CN105734500A - High temperature oxidation-resistant thermal barrier coating layer with composite structure and preparation method thereof - Google Patents
High temperature oxidation-resistant thermal barrier coating layer with composite structure and preparation method thereof Download PDFInfo
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- C—CHEMISTRY; METALLURGY
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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Abstract
The invention provides a high temperature oxidation-resistant thermal barrier coating layer with a composite structure. The high temperature oxidation-resistant thermal barrier coating layer comprises a metal bonding layer, a first ceramic layer, a second ceramic layer, a metal deposition layer, a third ceramic layer and a fourth ceramic layer deposited at the top of a high-temperature alloy basal body in sequence; the first ceramic layer and the third ceramic layer are both isometric crystal structures; the second ceramic layer and the fourth ceramic layer are both columnar crystal structures; components of the ceramic layers are ZrO2 with stable Y2O3; components of the metal bonding layer are MCrAlY; and components of the metal deposition layer are MCrAlY or NiAl, wherein M is Ni or/and Co. The invention further provides a method for preparing the high temperature oxidation-resistant thermal barrier coating layer. The high temperature oxidation-resistant thermal barrier coating layer has multiple layers of laminated isometric crystal and columnar crystal structures, and is excellent in oxygen resistance and thermal shock resistance; and the preparation method is simple in process, excellent in repeatability and easy to operate.
Description
Technical field
The invention belongs to high temperature coating guard technology field, be specifically related to a kind of resistance to high temperature oxidation thermal barrier coating with composite construction and preparation method thereof.
Background technology
Thermal barrier coating is a kind of to utilize the characteristics such as the high-temperature resistant of pottery, low heat conduction and high thermal expansion coefficient, its form with coating and surface are had the high-temperature alloy base bluk recombination of metal bonding coating, to reduce high-temperature alloy surface temperature, to improve the surface protection technique of its service life, it is widely used in Aeronautics and Astronautics, sea boats and ships, large-scale thermal power and automobile power etc..In actual use, the Service Environment of thermal barrier coating is extremely harsh, not only has strong high-temperature oxydation and high temperature corrosion, impacts also subject to cold cycling frequently, is extremely susceptible to coating cracking, peels off, the failure behaviour such as come off so that it is service life is limited.
The technology of preparing of thermal barrier coating is based on air plasma spraying (APS) and electro beam physics vapour deposition (EB-PVD), coating prepared by APS is the layer structure with interstitial air voids, oxygen barrier is better, but coating is low with the bond strength of matrix, and thermal shock resistance is poor.The patent of invention that publication No. is CN103993313A adopts Laser Cladding to process the APS YSZ coating prepared so that it is have closelypacked columnar crystal structure, but this method is prone to introduce in the coating thermal stress and vertical crack, causes coating premature failure.Compare APS, the thermal barrier coating that EB-PVD prepares is made up of many column crystals separated from one another, there is higher strain tolerance limit, good thermal shock, and the interface between coating and matrix is combined into master with chemical bonded refractory, interface binding intensity is higher, but the entrance that columnar crystal structure separated from one another is oxygen and corrosive medium provides passage, makes the oxygen transmission rate height of coating, high temperature oxidation resistance and high temperature corrosion resistance reduce.In order to improve the high temperature oxidation resistance of coating, the patent of invention that publication number is CN103668191A adopts magnetically controlled sputter method to deposit the aluminum membranous layer of 5～30 μm at the EB-PVD YSZ surface ceramii layer prepared, and vacuum heat makes the one layer fine and close aluminium oxide of its Surface Creation with the thermal barrier coating of aluminum film and stops and improve the high temperature oxidation resistance of coating by the permeability of oxygen.The patent of invention that publication number is CN102719782A and CN103789715A adopts high-current pulsed electron beam equipment seasoning metal tack coat, this remelted layer dense structure, refinement, hole and cavity are less, phase can quickly form thermal growth oxide (TGO) thin film before oxidation, suppress oxygen element diffusion, improve the antioxygenic property of coating.Document (XuH.B., etal.PreparationofAl2O3-YSZcompositecoatingbyEB-PVD.MaterialsScienceandEngineeri ngA, 2002,325:389-393] adopt EB-PVD codeposition Al2O3The method of-YSZ gradient ceramic coating reduces oxygen diffusion admittance in the coating, and the method can reduce the thermal conductivity of coating, extends the service life of coating.
