CN105785582B - A kind of polarised light acquisition device of vector space variation rotational symmetry - Google Patents
A kind of polarised light acquisition device of vector space variation rotational symmetry Download PDFInfo
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- CN105785582B CN105785582B CN201610299798.3A CN201610299798A CN105785582B CN 105785582 B CN105785582 B CN 105785582B CN 201610299798 A CN201610299798 A CN 201610299798A CN 105785582 B CN105785582 B CN 105785582B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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Abstract
A kind of polarised light acquisition device of vector space variation rotational symmetry, belongs to optical technical field.The polarizer, the wave plate of λ/4, micro structural component, the screw type phase plate that the present invention includes monochromatic source and is successively set on the axis of monochromatic source transmitting light beam；The micro structural component includes device body；The device body at least has transmission region；The transmission region is equipped with groove structure.The configuration of the present invention is simple, it is at low cost, using flexible, easily debug, the high centrosymmetric space vector polarised light of high quality can be generated.
Description
Technical field
The present invention relates to optical technical field more particularly to a kind of polarizations for being used to obtain vector space variation rotational symmetry
Light acquisition device.
Background technology
Polarizability is a kind of fundamental characteristics of light.Vector space variation rotational symmetry polarised light be a kind of property it is special,
The polarised light having a extensive future, wherein more typical light field type has angularly polarized light and radial polarisation light.Vector space becomes
The polarised light production method for changing rotational symmetry mainly has two major class：One kind is intracavitary method, i.e., it is special directly to be added in laser cavity
Optical component generates polarised light, such as birefringece crystal medium is placed in the resonator of laser, passes through the method for modeling
To generate angularly polarized light；Another kind of is the outer method of chamber, and such as spiral phase plate method, combination wave plate method, cross polarization modus operandi uses
Radial polarisation photoconverter etc..However, existing radial polarisation light and angular polarization light generating device are mostly complex, cost mistake
The process of height, operation and generation light beam is very cumbersome.
Invention content
The object of the present invention is to provide it is a kind of it is simple in structure, polarizing quality is high, is obtained using polarised light that is flexible, easily debugging
Device is taken, to solve above-mentioned technical problem.
The present invention provides a kind of polarised light acquisition device, including monochromatic source and is successively set on the monochromatic source
Emit the polarizer, the wave plate of λ/4, micro structural component, the screw type phase plate on the axis of light beam；The micro structural component includes device
Part ontology；The device body at least has transmission region；The transmission region is equipped with groove structure.
The polarised light acquisition device, the optical system ratio with other generation polarised lights, simple in structure, polarised light obtains just
It is prompt.Wherein, micro structural component is the core component of the polarised light acquisition device, plays and is converted into common rotatory polarization angularly partially
The other types such as light or radial polarisation light of shaking vector space changes the polarised light of rotational symmetry.The micro structural component is utilized in device
Ontology sets transmission region and the groove structure on transmission region, controls polarization direction and the complex amplitude of emergent light, can
Obtain the polarised light of the centrosymmetric space vector variation of different type.
Preferably, the groove structure is interspersed and is formed by several recess stripeds and several protrusion stripeds.
Preferably, the groove structure is according to final etch depth value, the groove entirety shape for calculating gained groove structure
Shape carries out technique processing and obtains.
Include preferably, the final etch depth value of groove structure calculates step：
Step 1.1：Parameter preset：Optical source wavelength λ, micro structural component Refractive Index of Material ns, fill factor a/d, etching is deeply
Spend initial value h0, periodic width d, radius R, groove number n；The radius R is the point at device body largest circumference to device sheet
The distance at body center；
Step 1.2：Parameter preset substitution rigorous coupled wave equation calculation emergent light electric vector is vibrated in the x and y direction
Complex amplitude TxnAnd Tyn；
Step 1.3：Examine TxnAnd TynWhether the constraints of emergent light is met：If conditions are not met, enter step 1.4 more
New etch depth value；If it is satisfied, determining final etch depth value, step 1.5 is carried out；
Step 1.4：Etch depth value is updated, newer for the first time is etch depth initial value h0, newer later is previous
Secondary etch depth value；Updated etch depth value enters step 1.2, and new complex amplitude T is calculated with other parameter presetsxn' and
Tyn’；
Step 1.5：Determine the local parameter that periodic width d and final etch depth value h is micro structural component.
Preferably, taking numerical value of multiple device body radiuses between 0-R, multiple periodic width d are obtained, to each week
Phase width carries out the calculating of above-mentioned steps 1.2-1.4.
Preferably, the step 1.5, which includes the multiple whether equal executeds of periodic width d of detection, crosses step 1.2-1.4, if
It is no, then perform step 1.2-1.4 continuing with each periodic width；If so, by meet step 1.3 condition periodic width d and
Final etch depth value h is preserved, the local parameter as micro structural component.
