CN105866041A - SiC material oxidation state monitoring method and sensor system based on LPFG sensing properties - Google Patents

SiC material oxidation state monitoring method and sensor system based on LPFG sensing properties Download PDF

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CN105866041A
CN105866041A CN201610202297.9A CN201610202297A CN105866041A CN 105866041 A CN105866041 A CN 105866041A CN 201610202297 A CN201610202297 A CN 201610202297A CN 105866041 A CN105866041 A CN 105866041A
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sic material
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CN105866041B (en
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刘宏月
于瀛洁
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University of Shanghai for Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems

Abstract

The present invention discloses a SiC material oxidation state monitoring method and sensor system based on LPFG sensing properties, and belongs to the field of health monitoring of composite structures. The method divides the SiC oxidation state monitoring of a SiC composite material in a service process of into two aspects, namely carbon and oxygen reaction process monitoring in SiC material oxidation and silicone and oxygen reaction process monitoring in SiC material oxidation, respectively monitors the SiC material oxidation process from the two aspects of C and Si, and increases the effective detection accuracy of a SiC composite material oxidative damage monitoring sensor system. The sensing system includes a computer, a spectrometer, a broadband light source, an LPFG silicon carbide material oxidation sensing probe, an optic fiber coupler, a optic fiber connector, an optical switch and an sensing optical fiber. The present invention realizes real-time monitoring of the oxidation state of the SiC matter in SiC composite materials.

Description

The SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system and monitoring method
Technical field
The present invention relates to a kind of SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system and monitoring method.
Background technology
C/SiC composite is using carbon fiber as reinforcing material, using SiC etc. as matrix material, use the composite of the excellent performance that various advanced processing molding method is prepared from, solve the insurmountable technical barrier of homogenous material, it it is one of the most valued current high performance material, have that density is low, specific strength is high, specific modulus is high, designability is good, be prone to the advantages such as shaping, be widely used in the various fields such as Aero-Space, boats and ships, wind-power electricity generation, building, chemical industry.But, such material is manufacturing and during long-term military service, it is possible to create the structural damage of the forms such as internal breakpoints, crackle, delamination, if finding and take corresponding maintenance measure not in time, it will causing the rapid destruction of total, cause a serious accident hidden danger.Oxidative damage is one of composite main damage form, and the study on monitoring of oxidative damage is had positive effect.
The method of lossless detection carbon fiber composite structure breaking state includes X-ray detection X method, supersonic sounding, acoustic emission detection method etc. at present.The advantage of X-ray detection X method is that image judgement relatively more directly perceived, to flaw size and character is easier, but it is low to the detectivity of fine crack, and acquisition cost is higher.Supersonic sounding has the features such as detectable thickness is big, detection sensitivity is high, low cost, but has certain blind area, near field during its detection, and detection test specimen is easily contaminated.Compared with above-mentioned detection method, acoustic emission detection has highly sensitive, inspection area coverage is big, loss is low and can carry out the advantage detected in test specimen runs, therefore, the method is widely used in the damage monitoring of carbon fiber composite structure, is the mainstream technology in composite material health monitoring field present stage or even one period in the future.
Due to optical fiber sensing system there is light weight, volume is little, corrosion-resistant, be prone to long-haul telemetry and realize the advantages such as distributed measurement so that composite material structure health monitoring technology based on Fibre Optical Sensor becomes the new focus that the outer aviation area research persons of Present Domestic pay close attention to.20 century 70s, the C1aus etc. of state university of the Virginia, US Institute of Technology has imbedded enhancing carbon fibre of composite material optical fiber first so that material has sensing and the function of detecting broken damage.Subsequently, Ge Lumen company uses damage and the strain of fiber-optic grating sensor monitoring F-18 wing, and LMT applies optical fiber grating sensing network on the stress and monitoring temperature of X-33 space shuttle, DALTA Health monitoring systems based on fiber Bragg grating sensor network is applied on the all-composite engine case of II rocket.But the most unrealized monitoring to carbon fibre composite etch state of above-mentioned application.
Summary of the invention
In order to solve the problems referred to above, the present invention provides a kind of SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system and monitoring method.
