CN105856267A - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- CN105856267A CN105856267A CN201610082969.7A CN201610082969A CN105856267A CN 105856267 A CN105856267 A CN 105856267A CN 201610082969 A CN201610082969 A CN 201610082969A CN 105856267 A CN105856267 A CN 105856267A
- Authority
- CN
- China
- Prior art keywords
- gear
- arm
- hand
- belt wheel
- end side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 81
- 230000005540 biological transmission Effects 0.000 claims description 80
- 239000007787 solid Substances 0.000 claims description 8
- 210000004247 hand Anatomy 0.000 description 126
- 235000012431 wafers Nutrition 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 9
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 239000011553 magnetic fluid Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 210000003414 extremity Anatomy 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000037237 body shape Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0033—Gripping heads and other end effectors with gripping surfaces having special shapes
- B25J15/0042—V-shaped gripping surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
- B25J15/026—Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by gears
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/005—Arms having a curved shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
An industrial robot can configure a motor in the inner side so as to realize main body miniaturization even if the first and second hands are closed or opened; a power transfer mechanism (30) transferring the power of a motor (26) to the first hand comprises a gear (38), a gear (40), and a first rotary shaft (39) fixing the gear (40); a power transfer mechanism (31) transferring the power of the motor (26) to the second hand comprises a gear (48), a gear (50), and a second rotary shaft (49) fixing the gear (50); the gear (38) and gear (48) are fixed on a common rotary shaft (34); the first and second rotary shafts are concentrically arranged; the gear (38) and the gear (40) are directly connected; the gear (48) and the gear (50) are connected through a middle gear, so the gear (40) and the gear (50) can rotate in opposite directions.
Description
Technical field
The present invention relates to a kind of industrial robot that conveying object is carried.
Background technology
The industrial robot being in the past known to carry semiconductor crystal wafer is (referring for example to patent documentation
1).Industrial robot described in patent documentation 1 has: first-hand and second-hand, first-hand with
And second-hand's the two hands loads semiconductor crystal wafer；Multi-joint arm, first-hand and second-hand can rotate
Be connected to the end side of multi-joint arm；And main part, the base end side of multi-joint arm can be rotationally
It is connected to main part.First-hand configure in the way of the most overlapping with second-hand.First-hand and
Second-hand has: two loading parts, and described loading part loads semiconductor crystal wafer；And it is elongated the most rectangular
The base portion of body, two loading parts are fixed on the both end sides of described base portion.The core of base portion can rotate
Be connected to the end side of multi-joint arm.
Further, the industrial robot described in patent documentation 1 has: for making the driving of first-hand rotation
Use motor；And for making the drive motor that second-hand rotates, first-hand can separately rotate with second-hand.
Two drive motors are arranged in the inside of main part.In this industrial robot, at carrying semiconductor die
Bowlder, first-hand separates rotation with second-hand, thus is formed as: first-hand with the when above-below direction is observed
The state (state closed up) of second-hand overlap, or first-hand the most overlapping with second-hand when above-below direction is observed
And the state (state opened) of the angle of intersection with regulation.It addition, this industrial robot not only has
For making first-hand and two drive motors of second-hand's rotation, also have for making multi-joint arm stretch
Two drive motors of contracting.The two drive motor is also disposed in the inside of main part.
Patent documentation 1: Japanese Unexamined Patent Publication 2009-83031 publication
Summary of the invention
Invent problem to be solved
In the industrial robot described in patent documentation 1, first-hand and second-hand can separately rotate, and
And first-hand and second-hand can be set as the state closed up or the state opened.But, at this industrial machine
In device people, owing to being provided with for making the drive motor of first-hand rotation and for the driving making second-hand rotate
With motor, therefore it is arranged in the main part maximization of inside for drive motor.
Therefore, the problem of the present invention is to provide a kind of and i.e. allows to be set as first-hand and second-hand to close up
State or the state opened, it is also possible to the motor configurations industrial machine at internal main part miniaturization will be supplied
People.
For solving the technical scheme of problem
In order to solve above-mentioned problem, the industrial robot of the present invention has: first-hand and second-hand, the
Proficiency and second-hand load conveying object, and overlap in the vertical direction；Arm, first-hand and
Second-hand can be rotationally coupled to the end side of arm；Main part, the base end side of arm can be rotationally coupled to
Main part；And hands rotating mechanism, hands rotating mechanism makes first-hand and second-hand's rotation, hands rotating mechanism
Have: the motor driven, motor configurations is in the inside of main part；First Poewr transmission mechanism, first moves
Force transfer mechanism is for being delivered to first-hand by the power of motor；Second Poewr transmission mechanism, the second power passes
Pass mechanism for the power of motor is delivered to second-hand；And common power transmission mechanism, common power passes
Pass mechanism and be arranged in first in the power transfer path of power transmitting to first-hand and second-hand from motor
Between Poewr transmission mechanism and the second Poewr transmission mechanism and motor, the first Poewr transmission mechanism has: the
One gear；Second gear；And the first rotary shaft that confession the second gear is fixing, the second Poewr transmission mechanism tool
Have: the 3rd gear；4th gear；And the second rotary shaft that confession the 4th gear is fixing, common power is transmitted
Mechanism has the common rotary axis fixing for the first gear and the 3rd gear, the first rotary shaft and the second rotation
At least one in rotating shaft is that hollow form is formed, and the first rotary shaft and the second rotary shaft configure in same heart shaped, the
One gear and the second direct geared or connect by idler gear, the 3rd gear and the 4th direct geared or borrow
Idler gear is helped to connect, so that the second gear and the 4th gear direction facing opposite to each other rotate.
