CN105906342A - Application of zirconia ceramic material in preparation of rollers - Google Patents

Application of zirconia ceramic material in preparation of rollers Download PDF

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Publication number
CN105906342A
CN105906342A CN201610233015.1A CN201610233015A CN105906342A CN 105906342 A CN105906342 A CN 105906342A CN 201610233015 A CN201610233015 A CN 201610233015A CN 105906342 A CN105906342 A CN 105906342A
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China
Prior art keywords
roller
zirconia
zirconia ceramics
ceramics material
rollers
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Pending
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CN201610233015.1A
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Chinese (zh)
Inventor
王平进
金海潮
王凯翔
张其灿
李国安
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HENGDIAN GROUP ZHEJIANG INNUOVO ELECTRONICS CO Ltd
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HENGDIAN GROUP ZHEJIANG INNUOVO ELECTRONICS CO Ltd
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Priority to CN201610233015.1A priority Critical patent/CN105906342A/en
Publication of CN105906342A publication Critical patent/CN105906342A/en
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B3/00Producing shaped articles from the material by using presses; Presses specially adapted therefor
    • B28B3/003Pressing by means acting upon the material via flexible mould wall parts, e.g. by means of inflatable cores, isostatic presses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208Calcium oxide or oxide-forming salts thereof, e.g. lime
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225Yttrium oxide or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3229Cerium oxides or oxide-forming salts thereof

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)

Abstract

Relating to the field of semiconductor technology, the invention relates to rollers used in multi-wire saws, in particular to application of a zirconia ceramic material in preparation of rollers. The zirconia ceramic material is compound zirconia, and mainly comprises greater than or equal to 75% by mass of zirconia and the balance additive. Specifically, the additive is any one of yttrium oxide, calcium oxide or cerium oxide. The invention effectively solves the problems of poor wear resistance and thermal expansion and deformation caused by a lot of heat generated during high-speed operation in existing material rollers, the prepared rollers can fully meet the compressive capacity needing to be borne by rollers, are not easy to deform, and at the same time can reach the purposes of reducing loss, prolonging the service life, and lowering the production cost.

