CN105788651B - Three-dimensional rotating flexible mechanism convenient to manufacture - Google Patents

Three-dimensional rotating flexible mechanism convenient to manufacture Download PDF

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Publication number
CN105788651B
CN105788651B CN201610307270.6A CN201610307270A CN105788651B CN 105788651 B CN105788651 B CN 105788651B CN 201610307270 A CN201610307270 A CN 201610307270A CN 105788651 B CN105788651 B CN 105788651B
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reed
rigid body
outer ring
inner ring
disc
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CN105788651A (en
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赵宏哲
任思远
毕树生
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Beihang University
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Beihang University
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    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B3/00Details of movements not otherwise provided for

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Abstract

The invention discloses a three-dimensional rotating flexible mechanism convenient to manufacture, which consists of an upper disc (1), a lower disc (2), an outer ring (3), an inner ring (4) and a reed (5), wherein the inner ring (4) and the reed (5) are arranged in the outer ring, the upper disc (1) and the lower disc (2) have the same structure, and the lower disc (2) has the structure that the upper disc (1) rotates 180 degrees around a Z axis. The upper disc (1) and the lower disc (2) are integrally formed parts and are cut on a cylindrical material by adopting a wire cutting technology, the outer ring (3) and the inner ring (4) are similar in structure, the inner ring (4) is in a structure that the outer ring (3) rotates 180 degrees around a Z axis, and the outer ring (3) and the inner ring (4) are integrally formed parts and are cut on the same cylindrical material by adopting the wire cutting technology. The mechanism is provided with ten reeds, six middle rigid bodies and four rigid bodies respectively, so that the inner ring (4) and the upper layer of the outer ring (3) have 3 degrees of freedom rotating around a vertical axis Y and a horizontal axis X of a space coordinate system relative to the lower layer, and the upper layer of the upper disc (1) and the lower disc (2) have 3 degrees of freedom rotating around a Z axis of the space coordinate system relative to the lower layer. The invention has the advantages of good comprehensive performance in terms of rotational rigidity, radial rigidity, stroke and rotational precision.

