CN105835279A - Machining template used for manufacturing flexible micro-hole sound absorbing film and manufacturing method for flexible micro-hole sound absorbing film - Google Patents
Machining template used for manufacturing flexible micro-hole sound absorbing film and manufacturing method for flexible micro-hole sound absorbing film Download PDFInfo
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- CN105835279A CN105835279A CN201610304383.0A CN201610304383A CN105835279A CN 105835279 A CN105835279 A CN 105835279A CN 201610304383 A CN201610304383 A CN 201610304383A CN 105835279 A CN105835279 A CN 105835279A
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- lower bolster
- cope match
- plate pattern
- array
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/34—Component parts, details or accessories; Auxiliary operations
- B29C41/38—Moulds, cores or other substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3814—Porous moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3828—Moulds made of at least two different materials having different thermal conductivities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3892—Preparation of the model, e.g. by assembling parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/04—Rotational or centrifugal casting, i.e. coating the inside of a mould by rotating the mould
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Soundproofing, Sound Blocking, And Sound Damping (AREA)
Abstract
The invention relates to a machining template used for manufacturing a flexible micro-hole sound absorbing film and a manufacturing method for the flexible micro-hole sound absorbing film. Compared with the prior art, the defect that a flexible micro-hole sound absorbing film meeting the acoustic noise reduction requirement is hard to manufacture is overcome. The machining template comprises an upper template body. The upper template body is provided with circular hole arrays. Each circular hole array comprises a plurality of circular holes. The upper template body is hinged to a lower template body. When the upper template body is pressed on the lower template body, cylinder arrays are inserted in the circular hole arrays. The diameter of cylinders ranges from 10 microns to 500 microns, and the height of the cylinders ranges from 60 microns to 3.01 millimeters. The diameter of the circular holes is larger than the diameter of the cylinders. The depth of the circular holes is larger than the height of the cylinders. The practicable, economical and environment-friendly manufacturing method and machining device are provided according to the manufacturing complexity of the flexible micro-hole sound absorbing film, and noise reduction requirements of devices of different shapes can be met.
Description
Technical field
The present invention relates to noise reduction technology field, a kind of processing template for making flexible microporous sound absorbing membrane and the manufacture method of flexible microporous sound absorbing membrane.
Background technology
Being proposed porous plate acoustic adsorption device by Ma Dayou professor is a kind of important sound-absorbing material, noise reduction is excellent, have moistureproof, high temperature resistant, pollution-free, the advantages such as high velocity air impact can be born, through being widely used in noise control every field, it is described as 21 century most potential green sound absorption structure.
Porous plate acoustic adsorption device is the resonance sound-absorbing structure that cavity is compounded to form after microperforated panel and plate, and the most topmost ingredient is microperforated panel, is i.e. provided with the thin plate of a large amount of micropore on plate face.Its sound absorbing mechanism is, a large amount of micropores and thin plate cavity composition resonance sound-absorbing structure below, when sound wave passes the thin plate having a large amount of micropore, micro porous hollow edema caused by disorder of QI makes acoustic energy be converted into heat energy with relative motion and the friction of micropore inner wall surface and is dissipated, and plays the effect of sqouynd absorption lowering noise.
Existing microperforated panel substantially uses traditional mechanical punching techniques to process micropore, and aperture is typically at 0.2-1.0mm.Owing to aperture is relatively big, therefore wide band sound absorption relative narrower, the most only 1-2 octave, and monolayer porous plate acoustic adsorption device only one of which formant, it is difficult to improve further.Theoretical according to microperforated panel, reduce the aperture of microperforated panel, and suitably increase density of such perforation, sound sucting band can be widened while keeping relatively high acoustic absorption coefficient.Result of calculation shows, when aperture is reduced to 0.1mm(i.e. 100um) time, take central resonance frequency 1000Hz, using acoustic absorptivity 0.5 as bottom line, then the octave of monolayer porous plate acoustic adsorption device can reach 2.5.Continue to reduce aperture to below 100um, moreover it is possible to widen sound sucting band further, even up to its wide band sound absorption limit, but this density of such perforation needing to reach every square meter more than million, use machinery punching techniques to be obviously difficulty with.
