CN105932380B - Adjustable terahertz filter and production method under a kind of mechanical regulation - Google Patents
Adjustable terahertz filter and production method under a kind of mechanical regulation Download PDFInfo
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- CN105932380B CN105932380B CN201610309166.0A CN201610309166A CN105932380B CN 105932380 B CN105932380 B CN 105932380B CN 201610309166 A CN201610309166 A CN 201610309166A CN 105932380 B CN105932380 B CN 105932380B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/207—Hollow waveguide filters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/007—Manufacturing frequency-selective devices
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Abstract
The present invention provides adjustable terahertz filter and production method under a kind of mechanical regulation, including the substrate being arranged in love metal shell, the cylindrical hollow waveguide A and waveguide B of periodic structure are provided in substrate, gap between waveguide A and waveguide B is formd using substrate as tube wall, length-adjustable cylindrical hollow waveguide C, the major radius of waveguide A and waveguide B, short radius and cycle length are all the same, and the duty ratio of waveguide A and waveguide B is not identical.The present invention has many advantages, such as that structure is simple, small in size, tunable, and important application can be obtained in the fields such as military affairs, medicine, industry.
Description
Technical field
The present invention relates to the adjustable terahertz filters under a kind of Terahertz function element more particularly to a kind of mechanical regulation
And production method.
Background technique
Since THz wave has the characteristics that photon energy is low, penetration capacity is strong, time and spatial resolution are high.Make its
Many fields such as public safety, medical inspection, communication, medicine and radar have a wide range of applications and development prospect.These
Aspect requires Terahertz system of good performance, is thus badly in need of high performance Terahertz function element.Mechanical regulation terahertz
Hereby function element is an important application in THz wave technology field, excellent due to terahertz time-domain spectroscopy measuring technique
The characteristics of gesture and mechanical stress, therefore the adjustable terahertz filter under mechanical regulation is supervised in remote sensing, non-destructive testing and engineering
Survey etc. has important real value.
Existing terahertz filter is many kinds of at this stage, such as photonic crystal type, metamaterial type and surface plasma
Type etc..Many research achievements are all achieved both at home and abroad.Optic communication research institute, Nanjing Univ. of Posts and Telecommunications in 2009 obtains Chen He ring and Meng
It is fine that " design of efficient photonic crystal terahertz filter " has been delivered on " Acta Physica Sinica ", THz wave is had studied in two-dimentional light
Propagation characteristic in sub- crystal realizes filter function, the filter using the coupled characteristic of waveguide line defect and cavity point defect
Coupling efficiency has reached 90% or more at 3.6231THz.Guo's exhibition of contemporary optics research institute, Nankai University in 2011 and Fan Fei
Et al. delivered on " Acta Physica Sinica " article " the adjustable terahertz filter of magnetic control and switch based on magnetic photonic crystal ", design
A kind of continuously adjustable filter of the magnetic control Terahertz based on ferrite magnetic material photonic crystal waveguide, it is additional by adjusting
Magnetic field size changes magnetic material magnetic conductivity, to change photonic band gap, to realize in 0.8314~1.0854THz
Adjustable filter function.The C.J.E.Straatsma and A.Y.Elezzabi of University of Alberta: Alberta, Canada in 2011 are in J
Article " A Dual-Mode Terahertz Filter Based on has been delivered on Infrared MilliTerahz Waves
A Metallic Resonator Design ", has studied a kind of terahertz filter based on Meta Materials artificial structure, this
Structure can show the characteristic of low pass, band logical and bandstop filter in the working frequency range of 0.1~1.4THz simultaneously.2013
Wang Wentao obtained by year China Measures Institute's Terahertz Technology and application study et al. has been delivered on " Acta Optica " " based on three
The multiband terahertz filter of rectangular closing resonant ring ", one kind is had studied by three rectangular closing resonant ring (CRR) nested groups
Three frequency band terahertz filter made of conjunction designs the resonant frequency of filter by adjusting size or the period of each CRR.
