CN105736793A - Vacuum valve - Google Patents

Abstract

The present invention provides a vacuum valve. The vacuum valve is capable of realizing the correction operation or the pressure regulation operation based on the local operation. The vacuum valve (1) comprises a valve body (2) and a controller (7). The valve body (2) is provided with a valve plate (8), a drive motor (21) and a second drive motor (22), wherein the drive motor (21) is used for driving the valve plate (8) so as to change the opening degree of the drive plate (8). The controller (7) comprises an input operation part (731) used for inputting an user operation-based input instruction, a driving part (75) and a second driving part (76) used for driving the drive motor (21) and the second drive motor (22) respectively, and a control part (71) used for at least controlling the driving part (75) and the second driving part (76). The controller (7) is integrally formed with the valve body (2). The input operation part (731) outputs the instruction to the control part (71). The control part (71) executes the operation corresponding to the instruction input by the input operation part (731).

Description

Vacuum valve

Technical field

The present invention relates to a kind of vacuum valve.

Background technology

The vacuum valve being used as pressure-control valve makes the aperture of valve body change, and controls to flow to the flow of the gas of vacuum pump from vacuum chamber (chamber), thus the pressure in vacuum chamber is controlled.

Patent documentation 1 there is gate valve utilize that separates with this gate valve to control device the record being controlled via communication component.It addition, in general the control device that this kind is separately is operating unit or personal computer (personalcomputer, PC).

And say, vacuum valve is between the vacuum chamber and vacuum pump of various vacuum treatment installations.Before vacuum valve is after mounting and vacuum treatment installation uses, it is necessary to being corrected operation, this correction operation obtains the corresponding relation data of the relation of the θ aperture of the pressure and the valve body that represent vacuum chamber.These corresponding relation data are for being controlled the θ aperture of valve body and precision carries out pressure regulation for vacuum valve goodly.

But, the vacuum valve recorded in patent documentation 1 is when carrying out this correction operation or pressure regulation operation, it is necessary to connect the various distributions in order to communicate with the external control device such as PC.Therefore, correction operation or pressure regulation operation need to spend a large amount of time, and, cost is for arranging the cost of external control device.And, when the space of vacuum valve periphery is restricted etc., can produce without problems such as the spaces arranging external control device or various distribution, and need vacuum valve is carried out local operation (localoperation), be corrected operation or pressure regulation operation.

[prior art literature]

[patent documentation]

[patent documentation 1] Japanese Patent Laid-Open 2013-231461 publication

Summary of the invention

[inventing problem to be solved]

As such, it is desired to local operation can be utilized to be corrected the vacuum valve of operation or pressure regulation operation etc..

[solving the technological means of problem]

The pressure of vacuum chamber, between vacuum chamber and vacuum pump, is adjusted by the vacuum valve of the preferred configuration of the present invention, including: valve body, there is valve body and the driving motor driving valve body and making the aperture of valve body change；And controller, including being transfused to the input operation part of the instruction based on user operation, the drive division that driving motor is driven and the control portion at least controlling drive division, and it is integrally formed with valve body.Instruction is exported control portion by input operation part.Control portion performs operation corresponding with the instruction inputted from input operation part.

[effect of invention]

According to the present invention, it is possible to provide local operation can be utilized to be corrected the vacuum valve of operation or pressure regulation operation etc..

Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention, and can be practiced according to the content of description, and in order to the above and other purpose of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, describe in detail as follows.

Accompanying drawing explanation

Fig. 1 indicates that the axonometric chart of the vacuum valve of one embodiment of the present invention.

Fig. 2 (a), Fig. 2 (b) indicate that the guidance panel being arranged at controller and the figure in adapter portion.

Fig. 3 is the block diagram of vacuum valve.

Fig. 4 indicates that the flow chart performed by the control portion of controller.

Fig. 5 (a)～Fig. 5 (i) indicates that the figure of the display of light emitting diode (light emittingdiode, LED) lamp and the LED array being arranged at guidance panel.