In the industrial robot of the present invention, for the power of motor being delivered to first hand first power
Transmission mechanism has: the first gear；Second gear；And the first rotary shaft that confession the second gear is fixing, use
Have in the power of motor being delivered to second-hand second Poewr transmission mechanism: the 3rd gear；4th gear；
And the second rotary shaft that confession the 4th gear is fixing.Further, in the present invention, the first gear and the 3rd gear
It is fixed in common rotary axis, and the first rotary shaft configures in same heart shaped with the second rotary shaft.And, at this
In invention, the first gear and the second direct geared or by idler gear connect, the 3rd gear and the 4th tooth
Wheel directly or connects by idler gear, so that the second gear and the 4th gear direction facing opposite to each other
Rotate.Therefore, in the present invention, it is possible to utilize that be connected and facing opposite to each other side with the motor shared
Make first-hand to rotate towards rightabout with second-hand to the second gear rotated and the 4th gear, and by first
Hands and second-hand are set to the state closed up or the state opened.Therefore, in the present invention, i.e. allow to
It is set as the state closed up or the state opened on the other hand, it is also possible to reduce the quantity of motor, its result with second-hand
It is motor configurations can will to be supplied at internal main part miniaturization.
In the present invention, it is preferred to the first gear and the second direct geared connect, the 3rd gear and the 4th gear are borrowed
An idler gear is helped to connect.If constituted like this, then minimal number of idler gear can be used to make
Two gears and the 4th gear direction facing opposite to each other rotate.Therefore, it is possible to simplify the knot of hands rotating mechanism
Structure.
In the present invention, the pitch diameter of the such as first gear and the pitch diameter of the second gear are equal, and the 3rd
The pitch diameter of gear and the pitch diameter of the 4th gear are equal, and the 3rd gear and the pitch circle of the 4th gear
Diameter is less than the pitch diameter of the first gear and the second gear, the number of teeth of the first gear, the tooth of the second gear
Number, the number of teeth of the 3rd gear, the 4th gear the number of teeth identical.In this case, motor is driven to make the
When proficiency and second-hand rotate the angle of regulation, can be by first hand rotational angle and second-hand angle of rotation
Degree is arranged to identical.Therefore, the control of industrial robot becomes easy.
In the present invention, such as arm has: the first arm of hollow form, and the base end side of the first arm can turn
It is connected to main part dynamicly；And the second arm of hollow form, the base end side of the second arm can connect rotationally
Receive the end side of the first arm, and first-hand and second-hand can be rotationally coupled to the end of the second arm
Side, the first rotary shaft and the second rotary shaft are arranged in the connecting portion between the first arm and the second arm,
First Poewr transmission mechanism has: the first belt wheel, and the first belt wheel is arranged in the inside of the base end side of the second arm
And it is fixed on the upper end side of the first rotary shaft；Second belt wheel, the second belt wheel is arranged in the end side of the second arm
Inside and be fixed on first-hand；And the first transmission band, the first transmission band is by the first belt wheel and the second belt wheel
Setting up, the second Poewr transmission mechanism has: the 3rd belt wheel, and the 3rd belt wheel is arranged in the base end side of the second arm
Inside and be fixed on the upper end side of the second rotary shaft；4th belt wheel, the 4th belt wheel is arranged in the second arm
The inside of end side and be fixed on second-hand；Second transmission band, the second transmission band is by the 3rd belt wheel and the 4th band
Wheel sets up.
In the present invention, the most first-hand, second-hand and arm configure in a vacuum.In this case,
Coupling part between main part and arm is such as configured with magnetic fluid seal, but in the present invention, by
In shared motor can be utilized to make first-hand and second-hand rotate, therefore be provided separately for making first-hand
The situation of the motor rotated and the motor making second-hand rotate is compared, it is possible to reduce magnetic fluid seal
Quantity.Therefore, it is possible to the structure of the coupling part simplified between main part and arm.
Invention effect
As it has been described above, in the industrial robot of the present invention, i.e. allow to be set as first-hand and second-hand
The state closed up or the state opened, it is also possible to motor configurations will be supplied at internal main part miniaturization.
Accompanying drawing explanation
Fig. 1 is the side view of the industrial robot involved by embodiments of the present invention.
Fig. 2 (A), (B), (C), (D) are the plane graph of the industrial robot shown in Fig. 1,
Fig. 2 (A) is to illustrate the arm figure of the state of retraction, Fig. 2 (B) when first-hand and second-hand close up
For illustrating arm figure of the state of expansion when first-hand and second-hand close up, Fig. 2 (C) is for illustrating arm
The figure of the state retracted when first-hand and second-hand open, Fig. 2 (D) is for illustrating that arm is first-hand
The figure of the state launched under the state opened with second-hand.
Fig. 3 is the schematic sectional view of the internal structure for the arm etc. shown in explanatory diagram 1.
Fig. 4 is the enlarged drawing in the E portion of Fig. 3.
Fig. 5 is the enlarged drawing in the F portion of Fig. 3.
Fig. 6 (A) for illustrating the first gear, the figure of the second gear, Fig. 6 (B) from the G-G direction of Fig. 4
For illustrating the 3rd gear, the 4th gear and the figure of idler gear from the H-H direction of Fig. 4.
(description of reference numerals)
1 robot (industrial robot)
2 wafers (semiconductor crystal wafer, conveying object)
3 handss (first-hand)
4 handss (second-hand)
5 arms
6 main parts
7 first arms
8 second arms
11 hands rotating mechanisms
26 motors
30 Poewr transmission mechanisms (the first Poewr transmission mechanism)
31 Poewr transmission mechanisms (the second Poewr transmission mechanism)
32 Poewr transmission mechanisms (common power transmission mechanism)
34 rotary shafts (common rotary axis)
38 gears (the first gear)
39 hollow rotating shafts (the first rotary shaft)
40 gears (the second gear)
41 belt wheels (the first belt wheel)
42 belt wheels (the second belt wheel)
43 transmission bands (the first transmission band)
48 gears (the 3rd gear)
49 rotary shafts (the second rotary shaft)
50 gears (the 4th gear)
51 belt wheels (the 3rd belt wheel)
52 belt wheels (the 4th belt wheel)
53 transmission bands (the second transmission band)
54 idler gears
Detailed description of the invention
Hereinafter, referring to the drawings embodiments of the present invention are illustrated.
