CN105911691B - The production method of array substrate, reflective display and array substrate - Google Patents
The production method of array substrate, reflective display and array substrate Download PDFInfo
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- CN105911691B CN105911691B CN201610509601.4A CN201610509601A CN105911691B CN 105911691 B CN105911691 B CN 105911691B CN 201610509601 A CN201610509601 A CN 201610509601A CN 105911691 B CN105911691 B CN 105911691B
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- total reflection
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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Abstract
The invention discloses the production methods of a kind of array substrate, reflective display and array substrate, to improve the display response speed of reflective display, promote display quality, and simplify its production technology.Array substrate includes multiple pixel units of array arrangement, each pixel unit includes the substrate with switch element, on front side of substrate and with MEMS that switch element is electrically connected and the total reflection lens on front side of MEMS, wherein：The fully reflecting surface of total reflection lens is set towards MEMS；MEMS has the first working condition and the second working condition, including extinction flexible layer, when MEMS is in the first working condition, extinction flexible layer is wrapped in the fully reflecting surface of total reflection lens, when MEMS is in the second working condition, the fully reflecting surface of extinction flexible layer and total reflection lens is separately.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of array substrate, reflective display and array base
The production method of plate.
Background technology
Display device is different according to the light source of use, can be divided into transmission-type, reflective and Transflective.Wherein, it reflects
Formula display device is using front located light source or environment light source as light source, and not only power dissipation ratio is relatively low, and more eyeshield.
As shown in Figure 1a, a kind of array substrate of existing reflective display includes：Backboard 1, positioned at the front side of backboard 1
Total reflection lens film 2 and the ink particles layer 3 between backboard 1 and total reflection lens film 2, wherein, total reflection is saturating
Mirror film 2 includes multiple hemispherical total reflection lens 4 of array arrangement, and each hemispherical total reflection lens 4 correspond to a pixel
Unit, hemisphere face are set for fully reflecting surface and towards backboard 1.
According to optical principle, when light injects optically thinner medium from optically denser medium, if incidence angle is more than the angle of total reflection,
Light can be totally reflected in critical surface.As shown in Figure 1a, when between backboard 1 and total reflection lens film 2 without electric field, ink
Particle is in nature and paves state, and the hemisphere face of hemispherical total reflection lens 4 is surrounded by optically thinner medium, injects hemispherical total reflection
The light of lens 4 light path can reflect as illustrated, so as to which pixel unit be made to be shown as illuminated state.As shown in Figure 1 b, when to the back of the body
When plate 1 and total reflection lens film 2 apply electric field, the hemisphere face of hemispherical total reflection lens 4 is surrounded by ink particles, total reflection
Condition is destroyed, and light can project hemispherical total reflection lens 4 and be absorbed by ink particles, so as to which pixel unit be made to be shown as dark
State.By controlling the electric field conditions of different pixels unit, display device can be made to show image content.
The problems of the above-mentioned prior art is that the characteristic that ink particles are easily reunited determines that its response speed is slower, because
This, for refresh rate than relatively low, display quality is bad when switching the page for reflective display.In addition, existing reflective display dress
The manufacture craft put is also more complicated.
Invention content
The purpose of the embodiment of the present invention is to provide the making side of a kind of array substrate, reflective display and array substrate
Method to improve the display response speed of reflective display, promotes display quality, and simplify its production technology.
An embodiment of the present invention provides a kind of array substrate, multiple pixel units including array arrangement, each pixel list
Member includes the substrate with switch element, positioned at substrate front side and the MEMS (Micro- being electrically connected with switch element
Electro-Mechanical System, abbreviation MEMS) and total reflection lens on front side of MEMS, wherein：
The fully reflecting surface of total reflection lens is set towards MEMS；
MEMS has the first working condition and the second working condition, including extinction flexible layer, works as MEMS
In the first working condition, extinction flexible layer is wrapped in the fully reflecting surface of total reflection lens, when MEMS is in the second work
During state, the fully reflecting surface of extinction flexible layer and total reflection lens is separately.