Description

Three-dimensional rotating flexible mechanism convenient to manufacture
Technical Field
The invention relates to a flexible mechanism. Belongs to the field of precision positioning, in particular to a three-dimensional rotating flexible mechanism which is convenient to manufacture, has large deformation and high precision.
Background
The flexible mechanism is a structural form which transfers force and energy between adjacent rigid bodies by using the elastic deformation of materials under the action of external load so as to generate relative translation or rotation. Compared with the traditional rigid mechanism, the flexible mechanism is formed by integrally cutting a material, the elastic deformation of the material is utilized to generate rotary motion, and compared with the traditional rotating unit, the flexible mechanism does not need to be assembled without gaps and friction, so that higher rotating precision can be realized, meanwhile, the abrasion is avoided, the service life is prolonged, the lubrication is avoided, and the pollution is avoided. The method can be applied to various fields of precise positioning, posture adjustment and the like.
The three-dimensional rotating flexible mechanism has the characteristics of large deformation, high precision and the like, and has larger application requirements. However, the existing three-dimensional rotating mechanism is of a notch type, so that the precision is not high and the stroke is small; or a parallel flexible mechanism, the structure is complex, and the assembly error is large.
Disclosure of Invention
The invention provides a three-dimensional rotating flexible mechanism which is convenient to manufacture, and aims to solve the problems that the existing three-dimensional rotating mechanism is single in type, the comprehensive performances such as rotating rigidity, radial rigidity, stroke, rotating precision and the like are required to be improved, and the assembling error is large. The flexible mechanism is formed by connecting two sets of space staggered flexible mechanisms and one set of inner and outer ring flexible mechanisms in series, and has the advantages of large stroke and high precision.
The invention has the advantages.
1. The upper disc, the lower circle, the outer ring and the inner disc are designed to rotate 180 degrees around the Z axis, and the design that the reeds are crossed in space but not fixed at the crossed point is adopted, so that the internal stress of the mechanism is reduced, and the service life is prolonged.
2. The joints of the upper disk and the lower disk, the lower disk and the rigid body on the outer ring, and the outer ring and the inner ring adopt the connection form of the screws and the cushion blocks, so that the rigidity of the three-dimensional rotating flexible mechanism is improved, the bearing capacity is enhanced, and the natural frequency is increased.
3. And the linear cutting and drilling and milling processes are integrated, so that the assembly error is reduced.
4. The mechanism designed by the invention is of a hollow structure, is beneficial to reducing weight and is easy to process.
5. The three-dimensional rotating flexible mechanism designed by the invention has good comprehensive performance in rotating rigidity, radial rigidity, stroke and rotating precision.
Drawings
Fig. 1 is a schematic view of the overall structure of the three-dimensional rotating flexible mechanism 1.
Fig. 2 is a schematic diagram 2 of the overall structure of the three-dimensional rotating flexible mechanism of the invention.
Fig. 3 is an exploded view of the three-dimensional rotary compliant mechanism assembly of the present invention.
Fig. 4 is a front view of the three-dimensional rotational compliance mechanism of the present invention.
Fig. 5 is a right side view of the three-dimensional rotary compliant mechanism of the present invention.
In the figure.
1-upper disc 2-lower disc 3-outer ring
4-inner ring 5-reed 6-positioning pin
101-upper disk dynamic rigid body 102-upper disk static rigid body 103-A cutting joint
104-A cutting groove 201-lower disk dynamic rigid body 202-lower disk static rigid body
203-B cutting groove 204-B cutting groove 301-outer ring upper rigid body
302-outer ring middle rigid body 303-outer ring static rigid body 304-C cutting groove
305-D incision 401-inner ring upper rigid body 402-inner ring middle rigid body
403-inner ring static rigid body 404-E notch 405-F notch
501-reed A502-reed B503-reed C
504-Reed D505-Reed E506-Reed F
507-Reed G508-Reed H509-Reed I
510-Reed J
Detailed Description
The invention will be further explained with reference to the drawings.
The invention discloses a three-dimensional rotating flexible mechanism convenient to manufacture, which consists of an upper disc 1, a lower disc 2, an outer ring 3, an inner ring 4 arranged in the outer ring 3 and a reed 5; the outer ring 3 comprises an outer ring upper rigid body 301, an outer ring middle rigid body 302, an outer ring static rigid body 303, a C cutting groove 304 and a D cutting groove 305; the inner ring 4 arranged inside the outer ring 3 comprises an inner ring upper rigid body 401, an inner ring middle rigid body 402, an inner ring static rigid body 403, an E slot 404 and an F slot 405; the outer ring 3 and the inner ring 4 are integrally cut and processed, and then the inner ring 4 is rotated by 180 degrees along the Z axis and is fixed with the outer ring 3 through a pin. The three-dimensional rotation flexible mechanism of the invention has a virtual rotation center which is positioned on an intersection