Description

A kind of zirconia ceramics material is in the application prepared on roller
Technical field
The present invention relates to the roller used in multi-line cutting machine, be specifically related to a kind of zirconia ceramics material and preparing roller On application.
Background technology
Multi-line cutting machine is the high property for cutting the crisp and hard materials such as quartz crystal, monocrystalline silicon, magnetic material, sapphire Energy, high efficiency, in high precision process equipment.
The kinematic accuracy of High Rotation Speed roller shaft, will directly affect wafer crudy, the cutting essence of the most various wafers Degree is also desirable that and is accurate to micron.Roller shaft circular runout and axial float error can directly influence wafer quality, including table Surface roughness, evenness of cutting surface, gauge etc..
Use for roller requires it is that rigidity must enough, because whole roller axis system needs to bear hundreds of Holding tightly and the effect of large area cutting force of the power steel wire more than 20N.Roller can produce in long cutting process simultaneously Substantial amounts of heat.And currently used roller material is based on high-molecular polythene, its performance is general, and waste is bigger.
Owing to the performance of nowadays roller is the best, cause being lost relatively big, cause the serious waste of material and had a strong impact on life Produce efficiency and cost, based on this, realize meeting the use of roller in the urgent need to studying a kind of new material.
Zirconia ceramics has fabulous wearability, corrosion resistance, self lubricity and high rigidity because of it, is unlikely to deform Good characteristic, in the multiple fields such as structural material, enjoys the favor of countries in the world material science researcher.But due to pure ZrO2 Converted to four directions by monocline when heating up, have the volume contraction of 5%, and converted by four direction monocline when lowering the temperature, produce the body of 8% , there is bigger stress, can produce micro-crack in structure, thermal conductivity factor is little in addition in long-pending expansion, and thermal coefficient of expansion is big, makes pure ZrO2's The performances such as mechanics, electricity and anti-thermal shock are the most very poor, cause pure ZrO2Can not be used directly to manufacture large-scale, special-shaped product, greatly Limit ZrO2Application.
Summary of the invention
The various problems existed for above-mentioned prior art and defect, it is desirable to provide a kind of zirconia ceramics material In the application prepared on roller, to the deficiency of existing material roller can be overcome, it is greatly improved the wearability of roller, and significantly drops Low roller because of run up time produce substantial amounts of heat and the thermal expansion that causes and problem on deformation, this roller has and is higher than simultaneously The compression strength of 40MPa, can fully meet the anti-pressure ability that roller is subjected to, be unlikely to deform, and reaches to reduce loss simultaneously, prolongs Long life, reduce production cost.
For realizing the purpose of the present invention, inventor provides following technical scheme:
A kind of zirconia ceramics material is in the application prepared on roller, and described zirconia ceramics material is compound zirconia, main Want constituent be by mass percentage >=zirconium oxide of 75% and the additive of surplus, wherein, described additive is optional One in yittrium oxide, calcium oxide or ceria.
Pure ZrO2Because the limitation of itself can not be used directly to manufacture large-scale, special-shaped product, significantly limit ZrO2 Application.Inventor studies discovery, adds yittrium oxide, calcium oxide or ceria these three in the ratio of proportioning of the present invention and adds The one of agent, can solve harmful effect produced by the crystal transfer that pure zirconium dioxide produces in sintering, make zirconium oxide The characteristic that it is excellent given play to by pottery, thus takes a firm foundation for producing the satisfactory roller of performance.
The present invention according to different uses and performance requirement, can suitably change the composition of compound zirconia and contain Amount, the difference of additive level can change the mechanical property of product.As a example by yittrium oxide, when the addition of yittrium oxide reaches 3% Time, the various aspects of performance of compound zirconia all reaches optimum, and as relative density reaches 98.113%, bending strength is close 300MPa, hardness is close to 340MPa.But not all product is required for the most excellent performance, and needs when producing in enormous quantities Actual production conditions to be considered, firing temperature, the factor of the various aspects such as cost, so just may be used needed for reaching product as required With, adjust in the proportion of inventive formulation.
As preferably, in the present invention, described zirconic diameter of particle is less than 10 μm, and the diameter of particle of additive is less than 6μm.Powder solid phase reaction speed constant be inversely proportional to particle radius square, therefore powder the thinnest be conducive to sintering.Further Research prove, the granularity of powder is also to improve the key factor of material microstructure and mechanical property.
As preferably, in the present invention, described compound zirconia meets: burning decrement≤8% of powder, and apparent density >= 1.1g/cm3, moisture≤6%.If burning decrement is excessive, it will cause burning till rear quality and kick the beam, shrink excessive, internal empty after burning till Gap is too much, affects product mechanical property.Apparent density is too small means that in powder, particle is relatively big, and excesssive gap causes debugging mould Charge even original mould can be increased inapplicable, the impact that actual production is brought inconvenience during tool.
