CN105797543B - A kind of processing unit of technique of trichlorosilane synthetic tail gas - Google Patents
A kind of processing unit of technique of trichlorosilane synthetic tail gas Download PDFInfo
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- CN105797543B CN105797543B CN201610327122.0A CN201610327122A CN105797543B CN 105797543 B CN105797543 B CN 105797543B CN 201610327122 A CN201610327122 A CN 201610327122A CN 105797543 B CN105797543 B CN 105797543B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
- B01D46/2411—Filter cartridges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/70—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter
- B01D46/72—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter with backwash arms, shoes or nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
- B01D2252/20—Organic absorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/108—Hydrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2045—Hydrochloric acid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2064—Chlorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
- B01D2267/40—Different types of filters
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Silicon Compounds (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention belongs to trichlorosilane processing equipment fields, it is related to technique of trichlorosilane synthetic tail gas processing equipment, more particularly to a kind of processing unit of technique of trichlorosilane synthetic tail gas, including holding apparatus, holding apparatus includes installing shell, it is provided with the second adsorbent equipment above holding apparatus, the first adsorbent equipment is provided between the second adsorbent equipment and holding apparatus.The present invention is provided with the first adsorbent equipment between the second adsorbent equipment and bogey, adsorption plate is provided in the inside of the first adsorbent equipment, outside is provided with gear wheel, driving mechanism is also provided on gear wheel, first adsorbent equipment can be very good to adsorb solid silica soot and high-boiling components dust in its internal gas, it is filtered, can well by gas solid silica soot and high-boiling components dust-filtering come out, obtain pure gas, solid silica soot and high-boiling components dust for being utilized respectively and recycling.
Description
Technical field
The invention belongs to trichlorosilane processing equipment fields, are related to technique of trichlorosilane synthetic tail gas processing equipment, more particularly to
A kind of processing unit of technique of trichlorosilane synthetic tail gas.
Background technique
Trichlorosilane (SiHCl3) it is a kind of widely used organic silicon monomer, it is manufacture solar level and electron level polycrystalline
Silicon and the raw material for manufacturing semiconductor grade monocrystalline silicon, while being also the basic monomer of a variety of organosilicon synthesis.With science and technology
Progress, the sciemtifec and technical spheres such as fine chemistry industry, new energy, photoelectric communication grow rapidly, the demand to silicon and various siliceous products
Measure increasing blueness especially using trichlorosilane as product made from raw material or intermediate product increasingly by current silicon industry
It looks at.
Trichlorosilane by carrying out gas-solid by smashed industrial silicon Si and anhydrous hydrogen chloride HCl in a fluidized bed reactor
Phase reaction obtains.Main reaction are as follows:
Si+3HCl→SiHCl3+H2
Main side reaction are as follows:
Si+4HCl→SiCl4+2H2
Since the synthetic reaction of the trichlorosilane is exothermic reaction, and temperature is 280 DEG C~300 DEG C, so product is
Gaseous mixture, comprising: hydrogen H2, hydrogen chloride HCl, trichlorosilane SiHCl3, silicon tetrachloride SiCl4, silica soot and high-boiling components powder
Dirt, the ingredient of high-boiling components dust are the solid particles of other side reactions other than removing silicon powder dirt well known to those skilled in the art,
Such as metallic particles.After reaction, the gaseous mixture is passed through condensing tower, the SiHCl in the gaseous mixture3、SiCl4
It is condensed into liquid, other a small amount of SiHCl3、SiCl4And a large amount of H2, HCl and Si and high-boiling components dust be not condensed
At liquid, uncooled gas is the synthesis tail gas of trichlorosilane.
In the prior art first using synthesis tail gas described in wet-treating, so-called wet process be exactly eluted with liquid chlorosilane described in
Synthesis tail gas absorbs HCl, SiHCl in the synthesis tail gas3、SiCl4And a small amount of H2,Settle solid silica soot and high boiling
Object dust obtains chlorosilane absorbing liquid, then the chlorosilane absorbing liquid is passed through in hydrolysis tower, using described in the neutralization of alkali process method
HCl, SiHCl in chlorosilane absorbing liquid3、SiCl4, the solid silica soot and high-boiling components dust is discharged.