O of the A reed 501 and the C reed 503, the E reed 505 and the G reed 507, and the I reed 509 and the J reed 510, and an XYZ coordinate system is established at the O point. In the coordinate system XYZ, the outer ring rigid body 303 and the inner ring rigid body 403 are stationary; the outer ring middle rigid body 302 and the inner ring middle rigid body 402 can rotate around the X axis, and the maximum stroke of the outer ring middle rigid body and the inner ring middle rigid body is one-dimensional rotation motion of +/-4 degrees; the outer ring upper rigid body 301 and the inner ring upper rigid body 401 can rotate around the Y axis, and the maximum stroke of the outer ring upper rigid body and the inner ring upper rigid body is one-dimensional rotation motion of +/-4 degrees; the upper circular rigid body 101 can rotate around the Z-axis, and the maximum stroke thereof is a one-dimensional rotational motion of ± 4 °. The 3 kinds of rotary motion are mutually connected in series to form the three-dimensional rotary flexible mechanism.
The upper disc 1 comprises an upper disc dynamic rigid body 101, an upper disc static rigid body 102, an A cutting seam 103 and an A cutting groove 104, wherein the upper disc dynamic rigid body 101 and the upper disc static rigid body 102 are respectively positioned at an inner position and an outer position; wherein, the upper disc dynamic rigid body 101 is connected with the upper disc static rigid body 102 through a reed 5, and the reed 5 for connection is an I reed 509; the I reed 509 has a degree of freedom of rotation about a vertical axis Z in a spatial rectangular coordinate system O (x, y, Z); the lower disc comprises a lower disc dynamic rigid body 201, a lower disc static rigid body 202, a B cutting seam 203 and a B cutting seam 204, and the lower disc dynamic rigid body 201 and the lower disc static rigid body 202 are respectively positioned at an inner position and an outer position; wherein, the lower disc dynamic rigid body 201 is connected with the lower disc static rigid body 202 through a reed 5, and the connecting reed 5 is a J reed 510; the J reed 510 has a degree of freedom of rotation about a vertical axis Z in a spatial rectangular coordinate system O (x, y, Z); a gap exists between the inner side of the upper disc dynamic rigid body 101 and the outer side of the upper disc static rigid body 102, a gap exists between the inner side of the lower disc dynamic rigid body 201 and the outer side of the lower disc static rigid body 202, and the gap is as small as possible within a corner range that the yield strength of the I reed 509 and the J reed 510 is not more than that of the I reed 509 and the J reed 510; the length of each reed and the included angle between the reeds influence the characteristics of the mechanism such as the motion range, the flexibility and the motion precision; the thickness of each reed affects the stroke, compliance and life of the mechanism.
The outer ring 3 comprises an outer ring upper rigid body 301, an outer ring middle rigid body 302, an outer ring static rigid body 303, a C cutting groove 304 and a D cutting groove 305, the upper end of the outer ring middle rigid body 302 is connected with the outer ring upper rigid body 301 through an A reed 501 and a B reed 502, the connection inclination directions of the A reed 501 and the B reed 502 are the same, the A reed 501 and the B reed 502 are symmetrical with each other about a YOZ plane, the lower end of the outer ring middle rigid body 302 is connected with the outer ring static rigid body 303 through an E reed 505 and an F reed 506, the E reed 505 and the F reed 506 are the same in inclination direction and are symmetrical with each other about an XOZ plane, the A reed 501 and the B reed 502 have freedom of rotation around a transverse axis X in a space rectangular coordinate system O (X, Y and z), the E reed 505 and the F reed 506 have freedom of rotation around a longitudinal axis Y in the space rectangular coordinate system O (X, Y and z), the C cutting groove 304 separates the outer ring upper rigid body 301 from the outer ring middle rigid body 302, the D cutting groove 305 separates the outer ring middle rigid body 302 from the outer ring static rigid body 302, the outer ring middle rigid body static reed 301 from the outer ring upper rigid body lower rigid body upper rigid body lower rigid body upper rigid body lower rigid body.
The inner ring 4 is similar to the outer ring 3 in structure and comprises an inner ring upper rigid body 401, an inner ring middle rigid body 402, an inner ring static rigid body 403, an E cutting groove 404 and an F cutting groove 405, wherein the upper end of the inner ring middle rigid body 402 is connected with the inner ring upper rigid body 401 through a C reed 503 and a D reed 504, the C reed 503 and the D reed 504 have the same inclination direction and are symmetrical to each other about a YOZ plane, the lower end of the inner ring middle rigid body 402 is connected with the inner ring static rigid body 403 through a G reed 507 and an H reed 508, the C reed 503 and the D reed 504 have the freedom of rotating around a transverse axis X in a space right-angle coordinate system O (X, Y and z), the G reed 507 and the H reed 508 have the freedom of rotating around a longitudinal axis Y in the space right-angle coordinate system O (X, Y and z), the E cutting groove 404 separates the inner ring upper rigid body 401 from the inner ring middle rigid body 402, the F cutting groove 405 separates the inner ring middle rigid body 402 from the inner ring static rigid body 403 from the inner ring static body 402, the inner ring static rigid body 402, the inner ring middle rigid body 402 has the influence on the inner ring top surface and the inner ring top surface, the inner ring top surface of the inner ring motion, the included angle of the inner ring top surface of the inner ring 402 is not more than 30 degrees, the equal to equal.