As preferably, in the present invention, described roller includes being not limited to multi-line cutting machine roller etc..
As preferably, in the present invention, described roller is prepared as follows:
(1) compound zirconia is put in the rubber pattern chosen, need to fill mould during dress powder, it is to avoid during isostatic pressing Shrink excessive, affect product size,
(2) rubber pattern installing powder is put in isostatic pressing machine, under the briquetting pressure of 60MPa ~ 200MPa, carry out isostatic pressed Shaping, this purpose is that the base substrate by first one-step forming is the most densified, has both prevented product from occurring during dry-pressing uneven Phenomenon, also reduce product in sintering process size produce large change,
(3) process through Digit Control Machine Tool again, make product be molded completely,
(4) then sinter at a temperature of maximum temperature is 1350 DEG C ~ 1600 DEG C and form.
Research proves, is based on pottery roller and achieves the material revolution of product through strict technique.
As preferably, in the present invention, the dwell time of described isostatic pressing is 100s ~ 200s.
As preferably, in the present invention, the time of described sintering is 35h ~ 50h.
Compared with prior art, the invention have the advantages that
1, the ceramic roller of the present invention is compared with existing roller, wearability from about the 40h of original material rise to 400 hours with On, wearability improves more than 10 times, has a fabulous wearability, and high rigidity, Heat stability is good, good mechanical performance, resistance to The premium properties such as corrosion.
2, preparation method of the present invention is simple, the high-performance ceramic roller that can prepare, preferred wearability be 400 hours with On, compression strength is more than 40MPa, and bending strength is more than 200MPa, thermal coefficient of expansion 15 × 10-6/ DEG C below, fracture toughness For 5MPa/m2Above, this has been considerably improved the service life of roller, it is achieved thereby that reduce the purpose of production cost.
Detailed description of the invention
Below in conjunction with embodiment, further illustrate present disclosure.Should be appreciated that the enforcement of the present invention is not limited to In the following examples, any pro forma accommodation and/or the change of being made the present invention fall within scope.
In the present invention, if not refering in particular to, all of equipment and raw material etc. are all commercially available or the industry is conventional. Method in following embodiment, if no special instructions, is the conventional method of this area.
Zirconia ceramics material provided by the present invention, can need to make the ceramic roller of different model according to different And apply on different devices.In order to be better understood from the present invention, with the zirconia ceramics roller of a kind of multi-line cutting machine it is Example is made and being illustrated.
Need a bit illustrated: actual production does not have the pure compound zirconia of 100%, so there is quality hundred The impurity of proportion by subtraction≤0.7%, impurity is based on aluminum oxide.
Embodiment 1
The compound zirconia used in the present embodiment, mainly comprises zirconium oxide and quality hundred that composition is mass percent >=94% Proportion by subtraction is 5.305% yittrium oxide.Zirconic diameter of particle is less than 6 μm, and the diameter of particle of yittrium oxide is less than 4 μm.Compound zirconia Meet: burning decrement≤4% of powder, apparent density >=1.3g/cm3, moisture≤3%.
The zirconia ceramics roller of a kind of multi-line cutting machine, is prepared according to the following steps:
(1) charging
Compound zirconia is put in the rubber pattern chosen, needs to fill mould during dress powder,
(2) isostatic pressing
It is to carry out isostatic pressing, pressurize in the isostatic pressing machine in the environment of 150MPa that the rubber pattern installing powder is put into pressure Time is 120s,
(3) machine-shaping
Base substrate after being completed by isostatic pressing, is processed with Digit Control Machine Tool, makes product be molded completely,
(4) sintering obtains finished product
Base substrate after shaping completely is sintered in the environment of maximum temperature is 1500 DEG C, whole burning from start to end The knot time is 40h.
Just required multi-line cutting machine zirconia ceramics roller, this pottery after testing can be obtained after aforementioned four step The wearability of porcelain roller is 535h, and compression strength is 52MPa, and bending strength is 280MPa, and thermal coefficient of expansion is 10 × 10-6/ DEG C, Fracture toughness is 8.5MPa/m2
Embodiment 2
The compound zirconia used in the present embodiment, mainly comprises zirconium oxide and quality that composition is mass percent >=94.5% Percentage is 5.101% calcium oxide.Zirconic diameter of particle is less than 5.3 μm, and the diameter of particle of calcium oxide is less than 3.5 μm.Compound Zirconium oxide meets: burning decrement≤3.1% of powder, apparent density >=1.26g/cm3, moisture≤2.6%.
The zirconia ceramics roller of a kind of multi-line cutting machine, is prepared according to the following steps:
(1) charging
Compound zirconia is put in the rubber pattern chosen, needs to fill mould during dress powder,
(2) isostatic pressing
It is to carry out isostatic pressing, pressurize in the isostatic pressing machine in the environment of 170MPa that the rubber pattern installing powder is put into pressure Time is 120s,
(3) machine-shaping
Base substrate after being completed by isostatic pressing, is processed with Digit Control Machine Tool, makes product be molded completely,
(4) sintering obtains finished product
Base substrate after shaping completely is sintered in the environment of maximum temperature is 1464 DEG C, whole burning from start to end The knot time is 38h.