Each component in synthesis tail gas has very high recycle value, in the prior art, is only neutralized with alkali process method
HCl therein and hydrolysis chlorosilane, and without the high-boiling components in the unreacted solid silica soot of recycling and reusing and tail gas
Dust causes the waste of raw material.Alkali process method uses a large amount of alkali simultaneously, and to the technological parameter and performance requirement of equipment
It is very high, increase the cost of vent gas treatment.
Summary of the invention
The present invention is directed to above-mentioned problem, devises a kind of processing unit of technique of trichlorosilane synthetic tail gas.
In order to achieve the above object, the technical solution adopted by the present invention is,
A kind of processing unit of technique of trichlorosilane synthetic tail gas, including holding apparatus, the holding apparatus include installing shell,
Feed pipe is provided on the side wall for installing shell, bottom is provided with solids exit pipe, the top setting of the holding apparatus
There is the second adsorbent equipment, the first adsorbent equipment, first absorption are provided between second adsorbent equipment and holding apparatus
Device includes rotation shell, and the rotation enclosure interior is provided with adsorption plate, is evenly arranged on the one side of the adsorption plate
Thick adsorption hole, the adsorption plate are internally provided with active carbon slab, and the upper and lower ends of the adsorption plate are provided with rotation
Holding tank in inner walls is evenly arranged with the venthole being connected with inside adsorption plate, the rotation on the rotation shell
It is provided with gear wheel on the outer wall of shell, is additionally provided with the driving mechanism of drive gear wheel rotation on the gear wheel, described the
Two adsorbent equipments include supporing shell, and the top of the supporing shell is provided with trapezoidal shell, and the inside of the supporing shell is set
It is equipped with adsorbing mechanism, the adsorbing mechanism includes support plate, and absorbing cylinder, the trapezoidal shell are evenly arranged in the support plate
Top be provided with escape pipe, the side of the escape pipe is provided with the second nitrogen tube, and the outside for installing shell is provided with
To installing the heating muff plate that is heated of shell, the both ends of the rotation shell be separately positioned on by bearing install shell with
On the outer wall of supporing shell, the bearing is arranged in holding tank.
Preferably, the outside of the rotation shell and supporing shell is both provided with Heat preservation sleeve plate.
Preferably, being provided with the first nitrogen tube on the outside of the venthole, first nitrogen tube is set by fixed plate
It sets on the outer wall of Heat preservation sleeve plate.
Preferably, the driving mechanism includes driving motor, rotation axis, the rotation are provided on the driving motor
The pinion gear matched with gear wheel is provided on axis.
Preferably, being provided in the feed pipe, solids exit pipe, escape pipe, the first nitrogen tube and the second nitrogen tube
Corresponding control valve.
Compared with prior art, the advantages and positive effects of the present invention are,
The present invention is provided with the first adsorbent equipment between the second adsorbent equipment and bogey, in the first adsorbent equipment
Inside is provided with adsorption plate, and outside is provided with gear wheel, is also provided with driving mechanism on gear wheel, which can be with
The solid silica soot and high-boiling components dust in its internal gas are adsorbed well, are filtered, it can well by gas
In solid silica soot and high-boiling components dust-filtering come out, obtain pure gas, solid silica soot and high-boiling components dust for
It is utilized respectively and recycles.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are some embodiments of the invention, for ability
For the those of ordinary skill of domain, without any creative labor, it can also be obtained according to these attached drawings others
Attached drawing.
Fig. 1 is a kind of main view of the processing unit of technique of trichlorosilane synthetic tail gas；
Fig. 2 is a kind of schematic perspective view of the processing unit of technique of trichlorosilane synthetic tail gas；
Fig. 3 is that a kind of processing unit of technique of trichlorosilane synthetic tail gas (fills the first adsorbent equipment and trapezoidal shell and carrying
Set and separated with supporing shell) schematic perspective view；
In above each figure, 1, bogey；11, feed pipe；12, solids exit pipe；13, shell is carried；2, the first absorption
Device；21, adsorption plate；22, holding tank；23, thick adsorption hole；24, venthole；25, gear wheel；26, shell is rotated；31, it supports
Plate；32, absorbing cylinder；33, thin adsorption hole；34, supporing shell；4, trapezoidal shell；41, escape pipe；42, the second nitrogen tube；5, add
Hot jacket cylinder plate；6, Heat preservation sleeve plate；61, fixed plate；62, the first nitrogen tube；7, driving mechanism；71, driving motor；72,
Rotation axis；73, pinion gear.
