CN105655504B - A kind of organic electroluminescence device and preparation method thereof and display panel - Google Patents
A kind of organic electroluminescence device and preparation method thereof and display panel Download PDFInfo
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- CN105655504B CN105655504B CN201610221694.0A CN201610221694A CN105655504B CN 105655504 B CN105655504 B CN 105655504B CN 201610221694 A CN201610221694 A CN 201610221694A CN 105655504 B CN105655504 B CN 105655504B
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Abstract
The present invention relates to display technology field, more particularly to a kind of organic electroluminescence device and preparation method thereof and display panel.The preparation method of above-mentioned organic electroluminescence device, including：Formation multiple first is deposited with underlay substrate by the first fine metal mask and is deposited with layer pattern；Formation multiple second is deposited with underlay substrate by the second fine metal mask and is deposited with layer pattern；Formation the multiple 3rd is deposited with underlay substrate by the 3rd fine metal mask and is deposited with layer pattern；Formation the multiple 4th is deposited with the underlay substrate by the 4th fine metal mask and is deposited with layer pattern；The overlapping position of any two evaporation layer pattern forms an electroluminescence layer for sub-pixel.The preparation method of the organic electroluminescence device can reduce the required precision to fine metal mask, be also convenient for realizing the high pixel density design of display screen.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of organic electroluminescence device and preparation method thereof and display
Panel.
Background technology
OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) screens are sent out with its frivolous, active
The many merits such as light, fast-response speed, wide viewing angle, rich color and high brightness, low-power consumption, high temperature resistant and be known as by industry be
Third generation Display Technique after liquid crystal display (LCD, Liquid Crystal Display), can be widely applied to intelligence
The end products such as mobile phone, panel computer, TV.And AMOLED (Active-matrix organic light emitting
Diode, active matrix organic light-emitting diode or active-matrix organic light emitting diode) screen be OLED screen curtain on the basis of send out
The generation display screen of the renewal of exhibition.
The display effect of existing display screen has direct relation with PPI (Pixels Per Inch, picture element density), as
Represented by plain density is pixel quantity that per inch screen is possessed, therefore picture element density numerical value is higher, represents display screen energy
Enough with density display image higher, certainly, the density that display screen shows is higher, and degree of verisimilitude is higher.With smart mobile phone, put down
Individual's mobile electronic product such as plate computer is widely used, people the picture element density of display screen proposed it is higher and higher will
Ask.And the volume production technology of existing AMOLED display screens be mainly using fine metal mask (Fine Metal Mask, FMM) with
Rgb pixel juxtaposition method (side by side) realizes true color.
But, machining accuracy control when being prepared due to fine metal mask is difficult, in the making of AMOLED display screens
Cheng Zhong, because being limited to the requirement of machining accuracy in fine metal mask, it is too small that the size of pixel cell can not be done, therefore,
AMOLED display screens are difficult to high pixel density.
The content of the invention
The invention provides a kind of organic electroluminescence device and preparation method thereof and display panel, the organic electroluminescent
The preparation method of device can reduce the required precision to fine metal mask, be also convenient for realizing that the high pixel density of display screen sets
Meter.
