CN105895497B - A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source - Google Patents
A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source Download PDFInfo
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- CN105895497B CN105895497B CN201610378862.7A CN201610378862A CN105895497B CN 105895497 B CN105895497 B CN 105895497B CN 201610378862 A CN201610378862 A CN 201610378862A CN 105895497 B CN105895497 B CN 105895497B
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- millimeters
- cylinders
- capillary
- extreme ultraviolet
- electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
Abstract
A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source, belongs to extreme Ultraviolet Lithography Source technical field.It is solved during extreme ultraviolet is produced using capillary discharging Z constrictions method, by way of the capillary for changing different length, it is difficult to meet the requirement of plasma length fine setting, the problem of operation difficulty is big.A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source of the present invention, including sparking electrode, main discharge electrode, locking nut, trim ring and binding post, pre-arcing electrode is columnar structured, one end of main discharge electrode is cone, middle part is a cylinder, the other end is No. two cylinders, binding post is fixedly installed in the shrinkage pool on a bottom surface of No. two cylinders by trim ring, one bottom surface of No. two cylinders is the end face of its one end, its other end is arranged in columnar structured, both threaded connections, and fixed by locking nut.The present invention is applied to capillary extreme Ultraviolet Lithography Source.
Description
Technical field
The present invention relates to a kind of capillary discharging electrode, belong to extreme Ultraviolet Lithography Source technical field.
Background technology
During extreme ultraviolet is produced using capillary discharging Z constrictions methods, in the plasma of Z constriction states
Length determines the impedance operator of its own, is equal in the length of the plasma of Z constriction states and is arranged on capillary two ends
The spacing of two electrodes；
The third level of main discharge power pulse compression is to capillary discharging, the efficiency released energy, with main discharge power supply arteries and veins
The third level of punching press contracting and the impedance operator matching degree of capillary plasma are directly proportional, therefore in device joint debugging, often
The length of fine setting plasma is often needed, so that the impedance operator for the third level that its impedance operator is compressed with main discharge power pulse
More match；
The method of existing fine setting plasma length is to change the capillary of different length, but the length of existing capillary
There is fixed specification, it is difficult to the requirement of fine setting is met, and also it is larger to change the operation difficulty of capillary.
The content of the invention
The invention aims to solve during extreme ultraviolet is produced using capillary discharging Z constrictions method,
By way of the capillary for changing different length, it is difficult to meet the requirement of plasma length fine setting, operation difficulty asking greatly
Topic, so as to propose a kind of sparking electrode for capillary extreme Ultraviolet Lithography Source.
A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source of the present invention, including pre-arcing electrode 1, master
Sparking electrode 2, locking nut 3, trim ring 4 and binding post 5；
Pre-arcing electrode 1 is columnar structured, cylinder high 20 millimeters, that external diameter is 10 millimeters, internal diameter is 5.56 millimeters
It is provided with the screw thread that long 9 millimeters, size is M6 × 0.5, the outer surface of its one end and sets on the inner surface of one end of shape structure
There is the screw thread that long 3 millimeters, size is M10 × 0.75；
One end of main discharge electrode 2 is cone 6, and middle part is a cylinder 7, and the other end is No. two cylinders 8, circular cone
Body 6, a cylinder 7 and No. two cylinders 8 are coaxial and are fixedly installed, a height of 4.3 millimeters of cone 6, and basal diameter is 5 millis
Rice, a height of 12.7 millimeters of a cylinder 7, basal diameter is 5 millimeters, and the height of No. two cylinders 8 is 19.5 millimeters, bottom surface
A diameter of 6 millimeters, 19.5 millimeters of length is provided with the side of No. two cylinders 8, size is the screw thread of M6 × 0.5, at No. two
The shrinkage pool 9 that deep 5.5 millimeters, internal diameter is 3 millimeters is provided with one bottom surface of cylinder 8；
The thickness of locking nut 3 is 5.5 millimeters, be provided with the inner surface of its one end long 3 millimeters, size be M10 ×
Long 2 millimeters M6 screw threads are provided with 0.75 screw thread, the inner surface of its other end；
The thickness of trim ring 4 is that the screw thread that long 2 millimeters, size is M6 × 0.5 is provided with 5 millimeters, the inner surface of its one end,
Deep 2 millimeters, a diameter of 3.2 millimeters of through hole are provided with its other end；
One end of binding post 5 is high 4 millimeters, a diameter of 3 millimeters of No. three cylinders 10, and middle part is high 1.5 millimeters, straight
Footpath is 5 millimeters of No. four cylinders 11, and the other end is high 7 millimeters, 3 millimeters of diameter No. five cylinders 12, No. three described circles
Cylinder 10, No. four cylinders 11 and No. five cylinders 12 are coaxial and are fixedly installed；
No. two cylinders 8 are threadedly coupled with columnar structured, locking nut 3 simultaneously with No. two cylinders 8 and cylindrical shape knot
Structure is threadedly coupled, and trim ring 4 is connected by the threaded one end with No. two cylinders 8, No. three cylinders 10 is fixedly installed on shrinkage pool 9
In；
No. five cylinders 12 are connected by wire with the output end of the pulse power of the extreme Ultraviolet Lithography Source.