Specific embodiment
To better understand the objects, features and advantages of the present invention, with reference to the accompanying drawings and examples
The present invention will be further described.It should be noted that in the absence of conflict, in embodiments herein and embodiment
Feature can be combined with each other.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, still, the present invention may be used also
To be implemented using other modes described herein are different from, therefore, the present invention is not limited to the specific of specification is described below
The limitation of embodiment.
Embodiment 1, as shown in Figure 1, Figure 2 and Figure 3, the present invention provides a kind of processing of technique of trichlorosilane synthetic tail gas dresses
It sets, present treatment device is mainly to HCl, SiHCl in synthesis tail gas3、SiCl4And a small amount of H2,Settle solid silica soot and
High-boiling components dust carries out the device of micronization processes, HCl, SiHCl3、SiCl4And a small amount of H2It is all the shape with physical reactions
Formula is dissolved into chlorosilane absorbing liquid, which successively includes bogey 1,2 and of the first adsorbent equipment from bottom to top
Second adsorbent equipment, bogey 1 is mainly to being used to install chlorosilane absorbing liquid, the present apparatus and to chlorosilane absorbing liquid
It carries out heating and forms it into HCl, SiHCl3、SiCl4And a small amount of H2,Sedimentation solid silica soot and high-boiling components dust are returned
It receives and utilizes, for the temperature of heating at 100 °~130 °, the first adsorbent equipment 2 is mainly that the sedimentation carried out in absorption mixed gas is consolidated
Body silica soot and high-boiling components dust carry out primary filtration, and the second adsorbent equipment is then to carry out ultimate filtering, and gaseous mixture is intracorporal
Sedimentation solid silica soot and high-boiling components dust are filtered completely；Bogey 1 includes installing shell, installs the side wall of shell
Upper to be provided with feed pipe 11, feed pipe 11 is mainly used for being passed through chlorosilane absorbing liquid into installation shell, carry out at decomposition
Reason, solids exit pipe 12 will then settle solid silica soot and high-boiling components dust exclude it is designed, in installation shell
The outside of body is provided with heating muff plate 5, and heating muff plate 5 is mainly to carry out to the chlorosilane absorbing liquid in carrying shell 13
Heat treatment, the heating muff plate 5 that inventor selects mainly carry out generation thermal energy using electricity, to realize the purpose of heating；The
One adsorbent equipment 2 includes rotation shell 26, adsorption plate 21 is provided in the inside of rotation shell 26, on the one side of adsorption plate 21
It has been uniformly arranged thick adsorption hole 23, has been provided with active carbon slab in the inside of adsorption plate 21, adsorption plate 21 is mainly used for adsorbing
Sedimentation solid silica soot and high-boiling components dust contained in boil-off gas are provided with setting in the upper and lower ends of adsorption plate 21 and exist
The holding tank 22 on 26 inner wall of shell is rotated, holding tank 22 is mainly used for holding bearing, on rotation shell 26 uniformly
Provided with the venthole 24 that is connected inside adsorption plate 21, rotate and be provided with gear wheel 25 on the outer wall of shell 26, it is big
On gear 25 be provided with driving mechanism 7, be not difficult to find out from the introduction of above-mentioned first adsorbent equipment 2, due to chlorosilane absorbing liquid by
The reason that heat is gradually decomposed, inventor are directly provided with the first adsorbent equipment 2 on the top for installing shell, carry out large area
Adsorption treatment, therefore the briefly once working principle of this first adsorbent equipment 2, as shown in figure 3, driving motor 71 drives small tooth
Wheel 73 is rotated, so that gear wheel 25 be driven to be rotated, the direction of rotation is then rotated clockwise, this is rotated clockwise
