CN105935537A - Process for purifying chlorosilane and hydrogen chloride with hydrogen mixed gas - Google Patents

Process for purifying chlorosilane and hydrogen chloride with hydrogen mixed gas Download PDF

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CN105935537A
CN105935537A CN201610241111.0A CN201610241111A CN105935537A CN 105935537 A CN105935537 A CN 105935537A CN 201610241111 A CN201610241111 A CN 201610241111A CN 105935537 A CN105935537 A CN 105935537A
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gas
chlorine
adsorption
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containing component
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CN105935537B (en
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杨皓
宁平
王娟芸
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0462—Temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B01D53/053—Pressure swing adsorption with storage or buffer vessel
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/16—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2064—Chlorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B01D2259/4009—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating using hot gas

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

Through two-stage adsorption, a chlorine-containing component in 3% (according to the molar ratio) of chlorosilicane and hydrogen chloride in mixed gas is controlled to be 0.1 mg/Nm<3> or less; in the first-stage adsorption, a chlorine-containing component of crude purified gas is controlled to be 90-100 mg/Nm<3>, a chlorine-containing component of clockwise pressure-reducing gas is controlled to be 5000-10000 mg/Nm<3>, adsorption tower regeneration adopts a temperature and pressure swing adsorption technology, reverse pressure reduction and hot blowing with clockwise pressure-reducing gas are performed while an adsorbent is heated, cold blowing with second-stage clockwise pressure-reducing desorption gas is performed while the adsorbent is cooled, and an adsorption tower adopts raw gas for boosting; a chlorine-containing component of second-stage purified gas is controlled to be 0.1 mg/Nm<3> or less, a chlorine-containing component of the clockwise pressure-reducing gas is controlled to be 90-100 mg/Nm<3>, the adsorption tower regeneration adopts a pressure swing adsorption technology, the regeneration process comprises clockwise pressure reduction desorption and reverse pressure reduction desorption; purified gas is used for purging with 60 kPa, inverse desorption gas and purging gas are directly mixed with first-stage regenerated gas to be sent to a circulating compressor.

