CN105737786A - Positioning device for film thickness measurement - Google Patents
Positioning device for film thickness measurement Download PDFInfo
- Publication number
- CN105737786A CN105737786A CN201610205408.1A CN201610205408A CN105737786A CN 105737786 A CN105737786 A CN 105737786A CN 201610205408 A CN201610205408 A CN 201610205408A CN 105737786 A CN105737786 A CN 105737786A
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- CN
- China
- Prior art keywords
- film thickness
- thickness measuring
- positioner
- pedestal
- support
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a positioning device for the film thickness measurement. The positioning device includes an element supporting base with an opening in the middle, a lower bottom plate supporting base, supporting metal columns connected between the element supporting base and the lower bottom plate supporting base in a supporting manner, a supporting table fixedly arranged on the lower bottom plate supporting base, a precise rotary table rotationally connected to the supporting table, a precise translation table fixed on the precise rotary table, a sliding table surface slidingly arranged on the precise translation table, and a laser pen inserted in the sliding table surface. The positioning device can realize the determination of any position of the surfaces of coating elements through the precise rotary table and the precise translation table according to a polar coordinate principle. When light of the laser pen irradiates the surfaces of the elements, a light spot forms. When the light spot is aligned with a measuring probe of a film thickness measurement device, the positioning of the measurement position can be realized.
Description
Technical field
The present invention relates to location technology when coated element thicknesses of layers correction is measured, particularly relate to a kind of positioner for film thickness measuring.
Background technology
When heavy-calibre element plated film, owing to bore is bigger, it is impossible to enough ensure the uniformity of thickness, it is necessary to utilize uniformity correcting baffle plate that thickness is adjusted, in the process of thickness correction, need to measure the thicknesses of layers of diverse location.Positioning function is not possessed, when heavy caliber coated element film thickness measuring, it is impossible to enough measurements realized diverse location thicknesses of layers due to film thickness measuring instrument.
Summary of the invention
The technical problem to be solved is, positioning function is not possessed for existing film thickness measuring instrument, when heavy caliber coated element film thickness measuring, it is impossible to enough defects realizing the measurement to diverse location thicknesses of layers, it is provided that a kind of positioner for film thickness measuring.
The technical scheme that the above-mentioned technical problem of the present invention adopts is as follows:
A kind of positioner for film thickness measuring is provided, supports pedestal including the element of middle opening, lower shoe supports pedestal, support and be connected to described element and support pedestal and lower shoe and support supporting metal column, be fixedly installed on described lower shoe and support supporting platform, the precision rotation platform being rotatably connected on described support platform, the accurate translation stage being fixed on described precision rotation platform, the sliding table being slidably arranged on described accurate translation stage and being inserted in the laser pen on described sliding table on pedestal between pedestal.
The positioner for film thickness measuring according to the present invention, different angles can be positioned by adjustment precision turntable, realize the function of polar angle, the position of different radii can be positioned by adjustment precision translation stage, realize the function of pole axis, the light utilizing laser pen is radiated at element surface and forms a hot spot, is directed at the measuring probe of film thickness measuring instrument by hot spot, can realize measuring the location of position.This positioner has precision rotation platform and accurate translation stage, because the precise positioning to optional position can be realized, meets in thickness adjusts, the positioning requirements to film thickness measuring, and realizes easy, simple to operate.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of positioner for film thickness measuring that one embodiment of the invention provides.
Wherein: 1, element supports pedestal；2, lower shoe supports pedestal；3, metal column is supported；4, platform is supported；5, precision rotation platform；6, accurate translation stage；7, sliding table；8, laser pen.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further elaborated.
Referring to Fig. 1, the present invention one implement to provide for the positioner of film thickness measuring, support pedestal 1 including the element of middle opening, lower shoe supports pedestal 2, support and be connected to described element and support pedestal 1 and support supporting metal column 3, be fixedly installed on described lower shoe and support supporting platform 4, the precision rotation platform 5 being rotatably connected on described support platform 4, the accurate translation stage 6 being fixed on described precision rotation platform 5, the sliding table 7 being slidably arranged on described accurate translation stage 6 and being inserted in the laser pen 8 on described sliding table 7 on pedestal 2 between pedestal 2 with lower shoe.
In the present embodiment, the edge of the middle opening that described element supports pedestal 1 is formed with the annular groove 9 for placing coated element or coating clamp.
In the present embodiment, described lower shoe supports and is provided with the fixed hole position for fixing described support platform 4 in the middle of pedestal 2.
In the present embodiment, lower shoe is supported pedestal 2 and is fixedly linked with element support pedestal 1 by four support metal columns 3.Four described support metal columns 3 are along the circumferential direction evenly spaced in described element and support between pedestal 1 and lower shoe support pedestal 2, i.e. 90 degree of adjacent two described support metal column 3 intervals.
In the present embodiment, supporting platform 4 and be used for connecting precision rotation platform 5, precision rotation platform 5 can rotate by relative support platform 4.Precision rotation platform 5 has the angle index of the different orientation angle of instruction, it is possible to the orientation angle that adjustment precision turntable 5 is different.It addition, described precision rotation platform 5 has the rotation locking mechanism (not indicating in figure) for being fixed on by precision rotation platform 5 in a certain angle, namely precision rotation platform 5 has angle locking function.
In the present embodiment, accurate translation stage 6 has the linear graduation for indicating different location radii, it is possible to according to measurement demand, position different radiuses.It addition, described accurate translation stage 6 has the translation locking mechanism for being fixed on by sliding table 7 on certain Radius.
