CN105789022A - Short arc type flash lamp with both ends sealed - Google Patents
Short arc type flash lamp with both ends sealed Download PDFInfo
- Publication number
- CN105789022A CN105789022A CN201610010253.6A CN201610010253A CN105789022A CN 105789022 A CN105789022 A CN 105789022A CN 201610010253 A CN201610010253 A CN 201610010253A CN 105789022 A CN105789022 A CN 105789022A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- sealing
- getter
- pipe
- heart yearn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
- H01J61/80—Lamps suitable only for intermittent operation, e.g. flash lamp
Landscapes
- Discharge Lamp (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Provided is a short arc type flash lamp with both ends sealed. A luminescent tube is internally provided with a pair of main electrodes and a pair of starting auxiliary electrodes; a sealing glass tube is inserted and welded in a sealing tube on one end portion of the luminescent tube; mixed gases in the luminescent tube are efficiently absorbed through a getter, an evaporated getter does not attach on the inner surface of a luminescent portion, and a getter container and the inner lead of the starting auxiliary electrodes extending in the luminescent tube do not generate paradoxical discharge. The getter container in the first sealing tube is fixed on the core wire of the main electrodes, and is provided with a circular part of a circular recess having an end side opened; the tuber recess is internally provided with metal used as an evapotranspiration type getter; the opening is configured on the sealing end portion of the first sealing tube; the inner surface of the first sealing tube is provided with a metal film generated by the evapotranspiration type getter.
Description
Technical field
The present invention relates to two ends closed type short arc flash lamp, the tube portion that seals particularly to a side is the two ends closed type short arc flash lamp that dual pipe constructs.
Background technology
In the industrial use headed by flash anneal that the discharge lamp carrying out flash of light lighting is widely used in semiconductor fabrication sequence, the lamp of the present invention is mainly used in utilizing in the exposure process of vacuum-ultraviolet light.
In above-mentioned exposure process, it is possible to the short time, highdensity light is irradiated in zonule, it is desirable to use the light of the directivity of light and the upper uneven less and nearly parallel light of distribution.
Before, in same exposure process, as shown in Japanese Unexamined Patent Publication 2012-43736 publication (patent documentation 1), the main flash lamp using vacuum tube shape.Comparing the lamp carrying out general flash of light lighting, the main electrode distance of this lamp is from little, it is possible to the light source as points of proximity light source uses.
But, owing to having vacuum tube structure, therefore need in the end of side to enclose two main electrodes and trigger electrode (startups auxiliary electrode), to device, power supply connecting portion (lamp holder) for columned structure time, outside dimension especially becomes big.Therefore, when using identical lamp inside the optical system with illuminator etc., the lightproof area caused because of holder structure etc. is relatively big, and result occurs exporting, from the light of optical system, the problem declined.
For these problems, following technology disclosed in Japanese Unexamined Patent Publication 2012-94362 publication (patent documentation 2), configure the so-called two ends sealed structure of sealing by being used in the both sides of bulb, thus reducing above-mentioned lightproof area.
As it is shown in figure 5, in the closed type short arc flash lamp of two ends, be connected with the 1st sealing pipe the 2 and the 2nd at the two ends of luminous tube 1 and seal pipe 3.Further, the above-mentioned 2nd seals the open end being inserted with glass for sealing pipe 4 in pipe 3, and both are soldered.
In luminous tube 1, a pair the 1st main electrode the 5 and the 2nd main electrodes 6 are arranged opposite.Above-mentioned 1st main electrode 5, its heart yearn (wire electrode) 7 are supported by by unit such as classification glass (gradedglass) being sealed in the 1st sealing pipe 2, and derive to its foreign side, on the other hand, the heart yearn 8 of above-mentioned 2nd main electrode 6 is supported by being sealed in above-mentioned glass for sealing pipe 4 by unit such as classification glass, and derives to its foreign side.
In addition, a pair startup auxiliary electrode 10,11 it is equipped with between main electrode 5,6 in luminous tube 1, respective inner lead 12,15 and outside lead 13,16 seal the welding region between pipe 3 and glass for sealing pipe 4 the above-mentioned 2nd, electrically connect via metal forming 14,17.
