CN105779941B - A kind of method and apparatus depositing superhard super thick DLC film layer on aircraft blade based on ion beam technology - Google Patents
A kind of method and apparatus depositing superhard super thick DLC film layer on aircraft blade based on ion beam technology Download PDFInfo
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- CN105779941B CN105779941B CN201510967504.5A CN201510967504A CN105779941B CN 105779941 B CN105779941 B CN 105779941B CN 201510967504 A CN201510967504 A CN 201510967504A CN 105779941 B CN105779941 B CN 105779941B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
Abstract
The method and apparatus of the engine blade surface binding force based on ion beam technology is superior and desertification dirt erosiveness the is strong superhard diamond-like of super thick (DLC) film layer that the invention discloses a kind of, wherein preparing the DLC film method includes：Using metal vacuum steam plasma source method (MEVVA), one layer of metal " pinning layer " that can improve film-substrate cohesion is injected in blade surface；On the metal " pinning layer ", the first layer metal film transition layer for discharging internal stress is obtained using 90 degree of Magnetically filtered vacuum arc deposition method (FCVA) depositions；On the first layer transition zone, the soft DLC layer of the second layer is obtained using 180 degree filtered cathodic vacuum arc (FCVA) deposition；Change negative pressure 180 degree Magnetic filter on the second layer soft formation to deposit to obtain superhard DLC film layer until film overall thickness is 10-25 microns.By applying the present invention, DLC films deposited can be good at protecting engine blade on engine blade, prevents its erosion because of sand and dust due to damage.
Description
Technical field
The present invention relates to beam material surface modifying technology fields, more particularly to a kind of to deposit desertification on aircraft blade
The DLC film method and apparatus that dirt corrodes.
Background technology
It is well known that the characteristics of helicopter is that mobility is good, high-quality landing site and cement track are seldom relied on,
In most cases used landing site is simple place or even provisional soil property, sandy or meadow.It is in air or more
Or contain the particles such as some sandy soil, dust less, especially in the central and west regions that China's natural conditions deteriorate, sand and dust to aircraft and
The influence of helicopter is even more serious.It is less that aircraft closes sand dust usually in higher airflight, air, is brought to aircraft
Influence very little.However, for helicopter, mobility is good, and wartime is usually to rely on without fixed venue and special airport, mostly
In the case of used landing site be the provisional soil property in simple place or even field, sandy or meadow, add helicopter
In near-earth low-latitude flying or hovering, is acted on by the downwash flow that rotor wing rotation is formed, stir a large amount of sand and dust from ground, significantly
Aerial sand and dust content is increased, larger harm is brought to helicopter.
Also it can cause sand and dust when helicopter wave hopping.Under normal circumstances, the dust near helicopter in air
Concentration, depend on soil structural strength, the dispersion composition of minerals, local climate condition, and depending on rotor wing rotation when
The air flowing intensity raised.If on landing field, distance is less than 50m between helicopter, then by the shifting of air stream
Dynamic, the dust that a frame helicopter raises just has significant impact to the work of another frame helicopter engine.Sand and dust enter engine into
In air flue, each component, especially rotor blade in engine air, blast tube can be caused to be seriously worn by sand and dust.Rice -8 is straight
For the machine of liter when the hovering of sand and dust place overhead near-earth, engine are in maximum rating, every engine per minute about wants inspiration 3kg
The sand and dust of weight.Directly on -9 helicopters although the Inlet Preventer of used eight engine of whirlpool axis has made some improvement, still,
Under Sand Dust Environment when follow-on mission, still there are a large amount of sand and dust to enter engine interior.Its consequence is：1, the pressure of engine interior
Mechanism of qi is seriously worn：For axial flow compressor, usually in the air inlet edge of blade, working-blade neck, straightener(stator) blade root
Portion's abrasion is the most serious, and compressor casing inner wall seal coating also has abrasion；For centrifugal-flow compressor, because its running wheel is met
Wind area is larger, and abrasion is the most serious, these damages make engine performance deterioration, its power is caused to decline, and oil consumption rate increases；2,
Fine sand dirt enters in moving turbine blade cooling duct, blocking channel, causes working-blade overtemperature, or even burn；3, when larger
When sand and dust enter engine with big wind speed, compressor blade may be broken.