Description

A kind of hydrogen mixed gas purified chlorosilane and the technique of hydrogen chloride
Technical field
The present invention relates to chemical industry, energy-saving and environmental protection field, be that a kind of hydrogen that effectively reduces circulates work done during compression, reduction The method of energy required for adsorbent reactivation chlorosilane and hydrogen chloride.
Background technology
For containing 3% (mol ratio) left and right hydrogen chloride, the hydrogen mixed gas of chlorosilane, mixed gas purification Hydrogen chloride and the method for chlorosilane, generally use alternating temperature pressure swing absorption process.Based on three tower process, three In tower, first adsorption tower is in the process of adsorbing and removing chlorine-containing component, it is thus achieved that pure hydrogen, in hydrogen chloride group Point concentration is normally controlled in 0.1mg/Nm3Within, it is adsorbed onto certain time, stops adsorption process, adsorption tower Sequentially enter following regenerative process: blood pressure lowering, intensification, hot blow, three processes are provided to make adsorption process stay Chlorine-containing components in adsorbent departs from adsorbent, and then cooling, cold blowing, to boost, wait be for next The preparation of secondary adsorption process.The operation time of seven processes is 2 times of adsorption time.Each adsorption tower Being same process, only the time is 1/3rd of the circulation time that staggers, and is achieved in continuous purification Purpose.
Invention CN101314098A provides the purification method of a kind of polysilicon tail gas, belongs to adsorptive separation engineering Technical field.Including using this purified hydrogen of a part after tail gas to be clean is purified hydrogen by adsorption tower Return the regenerator regeneration for adsorbent, it is characterized in that between regenerator, be additionally provided with a road circulating hydrogen Adsorbent is carried out Regeneration Treatment, and this road circulating hydrogen is: from cooling regenerator circulating hydrogen out through adding Enter ramp regeneration tower after heat, carry out ramp regeneration tower after heat treated out, entering through compressor after cooling Enter to cooling regenerator.Advantage be the regeneration of adsorption bed only with hydrogen, fundamentally avoid other again The impact of raw medium, it is ensured that the safety of system.Circulating hydrogen is used to make the reproduction speed of adsorbent more Hurry up, regeneration is more thorough, also makes hydrogen purity higher while improve yield.It is particularly suitable for existing suction Attached cleaning system uses.This invention improves the utilization ratio of cold blowing gas, but uses and purify gas as cold blowing in fact Energy dissipation is remained the biggest on border.
CN101396632B has invented a kind of multi-stage absorption and the method for multi-stage regenerable purifying polycrystalline silicon tail gas, belongs to Technical field of adsorptive separation engineering.Including polysilicon tail gas adsorption process in tower, utilize purified hydrogen pair The regenerative process of tower and the absorption set-up procedure that the tower completing regeneration is cooled down and boosts, described absorption Process by the series connection absorption of at least two tower, and the delayed previous tower of feed time of later tower, described again Raw process is multitower tandem thermal regeneration, and the heating of each regenerator is divided into multistage completing.Advantage is to carry High adsorbent utilization rate, shortens adsorption cycle.The tandem regeneration of circulation that purified hydrogen is unpowered, Make regeneration hydrogen obtain sufficiently effective utilization, greatly reduce regeneration gas consumption, saved dynamic simultaneously Power equipment investment and power consumption.The regenerator that second level purification process uses the first order to purify so can make the Regeneration gas source quality required for first class purification is high, and gas flow is big.
CN202569905U has invented the hydrogen purification apparatus of a kind of purifying polycrystalline silicon tail gas, including vacuum pump, Equalizer tank, surge tank, adsorption tower, pipeline, sequencing valve and microsystem, wherein said adsorption tower has former Material gas air inlet, product gas gas outlet, the outlet of evacuation stripping gas, inverse bleeder holes, return inflation inlet and All calming the anger import and export, the outlet of described evacuation stripping gas is connected to stripping gas total pipeline by vacuum pump, described Inverse bleeder holes is connected to stripping gas total pipeline by described surge tank, described all calm the anger import and export and described all Pressure tank connects, described in return inflation inlet and be connected with product gas total pipeline by valve.Device of the present utility model Can effectively remove the impurity such as the chlorosilane in industrial tail gas, hydrogen chloride, nitrogen, methane, it is thus achieved that high-quality Product hydrogen, have device miniaturization, invest low, energy consumption is low, operation automatization, the higher spy of safety Point.This technology use evacuate technique may cause oxygen enter regeneration gas system, make regeneration gas cannot safety Recycle, the device that regeneration gas is not recycled, its feasible process and economical.But for 96% Above hydrogen uses this invention, and hydrogen regeneration gas circulating load is bigger, and economy may not be good.
Summary of the invention