Additionally, current most of microperforated panel is all rigid material, it is unlikely to deform.Needs along with reality application, increasing occasion begins with the porous plate acoustic adsorption device of light and thin, such as plastic plate, plywood, lucite etc., and in architectural use can the transparent material of daylighting, but lack flexibility with the microperforated panel of these materials processings, deflection is little, and some have the noise source noise reduction of distinctive appearance to be less suitable for use in electromotor etc..Also having researcher to use in mechanical stamping and textile industry and simplify the processing perforated films such as puncturing technique, but its processing aperture ratio is relatively big, precision is the highest, uses limited material, is difficult to batch machining and produces.
In field of biomedical research, if patent name is microwell array goods and using method (CN102665916A, 20120912) technical scheme, it uses the method that template stamped method makes flexible microporous diaphragm, there is the template of multiple projection with surface, flowable resin combination is applied in template, removes from described instrument after solidification, be finally made flexible microporous array.
In acoustic investigation field, for another example patent name is the patent document of manufacture method (application number: 201310301581.8) of flexible ultramicropore broadband microperforated panel, it uses micro-machining to make template, template surface has multiple cylindrical-array, liquid polymer material is applied in template, remove from described template after solidification, obtain flexible microperforated panel.
But the above method is all to use single template, its surface does not the most make anti-adherent coating, its shortcoming is: when for processing flexibility ultramicropore microperforated panel, because aperture is the least, below 100 microns, in order to obtain preferable noise reduction, need density of such perforation increases to more than every square meter million hole count, and microperforated panel thickness more than 0.1mm to be reached, in template, corresponding cylindrical-array density also to reach every square meter more than 1,000,000 cylinders, cylinder height 0.1mm to be exceeded, therefore after being deposited in template when liquid polymer material and solidify, cause adhesion very big because contact area is big between the two, cause flexible membrane to be difficult to from template and peel off desorption, or cause flexible membrane and damaged template after Bao Liing.Additionally, the flexible membrane punching rate using single mode plate method to make is the highest, a lot of micropores do not penetrate, and the micropore pass penetrated on a small quantity rule not is with complete, and noise reduction is poor.Therefore single template can not well be applied to field of acoustics making flexible microporous sound absorbing membrane and sound absorber thereof.
How for the characteristic of flexible microporous diaphragm required in field of acoustics, the tools and the manufacture method that work out a kind of flexible microporous sound absorbing membrane have become as urgent need and solve the technical problem that.
Summary of the invention
The invention aims to the defect solving to be difficult to produce the flexible microporous sound absorbing membrane meeting acoustic noise reduction requirement in prior art, it is provided that the manufacture method of a kind of processing template and flexible microporous sound absorbing membrane for making flexible microporous sound absorbing membrane is to solve the problems referred to above.
To achieve these goals, technical scheme is as follows:
A kind of processing template for making flexible microporous sound absorbing membrane, including lower bolster, described lower bolster is provided with cylindrical-array, and cylindrical-array includes several cylinders,
Also including cope match-plate pattern, cope match-plate pattern is provided with array of circular apertures, and array of circular apertures includes several circular holes, and cope match-plate pattern is hinged on lower bolster, and when cope match-plate pattern is pressed on lower bolster, cylindrical-array is inserted in array of circular apertures；Described cylindrical a diameter of 10 microns-500 microns, cylindrical height is 60 microns-3.01 millimeters, and the diameter of described circular hole is more than cylindrical diameter, and the degree of depth of circular hole is more than cylindrical height.
Described cylindrical-array distribution density on lower bolster is 104
-107Individual/square metre.
Described lower bolster is provided with support platform, supports platform and is positioned at by cylindrical-array, and the height supporting platform is 50 microns-3 millimeters.
Also including heightening base, heightening base is arranged on the sidepiece of lower bolster, and the top of heightening base is provided with hinged seat, and the vertical height of hinged seat to lower bolster upper surface is 50 microns-3 millimeters, and cope match-plate pattern sidepiece is provided with hinged block, and hinged block is arranged on hinged seat by screw.