To reach above-mentioned purpose, the present invention provides following technical scheme：
A kind of preparation method of organic electroluminescence device, the organic electroluminescence device includes underlay substrate, described
Underlay substrate has multiple pixel cells of array distribution, and each pixel cell includes sub-pixel, one of the first color
The sub-pixel and a sub-pixel for the 4th color of the sub-pixel of individual second color, the 3rd color, the preparation method bag
Include：
Formation multiple first is deposited with the underlay substrate by the first fine metal mask and is deposited with layer pattern；
Formation multiple second is deposited with the underlay substrate by the second fine metal mask and is deposited with layer pattern, each
The length direction of the second evaporation layer pattern is parallel with the length direction of the described first evaporation layer pattern, and edge and described first
It is deposited with the vertical direction of length direction of layer pattern, the second evaporation layer pattern replaces point with the described first evaporation layer pattern
Cloth；
Formation the multiple 3rd is deposited with the underlay substrate by the 3rd fine metal mask and is deposited with layer pattern, each
The length direction of the 3rd evaporation layer pattern intersects with the length direction of the described first evaporation layer pattern, and, described in each
3rd evaporation layer pattern forms the electroluminescence layer of the sub-pixel of the first color with the overlapping position of the described first evaporation layer pattern,
Each described 3rd evaporation layer pattern and the sub-pixel of second color of overlapping position formation of the described second evaporation layer pattern
Electroluminescence layer；
Formation the multiple 4th is deposited with the underlay substrate by the 4th fine metal mask and is deposited with layer pattern, each
The length direction of the 4th evaporation layer pattern is parallel with the length direction of the described 3rd evaporation layer pattern, and edge and the described 3rd
It is deposited with the vertical direction of length direction of layer pattern, the 4th evaporation layer pattern replaces point with the described 3rd evaporation layer pattern
Cloth；And, each the 4th evaporation layer pattern forms the son of the 3rd color with the overlapping position of the described first evaporation layer pattern
The electroluminescence layer of pixel, each described 4th evaporation layer pattern forms the with the overlapping position of the described second evaporation layer pattern
The electroluminescence layer of the sub-pixel of four colors.
It is fine by the first fine metal mask and second when preparing organic electroluminescence device using above-mentioned preparation method
Metal mask forms multiple first and is deposited with layer pattern and multiple second evaporation layer patterns, the first evaporation layer pattern and the second evaporation layer
Pattern is alternately distributed along the direction vertical with the length direction of the first evaporation layer pattern；By the 3rd fine metal mask and the 4th
Fine metal mask forms the multiple 3rd and is deposited with layer pattern and multiple 4th evaporation layer patterns, and the 3rd evaporation layer pattern and the 4th steams
Plating layer pattern is alternately distributed along the direction vertical with the length direction of the 3rd evaporation layer pattern；Each the 3rd evaporation layer pattern with
The overlapping position of the first evaporation layer pattern forms the electroluminescence layer of the sub-pixel of the first color, each the 3rd evaporation layer pattern
With the electroluminescence layer of the sub-pixel that the overlapping position of the second evaporation layer pattern forms the second color, each the 4th evaporation layer figure
Case forms the electroluminescence layer of the sub-pixel of the 3rd color with the overlapping position of the first evaporation layer pattern, each the 4th evaporation layer
The overlapping position of pattern and the second evaporation layer pattern forms the electroluminescence layer of the sub-pixel of the 4th color；Wherein, steamed along the 3rd
The sub-pixel of the length direction of plating layer pattern, the sub-pixel of the first color and the second color is adjacent and is alternately distributed, the 3rd color
Sub-pixel and the 4th color sub-pixel it is adjacent and be alternately distributed；Meanwhile, along the length direction of the first evaporation layer pattern, the
The sub-pixel of the sub-pixel of one color and the 3rd color is adjacent and is alternately distributed, the sub-pixel of the second color and the 4th color
Sub-pixel is along adjacent and be alternately distributed；Each pixel cell for the organic electroluminescence device prepared using above-mentioned preparation method
Constituted by the sub-pixel of the sub-pixel of the first color, the sub-pixel of the second color, the sub-pixel of the 3rd color and the 4th color,
And constitute the array structure that four sub-pixels of each pixel cell form the row of two row two.
