CN105788760B - A kind of method for preparing transparent conductive electrode - Google Patents
A kind of method for preparing transparent conductive electrode Download PDFInfo
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- CN105788760B CN105788760B CN201610257256.XA CN201610257256A CN105788760B CN 105788760 B CN105788760 B CN 105788760B CN 201610257256 A CN201610257256 A CN 201610257256A CN 105788760 B CN105788760 B CN 105788760B
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- conductive material
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Electric Cables (AREA)
- Non-Insulated Conductors (AREA)
Abstract
The invention discloses a kind of method for preparing transparent conductive electrode, including：1) transparent conductive material is prepared；2) conversion zone is formed：Conversion zone is formed on the conductive layer of transparent conductive material；3) reacting gas is imported to be reacted：Reacting gas is imported to conversion zone, the conductive layer in conversion zone is reacted with reacting gas；4) transparent conductive electrode is obtained：After reaction terminates, the residual reaction gas in protective gas removing conversion zone is passed through to conversion zone, transparent conductive electrode is produced.The present invention is reacted by reacting gas and conductive layer, Conductive layer portions conductive material is set to be converted into electrically non-conductive material, so as to the electrode patterned, and conductive region and non-conducting areas poor optical properties heteropole are low, realize the shadow etching that disappears completely, effect is notable in actual applications, and preparation flow is simple, prepares cost low.
Description
Technical field
The present invention relates to transparent conductive electrode field, more particularly, it relates to a kind of method for preparing transparent conductive electrode.
Background technology
At present, the material of transparency electrode is mainly poly- including transparent conductive oxide film, CNT, graphene, conduction
Compound, metal grill, metal nanometer line etc..Ito transparent electrode has occupied most by its high grade of transparency and high conductivity
The market share.But ITO electrode needs to use the method for vacuum vapor deposition to prepare, and containing rare element indium, thus cost compared with
Height, and ITO enbrittles, it is impossible to used in flexible device.Thus people begin look for other transparent electrode materials, and metal is received
Rice noodles to the adaptability of flexible device due to its relatively low cost, higher performance, gain great popularity.Thicker metal film
Although opaque, if being carried out waffle-like pattern makes metal grill, will turn into can think with metal nanometer line
The transparent conductive electrode matched in excellence or beauty.And conductive metal material coordinates graphene, CNT, conducting polymer, metal oxide
Semi-conducting material can obtain more preferable applicability.
In the practical application in the fields such as liquid crystal display, OLED (organic electroluminescent), touch-screen, solar cell, often
The transparent conductive electrode patterned is often needed to complete various functions.For existing transparent conductive material, prior art is existing
Multiple patterns method, including laser ablation, the chemical etching method of gold-tinted technique, the chemical etching of silk-screen etching paste, ink-jet
Print the methods such as etching solution.But existing method can all cause etching region and non-etched area to there is larger optical property difference, and
Having has larger pollution to environment, and preparation flow is complicated, prepares the higher shortcoming of cost.
The content of the invention
In order to overcome the deficiencies in the prior art, it is an object of the invention to provide a kind of side for preparing transparent conductive electrode
Method, the present invention is reacted by reacting gas and conductive layer, Conductive layer portions conductive material is converted into electrically non-conductive material, so that
To the electrode of patterning, and conductive region and non-conducting areas poor optical properties heteropole are low, the shadow etching that disappears completely are realized, in reality
Effect is notable in the application of border, and preparation flow is simple, prepares cost low.
To solve the above problems, the technical solution adopted in the present invention is as follows：
A kind of method for preparing transparent conductive electrode, including：
1) transparent conductive material is prepared；
2) conversion zone is formed：Conversion zone is formed on the conductive layer of transparent conductive material；
3) reacting gas is imported to be reacted：Import reacting gas to conversion zone, make conductive layer in conversion zone with
Reacting gas reacts；
4) transparent conductive electrode is obtained：After reaction terminates, it is passed through protective gas to conversion zone and removes in conversion zone
Residual reaction gas, produces transparent conductive electrode.