The manufacture method of flexible microporous sound absorbing membrane, comprises the following steps:
The making of cope match-plate pattern, using micromachining technology to make cope match-plate pattern, described micromachining technology includes microelectromechanical processes, X-ray synchrotron radiation lithography electroforming die-manufacturing method, UV LIGA processing method, laser processing and electric discharge machining method；
The making of lower bolster, uses micromachining technology to make lower bolster；
Utilize cope match-plate pattern and lower bolster to make flexible microporous sound absorbing membrane, cope match-plate pattern is hingedly mounted on lower bolster together with, make flexible microporous sound absorbing membrane.
The making of described lower bolster uses microelectromechanical processes, and it comprises the following steps:
The monocrystalline polished silicon slice that selection diameter 3 inches, crystal orientation are 100, thickness is 500 microns, carries out Chemical cleaning to monocrystalline polished silicon slice, then is dried process；
On the burnishing surface of monocrystalline polished silicon slice, growth deposits silica membrane and the metallic aluminium thin film of 200 nanometer thickness of 600 nanometer thickness successively；
Metallic aluminium thin film is coated the photoresist that a layer thickness is 2 microns；
Carry out the mechanical mask exposure of front lighting；
Carry out developing, fixing；
The corrosion window of front side aluminum is opened；
The corrosion window of front silicon dioxide is opened；
Erosion removal front lighting photoresist；
Using inductively coupled plasma deep etching process to etch the degree of depth of the extremely design of the silicon at corrosion window, etching is without metallic aluminium mask pattern and the monocrystal silicon of earth silicon mask figure protection zone, until the required degree of depth is to obtain meeting the silicon cylindrical-array of design；
Remove front metal aluminum mask layer；
Remove front earth silicon mask layer；
The coating of one layer of anti-adhesion coating material is all made at the upper surface of lower bolster and cylindrical outer surface.
The making of described cope match-plate pattern uses laser processing, and it comprises the following steps:
Select 3 inches of rustless steels as be processed into perforation mould material, be fixed in and can carry out on the platform that bidimensional moves in horizontal plane；
Pulsed laser is fixed on the surface of mould material, adjusts laser instrument so that it is the laser beam of transmitting is vertical with mould material；
Open laser instrument, the most under software, mobile platform in horizontal plane, laser beam is made directly by the distance between each circular hole, the subregion of mould material to be spaced setting platform displacement interval, highly set the ablation time by laser beam ablation speed and required ablation and carry out ablation, until processing the cope match-plate pattern bored a hole being made up of stainless steel mold panel material；
The coating of one layer of anti-adhesion coating material is made at the lower surface of cope match-plate pattern and the inwall of circular hole.
Described utilize cope match-plate pattern and lower bolster making flexible microporous sound absorbing membrane comprise the following steps:
Together with cope match-plate pattern is hingedly mounted on lower bolster；
Use spin coating or casting process uniform deposition on lower bolster the flexible polymeric materials of liquid；
Cope match-plate pattern is pressed on lower bolster so that cylindrical-array is inserted in array of circular apertures；
The polymeric material being deposited between cope match-plate pattern surface and lower bolster surface is carried out cured；
After thing material to be polymerized solidification, open cope match-plate pattern, slough lower bolster, it is thus achieved that the flexible ultramicropore sound absorbing membrane that this flexible polymeric materials is made.
The coating of described anti-adhesion coating material uses radio-frequency sputtering, sprays or infiltrates technique and makes, and the coating layer thickness of anti-adhesion coating material is 100 nanometer-10 microns.
Described flexible polymeric materials is polyurethane, polyimides, silica gel, polrvinyl chloride, polyethylene terephthalate, polyethylene, PEN, Kynoar, polypropylene, orient polypropylene film, bidirectional stretching polypropylene film, cast polypropylene film or polyacrylic plastics.
Beneficial effect
Processing template for making flexible microporous sound absorbing membrane of the present invention a kind of and the manufacture method of flexible microporous sound absorbing membrane, the complexity compared with prior art made for flexible microporous sound absorbing membrane, propose a kind of the most economic and environment-friendly practical manufacture method and processing unit (plant), it is possible to meet the noise reduction demand of difformity equipment.