Chlorine-containing silane and the hydrogen mixed gas of hydrogen chloride about 3% (mol ratio), remove chlorosilane and hydrogen chloride gas Body, it is desirable to chlorine-containing component is controlled at 0.1mg/Nm3Within, set up two stage adsorption separation equipment: first paragraph is inhaled Additive process, the thick gas that purifies controls chlorine-containing component 90～100mg/Nm3Within, and directly chlorine-containing component control System is at 0.1mg/Nm3Within adsorption process compare, adsorbent at least improves 3 times than dynamic adsorption capacity, regeneration The chlorine-containing components concentration of gas improves more than 3 times.First paragraph adsorption tower regenerative process, uses alternating temperature pressure-variable adsorption work Skill, regenerative process comprises adsorption tower and is forward depressured to less than the 1/3 of adsorptive pressure, this process with originally feared The reverse blood pressure lowering polluting adsorption tower and carry out is compared, and the hydrogen in adsorbent can be made more to leave adsorption tower and use In hot blow process.First paragraph forward blood pressure lowering gas chlorine-containing component controls 5000～10000mg/Nm3Within, be for Chlorine-containing components in hot blow gas is too high is unfavorable for adsorbent desorbing chlorine-containing components.(temperature controls inhaling in heating Less than 5 times of attached operating temperature, are to make adsorption column pressure be unlikely to reach adsorptive pressure in pressure reduction Above, control in safe pressure working range) the most reverse blood pressure lowering, needed for heating inverse put can reduce hot blow Low chlorine component hydrogen tolerance.Forward blood pressure lowering gas is to adsorbent hot blow, can further with forward blood pressure lowering gas, than Reverse blood pressure lowering gas is the most all used to reduce tolerance.(temperature controls in the 1.5 of absorption operating temperature in adsorbent cooling Below times) adsorbent cold blowing simultaneously, cold blowing gas derives from second segment forward depressurization desorption gas, and chlorine-containing component controls 90～100mg/Nm3Within, this way is equivalent to use to purify a gas and carrys out cold blowing adsorption tower, thus protects Demonstrate,prove one section of adsorption tower in postorder adsorption process, to flow out gas meet the requirements containing cl concn.Adsorption tower uses raw material gas lift Pressure, makes adsorption tower prepare adsorption process next time.
Second segment purifies gas and chlorine-containing component is controlled at 0.1mg/Nm3Within, adsorption tower regeneration uses pressure-variable adsorption Technique, in addition to pressure equalizing, regenerative process comprises forward depressurization desorption, first paragraph forward blood pressure lowering gas chlorine-containing component Control 90～100mg/Nm3Within, for the cold blowing process of first paragraph, regenerative process also comprises reverse blood pressure lowering Desorbing, purifies gas 60KPa purging, inverse with one section regeneration gas directly mix direct with purge gas of venting one's spleen send circulation pressure Contracting machine.So low for the stripping gas of two-stage nitration dense part reuse, send rear operation highly concentrated part, be conducive to subtracting as far as possible Few circulating hydrogen tolerance.
Detailed description of the invention
Embodiment 1: certain chloride hydrogen mixed gas composition is as follows.
(1) unstripped gas composition:
Composition Hydrogen Hydrogen chloride Nitrogen Chlorosilane
V/V 0.966 0.005 0.004 0.025
(2) material gas quantity: 70000Nm3/h；
(3) pressure :～1.1MPa (gauge pressure)；
(4) temperature :～20 DEG C.
Under above-mentioned operating mode, chlorine-containing components mixing hydrogen is sent directly into three in six adsorption towers of 130 cubes Individual, at adsorption column outlet, obtain chlorine-containing components content≤100mg/Nm3Slightly purify gas, the thick gas that purifies enters Enter 3 adsorption towers in 8 26 cubes of adsorption towers of second segment, be purified gas, chlorine-containing components content≤ 0.1mg/Nm3。
After some adsorption tower of first paragraph enters unstripped gas 8 hours, switch one of them suction being in adsorbed state Attached tower enters drop pressure process, and the chlorine-containing components concentration of pressure reduction eluting gas is about 100～2000mg/Nm3, entering another one and be in the adsorption tower of boost pressure process, pressure reaches about 0.56MPa, then continues blood pressure lowering adsorption tower, and gas sends into one section of high pressure along putting surge tank, adsorption column pressure Being reduced to 0.2MPa, after blood pressure lowering terminates, adsorbent is progressively heated, adsorption tower starts inverse put simultaneously, flows out Inverse put pneumatic transmission enter cooler cooling after send rear operation compression circulation.Intensification adsorbent to 130 DEG C, uses one section Low pressure proceeds purging along putting surge tank gas to adsorption tower, makes the chlorine-containing component in adsorbent the most as early as possible Desorbing departs from adsorption tower, then uses high pressure, along venting surge tank, adsorption tower proceeds purging.Until making Till being finished all along putting stripping gas.Stop hot recycling process.Cooling adsorbent to about 50 DEG C, uses two Section carries out cold blowing along venting to adsorption tower, and pressure necessarily be greater than hot blow process makes adsorption tower temperature be reduced to about 40 DEG C, this cold blowing gas enters one section of low pressure and is used as hot blow gas along putting surge tank.Cold blowing is complete, uses and all presses Adsorption tower is boosted by blood pressure lowering gas, after completing, uses unstripped gas to boost adsorption tower, and boosting completes, Wait for a period of time, adsorption process next time can be carried out.