It is preferred that, the transparent base is glass, macromolecule transparent membrane or macromolecular sheet material.
It is preferred that, the conductive layer is 1-dimention nano conductive material, two-dimensional nano conductive material, metal grill electrically conducting transparent
It is one or more of in material, electrically conducting transparent high polymer material and metal oxide system transparent conductive material.
It is preferred that, the 1-dimention nano conductive material is metal nanometer line transparent conductive material, carbon nano tube transparent conduction
Material, nano metal band transparent conductive material or nano metal rod transparent conductive material.
It is preferred that, in the metal nanometer line transparent conductive material metal nanometer line be silver, nickel, copper, palladium, platinum, gold, cobalt and
Any elemental metals nano wire or several alloying metal nano wires in iron；Metal in the metal grill transparent conductive material
Grid is any elemental metals grid or several alloying metal grids in silver, nickel, copper, aluminium, palladium, platinum, gold, cobalt and iron.
It is preferred that, the two-dimensional nano conductive material is nanometer metallic film transparent conductive material or carbon system electrically conducting transparent material
Material.
It is preferred that, the reacting gas is ozone, vapor, hydrogen peroxide, organic amine, ammonia, halogen gas and its chemical combination
It is one or more of in thing, carbon dioxide, organic acid, nitric acid, hydrochloric acid, sulfur vapor and sulfide steam.
It is preferred that, the protective gas is one or more in nitrogen, air and inert gas.
Further,
The step 2) 3) 4) using the progress of transparent conductive electrode processing unit (plant), the transparent conductive electrode processing unit (plant) bag
Include template body, absorption platform and the compressing member for template body being pressed on absorption platform, the template body is plate, mould
Plate body is arranged on absorption platform, and sealing ring, contact and passage are provided with template body, and the sealing ring and contact are consolidated
Template body is scheduled on close to the side of transparent conductive material, the contact is located in sealing ring, the sealing ring and contact it
Between form noncontact chamber, the passage is arranged at template body noncontact chamber, and passage is two or more；
The step 1) be specially：Pass through spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or galvanizer
Skill forms conductive layer over the transparent substrate；
The step 2) be specially：Transparent conductive material is placed on absorption platform, sealing ring and contact on template body
Support on the conductive layer of transparent conductive material and compress, noncontact chamber forms conversion zone on transparent conductive material；
The step 3) be specially：Reacting gas, conversion zone are imported to conversion zone by the passage on template body
Interior conductive layer is reacted with reacting gas；
The step 4) be specially：Protective gas is passed through to conversion zone by the passage on template body and removes reaction zone
Residual reaction gas in domain, removes template body, produces transparent conductive electrode.
Further,
The step 2) 3) 4) using the progress of transparent conductive electrode processing unit (plant), the transparent conductive electrode processing unit (plant) bag
Include template body, absorption platform, compressing member and flexible protective film for template body being pressed on absorption platform, the template body
To be plate, template body is arranged on absorption platform, and sealing ring, contact and passage, the sealing are provided with template body
Ring and contact are fixed on template body in the side of transparent conductive material, the contact and transparent conductive material contact position
Recessed to have pressure chamber, the contact is located in sealing ring, and noncontact chamber, the ventilation are formed between the sealing ring and contact
Hole is arranged at template body noncontact chamber, and the passage is two or more；The noncontact of the absorption platform corresponding templates body
Gas port is provided with chamber, the flexible protective film is arranged between absorption platform and template body；
The step 1) be specially：Pass through spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or galvanizer
Skill forms conductive layer, and the opened hole at transparent conductive material correspondence absorption platform gas port over the transparent substrate；
The step 2) be specially：Transparent conductive material is placed on absorption platform, covers flexible on transparent conductive material
Sealing ring and contact on diaphragm, template body are supported on flexible protective film and compressed, flexible protective film and electrically conducting transparent
Material forms conversion zone at noncontact chamber；
The step 3) be specially：Reacting gas is imported to conversion zone by gas port, makes the flexibility in conversion zone
Conductive layer in diaphragm bubbling formation reaction compartment, reaction compartment is reacted with reacting gas；
The step 4) be specially：The remnants in protective gas removing reaction compartment are passed through to reaction compartment by gas port
Reacting gas, removes template body and flexible protective film, produces transparent conductive electrode.