The E.A.Sedykh et al. of Russian ITMO university in 2015 has delivered " Tunable narrowband on J.Phys
Filters with cross-shaped resonators for THz frequency band " has studied one kind and is partly leading
The THz wave transmission characteristic of the metal resonators of X-shaped in body substrate, can by the size and angle that change X-shaped metal resonators
To adjust the width of transmission peaks, the dielectric constant by adjusting substrate can control the position of transmission peaks.Nanjing University in 2015
Ge Shijun et al. article " Tunable terahertz filter based on has been delivered on Chin.Opt.Lett.
Alternative liquid crystal layers and metallic slats " has studied one kind by alternate liquid crystal
The pseudo- fabry-perot filter of layer and laths of metal composition, by the refractive index that temperature controls liquid crystal make its 0.1~
It is adjustable in the working frequency range of 1.5THz.
The terahertz filter patent delivered in recent years also has very much, the human hairs such as Zhang Jinling of Beijing University of Post & Telecommunication in 2013
Table patent " a kind of T-shaped structure terahertz filter " (patent publication No. CN 203367450U), proposes one kind and passes through adjusting
The structure size and spacing of T-shaped structure arrangement, to realize the adjustable terahertz filter of adjustment resonance frequency purpose.On 2014
The Yuan Minghui et al. of extra large Polytechnics has delivered patent " aperiodic surface plasma grating type terahertz filter ", and (patent is public
The number of opening CN 103576228A), a kind of terahertz filter based on aperiodic surface plasma optical grating construction is proposed, is answered
Loss is reduced with the transmission of surface plasma-wave, and design structure can be gone to join according to centre frequency and filtering characteristic
Number.The Dong Fengliang et al. of State Nanometer Science Center in 2015 has delivered patent " a kind of multiband terahertz filter and its system
Make method " (patent publication No. CN 104505561A), it proposes and a kind of does polynary ring period knot on the metallic film with substrate
The multiband terahertz filter of structure, thus it is possible to vary the number of rings and size of polynary ring periodic structure, come control filtering frequency range and
Wave band number.
The filter of these above-mentioned types has their own advantages, and can apply in many fields, solves the problems, such as very much.But by machine
The terahertz filter of tool method regulation is also seldom, so the research of this terahertz filter has profound significance and practical
Value.
Summary of the invention
The purpose of the invention is to overcome the deficiencies in the prior art, as filtering performance is bad, structure is complicated, material is high
It is expensive, need to encapsulate, heating and lack the adjustable Terahertz filtering provided under a kind of mechanical regulation by type of mechanical regulation etc.
Device and production method.
The object of the present invention is achieved like this: including the substrate being arranged in love metal shell, being provided in substrate
The cylindrical hollow waveguide A and waveguide B of periodic structure, the gap between waveguide A and waveguide B form using substrate as tube wall,
The major radius of length-adjustable cylindrical hollow waveguide C, waveguide A and waveguide B, short radius and cycle length are all the same, waveguide A
It is not identical with the duty ratio of waveguide B.
The invention also includes structure features some in this way:
1. the material of the tube wall of waveguide A and waveguide B is low-loss metal, the material of substrate is the macromolecule of Stretch material
Polymer.
2. a kind of production method of the adjustable terahertz filter under mechanical regulation,
(1) circle that radius is equal to metal shell internal diameter is processed on polymeric materials using MEMS depth photoetching process
Column coats one layer of metal layer in the outer surface of the cylinder using X-LIGA technique after forming, then polymer erosion is fallen, and makes
At metal shell；
(2) substrate and waveguide of periodic structure are processed on macromolecule polymer material using MEMS depth photoetching process
C processes the waveguide A and waveguide B of periodic structure using X-LIGA technique in low-loss metal after forming；
(3) by band, there are three types of the bases of waveguiding structure to be placed in metal shell, and the adjustable terahertz under mechanical regulation is made
Hereby filter.