Instant invention overcomes the shortcoming that prior art mesoporous is big, wide band sound absorption is narrower, sound absorbing capabilities is poor, it is achieved that mass production, process velocity are fast, low cost, and machining accuracy is high, and the concordance in aperture is good, compact conformation, and volume is little.Can also be according to using needs, neatly by the template of multiple cylindrical-array template splicing Cheng Geng great, it is used for making larger sized flexible microperforated panel.The present invention gives the span of structural parameters, in applying reality, the size Selection of concrete structure has directive significance, the micropore size obtained can as little as some tens of pm, acoustic frequency bandwidth, there is economic implications.
The manufacture method of the flexible microporous sound absorbing membrane that the present invention proposes, its manufacture method is easy, and micropunch sound absorbing membrane itself has the biggest flexibility, flexible porous plate acoustic adsorption device can also be combined into, the external shape highly adapting to origin of target noise (such as all kinds of electromotors etc.) can be deformed by deep camber, it is carried out " close-fitting type " noise reduction.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the structural representation of lower bolster in the present invention；
Fig. 3 is the structural representation of cope match-plate pattern in the present invention；
Fig. 4 is hinged seat and the mounting structure schematic diagram of hinged block in the present invention；
Fig. 5 is the structural representation that the present invention uses state；
Fig. 6 is the structural representation of the flexible microporous sound absorbing membrane that the present invention produces；
Wherein, 1-cope match-plate pattern, 2-lower bolster, 3-array of circular apertures, 4-cylindrical-array, 5-circular hole, 6-cylinder, 7-support platform, 8-heightening base, 9-hinged seat, 10-hinged block.
Detailed description of the invention
By making the architectural feature to the present invention and effect of being reached have a better understanding and awareness, coordinate detailed description in order to preferred embodiment and accompanying drawing, be described as follows:
As it is shown in figure 1, a kind of processing template for making flexible microporous sound absorbing membrane of the present invention, including cope match-plate pattern 1.As in figure 2 it is shown, lower bolster 2 is the single mode board manufacturing method used in prior art, it is low to there is into porosity in it, the problem of the easy adhesion of manufacturing process.Lower bolster 2 is provided with cylindrical-array 4, and cylindrical-array 4 is the array set of multiple cylinder 6 composition.
As it is shown on figure 3, cope match-plate pattern 1 is used for coordinating lower bolster 2 to use, cope match-plate pattern 1 is hinged on lower bolster 2.Cope match-plate pattern 1 is provided with array of circular apertures 3, and array of circular apertures 3 is the array set being made up of multiple circular holes 5.When cope match-plate pattern 1 is pressed on lower bolster 2, cylindrical-array 4 is inserted in array of circular apertures 3, is the manufacturing process of flexible microporous sound absorbing membrane, is inserted in multiple circular hole 5 by multiple cylinders 6, forms microcellular structure.Owing to the aperture of the flexible microporous sound absorbing membrane used in field of acoustics is the least, below 100 microns, therefore for the size particular design to be carried out of cylinder 6, a diameter of 10 microns-500 microns of cylinder 6, the height of cylinder 6 is 60 microns-3.01 millimeters.In order to be preferably inserted in array of circular apertures 3 by cylindrical-array 4, the diameter of circular hole 5 is slightly larger than the diameter of cylinder 6, and the degree of depth of circular hole 5 is slightly larger than the height of cylinder 6.
In order to obtain preferable noise reduction, need the density of such perforation of flexible microporous sound absorbing membrane increases to more than every square meter million hole count, and microperforated panel thickness more than 0.1mm to be reached.Therefore, the cylindrical-array 4 distribution density on lower bolster 2 can be 104 -107Individual/square metre so that in lower bolster 2, the density of corresponding cylindrical-array 4 reaches every square meter more than 1,000,000 cylinders 6.At the same time it can also be provided with support platform 7 on lower bolster 2, supporting platform 7 and be positioned at cylindrical-array 4 side, it may be preferable to set 2,2 support platforms 7 are corresponding in mirror image based on cylindrical-array 4.The height supporting platform 7 can be 50 microns-3 millimeters, so when 1 time pressure template 2 of cope match-plate pattern, the gap of 50 microns-3 millimeters is produced between cope match-plate pattern 1 and lower bolster 2, then can be by the THICKNESS CONTROL of flexible microporous sound absorbing membrane in the range of 50 microns-3 millimeters, thus according to the design requirement to noise reduction, meet the making needs of different-thickness flexible microporous sound absorbing membrane.