Using technical solution of the embodiment of the present invention, the work shape of the MEMS can be controlled by switch element
State.When the MEMS is in the first working condition, extinction flexible layer is wrapped in the fully reflecting surface of total reflection lens, due to
The absorption effects of extinction flexible layer, pixel unit are shown as dark-state；When the MEMS is in the second working condition, extinction
Separately, so as to which total reflection lens be made to meet total reflection condition, light can be from for the fully reflecting surface of flexible layer and total reflection lens
The front side surface of total reflection lens projects, and pixel unit is shown as illuminated state.By controlling the described micro electronmechanical of different pixels unit
The working condition of system can make display device show image content, this compares the ink that existing reflective display uses
Water particle technology can improve the display response speed of reflective display, promote display quality, and simplify it and produce work
Skill.
Optionally, the total reflection lens include hemisphere bodily form total reflection lens, spherical crown bodily form total reflection lens, pyramid
Shape total reflection lens or cone shape total reflection lens.
Optionally, the total reflection lens be column bodily form total reflection lens, the horizontal stroke of the column bodily form total reflection lens
Cross sectional shape includes semicircle, arch or triangle.
Preferably, the switch element is thin film transistor switch element.
Specifically, pixel unit further include between substrate and extinction flexible layer and from it is rear to preceding set gradually first
Electrode and insulating layer；Extinction flexible layer is the conductive extinction flexible layer as second electrode, fixed including fixed part and deformations
Portion is fixed on by adhesive linkage on front side of insulating layer.
When the MEMS is in the first working condition, the electric field that repels each other is formed between first electrode and second electrode,
The deformations of conductive extinction flexible layer are wrapped in the fully reflecting surface of total reflection lens, since the extinction of conductive extinction flexible layer is made
With pixel unit is shown as dark-state.When the MEMS is in the second working condition, between first electrode and second electrode
Without electric field, the deformations expansion of conductive extinction flexible layer is flattened on surface of insulating layer, conductive extinction flexible layer and total reflection lens
Fully reflecting surface separately, so as to which total reflection lens be made to meet total reflection condition, light can be from the front side table of total reflection lens
Face is projected, and pixel unit is shown as illuminated state.
Specifically, extinction flexible layer has at least two driving ends, the MEMS is further included for each driving
The driving mechanism of setting is held, driving mechanism includes：Driving beam as first electrode is arranged at intervals with driving beam and is used as second
The load beam of electrode and the overarm arm being connect respectively with the driving end of extinction flexible layer and load beam, driving beam and load beam
Substrate is fixed on by anchoring piece respectively；When the MEMS is in the first working condition, load beam generates deformation and drives
Dynamic overarm arm is moved to the direction far from driving beam.
When the MEMS is in the first working condition, the electric field that repels each other, load are formed between driving beam and load beam
Beam generates deformation and overarm arm is driven to be moved to the direction far from driving beam, and extinction flexible layer is under the driving of each driving mechanism
It arches upward and continues deformation until being wrapped in the fully reflecting surface of total reflection lens；Due to the absorption effects of extinction flexible layer, pixel list
Member is shown as dark-state.When the MEMS is in the second working condition, without electric field action between driving beam and load beam, bear
Carrier beam resets, and then extinction flexible layer is pulled to reset by overarm arm, and the expansion of extinction flexible layer is made to be flattened on substrate surface, and complete
The fully reflecting surface of mirror lens is separately；Total reflection lens meet total reflection condition, and light can be from the front side of total reflection lens
Surface is projected, and pixel unit is shown as illuminated state.
Preferably, the extinction flexible layer material includes black polyamide.
The embodiment of the present invention also provides a kind of reflective display, including the battle array according to aforementioned any technical solution
Row substrate.The display response speed of the reflective display is very fast, and display quality is higher, and production technology more simplifies.