According to such two ends closed type short arc flash lamp, arrange sealing at the both ends of bulb, it is possible to reduce above-mentioned lightproof area.
But, this lamp gas (hereinafter referred to as entrained gas) such as Atmospheric components nitrogen, carbon dioxide, steam in its manufacture process is easily mixed into inside, if such as oxygen is mixed into, anodizing when there is lighting, the oxide generated evaporation and be attached to bulb internal surface and make the unfavorable condition of decrease in transmission.
Additionally, when entrained gas is present in around auxiliary electrode, even if there is the problem ionizing efficiency decline of the gas around auxiliary electrode applying altofrequency high voltage, auxiliary electrode, starting characteristic worsened from lamp circuit.
Patent documentation 1: Japanese Unexamined Patent Publication 2012-43736 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2012-94362 publication
Summary of the invention
nullThis invention problem to be solved is，A kind of two ends closed type short arc flash lamp is provided in view of above-mentioned conventional art problem，It is constructed as below，There is in the inside of the luminous tube of glass control a pair main electrode and start auxiliary electrode，Possess the 1st sealing pipe and the 2nd at the two ends of this luminous tube and seal pipe，The heart yearn of the 1st main electrode is sealed in the above-mentioned 1st and seals in pipe and be exported to outside luminous tube，The open end of glass for sealing pipe is inserted into the above-mentioned 2nd inside sealing pipe，And seal sealing of tube with the above-mentioned 2nd，In above-mentioned glass for sealing pipe，The heart yearn of the 2nd main electrode is sealed and is exported to outside luminous tube，By the entrained gas in getter active adsorption luminous tube，And vaporized getter is non-cohesive at illuminating part inner surface，And there is not paradoxical discharge between getter accommodating container and the inner lead starting auxiliary electrode extended in luminous tube.
In order to solve the problems referred to above, two ends closed type short arc flash lamp about this invention is characterised by, seal getter container in pipe the above-mentioned 1st and be fixed on the heart yearn of main electrode, this getter container is the endless member of the annular recessed portion with end side opening, the metal as evaporable air-absorbing agent it is supported with in above described tubular recess, above-mentioned opening is configured by the sealing end side sealing pipe towards the above-mentioned 1st, has, in the above-mentioned 1st inner surface film forming sealing pipe, the metallic film produced by evaporable air-absorbing agent.
Additionally, above-mentioned getter container is welded on the heart yearn of above-mentioned 1st main electrode across metal forming.
Additionally, above-mentioned getter container is fixed on heart yearn by the bridge parts crossed at the bearing of trend of the heart yearn of above-mentioned 1st main electrode.
The effect of invention
Two ends closed type short arc flash lamp according to this invention, by arranging, in sealing pipe, the getter container being supported in annular recessed portion by evaporation type getter, getter evaporation and at above-mentioned sealing pipe internal surface film forming metal thin film, thus, entrained gas in this metallic film adsorboluminescence pipe, prevent anodizing, it is possible to prevent the absorbance of the luminous tube caused because of oxide from declining.
Being additionally, since entrained gas to be not present in starting around auxiliary electrode, therefore starting characteristic is kept well.
In addition, owing to getter container being fixed in the 1st sealing pipe, therefore, pipe is sealed different from the inner lead starting auxiliary electrode extends the 2nd, paradoxical discharge will not be produced between getter container and inner lead, and then film forming will not be short-circuited between the 1st getter and the inner lead sealing pipe and cause paradoxical discharge in evaporation.
Additionally, time on electrode heart yearn getter container being fixed in the 1st sealing pipe, make the opening of this tubule recess towards sealing end side, therefore the getter film forming evaporated seals the sealing end side of pipe without film forming at illuminating part the 1st, declines thus without the light transmission making self-luminescent part.
Accompanying drawing explanation
Fig. 1 is the profile of the two ends closed type short arc flash lamp of the present invention.
Fig. 2 is the amplification profile of the major part of Fig. 1.
Fig. 3 is an example of the installation method of getter accommodating container.
Fig. 4 is other example of installation method.
The profile of the two ends closed type short arc flash lamp that Fig. 5 is those that have previously been.