(schematic construction of industrial robot)
Fig. 1 is the side view of the industrial robot 1 involved by embodiments of the present invention.Fig. 2 (A),
(B), (C), (D) are the plane graph of the industrial robot 1 shown in Fig. 1.Fig. 3 is for being used for
The schematic sectional view of the internal structure of arm 5 grade shown in bright Fig. 1.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of present embodiment is for for as removing
The discoideus semiconductor crystal wafer 2 (hereinafter referred to as " wafer 2 ") of fortune object carries out the robot carried.
This robot 1 is assembled in the semi-conductor manufacturing system omitting diagram and uses.As shown in Figure 1, Figure 2 (A),
(B), (C), shown in (D), robot 1 has: hands 3 and hands 4, described hands 3 and described
Hands 4 the two hands loads wafer 2；Arm 5, hands 3 and hands 4 can be rotationally coupled to described arm 5
End side；And main part 6, the base end side of arm 5 can be rotationally coupled to described main part 6.This reality
The hands 3 executing mode is first-hand, and hands 4 is second-hand.
Arm 5 is made up of the first arm 7 that can connect rotationally each other and the second arm 8 the two arm.
First arm 7 and the second arm 8 are formed in hollow form.The base end side of the first arm 7 can connect rotationally
Receive main part 6.The base end side of the second arm 8 can be rotationally coupled to the end side of the first arm 7.
Hands 3 and hands 4 can be rotationally coupled to the end side of the second arm 8.Further, robot 1 has:
Hands rotating mechanism 11, described hands rotating mechanism 11 makes hands 3 and hands 4 rotate；First arm rotating mechanism 12,
Described first arm rotating mechanism 12 makes the first arm 7 rotate；And the second arm rotating mechanism 13, described
Two arm rotating mechanisms 13 make the second arm 8 rotate.
Hands 3, hands 4 and arm 5 are arranged in the upside of main part 6.Specifically, in the vertical direction,
Hands 3, hands the 4, second arm the 8, first arm 7 and main part 6 configure in the order from upside.Hands 3,
The upper end side of hands 4, arm 5 and main part 6 is arranged in the inside of the conveying chamber constituting semi-conductor manufacturing system.
The inside of conveying chamber is vacuum.It is to say, the upper end side of main part 6, hands 3, hands 4 and arm 5 are joined
Put in vacuum area VR (in vacuum), in addition to the upper end side of main part 6, be partly arranged at air
In the AR of region (in air).The wafer 2 being loaded on hands 3 and hands 4 carried in a vacuum by robot 1.
Hands 3, hands 4 have: two loading parts 15, and described loading part 15 is used for loading wafer 2；And
Base portion 16, described base portion 16 is fixed for two loading parts 15.Base portion 16 is formed as observing from above-below direction
Time shape be elongated generally rectangular approximately parallelepiped body.Further, base portion 16 is formed as at above-below direction
On in thin and flat approximately parallelepiped body shape.Loading part 15 is individually fixed on the long side direction of base portion 16
The two ends of base portion 16.This loading part 15 is formed as lamellar.Loading part 15 when above-below direction is observed
Shape be the generally U-shaped shape of end side opening.Further, the center of base portion 16 can be rotationally coupled to
The end side of the second arm 8, when above-below direction is observed, hands 3 is relative to the center of rotation of the second arm 8
Consistent relative to the center of rotation of the second arm 8 with hands 4.When upper and lower looks up, hands 3, hands 4
Be formed as relative to hands 3, the center substantially point symmetry of hands 4.
First arm rotating mechanism 12 has hollow rotating shaft 18, and described hollow rotating shaft 18 is fixed on first
The base end side of arm 7.Hollow rotating shaft 18 configures in the way of it is the most consistent with above-below direction, hollow
The lower surface of the base end side of the first arm 7 is fixed in the upper end of rotary shaft 18.Cardinal extremity at the first arm 7
The lower surface of side is formed for the upper end side of hollow rotating shaft 19 described later and rotary shaft 24 and runs through insertion
Through hole.The lower end side of hollow rotating shaft 18 is arranged in the inside of main part 6.At hollow rotating shaft 18
Lower end side such as connects by the Poewr transmission mechanisms such as belt wheel, transmission band and reductor (omitting diagram) to be had
The motor (omitting diagram) driven.This Poewr transmission mechanism and motor configurations are in main part 6
Portion.
Second arm rotating mechanism 13 has the hollow rotating shaft 19 configured with hollow rotating shaft 18 in same heart shaped.
Hollow rotating shaft 19 configures in the way of it is the most consistent with above-below direction, and is arranged in hollow rotating shaft 18
Inner circumferential side.The upper end side of hollow rotating shaft 19 is arranged in the inside of the base end side of the first arm 7, hollow
The lower end side of rotary shaft 19 is arranged in the inside of main part 6.Lower end side at hollow rotating shaft 19 is such as borrowed
Help the Poewr transmission mechanisms such as belt wheel, transmission band and reductor (omitting diagram) to connect and have the motor driven
(omitting diagram).This Poewr transmission mechanism and motor configurations are in the inside of main part 6.
Further, the second arm rotating mechanism 13 has: belt wheel 20, and described belt wheel 20 is fixed on hollow rotating
The upper end of axle 19；Belt wheel 21, described belt wheel 21 is fixed on the base end side of the second arm 8；And transmission band
(omitting diagram), described transmission band is set up by belt wheel 20 and belt wheel 21.Belt wheel 20 is arranged in the first arm
The inside of the base end side in portion 7.Belt wheel 21 is formed in substantially cylindric, and the upper surface of belt wheel 21 is fixed on the
The lower surface of the base end side of two arms 8.Further, belt wheel 21 is arranged in end side interior of the first arm 7
Portion.Belt wheel 21 can be rotatably supported at the end side of the first arm 7 by bearing.