[main element symbol description]

1: vacuum valve 2: valve body

3: flange 4,11: peristome

6: valve block position detection part 7: controller

8,8a: valve block (valve body) 10: flange

21,22: motor 71: control portion

73: guidance panel 74: adapter portion

75,76: motor driving part 501: external power source

502: external device (ED) 731: input operation part

731a, 731b, 731c: button 732: display part

732a:LED lamp 732b:LED array

741: electric connector 742: connector for communication

C: yellow lighting C1: the short 731b that touches the button

C2: the long 731bC3 that touches the button: simultaneously press the button 731a and button 731c

C4: correction operation shifts CL71 automatically after terminating: internal clocking (timer)

D: yellow light on and off replace E: orange lighting

F: orange light on and off replace G: green indication

G1: green light on and off replace M1: basic function pattern

M2: calibration function pattern M3: voltage regulation function pattern

S11, S12, S13, S21, S22, S23, S31, S32, S33: step

Y: yellow lighting YA, YB: arrow apparent direction

Z, θ: direction

Detailed description of the invention

Fig. 1 indicates that the axonometric chart of the vacuum valve 1 of one embodiment of the present invention.Vacuum valve 1 is between the vacuum chamber and not shown vacuum pump of not shown vacuum treatment installation.Vacuum valve 1 possesses valve body 2 and controller 7.

Valve body 2 possesses: collar flange 3, is fixed on the flange of the vacuum chamber of vacuum treatment installation；Collar flange 10, is fixed on the flange of vacuum pump；Cylindrical-opening portion 4, extended along flange 3；Cylindrical-opening portion 11, extended along flange 10；Valve block 8 (valve body 8), plug between peristome 4 and peristome 11；Motor 21, makes valve block 8 to aftermentioned θ direction wobble drive；Motor 22, makes valve block 8 drive to aftermentioned Z-direction；And not shown valve block position detection part 6 (with reference to Fig. 3).

Controller 7 possesses guidance panel 73 in side, and bottom surface possesses adapter portion 74.Other possessing about controller 7 are constituted, and follow-up will describe in the explanation position of Fig. 3.

θ shown in Fig. 1 represents the θ aperture (%) of valve block 8." θ=0% " shown in Fig. 1 represents θ aperture when making peristome 4, peristome 11 fully closed, and " θ=100% " represents θ aperture when making peristome 4, peristome 11 standard-sized sheet.Valve block 8a shown in dotted line represents the valve block 8 during standard-sized sheet (θ=100%).Valve block 8, by utilizing motor 21 wobble drive to regulate θ aperture, makes peristome 4, the flow path area of peristome 11 changes, and regulates the flow that the vacuum chamber from vacuum treatment installation flows to the gas of vacuum pump.As a result, the pressure in the vacuum chamber of vacuum treatment installation is adjusted.

The direction that Z-direction shown in Fig. 1 is with valve block 8 swings to θ direction axle is parallel.Valve block 8 utilizes motor 22 can move to Z-direction.Valve block 8 is after fully closed (θ=0%), move to Z-direction and with the direction of principal axis end abutment of the direction of principal axis end of peristome 4 or peristome 11, it is possible to realize blocking the state from the vacuum chamber of vacuum treatment installation towards the gas of vacuum pump, i.e. valve closed state.In present embodiment, make valve block about 8 become valve closed state, but be alternatively the composition making containment member form valve closed state relative to valve block about 8.

Fig. 2 (a) is the arrow view observing controller 7 from the arrow apparent direction YA of Fig. 1, and represents the guidance panel 73 of the side being arranged at controller 7.Fig. 2 (b) is the arrow view observing controller 7 from the arrow apparent direction YB of Fig. 1, and represents the adapter portion 74 of the bottom surface being arranged at controller 7.

Guidance panel 73 has button 731a, button 731b, button 731c as input operation part 731, and have can be multicolor luminous LED 732a, can be similarly multicolor luminous LED array 732b as display part 732.Button 731a, button 731b, button 731c comprise diaphragm switch (membraneswitch) respectively.Herein, each summary constituted of described guidance panel 73 is illustrated.Details about these compositions will describe in the explanation position of Fig. 4, Fig. 5 (a)～Fig. 5 (i).

Vacuum valve 1 has " basic function pattern ", " calibration function pattern ", " voltage regulation function pattern " and function.Follow-up the details of these patterns will be described.LED 732a carries out the display corresponding with these patterns.Additionally, these patterns have multiple step (with reference to Fig. 4).Button 731b for moving between each step.

