CN105784783B - A kind of miniflow body cavity water quality detection method based on the hard micropin of semiconductor - Google Patents
A kind of miniflow body cavity water quality detection method based on the hard micropin of semiconductor Download PDFInfo
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- CN105784783B CN105784783B CN201610162881.6A CN201610162881A CN105784783B CN 105784783 B CN105784783 B CN 105784783B CN 201610162881 A CN201610162881 A CN 201610162881A CN 105784783 B CN105784783 B CN 105784783B
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- micropin
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
Abstract
The invention discloses a kind of miniflow body cavity water quality detection methods based on the hard micropin of semiconductor, including feature in detail below：Hard micropin, making miniflow body cavity are made, water body to be measured, energization is put into, measures electric current, measures ion concentration.Through the above way, miniflow body cavity water quality detection method provided by the invention based on the hard micropin of semiconductor, can not there is no secondary pollution by the hard micropin of semiconductor with the ion concentration in measure water body, this method, and because being micrometering amount, so high certainty of measurement, the sample to be tested needed is few, a small amount of accurate measurement can be done, since this measurement method is not required to chemically react, time of measuring is short, can accomplish to measure in time.
Description
Technical field
The invention belongs to the technical fields of water quality detection method, and in particular to a kind of microfluid based on the hard micropin of semiconductor
Chamber water quality detection method.
Background technology
It is that China is originally just extremely fragile with the rapid continuous improvement to emerge with living standards of the people of China's economic
Environmental engineering be even more make the matter worse.What is stood in the breach is the severe situation of domestic water pollution.
In the above context, begin one's study from the seventies in last century the online water quality detection instrument of production in the world, to dirt
It contaminates water body and carries out round-the-clock monitoring.Domestic water quality detection enterprise also began to research and develop online water quality detection from 2005
Instrument.Current main detection means is to do to react to the special component in water body by way of chemistry, to being generated in reaction
Spectrum do spectrum analysis, according to frequency spectrum variation determine the ingredient ratio.And need to find at present is a kind of without secondary
Pollution measures finely, and is capable of the measurement method and system of stable operation.
Most popular and most ripe water quality detection method is spectrophotometry in the world at present.Spectrophotometry is to pass through
The absorbance or luminous intensity for measuring measured matter light in certain wave strong point or a wavelength range carry out the substance qualitative
With the method for quantitative analysis.
In spectrophotometer, when the light of different wave length is continuously irradiated to certain density sample solution, it can obtain
To absorption intensity corresponding with different wave length.Such as with wavelength（λ）For abscissa, absorption intensity（A）For ordinate, so that it may draw
The absorption spectrum curve of the substance.Qualitative, the quantitative analysis method of substance, referred to as spectrophotometry are carried out using the curve,
Referred to as absorption spectrometry.The method for measuring colourless substance with ultraviolet source, referred to as ultraviolet spectrophotometry；It is surveyed with visible light source
Determine the method for coloring matter, referred to as visible light photometry.They are as colorimetric method, all using Beer-Lambert laws as base
Plinth:
A=abc
A is absorbance in formula, and b is solution layer thickness（cm）, c is the concentration of solution（G/dm^3), a is absorptivity.Its
The factors such as middle absorptivity and the person's character of solution, temperature and wavelength are related.Other components in solution（Such as solvent）To light
Absorption can be deducted with blank solution.
From the above equation, we can see that when solution layer thickness b and absorptivity a are fixed, the linear pass of concentration of absorbance A and solution
System.In quantitative analysis, it is necessary first to absorbing state of the solution to different wavelengths of light is measured, therefrom determines maximum absorption wavelength,
Then using the light of this wavelength as light source, a series of absorbance A of known concentration c solution is measured, A ~ c working curves are made, divided
When analysing unknown solution, according to the absorbance A of measurement, looks into working curve and can determine that corresponding concentration.This is spectrophotometric
Method measures the basic principle of concentration.