Hands rotating mechanism 11 has rotary shaft (solid rotary shaft) 24, described rotary shaft 24 and hollow rotating
Axle 18,19 configures in same heart shaped.Rotary shaft 24 configures in the way of it is the most consistent with above-below direction, and
It is arranged in the inner circumferential side of hollow rotating shaft 19.The upper end side of rotary shaft 24 is arranged in the cardinal extremity of the first arm 7
The inside of side, the lower end side of rotary shaft 24 is arranged in the inside of main part 6.Lower end side in rotary shaft 24
Such as connect by Poewr transmission mechanisms 25 such as belt wheel, transmission band and reductors and have the motor 26 driven.
Poewr transmission mechanism 25 and motor 26 are arranged in the inside of main part 6.About hands rotating mechanism 11
Detailed construction will be described later.
Outer circumferential side at hollow rotating shaft 18, the inner peripheral surface at hollow rotating shaft 18 and hollow rotating shaft 19
Outer peripheral face between and between the inner peripheral surface and the outer peripheral face of rotary shaft 24 of hollow rotating shaft 19 configure
Having the bearing omitting diagram, hollow rotating shaft 18,19 and rotary shaft 24 can be rotatably supported at main body
Portion 6.Further, hollow rotating shaft 18, hollow rotating shaft 19, rotary shaft 24 can relatively rotate each other.
Main part 6 be internally formed atmospheric pressure, at the outer circumferential side of hollow rotating shaft 18, at hollow rotating shaft 18
Between the outer peripheral face of inner peripheral surface and hollow rotating shaft 19 and in the inner peripheral surface of hollow rotating shaft 19 and rotation
The magnetic fluid seal for preventing air from flowing out it is configured with to vacuum area VR between the outer peripheral face of axle 24
(omitting diagram).It addition, be configured with elevating mechanism (omitting diagram) in the inside of main part 6, described
Elevating mechanism makes hands 3, hands 4, arm 5, hands rotating mechanism the 11, first arm rotating mechanism 12 and the second arm
Rotating mechanism 13 lifts.
(structure of hands rotating mechanism)
Fig. 4 is the enlarged drawing in the E portion of Fig. 3.Fig. 5 is the enlarged drawing in the F portion of Fig. 3.Fig. 6 (A) is
Illustrate the figure of gear 38,40 from the G-G direction of Fig. 4, Fig. 6 (B) is for illustrate from the H-H direction of Fig. 4
Gear 48,50 and the figure of idler gear 54.
Hands rotating mechanism 11 has: the first Poewr transmission mechanism 30 (hereinafter referred to as " Poewr transmission mechanism 30 "),
Described first Poewr transmission mechanism 30 is for transmitting in one's hands 3 by the power of motor 26；Second power transmission machine
Structure 31 (hereinafter referred to as " Poewr transmission mechanism 31 "), described second Poewr transmission mechanism 31 is for by horse
Reach the power transmission in one's hands 4 of 26；And common power transmission mechanism 32 (hereinafter referred to as " power transmission machine
Structure 32 "), described common power transmission mechanism 32 is transmitting the dynamic of power from motor 26 to hands 3, hands 4
It is arranged on power bang path between Poewr transmission mechanism 30,31 and motor 26.
Poewr transmission mechanism 32 has above-mentioned rotary shaft 24.Further, Poewr transmission mechanism 32 not only has
Having rotary shaft 24, also have: belt wheel 33, described belt wheel 33 is fixed on the upper end side of rotary shaft 24；Rotation
Rotating shaft (solid rotary shaft) 34, described rotary shaft 34 can be rotatably supported at the first arm 7；Belt wheel
35, described belt wheel 35 is fixed on rotary shaft 34；And transmission band 36, described transmission band 36 is by belt wheel 33
Set up with belt wheel 35.Belt wheel 33 is arranged in the inside of the base end side of the first arm 7.Rotary shaft 34 configures
Centre position between cardinal extremity and the end of the first arm 7.Further, rotary shaft 34 is axial with upper with it
The consistent mode in lower direction is arranged in the inside of the first arm 7, and can be held in rotationally by bearing
One arm 7.Belt wheel 35 is fixed on the upper end side of rotary shaft 34.This belt wheel 35 is arranged in the first arm 7
Inside.The rotary shaft 34 of present embodiment is common rotary axis.
Poewr transmission mechanism 30 has: gear 38, and described gear 38 is fixed on rotary shaft 34；Hollow is revolved
Rotating shaft 39, described hollow rotating shaft 39 can be rotatably supported at the end side of the first arm 7；And tooth
Wheel 40, described gear 40 is fixed on hollow rotating shaft 39.Gear 38 is fixed on the lower end side of rotary shaft 34.
Hollow rotating shaft 39 can be held in the end side of the first arm 7 rotationally by bearing.This hollow rotating
Axle 39 is arranged in the inner circumferential side of belt wheel 21.Further, hollow rotating shaft 39 is arranged in the end of the first arm 7
The inside of side and the inside of the base end side of the second arm 8, and it is arranged in the first arm 7 and the second arm
Coupling part between 8.Gear 40 is fixed on the lower end of hollow rotating shaft 39.Gear 38 and gear 40
Engagement.It is to say, gear 38 is directly connected to gear 40.Further, the pitch diameter of gear 38 with
The pitch diameter of gear 40 is equal.The gear 38 of present embodiment is the first gear, and gear 40 is second
Gear, hollow rotating shaft 39 is the first rotary shaft.