It is then to depend on adsorption hole on which side of adsorption plate 21, that is, has to guarantee that during rotation, adsorption hole can
Directly to be contacted with the particle in gas, to play the role of absorption, can greatly be increased using this suction type
Adsorption effect solves the problems, such as the only some column of by-pass filtration bring, rotate certainly the speed that shell 26 rotates be can be with
It adjusts；Second adsorbent equipment includes supporing shell 34, trapezoidal shell 4 is provided on the top of supporing shell 34, in supporting shell
The inside of body 34 is provided with adsorbing mechanism, and adsorbing mechanism includes support plate 31, and absorbing cylinder 32 has been uniformly arranged in support plate 31,
The structure of its absorbing cylinder 32 is similar with the mechanism of adsorption plate 21, adsorption hole is also provided on absorbing cylinder 32, but this is adsorbed
Hole is carefully more many than the adsorption hole on adsorption plate 21, and its purpose is to final thin filtering, which is mainly used
Passively suction type is provided with escape pipe 41 at the top of trapezoidal shell 4, and the side of escape pipe 41 is provided with the second nitrogen
Tracheae 42, by the gas of the first adsorbent equipment 2 finally pass through absorbing cylinder 32 finally adsorbed and then by escape pipe 41 into
Enter into the link of next subdivision, the second nitrogen tube 42 is mainly blowback and is arranged, i.e., the intracorporal chlorosilane of installation shell is inhaled
After receipts liquid decomposes completion completely, then need to think that being passed through nitrogen in the second nitrogen tube 42 carries out air blowing processing, it will be on absorbing cylinder 32
Sedimentation solid silica soot and high-boiling components dust blow to the bottom of device so that discharge recycles；Rotate the both ends of shell 26
It is separately positioned on the outer wall for installing shell and supporing shell 34 by bearing, bearing is arranged in holding tank 22, bearing
Rotation 26 1 rotatable supports of shell are mainly given in setting, can be relative to installation shell and 34 turns of supporing shell
It is dynamic.
Inventor also does design below to provide overall effect of the invention:
Heat preservation sleeve plate 6, Heat preservation sleeve plate 6 are all provided in the outside of rotation shell 26 and supporing shell 34
Setting primarily to rotation shell 26 and 34 inside product of supporing shell keep the temperature, wherein rotation shell 26 on guarantor
Warm heating muff plate 6 is not shown in figure；
The outside of venthole 24 is provided with the first nitrogen tube 62, and the first nitrogen tube 62 is arranged by fixed plate 61 to be added in heat preservation
On the outer wall of hot jacket cylinder plate 6, it is that will inhale on adsorption plate 21 that the first nitrogen tube 62, which is similar with the effect of the second nitrogen tube 42,
Attached sedimentation solid silica soot and high-boiling components dust is handled；
Driving mechanism 7 includes driving motor 71, and rotation axis 72 is provided on driving motor 71, be provided in rotation axis 72 with
The pinion gear 73 that gear wheel 25 matches, the setting of driving mechanism 7 is primarily to driving rotation shell 26 is rotated；
In feed pipe 11, solids exit pipe 12, escape pipe 41, the first nitrogen tube 62 and the second nitrogen tube 42 be provided with
Corresponding control valve, control valve be mainly control where pipeline switch, cooperate the overall work of the present apparatus.
The above described is only a preferred embodiment of the present invention, being not that the invention has other forms of limitations, appoint
What those skilled in the art changed or be modified as possibly also with the technology contents of the disclosure above equivalent variations etc.
It imitates embodiment and is applied to other fields, but without departing from the technical solutions of the present invention, according to the technical essence of the invention
Any simple modification, equivalent variations and remodeling to the above embodiments, still fall within the protection scope of technical solution of the present invention.
Claims (5)
1. a kind of processing unit of technique of trichlorosilane synthetic tail gas, including holding apparatus, the holding apparatus includes installing shell, institute
It states and is provided with feed pipe on the side wall for installing shell, bottom is provided with solids exit pipe, which is characterized in that the holding apparatus
Top is provided with the second adsorbent equipment, and the first adsorbent equipment is provided between second adsorbent equipment and holding apparatus, described
First adsorbent equipment includes rotation shell, and the rotation enclosure interior is provided with adsorption plate, equal on the one side of the adsorption plate
Even to be provided with thick adsorption hole, the adsorption plate is internally provided with active carbon slab, and the upper and lower ends of the adsorption plate are provided with
The holding tank in rotation inner walls is set, is evenly arranged with the venthole being connected with inside adsorption plate on the rotation shell,
It is provided with gear wheel on the outer wall of the rotation shell, the driving machine of drive gear wheel rotation is additionally provided on the gear wheel
Structure, second adsorbent equipment includes supporing shell, and the top of the supporing shell is provided with trapezoidal shell, the supporing shell
Be internally provided with adsorbing mechanism, the adsorbing mechanism includes support plate, and absorbing cylinder is evenly arranged in the support plate, described
Escape pipe is provided at the top of trapezoidal shell, the side of the escape pipe is provided with the second nitrogen tube, described to install the outer of shell
Portion is provided with the heating muff plate heated to installation shell, and the both ends of the rotation shell are separately positioned on by bearing holds
It fills on shell and the outer wall of supporing shell, the bearing is arranged in holding tank.
2. a kind of processing unit of technique of trichlorosilane synthetic tail gas according to claim 1, which is characterized in that the shell of revolution
The outside of body and supporing shell is both provided with Heat preservation sleeve plate.
3. a kind of processing unit of technique of trichlorosilane synthetic tail gas according to claim 2, which is characterized in that the venthole
Outside be provided with the first nitrogen tube, first nitrogen tube is arranged on the outer wall of Heat preservation sleeve plate by fixed plate.
4. a kind of processing unit of technique of trichlorosilane synthetic tail gas according to claim 3, which is characterized in that the driving machine
Structure includes driving motor, rotation axis is provided on the driving motor, is provided in the rotation axis and matches with gear wheel
Pinion gear.
5. a kind of processing unit of technique of trichlorosilane synthetic tail gas according to claim 4, which is characterized in that the charging
Corresponding control valve is provided in pipe, solids exit pipe, escape pipe, the first nitrogen tube and the second nitrogen tube.
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| CN201610327122.0A CN105797543B (en) | 2016-05-17 | 2016-05-17 | A kind of processing unit of technique of trichlorosilane synthetic tail gas |
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| CN201610327122.0A CN105797543B (en) | 2016-05-17 | 2016-05-17 | A kind of processing unit of technique of trichlorosilane synthetic tail gas |
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| CN105797543B true CN105797543B (en) | 2019-03-29 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4946479A (en) * | 1987-10-28 | 1990-08-07 | Daikin Industries, Ltd. | Apparatus for solvent recovery |
| CN102100998A (en) * | 2009-12-21 | 2011-06-22 | 重庆大全新能源有限公司 | Method and device for processing trichlorosilane synthesis tail gas |
| CN102259860A (en) * | 2011-05-30 | 2011-11-30 | 四川新光硅业科技有限责任公司 | Precise dechlorinating equipment for recovered hydrogen in production of polycrystalline silicon |
| CN202237705U (en) * | 2011-09-30 | 2012-05-30 | 江西晶大半导体材料有限公司 | Polycrystalline silicon tail gas absorption device |
| CN202724971U (en) * | 2012-08-07 | 2013-02-13 | 成都五环新锐化工有限公司 | Voltage transformation adsorption device |
-
2016
- 2016-05-17 CN CN201610327122.0A patent/CN105797543B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4946479A (en) * | 1987-10-28 | 1990-08-07 | Daikin Industries, Ltd. | Apparatus for solvent recovery |
| CN102100998A (en) * | 2009-12-21 | 2011-06-22 | 重庆大全新能源有限公司 | Method and device for processing trichlorosilane synthesis tail gas |
| CN102259860A (en) * | 2011-05-30 | 2011-11-30 | 四川新光硅业科技有限责任公司 | Precise dechlorinating equipment for recovered hydrogen in production of polycrystalline silicon |
| CN202237705U (en) * | 2011-09-30 | 2012-05-30 | 江西晶大半导体材料有限公司 | Polycrystalline silicon tail gas absorption device |
| CN202724971U (en) * | 2012-08-07 | 2013-02-13 | 成都五环新锐化工有限公司 | Voltage transformation adsorption device |
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