Button 731a and button 731c changes for the desired value of θ aperture, pressure set points changes or correction operation starts decision etc..

LED array 732b shows θ aperture, force value or correction operation remaining time etc. with percentage rate.As shown in Fig. 2 (a), LED array 732b has 11 LED element.The LED element of left end represents 0%, and the LED element of right-hand member represents 100%.The LED element being arranged between them is arranged in units of 10%.

Herein, the display form of LED 732a and LED array 732b is illustrated.

The display > of the pattern of < LED 732a

LED 732a is capable of three kinds of display forms, in Fig. 2 (a), symbol G, symbol G1, symbol Y represents.Symbol G represents green indication, and green indication (G) is expressed as basic function pattern M1.Symbol G1 represents green light on and off alternately, and green light on and off alternately (G1) are expressed as calibration function pattern M2.Symbol Y represents yellow lighting, and yellow lighting (Y) is expressed as voltage regulation function pattern M3.

The display form > of < LED array 732b

Each LED element of LED array 732b can realize five display forms.Symbol C represents yellow lighting.Symbol D represents that yellow light on and off are alternately.Symbol E represents orange lighting.Symbol F represents that orange light on and off are alternately.Do not represent that the blank space of symbol represents light-off.It addition, a LED seen in Fig. 5 (d) or Fig. 5 (g) represents the situation of two symbols, refer to the display represented by each symbol that hockets.The LED element of display symbol D and symbol E hockets yellow light on and off alternately and orange lighting in Fig. 5 (g).Such as, the orange lighting that the yellow light on and off comprising " yellow lighting (0.5 second)+light-off (0.5 second) " that hocket replace, comprise " orange lighting (1 second) " is referred to.About the details of the display of LED array 732b, the explanation position of each step of the Fig. 4 that will be described below illustrates.

As shown in Fig. 2 (b), adapter portion 74 has electric connector 741 and connector for communication 742.Electric power is supplied from external power source via electric connector 741.Controller 7 communicates with vacuum treatment installation etc. via connector for communication 742.

Fig. 3 is the functional block diagram of vacuum valve 1.Herein, the composition possessed about vacuum valve 1 also comprises foregoing, and illustrates.Vacuum valve 1 possesses valve body 2 and controller 7.Valve body 2 possess θ direction drive motor 21, Z-direction drive motor 22 and valve block position detection part 6.Controller 7 includes: have the control portion 71 of internal clocking CL71 (timer CL71), in order to drive the motor driving part 75 of motor 21, in order to drive the motor driving part 76 of motor 22, have the guidance panel 73 of input operation part 731 and display part 732 and have the adapter portion 74 of electric connector 741 and connector for communication.Input operation part 731 has button 731a, button 731b, button 731c (with reference to Fig. 2 (a), Fig. 2 (b)).Display part 732 has LED 732a and LED array 732b (with reference to Fig. 2 (a), Fig. 2 (b)).

Vacuum valve 1 possesses the instruction utilized from external device (ED) (such as vacuum treatment installation) 502 to carry out remotely operation (remoteoperation) function of action and utilizes the operation of input operation part 731 to carry out the local operation function of action.When local operation is such as the maintenance of vacuum valve 1 or during corrective action described later etc..Local operation and remote-operated switching, it is possible to utilize the instruction from external device (ED) 502 via connector for communication 742 input to carry out, it is also possible to carry out in the operation of the button 731b and button 731c of push panel 73 at the same time.

Vacuum valve 1 supplies electric power via electric connector 741 from external power source 501, and constitutes supply electric power to each.

If the input operation part 731 (button 731a, button 731b, button 731c) of guidance panel 73 is operated, then instruction corresponding with this operational motion is input to control portion 71 from input operation part 731.Control portion 71 receives and utilizes motor driving part 75 that motor 21 is driven from the instruction of input operation part 731, makes valve block 8 drive to θ direction.Additionally, control portion 71 receives the instruction from input operation part 731, communicate with external device (ED) 502, or make display part 732 perform the display form of regulation.

The position in θ direction of valve block 8 is detected by valve block position detection part 6 with the position of Z-direction, and control portion 71 is sent this positional information.It addition, utilize the driving of the valve block 8 of the input realization of input operation part 731 to be only θ direction.