It is placed on the main discharge electrode of capillary one end when needing to adjust and is placed between the electrode of the capillary other end
Away from when, first power off, back out trim ring 4, take out binding post 5, back out locking nut 3, by rotating main discharge electrode 2, make its with
The relative position of pre-arcing electrode changes, so as to adjust main discharge electrode 2 and be placed on the electrode of the capillary other end
Spacing, after adjustment is finished, first passes through locking nut 3 and fixes pre-arcing electrode 1 with main discharge electrode 2, then installation is connect
Line terminals 5 are arranged in shrinkage pool 9, and are fixed with trim ring 4.
A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source of the present invention, by changing main discharge electrode
With the relative position of pre-arcing electrode, the fine setting to capillary plasma length can not only be realized, energy transfer is improved
Efficiency, optimize the output of extreme ultraviolet, it is and simple to operate.
Brief description of the drawings
Fig. 1 is a kind of overall assembling of sparking electrode for capillary extreme Ultraviolet Lithography Source described in embodiment one
Figure；
Fig. 2 is the structural representation of pre-arcing electrode in embodiment one；
Fig. 3 is the structural representation of main discharge electrode in embodiment one；
Fig. 4 is the structural representation of locking nut in embodiment one；
Fig. 5 is the structural representation of trim ring in embodiment one；
Fig. 6 is the structural representation of the middle connecting terminal of embodiment one.
Embodiment
Embodiment one：Illustrate present embodiment with reference to Fig. 1 to Fig. 6, one kind described in present embodiment is used for hair
The sparking electrode of tubule extreme Ultraviolet Lithography Source, including pre-arcing electrode 1, main discharge electrode 2, locking nut 3, trim ring 4 and connect
Line terminals 5；
Pre-arcing electrode 1 is columnar structured, cylinder high 20 millimeters, that external diameter is 10 millimeters, internal diameter is 5.56 millimeters
It is provided with the screw thread that long 9 millimeters, size is M6 × 0.5, the outer surface of its one end and sets on the inner surface of one end of shape structure
There is the screw thread that long 3 millimeters, size is M10 × 0.75；
One end of main discharge electrode 2 is cone 6, and middle part is a cylinder 7, and the other end is No. two cylinders 8, circular cone
Body 6, a cylinder 7 and No. two cylinders 8 are coaxial and are fixedly installed, a height of 4.3 millimeters of cone 6, and basal diameter is 5 millis
Rice, a height of 12.7 millimeters of a cylinder 7, basal diameter is 5 millimeters, and the height of No. two cylinders 8 is 19.5 millimeters, bottom surface
A diameter of 6 millimeters, 19.5 millimeters of length is provided with the side of No. two cylinders 8, size is the screw thread of M6 × 0.5, at No. two
The shrinkage pool 9 that deep 5.5 millimeters, internal diameter is 3 millimeters is provided with one bottom surface of cylinder 8；
The thickness of locking nut 3 is 5.5 millimeters, be provided with the inner surface of its one end long 3 millimeters, size be M10 ×
Long 2 millimeters M6 screw threads are provided with 0.75 screw thread, the inner surface of its other end；
The thickness of trim ring 4 is that the screw thread that long 2 millimeters, size is M6 × 0.5 is provided with 5 millimeters, the inner surface of its one end,
Deep 2 millimeters, a diameter of 3.2 millimeters of through hole are provided with its other end；
One end of binding post 5 is high 4 millimeters, a diameter of 3 millimeters of No. three cylinders 10, and middle part is high 1.5 millimeters, straight
Footpath is 5 millimeters of No. four cylinders 11, and the other end is high 7 millimeters, 3 millimeters of diameter No. five cylinders 12, No. three described circles
Cylinder 10, No. four cylinders 11 and No. five cylinders 12 are coaxial and are fixedly installed；
No. two cylinders 8 are threadedly coupled with columnar structured, locking nut 3 simultaneously with No. two cylinders 8 and cylindrical shape knot
Structure is threadedly coupled, and trim ring 4 is connected by the threaded one end with No. two cylinders 8, No. three cylinders 10 is fixedly installed on shrinkage pool 9
In；
No. five cylinders 12 are connected by wire with the output end of the pulse power of the extreme Ultraviolet Lithography Source.
Embodiment two：Present embodiment is to be used for capillary extreme ultraviolet photolithographic to one kind described in embodiment one
The further restriction of the sparking electrode of light source, No. five cylinders 12 are welded with wire.
Claims (2)
1. a kind of sparking electrode for capillary extreme Ultraviolet Lithography Source, it is characterised in that the sparking electrode includes pre-arcing
Electrode (1), main discharge electrode (2), locking nut (3), trim ring (4) and binding post (5)；
Pre-arcing electrode (1) is columnar structured, cylindrical shape high 20 millimeters, that external diameter is 10 millimeters, internal diameter is 5.56 millimeters
It is provided with the inner surface of one end of structure on the screw thread that long 9 millimeters, size is M6 × 0.5, the outer surface at the end and is provided with long 3
Millimeter, size are the screw thread of M10 × 0.75；
One end of main discharge electrode (2) is cone (6), and middle part is a cylinder (7), and the other end is No. two cylinders (8),
Cone (6), a cylinder (7) and No. two cylinders (8) are coaxial and are fixedly installed, a height of 4.3 millimeters of cone (6),
Basal diameter is 5 millimeters, and a height of 12.7 millimeters of a cylinder (7), basal diameter is 5 millimeters, the height of No. two cylinders (8)
Spend for 19.5 millimeters, basal diameter is 6 millimeters, 19.5 millimeters of length is provided with the side of No. two cylinders (8), size is M6
× 0.5 screw thread, is provided with the shrinkage pool (9) that deep 5.5 millimeters, internal diameter is 3 millimeters on a bottom surface of No. two cylinders (8),
The bottom surface is away from a cylinder (7)；
The thickness of locking nut (3) is that long 3 millimeters, size is provided with 5.5 millimeters, the inner surface of its one end for M10 × 0.75
Screw thread, long 2 millimeters M6 screw threads are provided with the inner surface of its other end；
The thickness of trim ring (4) is that the screw thread that long 2 millimeters, size is M6 × 0.5 is provided with 5 millimeters, the inner surface of its one end, its
Deep 2 millimeters, a diameter of 3.2 millimeters of through hole are provided with the other end；
One end of binding post (5) is high 4 millimeters, a diameter of 3 millimeters of No. three cylinders (10), and middle part is high 1.5 millimeters, straight
Footpath is 5 millimeters of No. four cylinders (11), and the other end is high 7 millimeters, 3 millimeters of diameter No. five cylinders (12), described three
Number cylinder (10), No. four cylinders (11) and No. five cylinders (12) are coaxial and be fixedly installed；
No. two cylinders (8) are threadedly coupled with columnar structured, locking nut (3) and meanwhile with No. two cylinders (8) and cylindrical shape
Structure is threadedly coupled, and trim ring (4) is connected by the threaded one end with No. two cylinders (8), sets No. three cylinder (10) fixations
Put in shrinkage pool (9)；
No. five cylinders (12) are connected by wire with the output end of the pulse power of the extreme Ultraviolet Lithography Source.
2. a kind of sparking electrode for capillary extreme Ultraviolet Lithography Source according to claim 1, it is characterised in that five
Number cylinder (12) is welded with wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610378862.7A CN105895497B (en) | 2016-05-31 | 2016-05-31 | A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610378862.7A CN105895497B (en) | 2016-05-31 | 2016-05-31 | A kind of sparking electrode for capillary extreme Ultraviolet Lithography Source |
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| Publication Number | Publication Date |
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| CN105895497A CN105895497A (en) | 2016-08-24 |
| CN105895497B true CN105895497B (en) | 2017-10-03 |
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Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030071571A1 (en) * | 2001-10-15 | 2003-04-17 | Plasmion Corporation | Ultraviolet light source driven by capillary discharge plasma and method for surface treatment using the same |
| CN102496538A (en) * | 2011-11-28 | 2012-06-13 | 哈尔滨工业大学 | Discharge electrode used for capillary extreme ultraviolet photoetching light source |
| CN103560393B (en) * | 2013-11-19 | 2016-03-16 | 哈尔滨工业大学 | The removable sparking electrode applied in capillary discharging soft x-ray laser |
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Effective date of registration: 20210107 Address after: Building 9, accelerator, 14955 Zhongyuan Avenue, Songbei District, Harbin City, Heilongjiang Province Patentee after: INDUSTRIAL TECHNOLOGY Research Institute OF HEILONGJIANG PROVINCE Address before: 150001 No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: HARBIN INSTITUTE OF TECHNOLOGY |
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Effective date of registration: 20230330 Address after: 150027 Room 412, Unit 1, No. 14955, Zhongyuan Avenue, Building 9, Innovation and Entrepreneurship Plaza, Science and Technology Innovation City, Harbin Hi tech Industrial Development Zone, Heilongjiang Province Patentee after: Heilongjiang Industrial Technology Research Institute Asset Management Co.,Ltd. Address before: Building 9, accelerator, 14955 Zhongyuan Avenue, Songbei District, Harbin City, Heilongjiang Province Patentee before: INDUSTRIAL TECHNOLOGY Research Institute OF HEILONGJIANG PROVINCE |
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