New material technology is China or even one of the research field that the whole world is all paid much attention to, and from China " 863 ", plan is set
Standing is exactly one of important field of research, and material surface modifying technology is an important side of new material research
To.By suitable surface modification treatment, the multiple performance of material surface can be significantly improved, such as material surface is bright and clean
Degree, hardness, wear-resistant, anti-oxidant, desertification dirt corrode and the performances such as salt fog resistance corrosion, to significantly improve the use longevity of material
Life and working efficiency, realization save material, reduce the purpose of energy consumption.
Diamond-like (diamond-like carbon, abbreviation DLC) film be using carbon as basic element constituted one kind it is non-
Brilliant material, the insulating rigid amorphous carbon film for by hardness being more than in the world diamond hardness 20% are known as Lei Jingangshimo [1-2].
DLC film has many performances similar with diamond thin, as high hardness, low friction coefficient, good wearability and
Chemical inertness and high elasticity modulus, Young's modulus, compression strength and tensile strength etc., at the same also have high refractive index, thoroughly
Light wave segment length, good heat conductivity, coefficient of thermal expansion be small, corrosion resistant candle performance and good biocompatibility.Therefore DLC film conduct
A kind of new function material has huge application prospect in many fields.In mechanical properties, DLC film is due to hardness
It is high, friction coefficient is low, low wear rate and chemical stability and receive and look steadily.DLC film (DLC) it belong in structure
The amorphous carbon of amorphous metastable structure is made of sp3 hydridization and sp2 hydridization carbon：Sp3 structures determine in film
DLC film has many good characteristics similar to diamond, and sp2 structures determine DLC film tool
Have the characteristic of many graphite, manufacture DLC film can be made simply more, DLC film (DLC) depositing temperature compared with
Low, depositional area is big, and film surface is smooth, technique relative maturity, thus has been applied in many fields, such as wear-resistant painting
Layer, tweeter vibrating diaphragm, optical protection layer etc., especially require the occasion that depositing temperature is low, film surface is highly polished certain,
Application in such as modification of the protective film of computer disk, CD, tool and mould surface and microelectromechanical systems (MEMS) is more aobvious
It is prominent, DLC film is especially prepared on steel, the reality with bigger and potential value.
It has been a kind of property since DLC film is with the low performance characteristics of hardness height and friction coefficient since the eighties in last century
The excellent wear resisting films material of energy, attracts always many thin-film material research workers, becomes countries in the world and fall over each other to study
One of hot spot thin-film material.DLC all has good lubrication and wear resistance property under higher temperature conditions and under the conditions of true friendship, because
This is to effectively to solve the technical barrier of moving parts surface lubrication under this special operation condition.DLC film is as wear-resistant thin
Film can improve the case hardness of the precision components such as bearing, gear, piston, reduce friction coefficient, prolong the service life；DLC is thin
Film makees cutter protection membrane material, and the fourth of the hardness and cutter that can improve cutting edge makees the service life, is asked when reducing sharpening, improves work
Efficiency etc., external many to the research of DLC film, achievement also has been widely used for spacecraft and the extraordinary axis of weapon
It holds, sterlin refrigerator piston, accurate spool, worm gear generator rotor, magnetic head of disc drive, heart valve, joint prosthesis
And a variety of precision machineries such as inertial navigation instrument, instrument, the wear-resisting lubrication protection processing of precision parts is realized, is achieved
Good application effect.
Invention content
In view of this, the first purpose of the embodiment of the present invention is the ultralow friction coefficient of DLC film layer and superpower hardness solution
The problem of certainly aero-engine easily corrodes under sand bed environment, while utilizing metal vacuum steam plasma source (MEVVA) and magnetic
It crosses
It filters Vacuum Arc depositing system (FCVA) and proposes what a kind of completely new deposition desertification dirt on helicopter blade corroded
The protective coating under Sand Dust Environment with the very high life can be prepared in DLC film method and apparatus.
