CN105810749B - N-type TFT - Google Patents

N-type TFT Download PDF

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Publication number
CN105810749B
CN105810749B CN201410848450.6A CN201410848450A CN105810749B CN 105810749 B CN105810749 B CN 105810749B CN 201410848450 A CN201410848450 A CN 201410848450A CN 105810749 B CN105810749 B CN 105810749B
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layer
nanometer tube
semiconductor carbon
carbon nanometer
semiconductor
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CN105810749A (en
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李关红
李群庆
金元浩
范守善
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Tsinghua University
Hongfujin Precision Industry Shenzhen Co Ltd
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Tsinghua University
Hongfujin Precision Industry Shenzhen Co Ltd
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Priority to CN201410848450.6A priority Critical patent/CN105810749B/en
Priority to TW104109112A priority patent/TWI553883B/en
Priority to US14/985,246 priority patent/US9583723B2/en
Publication of CN105810749A publication Critical patent/CN105810749A/en
Priority to US15/409,849 priority patent/US9786854B2/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80—Constructional details
    • H10K10/88—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/472—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only inorganic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/474—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221—Carbon nanotubes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/464—Lateral top-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Thin Film Transistor (AREA)

Abstract

The present invention relates to a kind of N-type TFTs comprising: a dielectric base；One grid, the grid are set to the surface of the dielectric base；One gate insulating layer, the gate insulating layer are set to surface of the grid far from dielectric base；Semiconductor carbon nanotube layer, the semiconductor carbon nanometer tube layer are set to surface of the gate insulating layer far from grid；One source electrode and a drain electrode, the source electrode and drain electrode interval setting, and be electrically connected respectively with the semiconductor carbon nanometer tube layer, the semiconductor carbon nanometer tube layer between source electrode and drain electrode forms a channel；One function medium layer, the function medium layer are set to the surface of the semiconductor carbon nanometer tube layer far from the gate insulating layer；It wherein, further comprise a magnesium oxide layer, the magnesium oxide layer is set between the semiconductor carbon nanometer tube layer and function medium layer, and contacts setting with semiconductor carbon nanometer tube layer, function medium layer respectively.

Description

N-type TFT
Technical field
The present invention relates to a kind of thin film transistor (TFT) more particularly to a kind of N-type film crystals based on magnesia dual dielectric layer Pipe.
Background technique
Carbon nanotube becomes the strong competing of new generation of semiconductor material due to its excellent electricity, optics and mechanical property The person of striving is widely used for the preparation and research of thin film transistor (TFT) at present.Scientific investigations showed that carbon nanotube manifests themselves as this Semiconductor is levied, but carbon nanotube shows as P-type semiconductor feature in such as air in general, so it is thin to be easy preparation p-type Film transistor.But only P-type TFT can greatly reduce the correlated performance of integrated circuit, increase loss.
In the prior art, the preparation method of the N-type TFT based on carbon nanotube mainly has chemical doping, selection low Workfunction metal does electrode material etc..However there is also some problems for these methods, can not such as be protected using the method for chemical doping It holds that device performance is steady in a long-term, and there is the latent defect of doping diffusion pollution；Selection low workfunction metal does electrode material, N-type unipolarity feature is showed unobvious.
Summary of the invention
In view of this, it is necessory to provide the N-type TFT that a kind of preparation method is simple, performance is stable.
A kind of N-type TFT comprising: a dielectric base；One grid, the grid are set to the dielectric base Surface；One gate insulating layer, the gate insulating layer are set to surface of the grid far from dielectric base；Semiconductor carbon Nanotube layer, the semiconductor carbon nanometer tube layer are set to surface of the gate insulating layer far from grid；One source electrode and a leakage Pole, the source electrode and drain electrode interval setting, and be electrically connected respectively with the semiconductor carbon nanometer tube layer, half between source electrode and drain electrode Conductor carbon nanotube layer forms a channel；One function medium layer, the function medium layer are set to the semiconductor carbon nanometer tube Surface of the layer far from the gate insulating layer；It wherein, further comprise a magnesium oxide layer, the magnesium oxide layer is set to described half Between conductor carbon nanotube layer and function medium layer, and setting is contacted with semiconductor carbon nanometer tube layer, function medium layer respectively.
Compared with prior art, N-type TFT provided by the invention has the advantage that since semiconductor carbon is received Mitron layer surface be provided with magnesium oxide layer and function medium layer composition dual dielectric layer so that the thin film transistor (TFT) show it is good Good N-type unipolarity and performance is stablized；And the setting of the magnesium oxide layer 102 may make the N of semiconductor carbon nanometer tube layer 101 Type characteristic further dramatically increases.