The pressure information of the vacuum chamber being installed with the vacuum treatment installation of vacuum valve 1 is input to control portion 71 from vacuum treatment installation via connector for communication 742.

Internal clocking CL71 output is in order to obtain the clock signal controlling sequential (controltiming).

Control portion 71 possesses storage part (not shown), the corresponding relation data that described storage part storage obtains when carrying out aftermentioned correction operation, i.e. the θ aperture of the valve block 8 during expression correction operation and the data of the relation of the pressure of vacuum chamber.

And, control portion 71, when pressure regulation, uses described corresponding relation data to make valve block 8 move to the θ position corresponding with the pressure specified, and makes θ aperture change.

The display of the display part 732 (LED 732a, LED array 732b) of guidance panel 73, based on the information such as θ aperture of the pressure of vacuum chamber or valve block 8, is controlled by control portion 71.Details are described by follow-up use Fig. 5 (a)～Fig. 5 (i).

It follows that use Fig. 4, Fig. 5 (a)～Fig. 5 (i) to when using guidance panel 73, the display of flow process during local operation and guidance panel 73 illustrates.The flow process of push-botton operation when Fig. 4 indicates that local operation and the relation of the display of display part 732 (LED 732a, LED array 732b).This flow process is performed by controlling portion 71.The figure of the display of the display part 732 when Fig. 5 (a)～Fig. 5 (i) indicates that push-botton operation.

As described, local operation and remote-operated switching carry out also dependent on from outside instruction, also can the button 731b and button 731c of push panel 73 simultaneously, thus, carry out execution and the stopping of the flow process of Fig. 4.

Flow process shown in Fig. 4 has basic function pattern M1, calibration function pattern M2 and voltage regulation function pattern M3.In basic function pattern M1, perform step S11, step S12, step S13.In calibration function pattern M2, perform step S21, step S22, step S23.In voltage regulation function pattern M3, perform step S31, step S32, step S33.About the content of each step, will describe in follow-up.

When pressing while the instruction utilizing the switching from outside or button 731b, button 731c and transfer to local operation, enter into the step S11 of basic function pattern M1.It addition, in basic function pattern M1 and voltage regulation function pattern M3, it is possible to transfer to long-range operation from either step, when calibration function pattern M2, it is possible to transfer to long-range operation merely with step S21.That is, because of step S22, step S23 execution in be corrected operation, so long-range operation cannot be transferred to from step S22, step S23.

C1, C2, C3 shown in Fig. 4 represents the push-botton operation during transfer between each step.And, symbol C4 represents the automatic transfer action that the time point terminated at aftermentioned correction operation carries out.

Push-botton operation shown in symbol C1 is that the short of button 731b is pressed.The length that push-botton operation shown in symbol C2 is button 731b is pressed.If it addition, press the button the length of 731b less than stipulated time (such as 1 second), control portion 71 be identified as short by, if being more than this stipulated time, then control portion 71 be identified as long by.Push-botton operation shown in symbol C3 is the operation simultaneously pressing the button 731a and button 731c.

While illustrating with reference to Fig. 5 (a)～Fig. 5 (i) each pattern to Fig. 4 and each step.

(basic function pattern M1)

To basic function pattern M1 and belong to the step S11 of basic function pattern M1, step S12, step S13 illustrate.

In basic function pattern M1, user can utilize local operation to make the θ aperture of valve block 8 become desired aperture (θ aperture change operation).

If transferring to local operation, then perform the step S11 of basic function pattern M1.In step S11, show the restriction site of the extreme position of the θ aperture as valve block 8.Specifically, as shown in Fig. 5 (a), the LED at the two ends of LED array 732b is that restriction site carries out orange lighting (symbol E), and the remaining LED between them carries out yellow light on and off alternately (symbol D).In step S11, if button 731b is pressed by short, transfer to step S12, if button 731b is long pressed, transfer to the step S21 of calibration function pattern M2.

In step S12, the currency of display θ aperture.The LED array 732b of Fig. 5 (b) is shown as the example that θ aperture represents 80%.That is, in the LED array 732b of Fig. 5 (b), 9 LED started from left in 11 LED arranged in units of 10% carry out yellow lighting (symbol C represents), and 2 LED started from remaining right turn off the light (blank).It addition, as shown in illustrating in Fig. 2 (a), Fig. 2 (b), the LED of left end represents 0%, thus such as Fig. 5 (b), 9 LED started from left when θ aperture is 80% carry out yellow lighting and show.Under the display state of step S12, if button 731b is pressed by short, transfer to step S13, if button 731b is long pressed, transfer to the step S21 of calibration function pattern M2.