A certain gap is reserved between the A reed 501 and the C reed 503 which are positioned on the same side, and the axes are crossed with each other to form an X-shaped crossed reed flexible mechanism; a certain gap is formed between the reed B502 and the reed D504 which are positioned on the same side, and the axes are mutually crossed to form an X-shaped crossed reed flexible mechanism; a certain gap is reserved between the E reed 505 and the G reed 507 which are positioned on the same side, and the axes are mutually crossed to form an X-shaped crossed reed flexible mechanism; a certain gap is formed between the F reed 506 and the H reed 508 which are positioned on the same side, and the axes are mutually crossed to form an X-shaped crossed reed flexible mechanism; a certain gap is reserved between the I reed 509 and the J reed 510 which are positioned on the same side, and the axes are crossed with each other to form an X-shaped crossed reed flexible mechanism. The length of each reed and the included angle between the reeds influence the characteristics of the mechanism such as the motion range, the flexibility and the motion precision; the thickness of each reed affects the stroke, compliance and life of the mechanism.
In the present invention, the a-slits 103 separate the upper disc 1 from the lower disc 2.
In the present invention, the B slits 203 separate the lower disk 2 from the inner ring upper rigid body 301 and the outer ring upper rigid body 401.
The cutting slits 103A and 203B are straight lines, and the cutting slits are processed by a cutting machine in two times.
The positioning between the inner ring 4 and the outer ring 3 is realized by positioning and assembling the axial positions of the upper disc rigid body 102, the lower disc rigid body 202 and the outer ring upper rigid body 301, the radial positions of the inner ring upper rigid body 401 and the outer ring upper rigid body 301, and the radial positions of the inner ring rigid body 403 and the outer ring rigid body 303 through positioning pins, so that the inner ring upper rigid body 401, the inner ring intermediate rigid body 402 and the inner ring rigid body 403 and the outer ring upper rigid body 301, the outer ring intermediate rigid body 302 and the outer ring rigid body 303 form an integrated flexible mechanism dynamic rigid body, flexible mechanism upper rigid body, flexible mechanism lower rigid body and flexible mechanism static rigid body respectively, thereby forming the three-dimensional rotation flexible mechanism of the invention.
For the three-dimensional rotation flexible mechanism of the above structure, the flexible mechanism dynamic rigid body has 3 degrees of freedom of rotation about the horizontal axis X and rotation about the vertical axis Y and rotation about the vertical axis Z with respect to the flexible mechanism static rigid body. Through the connection mode of the E reed 505, the F reed 506, the G reed 507 and the H reed 508, the rigid body under the flexible mechanism has 1 degree of freedom rotating around a longitudinal axis Y relative to the rigid body of the flexible mechanism; through the connection mode of the A reed 501, the B reed 502, the C reed 503 and the D reed 504, the flexible mechanism rigid body has 1 degree of freedom rotating around a transverse axis X relative to the flexible mechanism lower rigid body; through the connection mode of the I reed 509 and the J reed 510, the flexible mechanism rigid body has 1 degree of freedom rotating around a vertical axis Z relative to the flexible mechanism rigid body.
The three-dimensional rotating flexible mechanism designed by the invention is a mechanism convenient to manufacture, is designed and processed in an integrated manner, and the processing mode of the mechanism is mainly an integrated technology of linear cutting and drilling and milling processes, so that the assembly error can be reduced. The processing method comprises the following steps: measuring the ring body and the height of the ring body completely, cutting a cutting joint B203 from the middle by linear cutting to divide the blank into two parts; cutting the upper blank into A cutting grooves 104 by wire cutting to form I reeds 509 and J reeds 510, and cutting A cutting grooves 103 from the middle to obtain an upper disc 1 and a lower disc 2; removing the blank material from a central through hole by wire cutting, cutting the gap between the inner ring and the outer ring twice, and adding a pin before cutting; c cutting grooves 304 and pin holes are cut on the front and back surfaces through wire cutting, and D cutting grooves 305 and pin holes are cut on the left and right surfaces to obtain an inner ring 4 and an outer ring 3; the pin is detached, the inner ring 4 is drawn out and rotated 180 degrees to be installed in the inner ring, the upper disc is turned 180 degrees, and the pin is installed. Thus, the processing and assembling process of the three-dimensional rotating flexible mechanism is completed.
The three-dimensional rotating flexible mechanism shown in fig. 1 of the invention is in a cylindrical configuration, and can also be designed into a cube, a cuboid or a spherical configuration according to actual needs.