Detailed description of the invention
Fig. 1 is the cross-sectional view for the N-type TFT that first embodiment of the invention provides.
Fig. 2 is the stereoscan photograph of semiconductor carbon nanometer tube layer in first embodiment of the invention.
Fig. 3 is the I-V diagram of the thin film transistor (TFT) of a deposition of magnesium layer.
Fig. 4 is the I-V diagram of the only thin film transistor (TFT) of deposition function medium layer.
Fig. 5 is the I-V diagram of the N-type TFT of first embodiment of the invention.
Fig. 6 is the preparation method flow chart for the N-type TFT that first embodiment of the invention provides.
Fig. 7 is the cross-sectional view for the N-type TFT that second embodiment of the invention provides.
Fig. 8 is the preparation method flow chart for the N-type TFT that second embodiment of the invention provides.
Main element symbol description
N-type TFT 10,20
Semiconductor carbon nanometer tube layer 101
Magnesium oxide layer 102
Function medium layer 103
Source electrode 104
Drain electrode 105
Grid 106
Gate insulating layer 107
Another magnesium oxide layer 108
Dielectric base 110
Channel 125
Following specific embodiment will further illustrate the present invention in conjunction with above-mentioned attached drawing.
Specific embodiment
Below in conjunction with specific embodiment, to N-type TFT provided by the invention, the preparation of N-type TFT Method is described in further detail.
Referring to Fig. 1, the N-type TFT 10 that first embodiment of the invention provides, including a dielectric base 110, one Semiconductor carbon nanometer tube layer 101,105, one magnesium oxide layer 102 of a source electrode 104, one drain electrode, a function medium layer 103 and a grid 106.The semiconductor carbon nanometer tube layer 101 is set to 110 surface of dielectric base.The source electrode 104,105 interval setting of drain electrode, And it is electrically connected respectively with the semiconductor carbon nanometer tube layer 101.Semiconductor carbon nanometer tube between source electrode 104 and drain electrode 105 Layer 101 forms a channel 125.The function medium layer 103 is set to the semiconductor carbon nanometer tube layer 101 far from dielectric base 110 surface.The magnesium oxide layer 102 is set between the semiconductor carbon nanometer tube layer 101 and function medium layer 103, and Setting is contacted with the semiconductor carbon nanometer tube layer 101.The grid 106 is set to the function medium layer 103 far from described The surface of semiconductor carbon nanometer tube layer 101, and set with the semiconductor carbon nanometer tube layer 101, source electrode 104,105 insulation of drain electrode It sets.The N-type TFT 10 is top gate type thin film transistor.
Specifically, the dielectric base 110 plays a supportive role, and the material of the dielectric base 110 is unlimited, may be selected to be glass The flexible materials such as plastics, resin also may be selected in the hard materials such as glass, quartz, ceramics, diamond.Further, the dielectric base 110 be a flexible material, such as polyethylene terephthalate, polyethylene naphthalate, polyimides flexible material. In the present embodiment, the material of the dielectric base 110 is flexible material, preferably polyethylene terephthalate.It is described exhausted Edge substrate 110 is used to provide support to N-type TFT 10.
The semiconductor carbon nanometer tube layer 101 includes multiple carbon nanotubes, and multiple carbon nanotube is interconnected to form one Continuous conductive network structure.The semiconductor carbon nanometer tube layer 101 can be a pure nano-carbon tube structure, the pure nano-carbon tube Structure is made of multiple carbon nanotubes, and the orientation of multiple carbon nanotubes can be unordered, random, such as multiple carbon The reticular structure that nanotube intersects, winding arranges.The orientation of multiple carbon nanotubes in the semiconductor carbon nanometer tube layer 101 Be also possible to it is orderly, well-regulated, such as multiple carbon nanotubes arrange in the same direction or respectively in both directions orderly row Column.The semiconductor carbon nanometer tube layer 101 can also be by carbon nano-tube film, liner structure of carbon nano tube or carbon nanotube threadiness knot The combination of structure and carbon nano-tube film is constituted.The liner structure of carbon nano tube can be by single or more carbon nanometer arranged in parallel Pipeline composition.The semiconductor carbon nanometer tube layer 101 can be a self supporting structure, and so-called self-supporting refers to carbon nanotube layer not The carrier supported of large area is needed, as long as and providing support force with respect to both sides vacantly can keep itself stratiform shape on the whole State.The semiconductor carbon nanometer tube layer 101 also may be formed at the surface of an insulation support body.The semiconductor carbon nanometer tube layer 101 can be made of single-layer or multi-layer carbon nanotube.