In step S13, set the desired value (user is intended to the θ aperture specified) of θ aperture.The LED array 732b of Fig. 5 (c) represents this desired value (50%).If pressing the button 731a under this state, desired value can being reduced, if pressing the button 731c, desired value can be improved.It addition, the control portion 71 shown in Fig. 3 changes desired value if, with button 731a, button 731c, then utilize motor driving part 75 that motor 21 is driven, make valve block 8 move to desired value and change θ aperture.In step S13, if button 731b is pressed by short, transfer to step S11, if button 731b is long pressed, transfer to the step S21 of calibration function pattern M2.

(calibration function pattern M2)

To calibration function pattern M2 and belong to the step S21 of calibration function pattern M2, step S22, step S23 illustrate.

Calibration function pattern M2 is the execution pattern to the correction operation that the θ aperture of valve block 8 is obtained with the relation of the pressure of vacuum chamber.

In step S21, as shown in Fig. 5 (d), whole LED of LED array 732b are made to carry out the display being alternately repeated yellow lighting with orange lighting.If button 731a and button 731c is concurrently depressed in this condition, then start correction operation.

About a succession of operation of correction operation, automatically carry out in control portion 71.Hereinafter, it is specifically described.Control portion 71 while with vacuum treatment installation communication and monitor the pressure of vacuum chamber, make valve block 8 drive to θ direction and make θ aperture change.After becoming desired pressure, control portion 71 stops the driving of valve block 8, based on the information received from valve block position detection part 6, reads this θ aperture.Then, control portion 71 would indicate that the data (corresponding relation data) of the relation of this θ aperture and this pressure are stored in storage part.This correction operation is performed by each program carried out in vacuum chamber.

Start fabrication process if, with the operation pressed while the button 731a and button 731c of step S21, then transfer to step S22 as shown in Figure 4.And, in step S21, if button 731b is long pressed, then transfer to step S31.

θ aperture in step S22, during display correction operation.LED array 732b shown in Fig. 5 (e) utilizes state that yellow light on and off alternately (symbol D) show that θ aperture is 30% as an example of display.In step S22, if button 731b is pressed by short, then transfer to step S23 as shown in Figure 4.

In step S23, the time of display correction operation passes through.LED array 732b shown in Fig. 5 (f) utilizes orange lighting (symbol E) to represent that whole activity duration have passed through how many activity durations when being set to 100%.And, utilize yellow light on and off alternately (symbol D) to represent the remaining activity duration.When time process, yellow light on and off alternately start displacement when orange lighting from left.In figure, represent that the activity duration have passed through 70%, and the remaining activity duration is example when 30%.In step S23, if button 731b is pressed by short, then transfer to step S22 as shown in Figure 4.

It addition, in correction operation, except the short 731b that touches the button, be set as cannot be carried out the input of guidance panel 73.That is, in correction operation, by the short 731b that touches the button, it is only capable of between step S22 and step S23 and comes and goes.

When correction operation terminates, no matter it is in step S22, is in step S23, all as shown in the symbol C4 of Fig. 4, be automatically transferred to step S21.

(voltage regulation function pattern M3)

To voltage regulation function pattern M3 and belong to the step S31 of voltage regulation function pattern M3, step S32, step S33 illustrate.

Voltage regulation function pattern M3 is following pattern, i.e. in order to be made the θ aperture of valve block 8 change by set target pressure, adjust the pressure of the vacuum chamber of vacuum treatment installation.

In step S31, show current pressure and goal pressure.LED array 732b shown in Fig. 5 (g) utilizes yellow light on and off alternately (symbol D) to represent current pressure, utilizes orange lighting (symbol E) to represent goal pressure.In example shown in Fig. 5 (g), representing that current pressure is the 60% of maximum pressure, goal pressure is example during the 80% of maximum pressure.It addition, as described, in Fig. 5 (g), symbol D and symbol E shown in a LED refers to yellow light on and off alternately (symbol D) and the orange lighting (symbol E) that hocket.In step S31, if button 731b is pressed by short, then as shown in Figure 4, transfer to step S32.And, in step S31, if button 731b is long pressed, then as shown in Figure 4, transfer to step S11.