For reaching above-mentioned purpose, the present invention adopts the following technical scheme that
A kind of SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system, including wideband light source, 1 × N-type fiber coupler, the joints of optical fibre, sensor fibre, LPFG silicon carbide species oxidation sensing probe, N × 1 type photoswitch, spectrometer and computer;Described 1 × N-type fiber coupler includes 1 × N-type fiber coupler input and N number of 1 × N-type fiber coupler output, wherein 1 × N-type fiber coupler input is connected with wideband light source, and the input that N number of 1 × N-type fiber coupler output aoxidizes sensing probe from the LPFG silicon carbide species of different detecting locations by the joints of optical fibre respectively with sensor fibre is connected;The output input with N × 1 type photoswitch respectively of N number of LPFG silicon carbide species oxidation sensing probe is connected, the output of N × 1 type photoswitch is connected with spectrometer, described computer is connected with spectrometer, is realized the light path switching of data acquisition and N × 1 type photoswitch by computer.
Described LPFG silicon carbide species oxidation sensing probe includes being located at fibre core sensor fibre within, is located at sensing grid region and being located at LPFG silicon carbide species and aoxidize the SiC material sensitive film on sensing probe top layer fibre core within, utilize the sensing grid region transmission effect to light, the special wavelength light transmitted is dissipated, realizes the monitoring to the SiC material state of oxidation by the reaction that consumes of SiC material sensitive film.
In order to improve the accuracy of detection further, described LPFG silicon carbide species oxidation sensing probe is arranged by being combined into the parallel network of multiple probe distribution with the combination of 1 × N-type fiber coupler and N × 1 type photoswitch.
Above-mentioned sensor-based system, aoxidizes sensing device including LPFG silicon carbide species, all has supporting sensing solutions, and then realize the monitoring to the SiC material state of oxidation inside said apparatus;Use local to glued joint between LPFG silicon carbide species oxidation sensing probe and tested SiC class composite material test piece to couple, to ensure that LPFG sensing probe and SiC class composite are under identical Service Environment;During monitoring, LPFG silicon carbide species oxidation sensing probe is always the arrangement of parallel network, effectively controls sensor network redundancy issue.The composition of distributed SiC material state of oxidation monitoring sensor-based system is: the LPFG silicon carbide species oxidation sensing probe of preparation on difference root optical fiber can be combined into the parallel network arrangement of multiple probe distribution by the combination of 1 × N-type fiber coupler and N × 1 type photoswitch, effectively controls sensor network redundancy issue.
A kind of method monitoring the SiC material state of oxidation, use the above-mentioned SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system, the index parameter monitored as the SiC class composite SiC material state of oxidation using reaction between carbon and oxygen, silica reaction process, the state of oxidation of SiC material is i.e. assessed by the oxidation reaction situation of internal C, Si element of monitoring SiC material, and then the oxide etch state status of release SiC class composite, including following four aspect:
A, reaction between carbon and oxygen are monitored: combine LPFG fiber grating surface prestressing force plated film method for sensing, SiC material sensitive film (12) is plated on applying surface, certain prestressed LPFG grid region, utilize sensitive membrane rigidity parameter change in material transfer process, build prestressing force plated film LPFG reaction between carbon and oxygen monitoring sensing probe, the SiC film quality consumption of i.e. LPFG surface causes prestressing force suffered by LPFG grid region to reduce so that LPFG transmitted spectrum resonance peak wavelength offsets;
B, silica reaction monitoring: combine LPFG fiber grating surface coating method for sensing, SiC material sensitive film (12) is plated on surface, LPFG grid region, utilize sensitive membrane variations in refractive index in material transfer process, build based on plated film LPFG silicon matter oxidation monitoring sensing probe, i.e. in the SiC film of LPFG surface, the oxide etch of Si element causes SiC sensitive membrane refractive index around LPFG grid region to change;
C, SiC material oxidation monitoring: combine reaction between carbon and oxygen and the monitoring the process of silica reaction, is assessed the state of oxidation of SiC material, and then obtains the oxide etch state status of SiC class composite by the oxidation reaction situation of internal C, Si element of monitoring SiC material;
D, due to for monitor reaction between carbon and oxygen identical with the LPFG sensing probe preparation method of silica reaction process, and the LPFG characteristic parameter of sensing detection is different, therefore, monitor while realizing reaction between carbon and oxygen and silica are reacted with LPFG silicon carbide species oxidation sensing probe (5), the resonance peak wavelength of i.e. LPFG transmitted spectrum corresponds to reaction between carbon and oxygen process, and the resonance peak amplitude of LPFG transmitted spectrum corresponds to silica reaction process.