Reference numeral explanation
1 luminous tube；2 the 1st seal pipe；3 the 2nd seal pipe；4 glass for sealing pipes；5 the 1st main electrodes；6 the 2nd main electrodes；The heart yearn of 7 the 1st main electrodes；The heart yearn of 8 the 2nd main electrodes；10 the 1st start auxiliary electrode；11 the 2nd start auxiliary electrode；12 the 1st inner leads starting auxiliary electrode；13 the 1st outside leads starting auxiliary electrode；14 metal formings；15 the 2nd inner leads starting auxiliary electrode；16 the 2nd outside leads starting auxiliary electrode；17 metal formings；20 getter containers；21 endless members；22 tubule recess；22a circular opening；23 getteies；25 metal formings；28 bridge parts；The metallic film of 30 getteies；X becomes the region of injection light shadow.
Detailed description of the invention
Fig. 1 is the overall profile of the two ends closed type short arc flash lamp of the present invention, and Fig. 2 is the amplification profile in its main portion.
The structure of lamp entirety is identical with the conventional art shown in Fig. 5, and in luminous tube 1, a pair the 1st main electrode the 5 and the 2nd main electrodes 6 are arranged opposite.
And, the heart yearn 7 of above-mentioned 1st main electrode 5 is supported by by unit such as classification glass (gradedglass) being sealed in the 1st sealing pipe 2, and derived to its foreign side, on the other hand, the heart yearn 8 of above-mentioned 2nd main electrode 6 is supported by being sealed in above-mentioned glass for sealing pipe 4 and being derived to its foreign side by unit such as classification glass.
In addition, a pair startup auxiliary electrode 10,11 it is equipped with between main electrode 5,6 in luminous tube 1, respective inner lead 12,15 and outside lead 13,16 seal the welding region between pipe 3 and glass for sealing pipe 4 the above-mentioned 2nd, electrically connect via metal forming 14,17.
That is, the inner lead 12,15 being connected with startup auxiliary electrode 10,11 is sealed in glass for sealing pipe the 4 and the 2nd and seals between pipe 3.
And, in the present invention, the 1st heart yearn 7 sealing the 1st main electrode 5 extended in pipe 2 is fixed with getter container 20.
This detailed content as in figure 2 it is shown, getter container 20 is made up of the metal endless member 21 of molybdenum etc. what have annular recessed portion 22, one end of annular recessed portion 22 by opening as tubular opening 22a.
Additionally, getter container 20 is not necessarily tubular part, it is also possible to be C-shaped parts or thread-like member.
Receive in this annular recessed portion 22 and be supported with getter 23.When this lamp, it is preferred that the evaporable air-absorbing agent being one of main component with barium according to the operating temperature of this getter 23.
Such as, with aluminum, barium, nickel these three composition the state of mixed metal powder, be housed in the annular recessed portion 22 of getter container 20.
This getter container 20 is inserted into and is arranged in lamp, and after lamp makes, when container is heated to more than a certain temperature, the al and ni being received melts and alloying, and releases reaction heat.In this process, the temperature of the barium of mixing rises to more than its melting point.As a result, barium is attached to the lamp inner surface of surrounding from the circular opening 22a evaporation of getter container 20, and the metallic film of getter is by film forming, and is endowed the function of getter.
This getter container 20 is to the installation method of the heart yearn 7 of the 1st main electrode 5 as shown in Figure 3.
Their numerical example is set forth below.
< luminous tube >
Material: quartz glass, maximum outside diameter: Φ 20mm, wall thickness: 1.2mm
< the 1st seals pipe >
External diameter: Φ 12mm, wall thickness: 1.2mm
< the 1st main electrode >
Material: tungsten, maximum outside diameter: Φ 4mm
< heart yearn >
Material: tungsten, external diameter Φ 2mm
< getter container >
Material: molybdenum, external diameter 6mm, internal diameter 4mm, thickness 0.1mm
< getter >
Aluminum, nickel, barium three composition, mixture total amount: 0.1mg
After ternary mixture houses getter container, press and molding
< metal forming >
Material: nickel, thickness 0.1mm
First metal forming 25 volume is paid the assigned position (as it is shown in figure 1, the 1st seals the inside of pipe 2) at heart yearn 7, is fixed on heart yearn 7 by means of spot welds.