But so far, not yet find that a kind of preparation technology is simple, favorable repeatability, composite heat resisting heat of oxidation barrier coating easily operated, that have multiple-layer stacked equiax crystal/columnar crystal structure are seen in report.
Summary of the invention
The technical problem to be solved is in that for above-mentioned the deficiencies in the prior art, it is provided that a kind of resistance to high temperature oxidation thermal barrier coating with composite construction.This thermal barrier coating has multiple-layer stacked equiax crystal/columnar crystal structure, has good oxygen barrier and thermal shock resistance, and preparing technique process is simple, favorable repeatability, it is easy to operation.
For solving above-mentioned technical problem, the technical solution used in the present invention is: a kind of resistance to high temperature oxidation thermal barrier coating with composite construction, it is characterized in that, this coating includes being sequentially deposited to the metal bonding coating at high temperature alloy matrix top, the first ceramic layer, the second ceramic layer, metal deposition layer, the 3rd ceramic layer and the 4th ceramic layer, described first ceramic layer and the 3rd ceramic layer are isometric crystal structure, and described second ceramic layer and the 4th ceramic layer are columnar crystal structure；The composition of described first ceramic layer, the second ceramic layer and the 3rd ceramic layer and the 4th ceramic layer is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating is MCrAlY, the composition of described metal deposition layer is MCrAlY or NiAl, M be Ni or/and Co, described high temperature refers to that temperature is 1100 DEG C～1200 DEG C.
Above-mentioned a kind of resistance to high temperature oxidation thermal barrier coating with composite construction, it is characterized in that, the thickness of described metal bonding coating is 10 μm～100 μm, the thickness of described first ceramic layer is 3 μm～7 μm, the thickness of described second ceramic layer is 10 μm～50 μm, the thickness of described metal deposition layer is 2 μm～5 μm, and the thickness of described 3rd ceramic layer is 3 μm～7 μm, and the thickness of described 4th ceramic layer is 20 μm～200 μm.
Above-mentioned a kind of resistance to high temperature oxidation thermal barrier coating with composite construction, it is characterised in that the material of described high temperature alloy matrix is nickel base superalloy N5.
It addition, present invention also offers a kind of method preparing the above-mentioned resistance to high temperature oxidation thermal barrier coating with composite construction, it is characterised in that the method comprises the following steps:
Step one, high temperature alloy matrix being polished, then ultrasonic cleaning is clean；
Step 2, adopt the method for the electro beam physics vapour deposition high temperature alloy matrix surface that to be deposited in step one by MCrAlY ultrasonic cleaning clean, obtain metal bonding coating；The time of described electro beam physics vapour deposition is 20min～150min, and target evaporation current is 1.4A；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating described in step 2, obtains the first ceramic layer and the second ceramic layer；The time of described electro beam physics vapour deposition is 10min～60min, and target evaporation current is 1.2A；
Step 4, adopt electro beam physics vapour deposition method MCrAlY or NiAl is deposited on the surface of the second ceramic layer described in step 3, obtain metal deposition layer；The time of described electro beam physics vapour deposition is 2min～8min, and target evaporation current is 1.4A；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer described in step 4, obtains the 3rd ceramic layer and the 4th ceramic layer, on high temperature alloy matrix, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 10min～160min, and target evaporation current is 1.2A.
Above-mentioned method, it is characterised in that described in step one, the order number of polishing is 80 order～1000 orders.
Above-mentioned method, it is characterised in that described step 2 is to the technological parameter of electro beam physics vapour deposition described in step 5: vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix add thermocurrent 0.2A～0.25A, the rotating speed 20r/min of high temperature alloy matrix, electron-beam voltage 20kV.
The guiding theory of the present invention is: first, adopting the ceramic layer that electro beam physics vapour deposition method is prepared on metal bonding coating to have equiax crystal and columnar crystal structure, compare column crystal, isometric crystal structure radial dimension is bigger, in unit are, number of grain boundaries is less, can reduce atoms permeating passage.Therefore, the present invention, based on this principle, deposits one layer of metal deposition layer differed greatly with surface ceramii layer energy and polarity dispersive component at surface ceramii layer, prepares the thermal barrier coating with multiple-layer stacked equiax crystal/column form crystal structure ceramic layer.Second, metal deposition layer can form oxidation barrier layer in high-temperature service process, delays oxygen element to spread to matrix.3rd, under low oxygen concentration, metal bonding coating forms α-Al with ceramic layer generation diffusion reaction2O3, stop the diffusion of oxygen further, improve the interface binding power being coated with interlayer simultaneously.
The present invention compared with prior art has the advantage that
1, coating of the present invention has composite construction, while ensureing column crystal advantage, utilize the feature of equiax crystal microstructure, decrease the diffusion admittance of oxygen and corrosive medium, and the barrier oxide layers that metal deposition layer is formed in high-temperature service process also can delay the oxygen element diffusion to matrix, the oxygen transmission rate of thermal barrier coating is low, and high temperature oxidation resistance is excellent.
2, there is diffusion reaction in interface of the present invention, improves the interface binding power being coated with interlayer.
3, the preparation of coating of the present invention is only with a kind of technology of preparing, technique is simple, favorable repeatability, it is easy to operation, adopts composite construction high temperature resistance thermal barrier coating prepared by electro beam physics vapour deposition to can be widely applied to Aero-Space electromotor and the thermal protection of ground gas turbine hot side metal parts.
Below in conjunction with drawings and Examples, the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation that the present invention has the resistance to high temperature oxidation thermal barrier coating of composite construction.
Fig. 2 is the cross-sectional scans Electronic Speculum figure that the embodiment of the present invention 1 has the resistance to high temperature oxidation thermal barrier coating of composite construction.
Fig. 3 is that the embodiment of the present invention 1 has the resistance to high temperature oxidation thermal barrier coating of composite construction cross-sectional scans Electronic Speculum figure after isothermal oxidation 500h under 1100 DEG C of hot conditionss.
Description of reference numerals:
1 high temperature alloy matrix；2 metal bonding coatings；3 first ceramic layers；
4 second ceramic layers；5 metal deposition layers；6 the 3rd ceramic layers；
7 the 4th ceramic layers；Metal bonding coating after 2' oxidation；3'—Al2O3Layer；
4' diffusion layer；5' pottery I layer；6' oxide skin(coating)；
7' pottery II layer.
Detailed description of the invention
Embodiment 1
As shown in Figure 1, the present embodiment has the resistance to high temperature oxidation thermal barrier coating of composite construction and is deposited on high temperature alloy matrix 1 top, and this coating includes metal bonding coating the 2, first ceramic layer the 3, second ceramic layer 4, metal deposition layer the 5, the 3rd ceramic layer 6 and the 4th ceramic layer 7 that are sequentially depositing from top to bottom, described first ceramic layer 3 and the 3rd ceramic layer 6 are isometric crystal structure, and described second ceramic layer 4 and the 4th ceramic layer 7 are columnar crystal structure；The composition of described first ceramic layer the 3, second ceramic layer 4 and the 3rd ceramic layer 6 and the 4th ceramic layer 7 is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating 2 is MCrAlY, and the composition of described metal deposition layer 5 is MCrAlY, M is Ni or/and Co.
In the present embodiment, M is Ni；The thickness of described metal bonding coating 2 is 17 μm, the thickness of described first ceramic layer 3 is 5 μm, and the thickness of described second ceramic layer 4 is 36 μm, and the thickness of described metal deposition layer 5 is 3.5 μm, the thickness of described 3rd ceramic layer 6 is 5 μm, and the thickness of described 4th ceramic layer 7 is 36 μm.
In the present embodiment, the material of described high temperature alloy matrix 1 is nickel base superalloy N5.
In conjunction with Fig. 1, the method for the resistance to high temperature oxidation thermal barrier coating having composite construction described in the present embodiment preparation comprises the following steps:
Step one, high temperature alloy matrix 1 is polished after ultrasonic cleaning clean, be then placed in electro beam physics vapour deposition equipment；The order number of described polishing is 80 order～1000 orders, and in the present embodiment, the order number of polishing is followed successively by: 80 orders, 240 orders, 600 orders and 1000 orders；
Step 2, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of high temperature alloy matrix 1, obtain metal bonding coating 2；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating 2, obtains the first ceramic layer 3 and the second ceramic layer 4；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 4, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of the second ceramic layer 4, obtain metal deposition layer 5；The time of described electro beam physics vapour deposition is 3min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer 5, obtains the 3rd ceramic layer 6 and the 4th ceramic layer 7, on high temperature alloy matrix 1, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV.