Invention content
The invention mainly solves the technical problem of providing a kind of miniflow body cavity water quality detections based on the hard micropin of semiconductor
Method, water body is by miniflow body cavity, the hard micropin of device semi-conducting material in miniflow body cavity, and hard micropin is in miniflow body cavity
Water body is powered, while measuring the water body resistance of certain distance, by the linear relationship of resistance and impurity concentration, calculates water body impurity
Concentration.
In order to solve the above technical problems, one aspect of the present invention is：It provides a kind of hard based on semiconductor
The miniflow body cavity water quality detection method of micropin, including feature in detail below：
A, hard micropin is made semi-conducting material is processed into length and diameter is extremely micro- using semiconductor microactuator processing technology
Small hard micropin is exported in its surface gold-plating and with metallic conductor；
B, it makes miniflow body cavity and semi-conducting material is processed into the extremely small microfluid of internal diameter using micro-processing technology
The internal diameter of chamber, miniflow body cavity is less than 200um；
C, it is put into water body to be measured, the hard micropin of semiconductor is packed into microfluid intracavitary, water body to be measured is flowed into miniflow body cavity,
Water body to be measured is set to be come into full contact with hard micropin；
D, it is powered, after being powered to the endoceliac hard micropin of miniflow via measurement export integrated circuit by external power supply, phase
Adjacent hard micropin can attract ion flow, to form micro-current in microfluid intracavitary；
E, electric current is measured, makes galvanometer on external measurement export integrated circuit, measurement obtains microfluid intracavitary and is
The size of electric current；
F, it measures ion concentration and the size of the electricity by unit area is obtained according to the physical definition of electric current, electric current
Size is directly proportional to ion concentration, to achieve the purpose that ion concentration in water body to be measured.
In a preferred embodiment of the present invention, the semi-conducting material uses monocrystalline silicon or silicide.
In a preferred embodiment of the present invention, the structure that the hard micropin is in array-like arrangement.
In a preferred embodiment of the present invention, the single hard micropin length 50 between 200um, it is single hard micro-
The tip diameter of needle is less than 10um, and the needle column diameter of single hard micropin is less than 20um.
In a preferred embodiment of the present invention, the quantity of the miniflow body cavity is single or multiple.
In a preferred embodiment of the present invention, when the quantity of miniflow body cavity is multiple, multiple miniflow body cavitys are fabricated to
Array-like, i.e., cellular miniflow body cavity array.
The beneficial effects of the invention are as follows：The miniflow body cavity water quality detection method based on the hard micropin of semiconductor of the present invention is led to
The hard micropin for crossing semiconductor can not have secondary pollution with the ion concentration in measure water body, this method, and because be micro-
It measures, so high certainty of measurement, the sample to be tested needed is few, a small amount of accurate measurement can be done, since this measurement method is not required to
Chemical reaction, time of measuring is short, can accomplish to measure in time.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing, wherein：
Fig. 1 is the stream of a preferred embodiment of the miniflow body cavity water quality detection method the present invention is based on the hard micropin of semiconductor
Cheng Tu；
Fig. 2 is the structural schematic diagram of single miniflow body cavity；
Label in attached drawing be：1, hard micropin, 2, miniflow body cavity, 3, measure export integrated circuit, 4, galvanometer.
Specific implementation mode
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
All other embodiment that technical staff is obtained without making creative work belongs to the model that the present invention protects
It encloses.