When the picture element density that organic electroluminescence device and display screen are prepared using above-mentioned preparation method is determined, i.e. aobvious
The size of each pixel cell of display screen is fixed, the first evaporation layer pattern edge of the bar shaped formed by the first fine metal mask
The size of the line direction of pixel cell is the 1/2 of each pixel cell line direction size, is formed by the second fine metal mask
Bar shaped second evaporation layer pattern along 1/2 that the size of the line direction of pixel cell is each pixel cell line direction size,
3rd evaporation layer pattern of the bar shaped formed by the 3rd fine metal mask is each along the size of the column direction of pixel cell
The 1/2 of pixel cell column direction size, the 4th evaporation layer pattern of the bar shaped formed by the 4th fine metal mask is along pixel
The size of the column direction of unit is the 1/2 of each pixel cell column direction size；And in the prior art, each pixel cell is used
Constituted along 3 sub-pixels or 4 sub-pixels of pixel cell line direction parallel arranged, by each of fine metal mask formation
The evaporation layer pattern of individual bar shaped is along 1/3 or 1/4 that the size of the line direction of pixel cell is each pixel cell line direction size；
When the picture element density of display screen determines, organic electroluminescence device is prepared using above-mentioned preparation method, because fine metal is covered
The size of fine metal mask of the size of film than using in the prior art is big, therefore, when the picture element density of display screen is identical,
Above-mentioned preparation method can reduce the accuracy of manufacture and aligning accuracy to fine metal mask, so as to reduce to fine metal mask
Required precision.
When the size that organic electroluminescence device and display screen are prepared using above-mentioned preparation method is determined, along pixel cell
Line direction and column direction, each pixel cell only takes up two sizes of sub-pixel width, and in the prior art, along pixel list
The line direction and column direction of unit, each pixel cell will at least take three sizes of sub-pixel width, or even four sub-pixels
The size of width, on the display screen of same size, the pixel of the organic electroluminescence device prepared using above-mentioned preparation method
Density is at least more than the twice of the picture element density of the organic electroluminescence device of prior art preparation, therefore, using above-mentioned system
Preparation Method prepares the high pixel density design that organic electroluminescence device is easy to implement display screen.
Therefore, when preparing organic electroluminescence device using above-mentioned preparation method, can reduce to fine metal mask
Required precision, is also convenient for realizing the high pixel density design of display screen.
Preferably, the multiple first evaporation layer figures of formation are being deposited with the underlay substrate by the first fine metal mask
In the step of case, the length direction of each the first evaporation layer pattern is parallel with the column direction of the pixel cell.
Preferably, the multiple 3rd evaporation layer figures of formation are being deposited with the underlay substrate by the 3rd fine metal mask
In the step of case, the length direction of each the 3rd evaporation layer pattern hangs down with the length direction of the described first evaporation layer pattern
It is straight intersecting.
Preferably, first color is red, and second color is green, and the 3rd color is white, described
4th color is blueness.
Present invention also offers a kind of the organic of any one preparation method preparation provided in use above-mentioned technical proposal
Electroluminescent device, the organic electroluminescence device includes underlay substrate, and the underlay substrate has multiple pictures of array distribution
Plain unit, each pixel cell includes sub-pixel, the 3rd face of the sub-pixel of first color, second color
The sub-pixel of color and a sub-pixel for the 4th color；Along the line direction of the pixel cell, the sub-pixel of first color
It is adjacent with the sub-pixel of second color and be alternately distributed, the sub-pixel of the 3rd color and the son of the 4th color
Pixel is adjacent and is alternately distributed；The column direction of pixel cell shown in, the pixel and the 3rd color of the first color
Sub-pixel it is adjacent and be alternately distributed, the sub-pixel of second color is adjacent with the sub-pixel of the 4th color and alternately point
Cloth.
Preferably, first color is red, and second color is green, and the 3rd color is white, described
4th color is blueness.
In addition, present invention also offers a kind of display panel, the display panel includes appointing for being provided in above-mentioned technical proposal
Anticipate a kind of organic electroluminescence device.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the pixel cell of organic electroluminescence device in the prior art；
Fig. 2 is the structural representation of the pixel cell of another organic electroluminescence device in the prior art；
The process chart of the preparation method of the organic electroluminescence device that Fig. 3 is provided for an embodiment of the present invention；
The structural representation of the pixel cell of the organic electroluminescence device that Fig. 4 is provided for an embodiment of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
A kind of organic electroluminescence device and preparation method thereof and display panel are the embodiment of the invention provides, the display surface
The preparation method that plate has above-mentioned organic electroluminescence device, the organic electroluminescence device can be reduced to fine metal mask
Required precision, be also convenient for realizing the high pixel density design of display screen.