The semiconductor carbon nanometer tube layer 101 is shown generally as semiconductor property.The semiconductor carbon nanometer tube layer 101 Middle semiconductive carbon nano tube proportion is greater than 66.7%, it is preferable that semiconductive carbon nano tube proportion is 90%- 100%, it is preferable that the semiconductor carbon nanometer tube layer 101 is made of the carbon nanotube of pure semiconductor.The semiconductor carbon is received Mitron layer 101 can be made of more staggered single-walled carbon nanotubes.Single wall carbon in the semiconductor carbon nanometer tube layer 101 is received The diameter of mitron is less than 2 nanometers, and the length of single-walled carbon nanotube is 2 microns -4 microns, the thickness of the semiconductor carbon nanometer tube layer 101 Degree is 0.5 nanometer -2 nanometers.Preferably, the diameter of the single-walled carbon nanotube is 0.9 nanometer -1.4 nanometers.
Referring to Fig. 2, the semiconductor carbon nanometer tube layer 101 is made of single layer single-walled carbon nanotube in the present embodiment, Semiconductive carbon nano tube proportion is 98% in the semiconductor carbon nanometer tube layer 101.The semiconductor carbon nanometer tube layer 101 In multiple single-walled carbon nanotubes intersect, be wound network structure, single-walled carbon nanotube in the semiconductor carbon nanometer tube layer 101 Diameter is 1.2 nanometers, i.e., the semiconductor carbon nanometer tube layer 101 is with a thickness of 1.2 nanometers.
The function medium layer 103 is set to the surface of the semiconductor carbon nanometer tube layer 101 far from dielectric base 110. Preferably, the function medium layer 103 is set to the whole surface of the semiconductor carbon nanometer tube layer 101.The function medium The material of layer 103 can carry out the semiconductor carbon nanometer tube layer 101 electron adulterated and empty with good insulation effect and isolation The effect of oxygen and hydrone in gas.In turn, the material (not including magnesia) for meeting above-mentioned condition is suitable for function and is situated between Matter layer 103, such as aluminium oxide, hafnium oxide, yttrium oxide.Specifically, the function medium layer 103 be set to the grid 106 with Between the semiconductor carbon nanometer tube layer 101, source electrode 104 and drain electrode 105, insulation can be played the role of, and due to the function The compact structure of energy dielectric layer 103, the function medium layer 103 may make in the semiconductor carbon nanometer tube layer 101 and air Oxygen and hydrone completely cut off；There are positive charge defects in the structure of the function medium layer 103, can be to the semiconductor carbon nanometer Tube layer 101 carry out it is electron adulterated so that semiconductor carbon nanometer tube layer 101 have N-type characteristic.The function medium layer 103 With a thickness of 20-40 nanometers.Preferably, the function medium layer 103 with a thickness of 25-30 nanometers.In the present embodiment, the function The material of dielectric layer 103 be aluminium oxide, the function medium layer 103 with a thickness of 30 nanometers.
The magnesium oxide layer 102 is set between the semiconductor carbon nanometer tube layer 101 and function medium layer 103, and with The contact of semiconductor carbon nanometer tube layer 101 setting.Specifically, the magnesium oxide layer 102 is continuous and is attached directly to described half Surface of the conductor carbon nanotube layer 101 far from dielectric base 110, the magnesium oxide layer 102 are attached to the semiconductor carbon nanometer The area on 101 surface of tube layer is more than or equal to 80%.Preferably, the magnesium oxide layer 102 is attached to the semiconductor carbon nanometer tube layer 101 whole surface, to ensure that carbon nanotube in the semiconductor carbon nanometer tube layer 101 and air are completely isolated.The oxidation Magnesium layer 102 is continuously covered in the surface of the channel 125, and ensures that channel 125 and air are completely isolated.The function medium layer 103 are attached directly to the surface of the magnesium oxide layer 102 far from semiconductor carbon nanometer tube layer 101.Preferably, the function medium layer 103 are attached to the whole surface of the magnesium oxide layer 102.
The magnesium oxide layer 102 can completely cut off the semiconductor carbon nanometer tube layer 101 and contact with the hydrone in air, and The hydrone also caning absorb in the semiconductor carbon nanometer tube layer 101.The magnesium oxide layer 102 reduces hydrone and receives with semiconductor carbon The probability that electronics combines in mitron layer 101, so that the electron amount in the semiconductor carbon nanometer tube layer 101 improves, and Correspondingly reduce the number of cavities in semiconductor carbon nanometer tube layer 101.So the magnesium oxide layer 102 can increase semiconductor carbon The N-type characteristic of nanotube layer 101, and accordingly reduce the p-type characteristic of semiconductor carbon nanometer tube layer 101.In turn, in the semiconductor After a magnesium oxide layer 102 is further arranged between carbon nanotube layer 101 and function medium layer 103, which can be significant The p-type characteristic of semiconductor carbon nanometer tube layer 101 is reduced, and makes the N-type characteristic of semiconductor carbon nanometer tube layer 101 further significant Increase.