Just required multi-line cutting machine zirconia ceramics roller, this pottery after testing can be obtained after aforementioned four step The wearability of porcelain roller is 465h, and compression strength is 43MPa, and bending strength is 240MPa, and thermal coefficient of expansion is 9.2 × 10-6/ DEG C, fracture toughness is 7.3MPa/m2
Embodiment 3
The compound zirconia used in the present embodiment, mainly comprises zirconium oxide and quality hundred that composition is mass percent >=80% Proportion by subtraction is 19.254% ceria.Zirconic diameter of particle is less than 4.4 μm, and the diameter of particle of ceria is less than 2.7 μm. Compound zirconia meets: burning decrement≤6.6% of powder, apparent density >=1.12g/cm3, moisture≤5%.
The zirconia ceramics roller of a kind of multi-line cutting machine, is prepared according to the following steps:
(1) charging
Compound zirconia is put in the rubber pattern chosen, needs to fill mould during dress powder,
(2) isostatic pressing
It is to carry out isostatic pressing, pressurize in the isostatic pressing machine in the environment of 180MPa that the rubber pattern installing powder is put into pressure Time is 120s,
(3) machine-shaping
Base substrate after being completed by isostatic pressing, is processed with Digit Control Machine Tool, makes product be molded completely,
(4) sintering obtains finished product
Base substrate after shaping completely is sintered in the environment of maximum temperature is 1523 DEG C, whole burning from start to end The knot time is 40h.
Just required multi-line cutting machine zirconia ceramics roller, this pottery after testing can be obtained after aforementioned four step The wearability of porcelain roller is 420h, and compression strength is 46MPa, and bending strength is 260MPa, and thermal coefficient of expansion is 8 × 10-6/ DEG C, Fracture toughness is 15.4MPa/m2
The zirconia ceramics roller being only a certain multi-line cutting machine described by above 3 embodiments, it is demonstrated experimentally that In actual production process, according to product performance demands, under the formula rate and preparation method of the present invention, prepare roller, all may be used To realize the goal of the invention of the present invention, effectively solve the problems such as the thermal expansion poor, easy of existing roller wear resistence, mutability.Herein Repeat the most one by one.
The roller (epoxy resin-matrix) of the existing material of comparative example 1
The roller of a kind of multi-line cutting machine, is prepared according to the following steps:
(1) precompressed: by a certain proportion of bisphenol A type epoxy resin with curing agent, carbon fiber, graphite and Heat Conduction Material in proportion After mixing, press is pressed into the ingot of definite shape and quality.
(2) charging: the epoxyn of certain mass is poured in glass beaker, then it is homogeneously added into 10% ~ The carbon fiber of about 20%, is slowly added into graphite powder and 10% bronze powder of about 20% ~ 30% simultaneously, stirs, to be mixed Thing the most uniformly mixes, and adds polyamide (PA66) curing agent according to the ratio that its mass fraction is 1:1 before pouring mould into.
(3) matched moulds: before punch is not in contact with epoxy resin composition should quick matched moulds, and should after punch contact mixture Matched moulds at a slow speed, so that the air in mold cavity is fully got rid of.
(4) exhaust: thermosetting plastics is when shaping, it is necessary to gas and chemical reaction that eliminating moisture and volatile matter become produce Raw accessory substance, affects performance and the surface quality of goods to avoid producing forming defect.To this end, want release after matched moulds Exhaust.
(5) solidification: thermosetting plastics is the regular hour to be kept under uniform temperature and pressure, makes high molecular crosslink react Fully, can be only achieved the purpose that product properties is good, production efficiency is high.
(6) demoulding: goods are internal produces bigger internal stress, therefore, the bearing after the demoulding if the even meeting of inhomogeneous cooling causes Need to put into and the constant temperature oven of 80 DEG C carries out Slow cooling.
(7) clear mould: need after the demoulding to remove the plastic waste remaining in mold cavity, then with compression with copper tool or copper brush Air blows off.
(8) machining: the roller through compression forming utilizes Digit Control Machine Tool to cut V-groove in its wall portion.The width of groove Size is as the criterion with the matrix strength not affecting bearing, typically takes 2mm.
(9) soak: roller is soaked in SAE40 lubricating oil 24 ~ 48h, it is ensured that abundant immersion oil before use.Bearing is in work Making state makes oil stain ooze out owing to being heated, and plays lubrication.
Just required multi-line cutting machine epoxy resin-matrix roller, this ring after testing can be obtained after above-mentioned nine steps The wearability of epoxy resin-based roller is 42h, and compression strength is 23MPa, and thermal coefficient of expansion is 9.4 × 10-6/ DEG C, hardness 60HB.
The roller of the single zirconia ceramics material of comparative example 2
A kind of zirconia ceramics material roller, is prepared according to the following steps:
(1) by the zirconia content single zirconium oxide powder more than 98%, put in the rubber pattern chosen, need during dress powder Mould is filled,
(2) putting in isostatic pressing machine by the rubber pattern installing powder, carry out isostatic pressed under the pressure of 150MPa, the dwell time is 120s。
(3) base substrate after being completed by isostatic pressed, is processed with Digit Control Machine Tool, makes product be molded completely.
(4) base substrate after shaping completely is sintered, from start to end in the environment of maximum temperature is 1500 DEG C Whole sintering time be 40h.
The roller of output after aforementioned four step, great majority produce crack due to its crystal transfer, do not only result in deformation, and And crackle occurs, for defective work.Minority outward appearance is qualified, and its compression strength is 26MPa, and wearability is within 80 hours.