Wherein, Fig. 3 and Fig. 4, the preparation side of the organic electroluminescence device that an embodiment of the present invention is provided be refer to
Method, organic electroluminescence device includes underlay substrate 1, and underlay substrate 1 has multiple pixel cells of array distribution, each picture
Plain unit includes a sub- picture for the 3rd color of the sub-pixel of the second color 112, of sub-pixel 111, of the first color
Element 113 and a sub-pixel 114 for the 4th color, preparation method include：
Step S11, is deposited with formation multiple first and is deposited with layer pattern by the first fine metal mask on underlay substrate 1
11；
Step S12, is deposited with formation multiple second and is deposited with layer pattern by the second fine metal mask on underlay substrate 1
12, the length direction of each the second evaporation layer pattern 12 is parallel with the length direction of the first evaporation layer pattern 11, and edge and the
The vertical direction of length direction of one evaporation layer pattern 11, the second evaporation layer pattern 12 is deposited with layer pattern 11 and replaces point with first
Cloth；
Step S13, is deposited with formation the multiple 3rd and is deposited with layer pattern by the 3rd fine metal mask on underlay substrate 1
13, the length direction of each the 3rd evaporation layer pattern 13 intersects with the length direction of the first evaporation layer pattern 11, and, each
The overlapping position of the 3rd evaporation evaporation layer pattern 11 of layer pattern 13 and first forms the electroluminescent of the sub-pixel 111 of the first color
Layer, the overlapping position of each the 3rd evaporation evaporation layer pattern 12 of layer pattern 13 and second forms the sub-pixel 112 of the second color
Electroluminescence layer；
Step S14, is deposited with formation the multiple 4th and is deposited with layer pattern by the 4th fine metal mask on underlay substrate 1
14, the length direction of each the 4th evaporation layer pattern 14 is parallel with the length direction of the 3rd evaporation layer pattern 13, and edge and the
The vertical direction of length direction of three evaporation layer patterns 13, the 4th evaporation layer pattern 14 is deposited with layer pattern 13 and replaces point with the 3rd
Cloth；And, the overlapping position of each the 4th evaporation evaporation layer pattern 11 of layer pattern 14 and first forms the sub-pixel of the 3rd color
113 electroluminescence layer, the overlapping position of each the 4th evaporation evaporation layer pattern 12 of layer pattern 14 and second forms the 4th face
The electroluminescence layer of the sub-pixel 114 of color.
It is fine by the first fine metal mask and second when preparing organic electroluminescence device using above-mentioned preparation method
Metal mask forms multiple first and is deposited with layer pattern 11 and multiple second evaporation layer patterns 12, the first evaporation layer pattern 11 and second
Evaporation layer pattern 12 is alternately distributed along the direction vertical with the length direction of the first evaporation layer pattern 11, as shown in Fig. 4 structures
Alternatively distributed multiple first evaporation layer patterns 11 and multiple second are deposited with layer pattern 12；By the 3rd fine metal mask and
Four fine metal masks form the multiple 3rd and are deposited with layer pattern 13 and multiple 4th evaporation layer patterns 14, the 3rd evaporation layer pattern 13
It is alternately distributed along the direction vertical with the length direction of the 3rd evaporation layer pattern 13 with the 4th evaporation layer pattern 14, such as Fig. 4 structures
Shown alternatively distributed multiple 3rd evaporation layer patterns 13 and the multiple 4th are deposited with layer pattern 14；Each the 3rd evaporation layer figure
The overlapping position of the evaporation layer pattern 11 of case 13 and first forms the electroluminescence layer of the sub-pixel 111 of the first color, and each the
The overlapping position of the three evaporation evaporation layer patterns 12 of layer pattern 13 and second forms the electroluminescent of the sub-pixel 112 of the second color
Layer, the overlapping position of each the 4th evaporation evaporation layer pattern 11 of layer pattern 14 and first forms the sub-pixel 113 of the 3rd color
Electroluminescence layer, the 4th color of overlapping position formation of each the 4th evaporation evaporation layer pattern 12 of layer pattern 14 and second
The electroluminescence layer of sub-pixel 114；Wherein, along the length direction of the 3rd evaporation layer pattern 13, the He of sub-pixel 111 of the first color
The sub-pixel 112 of the second color is adjacent and is alternately distributed, the phase of sub-pixel 114 of the color of sub-pixel 113 and the 4th of the 3rd color
It is adjacent and be alternately distributed；Meanwhile, along the length direction of the first evaporation layer pattern 11, the color of sub-pixel 111 and the 3rd of the first color
Sub-pixel 113 it is adjacent and be alternately distributed, the sub-pixel 114 of the color of sub-pixel 112 and the 4th of the second color is adjacent and hands over
For distribution；Using above-mentioned preparation method prepare organic electroluminescence device each pixel cell by the first color sub- picture
The sub-pixel 112 of plain 111, second color, the sub-pixel 114 of the color of sub-pixel 113 and the 4th of the 3rd color are constituted, and structure
Four sub-pixels into each pixel cell form the array structure of the row of two row two.