Further, Poewr transmission mechanism 30 has: belt wheel 41, and described belt wheel 41 is fixed on hollow rotating shaft
The upper end side of 39；Belt wheel 42, described belt wheel 42 is fixed on hands 3；And transmission band 43, described transmission band
43 are set up by belt wheel 41 and belt wheel 42.Belt wheel 41 is arranged in the inside of the base end side of the second arm 8, band
Wheel 42 is arranged in the inside of the end side of the second arm 8.As it is shown in figure 5, belt wheel 42 is fixed in substantially
The lower end side of the belt wheel holding member 44 that bottomed cylindrical is formed.Solid in the upper end side of belt wheel holding member 44
Surely having the lower surface at the center of the base portion 16 of hands 3, belt wheel 42 is fixed on hands 3 by belt wheel holding member 44.
It is fixed with fixing axle 45 in the inside of the end side of the second arm 8.Belt wheel holding member 44 is by bearing energy
Enough it is rotatably supported at fixing axle 45.The belt wheel 41 of present embodiment is the first belt wheel, and belt wheel 42 is second
Belt wheel, transmission band 43 is the first transmission band.
Poewr transmission mechanism 31 has: gear 48, and described gear 48 is fixed on rotary shaft 34；Rotary shaft
(solid rotary shaft) 49, described rotary shaft 49 can be rotatably supported at the end side of the first arm 7；
Gear 50, described gear 50 is fixed on rotary shaft 49；And idler gear 54 (with reference to Fig. 6 (B)).
Gear 48 is fixed on the lower end side of rotary shaft 34.This gear 48 is arranged in than gear 38 position on the lower.
Rotary shaft 49 is arranged in the inner circumferential side of hollow rotating shaft 39, and hollow rotating shaft 39 and rotary shaft 49 are in concentric
Shape configures.Further, the upper end of rotary shaft 49, rotates towards upwardly projecting than the upper end of hollow rotating shaft 39
The lower end of axle 49 is more prominent towards downside than the lower end of hollow rotating shaft 39.It is to say, rotary shaft 49 is joined
Put in the inside of end side of the first arm 7 and the inside of the base end side of the second arm 8, and be arranged in
Coupling part between one arm 7 and the second arm 8.Further, rotary shaft 49 is by being arranged in hollow rotation
Bearing etc. between inner peripheral surface and the outer peripheral face of rotary shaft 49 of rotating shaft 39 can be held in the first arm rotationally
The end side in portion 7.It addition, rotary shaft 49 may also be hollow rotating shaft.Further, in Fig. 3, Fig. 4,
Eliminate the diagram of idler gear 54.
Gear 50 is fixed on the lower end side of rotary shaft 49.This gear 50 is arranged in than gear 40 on the lower
Position.Idler gear 54 can be held in the first arm 7 rotationally.Further, idler gear 54 is arranged in
The inside of the first arm 7.As shown in Fig. 6 (B), gear 48 engages with idler gear 54, gear 50
Engage with idler gear 54.It is to say, gear 48 does not engages with gear 50 and is made by a centre
Gear 54 connects.The pitch diameter of gear 48 is equal with the pitch diameter of gear 50.Further, gear 48,
The pitch diameter of the pitch ratio gear 38,40 of 50 is little.Further, in the present embodiment, gear 38
The number of teeth of the number of teeth, the number of teeth of gear 40, the number of teeth of gear 48 and gear 50 identical.This embodiment party
The gear 48 of formula is the 3rd gear, and gear 50 is the 4th gear, and rotary shaft 49 is the second rotary shaft.Separately
Outward, the pitch diameter of the pitch ratio gear 48,50 of idler gear 54 is little.
Further, Poewr transmission mechanism 31 has: belt wheel 51, and described belt wheel 51 is fixed on rotary shaft 49
Upper end side；Belt wheel 52, described belt wheel 52 is fixed on hands 4；And transmission band 53, described transmission band 53
Set up by belt wheel 51 and belt wheel 52.The pitch diameter of belt wheel 41 is equal with the pitch diameter of belt wheel 51.And
And, the pitch diameter of belt wheel 42 is equal with the pitch diameter of belt wheel 52.The belt wheel 51 of present embodiment is
3rd belt wheel, belt wheel 52 is the 4th belt wheel, and transmission band 53 is the second transmission band.
Belt wheel 51 is arranged in the inside of the base end side of the second arm 8, and belt wheel 52 is arranged in the second arm 8
The inside of end side.Further, belt wheel 51 is arranged in the upside of belt wheel 41, and belt wheel 52 is arranged in belt wheel
The upside of 42.Belt wheel 52 is arranged in the outer circumferential side of belt wheel holding member 44, and with belt wheel holding member 44
Configure in same heart shaped.This belt wheel 52 is by outer peripheral face and the belt wheel 52 being arranged in belt wheel holding member 44
Bearing etc. between inner peripheral surface, it is possible to be rotatably supported at fixing axle 45.Upper end side at belt wheel 52 is fixed
There is the lower surface at the center of the base portion 16 of hands 4.The feed wheel that is centrally formed with at the base portion 16 of hands 4 keeps
The upper end side of parts 44 runs through the through hole of insertion.
As it has been described above, gear 38 is directly connected to gear 40.Further, borrow between gear 48 and gear 50
An idler gear 54 is helped to connect.Therefore, if rotary shaft 34 utilizes the powered rotation of motor 26, then
Gear 40 direction facing opposite to each other with gear 50 rotates.It is to say, in the present embodiment, tooth
Wheel 38 is directly connected to gear 40, and gear 48 is connected by idler gear 54 with gear 50, so that tooth
Wheel 40 directions facing opposite to each other with gear 50 rotate.
Further, if gear 40 direction facing opposite to each other with gear 50 rotates, then hands 3 and hands 4
Direction facing opposite to each other rotates.In the present embodiment, hands 3 and hands 4 are such as Fig. 2 (A), Fig. 2
(B) hands 3 is overlapping with hands 4 when above-below direction is observed state (state closed up) shown in and such as Fig. 2
(C), shown in Fig. 2 (D) when above-below direction is observed hands 3 the most overlapping with hands 4 and with the angle phase specified
Between the state (state opened) handed over, direction facing opposite to each other rotates.It addition, this embodiment party
In formula, the state shown in Fig. 2 (C), Fig. 2 (D) is the state that hands 3 and hands 4 open maximum, machine
People 1 is used when the angle formed by hands 3 and hands 4 reaches below the angle, θ of Fig. 2 (D).