Further, as shown in Fig. 3 (A), make the getter container 20 being supported with getter 23 embedding towards being wrapped in the way of the sealing end side of the 1st sealing 2 by its tubular opening 20a in the part of the metal forming 25 of this heart yearn 7.
Then, as shown in Fig. 3 (B), make this getter container 20 tilt, be fixed in metal forming 25 by means of spot welds etc. in this condition.
Thus, getter container 20 is fixed on heart yearn 7 in the 1st sealing 2.
It addition, in this embodiment, it is shown that the bottom side of getter container 20 heart yearn 7 relative to front welded structure, but as long as sufficient bed knife can be obtained, which side is fixed on all passable.
Fig. 4 has illustrated other installation method of the relative heart yearn of getter container 20.In this embodiment, fixed by the bridge parts 28 of leap getter container 20 on the bearing of trend of the heart yearn 7 of above-mentioned 1st main electrode 5.The metal formings such as this preferred nickel of bridge parts 28, are configured to this metal forming 28 cross over getter container 20, are fixed on heart yearn 7 by means of spot welds in the both sides of getter container 20.
By more than, as shown in Figure 1 and Figure 2, be supported with the getter container 20 of getter 23 in inside in the 1st sealing 2, be fixed on the heart yearn 7 of the 1st main electrode 5 towards sealing in the way of end side by opening 20a.
By this configuration, as it is shown in figure 1, getter container 20 is configured in the region X becoming the shadow being penetrated light by the 1st main electrode 5, will not hinder and effectively penetrate light from lamp.In addition, after the manufacture of lamp completes, when getter container 20 getter evaporation for high temperature, at the metallic film 30 of lamp this getter of inner surface by film forming, but this metallic film 30 is also not formed in becoming the region X of the shade of above-mentioned injection light, does not interfere with in luminous tube 1.
It addition, when the 1st sealing is fully grown along tube axial direction, getter container 20 can also be fixed on the heart yearn 7 of the 1st main electrode 5 in the way of electrode 5 side by opening 20a in the 1st sealing 2.
Now, owing to the 1st sealing is fully long along tube axial direction, therefore, after getter evaporation, at the metallic film 30 of this getter of inner surface of lamp by film forming, but this metallic film 30 is without being formed becoming in the region X of shade of described injection light, does not interfere with in luminous tube 1.
As mentioned above, in two ends closed type short arc flash lamp involved in the present invention, seal the 1st and the heart yearn of the 1st main electrode in pipe is provided with the getter container being supported with getter, therefore, in the fabrication process, even if being mixed into the gases such as nitrogen, oxygen, carbon dioxide, steam in luminous tube, it is also possible to provide and reliably adsorbed the lamp that these gases, startability and luminous efficiency are excellent by getter.
And, owing to this getter container being arranged in the 1st sealing pipe, therefore, the inner lead starting auxiliary electrode does not extend, paradoxical discharge will not be there is between the inner lead starting auxiliary electrode, even if additionally, the metallic film of getter is formed sealing pipe internal surface, being short-circuited without between inner lead equally.
And then, the opening of getter container seals the sealing end side of pipe towards the 1st and is fixed, and is formed at the metallic film of getter of lamp inner surface and luminous tube thus without having influence on, will not hinder emergent light.
Claims (4)
1. a two ends closed type short arc flash lamp, has a pair main electrode and starts auxiliary electrode in the inside of the luminous tube of glass control, possesses the 1st sealing pipe and the 2nd at the two ends of this luminous tube and seals pipe；
Sealed at the above-mentioned 1st heart yearn sealing Guan Zhong 1 main electrode and be exported to outside luminous tube；
The open end of glass for sealing pipe is inserted into the above-mentioned 2nd inside sealing pipe, and seals sealing of tube with the above-mentioned 2nd；
In above-mentioned glass for sealing pipe, the heart yearn of the 2nd main electrode is sealed and is exported to outside luminous tube；Above-mentioned two ends closed type short arc flash lamp is characterised by,
A part for the inner lead being connected with above-mentioned startup auxiliary electrode is sealed in above-mentioned glass for sealing pipe and the above-mentioned 2nd and seals between pipe；
Seal the getter container in pipe with opening the above-mentioned 1st to be fixed on the heart yearn of main electrode；
Above-mentioned getter container is supported with the metal as evaporable air-absorbing agent；
The metallic film produced by evaporable air-absorbing agent is had in the above-mentioned 1st inner surface film forming sealing pipe.