Because of the design of support platform 7, in order to during realizing 1 time pressure template 2 of cope match-plate pattern, cylindrical-array 4 is inserted in array of circular apertures 3 very well, it is also possible to include the design of heightening base 8.As shown in Figure 4 and Figure 5, heightening base 8 is arranged on the sidepiece of lower bolster 2, the top of heightening base 8 is provided with hinged seat 9, the vertical height of hinged seat 9 to lower bolster 2 upper surface is 50 microns-3 millimeters, the height design giving 50 microns-3 millimeters that support platform 7 provides redundant space, and makes the flexible microporous film thickness made uniform.Cope match-plate pattern 1 sidepiece is provided with hinged block 10, and hinged block 10 is arranged on hinged seat 9 by screw.
Here, also provide for utilizing the method carrying out flexible microporous sound absorbing membrane making for the processing template making flexible microporous sound absorbing membrane of the present invention, comprise the following steps:
The first step, the making of lower bolster 2.Using micromachining technology to make lower bolster 2, described micromachining technology includes microelectromechanical processes, X-ray synchrotron radiation lithography electroforming die-manufacturing method, UV LIGA processing method, laser processing and electric discharge machining method.Using, at this, the making illustrating lower bolster as a example by microelectromechanical processes, it specifically includes following steps:
(1) the monocrystalline polished silicon slice that to select diameter 3 inches, crystal orientation be 100, thickness is 500 microns, carries out Chemical cleaning to monocrystalline polished silicon slice, then is dried process.
(2) on the burnishing surface of monocrystalline polished silicon slice, growth deposits silica membrane and the metallic aluminium thin film of 200 nanometer thickness of 600 nanometer thickness successively.
(3) on metallic aluminium thin film, the photoresist (positive glue) that a layer thickness is 2 microns is coated.
(4) the mechanical mask exposure of front lighting is carried out.
(5) carry out developing, fixing.
(6) corrosion window of front side aluminum is opened.
(7) corrosion window of front silicon dioxide is opened.
(8) erosion removal front lighting photoresist.
(9) inductively coupled plasma deep etching process is used to etch the silicon at corrosion window to the degree of depth designed; etching is without metallic aluminium mask pattern and the monocrystal silicon of earth silicon mask figure protection zone, until the required degree of depth is to obtain meeting the silicon cylindrical-array of design.
(10) front metal aluminum mask layer is removed.
(11) front earth silicon mask layer is removed.
(12) coating of one layer of anti-adhesion coating material is all made at the upper surface of lower bolster 2 and cylinder 6 outer surface.At this, after depositing due to liquid polymer material and solidify, cause greatly adhesion very big between liquid polymer material and cope match-plate pattern 1 or lower bolster 2 because contact area, flexible membrane is difficult to cause the damage of flexible microporous sound absorbing membrane after cope match-plate pattern 1 or lower bolster 2 peel off desorption, or stripping.If lower bolster 2 and cope match-plate pattern 1 not being carried out pretreatment, easily cause breakage after the polymeric material demoulding of flexibility, even it is difficult to the demoulding, the adhesion caused to prevent contact area big is the biggest, it is therefore desirable to the upper surface of lower bolster 2 and cylinder 6 outer surface all make the coating of one layer of anti-adhesion coating material.The coating of anti-adhesion coating material can use radio-frequency sputtering, sprays or infiltrate technique and make, it is therefore an objective to reduce its adhesiveness, in order to flexible polymeric material demoulding from lower bolster 2.The coating layer thickness of anti-adhesion coating material is 100 nanometer-10 microns, and anti-adhesion coating material can select polytetrafluoroethylene (PTFE), perfluoroethylene-propylene (FEP), ethylene-tetrafluoroethylene copolymer (ETFE), tetrafluoroethylene-perfluoro alkoxy vinyl ethers copolymer (PFA), ethylene-chlorotrifluoro-ethylene copolymer (ECTFE), polyvinyl fluoride (PVF), Kynoar (PVDF), siloxanes.