The magnesium oxide layer 102 with a thickness of 1-15 nanometers.Preferably, the magnesium oxide layer 102 with a thickness of 1-10 nanometers. It is appreciated that structure will be more stable when the thickness of the magnesium oxide layer 102 is more than or equal to 1 nanometer, semiconductor layer carbon is reduced 101 number of cavities of nanotube layer is more significant；When the thickness of the magnesium oxide layer 102 is less than or equal to 15 nanometers, the grid 106 is got over Close to channel 125, source electrode 104, drain electrode 105, the modulation efficiency of thin film transistor (TFT) 10 can be correspondinglyd increase.It is described in the present embodiment Magnesium oxide layer 102 with a thickness of 1 nanometer.
Further, the surface that the semiconductor carbon nanometer tube layer 101 is contacted with dielectric base 110 may also comprise the oxidation Magnesium layer 102, so that opposite two surfaces of the semiconductor carbon nanometer tube layer 101 are all covered with magnesium oxide layer 102, semiconductor carbon Nanotube layer 101 is held between magnesium dioxide layer 102, thereby further ensures that the carbon in the semiconductor carbon nanometer tube layer 101 Nanotube is completely isolated with air.
The grid 106 is set to surface of the function medium layer 103 far from the semiconductor carbon nanometer tube layer 101, The grid 106 is by the function medium layer 103 and 125 insulation set of channel, and the length of the grid 106 can be smaller In the length of the channel 125.The grid 106 is made of conductive material, the conductive material may be selected to be metal, ITO, ATO, Conductive silver glue, conducting polymer and conductive carbon nanotube etc..The metal material can for aluminium, copper, tungsten, molybdenum, gold, titanium, palladium or The alloy of any combination.In the present embodiment, the grid 106 is the metal composite structure that metal Au and Ti are obtained, specifically, institute Stating metal composite structure is to be formed by metal Au in the surface recombination of metal Ti.
The source electrode 104, drain electrode 105 are made of conductive material, which may be selected to be metal, ITO, ATO, leads Electric elargol, conducting polymer and conductive carbon nanotube etc..The metal material can be aluminium, copper, tungsten, molybdenum, gold, titanium, palladium or appoint The combined alloy of meaning.Preferably, the source electrode 104 and drain electrode 105 is layer of conductive film, the conductive film with a thickness of 2 - 50 nanometers of nanometer.In the present embodiment, the metal composite structure that the source electrode 104, drain electrode 105 obtain for metal Au and Ti, specifically Ground, the metal composite structure are to be formed by metal Au in the surface recombination of metal Ti, the metal Ti with a thickness of 2 nanometers, Metal Au with a thickness of 50 nanometers.In the present embodiment, the source electrode 104, drain electrode 105 are arranged at intervals at the dielectric base 110 Surface, and two edges opposite with the semiconductor carbon nanometer tube layer 101 respectively are electrically connected, thus in the source electrode 104 and The channel 125 is formed between drain electrode 105.
In use, source electrode 104 is grounded, apply a grid voltage V on grid 106g, and apply one in drain electrode 105 Drain voltage Vd.When grid 106 applies certain positive voltage or negative voltage, electric field is generated in channel 125, and in channel 125 Carrier is generated at surface.With the increase of grid voltage, channel 125 is changed into carrier accumulation layer, when grid voltage reaches Source electrode 104 and drain electrode 105 between cut-in voltage when, source electrode 104 and drain electrode 105 between channel 125 be connected, thus can be in source Electric current is generated between pole 104 and drain electrode 105, so that thin film transistor (TFT) is in the open state.
Referring to Fig. 3, Fig. 3 is the test of the thin film transistor (TFT) of semiconductor carbon nanometer tube surface deposition of magnesium layer 102 Figure.It can be seen from the figure that the thin film transistor (TFT) of 101 surface deposition of magnesium layer 102 of semiconductor carbon nanometer tube layer, and do not deposit The thin film transistor (TFT) of magnesium oxide layer 102 compares, and p-type characteristic is substantially reduced, and N-type characteristic has corresponding promotion.
Referring to Fig. 4, Fig. 4 is the survey for the thin film transistor (TFT) that semiconductor carbon nanometer tube surface only deposits function medium layer 103 Attempt.It can be seen from the figure that 101 surface of semiconductor carbon nanometer tube layer only deposits the N of the thin film transistor (TFT) of function medium layer 103 Type characteristic dramatically increases, and p-type characteristic is not substantially change, and specifically, the thin film transistor (TFT) shows as bipolarity feature.