Compared with prior art, the beneficial effects of the present invention are：The present invention is reacted by reacting gas and conductive layer, makes to lead
The partially electronically conductive material of electric layer is converted into electrically non-conductive material, so that the electrode patterned, and conductive region and nonconductive regions
Domain poor optical properties heteropole is low, realizes the shadow etching that disappears completely, effect is notable in actual applications.
Brief description of the drawings
Fig. 1 prepares the flow chart of the method for transparent conductive electrode for the present invention；
Fig. 2 is transparent conductive electrode processing unit (plant) use state figure in embodiment 1；
Fig. 3 is transparent conductive electrode processing unit (plant) structural representation in the present invention；
Fig. 4 is A-A profiles in Fig. 3；
Fig. 5 is transparent conductive electrode processing unit (plant) use state figure in embodiment 2；
Fig. 6 is transparent conductive electrode processing unit (plant) use state figure in embodiment 3；
Fig. 7 is transparent conductive electrode processing unit (plant) use state figure in embodiment 4；
Wherein, 1 it is template body, 11 be sealing ring, 12 be contact, 121 be pressure chamber, 13 be passage, 2 is that absorption is flat
Platform, 21 be gas port, 3 be compressing member, 4 be flexible protective film, 5 be transparent conductive material.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
As shown in figure 1, the method for transparent conductive electrode is prepared in the present invention, including step：
1) transparent conductive material is prepared；
2) conversion zone is formed：Conversion zone is formed on the conductive layer of transparent conductive material；
3) reacting gas is imported to be reacted：Import reacting gas to conversion zone, make conductive layer in conversion zone with
Reacting gas reacts；
4) transparent conductive electrode is obtained：After reaction terminates, it is passed through protective gas to conversion zone and removes in conversion zone
Residual reaction gas, produces transparent conductive electrode.
The method that transparent conductive electrode is prepared in the present invention is achieved dependent on transparent conductive electrode processing unit (plant), below
Embodiment first to transparent conductive electrode processing unit (plant) structure is described.
Embodiment 1
As in Figure 2-4, transparent conductive electrode processing unit (plant) includes template body 1, absorption platform 2 and for by template body 1
The compressing member 3 on absorption platform 2 is pressed on, template body 1 is plate, and template body 1 is arranged on absorption platform 2, on template body 1
Sealing ring 11, contact 12 and passage 13 are provided with, sealing ring 11 and contact 12 are fixed on template body 1 close to electrically conducting transparent
The side of material, contact 12 is located in sealing ring 11, and noncontact chamber, passage 13 are formed between sealing ring 11 and contact 12
It is arranged at the noncontact chamber of template body 1, passage 13 is two or more.
In use, transparent conductive material 5 is adsorbed on absorption platform 2, template body 1 is led under the effect of compressing member 3 with transparent
Electric material 5 is fully contacted, and sealing ring 11 and contact 12 are fully supported on transparent conductive material 5, and noncontact chamber is led transparent
The surface of electric material 5 forms conversion zone, imports reacting gas to conversion zone by passage 13, reacting gas is anti-with conductive layer
After should terminating, protective gas is passed through to conversion zone again by passage 13, the residual reaction gas in conversion zone is removed, removes
Template body 1 is removed, transparent conductive electrode is produced.
Absorption platform 2 can realize the abundant fixation of transparent conductive material 5, and compressing member 3 acts on template body 1, realizes mould
Compression of the plate body 1 on transparent conductive material 5, it is ensured that template body 1 is fully contacted with transparent conductive material 5, and noncontact chamber exists
The surface of transparent conductive material 5 forms conversion zone, is that reacting gas and conductive layer reaction provide space, it is ensured that reaction is normally entered
While row, the non-reaction zone domain of conductive layer is effectively protected.