Preferably, the groove global shape includes the shape of groove boundary line, wherein groove boundary line is ditch geosynclinal convex
The intersecting lens that striped is played between the striped that is recessed；The quantity of the groove boundary line is twice of the groove number, arbitrary institute
Groove boundary line is stated by meeting polar coordinates function to obtain.
Preferably, the constraints of the emergent light of step 1.3 is：In addition to 0 grade, the emergent light of other levels, in x and y
It is 0 in both direction：The electric vector complex amplitude of 0 grade of transmitted light is equal in magnitude in the two directions x and y；The electricity that 0 grade of transmitted light
Vector complex amplitude phase by pi/2 in the two directions x and y.
Preferably, the micro structural component is made of high refractive index transparent optical material.
The invention has the advantages that：
Polarised light acquisition device of the present invention is simple in structure, at low cost, using flexible, easily debug, can generate polarizing quality
The polarised light of high vector space variation rotational symmetry.
Description of the drawings
Fig. 1 is the overall structure block diagram for the polarised light acquisition device that vector space of the present invention changes rotational symmetry；
Fig. 2 is the design cycle block diagram of micro structural component in Fig. 1；
Fig. 3 is the flow diagram of step 1 in Fig. 2；
Fig. 4 is the partial structural diagram of micro structural component in Fig. 1.
Specific embodiment
The present invention is described in further detail below in conjunction with attached drawing.
Such as Fig. 1, polarised light acquisition device of the present invention include the wave plate 3 of monochromatic source 1, the polarizer 2, λ/4, micro structural component 4,
Screw type phase plate 5.(generating other types polarised light need to only change for generating the device of angularly polarized light and radial polarisation light
Become the type of device 4), the monochromatic source 1, such as laser send out collimated light beam, are line polarisation by the outgoing of the polarizer 2.
Line polarisation is by the wave plate of λ/4 outgoing rotatory polarization, when rotatory polarization is dextrorotation rotatory polarization, through micro structural component 4 and screw type successively
After phase plate, it is emitted as angularly polarized light；When rotatory polarization is left-handed rotatory polarization, through micro structural component 4 successively and screw type phase
After bit slice, it is emitted as radial polarisation light.Then the polarised light acquisition device can be used as angular polarization electro-optical device or radial polarisation light
It uses.Wherein, the wave plate 3 of the polarizer 2, λ/4, micro structural component 4, screw type phase plate 5 are located at the monochromatic source 1 transmitting light beam
Axis on, the polarised light acquisition device for vector space change rotational symmetry polarised light acquisition device.
The micro structural component 4 includes device body, the preferably circular flake of the device body.The device body is extremely
There is transmission region less, groove structure is embossed on the transmission region.If the groove structure by several recess stripeds and
A dry protrusion striped is interspersed composition.For device 4, different according to its specific groove structure form, the period of groove is wide
Spend d, it is possible to be definite value also it is possible that being on-fixed value.Wherein, the periodic width d of the groove is the recess width of fringe
The sum of with the protrusion width of fringe.
The embossment groove structure method for obtaining micro structural component 4 is as follows：
According to vectorial optical theory, the polarization electric vector of light wave can be regarded as polarization (s of the electric vector perpendicular to the plane of incidence
Vector) with electric vector it is parallel to being superimposed for polarization (the p vectors) of the plane of incidence.When the incident periodical groove as shown in Figure 4 of light beam
During structure, direction, amplitude and the phase of outgoing beam can occur to change accordingly, and the concrete numerical value of variation is the same as groove knot
The periodic width d of structure, final etch depth h, fill factor (ratio of a and d) and Refractive Index of Material nsIt is closely related.Its
In, fill factor is a constant, generally easy to process, is preferably half, i.e., the width of described recess striped and institute
The width for stating protrusion striped is equal；The Refractive Index of Material is also definite value, when one timing of material that the micro structural component is made, material
Expect that refractive index is then certain, which is preferably high refractive index transparent optical material.When this four major parameters are to close
During suitable numerical value, device can make the s vector sum p vectors of incident beam generate the difference of a pi/2, and shake to s vector sum p vectors
The direction of propagation of amplitude ratio and light beam does not form change.
The specific steps are：
Such as Fig. 2-4, step 1：Calculate the final etch depth value h of groove structure；
Step 1.1：Parameter preset presets optical source wavelength λ, micro structural component Refractive Index of Material ns, fill factor a/d, erosion
Carve depth initial value h0, periodic width d, radius R；The radius R is the point at device body largest circumference to device body center
Distance.The generally corresponding wave bands of optical source wavelength λ are near-infrared to visible ray, and periodic width d is about 200nm to 1600nm,
Etch depth initial value h0About 400nm to 1000nm.The fill factor a/d is between 0-1.Wherein, the periodic width d
It can be obtained according to device body perimeter divided by groove number or artificially be determined according to actual processing convenience.