Referring to Fig. 5, Fig. 5 is the thin film transistor (TFT) that first embodiment of the invention provides.It can be seen from the figure that sinking simultaneously The thin film transistor (TFT) of the semiconductor carbon nanometer tube layer 101 of product magnesium oxide layer 102 and function medium layer 103 only shows as N-type feature.
A function medium layer is arranged in N-type TFT provided by the invention, 101 surface of semiconductor carbon nanometer tube layer 103 and a magnesium oxide layer 102, the compact structure of the function medium layer 103 and there are positive charge defects can be to the semiconductor Carbon nanotube layer 101 provides electronics, so that semiconductor carbon nanometer tube layer 101 has N-type characteristic；The magnesium oxide layer 102 can be every The exhausted semiconductor carbon nanometer tube layer 101 is contacted with the hydrone in air, and is absorbed in the semiconductor carbon nanometer tube layer 101 Hydrone reduces probability of the hydrone in conjunction with electronics in semiconductor carbon nanometer tube layer 101, receives to significantly reduce semiconductor carbon The p-type characteristic of mitron layer 101, and the setting of the magnesium oxide layer 102 may make the N-type of semiconductor carbon nanometer tube layer 101 special Property further dramatically increases.So the thin film transistor (TFT) 10 shows good N-type unipolarity and performance is stablized.
Referring to Fig. 6, first embodiment of the invention also provides a kind of preparation method of N-type TFT 10, the preparation Method successively the following steps are included:
S11 provides a dielectric base 110, forms semiconductor carbon nanotube layer 101 on 110 surface of dielectric base;
S12, forms a spaced source electrode 104 and a drain electrode 105 is electrically connected with the semiconductor carbon nanometer tube layer 101 It connects；
S13 forms a magnesium oxide layer far from the surface of the dielectric base 110 in the semiconductor carbon nanometer tube layer 101 102；
S14 forms a function medium far from the surface of the semiconductor carbon nanometer tube layer 101 in the magnesium oxide layer 102 Layer 103；And
S15 forms a grid 106 and described half far from the surface of the magnesium oxide layer 102 in the function medium layer 103 101 insulation set of conductor carbon nanotube layer.
In step s 11,101 overall performance of semiconductor carbon nanometer tube layer goes out good semiconductive.The semiconductor Carbon nanotube layer 101 can be only made of semiconductive carbon nano tube, can also be by semiconductive carbon nano tube and a small amount of metallicity carbon Nanotube collectively constitutes.
Specifically, the table of the dielectric base 110 can be arranged in the semiconductor carbon nanometer tube layer 101 by following steps Face:
Step S111 provides semiconductive carbon nano tube particle；
The semiconductive carbon nano tube particle is mixed with solvent, obtains a carbon nano tube suspension by step S112；
Carbon nanotube in the carbon nano tube suspension is deposited on the surface of the dielectric base 110 by step S113, Form semiconductor carbon nanotube layer 101.
In step S111, the semiconductive carbon nano tube particle can be the mixing being prepared by arc discharge method Type single-walled carbon nanotube, can also be further to obtain pure semiconductor carbon nanotube by Chemical Decomposition method or containing a small amount of metal Property carbon nanotube, as long as in the carbon nanotube particulate semiconductive carbon nano tube proportion be greater than 66.7% so that described Carbon nanotube particulate overall performance goes out semiconductive.In the present embodiment, the semiconductive carbon nano tube particle is to pass through The mixed type single-walled carbon nanotube that arc discharge method obtains obtains ratio containing semiconductive carbon nano tube using Chemical Decomposition For 98% carbon nanotube particulate.
In step S112, the method for forming carbon nano tube suspension can be for paddling process or ultrasonic dispersion etc., only Make the semiconductive carbon nano tube even particulate dispersion in the carbon nano tube suspension.It specifically, will be certain The semiconductive carbon nano tube particle of quality is placed in the solvent of certain volume, then ultrasound a period of time, so that described half Conducting carbon nanotube particulate is evenly dispersed.The time of the ultrasound can be 30 minutes~3 hours.The power of the ultrasound can be 300 watts~600 watts.The solvent is unlimited, as long as the semiconductive carbon nano tube particle but is formed outstanding not with solvent reaction Supernatant liquid.The solvent is preferably water, ethyl alcohol, N-Methyl pyrrolidone (NMP), acetone, chloroform, tetrahydrofuran etc., due to It contains hydroxy or carboxy isopolarity group, so that it shows extremely strong polarity, has biggish dielectric constant.The semiconductor Property carbon nanotube particulate and solvent mixed proportion it is unlimited, as long as can make the carbon nano tube suspension deposit semiconductor carbon nanometer Tube layer 101 is a conductive network.In the present embodiment, dispersed semiconductive carbon nano tube particle in NMP by ultrasound, The mixed proportion of the semiconductor carbon nanometer tube particle and the NMP are 1mg:30mL.