Embodiment 2
As shown in figure 5, transparent conductive electrode processing unit (plant) includes template body 1, absorption platform 2 and for template body 1 to be pressed
The tight compressing member 3 on absorption platform 2, template body 1 is plate, and template body 1 is arranged on absorption platform 2, is set on template body 1
Sealing ring 11, contact 12 and passage 13 are equipped with, sealing ring 11 and contact 12 are fixed on template body 1 close to electrically conducting transparent material
The side of material, contact 12 has pressure chamber 121 with the contact position indent of transparent conductive material 5, and contact 12 is located in sealing ring 11,
Noncontact chamber is formed between sealing ring 11 and contact 12, passage 13 is arranged at the noncontact chamber of template body 1, and passage 13 is
Two or more.
In use, transparent conductive material 5 is adsorbed on absorption platform 2, template body 1 is led under the effect of compressing member 3 with transparent
Electric material 5 is fully contacted, and sealing ring 11 and contact 12 are fully supported on transparent conductive material 5, and noncontact chamber is led transparent
The surface of electric material 5 forms conversion zone, imports reacting gas to conversion zone by passage 13, reacting gas is anti-with conductive layer
After should terminating, protective gas is passed through to conversion zone again by passage 13, the residual reaction gas in conversion zone is removed, removes
Template body 1 is removed, transparent conductive electrode is produced.
Absorption platform 2 can realize the abundant fixation of transparent conductive material 5, and compressing member 3 acts on template body 1, realizes mould
Compression of the plate body 1 on transparent conductive material 5, it is ensured that template body 1 is fully contacted with transparent conductive material 5, and noncontact chamber exists
The surface of transparent conductive material 5 forms conversion zone, is that reacting gas and conductive layer reaction provide space, it is ensured that reaction is normally entered
OK；Pressure chamber 121 can ensure that pressure is constant in the non-reaction zone domain of conductive layer, so as to effectively protect the non-reaction of conductive layer
Region is not influenceed by reacting gas.
Embodiment 3
As shown in fig. 6, transparent conductive electrode processing unit (plant) includes template body 1, absorption platform 2, for template body 1 to be compressed
Compressing member 3 and flexible protective film 4 on absorption platform 2, template body 1 are plate, and template body 1 is arranged on absorption platform 2,
Sealing ring 11, contact 12 and passage 13 are provided with template body 1, sealing ring 11 and contact 12 are fixed on template body 1 and leaned on
The side of near-transparent conductive material, contact 12 has pressure chamber 121, contact 12 with the contact position indent of transparent conductive material 5
In in sealing ring 11, noncontact chamber is formed between sealing ring 11 and contact 12, passage 13 is arranged on the noncontact chamber of template body 1
Place, passage 13 is two or more；Gas port 21, flexible protective are provided with the noncontact chamber of the corresponding templates body 1 of absorption platform 2
Film 4 is arranged between absorption platform 2 and template body 1.
In use, transparent conductive material 5 is adsorbed on absorption platform 2, flexible protective film 4 is covered in transparent conductive material 5
On, template body 1 is fully contacted under the effect of compressing member 3 with flexible protective film 4, and sealing ring 11 and contact 12 are fully supported soft
Property diaphragm 4 on, flexible protective film 4 and transparent conductive material 5 form conversion zone at noncontact chamber, by gas port 21 to
Conversion zone imports reacting gas, makes leading in the bubbling of the flexible protective film 4 formation reaction compartment in conversion zone, reaction compartment
Electric layer is reacted with reacting gas；After reaction terminates, protective gas is passed through except dereaction to reaction compartment by gas port 21
Residual reaction gas in space, removes template body 1 and flexible protective film 4, produces transparent conductive electrode.
Absorption platform 2 can realize the abundant fixation of transparent conductive material 5, and compressing member 3 acts on template body 1, realizes mould
Compression of the plate body 1 on flexible protective film 4, it is ensured that template body 1 is fully contacted with flexible protective film 4, flexible protective film 4 with thoroughly
Bright conductive material 5 forms conversion zone at noncontact chamber, after ventilation, is that reacting gas and conductive layer reaction provide sky in bubbling
Between, it is ensured that reaction is normally carried out；Sealing ring 11 and contact 12 are supported at flexible protective film 4 because compression cannot be introduced into instead
Gas is answered, so as to effectively protect the electric conductivity in the non-reaction zone domain of conductive layer.
Embodiment 4
As shown in fig. 7, transparent conductive electrode processing unit (plant) includes template body 1 in the present invention, template body 1 is roll shape, template
Sealing ring 11, contact 12 and passage 13 are provided with body 1, sealing ring 11 and contact 12 are fixed on template body 1 close to thoroughly
The side of bright conductive material, contact 12 is located in sealing ring 11, and noncontact chamber is formed between sealing ring 11 and contact 12, leads to
Stomata 13 is arranged at the noncontact chamber of template body 1, and passage 13 is two or more.
In use, by external force traction, template body 1 can fully be contacted with transparent conductive material 5, sealing ring 11 and contact
Part 12 is fully supported on transparent conductive material 5, and noncontact chamber forms conversion zone on the surface of transparent conductive material 5, by logical
Stomata 13 imports reacting gas to conversion zone, after reacting gas terminates with conductive layer reaction, by passage 13 again to reaction
Region is passed through protective gas, removes the residual reaction gas in conversion zone, removes template body 1, produces transparent conductive electrode.
Conversion zone is that reacting gas and conductive layer reaction provide space, it is ensured that while reaction is normally carried out, sealing
Ring 11 and contact 12 are fully supported on transparent conductive material 5, effectively protect the electric conductivity in conductive layer non-reaction zone domain.
In above-mentioned embodiment 1-3, heating module can be provided with inside absorption platform 2, temperature has when realizing reaction
Effect control.
In above-mentioned embodiment 4, heating module can be provided with inside template body 1, or set at the conductive material back side
Assisted heating device, effective control of temperature when realizing reaction.
The method that transparent conductive electrode is prepared in the present invention is entered in conjunction with specific embodiments by above-mentioned embodiment below
Row is further described.
Embodiment 1
The preparation of transparent conductive electrode is carried out using embodiment 1：
Wherein, transparent conductive material 5 is obtained in the following manner：In the substrate of glass of cleaning, silk rod blade coating Nano Silver
Conductive layer nano-silver thread film is made after the mixed aqueous solution of line, modified cellulose and surfactant, drying, its sheet resistance is
50ohm/sq；Temperature is 50 DEG C when being reacted in conversion zone, and reacting gas is ozone and vapor；After reaction terminates, use
Protective gas is nitrogen.In the transparent conductive electrode of acquisition, the silver wire in conversion zone, due to being formed with ozone reaction
The nano wire and portion fractures that oxygen mixes are into short-term, and electrical conductivity is decreased obviously, in non-conductive state.
Embodiment 2
The preparation of transparent conductive electrode is carried out using embodiment 1：
1) wherein, transparent conductive material 5 is obtained in the following manner：On PET (polyethylene terephthalate), silk
The mixed solution of rod blade coating nano-silver thread, modified cellulose and surfactant, is made conductive layer thin for nano-silver thread after drying
Film, its sheet resistance is 55ohm/sq；Temperature is 30 DEG C when being reacted in conversion zone, and reacting gas is propane diamine, water vapour and air
Mixed gas；After reaction terminates, the protective gas used is air.In the transparent conductive electrode of acquisition, exposed to reaction zone
Silver wire in domain, because reactive moieties fragment into short-term, electrical conductivity is decreased obviously, in non-conductive state.
Embodiment 3
The preparation of transparent conductive electrode is carried out using embodiment 2：
Wherein, transparent conductive material 5 is obtained in the following manner：Silk rod blade coating NANO CRYSTAL COPPER WIRE, modified fibre on glass
The mixed solution of element and surfactant, is made conductive layer NANO CRYSTAL COPPER WIRE film after drying, its sheet resistance is 60ohm/sq；Reaction zone
Temperature is 100 DEG C when being reacted in domain, and reacting gas is the mixed gas of ozone and water vapour；After reaction terminates, the protection of use
Gas is inert gas.In the transparent conductive electrode of acquisition, the copper cash in conversion zone mixes because reaction forms oxygen
Nano wire and portion fractures into short-term, electrical conductivity is decreased obviously, in non-conductive state.
Embodiment 4
The preparation of transparent conductive electrode is carried out using embodiment 2：
Wherein, transparent conductive material 5 is obtained in the following manner：By spraying silver nanoparticle on heat polycarbonates sheet material
Silver-colored grid transparent conductive material is made in particle conductive ink mode, and its sheet resistance is 60ohm/sq；Temperature when being reacted in conversion zone
For 100 DEG C, reacting gas is the mixed gas of ozone and water vapour；After reaction terminates, the protective gas used is inert gas.
In the transparent conductive electrode of acquisition, the silver-colored grid in conversion zone, due to reacting the mitogenetic Cheng Yin in rear portion sulfide, electricity
Conductance is decreased obviously, in non-conductive state.
Embodiment 5
The preparation of transparent conductive electrode is carried out using embodiment 3：
Wherein, transparent conductive material 5 is obtained in the following manner：It is saturating by the obtained CNT of mode of printing on glass
Bright conductive material, its sheet resistance is 40ohm/sq；Temperature is 60 DEG C when being reacted in conversion zone, and reacting gas is ozone and water vapour
Mixed gas；After reaction terminates, the protective gas used is air.In the transparent conductive electrode of acquisition, exposed to reaction zone
Carbon nanometer in domain, because reaction rear portion disjunction is cleaved into short-term, electrical conductivity is decreased obviously, in non-conductive state.
Embodiment 6
The preparation of transparent conductive electrode is carried out using embodiment 3：
Wherein, transparent conductive material 5 is obtained in the following manner：It is transparent by the obtained nickel screen lattice of electroplating technology on glass
Conductive material, its sheet resistance is 45ohm/sq；Temperature is 150 DEG C when being reacted in conversion zone, and reacting gas is vapor and ozone
Mixed gas；After reaction terminates, the protective gas used is inert gas.In the transparent conductive electrode of acquisition, exposed to anti-
The nickel screen lattice in region are answered, due to generating the oxide of nickel after reaction, electrical conductivity is decreased obviously, in non-conductive state.
Embodiment 7
The preparation of transparent conductive electrode is carried out using embodiment 4：
Wherein, transparent conductive material 5 is obtained in the following manner：Pass through on PET (polyethylene terephthalate)
Silver-colored grid transparent conductive material is made in electroplating technology, and its sheet resistance is 40ohm/sq；Temperature is 50 DEG C when being reacted in conversion zone, instead
It is ozone and the gaseous mixture of vapor to answer gas；After reaction terminates, the protective gas used is air.The electrically conducting transparent electricity of acquisition
In extremely, the silver-colored grid in conversion zone, due to partial oxidation and fragmenting into short-term after reaction, electrical conductivity is decreased obviously,
In non-conductive state.
In above-described embodiment, existed by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology
Formed and led on glass, macromolecule transparent membrane (such as PET film) or macromolecular sheet material (such as PMMA sheet materials, PC sheet materials, PET sheet)
Electric layer, conductive layer can be conductive from 1-dimention nano conductive material such as metal nanometer line transparent conductive material, carbon nano tube transparent
Material, nano metal band transparent conductive material, nano metal rod transparent conductive material etc., two-dimensional nano conductive material such as nanogold
Belong to thin-film transparent conductive material or carbon system transparent conductive material (graphene transparent conductive material), metal nanometer line electrically conducting transparent material
Material (such as any elemental metals nano wire or several alloying metal nano wires in silver, nickel, copper, palladium, platinum, gold, cobalt and iron), gold
Belong to grid transparent conductive material (as any elemental metals grid in silver, nickel, copper, aluminium, palladium, platinum, gold, cobalt and iron or it is several
Alloying metal grid), electrically conducting transparent high polymer material (such as conducting polymer PEDOT/PSS (poly- 3,4-ethylene dioxythiophenes/poly-
Styrene sulfonate)) and metal oxide system transparent conductive material.
During reaction, reacting gas can be ozone, vapor, hydrogen peroxide, organic amine, ammonia, halogen gas and its chemical combination
One or more of mixture in thing, carbon dioxide, organic acid, nitric acid, hydrochloric acid, sulfur vapor and sulfide steam；Reaction temperature
Mobile state adjustment can be entered between 0-150 DEG C according to real reaction speed.
After reaction terminates, the protective gas being filled with can be one or more in nitrogen, air and inert gas.
Using above alternative solution, transparent conductive electrode can be prepared, and its Conductive layer portions conductive material is converted
For electrically non-conductive material, so that the electrode patterned, and conductive region and non-conducting areas poor optical properties heteropole are low, and it is real
The shadow that now disappears completely is etched, and effect is notable in actual applications.
It will be apparent to those skilled in the art that technical scheme that can be as described above and design, make other various
It is corresponding to change and deformation, and all these change and deformation should all belong to the protection domain of the claims in the present invention
Within.
Claims (9)
1. a kind of method for preparing transparent conductive electrode, including：
1) transparent conductive material is prepared；
2) conversion zone is formed：Conversion zone is formed on the conductive layer of transparent conductive material；
3) reacting gas is imported to be reacted：Reacting gas is imported to conversion zone, makes the conductive layer in conversion zone and reaction
Gas reacts；
4) transparent conductive electrode is obtained：After reaction terminates, the remnants in protective gas removing conversion zone are passed through to conversion zone
Reacting gas, produces transparent conductive electrode；
The step 2) 3) 4) using the progress of transparent conductive electrode processing unit (plant), the transparent conductive electrode processing unit (plant) includes mould
Plate body, absorption platform and the compressing member for being pressed on template body on absorption platform, the template body are plate, template body
It is arranged on absorption platform, sealing ring, contact and passage is provided with template body, the sealing ring and contact is fixed on
Template body is located in sealing ring close to the side of transparent conductive material, the contact, shape between the sealing ring and contact
Into noncontact chamber, the passage is arranged at template body noncontact chamber, and passage is two or more；
The step 1) be specially：Existed by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology
Conductive layer is formed on transparent base；
The step 2) be specially：Transparent conductive material is placed on absorption platform, and the sealing ring and contact on template body are supported
On the conductive layer of transparent conductive material and compress, noncontact chamber forms conversion zone on transparent conductive material；
The step 3) be specially：Imported by the passage on template body to conversion zone in reacting gas, conversion zone
Conductive layer is reacted with reacting gas；
The step 4) be specially：Protective gas is passed through by the passage on template body to conversion zone to remove in conversion zone
Residual reaction gas, remove template body, produce transparent conductive electrode.
2. the method for transparent conductive electrode is prepared as claimed in claim 1, it is characterised in that the transparent base is glass, height
Molecule transparent membrane or macromolecular sheet material.
3. the method for transparent conductive electrode is prepared as claimed in claim 1, it is characterised in that the conductive layer is led for 1-dimention nano
Electric material, two-dimensional nano conductive material, metal grill transparent conductive material, electrically conducting transparent high polymer material and metal oxide system
It is one or more of in transparent conductive material.
4. the method for transparent conductive electrode is prepared as claimed in claim 3, it is characterised in that the 1-dimention nano conductive material is
Metal nanometer line transparent conductive material, carbon nano tube transparent conductive material, nano metal band transparent conductive material or nano metal
Rod transparent conductive material.
5. the method for transparent conductive electrode is prepared as claimed in claim 4, it is characterised in that the metal nanometer line electrically conducting transparent
Metal nanometer line is any elemental metals nano wire or several alloys in silver, nickel, copper, palladium, platinum, gold, cobalt and iron in material
Metal nanometer line nano-silver thread；In the metal grill transparent conductive material metal grill be silver, nickel, copper, aluminium, palladium, platinum, gold,
Any elemental metals grid or several alloying metal grids in cobalt and iron.
