (en) | 1996-11-08 | 1996-11-08 | Radiation thermometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1182208A CN1182208A (en) | 1998-05-20 |
| CN1059496C true CN1059496C (en) | 2000-12-13 |
Family
ID=5126514
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96120694 Expired - Fee Related CN1059496C (en) | 1996-11-08 | 1996-11-08 | Radiation thermometer |
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|---|---|
| CN (1) | CN1059496C (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6292685B1 (en) | 1998-09-11 | 2001-09-18 | Exergen Corporation | Temporal artery temperature detector |
| CN105571725A (en) * | 2016-01-29 | 2016-05-11 | 无锡元创华芯微机电有限公司 | Infrared detector |
-
1996
- 1996-11-08 CN CN 96120694 patent/CN1059496C/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN1182208A (en) | 1998-05-20 |
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