In step S113, before the surface that carbon nanotube is deposited on dielectric base 110, in order to make the carbon nanotube Preferably be attached at the surface of the dielectric base 110, can the surface in advance to the dielectric base 110 pre-process, make The surface of dielectric base 110 has polar group.
In the present embodiment, the dielectric base 110 is pre-processed specifically includes the following steps: firstly, using ion Etching method carries out hydrophilic treated to the dielectric base 110；Then, the dielectric base 110 after hydrophilic treated is organic molten with one Agent carries out functionalization.Wherein, the organic solvent is aminopropyl triethoxysilane (APTES) solution, after hydrophilic treated Dielectric base 110 can preferably be combined with APTES, and the amino in APTES can be combined well with carbon nanotube, thus Carbon nanotube particulate is allowed quickly and to be firmly adhered to the surface of dielectric base 110.
The step of deposition of carbon nanotubes specifically: pretreated dielectric base 110 is placed in advance in a container Then carbon nano tube suspension is placed in the container by bottom.Through standing after a period of time, the carbon nanotube gravity with And under the action of 110 surface polar groups of dielectric base, what be will be slow is deposited on the surface of the dielectric base 110, and is formed Semiconductor carbon nanometer tube film.
Further, the semiconductor carbon nanometer tube layer 101 is a self supporting structure, i.e., the described semiconductor carbon nanometer tube layer 101 are made of more carbon nano tube lines or carbon nano-tube film, then the semiconductor carbon nanometer tube layer 101 can be by by self-supporting Carbon nano tube line or carbon nano-tube film are laid immediately on 110 surface of dielectric base and are formed.The carbon nano tube line can be by carbon nanometer Pipe membrane handles to obtain by organic solvent.Specifically, the whole surface that organic solvent is infiltrated to the carbon nanotube membrane, Under the action of the surface tension that volatile organic solvent generates when volatilizing, the multiple carbon being parallel to each other in carbon nanotube membrane are received Mitron is combined closely by Van der Waals force, so that carbon nanotube membrane be made to be punctured into a carbon nano tube line.Wherein, described organic molten Agent is volatile organic solvent, and such as ethyl alcohol, methanol, propyl alcohol, dichloroethanes or chloroform, ethyl alcohol is used in the present embodiment.
In step s 12, the source electrode 104, drain electrode 105 can pass through magnetron sputtering method, vapour deposition method, means of electron beam deposition etc. It is formed in the surface of the semiconductor carbon nanometer tube layer 101, can also directly be coated by the methods of silk-screen printing, blade blade coating Mode of the electrocondution slurry in 101 surface of semiconductor carbon nanometer tube layer is formed.In the present embodiment, the source electrode 104, drain electrode 105 are Surface recombination by vapour deposition method in the semiconductor carbon nanometer tube layer 101 deposits to obtain.
In step s 13, the magnesium oxide layer 102 can be formed by magnetron sputtering method, vapour deposition method, means of electron beam deposition etc. In the whole surface of the semiconductor carbon nanometer tube layer 101, thus by semiconductor carbon nanometer tube layer 101 and air, hydrone etc. Isolation.Specifically, during the deposition process, 102 Attachments of magnesium oxide layer are in the semiconductor carbon nanometer tube layer 101 far from absolutely The surface of edge substrate 110, to ensure that carbon nanotube in the semiconductor carbon nanometer tube layer 101 and air are completely isolated.This implementation In example, the magnesium oxide layer 102 is the surface that the semiconductor carbon nanometer tube layer 101 is formed in by e-beam evaporation, described Magnesium oxide layer 102 with a thickness of 1 nanometer.
In step S14, the function medium layer 103 is formed in the oxygen by atom layer deposition process at 120 DEG C Change the surface of magnesium layer 102, so that 103 compact structure of function medium layer, and positive charge defect is formed in structure, from And good insulating effect can be played by making the function medium layer 103 not only, moreover it is possible to play electron adulterated effect.Wherein, should Growth source used by preparation method is trimethyl aluminium and water, and carrier gas is nitrogen.The function medium layer 103 with a thickness of 20- 40 nanometers, it is preferable that the function medium layer 103 with a thickness of 25-30 nanometers.In the present embodiment, the function medium layer 103 With a thickness of 30 nanometers.
In step S15, the grid 106 can pass through magnetron sputtering method, vapour deposition method, means of electron beam deposition or atomic layer deposition Area method etc. is formed in the surface of the function medium layer 103, can also directly be coated by the methods of silk-screen printing, blade blade coating Mode of the electrocondution slurry in the surface of the function medium layer 103 is formed.In the present embodiment, it is situated between by vapour deposition method in the function 103 surface of matter layer deposits the composite structure of Au and Ti as the grid 106.
Further, it is arranged before the semiconductor carbon nanometer tube layer 101, further comprises one in the dielectric base 110 Surface the step of forming another magnesium oxide layer 108, which is set to the semiconductor carbon nanometer tube layer It between 101 and dielectric base 110, and is contacted with the semiconductor carbon nanometer tube layer 101, is forming semiconductor carbon nanometer tube layer Deposition of magnesium layer 102 again after 101, so that opposite two surfaces of the semiconductor carbon nanometer tube layer 101 are covered It is stamped magnesium oxide layer, it is ensured that the carbon nanotube and air in the semiconductor carbon nanometer tube layer 101 are completely isolated.
The preparation method of N-type TFT provided by the invention, by 101 surface of semiconductor carbon nanometer tube layer A magnesium oxide layer 102 and a function medium layer 103 are deposited, so that N-type semiconductor is presented in semiconductor carbon nanometer tube layer 101, from And the thin film transistor (TFT) of N-type can be obtained, and preparation method is simple, and it is pollution-free, and performance is stablized, and it is brilliant to be able to extend N-type film The service life of body pipe.Further, the preparation method of the N-type TFT can be complete with current semiconducter process It is complete compatible, it can intert with semiconductor fabrication processes such as photoetching and carry out.In addition, the preparation method can have p-type carbon nano tube device Effect changes into n type carbon nanotube device, and the preparation of CMOS efficient circuits is collectively constituted so as to p-type easy to accomplish and N-type device, So as to which the correlated performance of integrated circuit is greatly improved, and reduce loss.
Referring to Fig. 7, the N-type TFT 20 that second embodiment of the invention provides, including a dielectric base 110, one Grid 106, a gate insulating layer 107, semiconductor carbon nanotube layer 101, a magnesium oxide layer 102, a function medium layer 103, One source electrode 104 and a drain electrode 105.The grid 106 is set to the surface of the dielectric base 110.The gate insulating layer 107 It is set to the surface of the grid 106 far from dielectric base 110.The semiconductor carbon nanometer tube layer 101 is set to the grid Surface of the insulating layer 107 far from grid 106.The source electrode 104 is arranged with 105 interval of drain electrode, and the source electrode 104 and drain electrode 105 are electrically connected with the semiconductor carbon nanometer tube layer 101.Semiconductor carbon nanometer tube layer between source electrode 104 and drain electrode 105 101 form a channel 125.The grid 106 passes through the gate insulating layer 107 and the semiconductor carbon nanometer tube layer 101, institute State 105 insulation sets of source electrode 104 and drain electrode.It is separate that the function medium layer 103 is set to the semiconductor carbon nanometer tube layer 101 The surface of the gate insulating layer 107.The magnesium oxide layer 102 is set to the semiconductor carbon nanometer tube layer 101 and is situated between with function Between matter layer 103, and setting is contacted with the semiconductor carbon nanometer tube layer 101.
The N-type TFT that the N-type TFT 20 and first embodiment that second embodiment of the invention provides provide 10 is essentially identical, and difference is: second embodiment is bottom gate thin film transistor, that is, the grid 106 is set to described half Between conductor carbon nanotube layer 101 and dielectric base 110, the grid 106 is partly led by the gate insulating layer 107 with described 105 insulation sets of body carbon nanotube layer 101, the source electrode 104 and drain electrode.The function medium layer 103, which is set to, described partly leads Surface of the body carbon nanotube layer 101 far from the gate insulating layer 107.The magnesium oxide layer 102 is set to the semiconductor carbon Between nanotube layer 101 and function medium layer 103, and contacted respectively with semiconductor carbon nanometer tube layer 101, function medium layer 103 Setting.
Further, it may also comprise another magnesium oxide layer between the semiconductor carbon nanometer tube layer 101 and gate insulating layer 107 108, which contacts with the semiconductor carbon nanometer tube layer 101, so that the semiconductor carbon nanometer tube layer 101 two opposite surfaces are all covered with magnesium oxide layer, and semiconductor carbon nanometer tube layer 101 is held between magnesium dioxide layer, from And further ensure that the carbon nanotube in the semiconductor carbon nanometer tube layer 101 and air are completely isolated.
107 material of gate insulating layer may be selected to be the hard materials such as aluminium oxide, hafnium oxide, silicon nitride, silica or The flexible materials such as benzocyclobutene (BCB), polyester or acrylic resin.The gate insulating layer 107 with a thickness of 0.5 nanometer~ 100 microns.In the present embodiment, the material of the gate insulating layer 107 is aluminium oxide, with a thickness of 40 nanometers.
