CN105675132B - Astigmatism spectrometer - Google Patents

Astigmatism spectrometer Download PDF

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Publication number
CN105675132B
CN105675132B CN201511006054.XA CN201511006054A CN105675132B CN 105675132 B CN105675132 B CN 105675132B CN 201511006054 A CN201511006054 A CN 201511006054A CN 105675132 B CN105675132 B CN 105675132B
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China
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astigmatism
cylindrical lens
spectrometer
wavelength
light
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CN105675132A (en
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熊胜军
袁丁
牟涛涛
赵喜
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Beijing Ht Nova Testing Technology Co Ltd
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Beijing Ht Nova Testing Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0297Constructional arrangements for removing other types of optical noise or for performing calibration

Abstract

The present invention discloses a kind of astigmatism spectrometer, which includes:Entrance slit;Collimating element is set to after the entrance slit, and the light for the entrance slit to be emitted becomes directional light;Dispersion element receives the directional light of the collimating element outgoing, for the directional light spatially to be become a plurality of light beam by wavelength dispersion;Concentrating element receives a plurality of light beam of the dispersion element outgoing, for focusing on the light beam after dispersion;Detection device is positioned over the focal plane of the concentrating element emergent ray, for measuring the intensity of the focal beam spot of each wavelength;Astigmatism element is set to before the detection device, and for correcting the astigmatism of each wavelength, the focal beam spot that energy is concentrated is obtained on the focal plane.Therefore, astigmatism can be corrected by implementing the present invention, improve collection efficiency and sensitivity.