When the picture element density that organic electroluminescence device and display screen are prepared using above-mentioned preparation method is determined, i.e. aobvious
The size of each pixel cell of display screen is fixed, the first evaporation layer pattern 11 of the bar shaped formed by the first fine metal mask
Along 1/2 that the size W11 of the line direction of pixel cell is each pixel cell line direction size, by the second fine metal mask
Second evaporation layer pattern 12 of the bar shaped of formation is each pixel cell line direction chi along the size W12 of the line direction of pixel cell
Very little 1/2, the 3rd of the bar shaped formed by the 3rd fine metal mask is deposited with column direction W13 of the layer pattern 13 along pixel cell
Size be the 1/2 of each pixel cell column direction size, by the 4th fine metal mask formed bar shaped the 4th evaporation
Layer pattern 14 is along 1/2 that the size W14 of the column direction of pixel cell is each pixel cell column direction size；And prior art
In, as shown in Fig. 1 and Fig. 2 structures, each pixel cell using along pixel cell line direction parallel arranged 3 sub-pixels or
4 sub-pixels are constituted, and each pixel cell as shown in Fig. 1 structures is using the sub-pixel along pixel cell line direction parallel arranged
401st, sub-pixel 402, sub-pixel 403 and sub-pixel 404 are constituted, the evaporation of each bar shaped formed by fine metal mask
Layer pattern along 1/4 that the size W4 of the line direction of pixel cell is each pixel cell line direction size, as shown in Fig. 2 structures
Each pixel cell is constituted using the sub-pixel 301 along pixel cell line direction parallel arranged, sub-pixel 302 and sub-pixel 303,
The evaporation layer pattern of each bar shaped formed by fine metal mask is each along the size W3 of the line direction of pixel cell
The 1/3 of pixel cell line direction size；When the picture element density of display screen determines, organic electroluminescence is prepared using above-mentioned preparation method
Luminescent device, due to the fine metal mask that size W11, W12 of fine metal mask, W13, W14 ratio are used in the prior art
Size W4, W3 it is big, therefore, when the picture element density of display screen is identical, above-mentioned preparation method can reduce and fine metal is covered
The accuracy of manufacture and aligning accuracy of film, so as to reduce the required precision to fine metal mask.
When the size that organic electroluminescence device and display screen are prepared using above-mentioned preparation method is determined, along pixel cell
Line direction and column direction, each pixel cell only takes up two sizes of sub-pixel width, each picture as shown in Fig. 4 structures
Plain unit is made up of sub-pixel 111, sub-pixel 112, sub-pixel 113 and sub-pixel 114, and in the prior art, along pixel cell
Line direction and column direction, each pixel cell as shown in Figure 1 needs to take four sizes of sub-pixel width, and Fig. 2
Shown in each pixel cell need take three sizes of sub-pixel width, on the display screen of same size, using upper
State organic electroluminescence prepared by the picture element density at least prior art of the organic electroluminescence device of preparation method preparation
It is more than the twice of the picture element density of part, therefore, organic electroluminescence device is prepared using above-mentioned preparation method and is easy to implement display
The high pixel density design of screen.