As shown in Figure 1, the embodiment of the present invention includes：
A kind of miniflow body cavity water quality detection method based on the hard micropin of semiconductor, including feature in detail below：
A, hard micropin 1 is made semi-conducting material is processed into length and diameter is extremely micro- using semiconductor microactuator processing technology
Small hard micropin 1 is exported in its surface gold-plating and with metallic conductor；
B, miniflow body cavity 2 is made, using micro-processing technology, semi-conducting material is processed into the extremely small microfluid of internal diameter
The internal diameter of chamber 2, miniflow body cavity 2 is less than 200um；
C, it is put into water body to be measured, the hard micropin of semiconductor is packed into microfluid intracavitary, water body to be measured is flowed into miniflow body cavity,
Water body to be measured is set to be come into full contact with hard micropin；
D, it is powered, after being powered to the endoceliac hard micropin of miniflow via measurement export integrated circuit by external power supply, phase
Adjacent hard micropin can attract ion flow, to form micro-current in microfluid intracavitary；
E, electric current is measured, makes galvanometer on external measurement export integrated circuit, measurement obtains microfluid intracavitary and is
The size of electric current；
F, it measures ion concentration and the size of the electricity by unit area is obtained according to the physical definition of electric current, electric current
Size is directly proportional to ion concentration, to achieve the purpose that ion concentration in water body to be measured.
It is powered by hard micropin 1 of the metallic conductor derived from hard micropin 1 into miniflow body cavity 2, and measures flow through simultaneously
The electric current of hard micropin 1.According to the physical definition of electric current, the size of the electricity by unit area is obtained.Due to free in water body
Electronics is impurity ionization, therefore impurity free electronic concentration is proportional in the size of unit area electricity and water body.
Hard micropin 1 is to be based on semi-conducting material, and usually monocrystalline silicon or silicide, utilize semiconductor microactuator processing technology system
The miniature probe of work.For single hard 1 length of micropin 50 between 200um, the tip diameter of single hard micropin 1 is less than 10um, single
Micropin 1 is usually made array-like by the needle column diameter of a hard micropin 1 less than 20um for the ease of making and using.
It is gold-plated in semiconductor material surface, plain conductor is used in combination everywhere, this hard micropin 1 can be made into micro- conductor, can be in pole
Its small discharging regions or capture ultra-weak electronic signal, this is the core component in the present invention.
Miniflow body cavity 2 is the main region that sample to be tested comes into full contact with and measures with hard micropin 1, is used in the present invention
Hard micropin 2 is added in semi-conducting material processing and fabricating inside it, forms the main measurement for measuring the ion concentration in sample to be tested
Utensil.
Further, the quantity of the miniflow body cavity 3 is single or multiple.When the quantity of miniflow body cavity 3 is multiple,
Multiple miniflow body cavitys 3 are fabricated to array-like, i.e., cellular miniflow body cavity array.
Prepare liquid intermediate ion distribution situation in single miniflow body cavity 2.When integrated electric via export is measured by external power supply
After hard micropin 1 in road direction miniflow body cavity 2 is powered, adjacent hard micropin 1 can attract ion flow, in miniflow body cavity 2
Form micro-current.Galvanometer is made on external measurement export integrated circuit, measures and obtains in miniflow body cavity 2 as the big of electric current
It is small.According to the physical equation of electric current：I=Q/t,
Wherein, Q is electricity, and t is the time.Size of current has reacted the unit interval and has passed through the big of the electricity of unit cross section
It is small.That is electric current is directly proportional to electricity, and the size of electric current is directly proportional to ion concentration.It is dense so as to reach measurement ion
The purpose of degree.
Multiple miniflow body cavitys 2 are fabricated to array-like by the contingency that miniflow body cavity 2 measures in order to prevent, i.e., cellular micro-
Fluid cavity array.When measurement, statistical analysis is done to the single-chamber electric current number measured in fluid cavity array, obtains the ion of water body to be measured
Concentration.
In conclusion the miniflow body cavity water quality detection method based on the hard micropin of semiconductor of the present invention, passes through semiconductor
Hard micropin 1 can not have secondary pollution with the ion concentration in measure water body, this method, and because being micrometering amount,
High certainty of measurement, the sample to be tested needed is few, can do a small amount of accurate measurement, since this measurement method is not required to chemically react,
Time of measuring is short, can accomplish to measure in time.
Example the above is only the implementation of the present invention is not intended to limit the scope of the invention, every to utilize this hair
Equivalent structure or equivalent flow shift made by bright description is applied directly or indirectly in other relevant technology necks
Domain is included within the scope of the present invention.