The embodiment of the present invention also provides a kind of method for making aforementioned array substrate, includes the following steps：
Form the substrate with switch element array；
Corresponding switch element array is formed on front side of the substrate with switch element array to set and correspond to the micro- of electrical connection
Mechatronic Systems array；
On front side of microelectromechanicsystems systems array be arranged at intervals total reflection lens film, total reflection lens film include with it is micro electronmechanical
The total reflection lens array that systems array is correspondingly arranged, the fully reflecting surfaces of each total reflection lens is towards corresponding MEMS
Setting；
Wherein, the MEMS has the first working condition and the second working condition, and the MEMS includes
Extinction flexible layer, when the MEMS is in the first working condition, extinction flexible layer is wrapped in being all-trans for total reflection lens
Face is penetrated, when the MEMS is in the second working condition, the fully reflecting surface of extinction flexible layer and total reflection lens is separately.
In a kind of possible realization method, the pixel unit of array substrate further include positioned at substrate and extinction flexible layer it
Between and from rear to the preceding first electrode set gradually and insulating layer；Extinction flexible layer is flexible for the conductive extinction as second electrode
Layer, including fixed part and deformations, fixed part is fixed on by adhesive linkage on front side of insulating layer；The production method specifically includes：
First electrode is formed on front side of the substrate with switch element array；
Insulating layer is formed on front side of first electrode；
Adhesive linkage array is formed on front side of insulating layer；
Conductive extinction flexible layer array is formed on front side of adhesive linkage array, the fixed part of each conduction extinction flexible layer passes through
Adhesive linkage is connect with insulating layer；
Total reflection lens film is arranged at intervals on front side of conductive extinction flexible layer array, total reflection lens film is included with leading
The total reflection lens array that electric extinction flexible layer array is correspondingly arranged, the conductive extinction of fully reflecting surface direction of each total reflection lens
Flexible layer.
In alternatively possible realization method, extinction flexible layer has at least two driving ends, the MEMS
The driving mechanism for the setting of each driving end is further included, driving mechanism includes：Driving beam and driving beam as first electrode
It is arranged at intervals and is used as the load beam of second electrode and the overarm being connect respectively with the driving end of extinction flexible layer and load beam
Arm, driving beam and load beam are fixed on substrate by anchoring piece respectively；When the MEMS is in the first working condition, bear
Carrier beam generates deformation and overarm arm is driven to be moved to the direction far from driving beam；The production method specifically includes：
The first sacrificial layer is formed on front side of the substrate with switch element array, the first sacrificial layer is in anchoring piece installation position
With the first hole；
The second sacrificial layer is formed on front side of the first sacrificial layer, the second sacrificial layer has the second hole being stacked with the first hole
With the through-hole groove of corresponding driving mechanism setting, through-hole groove includes the first side wall and the second sidewall with the first side wall separately；
Driving beam is formed on the inside of the first side wall, load beam is formed on the inside of second sidewall and before the second sacrificial layer
Side forms the overarm arm being connect with load beam and the anchoring piece being connect by the first hole and the second hole with substrate, driving beam with
Load beam is fixed on substrate by anchoring piece respectively；
The extinction flexible layer being connect with overarm arm is formed on front side of the second sacrificial layer；
Remove the first sacrificial layer and the second sacrificial layer；
Total reflection lens film is arranged at intervals in the front side of extinction flexible layer, it is soft that total reflection lens film includes corresponding extinction
Property layer setting and fully reflecting surface towards extinction flexible layer total reflection lens.
Reflective display is applied to using the array substrate that the above method makes, reflective display can be improved
Display response speed, promoted display quality, the making of array substrate is not due to being related to ink particles technology, and technique is more
Simplify.