6. the method for transparent conductive electrode is prepared as claimed in claim 3, it is characterised in that the two-dimensional nano conductive material is
Nanometer metallic film transparent conductive material or carbon system transparent conductive material.
7. the method for transparent conductive electrode is prepared as claimed in claim 1, it is characterised in that the reacting gas is ozone, water
Steam, hydrogen peroxide, organic amine, ammonia, halogen gas and its compound, carbon dioxide, organic acid, nitric acid, hydrochloric acid, sulfur vapor and
It is one or more of in sulfide steam.
8. the method for transparent conductive electrode is prepared as claimed in claim 1, it is characterised in that the protective gas is nitrogen, sky
It is one or more in gas and inert gas.
9. the method for transparent conductive electrode is prepared as described in claim any one of 2-8, it is characterised in that
1) transparent conductive material is prepared；
2) conversion zone is formed：Conversion zone is formed on the conductive layer of transparent conductive material；
3) reacting gas is imported to be reacted：Reacting gas is imported to conversion zone, makes the conductive layer in conversion zone and reaction
Gas reacts；
4) transparent conductive electrode is obtained：After reaction terminates, the remnants in protective gas removing conversion zone are passed through to conversion zone
Reacting gas, produces transparent conductive electrode；
The step 2) 3) 4) using the progress of transparent conductive electrode processing unit (plant), the transparent conductive electrode processing unit (plant) includes mould
Plate body, absorption platform, compressing member and flexible protective film for being pressed on template body on absorption platform, the template body is flat
Template, template body is arranged on absorption platform, is provided with sealing ring, contact and passage on template body, the sealing ring and
Contact is fixed on template body close to the side of transparent conductive material, and the contact has with transparent conductive material contact position indent
Pressure chamber, the contact is located in sealing ring, and noncontact chamber is formed between the sealing ring and contact, and the passage is set
Put at template body noncontact chamber, the passage is two or more；At the noncontact chamber of the absorption platform corresponding templates body
Gas port is provided with, the flexible protective film is arranged between absorption platform and template body；
The step 1) be specially：Existed by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology
Conductive layer, and the opened hole at transparent conductive material correspondence absorption platform gas port are formed on transparent base；
The step 2) be specially：Transparent conductive material is placed on absorption platform, and flexible protective is covered on transparent conductive material
Sealing ring and contact on film, template body are supported on flexible protective film and compressed, flexible protective film and transparent conductive material
Conversion zone is formed at noncontact chamber；
The step 3) be specially：Reacting gas is imported to conversion zone by gas port, makes the flexible protective in conversion zone
Conductive layer in film bubbling formation reaction compartment, reaction compartment is reacted with reacting gas；
The step 4) be specially：The residual reaction in protective gas removing reaction compartment is passed through to reaction compartment by gas port
Gas, removes template body and flexible protective film, produces transparent conductive electrode.
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| CN107955198A (en) * | 2016-10-14 | 2018-04-24 | 中国科学院大连化学物理研究所 | A kind of preparation method of nano-silver thread-chitosan self assembly conductive film coating |
| CN107121467A (en) * | 2017-04-11 | 2017-09-01 | 中国农业大学 | A kind of multi-parameter water quality detection means |
| CN109830327B (en) * | 2019-02-22 | 2020-09-25 | 苏州绘格光电科技有限公司 | Preparation method of transparent conductive electrode |
| CN110629222B (en) * | 2019-10-30 | 2022-02-18 | 合肥微晶材料科技有限公司 | Etching method of nano silver wire transparent conductive film with shadow eliminating function |
| CN111128702A (en) * | 2019-12-10 | 2020-05-08 | Tcl华星光电技术有限公司 | Preparation method of metal electrode |
| CN111326658B (en) * | 2020-03-10 | 2023-02-17 | 苏州大学 | Perovskite solar cell with nickel grid flexible electrode and preparation method thereof |
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