2. two ends as claimed in claim 1 closed type short arc flash lamp, it is characterised in that
The opening of above-mentioned getter container configures towards the above-mentioned 1st sealing end side sealing pipe.
3. two ends as claimed in claim 1 or 2 closed type short arc flash lamp, it is characterised in that
Above-mentioned getter container is welded on the heart yearn of above-mentioned 1st main electrode across metal forming.
4. two ends as claimed in claim 1 or 2 closed type short arc flash lamp, it is characterised in that
Above-mentioned getter container is fixed on heart yearn by crossing over the bridge parts of this getter container on the bearing of trend of the heart yearn of above-mentioned 1st main electrode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015002129A JP6120182B2 (en) | 2015-01-08 | 2015-01-08 | Both ends sealed short arc flash lamp |
| JP2015-002129 | 2015-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105789022A true CN105789022A (en) | 2016-07-20 |
Family
ID=56358073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610010253.6A Pending CN105789022A (en) | 2015-01-08 | 2016-01-08 | Short arc type flash lamp with both ends sealed |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6120182B2 (en) |
| KR (1) | KR20160085694A (en) |
| CN (1) | CN105789022A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112635120A (en) * | 2020-10-23 | 2021-04-09 | 江山志诚科技有限公司 | Secondary anti-falling device for power transmission and transformation cable |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5273582U (en) * | 1975-11-29 | 1977-06-01 | ||
| JPS52111557U (en) * | 1976-02-23 | 1977-08-24 | ||
| JPH08255582A (en) * | 1995-03-17 | 1996-10-01 | Hitachi Ltd | Cathode-ray tube device |
| CN102074450A (en) * | 2009-11-05 | 2011-05-25 | 优志旺电机株式会社 | Short arc discharge lamp |
| CN202205710U (en) * | 2011-08-19 | 2012-04-25 | 镇江雷明特种光源有限公司 | Impulse ultraviolet ozone sterilamp tube |
| JP2012094362A (en) * | 2010-10-27 | 2012-05-17 | Ushio Inc | Short arc type flash lamp |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5122751B1 (en) * | 1970-12-08 | 1976-07-12 | ||
| JPH0610618Y2 (en) * | 1988-03-08 | 1994-03-16 | 株式会社エレバム | Discharge lamp |
| KR100392181B1 (en) * | 2000-12-18 | 2003-07-22 | 주식회사 엘에스텍 | Discharge lamp and the back light unit applying the same |
| JP5661375B2 (en) | 2010-08-23 | 2015-01-28 | 浜松ホトニクス株式会社 | Flash lamp |
| JP5995000B2 (en) * | 2013-03-19 | 2016-09-21 | ウシオ電機株式会社 | Short arc type discharge lamp |
-
2015
- 2015-01-08 JP JP2015002129A patent/JP6120182B2/en active Active
- 2015-12-21 KR KR1020150182980A patent/KR20160085694A/en not_active Application Discontinuation
-
2016
- 2016-01-08 CN CN201610010253.6A patent/CN105789022A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5273582U (en) * | 1975-11-29 | 1977-06-01 | ||
| JPS52111557U (en) * | 1976-02-23 | 1977-08-24 | ||
| JPH08255582A (en) * | 1995-03-17 | 1996-10-01 | Hitachi Ltd | Cathode-ray tube device |
| CN102074450A (en) * | 2009-11-05 | 2011-05-25 | 优志旺电机株式会社 | Short arc discharge lamp |
| JP2012094362A (en) * | 2010-10-27 | 2012-05-17 | Ushio Inc | Short arc type flash lamp |
| CN202205710U (en) * | 2011-08-19 | 2012-04-25 | 镇江雷明特种光源有限公司 | Impulse ultraviolet ozone sterilamp tube |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6120182B2 (en) | 2017-04-26 |
| KR20160085694A (en) | 2016-07-18 |
| JP2016126978A (en) | 2016-07-11 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160720 |