During locked accurate translation stage 6, by rotating precision rotation platform 5, it is possible to measure with angles different under Radius, it is achieved with the measurement and positioning of polar angles different under Radius；Certainly, during locked rotation precision rotation platform 5, by adjustment precision translation stage 6, it is possible to the location measuring the different radii under same polar angle is measured.Thus, it is achieved that different polar angles, the consecutive tracking of different radii (pole axis).
In the present embodiment, being positioned at the RC interstitial hole position of described sliding table 7 as it is shown in figure 1, be provided with on described sliding table 7, described laser pen 8 inserts described interstitial hole position.The light of laser pen 8 can be radiated at coated element surface and form a little hot spot, when utilizing film thickness measuring instrument to measure thickness, being directed at facula position by measuring probe, adjustment precision turntable 5 and accurate translation stage 6 are achieved that the film thickness measuring to coated element diverse location.
In the present embodiment, the spot size that described laser pen 8 is radiated on coated element mates with the measuring probe of film thickness measuring instrument.Such as, the measuring probe of film thickness measuring instrument is the optical fiber head of a diameter 3mm, and forming a diameter when light of laser pen 8 is radiated at coated element surface is the hot spot of 3mm.
Obviously, above-described embodiment is only for clearly demonstrating example of the present invention, and is not the restriction to embodiments of the present invention.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here without also cannot all of embodiment be given exhaustive.And the apparent change that these spirit belonging to the present invention are extended out or variation are still among protection scope of the present invention.
Claims (10)
1. the positioner for film thickness measuring, it is characterized in that, element including middle opening supports pedestal (1), lower shoe supports pedestal (2), support is connected to described element and supports the support metal column (3) between pedestal (1) and lower shoe support pedestal (2), it is fixedly installed on described lower shoe and supports the support platform (4) on pedestal (2), be rotatably connected the precision rotation platform (5) on described support platform (4), it is fixed on the accurate translation stage (6) on described precision rotation platform (5), it is slidably arranged in the sliding table (7) on described accurate translation stage (6) and the laser pen (8) being inserted on described sliding table (7).
2. the positioner for film thickness measuring according to claim 1, it is characterised in that the edge of the middle opening that described element supports pedestal (1) is formed with the annular groove (9) for placing coated element or coating clamp.
3. the positioner for film thickness measuring according to claim 1, it is characterised in that described lower shoe supports and is provided with the fixed hole position for fixing described support platform (4) in the middle of pedestal (4).
4. the positioner for film thickness measuring according to claim 1, it is characterized in that, described support metal column (3) is four, and four described support metal columns (3) are along the circumferential direction evenly spaced in described element and support between pedestal (1) and lower shoe support pedestal (2).
5. the positioner for film thickness measuring according to claim 1, it is characterised in that there is on described precision rotation platform (5) angle index of the different orientation angle of instruction.
6. the positioner for film thickness measuring according to claim 5, it is characterised in that described precision rotation platform (5) has the rotation locking mechanism for being fixed in a certain angle by precision rotation platform (5).
7. the positioner for film thickness measuring according to claim 1, it is characterised in that described accurate translation stage (6) has the linear graduation for indicating different location radii.
8. the positioner for film thickness measuring according to claim 7, it is characterised in that described accurate translation stage (6) has the translation locking mechanism for being fixed on certain Radius by sliding table (7).
9. the positioner for film thickness measuring according to claim 1, described sliding table (7) is provided with and is positioned at the RC interstitial hole position of described sliding table (7), and described laser pen (8) inserts described interstitial hole position.
10. the positioner for film thickness measuring according to claim 1, it is characterised in that the spot size that described laser pen (8) is radiated on coated element mates with the measuring probe of film thickness measuring instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610205408.1A CN105737786A (en) | 2016-04-01 | 2016-04-01 | Positioning device for film thickness measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610205408.1A CN105737786A (en) | 2016-04-01 | 2016-04-01 | Positioning device for film thickness measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105737786A true CN105737786A (en) | 2016-07-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610205408.1A Pending CN105737786A (en) | 2016-04-01 | 2016-04-01 | Positioning device for film thickness measurement |
Country Status (1)
| Country | Link |
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| CN (1) | CN105737786A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104034662A (en) * | 2014-06-13 | 2014-09-10 | 北京工业大学 | Accurate positioning tool (positioning instrument) for measuring residual stress of wafer by Raman spectroscopy |
| CN203981379U (en) * | 2014-07-30 | 2014-12-03 | 苏州弗士达科学仪器有限公司 | A kind of optical characteristic test board of flat-panel monitor |
| CN204101180U (en) * | 2014-07-18 | 2015-01-14 | 中科科隆光电仪器设备无锡有限公司 | Spectrometer probe accurate positioning device |
| CN105423917A (en) * | 2015-12-01 | 2016-03-23 | 中国科学院西安光学精密机械研究所 | Calibration method and calibration apparatus for positioning error of position sensitive detector |
-
2016
- 2016-04-01 CN CN201610205408.1A patent/CN105737786A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104034662A (en) * | 2014-06-13 | 2014-09-10 | 北京工业大学 | Accurate positioning tool (positioning instrument) for measuring residual stress of wafer by Raman spectroscopy |
| CN204101180U (en) * | 2014-07-18 | 2015-01-14 | 中科科隆光电仪器设备无锡有限公司 | Spectrometer probe accurate positioning device |
| CN203981379U (en) * | 2014-07-30 | 2014-12-03 | 苏州弗士达科学仪器有限公司 | A kind of optical characteristic test board of flat-panel monitor |
| CN105423917A (en) * | 2015-12-01 | 2016-03-23 | 中国科学院西安光学精密机械研究所 | Calibration method and calibration apparatus for positioning error of position sensitive detector |
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Application publication date: 20160706 |
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