The present embodiment prepares a kind of resistance to high temperature oxidation thermal barrier coating with composite construction at high temperature alloy matrix surface, and its cross-sectional scans Electronic Speculum is as in figure 2 it is shown, this coating structure is fine and close, well arranged as shown in Figure 2, interface continuous and is completely embedded with matrix.For the high temperature oxidation resistance of testing coating, by the sample of the present embodiment and conventional double coating sample (high temperature alloy matrix/NiCrAlY metal bonding coating/6～8wt%Y2O3-ZrO2Ceramic layer) put in 1100 DEG C of Muffle furnaces simultaneously, atmospheric oxidn 500h.With scanning electron microscope and X-ray energy spectrum, the sample of the embodiment 1 after oxidation is carried out Cross Section Morphology observation (Cross Section Morphology is as shown in Figure 3), and analytical element composition and distribution find: after high-temperature oxydation, structure and the composition of the present embodiment high temperature alloy matrix 1 do not change, and the structure of thermal barrier coating and composition have occurred that large change, wherein, the metal bonding coating 2 in former coating presents three-decker after Elements Diffusion, oxidation and displacement reaction: metal bonding coating 2 ＇, the Al after oxidation2O3Layer 3 ＇ and diffusion layer 4 ＇, the first ceramic layer 3 and the second ceramic layer 4 in former coating merge into pottery I layer 5 ＇, metal deposition layer 5 in former coating is converted into oxide skin(coating) 6 ＇ due to oxidation reaction, and the 3rd ceramic layer 6 and the 4th ceramic layer 7 in former coating merge into pottery II layer 7 ＇.Between each layer well arranged, be completely embedded, do not have crackle to occur.In oxidizing process, the oxygen atom of diffusion generates containing Al with metal deposition layer 5 reaction2O3、Cr2O3Oxide skin(coating) 6 ＇ with NiO mixture, the formation of oxide skin(coating) and there is the first ceramic layer 3 of isometric crystal structure and the 3rd ceramic layer 6 has delayed the oxygen atom diffusion to matrix, Al, Ni and Cr element in metal bonding coating 2 is made outwards to diffuse to form diffusion layer 4 ＇, with the prolongation of oxidization time, Al and the first ceramic layer 3 of metal bonding coating 2 external diffusion and the ZrO of the second ceramic layer 4 internal diffusion2There occurs 4Al+3ZrO2→2Al2O3The chemical reaction of+3Zr, defines one layer of continuous print pellumina, and the oxygen being meanwhile diffused into metal bonding coating surface can react generation aluminium oxide, and both have cooperatively formed Al2O3Layer 3 ＇.Al2O3Layer 3 ＇ can effectively stop the oxygen element diffusion to matrix, extends the service life of coating.
After testing, after 1100 DEG C/500h aoxidizes, the TGO thickness of the present embodiment thermal barrier coating is 3～4.5 μm, less than the TGO thickness 8～10 μm of conventional double coating sample, the high temperature oxidation resistance of coating prepared by the present invention is described better, and active time is longer.
Embodiment 2
As shown in Figure 1, the present embodiment has the resistance to high temperature oxidation thermal barrier coating of composite construction and is deposited on high temperature alloy matrix 1 top, and this coating includes metal bonding coating the 2, first ceramic layer the 3, second ceramic layer 4, metal deposition layer the 5, the 3rd ceramic layer 6 and the 4th ceramic layer 7 that are sequentially depositing from top to bottom, described first ceramic layer 3 and the 3rd ceramic layer 6 are isometric crystal structure, and described second ceramic layer 4 and the 4th ceramic layer 7 are columnar crystal structure；The composition of described first ceramic layer the 3, second ceramic layer 4 and the 3rd ceramic layer 6 and the 4th ceramic layer 7 is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating 2 is MCrAlY, and the composition of described metal deposition layer 5 is MCrAlY, M is Ni or/and Co.
In the present embodiment, M is Ni and Co；The thickness of described metal bonding coating 2 is 17 μm, the thickness of described first ceramic layer 3 is 5 μm, and the thickness of described second ceramic layer 4 is 36 μm, and the thickness of described metal deposition layer 5 is 3.5 μm, the thickness of described 3rd ceramic layer 6 is 5 μm, and the thickness of described 4th ceramic layer 7 is 36 μm.
In the present embodiment, the material of described high temperature alloy matrix 1 is nickel base superalloy N5.
In conjunction with Fig. 1, the method for the resistance to high temperature oxidation thermal barrier coating having composite construction described in the present embodiment preparation comprises the following steps:
Step one, high temperature alloy matrix 1 is polished after ultrasonic cleaning clean, be then placed in electro beam physics vapour deposition equipment；The order number of described polishing is 80 order～1000 orders, and in the present embodiment, the order number of polishing is followed successively by: 80 orders, 240 orders, 600 orders and 1000 orders；
Step 2, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of high temperature alloy matrix 1, obtain metal bonding coating 2；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating 2, obtains the first ceramic layer 3 and the second ceramic layer 4；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 4, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of the second ceramic layer 4, obtain metal deposition layer 5；The time of described electro beam physics vapour deposition is 3min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer 5, obtains the 3rd ceramic layer 6 and the 4th ceramic layer 7, on high temperature alloy matrix 1, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV.
The sample prepared by the present embodiment is after 1100 DEG C of atmospheric environment high-temperature oxydation 500h, the each interface of coating is completely embedded, crackle is not had to occur, after oxidation, TGO thickness is about 4 μm, less than the TGO thickness 8～10 μm of conventional double coating sample, illustrate that this thermal barrier coating has good high temperature oxidation resistance.
Embodiment 3
As shown in Figure 1, the present embodiment has the resistance to high temperature oxidation thermal barrier coating of composite construction and is deposited on high temperature alloy matrix 1 top, and this coating includes metal bonding coating the 2, first ceramic layer the 3, second ceramic layer 4, metal deposition layer the 5, the 3rd ceramic layer 6 and the 4th ceramic layer 7 that are sequentially depositing from top to bottom, described first ceramic layer 3 and the 3rd ceramic layer 6 are isometric crystal structure, and described second ceramic layer 4 and the 4th ceramic layer 7 are columnar crystal structure；The composition of described first ceramic layer the 3, second ceramic layer 4 and the 3rd ceramic layer 6 and the 4th ceramic layer 7 is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating 2 is MCrAlY, and the composition of described metal deposition layer 5 is MCrAlY, M is Ni or/and Co.
In the present embodiment, M is Co；The thickness of described metal bonding coating 2 is 17 μm, the thickness of described first ceramic layer 3 is 5 μm, and the thickness of described second ceramic layer 4 is 36 μm, and the thickness of described metal deposition layer 5 is 3.5 μm, the thickness of described 3rd ceramic layer 6 is 5 μm, and the thickness of described 4th ceramic layer 7 is 36 μm.
In the present embodiment, the material of described high temperature alloy matrix 1 is nickel base superalloy N5.
In conjunction with Fig. 1, the method for the resistance to high temperature oxidation thermal barrier coating having composite construction described in the present embodiment preparation comprises the following steps:
Step one, high temperature alloy matrix 1 is polished after ultrasonic cleaning clean, be then placed in electro beam physics vapour deposition equipment；The order number of described polishing is 80 order～1000 orders, and in the present embodiment, the order number of polishing is followed successively by: 80 orders, 240 orders, 600 orders and 1000 orders；
Step 2, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of high temperature alloy matrix 1, obtain metal bonding coating 2；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating 2, obtains the first ceramic layer 3 and the second ceramic layer 4；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 4, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of the second ceramic layer 4, obtain metal deposition layer 5；The time of described electro beam physics vapour deposition is 3min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer 5, obtains the 3rd ceramic layer 6 and the 4th ceramic layer 7, on high temperature alloy matrix 1, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV.
The sample prepared by the present embodiment is after 1100 DEG C of atmospheric environment high-temperature oxydation 500h, and each interface of coating is completely embedded, and does not have crackle to occur, and the Al on metal bonding coating surface2O3Layer is fine and close, and in diffusion layer, oxygen element content is lower, and TGO thickness is 2～4 μm, TGO thickness 7～8 μm less than conventional double coating sample, illustrating that this thermal barrier coating reduces oxygen permeability, improve the high-temperature oxidation resistance of high temperature alloy matrix, the service life of coating is longer.
Embodiment 4
As shown in Figure 1, the present embodiment has the resistance to high temperature oxidation thermal barrier coating of composite construction and is deposited on high temperature alloy matrix 1 top, and this coating includes metal bonding coating the 2, first ceramic layer the 3, second ceramic layer 4, metal deposition layer the 5, the 3rd ceramic layer 6 and the 4th ceramic layer 7 that are sequentially depositing from top to bottom, described first ceramic layer 3 and the 3rd ceramic layer 6 are isometric crystal structure, and described second ceramic layer 4 and the 4th ceramic layer 7 are columnar crystal structure；The composition of described first ceramic layer the 3, second ceramic layer 4 and the 3rd ceramic layer 6 and the 4th ceramic layer 7 is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating 2 is MCrAlY, and the composition of described metal deposition layer 5 is MCrAlY, M is Ni or/and Co.
In the present embodiment, M is Ni；The thickness of described metal bonding coating 2 is 10 μm, the thickness of described first ceramic layer 3 is 3 μm, and the thickness of described second ceramic layer 4 is 10 μm, and the thickness of described metal deposition layer 5 is 2 μm, the thickness of described 3rd ceramic layer 6 is 3 μm, and the thickness of described 4th ceramic layer 7 is 20 μm.
In the present embodiment, the material of described high temperature alloy matrix 1 is nickel base superalloy N5.
In conjunction with Fig. 1, the method for the resistance to high temperature oxidation thermal barrier coating having composite construction described in the present embodiment preparation comprises the following steps:
Step one, high temperature alloy matrix 1 is polished after ultrasonic cleaning clean, be then placed in electro beam physics vapour deposition equipment；The order number of described polishing is 80 order～1000 orders, and in the present embodiment, the order number of polishing is followed successively by: 80 orders, 200 orders, 400 orders and 800 orders；
Step 2, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of high temperature alloy matrix 1, obtain metal bonding coating 2；The time of described electro beam physics vapour deposition is 20min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.2A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating 2, obtains the first ceramic layer 3 and the second ceramic layer 4；The time of described electro beam physics vapour deposition is 10min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.2A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 4, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of the second ceramic layer 4, obtain metal deposition layer 5；The time of described electro beam physics vapour deposition is 2min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.2A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer 5, obtains the 3rd ceramic layer 6 and the 4th ceramic layer 7, on high temperature alloy matrix 1, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 10min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.2A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV.
The sample prepared by the present embodiment is after 1100 DEG C of atmospheric environment high-temperature oxydation 100h, and each interface of coating is completely embedded, and does not have crackle to occur, and the Al on metal bonding coating surface2O3Layer is fine and close, and in diffusion layer, oxygen element content is lower, and TGO thickness is 3～4 μm, TGO thickness 5～6 μm less than conventional double coating sample, illustrating that this thermal barrier coating reduces oxygen permeability, improve the high-temperature oxidation resistance of high temperature alloy matrix, the service life of coating is longer.
Embodiment 5
As shown in Figure 1, the present embodiment has the resistance to high temperature oxidation thermal barrier coating of composite construction and is deposited on high temperature alloy matrix 1 top, and this coating includes metal bonding coating the 2, first ceramic layer the 3, second ceramic layer 4, metal deposition layer the 5, the 3rd ceramic layer 6 and the 4th ceramic layer 7 that are sequentially depositing from top to bottom, described first ceramic layer 3 and the 3rd ceramic layer 6 are isometric crystal structure, and described second ceramic layer 4 and the 4th ceramic layer 7 are columnar crystal structure；The composition of described first ceramic layer the 3, second ceramic layer 4 and the 3rd ceramic layer 6 and the 4th ceramic layer 7 is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating 2 is MCrAlY, M be Ni or/and Co, the composition of described metal deposition layer 5 is MCrAlY.
In the present embodiment, M is Ni, the thickness of described metal bonding coating 2 is 100 μm, the thickness of described first ceramic layer 3 is 7 μm, the thickness of described second ceramic layer 4 is 50 μm, the thickness of described metal deposition layer 5 is 5 μm, and the thickness of described 3rd ceramic layer 6 is 7 μm, and the thickness of described 4th ceramic layer 7 is 200 μm.
In the present embodiment, the material of described high temperature alloy matrix 1 is nickel base superalloy N5.