Aoxidize as the first monitoring index using the C element in SiC material, the situation of change of self C element of SiC material is monitored;It is monitored using the Si element oxide in SiC material as the second monitoring index, Si element variation situation internal to SiC material.
All use local to glued joint between described LPFG silicon carbide species oxidation sensing probe and SiC class composite to be measured to couple, it is ensured that it is under identical Service Environment with SiC class composite.
Compared with prior art, the invention has the beneficial effects as follows:
SiC material state of oxidation sensor monitoring is divided into two aspects, that is: using reaction between carbon and oxygen, silica reaction process as parameter to be measured, the Expenditure Levels of C element in oxidizing process and the response situation of Si element are monitored, have expanded the comprehensive of SiC material state of oxidation sensor monitoring;Utilize LPFG that axial strain change and surface refractive index are changed resolution ratio is high, response is fast, high flux, sensitivity, special, easy, to advantages such as the own not damageds of sample, realize the monitoring of the SiC material state of oxidation, determine the internal oxidation faulted condition of SiC class composite material element, can be applicable to the SiC class composite oxidative damage status monitoring in the field such as aviation, naval vessel;Simultaneously because have employed optical fiber as sensing matrix, have again that anti-electromagnetic interference capability is strong, high pressure resistant, corrosion-resistant, can realize the advantage such as distributed measurement and long-haul telemetry monitoring;By simplifying sensor-based system structure and using spectrum detection technique, certainty of measurement can be improved, overcome luminous intensity measurement easily by the shortcoming of light source de-stabilising effect;By using corresponding encapsulation and protected mode, impact LPFG sensor-based system brought due to the extraneous factor such as temperature, humidity can be avoided, it is ensured that the reliability of state of oxidation monitoring and durability.
Accompanying drawing explanation
Fig. 1 is SiC material state of oxidation sensing and monitoring system schematic diagram.
Fig. 2 is 1 × N-type fiber coupler schematic diagram.
Fig. 3 is that LPFG silicon carbide species aoxidizes sensing probe schematic diagram.
Fig. 4 is N × 1 type photoswitch schematic diagram.
Fig. 5 is that a kind of SiC material state of oxidation based on LPFG sensing characteristics monitors system schematic.
Detailed description of the invention
Below in conjunction with the accompanying drawings embodiments of the invention are further described.
As Figure 1-5, a kind of SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system, including wideband light source 1,1 × N-type fiber coupler 2, the joints of optical fibre 3, sensor fibre 4, LPFG silicon carbide species oxidation sensing probe 5, N × 1 type photoswitch 6, spectrometer 7 and computer 8;Described 1 × N-type fiber coupler 2 includes 1 × N-type fiber coupler input 9 and N number of 1 × N-type fiber coupler output 10, wherein 1 × N-type fiber coupler input 9 is connected with wideband light source 1, and the input that N number of 1 × N-type fiber coupler output 10 aoxidizes sensing probe 5 from the LPFG silicon carbide species of different detecting locations by the joints of optical fibre 3 respectively with sensor fibre 4 is connected;The output input 14 with N × 1 type photoswitch 6 respectively of N number of LPFG silicon carbide species oxidation sensing probe 5 is connected, the output 15 of N × 1 type photoswitch 6 is connected with spectrometer 7, described computer 8 is connected with spectrometer 7, is realized the light path switching of data acquisition and N × 1 type photoswitch 6 by computer 8.
As shown in Figure 2, wideband light source 1 sends broadband light, enter 1 × N-type fiber coupler input 9, wherein light intensity is divided into N decile in equal size, travel to N number of 1 × N-type fiber coupler output 10 respectively, again by the joints of optical fibre 3, LPFG silicon carbide species oxidation sensing probe 5 is traveled to through sensor fibre 4, interact with the state of oxidation of sensing probe surface-sensitive film to be measured and produce coupling effect, in LPFG silicon carbide species oxidation sensing probe 5, transmitted spectrum after the effect of grid region enters spectroanalysis instrument 7 by N × 1 type photoswitch output 15, output transmitted spectrum resonance peak wavelength is processed again through computer 8, relation curve between resonance peak amplitude and variable parameter, it is achieved thereby that the all-fiber of whole optical path part.
