CN105762055A - Mass spectrum device for research of plasma-micromolecule system reaction - Google Patents
Mass spectrum device for research of plasma-micromolecule system reaction Download PDFInfo
- Publication number
- CN105762055A CN105762055A CN201410787348.XA CN201410787348A CN105762055A CN 105762055 A CN105762055 A CN 105762055A CN 201410787348 A CN201410787348 A CN 201410787348A CN 105762055 A CN105762055 A CN 105762055A
- Authority
- CN
- China
- Prior art keywords
- plasma
- electrode
- laser
- reaction
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention relates to a mass spectrum device for the research of plasma-micromolecule system reaction. The device comprises a plasma-micromolecule reaction unit (1), a femtosecond laser ionization system (2), an ion extraction system (3), a mass analyzer (4), and a vacuum cavity (5). A nanosecond laser sputtering solid target material is used for generating plasma, and gaseous micromolecules enter a plasma generation region through a capillary tube, and reacts with the plasma nearby the surface of the target material. The technology of femtosecond laser ionization is used for the ionization of a reaction product, and finally the analysis and confirmation of the reaction product are carried out through combining the technology of flight time mass spectrum. The device can represent the product composition of the reaction of the plasma with the gaseous micromolecules accurately and efficiently in real time, and provides model support for the actual confirmation cognition in a production and machining process.
Description
Technical field
The present invention relates to mi-crochemistry kinetics field, specifically a kind of for studying the mass spectrometric apparatus that plasma reacts with gas phase small molecule systems, it is possible to complete the accurate analysis of plasma and the little processes of molecular reactions product of gas phase.
Background technology
Mi-crochemistry kinetics is intended on atom and molecular level to probe into chemical reaction process, and wants to realize the regulation and control to reaction and then make the carrying out of reaction occur towards direction advantageously.Plasma is the accompaniment cannot avoided in laser processing procedure, a fairly simple example, such as cuts at high power laser in the process of metal, will produce plasma when laser power reaches certain threshold value.The generation of above-mentioned plasma can make laser defocus, and can absorb the energy of laser thus causing that cut ability is greatly weakened.If but it should be noted that in cutting process, use different auxiliary cutting gas, the generation of this plasma can change therewith.Such as when doing cut assist gas with nitrogen, plasma is known from experience along with the increase of laser power is easy to produce, and differing very big is that above-mentioned plasma will obtain certain suppression as assist gas if, with oxygen.In conjunction with before some research meanses, the analysis means such as such as spectrum recognize in above-mentioned cutting process oxygen participate in except as assist gas for except providing some functions physically, such as by slag from cutting zone drive away outside, also reacting with metal causes the generation of plasma to be suppressed, and the function of nitrogen is merely possible to assist gas and is driven away by slag, there is not other reaction, so and react between plasma.For the clear understanding of said process, still lack image clearly at present, to a great extent owing to the foundation of above-mentioned model and the restriction of analysis means make the understanding of the reaction that above-mentioned plasma participates in oxygen is restricted.
In recent years, along with the high speed development of analysis means, mass-spectrometric technique, spectral technique and spectroscopic technique etc. all can go the carrying out of research course of reaction on a molecular scale.Wherein, mass-spectrometric technique is obtaining increasing concern and application in recent years as a kind of pervasive analytical technology.Meanwhile, flight time mass spectrum also because of its have high-resolution, high sensitivity, simple in construction, cost performance high and be increasingly becoming one of mass spectral analysis field is most promising now analysis means.It addition, along with the maturation of ultrashort pulse laser technology so that the application of high power density laser becomes to popularize all the more.(pulse width is 10 because of its ultrashort laser pulse for femtosecond laser technology-15Second-time) and be increasingly becoming flight time mass spectrum and ionize the new developing direction of means.Utilize femtosecond laser after focusing on, can be very easy to obtain the power density of terawatt (TW) level, it is possible to be greatly improved the ionizing efficiency of assay products.The combination of efficient ionization means and high-resolution analytical technology makes the carrying out of understanding plasma reaction process be possibly realized.