For further, the DLC film method which corrodes includes：Metal " pinning layer is prepared in the substrate surface
In the enterprising row metal transition zone deposition of the metal " pinning layer ", release stress metal layer is formed；In the release stressor layers
Deposit the soft DLC film layer of the second layer；The deposition of superhard DLC film layer is carried out in the soft DLC film layer surface.
In some embodiments, the base material, which injects, to form " pinning layer " and includes：Utilize metal vacuum steam plasma source
(MEVVA), Ti or Ni is injected to the substrate layer,；Wherein, the injecting voltage of Ti or Ni is 4~12kV, and beam intensity is
1~10mA, implantation dosage are 1 × 1015~1 × 1017/cm2, injection depth is 70~120nm.
In some embodiments, include in the enterprising row metal deposition of the metal " pinning layer "：It is true using the Magnetic filter
Empty arc deposits (FCVA) system, and on the metal " pinning layer ", Magnetic filter deposits metal stresses releasing layer；Wherein, described
The metallic element of metal stresses releasing layer is Ti or Ni, and thickness is 10~500nm.
In some embodiments, the soft DLC film layer of the second layer, the party are deposited in the first layer metal stress release layer surface
Method includes：Using filtered cathodic vacuum arc (FCVA) system, on first layer metal surface, 180 degree Magnetic filter deposition obtains soft
DLC film layer；Wherein, the soft DLC film layer thickness is 10~1000nm, and negative pressure uses 800V, 600V, 400V and 200V when deposition
It is deposited.
Correspondingly, the embodiment of the present invention deposits the Preparation equipment packet of the DLC film of desertification dirt erosion on helicopter blade
It includes：Injection device is used to form " pinning layer ", improves film-substrate cohesion；Precipitation equipment, at the metal " pinning layer "
Into row metal, soft diamond-like carbon film layer (DLC) and superhard diamond-like (DLC) film layer.
In some embodiments, the precipitation equipment includes：
First precipitation equipment, for utilizing the filtered cathodic vacuum arc FCVA systems, at the metal " pinning layer "
Upper Magnetic filter deposits metallic diaphragm；Wherein, the metallic diaphragm film layer, metallic element be Ti or Ni, thickness be 10~
500nm；
Second precipitation equipment, for utilizing filtered cathodic vacuum arc FCVA systems, on the metal stresses releasing layer,
Magnetic filter deposits soft diamond-like carbon film layer, and thickness is 10~1000nm, and Magnetic filter is heavy on soft diamond-like carbon film layer later
Product obtains superhard DLC film layer；Wherein, the thickness of the superhard DLC film layer is 10~25 μm.
In some embodiments, the injection device includes：Injection device, for utilizing metallic vapour ion source
(MEVVA), metal ion implantation is carried out to the basal layer to be formed " pinning layer "；Wherein, the injecting voltage of Ti or Ni
For 4~15kV, beam intensity is 1~10mA, and implantation dosage is 1 × 1015~1 × 1016/cm2, injection depth is 70~120nm；
Compared with the existing technology, various embodiments of the present invention have the advantage that：
1, the embodiment of the present invention proposes to deposit the super thick of desertification dirt erosion on helicopter blade based on ion beam technology
Superhard DLC film method and apparatus, the metallic element by carrying out high-energy to base material inject, and make base material sub-surface atom and injection
Metal forms " pinning layer " structure of metal-base material atom mixing, " pinning layer " structure formed in this way and basal layer so that after
The binding force for the structural film layer that continuous Magnetic filter deposits is all very good, to make its peel strength be enhanced；
2, it is non-that PVD depositions method, the magnetically filter arc deposition equipment atom ionization levels such as magnetron sputtering, electron beam evaporation are compared
Chang Gao, about 90% or more.In this way, since atom ionization level is high, plasma density can be made to increase, bulky grain subtracts when film forming
It is few, be conducive to improve film hardness, wearability, compactness, film-substrate cohesion etc.；
3, present example also proposes that novel 180 degree magnetic filter duct carries out the deposition of diamond-like (DLC) film layer,
The DLC film layer tool that the PVD depositions methods such as mass ratio 90 degree of Magnetic filter depositions, magnetron sputtering, the electron beam evaporations of DLC film layer obtain
There are better film quality and higher microhardness；
4, the embodiment of the present invention also proposes a kind of ultralow friction coefficient and diamond-like of the superhard DLC film layer of novel combination
The ultrahigh hardness film layer of stone film layer solves the blade key technical problem excessive in middle low angle wear extent；
5, the embodiment of the present invention also proposes a kind of superhard DLC film layer preparation process of completely new super thick, by soft metal layer and
Soft DLC film layer discharges stress as transition zone；
6, in addition, the embodiment of the present invention also proposes a kind of depositing device, which is provided with any of the above-described technical side
Described in case.
It should be noted that for embodiment of the method above-mentioned, for simple description, therefore it is all expressed as a series of
Combination of actions, but those skilled in the art should understand that, the present invention is not limited by the described action sequence, because according to
According to the present invention, certain steps can be performed in other orders or simultaneously.Next, those skilled in the art should also know that,
Embodiment described in this description belongs to preferred embodiment, and involved action is not necessarily essential to the invention.
Example the above is only the implementation of the present invention is not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
The more features and advantage of the embodiment of the present invention will be explained in specific implementation mode later.
Description of the drawings
The attached drawing for constituting a part of the embodiment of the present invention is used for providing further understanding the embodiment of the present invention, the present invention
Illustrative embodiments and their description for explaining the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings：
Fig. 1 deposits desertification dirt erosion DLC film based on ion beam technology to be provided in an embodiment of the present invention on aircraft blade
The flow diagram of method；
Fig. 2 is diamond-like DLC film structural schematic diagram provided in an embodiment of the present invention；
Fig. 3 is the structural schematic diagram of FCVA provided in an embodiment of the present invention deposition and MEVVA injected systems；
Fig. 4 is DLC film surface optical micrograph (400 ×) provided in an embodiment of the present invention；
Fig. 5 more DLC films provided in an embodiment of the present invention corrode contrast test result (test condition with substrate sand and dust：Sand and dust
Speed 80m/s is measured into sand：10g/min corrodes angle：45°)；
Fig. 6 embodiment of the present invention provides the friction coefficient of the superhard DLC film layer of super thick；
Fig. 7 is the nano-hardness value of soft DLC film layer in DLC film provided in an embodiment of the present invention；
Fig. 8 is the microhardness value of superhard super thick DLC film provided in an embodiment of the present invention；
Reference sign
200 blade bases
210 metals " pinning layer "
220 soft DLC layers
230 superhard DLC layers
300 FCVA cathodes
310 conduits
320 magnetic field line packets
330 work stages
340 high pressure extraction electrodes
350 MEVVA cathodes
360 negative ports
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in the embodiment of the present invention and embodiment can be mutual group
It closes.
Below in conjunction with the accompanying drawings, each preferred embodiment of the present invention is described further：
Embodiment of the method
With the rapid development application of China Aerospace aeronautical technology, stabilization, reliability aspect to engine critical component
Requirement it is higher and higher, in terms of the stability and reliability of especially copter engine blade, prepare high life, Gao Wen
Qualitative helicopter blade all seems to the development of engine of China's independent research or even the development of our space flight and aviation technologies
It is extremely important.Here, it is super to provide a kind of engine blade surface based on Ion Beam Treatment that can be used under harsh environment
The manufacturing method of hard super thick DLC film.
It should be noted that in the present embodiment, DLC film is prepared on the base layer, the basal layer of selection is blade base material
Expect TC4, referring to Fig.1, it illustrates the present embodiment DLC film preparation method, which includes the following steps：
S100：Using metal vapor vacuum arc (MEVVA) ion source, basad layer injects the first metallic element, forms gold
Belong to " pinning layer ".
Wherein, this step is that metal ion implantation formation " pinning layer " being capable of shape using high-energy metals ion implanting substrate
At the mixed layer of metal and base material, the binding force of its surface subsequent film and substrate is improved.
It should be pointed out that in S100, Ti or Ni can be used in the first metallic element.As a kind of optional embodiment,
The injecting voltage of first metallic element is 4~15kV, and beam intensity is 1~15mA (containing end value), implantation dosage 1
×1015~1 × 1017/cm2(containing end value), injection depth are 70~120nm (containing end value).