Second step, the making of cope match-plate pattern 1, use micromachining technology that cope match-plate pattern 1 is made.At this to use laser processing to be illustrated as a example by making cope match-plate pattern 1, it comprises the following steps:
(1) select 3 inches of rustless steels as being processed into the mould material of perforation, be fixed in and can carry out on the platform that bidimensional moves in horizontal plane.
(2) pulsed laser is fixed on the surface of mould material, adjusts laser instrument so that it is the laser beam of transmitting is vertical with mould material.
(3) laser instrument is opened, the most under software, mobile platform in horizontal plane, laser beam is made directly by the distance between each circular hole, the subregion of mould material to be spaced setting platform displacement interval, highly set the ablation time by laser beam ablation speed and required ablation and carry out ablation, until processing the cope match-plate pattern 1 bored a hole being made up of stainless steel mold panel material.
(4) in like manner, make the coating of one layer of anti-adhesion coating material at the lower surface of cope match-plate pattern 1 and the inwall of circular hole 5, reduce its adhesiveness, in order to flexible polymeric material demoulding from cope match-plate pattern 1.
In above-mentioned steps, first making cope match-plate pattern 1 or lower bolster 2 is the most permissible, the manufacturing process of two steps does not has the restriction of tandem.
3rd step, utilizes cope match-plate pattern 1 and lower bolster 2 to make flexible microporous sound absorbing membrane.As it is shown in figure 5, together with being hingedly mounted on lower bolster 2 by cope match-plate pattern 1, make flexible microporous sound absorbing membrane.It specifically comprises the following steps that
(1) together with cope match-plate pattern 1 is hingedly mounted on lower bolster 2.
(2) use spin coating or casting process uniform deposition on lower bolster 2 flexible polymeric materials of liquid, i.e. it is deposited on the cylindrical-array 4 of lower bolster 2, wherein, flexible polymeric materials can be polyurethane, polyimides, silica gel, polrvinyl chloride, polyethylene terephthalate, polyethylene, PEN, Kynoar, polypropylene, orient polypropylene film, bidirectional stretching polypropylene film, cast polypropylene film or polyacrylic plastics.
(3) cope match-plate pattern 1 is pressed on lower bolster 2 so that cylindrical-array 4 is inserted in array of circular apertures 3.
(4) polymeric material being deposited between cope match-plate pattern 1 surface and lower bolster 2 surface is carried out cured, it is heated, air-dries process.
(5), after thing material to be polymerized solidification, open cope match-plate pattern 1, slough lower bolster 2, as shown in Figure 6, it is thus achieved that the flexible ultramicropore sound absorbing membrane that this flexible polymeric materials is made.
Flexible ultramicropore sound absorbing membrane after completing can be bonded to three-layer composite structure with middle support layer and back of the body chamber bottom, or directly flexibility microperforated panel is bonded to two layer composite structure with back of the body chamber bottom, thus obtain flexible porous plate acoustic adsorption device, use in vibration and noise reducing environment.
The ultimate principle of the present invention, principal character and advantages of the present invention have more than been shown and described.Skilled person will appreciate that of the industry; the present invention is not restricted to the described embodiments; the principle of the simply present invention described in above-described embodiment and description; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements both fall within the range of claimed invention.The protection domain of application claims is defined by appending claims and equivalent thereof.
Claims (10)
1., for making a processing template for flexible microporous sound absorbing membrane, including lower bolster (2), described lower bolster (2) is provided with cylindrical-array (4), and cylindrical-array (4) includes several cylinders (6), it is characterised in that:
Also include cope match-plate pattern (1), cope match-plate pattern (1) is provided with array of circular apertures (3), and array of circular apertures (3) includes that several circular holes (5), cope match-plate pattern (1) are hinged on lower bolster (2), when cope match-plate pattern (1) is pressed on lower bolster (2), cylindrical-array (4) is inserted in array of circular apertures (3)；A diameter of 10 microns-500 microns of described cylinder (6), the height of cylinder (6) is 60 microns-3.01 millimeters, and the diameter of described circular hole (5) is more than the diameter of cylinder (6), and the degree of depth of circular hole (5) is more than the height of cylinder (6).