According to LPFG spectral outputs characteristics, build LPFG silicon carbide species oxidation sensing probe 5 parallel network by introducing 1 × N-type fiber coupler 2, N × 1 type photoswitch 6, SiC class composite material test piece can be realized the SiC material state of oxidation based on the LPFG sensing characteristics monitoring system of many sites detection.When multiple LPFG silicon carbide species oxidation sensing probe 5 is in different test position, the material oxidation distribution situation of different positions to be measured interacts with sensor, thus causes each LPFG sensor transmitted spectrum resonance peak wavelength and change of amplitude.By sensor being exported different transmitted spectrum resonance peak wavelength and the detection of amplitude of LPFG spectrum, the signal of available Distributed Detection.
Fig. 3 is that LPFG silicon carbide species aoxidizes sensing probe 5 schematic diagram, described LPFG silicon carbide species oxidation sensing probe 5 includes being located at fibre core sensor fibre 4 within, is located at sensing grid region 11 and being located at LPFG silicon carbide species and aoxidize the SiC material sensitive film 12 on sensing probe 5 top layer sensor fibre 4 fibre core within, utilize the transmission effect to light of the LPFG sensitivity grid region, the special wavelength light transmitted is dissipated, realizes the monitoring to the SiC material state of oxidation by the reaction that consumes of SiC material sensitive film 12.
In conjunction with fiber grating surface prestressing force plated film method for sensing, SiC sensitive membrane is plated on certain prestressed LPFG (LPFG) surface, grid region of applying, build prestressing force plated film LPFG silicon carbide species state of oxidation monitoring sensing probe, the SiC film oxidation of i.e. LPFG surface causes axial prestress suffered by LPFG grid region to reduce and LPFG grid region ambient refractive index changes, the reduction of axial prestress causes LPFG transmitted spectrum resonance peak wavelength generation blue shift, and the change of surface refractive index can cause LPFG transmitted spectrum resonance peak amplitude to offset.
Fig. 5 is that the distributed SiC material state of oxidation monitors sensor-based system schematic diagram.Its particular make-up is by 1 × N-type fiber coupler 2 and N × 1 type photoswitch 6, by parallel for multiple LPFG silicon carbide species oxidation sensing probe 5.
A kind of method monitoring the SiC material state of oxidation, utilize the above-mentioned SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system, the index parameter monitored as the SiC class composite SiC material state of oxidation using reaction between carbon and oxygen, silica reaction process, the state of oxidation of SiC material is i.e. assessed by the oxidation reaction situation of internal C, Si element of monitoring SiC material, and then the oxide etch state status of release SiC class composite, including following four aspect:
A, reaction between carbon and oxygen are monitored: combine LPFG fiber grating surface prestressing force plated film method for sensing, SiC material sensitive film is plated on applying surface, certain prestressed LPFG grid region, utilize sensitive membrane rigidity parameter change in material transfer process, build prestressing force plated film LPFG reaction between carbon and oxygen monitoring sensing probe, the SiC film quality consumption of i.e. LPFG surface causes prestressing force suffered by LPFG grid region to reduce so that LPFG transmitted spectrum resonance peak wavelength offsets;
B, silica reaction monitoring: combine LPFG fiber grating surface coating method for sensing, SiC material sensitive film is plated on surface, LPFG grid region, utilize sensitive membrane variations in refractive index in material transfer process, build based on plated film LPFG silicon matter oxidation monitoring sensing probe, i.e. in the SiC film of LPFG surface, the oxide etch of Si element causes SiC sensitive membrane refractive index around LPFG grid region to change;
C, SiC material oxidation monitoring: combine reaction between carbon and oxygen and the monitoring the process of silica reaction, assesses the state of oxidation of SiC material, and then the oxide etch state status to SiC class composite by the oxidation reaction situation of internal C, Si element of monitoring SiC material;
D, due to for monitor reaction between carbon and oxygen identical with the LPFG sensing probe preparation method of silica reaction process, and the LPFG characteristic parameter of sensing detection is different, therefore, monitor while realizing reaction between carbon and oxygen and silica are reacted with LPFG silicon carbide species oxidation sensing probe (5), the resonance peak wavelength of i.e. LPFG transmitted spectrum corresponds to reaction between carbon and oxygen process, and the resonance peak amplitude of LPFG transmitted spectrum corresponds to silica reaction process.
Above-mentioned monitoring method utilizes LPFG transmission spectrum method to be monitored;In SiC class composite material structural member to be monitored and the abbreviation of LPFG(LPFG) silicon carbide species oxidation sensing probe between use locally coupled;During monitoring, LPFG sensing probe realizes distributed network by N × 1 type photoswitch and arranges.
In above-mentioned steps A, utilize the LPFG sensing grid region sensitive natur to SiC film surface strain variations, by the LPFG transmitted spectrum resonance peak wavelength change caused due to the prestressed release of LPFG during measuring reaction between carbon and oxygen, detect the material oxidization condition of SiC material sensitive film.
In above-mentioned steps B, utilize the sensitive natur that SiC film surface refractive index is changed by LPFG sensing grid region, change by measuring the LPFG transmitted spectrum resonance peak amplitude caused due to the change of LPFG grid region surface refractive index in silica course of reaction, detect the material oxidization condition of SiC material sensitive film.
The sensitive natur of LPFG prestressing force release after utilizing LPFG sensing grid region that sensitive membrane is corroded, by measurement of species corrosion process causes the situation of change of LPFG transmitted spectrum resonance peak wavelength due to the internal reaction between carbon and oxygen of SiC material, and then obtain the SiC material state of oxidation.
Above-mentioned monitoring method, the monitoring parameter of first aspect is the reaction between carbon and oxygen characterizing the oxidation of SiC material.Utilize reaction between carbon and oxygen as characterization parameter, LPFG spectral characteristic is combined with surface prestressing force plated film method for sensing, it is achieved real-time, the on-line monitoring of reaction between carbon and oxygen internal to SiC material.
Above-mentioned monitoring method, the monitoring parameter of second aspect is the silica reaction characterizing the oxidation of SiC material.Utilize silica to react as characterization parameter, LPFG spectral characteristic is combined with surface coating method for sensing, by SiO2The detection of product, it is achieved real-time, the on-line monitoring of silica reaction internal to SiC material.
Above-mentioned monitoring method, for the accuracy monitored and convenience, as a reference point with SiC material consumption amount in SiC class composite, the response situation of C, Si element during oxidative damage is monitored.
When the internal reaction between carbon and oxygen of SiC material occurs, due to SiC sensitive thin film and the O on LPFG silicon carbide species oxidation sensing probe surface2Reaction generates CO, CO2, occurring that pitting corrosion occurs in SiC sensitive thin film consumption so that the rigidity of SiC sensitive thin film reduces, and then cause the release of LPFG axial prestress, LPFG transmitted spectrum resonance peak wavelength reduces.
When the internal silica reaction of SiC material occurs, due to SiC sensitive thin film and the O on LPFG silicon carbide species oxidation sensing probe surface2Reaction generates SiO2So that the refractive index of SiC sensitive thin film changes, and then affects LPFG transmitted spectrum resonance peak amplitude and change.
Above-mentioned monitoring method, in order to improve the accuracy of monitoring, reacts from reaction between carbon and oxygen and silica respectively in oxidizing process and is analyzed LPFG silicon carbide species oxidation sensing probe, and uses between probe and SiC class composite to be measured that stent-type local is the most cementing to be coupled.

Claims (6)

1. the SiC material state of oxidation based on a LPFG sensing characteristics monitoring sensor-based system, it is characterized in that: include wideband light source (1), 1 × N-type fiber coupler (2), the joints of optical fibre (3), sensor fibre (4), LPFG silicon carbide species oxidation sensing probe (5), N × 1 type photoswitch (6), spectrometer (7) and computer (8);Described 1 × N-type fiber coupler (2) includes 1 × N-type fiber coupler input (9) and N number of 1 × N-type fiber coupler output (10), wherein 1 × N-type fiber coupler input (9) is connected with wideband light source (1), and the input that N number of 1 × N-type fiber coupler output (10) aoxidizes sensing probe (5) from the LPFG silicon carbide species of different detecting locations by the joints of optical fibre (3) respectively with sensor fibre (4) is connected;The output of N number of LPFG silicon carbide species oxidation sensing probe (5) is connected with the input (14) of N × 1 type photoswitch (6) respectively, the output (15) of N × 1 type photoswitch (6) is connected with spectrometer (7), described computer (8) is connected with spectrometer (7), is realized the light path switching of data acquisition and N × 1 type photoswitch (6) by computer (8).
The SiC material state of oxidation based on LPFG sensing characteristics the most according to claim 1 monitoring sensor-based system, it is characterized in that: described LPFG silicon carbide species oxidation sensing probe (5) includes being located at the fibre core (13) that sensor fibre (4) is internal, it is located at the internal sensing grid region (11) of fibre core (13) and is located at SiC material sensitive film (12) on LPFG silicon carbide species oxidation sensing probe (5) top layer, utilize sensing grid region (11) the transmission effect to light, the special wavelength light transmitted is dissipated, the monitoring to the SiC material state of oxidation is realized by the reaction that consumes of SiC material sensitive film (12).
The SiC material state of oxidation based on LPFG sensing characteristics the most according to claim 1 monitoring sensor-based system, it is characterised in that: described LPFG silicon carbide species oxidation sensing probe (5) is arranged by being combined into the parallel network of multiple probe distribution with the combination of 1 × N-type fiber coupler (2) and N × 1 type photoswitch (6).
4. the method monitoring the SiC material state of oxidation, utilize the SiC material state of oxidation based on LPFG sensing characteristics monitoring sensor-based system as claimed in claim 1, the index parameter monitored as the SiC class composite SiC material state of oxidation using reaction between carbon and oxygen, silica reaction process, the state of oxidation of SiC material is i.e. assessed by the oxidation reaction situation of internal C, Si element of monitoring SiC material, and then release the oxide etch state status of SiC class composite, it is characterised in that: include following four aspect:
A, reaction between carbon and oxygen are monitored: combine LPFG fiber grating surface prestressing force plated film method for sensing, SiC material sensitive film (12) is plated on applying surface, certain prestressed LPFG grid region, utilize sensitive membrane rigidity parameter change in material transfer process, build prestressing force plated film LPFG reaction between carbon and oxygen monitoring sensing probe, the SiC film quality consumption of i.e. LPFG surface causes prestressing force suffered by LPFG grid region to reduce so that LPFG transmitted spectrum resonance peak wavelength offsets;
B, silica reaction monitoring: combine LPFG fiber grating surface coating method for sensing, SiC material sensitive film (12) is plated on surface, LPFG grid region, utilize sensitive membrane variations in refractive index in material transfer process, build based on plated film LPFG silicon matter oxidation monitoring sensing probe, i.e. in the SiC film of LPFG surface, the oxide etch of Si element causes SiC sensitive membrane refractive index around LPFG grid region to change;
C, SiC material oxidation monitoring: combine reaction between carbon and oxygen and the monitoring the process of silica reaction, assesses the state of oxidation of SiC material, and then the oxide etch state status to SiC class composite by the oxidation reaction situation of internal C, Si element of monitoring SiC material;
D, due to for monitor reaction between carbon and oxygen identical with the LPFG sensing probe preparation method of silica reaction process, and the LPFG characteristic parameter of sensing detection is different, therefore, monitor while realizing reaction between carbon and oxygen and silica are reacted with LPFG silicon carbide species oxidation sensing probe (5), the resonance peak wavelength of i.e. LPFG transmitted spectrum corresponds to reaction between carbon and oxygen process, and the resonance peak amplitude of LPFG transmitted spectrum corresponds to silica reaction process.
The method of the monitoring SiC material state of oxidation the most according to claim 4, it is characterised in that: aoxidize as the first monitoring index using the C element in SiC material, the situation of change of self C element of SiC material is monitored;It is monitored using the Si element oxide in SiC material as the second monitoring index, Si element variation situation internal to SiC material.
The method of the monitoring SiC material state of oxidation the most according to claim 4, it is characterized in that: all use local to glued joint between described LPFG silicon carbide species oxidation sensing probe (5) and SiC class composite to be measured and couple, it is ensured that it is under identical Service Environment with SiC class composite.
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CN107966415A (en) * 2017-11-20 2018-04-27 哈尔滨工业大学 The contactless online test method and device of SiC oxidation reactions
CN110146550A (en) * 2019-06-13 2019-08-20 南京航空航天大学 Composite material high-temperature component degree of oxidation monitoring method based on electrical impedance imaging

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