S200：Utilize filtered cathodic vacuum arc (FCVA) system, on substrate " pinning layer " surface, 90 degree of Magnetic filter depositions
Obtain first layer metal internal stresses release layer.
In this step, optionally, the first metallic diaphragm can be Ti film layers or Ni film layers, and thickness is 10~500nm.
S300：With filtered cathodic vacuum arc (FCVA) system, in first layer metal internal stresses release layer surface, 180 degree
Magnetic filter deposits to obtain the soft DLC film layer of the second layer.
In this step, optionally, the cathode that the starting the arc forms plasma is carbon, and soft DLC thickness is 10~1000nm,
Back bias voltage sequence is followed successively by 800V, 600V, 400V and 200V.
S400：With filtered cathodic vacuum arc (FCVA) system, in the soft DLC film layer surface of the second layer, 180 degree Magnetic filter is heavy
Product obtains superhard DLC film layer, and the overall thickness of film layer is 10~30 microns.
In this way, existing above by a kind of element in the Ti and Ni of the injection of metal vacuum steam plasma source (MEVVA) system
One kind or two in metal " pinning layer ", the Ti and Ni that 90 degree of magnetic filtered vacuum arc depositing systems (FCVA) deposit is prepared in substrate
The stress release layer that kind element is constituted, the DLC soft formations and 180 degree of 180 degree magnetic filtered vacuum arc depositing system (FCVA) deposition
The DLC superabrasive layers of magnetic filtered vacuum arc depositing system (FCVA) deposition, the layer are formed using metal ion implantation system
Metal mixed " pinning layer " makes subsequent deposition film layer and base material have extraordinary bond strength；In combination with DLC
The ultralow friction coefficient and ultrahigh hardness feature of film layer make it as helicopter blade surface coating when desertification dirt corrodes
With apparent advantage.
Apparatus embodiments
To realize the preparation method of above-mentioned metal " pinning layer ", the various embodiments described above are based on, the present embodiment proposes a kind of gold
Belong to the Preparation equipment of " pinning layer ", which includes following device：Injection device.
Wherein, injection device is used to utilize MEVVA ion sources, the first metallic element is injected to the basal layer, to described
Basal layer carries out metal-doped injection.
It should be noted that MEVVA ion sources mainly generate area by plasma and ion beam draw-out area forms, plasma
Body generates area i.e. metal vapor vacuum arc region of discharge.MEVVA ion implantings are exactly the load energy generated using MEVVA ion sources
Ion beam bombardment material surface carries out ion implanting, to change the physics of material surface, the mistake of chemical property to workpiece surface
Journey so that film can be securely joined with workpiece substrate.
It should be pointed out that in the various embodiments described above, precipitation equipment can be used such as Fig. 3 left (180 degree Magnetic filter), right half
FCVA depositing systems shown in (90 degree), the FCVA ion source deposit systems include：FCVA cathodes 300, plasma tube
310, magnetic field 320, sample workpiece platform 330, negative pressure terminal 360.
In addition, in the various embodiments described above, the MEVVA ion sources injection system as shown in Fig. 3 lower parts can be used in injection device
System, the MEVVA ion source injected systems include：MEVVA cathodes 340 and extraction electrode 350.
In the following, making the preparation method of above-mentioned metal pinning layer into one in specific implementation process in conjunction with an example
Walk explanation：
It is described with reference to the drawings, with metal vacuum steam plasma source cathode be Ti and filtered cathodic vacuum arc cathode is that Ti is
Example, it is detailed to introduce a kind of superhard super thick DLC film method for depositing desertification dirt on helicopter blade and corroding of the present invention, implement
Steps are as follows：
1. prepared by metal " pinning layer " 210：
Injection：Base material 200 is fixed on sample stage 330, and turns to injection target position and starts to inject.It is pure to inject ion source
The pure Ti of degree 99.9%, injection condition are：Vacuum degree 1 × 10-3~6 × 10-3Pa injects arc voltage：50~70V, high pressure：6~
10kV, arc stream：3~6mA, implantation dosage 1 × 1014~1 × 1015Ti/cm2。
2.Ti films discharge stressor layers 220 and prepare：
Ti is deposited：Rotation sample to 90 degree of Magnetic filter deposition target position start to deposit.Deposit the Ti arcs that arc source is purity 99%
Source, sedimentary condition are：Vacuum degree 1 × 10-3~6 × 10-3Pa deposits arc stream：100~120A, field supply：1.4~2.4A,
Arc stream：80~140mA, back bias voltage：100V~300V, duty ratio 50%~100%, sedimentation time 3~60 seconds.
It is prepared by 3.DLC soft formations 230：
Soft DLC film deposition：230 are deposited on 220, deposition arc source is the carbon arc source of purity 99%, and sedimentary condition is：Very
Reciprocal of duty cycle 1 × 10-3~6 × 10-3Pa deposits arc stream：100~120A, field supply：2.4~4.5A, arc stream：80~140mA is born
Bias sequence is followed successively by 800V, 600V, 400V and 200V duty ratios 20%~50%, sedimentation time 2min, and duty ratio is
100%, deposit 5min.
It is prepared by 4.DLC superabrasive layers 240：
DLC film deposits：DLC films deposited 240 on 230, sedimentary condition are：Deposit the carbon arc that arc source is purity 99%
Source, vacuum degree：1×10-3~6 × 10-3Pa deposits arc stream：100~120A, field supply：1.4~2.4A, arc stream：80~
140mA, back bias voltage：300V, duty ratio 20%~30%, sedimentation time 15h.
To being illustrated based on thick DLC performances prepared by ion beam technology, to can refer to Fig. 4,5,6,7 and Fig. 8 here,
It is respectively that the present invention DLC films deposited surface optical shape appearance figure, DLC film and substrate sand and dust in substrate corrode mass loss signal
Figure and DLC film layer friction and wear test result schematic diagram；Fig. 7 is the nano hardness of soft formation part in thick DLC film layer, and Fig. 8 is
The microhardness of super thick DLC film.In conjunction with Fig. 7 it is found that super thick DLC film layer microhardness reaches as high as 7551.8HV, close to naturally
The hardness of diamond, soft DLC film layer nano hardness is in 33.65Gpa.Fig. 5 is the superhard super thick DLC prepared based on ion beam technology
Mass loss when film corrodes under Sand Dust Environment, sand grains are derived from the Takla Makan Desert, main component SiO2, using electronics
Assay balance (precision 0.1mg) weighs the mass change of sample before and after erosion, and impact angle is to be measured into sand at 45 degree of angles with film layer
For 10g/min, erosion speed is 80m/s, it will be seen that comparing and substrate, superhard DLC film are several with this condition from figure
There is no mass loss, mass loss rate per minute is about the 1/50~1/100 of former base bottom, and desertification dirt erosion ability is obviously big
Big enhancing.Fig. 6 is that DLC film (dry friction, object be silicon carbide ball) in fretting wear equipment is rubbed in DLC nano composite membranes
Coefficient schematic diagram is wiped, for the friction coefficient of film layer 0.085 or so, friction coefficient is very low as seen from the figure, is conducive to low in reducing
The frictional wear amount of the sand bed of angle.
Claims (5)
1. a kind of method depositing superhard super thick DLC film on aircraft blade based on ion beam technology, feature include：
(a) metal vacuum steam plasma source (MEVVA) method for implanting is used, in blade base surface injected with metallic elements, is formed
Metal " pinning layer ", the metallic element are Ti or Ni, and injecting voltage is 4~15kV, and beam intensity is 1~10mA, note
It is 1 × 10 to enter dosage15~1 × 1017/cm2, injection depth is 70~120nm；
(b) on the metal " pinning layer ", using filtered cathodic vacuum arc (FCVA) method, deposition obtains first layer use
In the film metal transition zone of release internal stress, the target used is metallic cathode, striking current 100-120A, bend pipe magnetic field
1.4~2.4A, 80~140mA of line, deposition thickness are 10~500nm；
(c), on the first layer transition zone, using filtered cathodic vacuum arc (FCVA) method, deposition obtains the second layer
Soft DLC film, the target used is carbon cathode, 100~120A of striking current, 2.4~4.5A of bend pipe magnetic field, deposition thickness 10-
1000nm；
(d) on the second layer, using filtered cathodic vacuum arc (FCVA) method, deposition obtains the superhard DLC of third layer
Film layer, 100~120A of striking current, 1.4~2.4A of bend pipe magnetic field, negative pressure 300V, duty ratio are 20~30%, and deposition obtains thickness
Range is spent at 10-25 μm.