Therefore, when preparing organic electroluminescence device using above-mentioned preparation method, can reduce to fine metal mask
Required precision, is also convenient for realizing the high pixel density design of display screen.
In a kind of specific embodiment, form multiple being deposited with underlay substrate 1 by the first fine metal mask
First evaporation layer pattern 11 the step of S11 in, as shown in Fig. 4 structures, each first evaporation layer pattern 11 length direction and
The column direction of pixel cell is parallel；
The step of forming multiple 3rd evaporation layer pattern 13 is being deposited with underlay substrate 1 by the 3rd fine metal mask
In S13, the length direction of each the 3rd evaporation layer pattern 13 intersects vertically with the length direction of the first evaporation layer pattern 11.
Specifically, as shown in Fig. 4 structures, the first color can be red, and the second color can be green, and the 3rd color can
Think white, the 4th color can be blueness.
The embodiment of the present invention additionally provides prepared by any one preparation method provided in a kind of use above-described embodiment
Organic electroluminescence device, as shown in Fig. 4 structures, the organic electroluminescence device includes underlay substrate 1, and underlay substrate 1 has
Multiple pixel cells of array distribution, each pixel cell includes 111, second color of sub-pixel of the first color
112, the 3rd color of sub-pixel sub-pixel 113 and a sub-pixel 114 for the 4th color；Along the row side of pixel cell
To the sub-pixel 111 of the first color is adjacent with the sub-pixel 112 of the second color and is alternately distributed, the sub-pixel of the 3rd color
113 is adjacent with the sub-pixel 114 of the 4th color and be alternately distributed；The column direction of pixel cell shown in, the picture of the first color
Element is adjacent with the sub-pixel 113 of the 3rd color and is alternately distributed, the sub-pixel of the color of sub-pixel 112 and the 4th of the second color
114 is adjacent and be alternately distributed.
Specifically, as shown in Fig. 4 structures, the first color is red, and the second color is green, and the 3rd color is white, the
Four colors are blueness.
Certainly, above-mentioned first color, the second color, the 3rd color and the 4th color are not limited to color mentioned above,
Can also according to be actually needed other colors of setting.
Obviously, those skilled in the art can carry out various changes and modification without deviating from this hair to the embodiment of the present invention
Bright spirit and scope.So, if these modifications of the invention and modification belong to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to comprising these changes and modification.
Claims (7)
1. a kind of preparation method of organic electroluminescence device, the organic electroluminescence device includes underlay substrate, the lining
Substrate has multiple pixel cells of array distribution, each pixel cell include a sub-pixel for the first color, one
The sub-pixel and a sub-pixel for the 4th color of the sub-pixel of the second color, the 3rd color, it is characterised in that the system
Preparation Method includes：
Formation multiple first is deposited with the underlay substrate by the first fine metal mask and is deposited with layer pattern；
Formation multiple second is deposited with the underlay substrate by the second fine metal mask and is deposited with layer patterns, described in each
The length direction of the second evaporation layer pattern is parallel with the length direction of the described first evaporation layer pattern, and is deposited with along with described first
The vertical direction of the length direction of layer pattern, the second evaporation layer pattern is alternately distributed with the described first evaporation layer pattern；
Formation the multiple 3rd is deposited with the underlay substrate by the 3rd fine metal mask and is deposited with layer patterns, described in each
The length direction of the length direction of the 3rd evaporation layer pattern and the described first evaporation layer pattern intersects vertically, and, described in each
3rd evaporation layer pattern forms the electroluminescence layer of the sub-pixel of the first color with the overlapping position of the described first evaporation layer pattern,
Each described 3rd evaporation layer pattern and the sub-pixel of second color of overlapping position formation of the described second evaporation layer pattern
Electroluminescence layer；
Formation the multiple 4th is deposited with the underlay substrate by the 4th fine metal mask and is deposited with layer patterns, described in each
The length direction of the 4th evaporation layer pattern is parallel with the length direction of the described 3rd evaporation layer pattern, and is deposited with along with the described 3rd
The vertical direction of the length direction of layer pattern, the 4th evaporation layer pattern is alternately distributed with the described 3rd evaporation layer pattern；And,
Each described 4th evaporation layer pattern and the sub-pixel of the 3rd color of overlapping position formation of the described first evaporation layer pattern
Electroluminescence layer, each described 4th evaporation layer pattern forms the 4th color with the overlapping position of the described second evaporation layer pattern
Sub-pixel electroluminescence layer.