Compared with prior art, the beneficial effects of the present invention are: the material that the present invention uses is that metal and mechanical performance are good
Good high molecular polymer solves the problems, such as that Terahertz function element type in terms of mechanical regulation is deficient.The present invention uses
The mode of mechanical stretching goes to realize adjusting function；The configuration of the present invention is simple, it is small in size, be easy production；The present invention is directionless to be wanted
It asks, the function of filter can be achieved in both ends；Transmitance of the invention is high, practical and convenient, material is common, bandwidth is adjustable, center
Frequency is adjustable.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 be waveguide A and waveguide B simultaneously using 5 periods when curve graph.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
It is as shown in Figure 1 the sectional view of structure used when theoretical calculation in the present invention, Λ is the one of periodic waveguide
A cycle length, r1For major radius, r2For short radius, wherein A, B and C respectively represent waveguide A, waveguide B and waveguide C.Theoretical calculation
When the duty ratio (major radius part accounts for the ratio of whole cycle length in a cycle) of waveguide A chosen be 0.5, waveguide B's
Duty ratio is 0.4, and waveguide C is that the length of most initial is 70 μm.Two periodic waveguides are connected by waveguide C, form a sheet
Inventive structure.Inside is the high molecular polymer of satisfactory mechanical property in figure, and what is chosen in theoretical calculation is polyimides
(polyimide), outer meshing is metallic silver (Ag).What straight dotted line represented is the central axis of structure of the invention, curved
Several periods are omitted among representing in dotted line, and in theoretical calculation, waveguide A and waveguide B is simultaneously using 5 periods.
Here the parameter of two periodic waveguides are as follows: r1=220 μm, r2=180 μm, Λ=183 μm；One of waveguide A
Major radius and short radius partial-length in period are all 91.5 μm, the major radius in a cycle of waveguide B and short radius portion
Point length is respectively 73.2 μm and 109.8 μm, the thickness of the polyimides outside the major radius waveguide tube wall of two periodic waveguides
It is 0.5 μm, the thickness of the polyimide substrate outside short radius waveguide tube wall is 40.5 μm, and length, which is respectively at waveguide A, is
71.5 μm, be 89.8 μm at waveguide B.The initial length of waveguide C is 70 μm, and radius is 230 μm.Polyimides at waveguide C
With a thickness of 0.5 μm.
When increasing the number of cycles of two waveguides, the bandwidth of the transmission peaks of filter can narrow, thus
Realize the adjustable purpose of bandwidth.When fixing the number of cycles of two periodic waveguides, polyimide substrate is stretched
When can make the length of waveguide C, can make the centre frequency at filter transmission peak mobile to low frequency in this way, thereby realize
The purpose of the regulable center frequency of transmission peaks.This structured waveguide is combined with MIniature machinery structure, or uses other sides
Method achievees the purpose that elongate substrate.
R in Fig. 11For major radius, r2For short radius, Λ is the length of periodic waveguide a cycle, lAAnd lBTable respectively
Show the length of a cycle inner waveguide A and waveguide B major radius part；A represents waveguide A, and B represents waveguide B, and C represents waveguide C；Outside
Meshing is metal wave guide wall and metal shell, and inside is the high molecular polymer (such as polyimides) of satisfactory mechanical property；
Straight dotted line represents the central axis of this structure, and curved dotted line represents that intermediate waveguide is omitted and the waveguide number of centre can be with
Depending on design；
Filling in waveguide core of the invention is air.
Fig. 2 is waveguide A and waveguide B while being 5 periods；" C-70 ", " C-80 ", " C-90 " respectively represent the length of waveguide C
Degree is 70 μm, 80 μm, 90 μm.
The present invention provides the adjustable terahertz filter under a kind of mechanical regulation, its structure is by two hollow circuit cylinders
What shape periodic waveguide (waveguide A and waveguide B) and a hollow cylindrical waveguide C were formed.Waveguide A and waveguide B is to pass through X-
Low-loss metal is worked into the high molecular polymer substrate with satisfactory mechanical property by the technologies such as LIGA technique.The two weeks
The structural parameters of phase structured waveguide are provided by identical Prague resonance condition, its main feature is that their major radius r1, it is short
Radius r2It is all identical with cycle length Λ, their duty ratio (the length l of major radius part in each periodAOr lBIt is long with the period
The ratio of degree) it is different.When production machinery high molecular polymer substrate of good performance, one is reserved between two periodic waveguides
Section distance is formed using substrate as the waveguide C of tube wall, due to the tube wall satisfactory mechanical property of waveguide C, it is possible to be drawn by machinery
The method stretched adjusts the length of waveguide C, to achieve the purpose that regulation, to regulate and control the centre frequency of filter.
The tube wall and metal shell of the cylindric periodic waveguide are low-loss metal, such as gold, silver or copper
Deng.The tube wall of waveguide C is the high molecular polymer of satisfactory mechanical property.Three waveguides be all it is hollow, filler be air,
Other materials can also be changed into if necessary, depending on design.Its production method is to use MEMS depth photoetching process, poly-
It closes and processes the cylinder that radius is equal to metal shell internal diameter on object, using X-LIGA technique in above-mentioned polymer cylindrical after forming
Surface coat one layer of metal layer, then polymer erosion is fallen, is made metal shell, metal shell with a thickness of 10 μm, internal diameter
For (r1+10+0.5)μm；MEMS depth photoetching process is used later, is added on the macromolecule polymer material of satisfactory mechanical property
Work goes out periodic structure substrate and waveguide C, and low-loss metal is processed periodic waveguide A using X-LIGA technique after forming
With waveguide B, the pipe thickness of periodic waveguide is 10 μm here, and the radius of waveguide C is (r1+ 10) μm, the thickness of pipe wall of waveguide C
It is 0.5 μm, therefore the outer radius of high molecular polymer substrate is (r1+ 10+0.5) μm, the inside radius at waveguide C is (r1+ 10) μm,
The inside radius of the bases of periodic structure is respectively (r1+ 10) μm and (r2+ 10) μm, the substrate thickness at periodic structure short radius
For (r1-r2+0.5)μm.In substrate at periodic structure in each period, the base length at waveguide A short radius is (Λ-lA-
20) μm, the base length at waveguide B short radius is (Λ-lB-20)μm.Finally by band, there are three types of the polymer matrixes of waveguiding structure
Bottom is put into metal shell.
Inventive principle
The structural parameters of two hollow periodic waveguides are provided by dispersion curve, and expression formula is as follows:
Wherein, m represents m rank transverse mode,It is m rank Bessel zero of a function, r is periodic waveguide
The average value of major radius and short radius, β are propagation constants, and n is the order of Prague resonance, and Λ is the period of rectangle relief fabric
Length.In periodic waveguide, due to the presence of period shape relief fabric, so that can resonate between transverse mode, from
And generate frequency forbidden band.It is to be referred to as Prague resonance by the resonance occurred between same lateral mode when m is identical, generates cloth
Glug forbidden band.When m is not to be known as the resonance of non-Prague by the resonance occurred between different transverse modes simultaneously, non-Bradley is generated
Lattice forbidden band.Here the structural parameters of two periodic waveguides be exactly by between identical transverse mode resonance condition (m=1, n=0 and
M=1, n=1) provide.
When two periodic waveguides are independent, 0.8~1.1THz is all forbidden band, but with cylindric waveguide C
After they are connected, a very narrow passband will be generated in the forbidden band that they are overlapped, realizes the function of filter.This
A passband Producing reason is, since the introducing of waveguide C is so that the integrality of the periodic structure of two periodic waveguides is broken
It is bad, so that a local resonance occurs at waveguide C, produce a very narrow passband.