After some adsorption tower of second segment enters unstripped gas 12 minutes, switch one of them and be in adsorbed state Adsorption tower enters drop pressure process, and the chlorine-containing components concentration of pressure reduction eluting gas is about 0.1～0.2mg/Nm3, entering another one and be in the adsorption tower of boost pressure process, pressure reaches about 0.86MPa, drop pressure 3 times, pressure reaches 0.18MPa, and chlorine-containing components concentration is about 20～30mg/Nm3, Then adsorption tower being continued blood pressure lowering, gas feeding two-stage nitration is along putting surge tank, and adsorption column pressure is reduced to 0.11MPa, After blood pressure lowering terminates, adsorption tower starts inverse put, and adsorption column pressure is reduced to 0.07MPa, and the inverse put pneumatic transmission of outflow enters Operation compression circulation.Use one section to purify gas and adsorption tower is proceeded purging, make the chloride one-tenth in adsorbent Dividing desorbing the most as early as possible to depart from adsorption tower, purging outflow pneumatic transmission enters operation and compresses circulation.Complete purging, use Adsorption tower is boosted by drop pressure gas, boosts 3 times, and adsorption column pressure reaches 0.86MPa, then makes With purifying gas, adsorption tower is proceeded boosting.Until pressure reaches 1.07MPa.Can carry out next Secondary adsorption process.Thus circulate.
Embodiment 2: certain chloride hydrogen mixed gas composition is as follows.
(1) unstripped gas composition:
Composition Hydrogen Hydrogen chloride Nitrogen Chlorosilane
V/V 0.976 0.005 0.004 0.015
(2) material gas quantity: 40000Nm3/h；
(3) pressure :～0.8MPa (gauge pressure)；
(4) temperature :～20 DEG C.
Under above-mentioned operating mode, chlorine-containing components mixing hydrogen is sent directly into four in 7 adsorption towers of 40 cubes Individual, at adsorption column outlet, obtain chlorine-containing components content≤100mg/Nm3Slightly purify gas, the thick gas that purifies enters Enter 3 adsorption towers in 9 16 cubes of adsorption towers of second segment, be purified gas, chlorine-containing components content≤ 0.1mg/Nm3。
After some adsorption tower of first paragraph enters unstripped gas 8 hours, switch one of them suction being in adsorbed state Attached tower enters drop pressure process, and the chlorine-containing components concentration of pressure reduction eluting gas is about 100～2000mg/Nm3, entering another one and be in the adsorption tower of boost pressure process, pressure reaches about 0.42MPa, then continues blood pressure lowering adsorption tower, and gas sends into one section of high pressure along putting surge tank, adsorption column pressure Being reduced to 0.14MPa, after blood pressure lowering terminates, adsorbent is progressively heated, adsorption tower starts inverse put simultaneously, flows out Inverse put pneumatic transmission enter cooler cooling after send rear operation compression circulation.Intensification adsorbent to 130 DEG C, uses one section Low pressure proceeds purging along putting surge tank gas to adsorption tower, makes the chlorine-containing component in adsorbent the most as early as possible Desorbing departs from adsorption tower, then uses high pressure, along venting surge tank, adsorption tower proceeds purging.Until making Till being finished all along putting stripping gas.Stop hot recycling process.Cooling adsorbent to about 50 DEG C, uses two Section carries out cold blowing along venting to adsorption tower, and pressure necessarily be greater than hot blow process makes adsorption tower temperature be reduced to about 40 DEG C, this cold blowing gas enters one section of low pressure and is used as hot blow gas along putting surge tank.Cold blowing is complete, uses and all presses Adsorption tower is boosted by blood pressure lowering gas, after completing, uses unstripped gas to boost adsorption tower, and boosting completes, Wait for a period of time, adsorption process next time can be carried out.
After some adsorption tower of second segment enters unstripped gas 14 minutes, switch one of them and be in adsorbed state Adsorption tower enters drop pressure process, and the chlorine-containing components concentration of pressure reduction eluting gas is about 0.1～0.2mg/Nm3, entering another one and be in the adsorption tower of boost pressure process, pressure reaches about 0.66MPa, drop pressure 3 times, pressure reaches 0.18MPa, and chlorine-containing components concentration is about 20～30mg/Nm3, Then adsorption tower being continued blood pressure lowering, gas feeding two-stage nitration is along putting surge tank, and adsorption column pressure is reduced to 0.11MPa, After blood pressure lowering terminates, adsorption tower starts inverse put, and adsorption column pressure is reduced to 0.07MPa, and the inverse put pneumatic transmission of outflow enters Operation compression circulation.Use one section to purify gas and adsorption tower is proceeded purging, make the chloride one-tenth in adsorbent Dividing desorbing the most as early as possible to depart from adsorption tower, purging outflow pneumatic transmission enters operation and compresses circulation.Complete purging, use Adsorption tower is boosted by drop pressure gas, boosts 3 times, and adsorption column pressure reaches 0.66MPa, then makes With purifying gas, adsorption tower is proceeded boosting.Until pressure reaches 0.77MPa.Can carry out next Secondary adsorption process.Thus circulate.
This method purifies chlorine-containing components, and energy consumption only has 1/3rd of temp.-changing adsorption method.Stopped to take out simultaneously The empty method pressure-variable adsorption regeneration possible danger to subsequent technique.Remarkable in economical benefits is protected with safety.