Step S32 carries out the setting of goal pressure.LED array 732b shown in Fig. 5 (h) represents this goal pressure.In example shown in Fig. 5 (h), start the 10th LED from the left of LED array 732b and carry out orange light on and off alternately, thus represent that goal pressure is 90%.If pressing the button 731a, the change of goal pressure can be carried out reducing, if pressing the button 731c, the change of goal pressure can be carried out improving.With the goal pressure of this change, the light on and off alternate position of the LED of LED array 732b moves.And, by changing goal pressure, the θ aperture of valve block 8 also changes.Now, based on the corresponding relation data of the gained that the θ aperture of valve block 8 and the relation of pressure are summarized obtained by described correction operation, the θ aperture of valve block 8 is changed.In step S32, if the short 731b that touches the button, then as shown in Figure 4, transfer to step S33.And, in step S32, if the long 731b that touches the button, then as shown in Figure 4, transfer to step S11.

Step S33 representing, pressure regulation begins preparing for.In example shown in Fig. 5 (i), the LED of LED array 732b carries out yellow light on and off alternately (symbol D represents) every one, thus represents that pressure regulation begins preparing for state.In step S33, if the short 731b that touches the button, then as shown in Figure 4, transfer to step S31.And, in step S33, if the long 731b that touches the button, then start pressure regulation, as shown in Figure 4, transfer to step S11.

Vacuum valve shown in embodiment above possesses following composition, and realizes following action effect.

(1) vacuum valve 1 includes: valve body 2, the driving motor 21 that there is valve block 8, drive valve block 8 and make the aperture of valve block 8 change with drive motor 22；And controller 7, including being transfused to the input operation part 731 of the instruction based on user operation, the drive division 75 that driving motor 21 and driving motor 22 are driven and drive division 76 and the control portion 71 at least drive division 75 and drive division 76 being controlled, and it is integrally formed with valve body 2.

Instruction is exported control portion 71 by input operation part 731.

Control portion 71 performs operation corresponding with the instruction inputted from input operation part 731.

Thus, vacuum valve 1 according to the instruction from the external control device such as PC or operating unit, and can not carry out described operation (correction operation, pressure regulation operation, θ aperture change operation) according to local operation.Because described operation does not need external control device, so cost can correspondingly be cut down.And, it is possible to save the time of external control device distribution.And, it is not required that in order to external control device to be positioned over the space of periphery, thus also space saving can be made contributions.

(2) input operation part 731 has: in order to the first input operation form (pressing while button 731a in step S21 and button 731c) corrected, the second input operation form (individually pressing of button 731a or individually pressing of button 731c) in step S32 in order to pressure regulation, and in order to change the 3rd input operation form (individually pressing of button 731a or individually pressing of button 731c) in step S13 of aperture, instruction corresponding with these input operation forms is exported control portion 71.

Thereby, it is possible to not according to the instruction from the external control device such as PC or operating unit, and carry out described operation (correction operation, pressure regulation operation, θ aperture change operation) according to local operation.

(3) control portion 71 is transfused to the force value of vacuum chamber.

First instruction, according to the first input operation form, is exported control portion 71, the correction operation that described first instruction performs to make valve block 8 drive and obtains θ aperture and the relation of the force value of vacuum chamber by input operation part 731.

Control portion 71 performs correction operation according to the first instruction.

Thereby, it is possible to not according to the instruction from the external control device such as PC or operating unit, and it is corrected operation according to local operation.

(4) display part 732 of controller 7 shows the job status of correction operation.

Thereby, it is possible to the user etc. carrying out local operation to be passed on the job status of correction operation.As a result, this user etc. it can be seen that the display of display part 732 and take suitable reaction.

(5) according to the second input operation form, the second instruction is exported control portion 71 by input operation part 731, and described second instruction performs, in the mode that the force value of vacuum chamber is target pressure value, the pressure regulation operation that makes valve block 8 drive.

Control portion 71 performs pressure regulation operation according to the second instruction.

Thereby, it is possible to not according to the instruction from the external control device such as PC or operating unit, and carry out pressure regulation operation according to local operation.