Further, the pitch diameter being as noted previously, as belt wheel 41 is equal with the pitch diameter of belt wheel 51, band
The pitch diameter of wheel 42 is equal with the pitch diameter of belt wheel 52, is therefore driving motor 26 to make hands 3, hands
During the angle that 4 rotate regulation, the anglec of rotation of hands 3 is equal with the anglec of rotation of hands 4.In the present embodiment,
With hands 3 when above-below direction is observed, hands 4 relative to the second arm 8 center of rotation regulation straight line L
The mode of (with reference to Fig. 2 (A), (B), (C), (D)) upper movement makes arm 5 stretch,
Under the state that hands 3, hands 4 close up when above-below direction is observed, the long side direction of base portion 16 and the side of straight line L
To unanimously.Further, when hands 3, hands 4 open when above-below direction is observed, hands 3 is relative to directly
The angle of line L is equal with the hands 4 angle relative to straight line L.
(dumb show of industrial robot)
In robot 1, when hollow rotating shaft 19 stops, if hollow rotating shaft 18 and
Rotary shaft 24 rotates, then such as Fig. 2 (A) and Fig. 2 (B) or such as Fig. 2 (C) and Fig. 2 (D)
Shown in, arm 5 at hands 3 invariant position relative with hands 4 and hands 3, hands 4 towards the state in the direction specified
Under stretch.In the present embodiment, when above-below direction is observed, arm 5 with hands 3, hands 4 relative to
The mode that the center of rotation of the second arm 8 moves on the linel is stretched.
Further, if hollow rotating shaft 18,19 and rotary shaft 24 rotate, then hands 3 is relative with hands 4
Invariant position, arm 5 do not stretch, and hands 3, hands 4 and arm 5 rotate relative to main part 6.And
And, when hollow rotating shaft 18,19 stops, if rotary shaft 24 rotates, then arm 5 flexible,
Not rotating, and hands 3, hands 4 rotate relative to arm 5, hands 3, hands 4 close up (overlapping in the vertical direction),
Or open (the most overlapping but with regulation angle of intersection).
In the present embodiment, when between semi-conductor manufacturing system and external device (ED) relative to handing-over wafer 2
Transfer chamber take out and during storing wafer 2, as shown in Fig. 2 (A), Fig. 2 (B), arm 5 hands 3,
Stretch under the state that hands 4 closes up, and deposit relative to transfer chamber and take out wafer 2.Further, relatively
When wafer 2 is implemented the process chamber taking-up of process of regulation and storing wafer 2, such as Fig. 2 (C), figure
Shown in 2 (D), arm 5 is flexible when hands 3, hands 4 open, and take out relative to process chamber and
Storing wafer 2.It addition, being internally formed as vacuum of transfer chamber and process chamber.
(main efficacy results of present embodiment)
As described above, in the present embodiment, if rotary shaft 34 utilizes the powered rotation of motor 26,
The direction that then gear 40 is facing opposite to each other with gear 50 rotates, and hands 3, hands 4 are at Fig. 2 (A), (B)
Phase towards each other between the shown state closed up with the state opened shown in Fig. 2 (C), Fig. 2 (D)
Anti-direction rotates.Therefore, in the present embodiment, it is possible to utilize a motor 26 to make hands 3, hands 4
It is in the state closed up or the state opened.Therefore, in the present embodiment, hands 3, hands are i.e. allowed to
4 are in the state closed up or the state opened, it is also possible to will be configured with the main part 6 of motor 26 in inside
Miniaturization.
It addition, in the present embodiment, owing to upper end side, hands 3, hands 4 and the arm 5 of main part 6 are joined
Put in a vacuum, it is therefore desirable to the coupling part configuration magnetic fluid seal between arm 5 and main part 6.
Therefore, if being provided separately the motor for making hands 3 rotate and for the motor making hands 4 rotate, and at arm
Coupling part between 5 with main part 6 is provided separately and is connected the rotary shaft having for the motor making hands 3 rotate
And for making the rotary shaft of motor that hands 4 rotates, then it is arranged in the connecting portion between arm 5 and main part 6
The increasing number of the magnetic fluid seal divided.But, in the present embodiment, shared owing to using
Motor 26 and share rotary shaft 24 make hands 3, hands 4 rotate, therefore, it is possible to reduce be arranged in arm 5
And the quantity of the magnetic fluid seal of the coupling part between main part 6.Therefore, in the present embodiment,
The structure of coupling part between arm 5 and main part 6 can be simplified.
In the present embodiment, gear 38 is directly connected to gear 40, and gear 48 and gear 50 are by one
Individual idler gear 54 connects.Therefore, in the present embodiment, it is possible to use minimal number of idler gear
54 make gear 40 and gear 50 direction facing opposite to each other rotate, and its result is to simplify hands rotating machine
The structure of structure 11.Further, in the present embodiment, when above-below direction is observed, arm 5 is with hands 3, hands 4
The mode moved on the linel relative to the center of rotation of the second arm 8 is stretched, and from upper and lower
In time observing, the hands 3 angle relative to straight line L is equal with the hands 4 angle relative to straight line L.Therefore,
In the present embodiment, the control of robot 1 becomes easy.
(other embodiments)
Above-mentioned embodiment is an example of the preferred embodiment for the present invention, but is not limited to this,
Do not change and various change in the range of the purport of the present invention, can be implemented.
In the above-described embodiment, gear 38 is directly connected to gear 40, gear 48 and gear 50 by
One idler gear 54 connects.In addition, such as may also be gear 38 with gear 40 by one
Between gear connect, and gear 48 is directly connected to gear 50.Further, if gear 40 and gear 50 that
This rotates in the opposite direction, then may also be gear 38 with gear 40 by one or more center tooth
Wheel connects, and gear 48 is connected by one or more idler gear with gear 50.