Claims (4)
1. a kind of miniflow body cavity water quality detection method based on the hard micropin of semiconductor, which is characterized in that including feature in detail below：
A, hard micropin is made semi-conducting material is processed into length and diameter is extremely small using semiconductor microactuator processing technology
Hard micropin is exported in its surface gold-plating and with metallic conductor；
B, it makes miniflow body cavity and semi-conducting material is processed into the extremely small miniflow body cavity of internal diameter using micro-processing technology, it is micro-
The internal diameter of fluid cavity is less than 200um；
C, it is put into water body to be measured, by the hard micropin of semiconductor（ 1）It is packed into miniflow body cavity（ 2）It is interior, water body to be measured is flowed into micro-
Fluid cavity（ 2）, make water body to be measured and hard micropin（ 1）It comes into full contact with；
D, it is powered, integrated circuit is exported via measurement by external power supply（ 3）To miniflow body cavity（ 2）Interior hard micropin（ 1）
After power supply, adjacent hard micropin（ 1）Ion flow can be attracted, in miniflow body cavity（ 2）Interior formation micro-current；
E, electric current is measured, integrated circuit is exported in external measurement（ 3）Upper making galvanometer（ 4）, measure and obtain microfluid
Chamber（ 2）The size of interior electric current；
F, it measures ion concentration and the size of the electricity by unit area, the size of electric current is obtained according to the physical definition of electric current
It is directly proportional to ion concentration, to achieve the purpose that ion concentration in water body to be measured；
Among the above, the structure that the hard micropin is in array-like arrangement, the single hard micropin length 50 to 200um it
Between, the tip diameter of single hard micropin is less than 10um, and the needle column diameter of single hard micropin is less than 20um.
2. the miniflow body cavity water quality detection method according to claim 1 based on the hard micropin of semiconductor, which is characterized in that institute
The semi-conducting material stated uses monocrystalline silicon or silicide.
3. the miniflow body cavity water quality detection method according to claim 1 based on the hard micropin of semiconductor, which is characterized in that institute
The quantity for the miniflow body cavity stated is single or multiple.
4. the miniflow body cavity water quality detection method according to claim 3 based on the hard micropin of semiconductor, which is characterized in that when
When the quantity of miniflow body cavity is multiple, multiple miniflow body cavitys are fabricated to array-like, i.e., cellular miniflow body cavity array.
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| US4928065A (en) * | 1989-03-31 | 1990-05-22 | E. I. Du Pont De Nemours And Company | Voltammetry in low-permitivity suspensions |
| CN2546874Y (en) * | 2001-12-21 | 2003-04-23 | 房千贺 | Purified water quality detector |
| CN2577280Y (en) * | 2002-11-14 | 2003-10-01 | 徐平 | Purified water testing cup |
| CN1912610B (en) * | 2005-08-12 | 2011-11-16 | 深圳富泰宏精密工业有限公司 | Investigating method of metal ion concentration |
| CN101694476A (en) * | 2009-09-29 | 2010-04-14 | 北京大学 | Bacteria electric impedance detection method and dedicated chip thereof |
| CN201707280U (en) * | 2010-06-10 | 2011-01-12 | 城市建设研究院 | Water quality detector |
| CN104755918B (en) * | 2012-10-25 | 2017-10-24 | 皇家飞利浦有限公司 | Method and apparatus for sensing liquid |
| CN203275352U (en) * | 2013-05-23 | 2013-11-06 | 深圳大学 | Heavy metal ion detector |
| CN103743801A (en) * | 2014-01-02 | 2014-04-23 | 上海大学 | Droplet-microfluidic-based preparation method of platinum black-modified electrode biosensor and application thereof |
| CN204630965U (en) * | 2015-04-02 | 2015-09-09 | 佛山市顺德区美的饮水机制造有限公司 | The water quality detecting device of purifier and purifier |
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