2. special according to a kind of method depositing superhard super thick DLC film on aircraft blade based on ion beam technology of claim 1
Sign is：The substrate is engine blade.
3. special according to a kind of method depositing superhard super thick DLC film on aircraft blade based on ion beam technology of claim 1
Sign is：
(a) when depositing the first layer metal transition zone, the target used is metallic cathode, and striking current 100-120A is curved
1.4~2.4A of pipe magnetic field, 80~140mA of line, negative pressure 100-300V, 30~60s of sedimentation time, duty ratio are 50~100%；
(b) in the soft DLC film of the deposition second layer, the target used is carbon cathode, 100~120A of striking current, bend pipe magnetic
2.4~4.5A of field, is sequentially deposited using negative pressure 800V, 600V, 400V and 200V；
(c) when depositing the superhard DLC film, the target used is carbon cathode, 100~120A of striking current, bend pipe magnetic field 1.4
~2.4A, negative pressure 300V, duty ratio are 20~30%.
4. depositing superhard super thick DLC film equipment, feature on aircraft blade based on ion beam technology according to claim 1 one kind
It is, including：
(a) injection device is configured to utilize metal vapor vacuum arc (MEVVA) system, using the MEVVA ion sources to described
Substrate surface injects metal Ti or Ni element, forms metal " pinning layer "；Wherein, the injecting voltage of Ti or Ni is 4~15kV,
Beam intensity is 1~10mA, and implantation dosage is 1 × 1015~1 × 1017/cm2, injection depth is 70~120nm；
(b) precipitation equipment is configured to filtered cathodic vacuum arc (FCVA) system, heavy using 90 degree of Magnetic filter depositional modes of single tube
Product intermediate metal (the first precipitation equipment), using two-tube 180 degree Magnetic filter depositional mode deposition DLC layer, (the second deposition fills
Set), the precipitation equipment includes：
First precipitation equipment, for utilizing the FCVA systems, on the metal " pinning layer ", Magnetic filter deposits first layer
Metal；Wherein, the metallic element of the intermediate metal is Ti or Ni, and thickness is 10~500nm；
Second precipitation equipment, for utilizing FCVA systems, in first layer metal transition layer surface, Magnetic filter deposits to obtain the second layer
Soft diamond film layer (DLC)；Wherein, the thickness of the DLC film layer is 10~1000nm, later on the soft DLC layer surface of the second layer,
Magnetic filter deposits to obtain superhard DLC film layer, wherein the thickness of the superhard DLC film layer is 10~25 μm.
5. a kind of superhard super thick DLC film strong for low angle sand and dust erosiveness in resisting on aircraft blade, which is characterized in that adopt
It is prepared with the equipment in claims 1 to 3 any one of them method and claim 4.
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| CN107236928A (en) * | 2017-07-20 | 2017-10-10 | 北京师范大学 | Flexible parent metal circuit board and preparation method thereof and equipment |
| CN107604312B (en) * | 2017-09-21 | 2019-11-19 | 湘潭大学 | A kind of surface is the piston and its preparation method and application of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation |
| CN108842133B (en) * | 2018-05-31 | 2020-07-10 | 北京师范大学 | Preparation method and equipment of graphical electrostatic chuck |
| CN109402577B (en) * | 2018-12-27 | 2021-06-22 | 广东省新材料研究所 | Superhard carbon-based film and preparation method thereof |
| CN114875361A (en) * | 2022-05-27 | 2022-08-09 | 重庆中光学建设镀膜科技有限公司 | High-adhesion metal coating and preparation process thereof |
| CN116676557A (en) * | 2023-06-08 | 2023-09-01 | 广东省广新离子束科技有限公司 | Drill bit with self-lubricating DLC coating and preparation method thereof |
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