Claims (5)

1. The utility model provides a make convenient three-dimensional flexible mechanism that rotates which characterized in that: the device is composed of an upper disc (1), a lower disc (2), an outer ring (3), an inner ring (4) arranged in the outer ring and a reed (5); the upper disc (1) and the lower disc (2), and the outer ring (3) and the inner ring (4) are installed by pins, cushion blocks or screws;
the upper disc (1) and the lower disc (2) have the same structure, the lower disc (2) has a structure that the upper disc (1) rotates 180 degrees around a Z axis, and the upper disc (1) and the lower disc (2) are integrally formed parts and are cut on a cylindrical material by adopting a linear cutting technology; the outer ring (3) and the inner ring (4) are integrally formed, the outer ring (3) and the inner ring (4) are cut from hollow cylindrical materials with different inner diameters by adopting a linear cutting technology, and the cut inner ring (4) rotates by 180 degrees around a Z axis to be assembled with the outer ring (3); the mechanism is respectively provided with ten reeds, six middle rigid bodies and four rigid bodies; the ten reeds refer to a reed A (501), a reed B (502), a reed C (503), a reed D (504), a reed E (505), a reed F (506), a reed G (507), a reed H (508), a reed I (509) and a reed J (510), wherein the reeds A to H have the same structure, and the reed I and the reed J have the same structure; the six middle rigid bodies are an upper disc rigid body (102), a lower disc rigid body (202), an outer ring upper rigid body (301), an inner ring upper rigid body (401), an outer ring middle rigid body (302) and an inner ring middle rigid body (402); the six middle rigid bodies are respectively arranged among the four rigid bodies; the four rigid bodies are an upper disk dynamic rigid body (101), a lower disk dynamic rigid body (201), an outer ring static rigid body (303) and an inner ring static rigid body (403);
the upper disc (1) comprises an upper disc dynamic rigid body (101), an upper disc static rigid body (102), an A cutting seam (103) and an A cutting groove (104), and the upper disc dynamic rigid body (101) and the upper disc static rigid body (102) are respectively positioned at an inner position and an outer position; the upper disc dynamic rigid body (101) is connected with the upper disc static rigid body (102) through an I reed (509), so that the I reed (509) has the degree of freedom of rotating around a vertical axis Z in a space rectangular coordinate system O (x, y, Z); a cutting seam (103) separates the upper disc (1) from the lower disc (2); the A cutting groove (104) separates the upper disc dynamic rigid body (101) from the upper disc static rigid body (102);
the lower disc (2) comprises a lower disc dynamic rigid body (201), a lower disc static rigid body (202), a B cutting seam (203) and a B cutting seam (204), and the lower disc dynamic rigid body (201) and the lower disc static rigid body (202) are respectively positioned at an inner position and an outer position; the lower disc dynamic rigid body (201) is connected with the lower disc static rigid body (202) through a J reed (510), so that the J reed (510) has the degree of freedom of rotating around a vertical axis Z in a space rectangular coordinate system O (x, y, Z); the lower disc (2) is separated from the outer ring (3) and the inner ring (4) by a cutting slot (203); the cutting groove (204) B separates the lower disc dynamic rigid body (201) from the lower disc static rigid body (202);
the outer ring (3) comprises an outer ring upper rigid body (301), an outer ring middle rigid body (302), an outer ring static rigid body (303), a C cutting groove (304) and a D cutting groove (305), the upper end of the outer ring middle rigid body (302) is connected with the outer ring upper rigid body (301) through an A reed (501) and a B reed (502), so that the A reed (501) and the B reed (502) have freedom degrees of rotating around a horizontal axis X in a space rectangular coordinate system O (X, Y and z), the lower end of the outer ring middle rigid body (302) is connected with the outer ring static rigid body (303) through an E reed (505) and an F reed (506), so that the E reed (505) and the F reed (506) have freedom degrees of rotating around a vertical axis Y in the space rectangular coordinate system O (X, Y and z), the C cutting groove (304) separates the outer ring upper rigid body (301) from the outer ring middle rigid body (302), the D cutting groove (305) separates the outer ring middle rigid body (302) from the outer ring static body (303), an included angle between the outer ring upper reed (501) and an outer ring middle reed (502) surface (60) is marked as an included angle E60 DEG, and an outer ring upper reed (8560 DEG, and an outer ring surface of the middle reed (302) of the outer ring middle reed (502);