In conjunction with Fig. 1, the method for the resistance to high temperature oxidation thermal barrier coating having composite construction described in the present embodiment preparation comprises the following steps:
Step one, high temperature alloy matrix 1 is polished after ultrasonic cleaning clean, be then placed in electro beam physics vapour deposition equipment；The order number of described polishing is 80 order～1000 orders, and in the present embodiment, the order number of polishing is followed successively by: 80 orders, 300 orders, 600 orders and 1000 orders；
Step 2, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of high temperature alloy matrix 1, obtain metal bonding coating 2；The time of described electro beam physics vapour deposition is 150min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.25A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating 2, obtains the first ceramic layer 3 and the second ceramic layer 4；The time of described electro beam physics vapour deposition is 60min, and target evaporation current is 1.2A, vacuum≤3～5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.25A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 4, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of the second ceramic layer 4, obtain metal deposition layer 5；The time of described electro beam physics vapour deposition is 8min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.25A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer 5, obtains the 3rd ceramic layer 6 and the 4th ceramic layer 7, on high temperature alloy matrix 1, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 160min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.25A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV.
The sample prepared by the present embodiment is after 1100 DEG C of atmospheric environment high-temperature oxydation 500h, and each interface of coating is completely embedded, and does not have crackle to occur, and the Al on metal bonding coating surface2O3Layer is fine and close, and in diffusion layer, oxygen element content is lower, and TGO thickness is 2 μm, TGO thickness 4～5 μm less than conventional double coating sample, illustrating that this thermal barrier coating reduces oxygen permeability, improve the high-temperature oxidation resistance of high temperature alloy matrix, the service life of coating is longer.
Embodiment 6
As shown in Figure 1, the present embodiment has the resistance to high temperature oxidation thermal barrier coating of composite construction and is deposited on high temperature alloy matrix 1 top, and this coating includes metal bonding coating the 2, first ceramic layer the 3, second ceramic layer 4, metal deposition layer the 5, the 3rd ceramic layer 6 and the 4th ceramic layer 7 that are sequentially depositing from top to bottom, described first ceramic layer 3 and the 3rd ceramic layer 6 are isometric crystal structure, and described second ceramic layer 4 and the 4th ceramic layer 7 are columnar crystal structure；The composition of described first ceramic layer the 3, second ceramic layer 4 and the 3rd ceramic layer 6 and the 4th ceramic layer 7 is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating 2 is MCrAlY, M be Ni or/and Co, the composition of described metal deposition layer 5 is NiAl.
In the present embodiment, M is Ni；The thickness of described metal bonding coating 2 is 17 μm, the thickness of described first ceramic layer 3 is 5 μm, and the thickness of described second ceramic layer 4 is 36 μm, and the thickness of described metal deposition layer 5 is 4 μm, the thickness of described 3rd ceramic layer 6 is 5 μm, and the thickness of described 4th ceramic layer 7 is 36 μm.
In the present embodiment, the material of described high temperature alloy matrix 1 is nickel base superalloy N5.
In conjunction with Fig. 1, the method for the resistance to high temperature oxidation thermal barrier coating having composite construction described in the present embodiment preparation comprises the following steps:
Step one, high temperature alloy matrix 1 is polished after ultrasonic cleaning clean, be then placed in electro beam physics vapour deposition equipment；The order number of described polishing is 80 order～1000 orders, and in the present embodiment, the order number of polishing is followed successively by: 80 orders, 240 orders, 600 orders and 1000 orders；
Step 2, adopt the method for electro beam physics vapour deposition that MCrAlY is deposited on the surface of high temperature alloy matrix 1, obtain metal bonding coating 2；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating 2, obtains the first ceramic layer 3 and the second ceramic layer 4；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 4, adopt the method for electro beam physics vapour deposition that NiAl is deposited on the surface of the second ceramic layer 4, obtain metal deposition layer 5；The time of described electro beam physics vapour deposition is 5min, and target evaporation current is 1.4A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer 5, obtains the 3rd ceramic layer 6 and the 4th ceramic layer 7, on high temperature alloy matrix 1, finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 30min, and target evaporation current is 1.2A, vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix 1 adds thermocurrent 0.23A, high temperature alloy matrix 1 rotating speed 20r/min, electron-beam voltage 20kV.
The sample prepared by the present embodiment is after 1100 DEG C of atmospheric environment high-temperature oxydation 500h, and coating interface is completely embedded, and does not have crackle to occur, in NiAl, Al content is higher, can form aluminium oxide one layer comparatively dense at layer on surface of metal, stops that oxygen element passes through；The Al on metal bonding coating surface2O3Layer is fine and close, and the thickness of TGO is 2～3 μm, and less than the TGO thickness 7～8 μm of conventional double coating sample, thermal barrier coating has low oxygen transmission rate and good high temperature oxidation resistance.
The above, be only presently preferred embodiments of the present invention, not the present invention is imposed any restrictions.Every any simple modification, change and equivalence change above example made according to inventive technique essence, all still falls within the protection domain of technical solution of the present invention.
Claims (6)
1. a resistance to high temperature oxidation thermal barrier coating with composite construction, it is characterized in that, this coating includes being sequentially deposited to the metal bonding coating (2) at high temperature alloy matrix (1) top, the first ceramic layer (3), the second ceramic layer (4), metal deposition layer (5), the 3rd ceramic layer (6) and the 4th ceramic layer (7), described first ceramic layer (3) and the 3rd ceramic layer (6) are isometric crystal structure, and described second ceramic layer (4) and the 4th ceramic layer (7) are columnar crystal structure；The composition of described first ceramic layer (3), the second ceramic layer (4) and the 3rd ceramic layer (6) and the 4th ceramic layer (7) is 6wt%～8wt%Y2O3Stable ZrO2, the composition of described metal bonding coating (2) is MCrAlY, the composition of described metal deposition layer (5) is MCrAlY or NiAl, M be Ni or/and Co, described high temperature refers to that temperature is 1100 DEG C～1200 DEG C.
2. a kind of resistance to high temperature oxidation thermal barrier coating with composite construction according to claim 1, it is characterized in that, the thickness of described metal bonding coating (2) is 10 μm～100 μm, the thickness of described first ceramic layer (3) is 3 μm～7 μm, the thickness of described second ceramic layer (4) is 10 μm～50 μm, the thickness of described metal deposition layer (5) is 2 μm～5 μm, the thickness of described 3rd ceramic layer (6) is 3 μm～7 μm, and the thickness of described 4th ceramic layer (7) is 20 μm～200 μm.
3. a kind of resistance to high temperature oxidation thermal barrier coating with composite construction according to claim 1, it is characterised in that the material of described high temperature alloy matrix (1) is nickel base superalloy N5.
4. the method preparing the resistance to high temperature oxidation thermal barrier coating as claimed in claim 1 with composite construction, it is characterised in that the method comprises the following steps:
Step one, high temperature alloy matrix (1) being polished, then ultrasonic cleaning is clean；
Step 2, adopt the method for electro beam physics vapour deposition high temperature alloy matrix (1) surface that to be deposited in step one by MCrAlY ultrasonic cleaning clean, obtain metal bonding coating (2)；The time of described electro beam physics vapour deposition is 20min～150min, and target evaporation current is 1.4A；
Step 3, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal bonding coating described in step 2 (2), obtains the first ceramic layer (3) and the second ceramic layer (4)；The time of described electro beam physics vapour deposition is 10min～60min, and target evaporation current is 1.2A；
Step 4, adopt the method for electro beam physics vapour deposition that MCrAlY or NiAl is deposited on the surface of the second ceramic layer (4) described in step 3, obtain metal deposition layer (5)；The time of described electro beam physics vapour deposition is 2min～8min, and target evaporation current is 1.4A；
Step 5, adopt electro beam physics vapour deposition method by 6wt%～8wt%Y2O3Stable ZrO2It is deposited on the surface of metal deposition layer described in step 4 (5), obtain the 3rd ceramic layer (6) and the 4th ceramic layer (7), on high temperature alloy matrix (1), finally obtain the resistance to high temperature oxidation thermal barrier coating with composite construction；The time of described electro beam physics vapour deposition is 10min～160min, and target evaporation current is 1.2A.
5. method according to claim 4, it is characterised in that described in step one, the order number of polishing is 80 order～1000 orders.
6. method according to claim 4, it is characterised in that described step 2 is to the technological parameter of electro beam physics vapour deposition described in step 5: vacuum≤5 × 10, settling chamber-3Pa, high temperature alloy matrix (1) add thermocurrent 0.2A～0.25A, the rotating speed 20r/min of high temperature alloy matrix (1), electron-beam voltage 20kV.
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