2. preparation method according to claim 1, it is characterised in that by the first fine metal mask in the substrate
Be deposited with substrate in forming multiple first the step of be deposited with layer pattern, the length direction of each the first evaporation layer pattern with
The column direction of the pixel cell is parallel.
3. preparation method according to claim 2, it is characterised in that by the 3rd fine metal mask in the substrate
Be deposited with substrate in forming multiple three the step of be deposited with layer pattern, the length direction of each the 3rd evaporation layer pattern with
The length direction of the first evaporation layer pattern intersects vertically.
4. the preparation method according to claim any one of 1-3, it is characterised in that first color is red, described
Second color is green, and the 3rd color is white, and the 4th color is blueness.
5. the organic electroluminescence device that prepared by a kind of preparation method according to claim any one of 1-4, including substrate
Substrate, it is characterised in that the underlay substrate has multiple pixel cells of array distribution, each pixel cell includes one
The sub-pixel of the first color, the sub-pixel of second color, the sub-pixel and a son for the 4th color of the 3rd color
Pixel；Along the line direction of the pixel cell, the sub-pixel of first color it is adjacent with the sub-pixel of second color and
It is alternately distributed, the sub-pixel of the 3rd color is adjacent with the sub-pixel of the 4th color and is alternately distributed；The pixel shown in
The column direction of unit, the pixel of first color is adjacent with the sub-pixel of the 3rd color and is alternately distributed, and described the
The sub-pixel of second colors is adjacent with the sub-pixel of the 4th color and is alternately distributed.
6. organic electroluminescence device according to claim 5, it is characterised in that first color is red, described
Second color is green, and the 3rd color is white, and the 4th color is blueness.
7. a kind of display panel, it is characterised in that including the organic electroluminescence device as described in claim 5 or 6.
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| CN108321176B (en) | 2018-02-02 | 2020-07-03 | 京东方科技集团股份有限公司 | Flexible display panel, manufacturing method thereof and display device |
| CN114107895A (en) * | 2021-11-26 | 2022-03-01 | 京东方科技集团股份有限公司 | Fine metal mask plate and organic electroluminescent display panel |
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| US6838819B2 (en) * | 2000-06-19 | 2005-01-04 | Lg Electronics Inc. | Full color organic EL display panel, manufacturing method thereof and driving circuit thereof |
| TWI303499B (en) * | 2006-05-30 | 2008-11-21 | Au Optronics Corp | Full-color organic electroluminescence panel and method of fabricating the same |
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| US8153201B2 (en) * | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
| JP2010010112A (en) * | 2008-06-30 | 2010-01-14 | Canon Inc | Display device |
| JP2014154354A (en) * | 2013-02-08 | 2014-08-25 | Japan Display Inc | Light-emitting element display device |
| JP2015069119A (en) * | 2013-09-30 | 2015-04-13 | パナソニック液晶ディスプレイ株式会社 | Display device |
| CN104851901B (en) * | 2014-02-18 | 2018-03-30 | 昆山工研院新型平板显示技术中心有限公司 | A kind of high-resolution OLED display and its manufacture method |
| TWI544621B (en) * | 2015-08-19 | 2016-08-01 | 友達光電股份有限公司 | Pixel array and mask structure thereof |
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