Additionally, for target pressure value, not only carry out the input from described input operation part 731 and set, there is also the situation of the value being set for obtaining furthermore with communication etc., it also is able to utilize local operation, target pressure value set in advance is carried out pressure regulation operation.

(6) display part 732 of controller 7 shows the job status of pressure regulation operation.

Thereby, it is possible to the user etc. carrying out local operation to be passed on the job status of pressure regulation operation.As a result, this user etc. it can be seen that the display of display part 732 and take suitable reaction.

(7), in input operation part 731, according to the 3rd input operation form, the θ aperture (target aperture) becoming desired value is set.

The 3rd instruction performing to make aperture change operation that valve block 8 drives to target aperture is exported control portion 71 by input operation part 731.

Control portion 71 performs aperture change operation according to the 3rd instruction.

Thereby, it is possible to not according to the instruction from the external control device such as PC or operating unit, and carry out aperture change operation according to local operation.

Herein, the vacuum valve 1 of existing vacuum valve Yu present embodiment is contrasted.

Existing vacuum valve is connected to the external control device such as PC or operating unit.And, existing vacuum valve utilizes remotely operation, i.e. based on the instruction from external control device, be corrected operation, pressure regulation operation or θ aperture change operation.That is, the control portion controlling device of existing vacuum valve is only in accordance with the instruction from external control device.

On the other hand, the control portion 71 of the vacuum valve 1 of present embodiment performs the flow process shown in Fig. 4 with control portion 71 self, carries out θ aperture change operation, correction operation or pressure regulation operation.And, the vacuum valve 1 of present embodiment has guidance panel 73, when needs are from externally input, is operated from this guidance panel 73.Thereby, it is possible to reduce the cost of external control device, and, it is not required that external control device is carried out distribution.

LED shown in Fig. 5 (a)～Fig. 5 (i) or LED array be shown as an example, as long as user can suitably identify and process, it is possible to for other display packings.And, the quantity of the LED of LED array also is able to the tightness of the ratio according to display and increases and decreases.

Below various embodiments and variation are illustrated, but the present invention is not limited to content illustrated above.Other forms considered in the scope of the technological thought of the present invention are also contained in the scope of the present invention.

Claims (7)

1. a vacuum valve, between vacuum chamber and vacuum pump, is adjusted the pressure of described vacuum chamber, and described vacuum valve is characterised by including:

Valve body, have valve body and drive motor, valve body described in described driving motor-driven and make the aperture of described valve body change；And

Controller, including: input operation part, it is transfused to the instruction based on user operation；Drive division, is driven described driving motor；And control portion, at least control described drive division；And described controller and described valve body are integrally formed,

Described instruction is exported described control portion by described input operation part,

Described control portion performs operation corresponding with the described instruction inputted from described input operation part.

2. vacuum valve according to claim 1, it is characterised in that:

Described input operation part has the multiple input operation forms allowed hand over, and will export described control portion with the plurality of corresponding instruction of input operation form.

3. vacuum valve according to claim 2, it is characterised in that:

In described control portion, input has the force value of described vacuum chamber,

Instruction described in first, according to input operation form described in first, is exported described control portion by described input operation part, the correction operation that instruction described in first performs to make described valve body drive and obtains described aperture and the relation of the force value of described vacuum chamber,

Described control portion performs described correction operation according to instruction described in first.

4. vacuum valve according to claim 3, it is characterised in that:

Described controller has the display part of the job status showing described correction operation.

5. the vacuum valve according to any one of claim 2 to 4, it is characterised in that:

According to input operation form described in second, instruction described in second is exported described control portion by described input operation part, and instruction described in second performs, in the mode that the force value of described vacuum chamber is target pressure value, the pressure regulation operation that makes described valve body drive,

Described control portion performs described pressure regulation operation according to instruction described in second.

6. vacuum valve according to claim 5, it is characterised in that:

Described controller has the display part of the job status showing described pressure regulation operation.

7. the vacuum valve according to any one of claim 2 to 4, it is characterised in that:

In described input operation part, carry out target setting aperture according to input operation form described in the 3rd,

Instruction described in 3rd is exported described control portion by described input operation part, and instruction described in the 3rd performs the aperture change operation making described valve body drive to described target aperture,

Described control portion performs described aperture change operation according to instruction described in the 3rd.