Summary of the invention
The present invention, in view of making by the fact that above, its object is to provide a kind of mass spectrometric apparatus for studying plasma-small molecule systems reaction；
For achieving the above object, the technical solution used in the present invention is as shown in Figure 1:
A kind of mass spectrometric apparatus for studying plasma-small molecule systems reaction, is placed in a hermetic container including plasma-little molecular reaction unit (1), ion extraction system (3) and mass analyzer (4)；Plasma-little molecular reaction unit (1) includes the reaction chamber that hollow is airtight, and reaction chamber is provided with the vacuum orifice being connected with vacuum pump；Metal targets it is provided with in reaction chamber, the nanosecond laser that nanosecond laser sends is irradiated in the right lateral surface of metal targets, one end of one gas piping is connected with source of the gas, opposite side is in the right side of gas piping metal targets, right lateral surface that the gas purging injected by gas piping irradiates to nanosecond laser, metal targets, forming a reaction zone in the right side of metal targets, the femtosecond laser that femto-second laser sends is irradiated in reaction zone；Reaction chamber right openings, opening on the left of hermetic container, reaction chamber right openings, hermetic container passes through the airtight connection of opening part；Ion extraction system (3) includes two panels from left to right successively and extracts electrode, ion beam focusing battery of lens and two pairs of deflecting electrodes；Extracting electrode is the two pieces of flat boards be arrangeding in parallel, is respectively equipped with truncated cone projection in the left side of flat board, is provided with through the through hole of flat board in truncated cone projection in the axial direction, and the through hole on two pieces of flat boards is coaxial；Ion beam focusing battery of lens include three from left to right coaxial spaced arrange, the cylindrical metallic electrode of hollow, deflecting electrode is made up of two groups of metal parallel plates, the perpendicular placement of pole plate of the pole plate of first group of electrode and second group；It is coaxial with ion beam focusing battery of lens that two panels extracts electrode, and their axis is between two pole plates of first group of electrode and two pole plates of second group；Right lateral surface that the through hole of extraction electrode irradiates towards nanosecond laser, metal targets；Mass analyzer is positioned at the right side extracting electrode, is provided with, in the hermetic container near mass analyzer side, the vacuum orifice being connected with vacuum pump；The ion that plasma-little molecular reaction unit produces enters after ion extraction system in mass analyzer and carries out quality analysis.
Further, insulation spacer isolation with holes by middle part between two pieces of flat boards of electrode is extracted；Vacuum pump is mechanical pump and the molecular pump of gas evacuation.
Further, extracting in left side and apply electromotive force in electrode and metal targets, electrode ground connection is extracted on right side；DC voltage is applied in ion beam focusing battery of lens and two pairs of deflecting electrodes.
Further, functions is as follows:
A () plasma-little molecular reaction unit (1) can produce plasma and react with small molecule systems；
B above-mentioned product is ionized by () femtosecond laser ionization system (2)；
C the ion being ionized in product is carried out extracting acceleration shaping by () ion extraction system (3), and make this ion beam enter flight time mass spectrum；
D () mass analyzer (4) makes the ion in this region of entrance separate in time according to the difference of kinetic energy, and converted to the voltage signal that can analyze by mass spectrometry detector；
F () vacuum chamber (5) provides high vacuum environment for plasma-little molecular reaction and mass analyzer.
Further, the method adopting laser splash in plasma-little molecular reaction unit (1) produces plasma.This sputtering laser is pulse laser, and pulse width is nanosecond order (1-1000 nanosecond), and wavelength can be 300 nanometers-1200 nanometers.This nanosecond laser focuses on solid target through condenser lens, at the power of focal position be more than or equal to 105W/cm2。
Further, the solid target in plasma-little molecular reaction unit (1) is fixed on a four-dimensional adjusting bracket, and this four-dimension adjusting bracket can realize three-dimensional translating and regulate and one-dimensional rotation adjustment.Above-mentioned reacting gas enters plasma generation area in the way of jet by a capillary tube and reacts with plasma.Above-mentioned capillary inner diameter 0.01 millimeter to 1 millimeter.The reaction density of gas molecule is regulated by the pressure before regulating gas entrance capillary tube.