Step 1.2：It is assumed that with the line polarisation incidence device that s vector angles are 45 °, according to rigorous coupled wave approach, list
Corresponding rigorous coupled wave equation group.Parameter preset is substituted into rigorous coupled wave equation calculation emergent light electric vector in x and y directions
The complex amplitude T of upper vibrationxnAnd Tyn；
Step 1.3：Examine TxnAnd TynWhether the constraints of emergent light is met：
(1) in addition to 0 grade, the emergent light of other levels is 0：Txn=0, Tyn=0, n ≠ 0；
(2) the electric vector complex amplitude of 0 grade of transmitted light is equal in magnitude in the two directions x and y：│Tx0│=│ Ty0│；
(3) the electric vector complex amplitude of 0 grade of transmitted light phase by pi/2 in the two directions x and y：arg(Tx0)-arg
(Ty0)=pi/2.
If conditions are not met, giving up the etch depth value, 1.4 update etch depth values are entered step；If it is satisfied, it determines most
Whole etch depth value carries out step 1.5；
Step 1.4：Etch depth value is updated, newer for the first time is etch depth initial value h0, newer later is previous
Secondary etch depth value；Updated etch depth value enters step 1.2, and new complex amplitude Tx is calculated with other parameter presetsn' and
Tyn’；The update etch depth value of step 1.4 meets：Updated etch depth value=preceding etch depth value+step-length is deep
Angle value；The step depth value is at no point in the update process definite value, is 0-10nm.
Step 1.5：Determine the local parameter that periodic width d and final etch depth value h is micro structural component.Wherein, it takes
Numerical value between multiple device body radius 0-R, can take multiple device body radiuses at equal intervals, obtain multiple periodic width d, right
Each periodic width carries out the calculating of above-mentioned steps 1.2-1.4.The step 1.5 further comprises detecting multiple periodic width d
Whether step 1.2-1.4 is crossed in equal executed, if it is not, then performing step 1.2-1.4 continuing with each periodic width；If then will
The periodic width d and final etch depth value h for meeting step 1.3 condition are preserved, the local parameter as micro structural component.
Step 2：Groove global shape is calculated, further comprises calculating the shape of groove boundary line, wherein groove boundary line
For the intersecting lens between groove convex stripe and recess striped；The quantity of the groove boundary line is the two of the groove number
Times；Nth bar groove boundary line meets polar coordinates function, to generate the polarised light of centrosymmetric space vector variation, such as angle
To polarised light or radial polarisation light.Every convex stripe has the adjacent recess striped in both sides, and convex stripe is adjacent with difference
The striped that is recessed forms the different boundary line of curvature, we will be divided into the different boundary lines of same convex stripe both sides herein
First top-cross boundary line and the second side boundary line.It is illustrated by taking angularly polarized light as an example, and the application is not limited to angular polarization
Light.It first has to obtain the function of description groove structure before etching groove.It has obtained the first top-cross boundary line and the second side boundary line exists
Functional equation under the polar coordinates established using device center as origin, the structure of entire device also just determine therewith.Due to going out
Light is penetrated as angularly polarized light, the polarization direction of certain point should be vertical with the azimuth direction of this point in optical output field.According to ditch
Slot tangential direction with outgoing light polarization direction angle be 45 ° relationship it can be seen that, the first top-cross boundary line and the second side boundary line exist
Function under polar coordinates should be logarithmic function.
It is further specific to calculate the first top-cross boundary line and the respective shape of the second side boundary line, the first top-cross boundary line or
The quantity of the second side boundary line is equal with the groove number；Nth bar the first top-cross boundary line or the second side boundary line need to expire
Sufficient polar coordinates function.After obtaining the described function of groove, it is possible to according to function, be etched on optical material surface corresponding
Structure, to realize device function.
Step 3：Micro structural component is formed according to steps 1 and 2.
In order to offset the additional spiral phase of micro structural component 4 in Fig. 1, polarised light acquisition device of the present invention is adopted in its end
With helical phase piece 5.The helical phase piece, is optical standard device, the phase difference that the one period generates for 2 π, and with light
Source wavelength matches.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the design of the present invention
It is defined with range.Under the premise of design concept of the present invention is not departed from, ordinary people in the field is to the technical side of the present invention
The all variations and modifications that case is made, should all drop into protection scope of the present invention, the claimed technology contents of the present invention,
Through all recording in detail in the claims.