A kind of processing template for making flexible microporous sound absorbing membrane the most according to claim 1, it is characterised in that: the described cylindrical-array (4) distribution density on lower bolster (2) is 104 -107Individual/square metre.
A kind of processing template for making flexible microporous sound absorbing membrane the most according to claim 1, it is characterized in that: described lower bolster (2) is provided with support platform (7), supporting platform (7) and be positioned at cylindrical-array (4) side, the height supporting platform (7) is 50 microns-3 millimeters.
A kind of processing template for making flexible microporous sound absorbing membrane the most according to claim 1, it is characterized in that: also include heightening base (8), heightening base (8) is arranged on the sidepiece of lower bolster (2), the top of heightening base (8) is provided with hinged seat (9), hinged seat (9) is 50 microns-3 millimeters to the vertical height of lower bolster (2) upper surface, cope match-plate pattern (1) sidepiece is provided with hinged block (10), and hinged block (10) is arranged on hinged seat (9) by screw.
The manufacture method of flexible microporous sound absorbing membrane the most according to claim 1, it is characterised in that comprise the following steps:
51) making of cope match-plate pattern (1), using micromachining technology to make cope match-plate pattern (1), described micromachining technology includes microelectromechanical processes, X-ray synchrotron radiation lithography electroforming die-manufacturing method, UV LIGA processing method, laser processing and electric discharge machining method；
52) making of lower bolster (2), uses micromachining technology to make lower bolster (2)；
53) utilize cope match-plate pattern (1) and lower bolster (2) to make flexible microporous sound absorbing membrane, cope match-plate pattern (1) is hingedly mounted on lower bolster (2) together with, making flexible microporous sound absorbing membrane.
The manufacture method of flexible microporous sound absorbing membrane the most according to claim 5, it is characterised in that the making of described lower bolster uses microelectromechanical processes, it comprises the following steps:
61) the monocrystalline polished silicon slice that to select diameter 3 inches, crystal orientation be 100, thickness is 500 microns, carries out Chemical cleaning to monocrystalline polished silicon slice, then is dried process；
62) on the burnishing surface of monocrystalline polished silicon slice, growth deposits silica membrane and the metallic aluminium thin film of 200 nanometer thickness of 600 nanometer thickness successively；
63) on metallic aluminium thin film, the photoresist that a layer thickness is 2 microns is coated；
64) the mechanical mask exposure of front lighting is carried out；
65) carry out developing, fixing；
66) corrosion window of front side aluminum is opened；
67) corrosion window of front silicon dioxide is opened；
68) erosion removal front lighting photoresist；
69) inductively coupled plasma deep etching process is used to etch the silicon at corrosion window to the degree of depth designed; etching is without metallic aluminium mask pattern and the monocrystal silicon of earth silicon mask figure protection zone, until the required degree of depth is to obtain meeting the silicon cylindrical-array of design；
610) front metal aluminum mask layer is removed；
611) front earth silicon mask layer is removed；
612) coating of one layer of anti-adhesion coating material is all made at the upper surface of lower bolster (2) and cylinder (6) outer surface.
The manufacture method of flexible microporous sound absorbing membrane the most according to claim 5, it is characterised in that the making of described cope match-plate pattern uses laser processing, it comprises the following steps:
71) select 3 inches of rustless steels as being processed into the mould material of perforation, be fixed in and can carry out on the platform that bidimensional moves in horizontal plane；
72) pulsed laser is fixed on the surface of mould material, adjusts laser instrument so that it is the laser beam of transmitting is vertical with mould material；
73) laser instrument is opened, the most under software, mobile platform in horizontal plane, laser beam is made directly by the distance between each circular hole, the subregion of mould material to be spaced setting platform displacement interval, highly set the ablation time by laser beam ablation speed and required ablation and carry out ablation, until processing the cope match-plate pattern (1) bored a hole being made up of stainless steel mold panel material；
74) coating of one layer of anti-adhesion coating material is made at the lower surface of cope match-plate pattern (1) and the inwall of circular hole (5).