Further, femtosecond laser ionization system (2) is used to the neutral products in ionic plasma-little processes of molecular reactions.This femtosecond laser can be produce laser pulse width at 10-1000 femtosecond, frequency 1-1000 hertz, the power density after focusing is 1012W/cm2Above.Femtosecond laser ionized space is positioned at nanosecond laser sputtering target material surface location distance 5-15 centimetre.
Further, the above-mentioned product being ionized can be accelerated and shaping by ion extraction system (3).This ion extraction system (3) includes two panels and extracts cone, ion beam focusing battery of lens and two pairs of deflecting electrodes.Extracting cone conical solid angle is 20 to 50 degree, cone perforate 0.5 to 5 millimeter, conical lower portion diameter 7 to 50 millimeters, cone length 5 to 50 millimeters.Isolated by insulation spacer between the ion extraction cone, spacing 3 to 20 millimeters.Ion beam focusing battery of lens includes three cylindrical metal electrodes, this group electrode external diameter 7 to 50 millimeters, internal diameter 5 to 45 millimeters, length 3 to 50 millimeters, electrode spacing 2 to 25 millimeters.Deflecting electrode is made up of two groups of metal parallel plates, and this two arrays of electrodes is vertically placed.Often group electrode slice spacing 5 to 35 millimeters.Electrode slice is rectangle, and size dimension is 10 to 50 millimeters.Said extracted cone and ion beam focusing battery of lens coaxially pile up placement, and put forward the zone length 6 to 25 millimeters that first extracts the vertex of a cone distance nanosecond laser sputtering solid target of cone.
Further, mass analyzer (4) can adopt orthoscopic or reflective flight time mass spectrum, and this mass spectrographic detector is the ion detector amplifying mode based on microchannel plate.
Further, system Control & data acquisition unit (6) can control the opening time of the high-voltage pulse that nanosecond laser, femtosecond laser and the ion extraction cone apply.System Control & data acquisition unit (5) controls femtosecond laser ionization system (2) and opens in the time of 0.5-20 microsecond after nanosecond laser is opened, and the high-pressure opening time of ion extraction system (3) is Tong Bu with femtosecond laser ionization system (2) or unlatching within 5 microseconds behind.
Further, vacuum chamber (5) is made up of two-stage vacuum cavity, and every grade of vacuum cavity has one group of mechanical pump and adds the vacuum pump combination composition of molecular pump.First vacuum chamber is slightly taken out by the early stage at plant running by mechanical pump, has molecular pump that vacuum chamber is carried out essence afterwards again and takes out, thus reaching fine vacuum or ultra-high vacuum state.In plasma-little molecular reaction generating process, the vacuum of reaction chamber (5a) is better than 10-3Pa, the vacuum in field-free flight chamber is better than 10-5Pa。
The present invention utilizes the plasma generating process that the plasma that nanosecond laser sputtering solid target produces can model in real process in power density, utilizes femtosecond laser as ionization means, it is possible to achieve the efficient ionization to product.The product in plasma-small molecule systems course of reaction can be analyzed in real time accurately in conjunction with flying time mass spectrum analysis means, and then reaching the clear cognition to above-mentioned course of reaction, the corresponding problem for occurring in the actual production course of processing carries out theory analysis provides model foundation.
Accompanying drawing explanation
The principle schematic of Fig. 1 embodiment of the present invention；
The product mass spectra of the ferrum plasma that Fig. 2 embodiment of the present invention obtains and oxygen reaction.
Wherein 1-plasma-molecular reaction unit；1a-target frame；1b-nanosecond laser；1c-gas；2-femtosecond laser ionization system；3-ion extraction system；4-mass analyzer；5-vacuum cavity；5a-reaction chamber；5b-field-free flight chamber.
Side view in accompanying drawing is schematically and is not drawn on drawing.In but different accompanying drawings, same or analogous parts provide identical labelling all in the accompanying drawings.