Claims (1)

1. a hydrogen mixed gas purified chlorosilane and the technique of hydrogen chloride, it is characterised in that: chlorine silicon Alkane and hydrogen chloride about 3% (mol ratio), removing chlorosilane and hydrogen chloride gas, it is desirable to containing Chlorine component controls at 0.1mg/Nm3Within, set up two stage adsorption separation equipment: first paragraph adsorbs Process, the thick gas that purifies controls chlorine-containing component 90～100mg/Nm3Within, first paragraph adsorbs Tower regenerative process, uses alternating temperature pressure swing adsorption technique, and regenerative process comprises adsorption tower forward blood pressure lowering To less than the 1/3 of adsorptive pressure, first paragraph forward blood pressure lowering gas chlorine-containing component controls 5000～10000mg/Nm3Within, (temperature controls in the 5 of absorption operating temperature in adsorbent heating Following) the most inversely blood pressure lowering, forward blood pressure lowering gas are (warm to adsorbent hot blow, adsorbent cooling Degree controls adsorb operating temperature less than 1.5 times) adsorbent cold blowing simultaneously, cold blowing gas is originated In second segment forward depressurization desorption gas, chlorine-containing component controls 90～100mg/Nm3Within, inhale Attached tower uses unstripped gas boosting；Second segment purifies gas and chlorine-containing component is controlled at 0.1mg/Nm3With In, adsorption tower regeneration uses pressure swing adsorption technique, and in addition to pressure equalizing, regenerative process comprises suitable To depressurization desorption, first paragraph forward blood pressure lowering gas chlorine-containing component controls 90～100mg/Nm3Within, For the cold blowing process of first paragraph, regenerative process also comprises reverse depressurization desorption, purifies gas 60KPa Purging, send recycle compressor inverse directly mix with one section of regeneration gas direct with purge gas of venting one's spleen.
CN201610241111.0A 2016-04-19 2016-04-19 A kind of technique of hydrogen mixed gas purified chlorosilane and hydrogen chloride Active CN105935537B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107344058A (en) * 2017-09-08 2017-11-14 成都盛利达科技有限公司 A kind of hydrogen chloride gas advanced purification process of energy-conservation
CN110054155A (en) * 2019-06-05 2019-07-26 唐山三友氯碱有限责任公司 Low moisture content hydrogen chloride synthesis method and synthesis system
CN110694425A (en) * 2019-09-26 2020-01-17 杨皓 Chlorinated organic matter low-energy-consumption recovery improvement process for chlorinated organic matter-containing mixed gas
CN115055026A (en) * 2022-05-25 2022-09-16 云南通威高纯晶硅有限公司 Method for purifying mixed gas by using tube array adsorption column

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Publication number Priority date Publication date Assignee Title
CN101279178A (en) * 2008-01-04 2008-10-08 广州吉必盛科技实业有限公司 Method and device for recovering H2 in tail gas produced during trichlorosilane production
CN101530718A (en) * 2008-03-13 2009-09-16 郭永义 Process for adsorbing and separating light hydrocarbon in F-T synthesis circulation gas by variable temperature and pressure
CN201543362U (en) * 2009-12-01 2010-08-11 倪云达 Treatment device for treating hydrogen in polysilicon tail gas through temperature and pressure variation method
CN103111157A (en) * 2013-01-30 2013-05-22 陕西天宏硅材料有限责任公司 Method for purifying and recovering discharge tail gas of regeneration process of adsorption tower in polycrystalline silicon production
JP2015163556A (en) * 2014-01-28 2015-09-10 住友精化株式会社 Method and apparatus for purifying hydrogen chloride

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101279178A (en) * 2008-01-04 2008-10-08 广州吉必盛科技实业有限公司 Method and device for recovering H2 in tail gas produced during trichlorosilane production
CN101530718A (en) * 2008-03-13 2009-09-16 郭永义 Process for adsorbing and separating light hydrocarbon in F-T synthesis circulation gas by variable temperature and pressure
CN201543362U (en) * 2009-12-01 2010-08-11 倪云达 Treatment device for treating hydrogen in polysilicon tail gas through temperature and pressure variation method
CN103111157A (en) * 2013-01-30 2013-05-22 陕西天宏硅材料有限责任公司 Method for purifying and recovering discharge tail gas of regeneration process of adsorption tower in polycrystalline silicon production
JP2015163556A (en) * 2014-01-28 2015-09-10 住友精化株式会社 Method and apparatus for purifying hydrogen chloride

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107344058A (en) * 2017-09-08 2017-11-14 成都盛利达科技有限公司 A kind of hydrogen chloride gas advanced purification process of energy-conservation
CN107344058B (en) * 2017-09-08 2023-05-26 成都盛利达科技有限公司 Energy-saving hydrogen chloride gas deep purification process
CN110054155A (en) * 2019-06-05 2019-07-26 唐山三友氯碱有限责任公司 Low moisture content hydrogen chloride synthesis method and synthesis system
CN110694425A (en) * 2019-09-26 2020-01-17 杨皓 Chlorinated organic matter low-energy-consumption recovery improvement process for chlorinated organic matter-containing mixed gas
CN110694425B (en) * 2019-09-26 2022-07-01 杨皓 Chlorinated organic matter low-energy-consumption recovery improvement process for chlorinated organic matter-containing mixed gas
CN115055026A (en) * 2022-05-25 2022-09-16 云南通威高纯晶硅有限公司 Method for purifying mixed gas by using tube array adsorption column

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