The manufacture method of flexible microporous sound absorbing membrane the most according to claim 5, it is characterised in that described utilize cope match-plate pattern and lower bolster making flexible microporous sound absorbing membrane comprise the following steps:
81) together with cope match-plate pattern (1) is hingedly mounted on lower bolster (2)；
82) use spin coating or casting process uniform deposition on lower bolster (2) flexible polymeric materials of liquid；
83) cope match-plate pattern (1) is pressed on lower bolster (2) so that cylindrical-array (4) is inserted in array of circular apertures (3)；
84) polymeric material being deposited between cope match-plate pattern (1) surface and lower bolster (2) surface is carried out cured；
85), after thing material to be polymerized solidification, open cope match-plate pattern (1), slough lower bolster (2), it is thus achieved that the flexible ultramicropore sound absorbing membrane that this flexible polymeric materials is made.
9. according to the manufacture method of the flexible microporous sound absorbing membrane described in claim 6 or 7, it is characterized in that: the coating of described anti-adhesion coating material uses radio-frequency sputtering, sprays or infiltrates technique and makes, and the coating layer thickness of anti-adhesion coating material is 100 nanometer-10 microns.
The manufacture method of flexible microporous sound absorbing membrane the most according to claim 8, it is characterised in that: described flexible polymeric materials is polyurethane, polyimides, silica gel, polrvinyl chloride, polyethylene terephthalate, polyethylene, PEN, Kynoar, polypropylene, orient polypropylene film, bidirectional stretching polypropylene film, cast polypropylene film or polyacrylic plastics.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180000649A1 (en) * | 2015-04-21 | 2018-01-04 | Zhuhai Zorosy Technology Co., Ltd. | Earcap and earplug |
| CN111844564A (en) * | 2020-08-26 | 2020-10-30 | 河北环友橡塑制品有限公司 | Production mold and forming method of fine-seam rubber sieve plate |
| CN114477078A (en) * | 2022-04-08 | 2022-05-13 | 中国科学技术大学 | Processing method and application of integrated cross-scale micro-nano column array |
| CN117464893A (en) * | 2023-12-27 | 2024-01-30 | 遂宁睿杰兴科技有限公司 | PDMS film forming die and PDMS film preparation method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102508410A (en) * | 2011-10-27 | 2012-06-20 | 南京大学 | Composite nanometer impressing mold plate with sandwich structure and preparation method of composite nanometer impressing mold plate |
| CN103387206A (en) * | 2013-07-18 | 2013-11-13 | 中国科学院合肥物质科学研究院 | Manufacturing method of ultramicropore broadband flexible micro-perforated plate |
| CN205601055U (en) * | 2016-05-06 | 2016-09-28 | 中国科学院合肥物质科学研究院 | A processing template for making flexible micropore sound absorption membrane |
-
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102508410A (en) * | 2011-10-27 | 2012-06-20 | 南京大学 | Composite nanometer impressing mold plate with sandwich structure and preparation method of composite nanometer impressing mold plate |
| CN103387206A (en) * | 2013-07-18 | 2013-11-13 | 中国科学院合肥物质科学研究院 | Manufacturing method of ultramicropore broadband flexible micro-perforated plate |
| CN205601055U (en) * | 2016-05-06 | 2016-09-28 | 中国科学院合肥物质科学研究院 | A processing template for making flexible micropore sound absorption membrane |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180000649A1 (en) * | 2015-04-21 | 2018-01-04 | Zhuhai Zorosy Technology Co., Ltd. | Earcap and earplug |
| CN111844564A (en) * | 2020-08-26 | 2020-10-30 | 河北环友橡塑制品有限公司 | Production mold and forming method of fine-seam rubber sieve plate |
| CN114477078A (en) * | 2022-04-08 | 2022-05-13 | 中国科学技术大学 | Processing method and application of integrated cross-scale micro-nano column array |
| CN114477078B (en) * | 2022-04-08 | 2022-07-15 | 中国科学技术大学 | Processing method and application of integrated cross-scale micro-nano column array |
| CN117464893A (en) * | 2023-12-27 | 2024-01-30 | 遂宁睿杰兴科技有限公司 | PDMS film forming die and PDMS film preparation method |
| CN117464893B (en) * | 2023-12-27 | 2024-04-02 | 遂宁睿杰兴科技有限公司 | PDMS film forming die and PDMS film preparation method |
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