In the above-described embodiment, the pitch diameter of gear 38 is equal with the pitch diameter of gear 40, but tooth
The pitch diameter of wheel 38 also can be different from the pitch diameter of gear 40.It is to say, the number of teeth of gear 38
Also can be different from the number of teeth of gear 40.Further, in the above-described embodiment, the pitch diameter of gear 48 with
The pitch diameter of gear 50 is equal, but the pitch diameter of the pitch diameter of gear 48 and gear 50 may not be used yet
With.It is to say, the number of teeth of gear 48 also can be different from the number of teeth of gear 50.In this case, tooth
Speed reducing ratio between wheel 38 and gear 40 both can be equal to the speed reducing ratio between gear 48 and gear 50, it is possible to
It is not equal to the speed reducing ratio between gear 48 and gear 50.
In the above-described embodiment, hands 3, hands 4 have two loading parts 15, but hands 3, hands 4 also can be only
There is a loading part 15.Further, in the above-described embodiment, arm 5 is by the first arm 7 and the second arm
8 the two arms are constituted, but arm 5 also can be made up of three arms.And, in the above-described embodiment,
The conveying object carried by robot 1 is wafer 2, but the conveying object carried by robot 1 also may be used
It it is glass substrate etc..Further, in the above-described embodiment, the upper end side of main part 6, hands 3, hands 4 with
And arm 5 configures in a vacuum, but robot 1 entirety can also be configured in an atmosphere.
Claims (5)
1. an industrial robot, it is characterised in that described industrial robot has:
First-hand and second-hand, described first-hand and described second-hand load conveying object and
Overlap on above-below direction；
Arm, described first-hand and described second-hand can be rotationally coupled to the end side of described arm；
Main part, the base end side of described arm can be rotationally coupled to described main part；And
Hands rotating mechanism, described hands rotating mechanism makes described first-hand and described second-hand rotate,
Described hands rotating mechanism has:
The motor driven, described motor configurations is in the inside of described main part；
First Poewr transmission mechanism, described first Poewr transmission mechanism is for passing the power of described motor
It is delivered to described first-hand；
Second Poewr transmission mechanism, described second Poewr transmission mechanism is for passing the power of described motor
It is delivered to described second-hand；And
Common power transmission mechanism, described common power transmission mechanism from described motor to described first
Hands and described second-hand transmit and are arranged in described first power transmission machine in the power transfer path of power
Between structure and described second Poewr transmission mechanism and described motor,
Described first Poewr transmission mechanism has the first gear, the second gear and supplies described second gear
The first fixing rotary shaft,
Described second Poewr transmission mechanism has the 3rd gear, the 4th gear and supplies described 4th gear
The second fixing rotary shaft,
Described common power transmission mechanism has fixing for described first gear and described 3rd gear
Common rotary axis,
At least one in described first rotary shaft and described second rotary shaft is formed as hollow form, institute
State the first rotary shaft to configure in same heart shaped with described second rotary shaft,
Described first gear and described second direct geared or be connected by idler gear, and described
Three gears and described 4th direct geared or be connected by idler gear so that described second gear with
Described 4th gear direction facing opposite to each other rotates.
Industrial robot the most according to claim 1, it is characterised in that
Described first gear is connected with described second direct geared,
Described 3rd gear is connected by a described idler gear with described 4th gear.
Industrial robot the most according to claim 2, it is characterised in that
The pitch diameter of described first gear is equal with the pitch diameter of described second gear,
The pitch diameter of described 3rd gear is equal with the pitch diameter of described 4th gear, and described
First gear described in the pitch diameter of three gears and the pitch ratio of described 4th gear and described
The pitch diameter of the second gear is little,
The number of teeth of described first gear, the number of teeth of described second gear, the number of teeth of described 3rd gear,
The number of teeth of described 4th gear is identical.
4. according to the industrial robot described in any one in claims 1 to 3, it is characterised in that
Described arm has:
First arm of hollow form, the base end side of described first arm can be rotationally coupled to described master
Body；And
Second arm of hollow form, the base end side of described second arm can be rotationally coupled to described
The end side of one arm, and described first-hand and described second-hand can be rotationally coupled to described
The end side of two arms,
Described first rotary shaft and described second rotary shaft are arranged in described first arm and described second
Connecting portion between arm,
Described first Poewr transmission mechanism has:
First belt wheel, described first belt wheel is arranged in the inside of the base end side of described second arm, and solid
Upper end side due to described first rotary shaft；
Second belt wheel, described second belt wheel is arranged in the inside of the end side of described second arm, and solid
Due to described first-hand；And
First transmission band, described first transmission band is set up by described first belt wheel and described second belt wheel,
Described second Poewr transmission mechanism has:
3rd belt wheel, described 3rd belt wheel is arranged in the inside of the base end side of described second arm, and solid
Upper end side due to described second rotary shaft；
4th belt wheel, described 4th belt wheel is arranged in the inside of the end side of described second arm, and solid
Due to described second-hand；And
Second transmission band, described second transmission band is set up by described 3rd belt wheel and described 4th belt wheel.
