CN105925944A - Cooling plate mechanism for glass sputtering unit - Google Patents
Cooling plate mechanism for glass sputtering unit Download PDFInfo
- Publication number
- CN105925944A CN105925944A CN201610269669.XA CN201610269669A CN105925944A CN 105925944 A CN105925944 A CN 105925944A CN 201610269669 A CN201610269669 A CN 201610269669A CN 105925944 A CN105925944 A CN 105925944A
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- China
- Prior art keywords
- coldplate
- water
- tank
- cooling
- valve
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a cooling plate mechanism for a glass sputtering unit. The cooling plate mechanism comprises a cooling plate, a water tank and a water supply pump; the cooling plate is of a double-layer structure, a plurality of cooling pipes are arranged inside the double-layer structure, one end of each cooling pipe communicates with a water outlet valve through a first pipeline, the other end of each cooling pipe communicates with a water inlet valve through a second pipeline, the water outlet valve, the water tank, the water supply pump and the water inlet valve sequentially communicate with one another through a water pipe, and therefore cooling water can flow to the water inlet valve from the water outlet valve sequentially through the water tank and the water supply pump. The problems that common cooling plate mechanisms are low in cooling efficiency and high in cooling energy consumption are solved.
Description
Technical field
The present invention relates to coldplate mechanism, in particular it relates to a kind of coldplate mechanism for glass sputtering unit.
Background technology
In coating film on glass technique, vacuum coating is a kind of common method, and it is mainly material in vacuum chamber
Atom isolates the surface getting to glass from heating source.The vacuum coating of glass is carried out in sputtering unit, according to
The technology of plated film needs, and operationally, the side plate of sputtering unit and base plate are required for carrying out cooling process, reaches if cooling processes
The quality of coating film on glass can be had a strong impact on less than technology requirement, also can seriously damage the equipment within sputtering unit.
Therefore it provides a kind of cooling effectiveness is high and the coldplate mechanism for glass sputtering unit of cooling less energy consumption is
The problem that the present invention needs solution badly.
Summary of the invention
It is an object of the invention to provide a kind of coldplate mechanism for glass sputtering unit, solve common coldplate
The problem that mechanism's cooling effectiveness is low and cooling energy consumption is high.
To achieve these goals, the invention provides a kind of coldplate mechanism for glass sputtering unit, wherein, institute
State coldplate mechanism and include that coldplate, water tank and feed pump, described coldplate are double-decker, be provided with in described double-decker
Multiple cooling tubes, one end of each described cooling tube is by the first pipeline communication outlet valve, and the other end is connected by second pipe
Water intaking valve, described outlet valve, described water tank, described feed pump and described water intaking valve are sequentially connected by water pipe so that cooling water
Described water tank can be sequentially passed through from described outlet valve and described feed pump flow to described water intaking valve.
Preferably, described coldplate mechanism also includes that tank, described water tank are fixed on inside described tank.
Preferably, described tank be provided above multiple fountain head, each described fountain head passes through pipeline communication respectively
Water inlet pipe.
Preferably, the quantity of described cooling tube is 3-6 root.
Preferably, the outer panel of described tank is fixed with multiple radiator fan.
Preferably, the bottom of described tank is communicated with outlet conduit, and described outlet conduit is internally provided with drainage screen.
Preferably, heat radiation silica gel pad is posted on the surface of described coldplate.
According to technique scheme, the invention provides a kind of coldplate mechanism for glass sputtering unit, wherein, institute
State coldplate mechanism and include that coldplate, water tank and feed pump, described coldplate are double-decker, be provided with in described double-decker
Multiple cooling tubes, one end of each described cooling tube is by the first pipeline communication outlet valve, and the other end is connected by second pipe
Water intaking valve, described outlet valve, described water tank, described feed pump and described water intaking valve are sequentially connected by water pipe so that cooling water
Described water tank can be sequentially passed through from described outlet valve and described feed pump flow to described water intaking valve, the coldplate that the present invention provides
Mechanism structure is simple, and cooling tube is big with the contact area of coldplate, and cooling effectiveness is high.
Other features and advantages of the present invention will be described in detail in detailed description of the invention part subsequently.
Accompanying drawing explanation
Accompanying drawing is used to provide a further understanding of the present invention, and constitutes the part of description, with following tool
Body embodiment is used for explaining the present invention together, but is not intended that limitation of the present invention.In the accompanying drawings:
Fig. 1 is the structural representation of a kind of coldplate mechanism for glass sputtering unit that the present invention provides.
Description of reference numerals
1-water intaking valve 2-coldplate
3-cooling tube 4-outlet valve
5-water inlet pipe 6-water tank
7-fountain head 8-feed pump
9-tank
Detailed description of the invention
Below in conjunction with accompanying drawing, the detailed description of the invention of the present invention is described in detail.It should be appreciated that this place is retouched
The detailed description of the invention stated is merely to illustrate and explains the present invention, is not limited to the present invention.
As it is shown in figure 1, the invention provides a kind of coldplate mechanism for glass sputtering unit, wherein, described cooling
Trigger structure includes coldplate 2, water tank 6 and feed pump 8, and described coldplate 2 is double-decker, is provided with many in described double-decker
Individual cooling tube 3, one end of each described cooling tube 3 is by the first pipeline communication outlet valve 4, and the other end is connected by second pipe
Water intaking valve 1, described outlet valve 4, described water tank 6, described feed pump 8 are sequentially connected by water pipe with described water intaking valve 1 so that cold
But water can sequentially pass through described water tank 6 from described outlet valve 4 and described feed pump 8 flow to described water intaking valve 1.The present invention provides
Coldplate mechanism structure simple, cooling tube 3 is big with the contact area of coldplate 2, and cooling effectiveness is high.
The present invention one preferred embodiment in so that the coolant in cooling tube 3 can recycle,
Reducing cooling energy consumption, reduce enterprise's production cost, described coldplate mechanism also includes that tank 9, described water tank 6 are fixed on described water
Groove 9 is internal.When the coolant in cooling tube 3 absorbs after heat, in entering tank, carried out water-cooled, by feed pump 8 be input to into
Water valve 1, completes recycling of coolant.
In a kind of embodiment being more highly preferred to of the present invention, in order to add the cooling effectiveness of large water tank 6, described tank 9
Be provided above multiple fountain head 7, each described fountain head 7, respectively by pipeline communication water inlet pipe 5, utilizes fountain head 7 right
Water tank 6 surface carries out water spray and processes and accelerate the rate of cooling of coolant in water tank 6.
The present invention one preferred embodiment in, in order to increase the cooling effectiveness of coldplate 2 further, described cold
But the quantity of pipe 3 is 3-6 root, and certainly, the quantity of cooling tube 3 can be adjusted according to the demand of those skilled in the art here.
In a kind of embodiment being more highly preferred to of the present invention, in order to add the cooling effectiveness of large water tank 6 further, described
Multiple radiator fan it is fixed with on the outer panel of tank 9.
The present invention one preferred embodiment in, in order to the cooling water in tank 9, described water can be discharged in time
The bottom of groove 9 is communicated with outlet conduit, in order to after preventing life-time service, outlet conduit blocks, sets inside described outlet conduit
It is equipped with drainage screen.
In a kind of embodiment being more highly preferred to of the present invention, in order to increase the cooling effectiveness of coldplate 2 further, institute
Heat radiation silica gel pad is posted on the surface stating coldplate 2.
The preferred embodiment of the present invention is described in detail above in association with accompanying drawing, but, the present invention is not limited to above-mentioned reality
Execute the detail in mode, in the technology concept of the present invention, technical scheme can be carried out multiple letter
Monotropic type, these simple variant belong to protection scope of the present invention.
It is further to note that each the concrete technical characteristic described in above-mentioned detailed description of the invention, at not lance
In the case of shield, can be combined by any suitable means, in order to avoid unnecessary repetition, the present invention to various can
The compound mode of energy illustrates the most separately.
Additionally, combination in any can also be carried out between the various different embodiment of the present invention, as long as it is without prejudice to this
The thought of invention, it should be considered as content disclosed in this invention equally.
Claims (7)
1. the coldplate mechanism for glass sputtering unit, it is characterised in that described coldplate mechanism includes coldplate
(2), water tank (6) and feed pump (8), described coldplate (2) is double-decker, is provided with multiple cooling tube in described double-decker
(3), one end of each described cooling tube (3) pass through the first pipeline communication outlet valve (4), the other end by second pipe connect into
Water valve (1), described outlet valve (4), described water tank (6), described feed pump (8) and described water intaking valve (1) are sequentially connected by water pipe
Logical so that cooling water can from described outlet valve (4) sequentially pass through described water tank (6) and described feed pump (8) flow to described in enter
Water valve (1).
Coldplate mechanism the most according to claim 1, it is characterised in that described coldplate mechanism also includes tank (9), institute
State water tank (6) and be fixed on described tank (9) inside.
Coldplate mechanism the most according to claim 2, it is characterised in that described tank (9) be provided above multiple spray
Head (7), each described fountain head (7) is respectively by pipeline communication water inlet pipe (5).
Coldplate mechanism the most according to claim 1, it is characterised in that the quantity of described cooling tube (3) is 3-6 root.
Coldplate mechanism the most according to claim 2, it is characterised in that be fixed with many on the outer panel of described tank (9)
Individual radiator fan.
Coldplate mechanism the most according to claim 2, it is characterised in that the bottom of described tank (9) is communicated with outlet pipe
Road, and described outlet conduit is internally provided with drainage screen.
Coldplate mechanism the most according to claim 1, it is characterised in that heat radiation silicon is posted on the surface of described coldplate (2)
Rubber cushion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610269669.XA CN105925944A (en) | 2016-04-27 | 2016-04-27 | Cooling plate mechanism for glass sputtering unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610269669.XA CN105925944A (en) | 2016-04-27 | 2016-04-27 | Cooling plate mechanism for glass sputtering unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105925944A true CN105925944A (en) | 2016-09-07 |
Family
ID=56837432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610269669.XA Pending CN105925944A (en) | 2016-04-27 | 2016-04-27 | Cooling plate mechanism for glass sputtering unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105925944A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1330722A (en) * | 1998-12-16 | 2002-01-09 | 保尔·沃特公司 | Cooling panel for furnace for producing iron or steel |
| CN202613416U (en) * | 2012-06-19 | 2012-12-19 | 南通水山环保设备有限公司 | Closed type demineralized water cooling and circulating system |
-
2016
- 2016-04-27 CN CN201610269669.XA patent/CN105925944A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1330722A (en) * | 1998-12-16 | 2002-01-09 | 保尔·沃特公司 | Cooling panel for furnace for producing iron or steel |
| CN202613416U (en) * | 2012-06-19 | 2012-12-19 | 南通水山环保设备有限公司 | Closed type demineralized water cooling and circulating system |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160907 |
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| WD01 | Invention patent application deemed withdrawn after publication |