Description

Astigmatism spectrometer
Technical field
The present invention relates to field of spectral analysis technology, more particularly to a kind of astigmatism spectrometer.
Background technology
Traditional non-imaged type grating spectrograph is usually of less demanding to astigmatism, is primarily due to astigmatism and does not interfere with its light Spectral resolution;However, astigmatism can cause the encircled energy of the spectral line on focal plane to reduce, the point light source at entrance slit is in coke Into an elongated striation in plane, therefore, when using linear array detector, it can only intercept and collect less energy.Also, Since the astigmatism situation of different wave length is inconsistent so that spectral line disperse degree differs, so sound of the spectrometer for different-waveband It should be inconsistent.
At present, the considerations of universal non-imaged spectrometer is for structure and cost usually only wants spectral resolution It asks, and the requirement to astigmatic correction is not high, the more typical spectrometer architecture of one of which is the spectrum of Cheney that-Tener structure Instrument, as shown in Figure 1, the spectrometer of the Cheney that-Tener structure includes entrance slit 1, collimating mirror 2, transmitting grating 3, focus lamp 4 With detector 5.
It, can be by optimizing collimating mirror in order to avoid the interference of light channel structure, while under the premise of spectral resolution is met Incidence angle and focus lamp incidence angle can reduce astigmatism, but its residual astigmatism is usual or bigger to a certain degree in this way.
For imaging spectrometer, it is required that the luminous point being incident on slit on focal plane also into picture point so as to Separately achieve the purpose that " to be imaged " with the picture of object point around, it means that propose astigmatic correction strict demand.In order to meet This requirement needs in light channel structure to make focus lamp into complicated toroidal mirror or makes plane grating into curved surface grating Design, but this difficulty of processing for will all optical element being significantly increased, so as to increase the cost of spectrometer.In addition, it also proposes in the industry A kind of scheme is exactly to increase the reflective cylindrical mirror of one side in light channel structure to eliminate aberration, but be to increase the drawbacks of this method A face speculum is added light path to be caused to become larger, is unfavorable for the miniaturization of spectrometer, and the spectrum of staggered form Cheney that-Tener structure Instrument can not add in the reflective cylindrical lens due to the compact of mechanism.
Invention content
In view of this, the embodiment of the present invention proposes a kind of astigmatism spectrometer, can correct astigmatism, improve collection efficiency and Sensitivity.
For further, which includes:Entrance slit;Collimating element, be set to the entrance slit it Afterwards, the light for the entrance slit to be emitted becomes directional light;Dispersion element receives the parallel of the collimating element outgoing Light, for the directional light spatially to be become a plurality of light beam by wavelength dispersion;Concentrating element receives the dispersion element and goes out The a plurality of light beam penetrated, for focusing on the light beam after dispersion;Detection device, the coke for being positioned over the concentrating element emergent ray are put down Face, for measuring the intensity of the focal beam spot of each wavelength;Astigmatism element is set to before the detection device, for correcting The astigmatism of each wavelength obtains the focal beam spot that energy is concentrated on the focal plane.
Optionally, in some embodiments, the astigmatism element is cylindrical lens, and the cylindrical lens are put down with the focal plane Row setting.
Optionally, in some embodiments, the astigmatism element is cylindrical lens, the cylindrical lens and the focal plane into Angle of inclination is set, and according to the radius of curvature of the cylindrical lens and the cylindrical lens and the distance of focal plane, adjusts different wave length Light the light path of focal plane is reached after the cylindrical lens.
Optionally, in some embodiments, the angle of inclination of the cylindrical lens and radius of curvature are according to the big of practical astigmatism Variation relation setting small and its with wavelength;Wherein, the range of curvature radius of the cylindrical lens is 2~20mm;The cylindrical lens Angle of inclination value range be 0~15 °
Optionally, in some embodiments, the cylindrical lens are suitable for symmetrical and asymmetric Cheney that-Tener knot Structure.
Optionally, in some embodiments, the dispersion element is grating or Amici prism.
Optionally, in some embodiments, the collimating element is speculum or lens.
Optionally, in some embodiments, the detection device is CCD (Charge-coupled Device, charge coupling Close element) array, photodiode array, photomultiplier or other single point detectors.
Relative to the prior art, various embodiments of the present invention have the following advantages:
After adopting the technical scheme of the embodiment of the present invention, above-mentioned astigmatism spectrometer passes through in original grating spectrograph system Astigmatism element is added in system, can greatly reduce spectrometer and design the astigmatism in wavelength band at it, non-imaged can be improved The collection efficiency of spectrometer so as to obtain the higher focal beam spot of encircled energy on focal plane, while will not reduce spectrum The spectral resolution of instrument.
The more features and advantage of the embodiment of the present invention will be explained in specific embodiment later.
Description of the drawings
The attached drawing for forming a part of the embodiment of the present invention is used for providing further understanding the embodiment of the present invention, the present invention Illustrative embodiments and their description for explaining the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is typical symmetrical Cheney that-Tener spectrometer architecture schematic diagram in the relevant technologies;
Fig. 2 is the structure diagram that cylindrical lens astigmatism spectrometer is tilted in the embodiment of the present invention;
Fig. 3 is that anastigmatic cylindrical lens structure diagram is used in the embodiment of the present invention;
Fig. 4 a-c are respectively the schematic diagram of detector plane focal beam spot astigmatism in the embodiment of the present invention;Wherein, a for it is non-into As detector plane focal beam spot astigmatism schematic diagram in spectrometer, b is that detector plane focuses in cylindrical lens astigmatism spectrometer Hot spot astigmatism schematic diagram, to tilt, detector plane focuses on c in cylindrical lens astigmatism spectrometer in cylindrical lens astigmatism spectrometer Hot spot astigmatism schematic diagram;
Fig. 5 a-5c be respectively in the embodiment of the present invention detector plane focal beam spot root mean square radii with wavelength variation close It is schematic diagram;Wherein, a shows for detector plane focal beam spot root mean square radii in non-imaged spectrometer with the variation relation of wavelength It is intended to, b is that detector plane focal beam spot root mean square radii is illustrated with the variation relation of wavelength in cylindrical lens astigmatism spectrometer Figure, c tilt detector plane focal beam spot root mean square radii in cylindrical lens astigmatism spectrometer and illustrate with the variation relation of wavelength Figure.
Reference sign
1 entrance slit
2 collimating mirrors
3 transmitting gratings
4 focus lamps
5 detectors
10 entrance slits
20 collimating elements
30 dispersion elements
40 concentrating elements
50 detection devices
60 astigmatism elements
The width of a cylindrical lens
The length of b cylindrical lens
The thickness of d cylindrical lens
The radius of curvature of R cylindrical lens
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other without creative efforts Embodiment shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in the embodiment of the present invention and embodiment can be mutual group It closes.
Below in conjunction with the accompanying drawings, various embodiments of the present invention are described further:
For the astigmatism of correction spectrometer in the measurements, the present embodiment proposes a kind of astigmatism spectrometer.With reference to shown in Fig. 2, For the spectrometer of symmetrical Cheney that-Tener structure, which includes:Entrance slit 10, collimating element 20, dispersion member Part 30, concentrating element 40, detection device 50 and astigmatism element 60.
Wherein, collimating element 20 is set to after entrance slit 10, and the light for entrance slit 10 to be emitted becomes flat Row light.Dispersion element 30 receives the directional light that collimating element 20 is emitted, for directional light spatially to be become by wavelength dispersion A plurality of light beam.Concentrating element 40 receives a plurality of light beam that dispersion element 30 is emitted, for focusing on the light beam after dispersion.Detection device 50 are positioned over the focal plane of 40 emergent ray of concentrating element, for measuring the intensity of the focal beam spot of each wavelength.Astigmatism element 60 are set to before detection device 50, and for correcting the astigmatism of each wavelength, the focal beam spot that energy is concentrated is obtained on focal plane. The spectrometer constituent element of asymmetric Cheney that-Tener structure is same as above, the difference is that concentrating element 40 converges light and incidence is narrow It stitches the parallel rays that 10 emergent rays and collimating element 20 are emitted to intersect, spectrometer architecture is more compact.
It should be noted that in above-mentioned astigmatism spectrometer, entrance slit 10, dispersion element 30, focuses on collimating element 20 Element 40, detection device 50 are geometrically without interference.
In the present embodiment, above-mentioned astigmatism spectrometer in original grating spectrograph system by adding in astigmatism element 60, it can greatly reduce spectrometer and design the astigmatism in wavelength band at it, the collection efficiency of spectrometer can be improved, thus The higher focal beam spot of encircled energy is obtained on focal plane, while the spectral resolution of spectrometer will not be reduced.
As an alternative embodiment, in above-mentioned astigmatism spectrometer, astigmatism element 60 is cylindrical lens, cylindrical lens It is arranged in parallel with focal plane, at this point, the astigmatism spectrometer can be described as cylindrical lens astigmatism spectrometer.With reference to shown in Fig. 3, column is saturating Mirror is non-axis symmetry optical element, only has curvature in one direction, and square upward curvature normal thereto is zero, so can be It is converged and is dissipated with light beam on one direction, therefore, the present embodiment can be corrected a certain using this characteristic of cylindrical lens The astigmatism of wavelength.
As another optional embodiment, since the size of the astigmatism on each wavelength is different, in same distance In the case of similary curvature the amount of astigmatism that is corrected of cylindrical lens face it is basically identical, and the calibration result of astigmatism also with incident light There is relationship at the space incident angle of line, therefore the cylindrical lens parallel with focal plane can only be directed to a certain wavelength calibration astigmatism, other wavelength Position correction amount is limited;Therefore, the astigmatism element 60 in above-mentioned astigmatism spectrometer uses cylindrical lens, and cylindrical lens are put down with coke Face is set into angle of inclination, according to the radius of curvature of cylindrical lens and cylindrical lens and the distance of focal plane, adjusts the light of different wave length The light path of focal plane is reached after cylindrical lens.
Optionally, in above-mentioned astigmatism spectrometer, the inclination angle beta and radius of curvature of cylindrical lens are according to the big of practical astigmatism Variation relation setting small and its with wavelength.As shown in figure 3, wherein, a, b, d, R are respectively width, length, the thickness of cylindrical lens And radius of curvature, ranging from 2~20mm of the radius of curvature R of cylindrical lens.Ranging from 0 °~15 ° of the inclination angle beta of cylindrical lens.
In above-described embodiment, designed using the method for tilting cylindrical lens for the De-dispersion of grating spectrograph, by original The cylindrical lens for having certain angle are added in some grating spectrograph systems, according to the size of actual spectrum instrument astigmatism and its with wavelength Variation relation, design radius of curvature and the angle of inclination of cylindrical lens, can greatly reduce spectrometer and design wave band model at it Interior astigmatism is enclosed, so as to obtain the higher focal beam spot of encircled energy on focal plane, and causes the convergence of each wave band luminous energy Efficiency reaches unanimity.Also, above-described embodiment can improve the collection efficiency of spectrometer, improve the sensitivity of instrument and each wave band The uniformity of response, the use particularly suitable for the spectral instrument that dark dim light spectrum signal measures.
As an alternative embodiment, in above-mentioned astigmatism spectrometer, cylindrical lens are suitable for symmetrical and asymmetric Shi Qienier-Tener structure.The transmission-type cylindrical lens method of the present embodiment will not also increase the length of light path, symmetrical and non-right Claim Shi Qienier-Tener structure that can use, the spectral resolution of spectrometer will not be reduced.
As an alternative embodiment, in above-mentioned astigmatism spectrometer, dispersion element 30 is grating or Amici prism.
As an alternative embodiment, in above-mentioned astigmatism spectrometer, collimating element 20 is speculum or lens.
As an alternative embodiment, in above-mentioned astigmatism spectrometer, detection device 50 is ccd array, photoelectricity two Pole pipe array, photomultiplier or other single point detectors.
In the following, the functional characteristics of the correction astigmatism for astigmatism spectrometer in the various embodiments described above is better described, with reference to Fig. 4 a-4c and Fig. 5 a-5c are further elaborated it:
Fig. 4 a-4c are respectively the schematic diagram of detector plane focal beam spot astigmatism in the embodiment of the present invention;Wherein, Fig. 4 a are Detector plane focal beam spot astigmatism schematic diagram in non-imaged spectrometer, Fig. 4 b are that detector is put down in cylindrical lens astigmatism spectrometer Face focal beam spot astigmatism schematic diagram, Fig. 4 c are detector in cylindrical lens astigmatism spectrometer in inclination cylindrical lens astigmatism spectrometer Flat focus hot spot astigmatism schematic diagram.
Fig. 5 a-5c be respectively in the embodiment of the present invention detector plane focal beam spot root mean square radii with wavelength variation close It is schematic diagram, wherein, Fig. 5 a are that detector plane focal beam spot root mean square radii is closed with the variation of wavelength in non-imaged spectrometer System's figure, Fig. 5 b are detector plane focal beam spot root mean square radii in cylindrical lens astigmatism spectrometer with the variation relation of wavelength Figure, Fig. 5 c tilt cylindrical lens astigmatism spectrometer in detector plane focal beam spot root mean square radii with wavelength variation relation Figure.
Since symmetrical and staggered form Cheney that-Tener structure its focal plane of spectrometer is there are astigmatism, and astigmatism is big It is small to change with the variation of wavelength.By in comparison diagram 4a, Fig. 4 b and Fig. 4 c, each detector plane focal beam spot astigmatism it is big It is small, it can be clearly seen that by increasing cylindrical lens in original light path and tilting, astigmatism can be eliminated well, comparison is as follows:
1) non-imaged spectrometer
Fig. 4 a show a kind of schematic diagram of astigmatism increased image planes disperse hot spot with the increase of wavelength.Shown in Fig. 5 a It is a kind of to design detector plane focal beam spot root mean square radii in example, with the variation relation figure of wavelength, which can characterize at this time The size of astigmatism, astigmatism becomes larger with variation of the wavelength from 0.796 μm to 1.05 μm in the design example, caused by astigmatism Spot size from 40 μm to 190 μm.
2) cylindrical lens astigmatism spectrometer
This characteristic that can be converged and dissipated to light beam in one direction using cylindrical lens corrects astigmatism.But by Picture different in the size of the astigmatism on each wavelength, that the cylindrical lens face of similary curvature is corrected in the case of same distance Scattered amount is basically identical, and the calibration result of astigmatism also has relationship with the space incident angle of incident ray, therefore parallel with focal plane Cylindrical lens can only be directed to a certain wavelength calibration astigmatism, other wavelength location correcting values are limited.Such as:As shown in Figure 4 b, it is To the schematic diagram of disperse hot spot of each wavelength after centre wavelength astigmatism in image planes;As shown in Figure 5 b, it is a kind of design example After middle addition cylindrical lens are to astigmatism at centre wavelength 0.925um, detector plane focal beam spot root mean square radii is with wavelength Variation relation figure, the astigmatic correction of centre wavelength is to preferable level at this time, and both ends spot size still has 30~40 μm.
3) cylindrical lens astigmatism spectrometer is tilted
In order to weigh the astigmatism of each wavelength, by micro inclination cylindrical lens, while adjust cylindrical lens curvature and column it is saturating Mirror and the distance of focal plane, you can realize different wave length light reached after cylindrical lens focal plane light path it is different, so as to The aberration correction quantity of each wavelength is different, and the astigmatism of each wave band is compensated with this.
Fig. 4 c show the schematic diagram by tilting disperse hot spot of each wavelength in image planes after cylindrical lens astigmatism, each wave Long astigmatism can reach smaller level;Fig. 5 c, which show to add in a kind of design example, tilts cylindrical lens to complete wavelength range After interior progress astigmatism isostatic correction, detector plane focal beam spot root mean square radii is with the variation relation figure of wavelength, at this time each wave Long astigmatic correction is to preferable horizontal.
Compared with existing spectrometer, the various embodiments described above of the present invention have the following advantages:
In the embodiment of the present invention, by adding in cylindrical lens in original grating spectrograph system, it can substantially reduce light Spectrometer designs the astigmatism in wavelength band at it.Wherein, cylindrical lens can parallel focal plains setting, for the astigmatism on each wavelength Size is different, and the amount of astigmatism that the cylindrical lens face of similary curvature is corrected in the case of same distance is basically identical, and The calibration result of astigmatism also has relationship with the space incident angle of incident ray, therefore the cylindrical lens parallel with focal plane can only be directed to certain One wavelength calibration astigmatism, other wavelength location correcting values are limited.
In addition, it can further be promoted by adding in the cylindrical lens for having certain angle in original grating spectrograph system The calibration result of astigmatism.According to the size of actual spectrum instrument astigmatism and its variation relation with wavelength, the curvature of cylindrical lens is designed And angle of inclination, it can greatly reduce spectrometer and design the astigmatism in wavelength band at it, so as to obtain energy on focal plane The higher focal beam spot of quantity set moderate, and the sink-efficiency of each wave band luminous energy is reached unanimity, the collection of spectrometer can be improved Efficiency improves the uniformity of the sensitivity of instrument and the response of each wave band.
The foregoing is merely the embodiment of the present invention, are not intended to limit the invention, it is all the present invention spirit and Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.