The present invention includes major radius r1, short radius r2It is all identical with cycle length Λ, but duty ratio is (long by half in each period
The ratio of the length of path portion and cycle length) different two kinds of periodic structure cylindrical hollow waveguides (waveguide A and waveguide B),
One cylindrical hollow waveguide C, high molecular polymer substrate and metal shell composition.
The material that the tube wall of two kinds of periodic structure cylindrical hollow waveguides uses is low-loss metal, such as gold, silver
Or copper.The material that the tube wall of one cylindrical hollow waveguide uses is the height of the Stretch material of satisfactory mechanical property
Molecularly Imprinted Polymer, such as polyimides (Polyimide) and dimethyl silicone polymer (Polydime-thyisiloxane).
Two kinds of periodic structure cylindrical hollow waveguiding structures are to be worked by technologies such as X-LIGA techniques with low-loss gold
In the substrate for belonging to the high molecular polymer of the satisfactory mechanical property for shell, and when processing above-mentioned substrate, two kinds of periods
Designed distance is reserved among structure cylindrical hollow waveguiding structure, is with this high molecular polymer result in formation of one
Substrate is the cylindrical hollow waveguide C of tube wall.
Stretching high molecular polymer substrate by mechanical method can reach in this way so that the length of waveguide C is adjusted
To the purpose of regulation filter centre frequency.
The function to the regulation of transmission peaks bandwidth can be realized by adjusting the number of cycles of two period waveguides.
Two kinds of periodic structure cylindrical hollow waveguides (waveguide A and waveguide B), a cylindrical hollow waveguide C, filler
It is air.
Two kinds of periodic structure hollow waveguides (waveguide A and waveguide B), their duty ratio is different, and according to designing theirs
Duty ratio can change, its length of cylindrical hollow waveguide C can regulate and control.
The number of cycles of two periodic waveguides and the length of cylindrical hollow waveguide can change according to design.
Its production method is to use MEMS depth photoetching process, processes radius on polymer equal to metal shell internal diameter
Cylinder coats one layer of metal layer on the surface of above-mentioned polymer cylindrical using X-LIGA technique after forming, then polymer is rotten
Eating away, is made metal shell, metal shell with a thickness of 10 μm, internal diameter is (r1+10+0.5)μm；MEMS depth light is used later
Carving technology processes periodic structure substrate and waveguide C, benefit after forming on the macromolecule polymer material of satisfactory mechanical property
Low-loss metal is processed into periodic waveguide A and waveguide B with X-LIGA technique, here the pipe thickness of periodic waveguide
It is 10 μm, the radius of waveguide C is (r1+ 10) μm, the thickness of pipe wall of waveguide C is 0.5 μm, therefore the outer radius of high molecular polymer substrate
For (r1+ 10+0.5) μm, the inside radius at waveguide C is (r1+ 10) μm, the inside radius of the bases of periodic structure is respectively (r1+
μm and (r 10)2+ 10) μm, the substrate thickness at periodic structure short radius is (r1-r2+0.5)μm.In substrate at periodic structure
In each period, the base length at waveguide A short radius is (Λ-lA- 20) μm, the base length at waveguide B short radius is
(Λ-lB-20)μm.Finally by band, there are three types of the polymeric substrates of waveguiding structure to be put into metal shell.
The thickness of metal-back, the thickness of high molecular polymer substrate, periodic waveguide tube wall thickness be can root
Depending on design.
The selection of the tube wall of metal-back, the high molecular polymer of satisfactory mechanical property and periodic waveguide, material is
It can change.