Detailed description of the invention
Following by specific embodiment, some characteristics and the advantage that the present invention has is described.The present invention is a kind of mass spectrometric apparatus for studying plasma-small molecule systems reaction designed as follows, as shown in Figure 1, this device includes plasma-little molecular reaction unit (1), femtosecond laser ionization system (2), ion extraction system (3), mass analyzer (4), vacuum cavity (5).Wherein, nanosecond laser sputtering solid target is used for producing plasma, and the little molecule of gas phase enters plasma generating area through capillary tube, and reacts near target material surface with plasma.Adopt femtosecond laser ionization technique that product is ionized, finally, in conjunction with ionization time of flight product be analyzed and confirmed.This device can characterize the product composition that plasma reacts with gas molecule in space accurately, efficiently and in real time.
Embodiment 1
The product analysis of ferrum plasma and oxygen reaction
The present embodiment is intended to illustrate this device for, after studying ferrum plasma and oxygen reaction, product being analyzed the performance characterized.In the present embodiment, the isoionic generation of ferrum is that the method adopting nanosecond laser sputtering produces.The parameter of nanosecond laser is as follows, optical maser wavelength 532 nanometers, repetition rate 20 hertz, energy 30 milliwatt, pulse width 20 nanosecond, through focal length be the lens focus of 30 centimetres on the surface of ferrum, in the power density about 2.75 × 10 of nanosecond laser and iron acting region laser7W/cm2.High purity oxygen gas (99.99%) is that the metal capillary of 0.5 millimeter enters plasma generation area in the way of jet through an internal diameter.The voltage extracting electrode applying is 1600 volts.Femtosecond laser adopts pulse width 30-40 femtosecond, energy 3.3 millijoule, wavelength 800 nm, product is ionized at 8 millimeters of places of distance Iron with sputtering laser reactive region through the lens focus that focal length is 40 centimetres.As in figure 2 it is shown, time topmost the figure of Fig. 2 a represents only nanosecond laser sputtering, Fe now can only be observed+Signal, although ferrum plasma and oxygen are reacted, but present neutrality, it is impossible to be analyzed detection.Shown in Fig. 2 b be only femtosecond laser time, now nanosecond laser does not enter into, and only has oxygen to exist in ionization analyzed area, therefore only has the ion signal that only observed oxygen when femtosecond laser existence.Shown in figure 2 c is after nanosecond laser induction produces plasma and reacts with oxygen, the mass signal obtained is analyzed then through femtosecond laser ionization, it is clear that ferrum oxide ion from mass spectrum, through the iron ion that nanosecond laser sputtering produces, plasma-induced oxygen is also had to dissociate and the products such as the oxygen atom ion that generates and corresponding divalent ion product.The above results is fully to we show the premium properties that this invention has when real-time characterization plasma-little processes of molecular reactions and product thereof.
It will be appreciated by those skilled in the art that above embodiment provides purely in an illustrative manner, and some changes are possible.
Claims (11)
1. the mass spectrometric apparatus being used for studying plasma-small molecule systems reaction, it is characterised in that: include plasma-little molecular reaction unit (1), ion extraction system (3) and mass analyzer (4) and be placed in a hermetic container；Plasma-little molecular reaction unit (1) includes the reaction chamber that hollow is airtight, and reaction chamber is provided with the vacuum orifice being connected with vacuum pump；Metal targets it is provided with in reaction chamber, the nanosecond laser that nanosecond laser sends is irradiated in the right lateral surface of metal targets, one end of one gas piping is connected with source of the gas, opposite side is in the right side of gas piping metal targets, right lateral surface that the gas purging injected by gas piping irradiates to nanosecond laser, metal targets, forming a reaction zone in the right side of metal targets, the femtosecond laser that femto-second laser sends is irradiated in reaction zone；Reaction chamber right openings, opening on the left of hermetic container, reaction chamber right openings, hermetic container passes through the airtight connection of opening part；Ion extraction system (3) includes two panels from left to right successively and extracts electrode, ion beam focusing battery of lens and two pairs of deflecting electrodes；Extracting electrode is the two pieces of flat boards be arrangeding in parallel, is respectively equipped with truncated cone projection in the left side of flat board, is provided with through the through hole of flat board in truncated cone projection in the axial direction, and the through hole on two pieces of flat boards is coaxial；Ion beam focusing battery of lens include three from left to right coaxial spaced arrange, the cylindrical metallic electrode of hollow, deflecting electrode is made up of two groups of metal parallel plates, the perpendicular placement of pole plate of the pole plate of first group of electrode and second group；It is coaxial with ion beam focusing battery of lens that two panels extracts electrode, and their axis is between two pole plates of first group of electrode and two pole plates of second group；Right lateral surface that the through hole of extraction electrode irradiates towards nanosecond laser, metal targets；Mass analyzer is positioned at the right side extracting electrode, is provided with, in the hermetic container near mass analyzer side, the vacuum orifice being connected with vacuum pump；The ion that plasma-little molecular reaction unit produces enters after ion extraction system in mass analyzer and carries out quality analysis.