Claims (6)

1. a kind of astigmatism spectrometer, which is characterized in that including:
Entrance slit (10);
Collimating element (20) is set to after the entrance slit (10), for the light for being emitted the entrance slit (10) Become directional light;
Dispersion element (30) receives the directional light of the collimating element (20) outgoing, for the directional light spatially to be pressed Wavelength dispersion becomes a plurality of light beam;
Concentrating element (40) receives a plurality of light beam of the dispersion element (30) outgoing, for focusing on the light beam after dispersion;
Detection device (50) is positioned over the focal plane of the concentrating element (40) emergent ray, for measuring the focusing of each wavelength The intensity of hot spot;
Astigmatism element (60) is set to before the detection device (50), for correcting the astigmatism of each wavelength, described burnt flat The focal beam spot that energy is concentrated is obtained on face;The astigmatism element (60) is piano convex cylindrical lens;The astigmatism element (60) it is set with the focal plane into angle of inclination;The angle of inclination of the astigmatism element (60) and radius of curvature are according to reality The size of astigmatism and its variation relation setting with wavelength;Wherein, the range of curvature radius of the astigmatism element (60) for 2~ 20mm;The value range at the angle of inclination of the astigmatism element (60) is 0~15 °.
2. astigmatism spectrometer according to claim 1, which is characterized in that the astigmatism element (60) is cylindrical lens, The cylindrical lens are set with the focal plane into angle of inclination, according to the radius of curvature of the cylindrical lens and the cylindrical lens and coke The distance of plane, the light for adjusting different wave length reach the light path of focal plane after the cylindrical lens.
3. astigmatism spectrometer according to claim 2, which is characterized in that the cylindrical lens are suitable for symmetrical and non-right Claim Shi Qienier-Tener structure.
4. astigmatism spectrometer according to any one of claim 1 to 3, which is characterized in that the dispersion element (30) For grating or Amici prism.
5. astigmatism spectrometer according to any one of claim 1 to 3, which is characterized in that the collimating element (20) For speculum or lens.
6. astigmatism spectrometer according to any one of claim 1 to 3, which is characterized in that the detection device (50) For ccd array, photodiode array, photomultiplier or other single point detectors.
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CN108007570A (en) * 2017-11-28 2018-05-08 北京云端光科技术有限公司 Spectrometer and spectral detection system
CN108037111A (en) * 2017-12-30 2018-05-15 杭州谱育科技发展有限公司 Hand-held LIBS optical systems
CN110470394A (en) * 2019-07-10 2019-11-19 中国科学院上海技术物理研究所 A kind of ultra-compact spectrometer optical system
CN114199379B (en) * 2021-12-14 2023-11-17 深圳思凯测试技术有限公司 Spectrometer and light intensity detection method based on DLP technology

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