Claims (4)
1. a kind of polarised light acquisition device of vector space variation rotational symmetry, which is characterized in that including monochromatic source, Yi Jiyi
The wave plate of the secondary polarizer being arranged on the axis of monochromatic source transmitting light beam, λ/4, micro structural component, screw type phase plate；
The micro structural component includes device body；The device body at least has transmission region, and the transmission region is equipped with ditch
Slot structure；The groove structure is interspersed and is formed by several recess stripeds and several protrusion stripeds；The groove structure
Final etch depth value and groove global shape according to gained groove structure is calculated carry out technique processing and obtain；The groove is whole
Shape includes the shape of groove boundary line, and wherein groove boundary line is intersecting between groove convex stripe and the striped that is recessed
Line；The quantity of the groove boundary line is twice of the groove number, and the arbitrary groove boundary line is by meeting corresponding pole
Coordinate function and obtain;The final etch depth value of groove structure calculates step and includes：
Step 1.1：Parameter preset：Optical source wavelength λ, micro structural component Refractive Index of Material ns, fill factor a/d, etch depth initial value
h0, periodic width d, radius R, groove number n；The radius R is the point at device body largest circumference to device body center
Distance；
Step 1.2：It is answered what parameter preset substitution rigorous coupled wave equation calculation emergent light electric vector was vibrated in the x and y direction
Amplitude TxnAnd Tyn；
Step 1.3：Examine TxnAnd TynWhether the constraints of emergent light is met：If conditions are not met, enter step 1.4 updates etching
Depth value；If it is satisfied, determining final etch depth value, step 1.5 is carried out；
Step 1.4：Etch depth value is updated, newer for the first time is etch depth initial value h0, newer later is preceding primary etching
Depth value；Updated etch depth value enters step 1.2, and new complex amplitude T is calculated with other parameter presetsxn' and Tyn’;
Step 1.5：Determine the local parameter that periodic width d and final etch depth value h is micro structural component.
2. a kind of polarised light acquisition device of vector space variation rotational symmetry according to claim 1, which is characterized in that take
Numerical value of multiple device body radiuses between 0-R, obtains multiple periodic width d, to each periodic width, carries out above-mentioned steps
The calculating of 1.2-1.4.
A kind of 3. polarised light acquisition device of vector space variation rotational symmetry according to claim 2, which is characterized in that institute
It states step 1.5 and crosses step 1.2-1.4 including detecting multiple whether equal executeds of periodic width d, if it is not, then continuing with each week
Phase width performs step 1.2-1.4；If so, the periodic width d and final etch depth value h that meet step 1.3 condition are preserved,
Local parameter as micro structural component.
A kind of 4. polarised light acquisition device of vector space variation rotational symmetry according to claim 1, which is characterized in that step
The constraints of rapid 1.3 emergent light is：In addition to 0 grade, the emergent light of other levels is 0 in the two directions x and y；Thoroughly
The electric vector complex amplitude for penetrating 0 grade of light is equal in magnitude in the two directions x and y；The electric vector complex amplitude of 0 grade of transmitted light is in x and y two
Phase by pi/2 on a direction.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981204A (en) * | 2012-11-30 | 2013-03-20 | 中国科学院上海光学精密机械研究所 | 193nm fused quartz grating polarizer and application thereof to photoetching equipment |
| CN102981277A (en) * | 2012-12-12 | 2013-03-20 | 苏州大学 | System and method for generating radial Bessel-Gaussian beam |
| CN103033945A (en) * | 2012-12-21 | 2013-04-10 | 北京信息科技大学 | Polarization convertor, vector light beam generating system and vector light beam generating method |
| CN204496118U (en) * | 2015-04-15 | 2015-07-22 | 黑龙江大学 | A kind of device producing radial polarisation or angle polarized light vortex |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2530499A1 (en) * | 2011-06-01 | 2012-12-05 | Université Jean-Monnet | Planar grating polarization transformer |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981204A (en) * | 2012-11-30 | 2013-03-20 | 中国科学院上海光学精密机械研究所 | 193nm fused quartz grating polarizer and application thereof to photoetching equipment |
| CN102981277A (en) * | 2012-12-12 | 2013-03-20 | 苏州大学 | System and method for generating radial Bessel-Gaussian beam |
| CN103033945A (en) * | 2012-12-21 | 2013-04-10 | 北京信息科技大学 | Polarization convertor, vector light beam generating system and vector light beam generating method |
| CN204496118U (en) * | 2015-04-15 | 2015-07-22 | 黑龙江大学 | A kind of device producing radial polarisation or angle polarized light vortex |
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Effective date of registration: 20230927 Address after: 266000 room 205, building 1, 61 Guangsheng Road, high tech Zone, Qingdao, Shandong Province Patentee after: Qingdao Zhongke Zhifu Photoelectric Technology Co.,Ltd. Address before: Office 1206-11, 12th Floor, Building 3, No. 1266 Hongfeng Road, Wuxing District, Huzhou City, Zhejiang Province, 313000 Patentee before: HUZHOU CAS PHOTOELECTRIC TECHNOLOGY CO.,LTD. |