2. mass spectrometric apparatus according to claim 1, it is characterised in that: extract insulation spacer isolation with holes by middle part between two pieces of flat boards of electrode；Vacuum pump is mechanical pump and the molecular pump of gas evacuation.
3. mass spectrometric apparatus according to claim 1, it is characterised in that: extracting in left side and apply electromotive force in electrode and metal targets, electrode ground connection is extracted on right side；DC voltage is applied in ion beam focusing battery of lens and two pairs of deflecting electrodes.
4. mass spectrometric apparatus according to claim 1, it is characterised in that:
A () plasma-little molecular reaction unit (1) can produce plasma and react with small molecule systems；
B above-mentioned product is ionized by () femtosecond laser ionization system (2)；
C the ion being ionized in product is carried out extracting acceleration shaping by () ion extraction system (3), and make this ion beam enter flight time mass spectrum；
D () mass analyzer (4) makes the ion in this region of entrance separate in time according to the difference of kinetic energy, and converted to the voltage signal that can analyze by mass spectrometry detector；
E () vacuum chamber (5) provides high vacuum environment for plasma-little molecular reaction and mass analyzer.
5. mass spectrometric apparatus according to claim 1, it is characterised in that:
The method adopting laser splash in plasma-little molecular reaction unit (1) produces plasma；This sputtering laser is pulse laser, and pulse width is nanosecond order (1-1000 nanosecond), and wavelength can be 300 nanometers-1200 nanometers；This nanosecond laser focuses on solid target through condenser lens, at the power of focal position be more than or equal to 105W/cm2。
6. mass spectrometric apparatus according to claim 1, it is characterised in that:
Solid target in plasma-little molecular reaction unit (1) is fixed on a four-dimensional adjusting bracket, and this four-dimension adjusting bracket can realize the three-dimensional translating to solid target and regulate and one-dimensional rotation adjustment；Above-mentioned reacting gas enters plasma generation area in the way of jet by a capillary tube and reacts with plasma；Above-mentioned capillary inner diameter 0.01 millimeter to 1 millimeter；The reaction density of gas molecule is regulated by the pressure before regulating gas entrance capillary tube.
7. mass spectrometric apparatus according to claim 1, it is characterised in that:
Femtosecond laser ionization system (2) is used to the neutral products in ionic plasma-little processes of molecular reactions；This femtosecond laser can be produce laser pulse width at 10-1000 femtosecond, frequency 1-1000 hertz, the power density after focusing is 1012W/cm2Above；Femtosecond laser ionized space is positioned at nanosecond laser sputtering target material surface location distance 5-15 centimetre.
8. the mass spectrometric apparatus for studying plasma-small molecule systems reaction according to claim 1, it is characterised in that:
The above-mentioned product being ionized can be accelerated and shaping by ion extraction system (3)；This ion extraction system (3) includes two panels and extracts cone, ion beam focusing battery of lens and two pairs of deflecting electrodes；Extracting cone conical solid angle is 20 to 50 degree, cone perforate 0.5 to 5 millimeter, conical lower portion diameter 7 to 50 millimeters, cone length 5 to 50 millimeters；Isolated by insulation spacer between the ion extraction cone, spacing 3 to 20 millimeters；Ion beam focusing battery of lens includes three cylindrical metal electrodes, this group electrode external diameter 7 to 50 millimeters, internal diameter 5 to 45 millimeters, length 3 to 50 millimeters, electrode spacing 2 to 25 millimeters；Deflecting electrode is made up of two groups of metal parallel plates, and this two arrays of electrodes is vertically placed；Often group electrode slice spacing 5 to 35 millimeters；Electrode slice is rectangle, and size dimension is 10 to 50 millimeters；Said extracted cone and ion beam focusing battery of lens coaxially pile up placement, and put forward the zone length 6 to 25 millimeters that first extracts the vertex of a cone distance nanosecond laser sputtering solid target of cone.
9. mass spectrometric apparatus according to claim 1, it is characterised in that:
Mass analyzer (4) can adopt orthoscopic or reflective flight time mass spectrum, and this mass spectrographic detector is the ion detector amplifying mode based on microchannel plate.
10. mass spectrometric apparatus according to claim 1, it is characterised in that:
System Control & data acquisition unit (6) can control the opening time of the high-voltage pulse that nanosecond laser, femtosecond laser and the ion extraction cone apply；System Control & data acquisition unit (5) controls femtosecond laser ionization system (2) and opens in the time of 0.5-20 microsecond after nanosecond laser is opened, and the high-pressure opening time of ion extraction system (3) is Tong Bu with femtosecond laser ionization system (2) or unlatching within 5 microseconds behind.
11. mass spectrometric apparatus according to claim 1, it is characterised in that:
Vacuum chamber (5) is made up of left and right two-stage vacuum cavity, and every grade of vacuum cavity has one group of mechanical pump and adds the vacuum pump combination composition of molecular pump；First vacuum chamber is slightly taken out by the early stage at plant running by mechanical pump, has molecular pump that vacuum chamber is carried out essence afterwards again and takes out, thus reaching fine vacuum or ultra-high vacuum state；In plasma-little molecular reaction generating process, the vacuum of reaction chamber (5a) is better than 10-3Pa, the vacuum in field-free flight chamber is better than 10-5Pa。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787348.XA CN105762055B (en) | 2014-12-17 | 2014-12-17 | A kind of mass spectrometric apparatus for being used to study plasma-small molecule systems reaction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787348.XA CN105762055B (en) | 2014-12-17 | 2014-12-17 | A kind of mass spectrometric apparatus for being used to study plasma-small molecule systems reaction |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105762055A true CN105762055A (en) | 2016-07-13 |
| CN105762055B CN105762055B (en) | 2018-06-26 |
Family
ID=56340125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410787348.XA Expired - Fee Related CN105762055B (en) | 2014-12-17 | 2014-12-17 | A kind of mass spectrometric apparatus for being used to study plasma-small molecule systems reaction |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105762055B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107910241A (en) * | 2017-11-14 | 2018-04-13 | 大连民族大学 | A kind of mass spectrometer of laser welding plasma plumage brightness particulate subconstiuent |
| CN112114026A (en) * | 2020-09-14 | 2020-12-22 | 中国科学院化学研究所 | Method for activating and dissociating nitrogen by using plasma-assisted metal cluster catalysis |
| CN115629058A (en) * | 2022-09-16 | 2023-01-20 | 大连理工大学 | Standard reaction device for measuring photoreaction quantum yield and measuring method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4468468A (en) * | 1981-06-27 | 1984-08-28 | Bayer Aktiengesellschaft | Process for the selective analysis of individual trace-like components in gases and liquid |
| US20050021243A1 (en) * | 2001-01-30 | 2005-01-27 | Marcos Dantus | Laser and environmental monitoring system |
| US20060108520A1 (en) * | 2003-04-04 | 2006-05-25 | Park Melvin A | Ion guide for mass spectrometers |
| CN101216459A (en) * | 2007-12-28 | 2008-07-09 | 中国科学技术大学 | Infrared laser desorption/vacuume ultraviolet single photon ionization mass spectrometry analytical equipment |
| CN103219220A (en) * | 2013-03-26 | 2013-07-24 | 复旦大学 | Mass spectrum device and method used for generating plasma and ion reaction |
-
2014
- 2014-12-17 CN CN201410787348.XA patent/CN105762055B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4468468A (en) * | 1981-06-27 | 1984-08-28 | Bayer Aktiengesellschaft | Process for the selective analysis of individual trace-like components in gases and liquid |
| US20050021243A1 (en) * | 2001-01-30 | 2005-01-27 | Marcos Dantus | Laser and environmental monitoring system |
| US20060108520A1 (en) * | 2003-04-04 | 2006-05-25 | Park Melvin A | Ion guide for mass spectrometers |
| CN101216459A (en) * | 2007-12-28 | 2008-07-09 | 中国科学技术大学 | Infrared laser desorption/vacuume ultraviolet single photon ionization mass spectrometry analytical equipment |
| CN103219220A (en) * | 2013-03-26 | 2013-07-24 | 复旦大学 | Mass spectrum device and method used for generating plasma and ion reaction |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107910241A (en) * | 2017-11-14 | 2018-04-13 | 大连民族大学 | A kind of mass spectrometer of laser welding plasma plumage brightness particulate subconstiuent |
| CN108010829A (en) * | 2017-11-14 | 2018-05-08 | 大连民族大学 | The mass spectrometer of plumage brightness particulate in a kind of laser welding |
| CN108010829B (en) * | 2017-11-14 | 2019-12-03 | 大连民族大学 | The mass spectrometer of plumage brightness particulate in a kind of laser welding |
| CN107910241B (en) * | 2017-11-14 | 2019-12-13 | 大连民族大学 | Mass spectrum analysis device for plasma plume microparticle components in laser welding |
| CN112114026A (en) * | 2020-09-14 | 2020-12-22 | 中国科学院化学研究所 | Method for activating and dissociating nitrogen by using plasma-assisted metal cluster catalysis |
| CN115629058A (en) * | 2022-09-16 | 2023-01-20 | 大连理工大学 | Standard reaction device for measuring photoreaction quantum yield and measuring method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105762055B (en) | 2018-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2729959B1 (en) | Maldi imaging and ion source | |
| US5294797A (en) | Method and apparatus for generating ions from thermally unstable, non-volatile, large molecules, particularly for a mass spectrometer such as a time-of-flight mass spectrometer | |
| GB2263578A (en) | Mass spectrometers | |
| JP2014521189A (en) | Ion guide connected to MALDI ion source | |
| Stewart et al. | Time-resolved measurements with single droplet introduction to investigate space-charge effects in plasma mass spectrometry | |
| US20130234036A1 (en) | Ion source, heavy particle beam irradiation apparatus, ion source driving method, and heavy particle beam irradiation method | |
| CN104392887A (en) | Femtosecond laser post-ionization mass spectrum apparatus | |
| US20100025573A1 (en) | 5 ns or less neutron and gamma pulse generator | |
| CN106384704B (en) | Terahertz drive electronic pulse accelerated femtosecond electronic diffraction device | |
| CN105762055A (en) | Mass spectrum device for research of plasma-micromolecule system reaction | |
| US20100181473A1 (en) | Method and apparatus for the analysis of samples | |
| CN104597112A (en) | Time-resolved charged particle imaging apparatus | |
| US20150187558A1 (en) | Pulse-burst assisted electrospray ionization mass spectrometer | |
| US9263223B2 (en) | Ion generation in mass spectrometers by cluster bombardment | |
| GB2518122A (en) | An electron ionisation apparatus | |
| CN101866059A (en) | Collimation method of capillary in laser electron accelerator | |
| CN101170042A (en) | Laser splash radiation ionization cold focusing right crossing flying time mass spectrograph | |
| Querci et al. | An RF-only ion funnel interface for ion cooling in laser ablation time of flight mass spectrometry | |
| US20140326874A1 (en) | Printed circuit board multipole units used for ion transportation | |
| CN110887858B (en) | Ultrafast high-energy electron probe system based on ultrafast wide-spectrum electron beam | |
| CN110600360B (en) | Laser sputtering ultrasonic molecular beam source-ion trap mass spectrum device and operation method thereof | |
| CN109599321A (en) | A kind of laser-ultrasound ejection desorption reflection type flight time mass spectrometer and its application method | |
| CN115274403A (en) | Ion trap-time-of-flight cascade reaction mass spectrum device and detection method | |
| KR100691404B1 (en) | Non-linear ion post-focusing apparatus and mass spectrometer which uses the apparatus | |
| CN109300766B (en) | Molecular photoreaction testing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180626 Termination date: 20201217 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |