CN105738976B - A kind of method and optical element that coated layer is made on optical element - Google Patents
A kind of method and optical element that coated layer is made on optical element Download PDFInfo
- Publication number
- CN105738976B CN105738976B CN201610232252.6A CN201610232252A CN105738976B CN 105738976 B CN105738976 B CN 105738976B CN 201610232252 A CN201610232252 A CN 201610232252A CN 105738976 B CN105738976 B CN 105738976B
- Authority
- CN
- China
- Prior art keywords
- optical element
- coated layer
- thickness
- optimal
- layer thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Abstract
A kind of method that coated layer is made on optical element, comprises the following steps：Differentiate the surface appearance feature of optical element, determine its rough pattern；It is defined as the optical element of spill state for surface appearance feature, surface topography of the optical element in the coated layer with a variety of different-thickness is reconstructed by PCGrate simulation analysis, the performance of optical element when emulation and more different coated layer thickness, influence of the different coated layer thickness for the performance of optical element is analyzed, to determine optimal coated layer thickness；Based on identified optimal coated layer thickness, coated layer is made on optical element.Also disclose a kind of optical element with coated layer.The drawbacks of present invention can overcome conventional optical element surface empirically to determine the thickness value of coated layer, improve the optical property of the optical element with coated layer.
Description
Technical field
The present invention relates to optical element microfabrication field, particularly a kind of side that coated layer is made on optical element
Method and optical element.
Background technology
Micro-structural is widely used in increasing field, such as：Sensor, optical system and cell engineering
Deng people are also increasingly surging to the demand of the preparation method of new micro-structural.Late nineteen nineties, a kind of new micrographics replicated skill
Art is shown one's talent, and is commonly referred to as soft lithography (soft lithography).Soft lithography is relative to traditional photoetching skill
For art, compared to traditional photoetching technique, it can break through 100nm sizes and make fine mechanism, can manufacture complexity
Three-dimensional structure and it can be applied on curved surface, the advantages that being used on different chemical property surfaces.
The most frequently used material is PDMS (polydimethylsiloxane, dimethyl silicone polymer) in soft lithography.
PDMS-DC (PDMS double casting, the duplication twice based on PDMS) technology is a kind of inexpensive duplication process, but
It is while can but obtains Hi-Fi duplicate.PDMS-DC technologies include two steps：(1) a table is replicated using PDMS
Face has the master mold of fine structure, obtains the former that a material is PDMS；(2) using the PDMS formers in (1) as master mold, make
Second of duplication, which is carried out, with PDMS obtains the duplicate as original master tool surface structure.However, due to PDMS materials
Expect that the characteristic of inherently mutual adhesion causes the demoulding failure in above-mentioned steps (2) after second of duplication, so necessary
The surface of former is carried out chemistry or physics to be processed so that second of duplication is stripped successfully.A kind of effective processing side
Method is to deposit one layer of Parylene C-material in PDMS female mold surfaces.
The purpose of optical element surface coated film is diversified, such as does diaphragm, and modification is also foregoing
Resist blocking and that acts on；But whether be to be used for what purpose, coated film will necessarily the pattern original to optical element impact.
For optical element, influence its surface topography and also just have influence on its optical property, such as grating, coated film can be to it
Diffraction efficiency has an impact.
The technology does not have the scientific instruction provided to optical coating thickness at present, mostly by researcher's
Experience Design coating layer thickness, this is clearly the accuracy and reliability for not reaching quantitative analysis.
The content of the invention
It is a primary object of the present invention to overcome the deficiencies in the prior art, there is provided one kind makes coated layer on optical element
Method and with coated layer optical element, overcome optical element surface empirically to determine the disadvantage of the thickness value of coated layer
End, improve the optical property of the optical element with coated layer.
To achieve the above object, the present invention uses following technical scheme：
A kind of method that coated layer is made on optical element, comprises the following steps：
Differentiate the surface appearance feature of optical element, determine its rough pattern；
It is defined as the optical element of spill state for surface appearance feature, optics member is reconstructed by PCGrate simulation analysis
Surface topography of the part in the coated layer with a variety of different-thickness, is emulated and optical element during more different coated layer thickness
Performance, influence of the different coated layer thickness for the performance of optical element is analyzed, to determine optimal coated layer thickness；
Based on identified optimal coated layer thickness, coated layer is made on optical element.
Further：
The optimal coated layer thickness be no more than optical element surface fine structure most pit patterns size very
One of.
The optical element is the rectangular-groove grating that screen periods are 1 μm, groove depth is 250nm, the optimal coating thickness
Spend for no more than 25nm.
The optimal coated layer thickness is 10-25nm.
The optical element is the Fresnel Lenses that annulus spacing is 100 μm, groove depth is 17 microns, the optimal coated layer
Thickness is no more than 1.7 μm.
The coated layer is to coat Parylene material using the method for chemical vapor deposition.
The optimal coated layer thickness is 600nm-1.7 μm.
The optical element is the Fresnel Lenses that annulus spacing is 100 μm, groove depth is 17 microns, and optimal coated layer is to adopt
The film of the 10nm thickness formed naturally in optical element surface with high molecular polymer self assembly.
A kind of optical element with coated layer, the optical element have the surface appearance feature of spill state, the painting
The thickness of coating is 1/10th of the most pit patterns size no more than optical element surface fine structure.
Further, the optical element is the rectangular-groove grating that screen periods are 1 μm, groove depth is 250nm, the coating
The thickness of layer is no more than 25nm；Or the optical element is the Fresnel that annulus spacing is 100 μm, groove depth is 17 microns
Lens, the thickness of the coated layer is no more than 1.7 μm.
Beneficial effects of the present invention：
The method provided by the invention that coated layer is made on optical element, can overcome in the past for optical element surface
The drawbacks of thickness value of coated layer is empirically determined during coating film, it is defined as the optics of spill state for surface appearance feature
Element, surface topography of the optical element in the coated layer with a variety of different-thickness is reconstructed by PCGrate simulation analysis, point
Analyse and judge influence of the coated layer to optical element performance when with different coated layer thickness, so as to accurately and reliably determine
The optimal coated layer thickness that optical element surface should have, coated layer is formed in optical element surface by this optimum thickness, is made
Obtain the harmful effect that coated layer brings the optical property of optical element to minimize, so that the optical element with coated layer
Optimal optical property can be obtained.
Brief description of the drawings
Figure 1A to Fig. 1 C is the schematic diagram of three kinds of optical element surface coating films, and three kinds of optical elements are rectangle respectively
Groove, serrated slot and Fresnel Lenses face type；
Fig. 2A to Fig. 2 C judges the method schematic diagram of surface topography concavity and convexity by taking rectangular-groove grating as an example；
Fig. 3 show the diffraction efficiency comparison diagram before and after optical element coated film.
Embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary,
The scope being not intended to be limiting of the invention and its application.
Refering to Figure 1A to Fig. 3, in one embodiment, a kind of method that coated layer is made on optical element, including such as
Lower step：
Differentiate the surface appearance feature of optical element, determine its rough pattern；
It is defined as the optical element of spill state for surface appearance feature, optics member is reconstructed by PCGrate simulation analysis
Surface topography of the part in the coated layer with a variety of different-thickness, is emulated and optical element during more different coated layer thickness
Performance, influence of the different coated layer thickness for the performance of optical element is analyzed, to determine optimal coated layer thickness；
Based on identified optimal coated layer thickness, coated layer is made on optical element.
In a preferred embodiment, the optimal coated layer thickness is the minimum no more than optical element surface fine structure
/ 10th of recessed shape size.
In a kind of preferable specific embodiment, the optical element is the square that screen periods are 1 μm, groove depth is 250nm
Shape groove grating, the optimal coated layer thickness is no more than 25nm.
In a more preferred embodiment, the optimal coated layer thickness is 10-25nm.
In another preferable specific embodiment, the optical element be annulus spacing be 100 μm, groove depth be 17 microns
Fresnel Lenses, the optimal coated layer thickness is no more than 1.7 μm.
In a more preferred embodiment, the coated layer is to coat Parylene material using the method for chemical vapor deposition.
In a more preferred embodiment, the optimal coated layer thickness is 600nm-1.7 μm.
In another preferred embodiment, the optical element is the Fei Nie that annulus spacing is 100 μm, groove depth is 17 microns
Your lens, optimal coated layer are the thin of the 10nm thickness that is formed naturally in optical element surface using high molecular polymer self assembly
Film.
In one embodiment, a kind of optical element with coated layer, the optical element have the surface of spill state
Shape characteristic, the thickness of the coated layer be the most pit patterns size no more than optical element surface fine structure ten/
One.
As shown in Figure 1A, in a kind of preferable specific embodiment, the optical element 1a be screen periods be 1 μm, groove
Depth is 250nm rectangular-groove grating, and the thickness of the coated layer 1b is no more than 25nm.
As shown in Figure 1 C, in another preferable specific embodiment, the optical element be annulus spacing be 100 μm,
Groove depth is 17 microns of Fresnel Lenses, and the thickness of the coated layer 3b is no more than 1.7 μm.
The specific embodiment and its advantage of the present invention are further described below in conjunction with accompanying drawing.
According to specific embodiment, the method for coated layer is made on optical element may include following steps：
A, differentiate optical element surface shape characteristic, determine rough pattern.The fine structure of optical element surface relative to
Itself it is infinitesimal, it is possible to which it is the geometry of a closure in itself to think optical element, then recessed using judging
The method of convex polygon judges its rough pattern, i.e.,：In all sides a polygon, there is a line to two side's indefinite extensions
During as a straight line, all on the same side of this straight line, then the polygon is concave polygon, is otherwise convex polygon on other each sides.
B, for the optical element that surface appearance feature is spill state, analyzed and calculated using PCGrate software emulations, pressed
Its surface topography is reconstructed according to the coated layer of different-thickness.Optical element to being judged as evagination form, coated layer is in theory not
Its surface characteristics can be influenceed, it can be understood as surface topography outwards translates；But for being judged as the optical element of spill state, apply
Coating will necessarily influence its original shape characteristic, it is necessary to theory analysis and calculating, and in its surface shape of PCGrate software reconfigurations
Looks feature.
C, influence of the different coated layer thickness of comparison for optical element performance, it is determined that optimal coated layer thickness.
The optical element optical property before and after coating film, and comparative analysis are emulated in PCGrate softwares respectively, it is thin with reference to actual coating
Membrane process, it is determined that optimal coated layer thickness.
Following instance illustrates the method that the determination optimal coated layer thickness of optical element is analyzed based on PCGrate software emulations,
It is specific as follows：
The concavity and convexity of optical element surface fine structure is judged according to the method for judging concave-convex polygonal first.Although example
Such as the grid line on grating surface is not the figure of closing, but the size of opposed member, the parameter such as the cycle of grating and groove depth
Size be infinitesimal, it is possible to think that optical element is the geometry of an infinitely great closure in itself, Ran Hougen
It is judged that the method for concave-convex polygonal judges the concavity and convexity of optical element surface fine structure, i.e.,：The institute of a polygon
Have in side, have a line to two side's indefinite extensions turn into a straight line when, other each sides are all in the heteropleural of this straight line, then the polygon
It is otherwise convex polygon for concave polygon.
Around this principle, we may determine that the concavity and convexity of the fine structure of optical element surface, with Figure 1A rectangle
Exemplified by the surface fine structure of groove grating, we intercept one cycle (for the grating of a 25mm*25mm size, its week
Phase is 1 μm, i.e., had 25000 cycles on the grating), as shown in Figure 2 A, but it is not a closed figures, in order to use judgement
The theorem of concavity and convexity, we connect the terminal of the rectangular channel of this cycle as shown in Figure 2 B according to convex-surface type structure, shape
The figure closed into one as shown in Figure 2 C, now, is easy to judge that it is recessed with the theorem for judging closed figures concavity and convexity.
It is the fine structure of the sawtooth pattern surface 2a with coated layer 2b shown in Figure 1B, it is convex for similarly may determine that the structure
's.
It is the Fresnel Lenses face type with coated layer 3b shown in Fig. 1 C, similarly can determine whether the part 3a of its central circular is
Recessed, other donut 3c's is convex.
It is spill state for surface topography, the grating of rectangle groove profile as shown in Figure 1A, coating film will necessarily influence
The feature of itself, although groove depth and screen periods are constant, dutycycle is clearly to change.It is assumed that rectangular channel
Screen periods are 1 μm, groove depth 250nm, and initial duty cycle (ratio of bossing and screen periods) is 50%, when the thickness of coating
During degree change, its dutycycle also changes therewith, is had an impact therewith for grating diffration efficiency.It is assumed that the thickness of coating
25nm (1/10th of the most pit patterns size of surface fine structure) when spending, then its dutycycle becomes 55%, according to this
Individual changing rule is in its surface characteristics of PCGrate software reconfigurations to simulate the element surface feature after coating film.
Emulate the optical element optical property before and after coating film, and comparative analysis respectively in PCGrate softwares, with reference to
Actual coating thin-film technique, it is determined that optimal coated layer thickness.As shown in figure 3, when coated layer thickness is the fine knot in surface respectively
The most pit patterns size of structure less than 1/10th when, rectangular-groove grating apply plated film before and after diffraction efficiency it is basically identical, and
This thickness value can be realized again in actual process, thus we can determine whether the thickness of coated layer be surface fine structure most
Less than/10th of pit patterns size are optimal.The index of the quantization of a science is provided, actual coating thickness should
This is that preferred value is according to coated film from infinitely small to 1/10th (being worthless when i.e. more than 1/10th)
Technological feasibility is chosen with into original, specifically：(a) for rectangular-groove grating (groove depth minimum geometries are 250nm), adopt
With high molecular polymer self assembly naturally in element surface film, preferably probably in 10nm or so thickness；(b) for Fresnel
Lens, annulus spacing (groove width) are 100 μm, and groove depth is 17 microns (minimum geometries), can both use high molecular polymer
The method coated film of self assembly, thickness 10nm, the standard much smaller than 1/10th；The side of chemical vapor deposition can also be used
Method coats Parylene material, and coated film thickness is below 1.7 μm, and more preferably more than 600nm, i.e., now optimal selection scope is
600nm-1.7μm。
For some applications, the film of optical element coating is 1/10th of most pit patterns size proposed by the present invention
In following limit more thick better (protective effect is better, resist blocking and that best results etc.).
The optimum thickness range of optical element surface coating film layer determined by the embodiment of the present invention is no more than its table
/ 10th of minimum geometries in the shape characteristic of face, test result indicates that its effect is special to the surface topography with spill state
The optical element of sign has universality.
Above content is to combine specific/preferred embodiment further description made for the present invention, it is impossible to is recognized
The specific implementation of the fixed present invention is confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, it can also make some replacements or modification to the embodiment that these have been described,
And these are substituted or variant should all be considered as belonging to protection scope of the present invention.
Claims (7)
- A kind of 1. method that coated layer is made on optical element, it is characterised in that comprise the following steps：Differentiate the surface appearance feature of optical element, determine its rough pattern；It is defined as the optical element of spill state for surface appearance feature, reconstructing optical element by PCGrate simulation analysis exists Surface topography during coated layer with a variety of different-thickness, emulate and during more different coated layer thickness optical element property Can, influence of the different coated layer thickness for the performance of optical element is analyzed, to determine optimal coated layer thickness, the optimal painting Thickness of coating is 1/10th of the most pit patterns size no more than optical element surface fine structure；Based on identified optimal coated layer thickness, coated layer is made on optical element.
- 2. the method for coated layer is made on optical element as claimed in claim 1, it is characterised in that the optical element is The rectangular-groove grating that screen periods are 1 μm, groove depth is 250nm, the optimal coated layer thickness is no more than 25nm.
- 3. the method for coated layer is made on optical element as claimed in claim 2, it is characterised in that the optimal coated layer Thickness is 10-25nm.
- 4. the method for coated layer is made on optical element as claimed in claim 1, it is characterised in that the optical element is The Fresnel Lenses that annulus spacing is 100 μm, groove depth is 17 microns, the optimal coated layer thickness is no more than 1.7 μm.
- 5. the method for coated layer is made on optical element as claimed in claim 4, it is characterised in that the coated layer is to adopt Parylene material is coated with the method for chemical vapor deposition.
- 6. the method that coated layer is made on optical element as described in claim 4 or 5, it is characterised in that the optimal painting Thickness of coating is 600nm-1.7 μm.
- 7. the method for coated layer is made on optical element as claimed in claim 1, it is characterised in that the optical element is The Fresnel Lenses that annulus spacing is 100 μm, groove depth is 17 microns, optimal coated layer be using high molecular polymer self assembly from The film of the 10nm thickness so formed in optical element surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610232252.6A CN105738976B (en) | 2016-04-14 | 2016-04-14 | A kind of method and optical element that coated layer is made on optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610232252.6A CN105738976B (en) | 2016-04-14 | 2016-04-14 | A kind of method and optical element that coated layer is made on optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105738976A CN105738976A (en) | 2016-07-06 |
| CN105738976B true CN105738976B (en) | 2017-11-17 |
Family
ID=56255628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610232252.6A Active CN105738976B (en) | 2016-04-14 | 2016-04-14 | A kind of method and optical element that coated layer is made on optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105738976B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106940476B (en) * | 2017-01-24 | 2019-05-17 | 长春理工大学 | It is coated with the optimum design method of the diffraction optical element of anti-reflective film |
| CN109830492B (en) * | 2019-01-28 | 2021-05-14 | 深圳奥拦科技有限责任公司 | COB camera module and packaging method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050181177A1 (en) * | 2004-02-18 | 2005-08-18 | Jamie Knapp | Isotropic glass-like conformal coatings and methods for applying same to non-planar substrate surfaces at microscopic levels |
| US7339551B2 (en) * | 2004-12-21 | 2008-03-04 | Northrop Grumman Corporation | Reflective fresnel lens for sub-millimeter wave power distribution |
| RU2572999C2 (en) * | 2011-05-26 | 2016-01-20 | Адвенира Энтерпрайзис, Инк. | Coating application system and process |
| WO2013113537A2 (en) * | 2012-01-30 | 2013-08-08 | Asml Netherlands B.V. | Optical element, lithographic apparatus incorporating such an element, method of manufacturing an optical element |
| CN205581335U (en) * | 2016-04-14 | 2016-09-14 | 清华大学深圳研究生院 | Optical element with scribble cladding material |
-
2016
- 2016-04-14 CN CN201610232252.6A patent/CN105738976B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105738976A (en) | 2016-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Isiksacan et al. | Rapid fabrication of microfluidic PDMS devices from reusable PDMS molds using laser ablation | |
| Stormonth-Darling et al. | Injection moulding of ultra high aspect ratio nanostructures using coated polymer tooling | |
| Lee et al. | Controlled three-dimensional hierarchical structuring by memory-based, sequential wrinkling | |
| JP5876059B2 (en) | Method for fabricating highly ordered nanopillars or nanohole structures on large areas | |
| Lotz et al. | Fabrication and application of miniaturized dielectric elastomer stack actuators | |
| CN105738976B (en) | A kind of method and optical element that coated layer is made on optical element | |
| Päivänranta et al. | Nanofabrication of broad-band antireflective surfaces using self-assembly of block copolymers | |
| US20130115381A1 (en) | Hydrophobic surface coating | |
| RU2011138073A (en) | RELIEF SURFACE MICROSTRUCTURES RELATED TO DEVICES AND METHOD FOR PRODUCING THEM | |
| Doerk et al. | Pattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy | |
| Ge et al. | MEMS transducers low-cost fabrication using SU-8 in a sacrificial layer-free process | |
| Wang et al. | Step-controllable electric-field-assisted nanoimprint lithography for uneven large-area substrates | |
| Specht et al. | Adaptive wettability of a programmable metasurface | |
| Mielonen et al. | Curved hierarchically micro–micro structured polypropylene surfaces by injection molding | |
| Verma et al. | Control of morphologies and length scales in intensified dewetting of electron beam modified polymer thin films under a liquid solvent mixture | |
| CN205581335U (en) | Optical element with scribble cladding material | |
| Abada et al. | Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples | |
| Scheen et al. | Simultaneous fabrication of superhydrophobic and superhydrophilic polyimide surfaces with low hysteresis | |
| Yang et al. | Study on diffraction effect and microstructure profile fabricated by one-step backside lithography | |
| US10942398B1 (en) | Continuous liquid crystal alignment patterns for geometric phase optics | |
| Mao et al. | Nanopatterning using a simple bi-layer lift-off process for the fabrication of a photonic crystal nanostructure | |
| US20230202113A1 (en) | Laser conformal manufacturing method of flexible sensor | |
| Huovinen et al. | Fabrication and quantitative roughness analysis of hierarchical multiscale polymer surface structures | |
| Zhang et al. | Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding | |
| Gwiazda et al. | Simple and versatile high aspect ratio nanostructuring via zinc oxide masking |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 518000 Tsinghua campus, Shenzhen University Town, Xili street, Nanshan District, Shenzhen City, Guangdong Province Patentee after: Shenzhen International Graduate School of Tsinghua University Address before: 518055 Guangdong city of Shenzhen province Nanshan District Xili of Tsinghua Patentee before: GRADUATE SCHOOL AT SHENZHEN, TSINGHUA University |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210115 Address after: Room 902, unit a, building G4, TCL International e city, 1001 Zhongshan Garden Road, Xili street, Nanshan District, Shenzhen, Guangdong 518000 Patentee after: SHENZHEN HAN INDUSTRIAL TECHNOLOGIES Co.,Ltd. Address before: 518000 Tsinghua campus, Shenzhen University Town, Xili street, Nanshan District, Shenzhen City, Guangdong Province Patentee before: Shenzhen International Graduate School of Tsinghua University |