The present invention provides the adjustable terahertz filter under a kind of mechanical regulation.Its structure is by two hollow cylindricals
What periodic waveguide (waveguide A and waveguide B) and a hollow cylindrical waveguide C were formed.Waveguide A and waveguide B is to pass through X-
Low-loss metal is worked into the high molecular polymer substrate with satisfactory mechanical property by the technologies such as LIGA technique.The two weeks
The structural parameters of phase structured waveguide are provided by identical Prague resonance condition, its main feature is that their major radius r1, it is short
Radius r2It is all identical with cycle length Λ, their duty ratio (the length l of major radius part in each periodAOr lBIt is long with the period
The ratio of degree) it is different.When production machinery high molecular polymer substrate of good performance, one is reserved between two periodic waveguides
Section distance is formed using substrate as the waveguide C of tube wall, due to the tube wall satisfactory mechanical property of waveguide C, it is possible to be drawn by machinery
The method stretched adjusts the length of waveguide C, to achieve the purpose that regulation, to regulate and control the centre frequency of filter.Present invention tool
Have the advantages that structure is simple, small in size, tunable, important application can be obtained in the fields such as military affairs, medicine, industry.
Claims (2)
1. the adjustable terahertz filter under a kind of mechanical regulation, it is characterised in that: including the substrate being arranged in metal shell,
Be provided with the cylindrical hollow waveguide A and waveguide B of periodic structure in substrate, the gap between waveguide A and waveguide B form with
Substrate is that major radius, short radius and the period of tube wall, length-adjustable cylindrical hollow waveguide C, waveguide A and waveguide B are long
Spend all the same, the duty ratio of waveguide A and waveguide B is not identical；Length-adjustable cylindrical hollow waveguide C, which refers to, passes through mechanical stretching
Mode adjust the length of waveguide C；The material of the tube wall of waveguide A and waveguide B is low-loss metal, and the material of substrate is stretchable
The high molecular polymer of material.
2. a kind of production method of the adjustable terahertz filter under mechanical regulation described in claim 1, it is characterised in that:
(1) cylinder that radius is equal to metal shell internal diameter is processed on high molecular polymer using MEMS depth photoetching process,
One layer of metal layer is coated in the outer surface of the cylinder using X-LIGA technique after forming, then high molecular polymer is corroded
Fall, metal shell is made；
(2) substrate and waveguide C for processing periodic structure on high molecular polymer using MEMS depth photoetching process, shape it
Process the waveguide A and waveguide B of periodic structure in low-loss metal using X-LIGA technique afterwards；
(3) by band, there are three types of the substrates of waveguiding structure to be placed in metal shell, and the adjustable Terahertz filter under mechanical regulation is made
Wave device.
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| CN106450766B (en) * | 2016-12-08 | 2019-08-02 | 中国科学院光电技术研究所 | Multifunctional flexible dynamic polarization modulation device |
| CN107959482B (en) * | 2017-11-15 | 2021-05-11 | 哈尔滨工程大学 | Audio comb filter with adjustable channel number |
| CN112067576B (en) * | 2020-08-18 | 2023-04-28 | 上海理工大学 | Composite waveguide gas sensor based on hollow PMMA (polymethyl methacrylate) tube |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5600740A (en) * | 1995-06-20 | 1997-02-04 | Asfar; Omar R. | Narrowband waveguide filter |
| CN105206906A (en) * | 2015-08-27 | 2015-12-30 | 哈尔滨工程大学 | Composite-waveguide-structure-based tunable terahertz narrow-band filter |
| CN205911404U (en) * | 2016-05-11 | 2017-01-25 | 哈尔滨工程大学 | Adjustable terahertz under machinery regulation and control is wave filter now |
-
2016
- 2016-05-11 CN CN201610309166.0A patent/CN105932380B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5600740A (en) * | 1995-06-20 | 1997-02-04 | Asfar; Omar R. | Narrowband waveguide filter |
| CN105206906A (en) * | 2015-08-27 | 2015-12-30 | 哈尔滨工程大学 | Composite-waveguide-structure-based tunable terahertz narrow-band filter |
| CN205911404U (en) * | 2016-05-11 | 2017-01-25 | 哈尔滨工程大学 | Adjustable terahertz under machinery regulation and control is wave filter now |
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