the inner ring (4) comprises an inner ring upper rigid body (401), an inner ring middle rigid body (402), an inner ring static rigid body (403), an E cutting groove (404) and an F cutting groove (405), the upper end of the inner ring middle rigid body (402) is connected with the inner ring upper rigid body (401) through a C reed (503) and a D reed (504), so that the C reed (503) and the D reed (504) have the freedom degree of rotating around a transverse axis X in a space rectangular coordinate system O (X, Y and z), the lower end of the inner ring middle rigid body (402) is connected with the inner ring static rigid body (403) through a G reed (507) and an H reed (508), so that the G reed (507) and the H reed (508) have the freedom degree of rotating around a longitudinal axis Y in the space rectangular coordinate system O (X, Y and z), the E cutting groove (404) separates the inner ring upper rigid body (401) from the inner ring middle rigid body (402), the F cutting groove (405) separates the inner ring middle rigid body (402) from the inner ring static plate surface (403), the C reed (503) and the surface of the inner ring upper rigid body (505) and the lower plate (60), and the included angle between the inner ring upper surface (3560) of the inner ring middle reed (E reed (402);
an X-shaped crossed reed flexible mechanism is formed between the reeds A (501) and C (503) which are positioned on the same side; an X-shaped crossed reed flexible mechanism is formed between the reeds B (502) and D (504) which are positioned on the same side; an X-shaped crossed reed flexible mechanism is formed between the E reed (505) and the G reed (507) which are positioned on the same side; an X-shaped crossed reed flexible mechanism is formed between the F reed (506) and the H reed (508) which are positioned on the same side; the I reed (509) and the J reed (510) positioned on the same side form an X-shaped crossed reed flexible mechanism;
the outer ring upper rigid body (301) and the inner ring upper rigid body (401) are radially positioned and assembled, and the outer ring static rigid body (303) and the inner ring static rigid body (403) are radially positioned and assembled;
and gaskets are added between the upper disc static rigid body (102) and the lower disc static rigid body (202) in the axial direction, between the upper disc dynamic rigid body (101) and the lower disc dynamic rigid body (201) in the axial direction, and between the lower disc static rigid body (202) and the outer ring upper rigid body (301) in the axial direction for positioning and assembling.
2. The three-dimensional flexible rotating mechanism convenient to manufacture as claimed in claim 1, wherein the included angle α is consistent with the included angle β in the same rigid body, and α - β -30-60 degrees.
3. A three-dimensional rotational compliance mechanism for facilitating manufacture as claimed in claim 1 wherein: the A reed (501) and the B reed (502) have the same inclination direction and are symmetrical to each other about a YOZ plane; the C reed (503) and the D reed (504) have the same inclination direction and are symmetrical to each other about a YOZ plane; the E reed (505) and the F reed (506) have the same inclination direction and are symmetrical to each other about the XOZ plane; the G reed (507) and the H reed (508) have the same inclination direction and are symmetrical to each other about the XOZ plane.
4. A three-dimensional rotational compliance mechanism for facilitating manufacture as claimed in claim 1 wherein: the projection of the A reed (501) and the C reed (503) on the same side on a YOZ plane is equal in length, the projection of the B reed (502) and the D reed (504) on the YOZ plane is equal in length, the projection of the E reed (505) and the G reed (507) on an XOZ plane is equal in length, the projection of the F reed (506) and the H reed (508) on the XOZ plane is equal in length, and the projection of the I reed (509) and the J reed (510) are equal in length.
5. A three-dimensional rotational compliance mechanism for facilitating manufacture as claimed in claim 1 wherein: the three-dimensional rotating flexible mechanism is in a cylinder configuration, a cube configuration, a cuboid configuration or a sphere configuration.
CN201610307270.6A 2016-05-11 2016-05-11 Three-dimensional rotating flexible mechanism convenient to manufacture Expired - Fee Related CN105788651B (en)

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Citations (2)

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Publication number Priority date Publication date Assignee Title
CN102324253A (en) * 2011-06-03 2012-01-18 中国科学院光电技术研究所 Parallel micro-positioning platform based on driving of piezoelectric ceramic driver and micro-positioning platform system
CN104006087A (en) * 2014-06-09 2014-08-27 北京航空航天大学 Crossed spring leaf flexible hookeHooke joint

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102324253A (en) * 2011-06-03 2012-01-18 中国科学院光电技术研究所 Parallel micro-positioning platform based on driving of piezoelectric ceramic driver and micro-positioning platform system
CN104006087A (en) * 2014-06-09 2014-08-27 北京航空航天大学 Crossed spring leaf flexible hookeHooke joint

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Title
Ruizhou Wang etc..A planar 3-DOF nanopositioning platform with large magnification.《Precision Engineering》.2016,221-231. *
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