Description of the drawings
Fig. 1 a are the array substrate schematic cross-section (illuminated state) of existing reflective display；
Fig. 1 b are the array substrate schematic cross-section (dark-state) of existing reflective display；
Fig. 2 a are the array substrate schematic cross-section (dark-state) of one embodiment of the invention reflective display；
Fig. 2 b are the array substrate schematic cross-section (illuminated state) of one embodiment of the invention reflective display；
Fig. 3 a are the array substrate schematic cross-section (illuminated state) of another embodiment of the present invention reflective display；
Fig. 3 b are schematic diagram during the extinction flexible layer of another embodiment of the present invention reflective display deforms；
Fig. 3 c are the array substrate schematic cross-section (dark-state) of another embodiment of the present invention reflective display；
Fig. 4 is the MEMS structure vertical view of another embodiment of the present invention reflective display；
Fig. 5 is the production method flow chart of array substrate shown in Fig. 2 b；
Fig. 6 is the production method flow chart of array substrate shown in Fig. 3 a；
Fig. 7 a are that schematic diagram after step 201 is completed in Fig. 6；
Fig. 7 b are that schematic diagram after step 202 is completed in Fig. 6；
Fig. 7 c are that schematic diagram after step 203 is completed in Fig. 6；
Fig. 7 d are that schematic diagram after step 204 is completed in Fig. 6；
Fig. 7 e are that schematic diagram after step 206 is completed in Fig. 6.
Reference numeral：
Prior art part：
1- backboards；2- total reflection lens films；3- ink particles layers；4- hemispherical total reflection lens.
Part of the embodiment of the present invention：
11- substrates；12-MEMS；13- total reflection lens；14- extinction flexible layers；15- first electrodes；
16- insulating layers；17- fixed parts；18- deformations；19- adhesive linkages；20- driving beams；21- load beams；
22- overarm arms；23- anchoring pieces；The first sacrificial layers of 24-；The first holes of 25-；The second sacrificial layers of 26-；
The second holes of 27-；28- through-hole grooves；29- the first side walls；30- second sidewalls.
Specific embodiment
To improve the display response speed of reflective display, display quality is promoted, and simplify its production technology, this hair
The production method that bright embodiment provides a kind of array substrate, reflective display and array substrate.To make the mesh of the present invention
, technical solution and advantage it is clearer, the present invention is described in further detail by the following examples.
As shown in Figure 2 a and 2 b, the array substrate that one embodiment of the invention provides, multiple pixels including array arrangement
Unit, each pixel unit includes the substrate 11 with switch element (not shown), positioned at the front side of substrate 11 and with switch
The MEMS 12 of element electrical connection and the total reflection lens 13 positioned at 12 front sides of MEMS, wherein：Total reflection lens 13 are all-trans
It penetrates and is set facing towards MEMS 12；MEMS 12 has the first working condition and the second working condition, including extinction flexible layer 14, when
For MEMS 12 in the first working condition, extinction flexible layer 14 is wrapped in the fully reflecting surface of total reflection lens 13, when MEMS 12 exists
During the second working condition, the fully reflecting surface of extinction flexible layer 14 and total reflection lens 13 is separately.
Above-mentioned array substrate is applied to reflective display.Wherein, " preceding " digital reflex formula display device is usually used
When, component close to the side of viewer, " rear " then digital reflex formula display device in the normal use, component far from viewer one
Side.
Using above-described embodiment technical solution, the working condition of MEMS 12 can be controlled by switch element, so as to control
The dispaly state of pixel unit.It is specific as follows：
When MEMS 12 is in the first working condition, extinction flexible layer 14 is wrapped in the fully reflecting surface of total reflection lens 13, by
In the absorption effects of extinction flexible layer 14, pixel unit is shown as dark-state, as shown in Figure 2 a；
When MEMS 12 is in the second working condition, the fully reflecting surface of extinction flexible layer 14 and total reflection lens 13 separately,
So as to which total reflection lens 13 be made to meet total reflection condition, light can be projected from the front side surface of total reflection lens 13, pixel list
Member is shown as illuminated state, as shown in Figure 2 b.
Working condition by the MEMS 12 for controlling different pixels unit, can show display device required
Image content, this compares the ink particles technology that existing reflective display uses, can improve reflective display
It shows response speed, promotes display quality, and simplify its production technology.
It is noted that in embodiments of the present invention, the specific constructive form of MEMS is unlimited, total reflection lens it is specific
Type is also unlimited, for example, can be saturating for hemisphere shape total reflection lens, spherical crown bodily form total reflection lens, the total reflection of the pyramid bodily form
Mirror or cone shape total reflection lens；In addition, total reflection lens may be column bodily form total reflection lens, the column bodily form is all-trans
The cross-sectional shape for penetrating lens can be semicircle, arch or triangle etc..No matter the total reflection lens of which kind of shape are used,
Its side surface towards MEMS should be fully reflecting surface, when light injects optically thinner medium (sky from optically denser medium (total reflection lens)
Gas or vacuum) when, if incidence angle is more than the angle of total reflection, light can be totally reflected in critical surface.
In embodiments of the present invention, the concrete type of switch element is unlimited, it is preferred to use thin film transistor switch element.
As shown in Figure 2 a and 2 b, in the specific embodiment of the present invention, pixel unit is further included positioned at 11 He of substrate
Between extinction flexible layer 14 and from rear to the preceding first electrode 15 set gradually and insulating layer 16；Extinction flexible layer 14 is as the
The conductive extinction flexible layer of two electrodes, including fixed part 17 and deformations 18, fixed part 17 is fixed on insulation by adhesive linkage 19
16 front side of layer.
In the embodiment, total reflection lens 13 are column bodily form total reflection lens, and cross section is arch.As shown in Figure 2 a,
When MEMS 12 is in the first working condition, the electric field that repels each other is formed between first electrode 15 and second electrode (extinction flexible layer 14),
The deformations 18 of conductive extinction flexible layer are wrapped in the fully reflecting surface of total reflection lens 13, due to the extinction of conductive extinction flexible layer
Effect, pixel unit are shown as dark-state.As shown in Figure 2 b, when MEMS 12 is in the second working condition, first electrode 15 and second
16 surface of insulating layer is flattened on without electric field, the expansion of deformations 18 of conductive extinction flexible layer between electrode (extinction flexible layer 14),
The fully reflecting surface of conductive extinction flexible layer and total reflection lens 13 separately, so as to meet total reflection lens 13 is totally reflected item
Part, light can be projected from the front side surface of total reflection lens 13, and pixel unit is shown as illuminated state.
As shown in Fig. 3 a, Fig. 3 b, Fig. 3 c and Fig. 4, in another specific embodiment of the invention, extinction flexible layer 14 has
At least two driving ends, MEMS 12 further include the driving mechanism for the setting of each driving end, and driving mechanism includes：As
The driving beam 20 of one electrode, with driving beam 20 be arranged at intervals and as second electrode load beam 21 and with extinction flexible layer
The overarm arm 22 that 14 driving end and load beam 21 connect respectively, driving beam 20 and load beam 21 are fixed respectively by anchoring piece 23
In substrate 11；When MEMS 12 is in the first working condition, load beam 21 generates deformation and drives overarm arm 22 to far from driving beam
20 direction movement.
In the embodiment, total reflection lens 13 are column bodily form total reflection lens, and cross section is arch, extinction flexible layer 14
There are two opposite driving ends for tool.It is formed and repelled each other when MEMS 12 is in the first working condition, between driving beam 20 and load beam 21
Electric field, load beam 21 generate deformation and overarm arm 22 are driven to be moved to the direction far from driving beam 20, and extinction flexible layer 14 is each
It arches upward under the driving of a driving mechanism (as shown in Figure 3b), and continues deformation until being wrapped in the fully reflecting surface of total reflection lens 13
(as shown in Figure 3c)；Due to the absorption effects of extinction flexible layer 14, pixel unit is shown as dark-state.When MEMS 12 is in the second work
It when making state, is resetted between driving beam 20 and load beam 21 without electric field action, load beam 21, and then is pulled and inhaled by overarm arm 22
Light flexible layer 14 resets, and the expansion of extinction flexible layer 14 is made to be flattened on 11 surface of substrate, the fully reflecting surface phase with total reflection lens 13
Interval；Total reflection lens 13 meet total reflection condition, and light can be projected from the front side surface of total reflection lens 13, pixel unit
It is shown as illuminated state (as shown in Figure 3a).
The specific material of extinction flexible layer 14 is unlimited, it is preferred to use black polyamide, this material have superior machine
Tool performance, electrical insulation capability and thermoplasticity.
The embodiment of the present invention also provides a kind of reflective display, including the array base according to aforementioned any embodiment
Plate.Compared with prior art, the display response speed of the reflective display is very fast, and display quality is higher, and produces work
Skill more simplifies.
The embodiment of the present invention also provides a kind of production method of array substrate, includes the following steps：
Form the substrate with switch element array；
Corresponding switch element array is formed on front side of the substrate with switch element array to set and correspond to the micro- of electrical connection
Mechatronic Systems array；
Form spaced total reflection lens film on front side of microelectromechanicsystems systems array, total reflection lens film include with
The total reflection lens array that microelectromechanicsystems systems array is correspondingly arranged, the fully reflecting surfaces of each total reflection lens is towards corresponding microcomputer
Electric system is set；
Wherein, MEMS has the first working condition and the second working condition, and it is flexible that MEMS includes extinction
Layer, when MEMS is in the first working condition, extinction flexible layer is wrapped in the fully reflecting surface of total reflection lens, when micro electronmechanical
For system in the second working condition, the fully reflecting surface of extinction flexible layer and total reflection lens is separately.
As shown in figure 5, when array substrate uses the structure type shown in Fig. 2 b, production method specifically may include following
Step：
Step 101 forms first electrode on front side of the substrate with switch element array；
Step 102 forms insulating layer on front side of first electrode；
Step 103 forms adhesive linkage array on front side of insulating layer；
Step 104 forms conductive extinction flexible layer array on front side of adhesive linkage array, and each conduction extinction flexible layer is consolidated
Determine portion to connect with insulating layer by adhesive linkage；
Step 105 is arranged at intervals total reflection lens film, total reflection lens film on front side of conductive extinction flexible layer array
Including the total reflection lens array being correspondingly arranged with conductive extinction flexible layer array, the fully reflecting surface direction of each total reflection lens
Conductive extinction flexible layer.
Reflective display is applied to using the array substrate that the above method makes, reflective display can be improved
Display response speed, promoted display quality, the making of array substrate is not due to being related to ink particles technology, and technique is more
Simplify.
As shown in fig. 6, when array substrate uses the structure type shown in Fig. 3 a, production method specifically may include following
Step：
Step 201 forms the first sacrificial layer 24 in 11 front side of substrate with switch element array, and the first sacrificial layer 24 exists
Anchoring piece installation position has the first hole 25, as shown in Figure 7a；
Step 202 forms the second sacrificial layer 26 in 24 front side of the first sacrificial layer, and the second sacrificial layer 26 has and the first hole
Stacked second hole 27 and the through-hole groove 28 of corresponding driving mechanism setting, through-hole groove 28 include the first side wall 29 and with the first side
The second sidewall 30 of wall 29 separately, as shown in Figure 7b；
Step 203 forms driving beam 20 on the inside of the first side wall, and load beam 21, Yi Ji is formed on the inside of second sidewall
The overarm arm 22 and pass through the first hole and the second hole and substrate 11 that formation is connect with load beam 21 on front side of second sacrificial layer 26
The anchoring piece 23 of connection, driving beam 20 and load beam 21 are fixed on substrate 11 by anchoring piece 23 respectively, as shown in Figure 7 c；
Step 204 forms the extinction flexible layer 14 being connect with overarm arm 22 in 26 front side of the second sacrificial layer, such as Fig. 7 d institutes
Show；
Step 205 removes the first sacrificial layer and the second sacrificial layer, completes MEMS and makes, as shown in figure 7e；
Step 206 is arranged at intervals total reflection lens film in the front side of extinction flexible layer 14, and total reflection lens film includes
Corresponding extinction flexible layer 14 set and fully reflecting surface towards extinction flexible layer 14 total reflection lens 13, as shown in Figure 3a.
Reflective display is applied to using the array substrate that the above method makes, reflective display can be improved
Display response speed, promoted display quality, the making of array substrate is not due to being related to ink particles technology, and technique is more
Simplify.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
God and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (11)
- A kind of 1. array substrate, applied to reflective display, which is characterized in that multiple pixel lists including array arrangement Member, each pixel unit are electrically connected micro electronmechanical including the substrate with switch element, on front side of substrate and with switch element System and the total reflection lens on front side of the MEMS, wherein：The fully reflecting surface of the total reflection lens is set towards the MEMS；The MEMS has the first working condition and the second working condition, and it is flexible that the MEMS includes extinction Layer, when the MEMS is in the first working condition, extinction flexible layer is wrapped in the fully reflecting surface of total reflection lens, works as institute MEMS is stated in the second working condition, the fully reflecting surface of extinction flexible layer and total reflection lens is separately.
- 2. array substrate as described in claim 1, which is characterized in that it is saturating that the total reflection lens include the total reflection of the hemisphere bodily form Mirror, spherical crown bodily form total reflection lens, pyramid bodily form total reflection lens or cone shape total reflection lens.
- 3. array substrate as described in claim 1, which is characterized in that the total reflection lens are saturating for the total reflection of the column bodily form Mirror, the cross-sectional shape of the column bodily form total reflection lens include semicircle, arch or triangle.
- 4. array substrate as described in claim 1, which is characterized in that the switch element is thin film transistor switch element.
- 5. such as Claims 1 to 4 any one of them array substrate, which is characterized in thatPixel unit further includes between substrate and extinction flexible layer and from rear to the preceding first electrode set gradually and insulation Layer；Extinction flexible layer is the conductive extinction flexible layer as second electrode, and including fixed part and deformations, fixed part passes through viscous Layer is connect to be fixed on front side of insulating layer.
- 6. such as Claims 1 to 4 any one of them array substrate, which is characterized in that extinction flexible layer has at least two to drive Moved end, the MEMS further include the driving mechanism for the setting of each driving end, and driving mechanism includes：Driving beam as first electrode is arranged at intervals with driving beam and is used as the load beam of second electrode and soft with extinction The overarm arm that the driving end of property layer and load beam connect respectively, driving beam and load beam are fixed on substrate by anchoring piece respectively； When the MEMS is in the first working condition, load beam generates deformation and drives overarm arm to the direction far from driving beam It is mobile.
- 7. array substrate as claimed in claim 6, which is characterized in that it is sub- that the extinction flexible layer material includes black polyamides Amine.
- 8. a kind of reflective display, which is characterized in that including according to claim 1~7 any one of them array substrate.
- 9. a kind of production method for array substrate described in claim 1, which is characterized in that include the following steps：Form the substrate with switch element array；Corresponding switch element array is formed on front side of the substrate with switch element array to set and correspond to the micro electronmechanical of electrical connection Systems array；Spaced total reflection lens film is formed on front side of microelectromechanicsystems systems array, total reflection lens film includes and microcomputer The total reflection lens array that electric system array is correspondingly arranged, the fully reflecting surfaces of each total reflection lens is towards corresponding micro-electro-mechanical systems System setting；Wherein, the MEMS has the first working condition and the second working condition, and the MEMS includes extinction Flexible layer, when the MEMS is in the first working condition, extinction flexible layer is wrapped in the fully reflecting surface of total reflection lens, When the MEMS is in the second working condition, the fully reflecting surface of extinction flexible layer and total reflection lens is separately.
- 10. production method as claimed in claim 9, which is characterized in that the pixel unit of array substrate is further included positioned at substrate Between extinction flexible layer and from rear to the preceding first electrode set gradually and insulating layer；Extinction flexible layer is as second electrode Conductive extinction flexible layer, including fixed part and deformations, fixed part is fixed on by adhesive linkage on front side of insulating layer；The making Method specifically includes：First electrode is formed on front side of the substrate with switch element array；Insulating layer is formed on front side of first electrode；Adhesive linkage array is formed on front side of insulating layer；Conductive extinction flexible layer array is formed on front side of adhesive linkage array, the fixed part of each conduction extinction flexible layer passes through bonding Layer is connect with insulating layer；Total reflection lens film is arranged at intervals on front side of conductive extinction flexible layer array, total reflection lens film includes inhaling with conduction The total reflection lens array that light flexible layer array is correspondingly arranged, the fully reflecting surface of each total reflection lens are flexible towards conductive extinction Layer.
- 11. production method as claimed in claim 9, which is characterized in that extinction flexible layer has at least two driving ends, described MEMS further includes the driving mechanism for the setting of each driving end, and driving mechanism includes：Driving as first electrode Beam and driving beam are arranged at intervals and are used as the load beam of second electrode and divide with the driving end of extinction flexible layer and load beam The overarm arm not connected, driving beam and load beam are fixed on substrate by anchoring piece respectively；When the MEMS is first During working condition, load beam generates deformation and overarm arm is driven to be moved to the direction far from driving beam；The production method is specific Including：The first sacrificial layer is formed on front side of the substrate with switch element array, the first sacrificial layer has in anchoring piece installation position First hole；Form the second sacrificial layer on front side of the first sacrificial layer, the second sacrificial layer has the second hole for being stacked with the first hole and right The through-hole groove that driving mechanism is answered to set, through-hole groove include the first side wall and the second sidewall with the first side wall separately；Driving beam is formed on the inside of the first side wall, load beam and the shape on front side of the second sacrificial layer are formed on the inside of second sidewall The anchoring piece being connect into the overarm arm being connect with load beam and by the first hole and the second hole with substrate, driving beam and load Beam is fixed on substrate by anchoring piece respectively；The extinction flexible layer being connect with overarm arm is formed on front side of the second sacrificial layer；Remove the first sacrificial layer and the second sacrificial layer；Total reflection lens film is arranged at intervals in the front side of extinction flexible layer, total reflection lens film includes corresponding extinction flexible layer Set and fully reflecting surface towards extinction flexible layer total reflection lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN107870496A (en) | 2016-09-23 | 2018-04-03 | 京东方科技集团股份有限公司 | One kind shows structure and display device |
| CN106444206A (en) * | 2016-10-28 | 2017-02-22 | 京东方科技集团股份有限公司 | Reflective displayer and manufacturing method thereof |
| CN106324868A (en) * | 2016-10-31 | 2017-01-11 | 京东方科技集团股份有限公司 | Display panel, driving method thereof and display device |
| CN108169893B (en) | 2018-02-08 | 2020-07-10 | 北京京东方专用显示科技有限公司 | Reflection-type display device and display equipment |
| CN112327474A (en) * | 2020-11-11 | 2021-02-05 | 中国科学院上海技术物理研究所 | Micro-mirror structure and forming method, micro-mirror array and detector |
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| CN105612439A (en) * | 2013-08-20 | 2016-05-25 | 英特尔公司 | A display apparatus including MEMS devices |
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| EP1792223A1 (en) * | 2004-09-09 | 2007-06-06 | Koninklijke Philips Electronics N.V. | Reflective electrowetting lens |
| US10191194B2 (en) * | 2014-11-05 | 2019-01-29 | Rochester Institute Of Technology | Spectral target for macroscopic and microscopic reflectance imaging |
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| CN102246090A (en) * | 2008-12-12 | 2011-11-16 | 索尼爱立信移动通讯有限公司 | Transflective liquid crystal display with adjustable reflector |
| CN105612439A (en) * | 2013-08-20 | 2016-05-25 | 英特尔公司 | A display apparatus including MEMS devices |
| CN105096911A (en) * | 2015-08-28 | 2015-11-25 | 厦门天马微电子有限公司 | Pixel structure, array substrate comprising same, and display apparatus |
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