Claims (7)

1. a zirconia ceramics material is in the application prepared on roller, it is characterised in that described zirconia ceramics material is multiple Close zirconium oxide, mainly comprise composition be by mass percentage >=zirconium oxide of 75% and the additive of surplus, wherein, described The optional yittrium oxide of additive, calcium oxide or ceria in one.
A kind of zirconia ceramics material the most according to claim 1 is in the application prepared on roller, it is characterised in that described Zirconic diameter of particle less than 10 μm, the diameter of particle of additive is less than 6 μm.
A kind of zirconia ceramics material the most according to claim 1 is in the application prepared on roller, it is characterised in that described Compound zirconia meet: burning decrement≤8% of powder, apparent density >=1.1g/cm3, moisture≤6%.
A kind of zirconia ceramics material the most according to claim 1 is in the application prepared on roller, it is characterised in that described Roller refer to multi-line cutting machine roller.
A kind of zirconia ceramics material the most according to claim 1 is in the application prepared on roller, it is characterised in that described Roller prepare as follows:
(1) compound zirconia is put in the rubber pattern chosen, needs to fill mould during dress powder,
(2) rubber pattern installing powder is put in isostatic pressing machine, under the briquetting pressure of 60MPa ~ 200MPa, carry out isostatic pressed Shaping,
(3) process through Digit Control Machine Tool again, make product be molded completely,
(4) then sinter at a temperature of maximum temperature is 1350 DEG C ~ 1600 DEG C and form.
A kind of zirconia ceramics material the most according to claim 5 is in the application prepared on roller, it is characterised in that described Dwell time of isostatic pressing be 100s ~ 200s.
A kind of zirconia ceramics material the most according to claim 5 is in the application prepared on roller, it is characterised in that described Time of sintering be 35h ~ 50h.
CN201610233015.1A 2016-04-15 2016-04-15 Application of zirconia ceramic material in preparation of rollers Pending CN105906342A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102976762A (en) * 2012-11-07 2013-03-20 洛阳北苑特种陶瓷有限公司 Method for preparing zirconia ceramic product
WO2016052474A1 (en) * 2014-10-03 2016-04-07 Jfeスチール株式会社 Hearth roll and continuous annealing facility

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102976762A (en) * 2012-11-07 2013-03-20 洛阳北苑特种陶瓷有限公司 Method for preparing zirconia ceramic product
WO2016052474A1 (en) * 2014-10-03 2016-04-07 Jfeスチール株式会社 Hearth roll and continuous annealing facility

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
顾立德: "《特种耐火材料》", 31 January 2000 *

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