Referring to Fig. 8, second embodiment of the invention also provides a kind of preparation method of N-type TFT 20, the preparation Method successively the following steps are included:
S21 provides a dielectric base 110, forms a grid 106 on a surface of the dielectric base 110；
S22 forms a gate insulating layer 107 far from the surface of dielectric base 110 in the grid 106；
S23 forms semiconductor carbon nanotube layer 101 far from the surface of grid 106 in the gate insulating layer 107；
S24 forms a spaced source electrode 104 and a drain electrode 105, so that source electrode 104, drain electrode 105 are partly led with described Body carbon nanotube layer 101 is electrically connected；
S25 forms a magnesium oxide layer far from the surface of gate insulating layer 107 in the semiconductor carbon nanometer tube layer 101 102；
S26 forms a function medium layer far from the surface of the semiconductor carbon nanometer tube layer 101 in the magnesium oxide layer 102 103。
The N-type that the preparation method and first embodiment for the N-type TFT 20 that second embodiment of the invention provides provide The preparation method of thin film transistor (TFT) 10 is essentially identical, and difference is: second embodiment first deposits the grid 106 in described exhausted 110 surface of edge substrate, and further comprise the preparation process of a gate insulating layer 107.The semiconductor carbon nanometer tube layer 101, magnesium oxide layer 102, function medium layer 103 are sequentially deposited to the surface of the gate insulating layer 107 from bottom to up, and partly lead Body carbon nanotube layer 101 and the grid 106 pass through 107 insulation set of gate insulating layer.
In step S22, the gate insulating layer 107 passes through magnetron sputtering method, means of electron beam deposition or atomic layer deposition Method etc. is formed in the surface of the grid 106 far from dielectric base 110 and covers the grid 106.In the present embodiment, the grid Pole insulating layer 107 is formed by atomic layer deposition method, which is alumina layer.
In addition, those skilled in the art can also make other variations in spirit of that invention, these are smart according to the present invention certainly Variation made by refreshing should be all included in scope of the present invention.

Claims (10)

1. a kind of N-type TFT comprising:
One dielectric base；
One grid, the grid are set to the surface of the dielectric base；
One gate insulating layer, the gate insulating layer are set to surface of the grid far from dielectric base；
Semiconductor carbon nanotube layer, the semiconductor carbon nanometer tube layer are set to table of the gate insulating layer far from grid Face；
One source electrode and a drain electrode, the source electrode and drain electrode interval setting, and be electrically connected respectively with the semiconductor carbon nanometer tube layer, source Semiconductor carbon nanometer tube layer between pole and drain electrode forms a channel；
One function medium layer, the function medium layer are set to the semiconductor carbon nanometer tube layer far from the gate insulating layer Surface, the function medium layer completely cut off the oxygen in air and water for electron adulterated to the semiconductor carbon nanometer tube layer Molecule；
It is characterized in that, further comprise a magnesium oxide layer, the magnesium oxide layer be set to the semiconductor carbon nanometer tube layer with Between function medium layer, and setting is contacted with the semiconductor carbon nanometer tube layer.
2. N-type TFT as described in claim 1, which is characterized in that the semiconductor carbon nanometer tube layer is by multiple The conductive network structure of single-walled carbon nanotube composition.
3. N-type TFT as described in claim 1, which is characterized in that the semiconductor carbon nanometer tube layer with a thickness of 0.5 nanometer -2 nanometers.
4. N-type TFT as described in claim 1, which is characterized in that the magnesium oxide layer is continuous and is attached directly to The area of the semiconductor carbon nanometer tube layer surface is more than or equal to 80%.
5. N-type TFT as described in claim 1, which is characterized in that the magnesium oxide layer is continuous and is attached directly to The whole surface of the semiconductor carbon nanometer tube layer.
6. N-type TFT as described in claim 1, which is characterized in that the magnesium oxide layer with a thickness of 1 nanometer -15 Nanometer.
7. N-type TFT as described in claim 1, which is characterized in that the function medium layer is attached directly to the oxygen Change surface of the magnesium layer far from semiconductor carbon nanometer tube layer.
8. N-type TFT as described in claim 1, which is characterized in that the function medium layer with a thickness of 20 nanometers- 40 nanometers.
9. N-type TFT as described in claim 1, which is characterized in that the material of the function medium layer be aluminium oxide, One or more of hafnium oxide, yttrium oxide.
10. N-type TFT as described in claim 1, which is characterized in that further comprise another magnesium oxide layer, this is another One magnesium oxide layer is set between the semiconductor carbon nanometer tube layer and gate insulating layer, and with the semiconductor carbon nanometer tube layer Contact.
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