CN105737727A - Probe of eddy current sensor and eddy current sensor - Google Patents
Probe of eddy current sensor and eddy current sensor Download PDFInfo
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- CN105737727A CN105737727A CN201610108299.1A CN201610108299A CN105737727A CN 105737727 A CN105737727 A CN 105737727A CN 201610108299 A CN201610108299 A CN 201610108299A CN 105737727 A CN105737727 A CN 105737727A
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- coil
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- compensating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention discloses a probe of an eddy current sensor and an eddy current sensor. The probe of the eddy current sensor comprises a detection coil and a temperature compensating coil. The detection coil is in parallel with the test surface of the probe; the temperature compensation coil is perpendicular to the detection coil and does not exceed the plane where the inner side coil of the detection coil is positioned; the inner side coil of the detection coil is a turn of a detection coil having a shortest detection distance with the detection surface. The probe of the eddy current sensor and the eddy current sensor solve the problems that the eddy current sensor in the prior art is not high in detection accuracy because of temperature drift or the probe is large in size because of the temperature compensation, realize the probe size reduction on the basis of the guaranteed accuracy, achieve wide temperature compensation range and small probe size.
Description
Technical field
The present embodiments relate to distance-measuring equipment, particularly relate to probe and the current vortex sensor of a kind of current vortex sensor.
Background technology
Eddy current displacement sensor owing to having that noncontact, measurement scope be big, highly sensitive, simple in construction, the many merits such as do not affected by nonmetallic materials, be widely used at detection field.
The probe of common eddy current displacement sensor is made up of the nonmetal skeleton of a flat coil and fixed coil.Owing to coil and skeleton generally adopt common material, if the variation of ambient temperature of sensor probe is little, the output of sensor is influenced by temperature just smaller, and the output of sensor can reflect the size of tested displacement exactly.After the ambient temperature of sensor exceeds the normal working temperature of sensor, the material of sensor probe not only can not bear the effect of high temperature, and hot environment can make the resistance of sensor, inductance and physical dimension that significantly change occurs, and causes the output of eddy current displacement sensor can not reflect the size of tested displacement exactly.
At present, the temperature-compensating of the eddy current displacement sensor on market is to carry out algorithm compensation in fore-lying device, and the method compensation precision is relatively low.It addition, market adopts the head at sensor adopt some technical measures to reduce ambient temperature, the sensor of the impact of sensor electrical parameter is also more, as with multiply litzendraht wire or with the wire coiling of low-temperature coefficient, the compensation effect of which is limited.Additionally, prior art also have the detection coil on sensor compensate the reduction ambient temperature scheme on the impact of coil output characteristics, as adopted noninductive bucking coil or with negative temperature coefficient resister, coil temperature being compensated, adopt the probe size that this compensation method designs can be elongated, be unfavorable in some cases installing and displacement detecting.
Summary of the invention
The present invention provides probe and the current vortex sensor of a kind of current vortex sensor, to realize ensureing to reduce probe size on the basis of accuracy of detection, reaches the effect that temperature compensation range is wide, probe size is little.
First aspect, embodiments provide the probe of a kind of current vortex sensor, including detection coil and temperature-compensating coil, described detection coil is parallel with the test surface of probe, described temperature-compensating coil is perpendicular to described detection coil, and less than the inner coil place plane of described detection coil, the inner coil of wherein said detection coil is a circle detection coil the shortest with described test surface distance.
Second aspect, the embodiment of the present invention additionally provides a kind of current vortex sensor, including the probe of fore-lying device, extension cable and above-mentioned first aspect；
The detection lead-out wires of coil of described detection coil is electrically connected with described fore-lying device by extension cable；
The bucking coil lead-out wire of described temperature-compensating coil is electrically connected with described fore-lying device by extension cable；
Described fore-lying device, the compensation signal of detection signal and described temperature-compensating coil for receiving described detection coil, described detection signal and described compensation signal are carried out calculus of differences, to eliminate the temperature drift of described detection coil.
Described detection coil, by increasing the temperature-compensating coil vertical with detection coil in probe, is carried out temperature-compensating by the present invention, eliminates temperature drift, improves accuracy of detection；Simultaneously as described detection coil is perpendicular with described temperature-compensating coil, it is possible to eliminate the vortex field impact between two coils, obtain wider array of temperature compensation range.This invention address that the problem that existing current vortex sensor causes accuracy of detection not high because of temperature drift or causes probe size bigger because of temperature-compensating, it is achieved ensure the basis of accuracy of detection reduces probe size, reach the effect that temperature compensation range is wide, probe size is little.
Accompanying drawing explanation
Fig. 1 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention one；
Fig. 2 be a kind of current vortex sensor in the embodiment of the present invention one probe in detection coil and the schematic perspective view of temperature-compensating coil；
Fig. 3 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention two；
Fig. 4 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention three；
Fig. 5 is the floor map of the probe of the another kind of current vortex sensor in the embodiment of the present invention four；
Fig. 6 is the floor map of the probe of the another kind of current vortex sensor in the embodiment of the present invention five；
Fig. 7 is the structured flowchart of a kind of current vortex sensor in the embodiment of the present invention six；
Fig. 8 is the structured flowchart of fore-lying device in a kind of current vortex sensor in the embodiment of the present invention seven.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in further detail.It is understood that specific embodiment described herein is used only for explaining the present invention, but not limitation of the invention.It also should be noted that, for the ease of describing, accompanying drawing illustrate only part related to the present invention but not entire infrastructure.
Embodiment one
The floor map of the probe of a kind of current vortex sensor that Fig. 1 provides for the embodiment of the present invention one, the present embodiment is applicable to the situation reducing probe size on the basis ensureing accuracy of detection, specifically include: detection coil 1 and temperature-compensating coil 2, described detection coil 1 is parallel with the test surface 31 of probe 3, described temperature-compensating coil 2 is perpendicular to described detection coil 1, and less than the inner coil place plane of described detection coil 1, the inner coil of wherein said detection coil 1 is apart from a shortest circle detection coil with described test surface 31.
According to Faraday law of electromagnetic induction, when the detection coil 1 in probe 3 passes to sinusoidal alternating current i1Time, detection coil 1 surrounding space necessarily leads to sine alternating magnetic field H1, it makes the metal conductor measured surface being placed in this magnetic field produce faradic current, i.e. current vortex.Meanwhile, current vortex i2Produce again new alternating magnetic field H2；H2With H1In opposite direction, and play weakening H1The effect of magnetic field intensity, thus causing that the equivalent resistance of detection coil 1 correspondingly changes.Its intensity of variation depends on the parameters such as the distance x of the electricalresistivityρ of metal conductor measured, magnetic permeability μ, coil and metallic conductor, and the frequency f of coil energizing current.If the distance x only changed in above-mentioned parameter, and all the other parameters remain unchanged, then the equivalent resistance Z detecting coil 1 just becomes the monotropic function about distance x.It is thus possible to determine the size of distance x by detecting the equivalent resistance Z of coil 1.
But, when temperature is higher, the output signal of detection coil 1 can be affected by temperature, causes that the output signal of current vortex sensor produces bigger error.Thus, the probe 3 of described current vortex sensor increases temperature-compensating coil 2, balances out the temperature drift of detection coil 1 according to the temperature drift of temperature-compensating coil 2.Wherein, temperature-compensating coil 2 is preferably identical with the structurally and electrically parameter of described detection coil 1.Further, it is possible to adopt the coiling respectively of identical enamel-covered wire to detect coil 1 and temperature-compensating coil 2, and detection coil 1 is with temperature-compensating coil 2Circle coil bundle, wherein L is the external diameter difference with internal diameter of coil, and W is the width of coil.Owing to temperature-compensating coil 2 is as the benchmark of detection coil 1, by detecting the lead-out wires of coil 11 equivalent resistance Z by detection coil 11Export to fore-lying device with the output signal of distance x change, meanwhile, by bucking coil lead-out wire 21 by the equivalent resistance Z of temperature-compensating coil 22Export to fore-lying device with the output signal of distance x change.Along with identical change all occurs in the impedance of two coils of change of temperature, carry out, by fore-lying device, two coil impedance differences that calculus of differences obtains and remain unchanged, therefore, effectively can carry out temperature-compensating to detecting coil 1 by temperature-compensating coil 2.
Described in Fig. 1, described detection coil 1 is parallel with the test surface 31 of probe 3, and described temperature-compensating coil 2 is perpendicular to described detection coil 1.Pass to, to detection coil 1, the pumping signal that frequency is all identical with amplitude with temperature-compensating coil 2 respectively by peripheral circuit.The magnetic field of a high frequency oscillation is necessarily led to, according to right-hand screw rule it can be seen that magnetic direction is perpendicular to measured object 4 at detection coil 1 surrounding space.Also the magnetic field of a high frequency oscillation is necessarily led to, according to right-hand screw rule it can be seen that magnetic direction is parallel to measured object 4 at temperature-compensating coil 2 surrounding space.Now, the magnetic field of temperature-compensating coil 2, without interference with the magnetic field of detection coil 1, in movement detection process, reaches temperature has been compensated, and is not introduced into due to electromagnetic effect and the purpose of new error that produces between two coils.
Described in Fig. 2, detection coil 1 is parallel to measured object 4, and temperature-compensating coil 2 is perpendicular to described detection coil 1, and less than the inner coil place plane of described detection coil 1, the inner coil of wherein said detection coil 1 is apart from a shortest circle detection coil with described test surface 31.Owing to when actual package, the distance between the test surface 31 of detection coil 1 and probe 3 is less, if temperature-compensating coil 2 is beyond detection coil, then encapsulation can be affected.For the ease of encapsulation, adopt the temperature-compensating coil 2 design less than the inner coil place plane of detection coil 1.
The technical scheme of the present embodiment, by increasing the temperature-compensating coil 2 vertical with detection coil in probe 3, carries out temperature-compensating to described detection coil, eliminates temperature drift, improves accuracy of detection；Simultaneously as described detection coil is perpendicular with described temperature-compensating coil 2, it is possible to eliminate the vortex field impact between two coils, obtain wider array of temperature compensation range.The technical scheme of the present embodiment solves existing current vortex sensor and causes accuracy of detection not high because of temperature drift or cause the problem that probe 3 volumes are bigger because of temperature-compensating, realize ensureing that probe 3 length making sensor on the basis of accuracy of detection reduces 20%-30%, reach the effect that temperature compensation range is wide, 3 sizes of popping one's head in are little.
Embodiment two
Fig. 3 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention two.The technical scheme of the present embodiment is on the basis of above-described embodiment, the position of detection coil 1 and temperature-compensating coil 2 is specifically limited, specifically include: the outline that described detection coil 1 is circle, the diameter of the inner coil of described detection coil 1 and described temperature-compensating coil 2 with the profile of described temperature-compensating coil 2 is tangent.So design is advantageous in that to eliminate while the temperature-compensating coil 2 vortex field on detection coil 1 affects and reduces probe size.
Embodiment three
Fig. 4 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention three.The technical scheme of the present embodiment is on the basis of embodiment one, the position of detection coil 1 and temperature-compensating coil 2 is specifically limited, specifically include: the profile of described detection coil 1 and described temperature-compensating coil 2 is circle, the outline of the diameter of the inner coil of described detection coil 1 and described temperature-compensating coil 2 from, and the diameter of outer coil of described detection coil 1 intersects with the outline of described temperature-compensating coil 2, wherein, the outer coil of described detection coil 1 is apart from a farthest circle detection coil with described test surface.So design is advantageous in that to eliminate while the temperature-compensating coil 2 vortex field on detection coil 1 affects and reduces probe size.
Embodiment four
Fig. 5 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention four.The technical scheme of the present embodiment is on the basis of embodiment one, the position of detection coil 1 and temperature-compensating coil 2 is specifically limited, specifically include: the profile of described detection coil 1 and described temperature-compensating coil 2 is circle, the diameter of the outer coil of described detection coil 1 is tangent with the outline of described temperature-compensating coil 2, wherein, the outer coil of described detection coil 1 is apart from a farthest circle detection coil with described test surface.So design is advantageous in that to eliminate while the temperature-compensating coil 2 vortex field on detection coil 1 affects and reduces probe size.
Embodiment five
Fig. 6 is the floor map of the probe of a kind of current vortex sensor in the embodiment of the present invention five.The technical scheme of the present embodiment is on the basis of embodiment one, the position of detection coil 1 and temperature-compensating coil 2 is specifically limited, specifically include: the profile of described detection coil 1 and described temperature-compensating coil 2 is circle, the outline of the diameter of the outer coil of described detection coil 1 and described temperature-compensating coil 2 from, wherein, the outer coil of described detection coil 1 is apart from a farthest circle detection coil with described test surface.So design is advantageous in that to eliminate while the temperature-compensating coil 2 vortex field on detection coil 1 affects and reduces probe size.
Embodiment six
Fig. 7 is the structured flowchart of a kind of current vortex sensor in the embodiment of the present invention six.This current vortex sensor includes the probe 710 of fore-lying device 730, extension cable 720 and any of the above-described embodiment；
The detection lead-out wires of coil of described detection coil is electrically connected with described fore-lying device 730 by extension cable 720；
The bucking coil lead-out wire of described temperature-compensating coil is electrically connected with described fore-lying device 730 by extension cable 720；
Described fore-lying device 730, the compensation signal of detection signal and described temperature-compensating coil for receiving described detection coil, described detection signal and described compensation signal are carried out calculus of differences, to eliminate the temperature drift of described detection coil.
The technical scheme of the present embodiment, by adopting the probe 710 recorded in above-described embodiment, realize two coil magnetic fields to be vertically independent of each other, the vortex field impact between two coils can either be eliminated, temperature-compensating can be carried out again, reach to reduce the purpose of sensor probe volume, and then, effectively reduce sensor bulk, and due to the interpolation of temperature-compensating coil, the computing in fore-lying device 730 is made to form closed loop, it is possible to effectively detection coil to be carried out Temperature Feedback compensation.
Embodiment seven
Fig. 8 is the structured flowchart of fore-lying device in a kind of current vortex sensor in the embodiment of the present invention seven.The structure of fore-lying device, on the basis of embodiment seven, is defined, specifically includes by the technical scheme of the present embodiment further: difference channel 731, detecting circuit 732, filtering and amplifying circuit 733 and processor 734；
Described difference channel 731 electrically connects with described detection coil and temperature-compensating coil respectively, is used for receiving described detection signal and described compensation signal, output differential signal extremely described detecting circuit 732；
Described detecting circuit 732 electrically connects with described filtering and amplifying circuit 733, is used for receiving described differential signal, and output low frequency signal is described filtering and amplifying circuit 733 extremely；
Described filtering and amplifying circuit 733 electrically connects with described processor 734, is used for receiving described low frequency signal, described low frequency signal is amplified process and Filtering Processing obtains output signal, described output signal is inputted described processor 734；
Described processor 734, obtains testing result for described output signal carries out linearity correction operation.
Shown in Figure 8, the output voltage of detection coil is V1, the output voltage of temperature-compensating coil is V2, by difference channel 731 to V1And V2Carrying out subtraction and obtain differential signal, the voltage of differential signal is V, i.e. V=V1-V2。
Under probe is in the condition of high temperature, detect coil output voltage V1With temperature-compensating coil output voltage V2All producing temperature drift, two coil dimensions are identical with structural parameters, and temperature is to detection coil identical with the temperature drift that temperature-compensating coil produces (the equivalent resistance change being mainly coil produces), and the temperature drift produced at such a temperature is VR, output voltage V under current high-temperature conditionout, i.e. Vout=(V1±VR)-(V2±VR)=V1-V2=V.Therefore, in hot environment, the difference channel 731 of current vortex sensor exports total voltage V after processingoutUnder temperature-compensating coil effect identical with the voltage V of differential signal of output in home, therefore, temperature-compensating coil effectively compensates because temperature that high temperature produces is floated detecting coil in current vortex sensor.Difference channel 731 exports differential signal to described detecting circuit 732, and after detection, output low frequency signal is to filtering and amplifying circuit 733.Filtering and amplifying circuit 733 receives described low frequency signal, described low frequency signal is amplified process and Filtering Processing obtains output signal, described output signal is inputted described processor 734.The operation of digital signal (A/D) is turned and linearity correction operation obtains testing result through analogue signal.
Note, above are only presently preferred embodiments of the present invention and institute's application technology principle.It will be appreciated by those skilled in the art that and the invention is not restricted to specific embodiment described here, various obvious change can be carried out for a person skilled in the art, readjust and substitute without departing from protection scope of the present invention.Therefore, although the present invention being described in further detail by above example, but the present invention is not limited only to above example, when without departing from present inventive concept, other Equivalent embodiments more can also be included, and the scope of the present invention is determined by appended right.
Claims (9)
1. the probe of a current vortex sensor, including detection coil and temperature-compensating coil, it is characterized in that, described detection coil is parallel with the test surface of probe, described temperature-compensating coil is perpendicular to described detection coil, and less than the inner coil place plane of described detection coil, the inner coil of wherein said detection coil is a circle detection coil the shortest with described test surface distance.
2. probe according to claim 1, it is characterised in that described detection coil is identical with the structurally and electrically parameter of described temperature-compensating coil.
3. probe according to claim 1, it is characterised in that described detection coil and described temperature-compensating coil areCircle coil bundle, wherein L is the external diameter difference with internal diameter of coil, and W is the width of coil.
4. according to described probe arbitrary in claims 1 to 3, it is characterised in that it is tangent that described detection coil and the profile of described temperature-compensating coil are circle, the diameter of the inner coil of described detection coil and the outline of described temperature-compensating coil.
5. according to described probe arbitrary in claims 1 to 3, it is characterized in that, the profile of described detection coil and described temperature-compensating coil is circle, the diameter of the inner coil of described detection coil and the outline of described temperature-compensating coil from, and the diameter of outer coil of described detection coil intersects with the outline of described temperature-compensating coil, wherein, the outer coil of described detection coil is apart from a farthest circle detection coil with described test surface.
6. according to described probe arbitrary in claims 1 to 3, it is characterized in that, the profile of described detection coil and described temperature-compensating coil is circle, the diameter of the outer coil of described detection coil is tangent with the outline of described temperature-compensating coil, wherein, the outer coil of described detection coil is apart from a farthest circle detection coil with described test surface.
7. according to described probe arbitrary in claims 1 to 3, it is characterized in that, the profile of described detection coil and described temperature-compensating coil is circle, the diameter of the outer coil of described detection coil and the outline of described temperature-compensating coil from, wherein, the outer coil of described detection coil is apart from a farthest circle detection coil with described test surface.
8. a current vortex sensor, including fore-lying device and extension cable, it is characterised in that also include arbitrary described probe in claim 1 to 7；
The detection lead-out wires of coil of described detection coil is electrically connected with described fore-lying device by extension cable；
The bucking coil lead-out wire of described temperature-compensating coil is electrically connected with described fore-lying device by extension cable；
Described fore-lying device, the compensation signal of detection signal and described temperature-compensating coil for receiving described detection coil, described detection signal and described compensation signal are carried out calculus of differences, to eliminate the temperature drift of described detection coil.
9. current vortex sensor according to claim 7, it is characterised in that described fore-lying device includes difference channel, detecting circuit, filtering and amplifying circuit and processor；
Described difference channel electrically connects with described detection coil and temperature-compensating coil respectively, is used for receiving described detection signal and described compensation signal, output differential signal extremely described detecting circuit；
Described detecting circuit electrically connects with described filtering and amplifying circuit, is used for receiving described differential signal, and output low frequency signal is described filtering and amplifying circuit extremely；
Described filtering and amplifying circuit electrically connects with described processor, is used for receiving described low frequency signal, described low frequency signal is amplified process and Filtering Processing obtains output signal, described output signal is inputted described processor；
Described processor, obtains testing result for described output signal carries out linearity correction operation.
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| CN201610108299.1A CN105737727B (en) | 2016-02-25 | 2016-02-25 | A kind of probe and current vortex sensor of current vortex sensor |
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| CN201610108299.1A CN105737727B (en) | 2016-02-25 | 2016-02-25 | A kind of probe and current vortex sensor of current vortex sensor |
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| CN105737727B CN105737727B (en) | 2019-03-19 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108489371A (en) * | 2018-03-15 | 2018-09-04 | 北京航空航天大学 | A kind of high temperature magnetic suspension bearing axially uses eddy current displacement sensor |
| CN110608661A (en) * | 2019-09-19 | 2019-12-24 | 珠海格力电器股份有限公司 | Sensor detection circuit and method and magnetic suspension bearing system |
| CN110987244A (en) * | 2019-10-08 | 2020-04-10 | 珠海格力电器股份有限公司 | Flat disc type six-dimensional force sensor based on eddy current effect, detection method and intelligent equipment |
| CN113311065A (en) * | 2021-05-25 | 2021-08-27 | 北京航空航天大学 | Coil probe heat dissipation method for pulse eddy current detection |
| CN114483635A (en) * | 2022-01-26 | 2022-05-13 | 广东美的暖通设备有限公司 | Magnetic bearing system, compressor and air conditioner |
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| CN114483635A (en) * | 2022-01-26 | 2022-05-13 | 广东美的暖通设备有限公司 | Magnetic bearing system, compressor and air conditioner |
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| CN105737727B (en) | 2019-03-19 |
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