5. according to the industrial robot described in any one in Claims 1-4, it is characterised in that
Described second-hand first-hand, described and described arm configure in a vacuum.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-023831 | 2015-02-10 | ||
| JP2015023831A JP6557475B2 (en) | 2015-02-10 | 2015-02-10 | Industrial robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105856267A true CN105856267A (en) | 2016-08-17 |
| CN105856267B CN105856267B (en) | 2018-04-24 |
Family
ID=56624591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610082969.7A Active CN105856267B (en) | 2015-02-10 | 2016-02-05 | Industrial robot |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6557475B2 (en) |
| KR (1) | KR20160098050A (en) |
| CN (1) | CN105856267B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253232A (en) * | 2018-09-21 | 2019-01-22 | 上海飞珀机器人科技有限公司 | A kind of double freedom gear-box mould group |
| CN110666784A (en) * | 2018-07-03 | 2020-01-10 | 日本电产三协株式会社 | Industrial robot |
| CN110944806A (en) * | 2017-07-28 | 2020-03-31 | 日本电产三协株式会社 | Industrial robot |
| CN117584162A (en) * | 2024-01-19 | 2024-02-23 | 广东金鼎光学技术股份有限公司 | Lens loading manipulator and optical lens mould pressing equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09254075A (en) * | 1996-03-25 | 1997-09-30 | Yaskawa Electric Corp | Working robot |
| JP2000237988A (en) * | 1999-02-17 | 2000-09-05 | Mitsubishi Electric Corp | Arm driving mechanism of robot device |
| JP2003025262A (en) * | 2001-07-13 | 2003-01-29 | Daihen Corp | Robot for conveying workpiece |
| JP2007044839A (en) * | 2005-08-11 | 2007-02-22 | Toshiba Mach Co Ltd | Industrial robot |
| CN101128289A (en) * | 2005-02-28 | 2008-02-20 | 日本电产三协株式会社 | Robot arm and robot |
| CN103016629A (en) * | 2011-09-27 | 2013-04-03 | 株式会社安川电机 | Gear unit and robot |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0536809A (en) * | 1991-07-31 | 1993-02-12 | Mitsubishi Electric Corp | Semiconductor substrate transfer arm in semiconductor substrate treatment device |
| JP3083439B2 (en) * | 1994-01-25 | 2000-09-04 | 日本電子株式会社 | Transport mechanism |
| JP2004148455A (en) * | 2002-10-31 | 2004-05-27 | M & C:Kk | Industrial robot |
| JP4979530B2 (en) * | 2007-09-28 | 2012-07-18 | 日本電産サンキョー株式会社 | Industrial robot |
-
2015
- 2015-02-10 JP JP2015023831A patent/JP6557475B2/en active Active
-
2016
- 2016-02-03 KR KR1020160013373A patent/KR20160098050A/en unknown
- 2016-02-05 CN CN201610082969.7A patent/CN105856267B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09254075A (en) * | 1996-03-25 | 1997-09-30 | Yaskawa Electric Corp | Working robot |
| JP2000237988A (en) * | 1999-02-17 | 2000-09-05 | Mitsubishi Electric Corp | Arm driving mechanism of robot device |
| JP2003025262A (en) * | 2001-07-13 | 2003-01-29 | Daihen Corp | Robot for conveying workpiece |
| CN101128289A (en) * | 2005-02-28 | 2008-02-20 | 日本电产三协株式会社 | Robot arm and robot |
| JP2007044839A (en) * | 2005-08-11 | 2007-02-22 | Toshiba Mach Co Ltd | Industrial robot |
| CN103016629A (en) * | 2011-09-27 | 2013-04-03 | 株式会社安川电机 | Gear unit and robot |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110944806A (en) * | 2017-07-28 | 2020-03-31 | 日本电产三协株式会社 | Industrial robot |
| CN110666784A (en) * | 2018-07-03 | 2020-01-10 | 日本电产三协株式会社 | Industrial robot |
| CN110666784B (en) * | 2018-07-03 | 2022-06-07 | 日本电产三协株式会社 | Industrial robot |
| CN109253232A (en) * | 2018-09-21 | 2019-01-22 | 上海飞珀机器人科技有限公司 | A kind of double freedom gear-box mould group |
| CN117584162A (en) * | 2024-01-19 | 2024-02-23 | 广东金鼎光学技术股份有限公司 | Lens loading manipulator and optical lens mould pressing equipment |
| CN117584162B (en) * | 2024-01-19 | 2024-03-26 | 广东金鼎光学技术股份有限公司 | Lens loading manipulator and optical lens mould pressing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160098050A (en) | 2016-08-18 |
| JP2016147315A (en) | 2016-08-18 |
| JP6557475B2 (en) | 2019-08-07 |
| CN105856267B (en) | 2018-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105856267A (en) | Industrial robot | |
| CN100410029C (en) | Robot mechanism able to achieve full circle rotation and four-freedom hybrid grasping/releasing | |
| JP2023033330A (en) | Substrate processing apparatus and substrate transport device | |
| US11078734B2 (en) | Gripper device for gripping a pipe | |
| TWI526289B (en) | Industrial robots | |
| CN103846905B (en) | Dual Arm Vacuum Robot | |
| US6109860A (en) | Two-armed transfer robot | |
| CN100410028C (en) | Robot mechanism able to achieve full circle rotation and four-freedom hybrid grasping/releasing | |
| CN107407392B (en) | Transmission device mounting kit | |
| WO2011079631A1 (en) | Guyed serial manipulator | |
| CN105026115B (en) | With the robot with the arm for not waiting interconnecting pieces length | |
| CN110808225A (en) | Industrial robot | |
| CN102085658A (en) | Horizontal multi-joint robot and transportation apparatus including the same | |
| CN101790441A (en) | Industrial robot | |
| CN109805884A (en) | Radial dilatation device for microrobot | |
| JPH10329059A (en) | Conveying robot device for two-arm system | |
| CN102472369B (en) | Rotation transmission mechanism, conveyance device and drive device | |
| CN105114536B (en) | For robot or the planetary gearing speed reducer of joint of mechanical arm | |
| CN204610711U (en) | Speed change gear | |
| KR20090127334A (en) | Conveyor | |
| CN109311152A (en) | Conveying device | |
| CN101652228B (en) | Conveyor | |
| CN105798947A (en) | Reconfigurable rope-driven tandem decoupling mechanical arm joint and working method thereof | |
| CN207814391U (en) | Speed reducer and robot with same | |
| JP7047301B2 (en) | transmission |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |