CN105859153B - A kind of antifog antireflective visible light bifunctional coated glass and preparation method thereof - Google Patents
A kind of antifog antireflective visible light bifunctional coated glass and preparation method thereof Download PDFInfo
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- CN105859153B CN105859153B CN201610204610.2A CN201610204610A CN105859153B CN 105859153 B CN105859153 B CN 105859153B CN 201610204610 A CN201610204610 A CN 201610204610A CN 105859153 B CN105859153 B CN 105859153B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
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Abstract
A kind of antifog and antireflective visible light bifunctional coated glass of the invention and preparation method thereof, take magnetron sputtering method plated film, it is characterised in that the film layer structure of the coated glass is arranged in order are as follows: hydrophilic membrane/separation layer/glass/separation layer/antireflective visible light film layer.For the bifunctional coated glass in 380nm to 780nm spectral wavelength ranges, transmissivity improves 1.5~3.5% than the transmissivity of non-coated glass original piece；Film layer pencil hardness 6.50H~7.5H；1.0~4.5 ° of the hydrophilic layer angle of wetting of coated glass.Obtained coated glass can be used for the fields such as electronic display panel, packaged glass cover board, show window, frame, locomotive and steamer glass pane.
Description
Technical field
The invention belongs to display device, instrument encapsulation, protection glass cover-plate, show window and locomotives and steamer glass pane etc.
Use the field of glass, and in particular to a kind of antifog antireflective visible light bifunctional coated glass and preparation method thereof.
Background technique
When humid air is cooled to certain temperature, a part of steam will condense out in air, become very much
Small water droplet is suspended in subaerial air layer, is formed mist.If these humid air cold receptions are to the lower glass of temperature
Glass and glass surface have unholiness object (such as: small greasy dirt, bacterium) again, will be easier fogging on glass.The form of fogging
Glass can generate diffusing reflection, rainbow occur, image diffusion is caused to be distorted.
The neck of form is used glass as in electron display device encapsulation, protection glass cover-plate, show window, fitting glass cover etc.
Domain be easy to cause glass surface fogging due to some special ambient humidities, internal-external temperature difference, keeps image diffusion unclear, causes to see
The eye fatigue for the person of examining；To the protection glass on some large scale public display parts, since uneven fogging causes glass office
Portion is mouldy, makes to show that image permanently obscures.Glass fogging also cause glass generate it is colorful bright-colored, influence normal vision, cause dizzy
Light.In order to reduce influence of the mist to image, vision and eyes, it is necessary to carry out appropriate working process to glass surface, make aqueous vapor
Cannot on glass mist formation.
For sight glass itself there are 8% reflected light, reflection of the external environment light source on sight glass generates dazzle, makes
The vision of people generates fatigue.In order to overcome dazzle, mitigate visual fatigue, it is necessary to which the reflected light for reducing glass itself reaches energy
Enough clearly observation display contents.
The method for preventing glass fogging at present has:
First is that glass surface hydrophilic method.By being coated with titanium dioxide film on the glass surface, urged using the light of titanium dioxide
Change performance, so that steam is not formed small water droplet, uniformly sprawled in glass surface, reaching does not influence observation display image.For example, adopting
Taking the patent of wet-chemical coating has: applying for a patent a kind of CN102975434A (antifogging self-cleaning glass) coating organic and inorganic mixing
Object and titanium dioxide and silica mixture, organic coating heat treatment method；It is (a kind of to apply for a patent CN103964704A
Hydrophilic antifogging coating fluid, hydrophilic antifogging coating production and antifog glass), to apply for a patent CN104086093A (a kind of antifog
Coating and preparation method thereof and antifog glass), apply for a patent CN1478746 (nanometer non-stoichiometric TiO2- SiO2Self-cleaning antifog glass
The preparation method of glass film), after taking colloidal sol to coat, heat treatment preparation nanometer non-stoichiometric TiO2- SiO2Self-cleaning hydrophilic antifogging glass
Glass film；Granted patent CN1317215C (manufacturing method of self-cleaning antifog glass), with metatitanic acid fourth rouge, dehydrated alcohol and three ethyl alcohol
Amine is colloidal sol making material, and is made by several processes such as colloidal sol preparation, sheet glass pretreatment, dried coating film, calcinings self-cleaning
Net antifog glass applies for a patent CN103570248A (antireflective antifog glass and preparation method thereof), on the surface of sheet glass, acid
The porous structure layer of one layer of internal stretch from the surface of sheet glass to sheet glass is etched, titanium dioxide is coated with, reaches parent
Water is antifog, granted patent CN102649623B (antireflective superhydrophilic self-cleaning antifog glass and preparation method thereof), using alkalinity
Aqueous solution performs etching sheet glass, is formed on the surface of glass and is mutually handed over a thickness of 10~30 nanometers of silica nanometer piece
Fork connection formed with a thickness of 50~160 nanometers of rough coatings, then dip-coating titanium dioxide；Apply for a patent CN1840497 (one
Kind self-cleaning nano glass and production technology), glass surface is handled using acid etching micropore or using laser boring, is formed densely covered
The micropore of nanometer, then plate one layer of nanoscale SiO2/TiO2Sol pellicle/plates one layer of nanometer titanium film/or nano silver in glass surface
Film, 400 DEG C~700 DEG C of heat treatment temperature.Physical sputtering coating process has, and (one kind has visible granted patent CN100551858
Permanent self-cleaning glass of photoresponse and preparation method thereof), glass surface sputtering sedimentation silica membrane, then in nanometer two
One layer of Ti is sputtered on silicon oxide film surface1-xW1-xO0.5N0.5Titanium deoxid film plates the glass of film at 500~600 DEG C
It anneals, natural cooling is in sintering furnace up to glass with clean.
Second is that taking surfactant-coated glass surface, reach hydrophilic not fogging purpose.Such as: it applies for a patent
CN103194103A, CN103194102A, CN103194102A and CN102941795A (automobile wind shield glass) are with silicone oil and alcohol
Isoreactivity agent coating glass reaches the antifog purpose of glass；Apply for a patent a kind of CN103482882A (water imbibition antifog glass preparation
Method), the resin and cross-linkable solidifying of the group containing water suction are added in surfactant and nanometer titanium dioxide siloxane solvent mixed solution
Resin agitating is uniformly coated on glass；A kind of granted patent: CN103043919B (preparation of waterproof antifogging surface modified glass
Method), the photo-curing monomer containing specific functional groups, glass surface after modification is handled by UV photocuring, is modified
Waterproof antifog glass.
Third is that the mode for taking glass surface to heat, does not generate the temperature difference with humid air, achievees the purpose that moisture not fogging.Example
Such as: granted patent CN202368302U (automotive anti-mist glass) is coated with layer of transparent conductive film on vehicle glass (1), transparent to lead
Electrolemma fever, glass will not generate fogging.
Fourth is that be coated with the hydrophobic membrane of low-surface-energy on the glass surface, it is agglomerated to fine mist by self gravity from glass
Glass surface slides, and achievees the purpose that glass surface not fogging.
In terms of the anti-fogging method, glass surface is taken to be coated with the technique of the hydrophilic method of titanium oxide (method one) at present
Medium and high temperature heat treatment film layer is required, and titanium oxide layer causes glass-reflected light to increase, and generates slight light pollution；Glass
Surface normal temperature cure active agent coating technique (method two), the durability of film layer be not lasting；Glass surface heating, eliminate air with
The electrified regulation method of the glass temperature difference is easy electric leakage；Glass surface coats the hydrophobic film method of low-surface-energy (method four), equally deposits
In film layer endurance issues.
It is theoretical according to solid-state physics and Film Optics, the method for reducing glass-reflected light, be exactly plate on the glass surface it is low
In glass refraction deielectric-coating or high and low refractive index composite dielectric film (such as: glass/high refractive index/low-refraction/height folding
The rate of penetrating/low-refraction, repetition are coated with), glass-reflected light is reduced using principle of interference, reaches the mesh of clear observation display content
's；Or etching glass Surface Creation pore structure is taken to reduce refractive index.For example, wet chemical method has: applying for a patent
201110363911.7 (preparation methods of anti reflection glass), 201210331777.7 (acid corrosion prepares the side of anti reflection glass
Method), 201210331809.3 (anti reflection glass and secondary caustic corrosion prepare anti reflection glass) all take the method for corrosion in glass
Glass surface forms pore structure, reaches reduction refractive index, reduces glass-reflected light；Apply for a patent a kind of 201310057774.3 (bands
Have double flannelette glass of antireflective coating) use sol coating method plated film.Physical method has: applying for a patent 201410816930.4 and (subtracts
Reflecting glass and preparation method thereof；) on glass with sputtering method deposit SiO2、Nb2O5Or Si3N4Do membrane system；It applies for a patent
201510083980.0 (antireflective coating preparation method and anti reflection glass) uses SiO2, SiN or Si3N4Do membrane system；It applies for a patent
201410087985.6 (multilayer film anti reflection glass and preparation method thereof) distinguishes reactive sputter-deposition with sputtering method on glass
TiOx, AlSiOx film layer；Online gas phase process: a kind of 201310257406.3 (online platings of five tunics architecture are applied for a patent
Film anti reflection glass and its processing method) use tin oxide, silica and fluorine-doped tin oxide to form membrane system.
Currently, the method for plated film mainly has sputtering method, vapour deposition method, wet chemistry method on glass, wherein mature magnetic control splashes
Shooting method plated film has the characteristics that film uniformity is good, thicknesses of layers is easy to control, film layer and glass are combined, is producing
The field of coated glass is widely applied.
Summary of the invention
Technical problem: the purpose of the present invention is to provide a kind of antifog and antireflective visible light bifunctional coated glass and its
Preparation method.This invention takes magnetron sputtering methods on glass plated film, utilizes the interference of film layer to reduce glass-reflected light, utilize
It is hydrophilic that improved titanium oxide layer reaches glass.The two glass surface formed uniformly, be firmly combined with glass, hardness and wear-resisting
Property reach real requirement, have antifog and antireflective visible light bifunctional coated glass.
Technical solution: a kind of antifog and antireflective visible light bifunctional coated glass film layer structure of the invention is in order
Arrangement are as follows: hydrophilic membrane/separation layer/glass/separation layer/antireflective visible light film layer；Wherein, hydrophilic membrane ZnO-TiO2
Film；Separation layer refers to silicon dioxide film；Antireflective visible light film layer structure are as follows: high refractive index film/silicon dioxide film A/ silicon oxynitride
Film/silicon dioxide film B；High refractive index film refers to titanium dioxide, niobium oxide, zirconium oxide, tin oxide or zinc oxide deielectric-coating.
5~the 20nm of isolation layer film thickness；Hydrophilic membrane ZnO-TiO275~160nm of thicknesses of layers.High refractive index
15~60nm of thicknesses of layers；1 15~40nm of thicknesses of layers of silicon dioxide film；75~150nm of silicon oxynitride film thickness；Titanium dioxide
2 60~110nm of thicknesses of layers of silicon fiml.
Antifog and antireflective visible light bifunctional coated glass of the invention the preparation method is as follows:
1) magnetically controlled sputter method plated film on glass is used；
A. glass cleaning: cleaning glass using deionized water, dry, obtains cleaned glass；
B. under normal pressure nitrogen atmosphere, cleaned glass surface is handled with plasma bombardment；
C. separation layer, ZnO-TiO are successively coated with magnetron sputtering method in the one side of glass2Film layer；
D. separation layer i.e. silicon dioxide film, high refractive index are successively coated with magnetron sputtering method in the uncoated another side of glass
Deielectric-coating, silica, silicon oxynitride, silicon dioxide layer；
It is described to deposit silicon dioxide film with reactive magnetron sputtering method；Oxygen and argon flow ratio 5%~35% sputter gas
Pressure 2.5~4.0 × 10-1Pa is target, 5~20nm of silica coating thickness of deposition with pure silicon or sial or silicon boron；Plating
120 DEG C~260 DEG C of film cabinet space temperature.
The magnetron sputtering method interaction sputtering sedimentation ZnO-TiO2Film layer, argon gas are worked gas, and sputtering pressure 2.5~
4.0×10-1Pa, with zinc oxide, titanium oxide does target.
It is described to use magnetron sputtering method deposit high refractive index media coating, sputtering pressure 2.5~4.0 × 10-1Pa uses titanium dioxide
Titanium, niobium oxide, zirconium oxide, tin oxide or zinc oxide do target；
The reactive magnetron sputtering method deposits nitrogen-oxygen-silicon film layer, does sputtering coating target with pure silicon or sial or silicon boron,
It is worked gas with argon gas, nitrogen, oxygen and argon flow ratio 5~10%, 5~15%, 75~90%, sputtering pressure 2.5
~4.0 × 10-1Pa。
The cleaned glass obtained after the plated film front glass cleaning, drying need to be in normal pressure nitrogen atmosphere, with 500~1000V
The corona treatment cleaned glass surface that voltage is formed.
For the described bifunctional coated glass in 380nm to 780nm spectral wavelength ranges, transmissivity is more former than non-coated glass
The transmissivity of piece improves 1.5~3.5%；Film layer pencil hardness 6.50H~7.5H；The hydrophilic layer angle of wetting 1.0 of coated glass~
4.5°。
The utility model has the advantages that antifog and antireflective visible light bifunctional coated glass and preparation method thereof of the invention, first is
Preparation process is simple, method is mature；Second is that preparation process is pollution-free；The coated glass that third is has antifog and reduction can
Light-exposed reflectivity is difunctional.The coated glass of the invention can be used for electronical display glass panel, packaged glass cover board, show window and picture
Frame, locomotive and steamer glass pane etc. are using the field of glass, and making glass, fogging, the image observed by the sight glass be not more
Clearly, the fatigue of human eye is reduced.
Specific embodiment
1) film layer structure: hydrophilic membrane/separation layer/glass/separation layer/antireflective visible light film layer,
Wherein, separation layer refers to silicon dioxide film；
Hydrophilic membrane: ZnO-TiO2Film.
Antireflection film layer structure: high refractive index film/silica/silicon oxynitride film/silicon dioxide film.High refractive index layer
Refer to titanium dioxide or niobium oxide or zirconium oxide or tin oxide or zinc oxide deielectric-coating；
2) bifunctional coated glass preparation method
Mature magnetically controlled sputter method plated film on glass is taken, preparation flow is as follows:
A) glass cleaning: taking deionized water to clean glass, dry, obtains cleaned glass；
B) under normal pressure nitrogen atmosphere, cleaned glass surface is handled with plasma bombardment；
C) separation layer (silicon dioxide film), ZnO-TiO are successively coated with magnetron sputtering method in the one side of glass2Film layer；
D) separation layer (silicon dioxide film), high refractive index are successively coated with magnetron sputtering method in the uncoated another side of glass
Deielectric-coating, silica, silicon oxynitride, silicon dioxide layer.
3) effect
In 380nm to 780nm spectral wavelength ranges, the transmissivity of the bifunctional coated glass is than non-coated glass original piece
Transmissivity improve 1.5~3.5%；Film layer pencil hardness 6.50H~7.5H；The hydrophilic layer angle of wetting 1.0 of coated glass~
4.5°。
The purpose of the present invention is to provide a kind of antifog and antireflective visible light bifunctional coated glass and its preparations
Method, obtained coated glass can be used for electronic display panel, packaged glass cover board, show window, frame, locomotive and wheel portlight
The fields such as glass.
Embodiment 1:
One, in the one side of glass successively plated film
1, it is coated with separation layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa is used
Pure silicon or sial or silicon boron are target, the membranous layer of silicon oxide thickness 5nm of deposition.
2, it is coated with hydrophilic membrane: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa,
With zinc oxide, titanium oxide is target, interaction sputtering sedimentation ZnO-TiO2Film, thicknesses of layers 75nm.
Two, in another uncoated glass surface successively plated film
3, it is coated with separation layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa is used
Pure silicon or sial or silicon boron are target, the membranous layer of silicon oxide thickness 10nm of deposition；
4, it is coated with high refractive index medium film layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5
×10-1Pa does target with titanium dioxide or niobium oxide or zirconium oxide or tin oxide or zinc oxide, sputtering sedimentation deielectric-coating,
Depositional coating thickness 15nm；
5, it is coated with 1 film layer of silicon dioxide film: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 ×
10-1Pa is target, the membranous layer of silicon oxide thickness 15nm of deposition with pure silicon or sial or silicon boron；
6, it is coated with silicon oxynitride film: in vacuum chamber, nitrogen, oxygen and argon flow ratio 10%, 15%, 75%,
Sputtering pressure 2.5 × 10-1Pa is target, the silicon oxynitride film thickness 95nm of deposition with pure silicon or sial or silicon boron；
7, it is coated with 2 film layer of silicon dioxide film: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 ×
10-1Pa is target, the membranous layer of silicon oxide thickness 60nm of deposition with pure silicon or sial or silicon boron.
Obtained antifog and antireflective visible light bifunctional coated glass, should in 380nm to 780nm spectral wavelength ranges
The transmissivity of bifunctional coated glass improves 1.5% than the transmissivity of non-coated glass original piece；Film layer pencil hardness 6.5H；Plated film
4.5 ° of the hydrophilic layer angle of wetting of glass.
Embodiment 2
One, in the one side of glass successively plated film
1, it is coated with separation layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa is used
Pure silicon or sial or silicon boron are target, the membranous layer of silicon oxide thickness 15nm of deposition.
2, it is coated with hydrophilic membrane: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa,
With zinc oxide, titanium oxide is target, interaction sputtering sedimentation ZnO-TiO2Film, thicknesses of layers 110nm.
Two, in another uncoated glass surface successively plated film
3, it is coated with separation layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa is used
Pure silicon or sial or silicon boron are target, the membranous layer of silicon oxide thickness 15nm of deposition；
4, it is coated with high refractive index medium film layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5
×10-1Pa does target with titanium dioxide or niobium oxide or zirconium oxide or tin oxide or zinc oxide, sputtering sedimentation deielectric-coating,
Depositional coating thickness 35nm；
5, it is coated with 1 film layer of silicon dioxide film: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 ×
10-1Pa is target, the membranous layer of silicon oxide thickness 32nm of deposition with pure silicon or sial or silicon boron；
6, it is coated with silicon oxynitride film: in vacuum chamber, nitrogen, oxygen and argon flow ratio 10%, 15%, 75%,
Sputtering pressure 2.5 × 10-1Pa is target, the silicon oxynitride film thickness 115nm of deposition with pure silicon or sial or silicon boron；
7, it is coated with 2 film layer of silicon dioxide film: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 ×
10-1Pa is target, the membranous layer of silicon oxide thickness 90nm of deposition with pure silicon or sial or silicon boron.
Obtained antifog and antireflective visible light bifunctional coated glass, should in 380nm to 780nm spectral wavelength ranges
The transmissivity of bifunctional coated glass improves 2.7% than the transmissivity of non-coated glass original piece；Film layer pencil hardness 7.5H；Plated film
3.0 ° of the hydrophilic layer angle of wetting of glass.
Embodiment 3
One, in the one side of glass successively plated film
1, it is coated with separation layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa is used
Pure silicon or sial or silicon boron are target, the membranous layer of silicon oxide thickness 15nm of deposition.
2, it is coated with hydrophilic membrane: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa,
With zinc oxide, titanium oxide is target, the ZnO-TiO of interaction sputtering sedimentation2Film, thicknesses of layers 140nm.
Two, in another uncoated glass surface successively plated film
3, it is coated with separation layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 × 10-1Pa is used
Pure silicon or sial or silicon boron are target, the membranous layer of silicon oxide thickness 20nm of deposition；
4, it is coated with high refractive index medium film layer: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5
×10-1Pa does target with titanium dioxide or niobium oxide or zirconium oxide or tin oxide or zinc oxide, sputtering sedimentation deielectric-coating,
Depositional coating thickness 55nm；
5, it is coated with 1 film layer of silicon dioxide film: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 ×
10-1Pa is target, the membranous layer of silicon oxide thickness 32nm of deposition with pure silicon or sial or silicon boron；
6, it is coated with silicon oxynitride film: in vacuum chamber, nitrogen, oxygen and argon flow ratio 10%, 15%, 75%,
Sputtering pressure 2.5 × 10-1Pa is target, the silicon oxynitride film thickness 150nm of deposition with pure silicon or sial or silicon boron；
7, it is coated with 2 film layer of silicon dioxide film: in vacuum chamber, oxygen and argon flow ratio 15%, sputtering pressure 2.5 ×
10-1Pa is target, the membranous layer of silicon oxide thickness 110nm of deposition with pure silicon or sial or silicon boron.
Obtained antifog and antireflective visible light bifunctional coated glass, should in 380nm to 780nm spectral wavelength ranges
The transmissivity of bifunctional coated glass improves 3.5% than the transmissivity of non-coated glass original piece；Film layer pencil hardness 7.5H；Plated film
1.0 ° of the hydrophilic layer angle of wetting of glass.
Claims (2)
1. a kind of antifog and antireflective visible light bifunctional coated glass, it is characterised in that the film layer structure of the coated glass is by suitable
Sequence arrangement are as follows: hydrophilic membrane/separation layer/glass/separation layer/antireflective visible light film layer；Wherein, hydrophilic membrane ZnO-TiO2
Film；Separation layer refers to silicon dioxide film；Antireflective visible light film layer structure are as follows: high refractive index film/silicon dioxide film A/ silicon oxynitride
Film/silicon dioxide film B；High refractive index film refers to titanium dioxide, niobium oxide, zirconium oxide, tin oxide or zinc oxide deielectric-coating；
5~the 20nm of isolation layer film thickness；Hydrophilic membrane ZnO-TiO275~160nm of thicknesses of layers；
15~60nm of high refractive index layer thickness；15~40nm of silicon dioxide film A thicknesses of layers；Silicon oxynitride film thickness 75~
150nm；60~110nm of silicon dioxide film B thicknesses of layers；
For the bifunctional coated glass in 380nm to 780nm spectral wavelength ranges, transmissivity is more saturating than non-coated glass original piece
It penetrates rate and improves 1.5~3.5%；Film layer pencil hardness 6.50H~7.5H；1.0~4.5 ° of the hydrophilic layer angle of wetting of coated glass；
The ZnO-TiO2Film layer is obtained by magnetron sputtering method interaction sputtering sedimentation, and argon gas is worked gas, sputtering pressure 2.5
~4.0 × 10-1Pa, with zinc oxide, titanium oxide does target.
2. a kind of antifog and antireflective visible light bifunctional coated glass preparation method as described in claim 1, feature
Be the bifunctional coated glass the preparation method is as follows:
1) magnetically controlled sputter method plated film on glass is used；
A. glass cleaning: cleaning glass using deionized water, dry, obtains cleaned glass；
B. under normal pressure nitrogen atmosphere, cleaned glass surface is handled with plasma bombardment；
C. separation layer, ZnO-TiO are successively coated with magnetron sputtering method in the one side of glass2Film layer；
D. separation layer i.e. silicon dioxide film, high refractive index medium are successively coated with magnetron sputtering method in the uncoated another side of glass
Film, silica, silicon oxynitride, silicon dioxide layer；
When being coated with silicon dioxide film with magnetron sputtering method, oxygen and argon flow ratio 5%~35%, sputtering pressure 2.5~4.0 ×
10-1Pa is target, 5~20nm of silica coating thickness of deposition with pure silicon or sial or silicon boron；Plated film cabinet space temperature
120 DEG C~260 DEG C of degree；
ZnO-TiO is coated with magnetron sputtering method2When film layer, argon gas is worked gas, sputtering pressure 2.5~4.0 × 10-1Pa is used
Zinc oxide, titanium oxide do target；
When being coated with high refractive index medium film with magnetron sputtering method, sputtering pressure 2.5~4.0 × 10-1Pa, with titanium dioxide, oxidation
Niobium, zirconium oxide, tin oxide or zinc oxide do target；
When being coated with silicon oxynitride layer with magnetron sputtering method, sputtering coating target is done with pure silicon or sial or silicon boron, is made of argon gas
Working gas, nitrogen, oxygen and argon flow ratio 5~10%, 5~15%, 75~90%, sputtering pressure 2.5~4.0 × 10- 1Pa；
The cleaned glass that step a is obtained need to be in normal pressure nitrogen atmosphere, and the corona treatment formed with 500~1000V voltage is clean
Net glass surface.
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