CN105648400A - Alignment device for metal mask plate - Google Patents
Alignment device for metal mask plate Download PDFInfo
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- CN105648400A CN105648400A CN201410724843.6A CN201410724843A CN105648400A CN 105648400 A CN105648400 A CN 105648400A CN 201410724843 A CN201410724843 A CN 201410724843A CN 105648400 A CN105648400 A CN 105648400A
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- mask plate
- metal mask
- oled
- industrial computer
- alignment
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Abstract
The invention discloses an alignment device for a metal mask plate. The alignment device for the metal mask plate comprises a dark box, an image pick-up device, an industrial personal computer, an evaporation plating host PC (Personal Computer), wherein the interior of the dark box comprises a platform, an OLED (Organic Light-Emitting Diode) substrate and a position sensor which are located on the platform; the OLED substrate is fixed on the platform through vacuum adsorption; the image pick-up device is arranged in a vacuum unit and is in signal connection with the industrial personal computer through a circuit; and the image pick-up device is used for acquiring alignment image information of the OLED metal mask plate and transmitting the alignment image information to the industrial personal computer through the circuit. According to the alignment device for the metal mask plate, disclosed by the invention, alignment image information of the OLED substrate is collected by adopting the CCD (Charge Coupled Device) camera and the alignment image information is transmitted to the industrial personal computer and is processed, and secondary alignment on the OLED substrate is realized by a processing signal and preset precision information, therefore the goal that the alignment precision of the OLED metal mask plate is increased is achieved.
Description
Technical field
The invention belongs to OLED technique of display field, it is specifically related to a kind of OLED metal mask plate alignment device.
Background technology
In flat panel display, Organic Light Emitting Diode (OrganicLight-EmittingDiode, OLED) indicating meter is a kind of display device being caused organic materials luminescence by carrier injection and compound. , active illuminating, fast-response speed, wide viewing angle, color frivolous with it be abundant and numerous advantage such as high brightness, low-power consumption, high-low temperature resistant and to be known as by industry be third generation technique of display after liquid-crystal display (LCD). Active OLED (ActiveMatrixOLED, AMOLED) also referred to as Activematric OLED, AMOLED because of by integrated thin-film transistor (TFT) in each pixel and electrical condenser and drive by the method for electrical condenser ME for maintenance, thus can realize large size, resolution panels, be the emphasis of current research and the developing direction of following technique of display. Along with the development of technique of display in modern age, from LCD to AMOLED, Screen Technology relates to TFT, NOVA, IPS, ASV, AMOLED and SuperAMOLED etc., and these technology are mostly mainly updating of the performances such as the resolving power for indicating meter, brightness, contrast gradient, colour gamut, corresponding speed, angle of visibility, sharpness and energy consumption.
AMOLED is as the product with stronger competitive power, its resolving power also constantly refreshes, this is also more and more higher to the requirement of the vacuum evaporation technology in the research of OLED and production process, the contraposition wherein realizing mask plate and substrate requires and is the difficult point in production process and emphasis, current existing evaporated device is due to alignment system landing flat degree, control accuracy, the factor impacts such as MASK Flatness and material, equipment aligning accuracy is generally �� 3��5um, and the repeatedly contraposition in volume production process easily causes contraposition bad, directly affect production efficiency and good rate level.
Summary of the invention
It is an object of the invention to propose a kind of OLED metal mask plate alignment device to solve the not high problem of existing OLED metal mask plate alignment device aligning accuracy.
The technical scheme of the present invention is: a kind of OLED metal mask plate alignment device, comprise camera bellows, shooting device, industrial computer and the main PC of evaporator, comprise platform and the oled substrate being positioned on platform and position transducer in described camera bellows, described oled substrate is fixed on platform by vacuum suck;
Described shooting device is installed in vacuum unit and is connected with industrial computer signal by circuit, and described shooting device is for obtaining the contraposition graphic information of OLED metal mask plate and by described circuit, described contraposition graphic information is passed to industrial computer;
Described industrial computer is connected by the main PC signal of circuit and evaporator, for communicating between the main PC of industrial computer and evaporator.
The useful effect of the present invention: the mask plate alignment device of the present invention is by adopting the contraposition image of shooting device collection oled substrate and contraposition graphic information is passed to industrial computer and processes, described processing signals and the precision information pre-set realize two times to oled substrate location, thus realize the object improving OLED metal mask plate aligning accuracy.
Accompanying drawing explanation
Fig. 1 is the functional block diagram of the alignment device of the present invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the invention will be further elaborated.
A kind of OLED metal mask plate alignment device of the present invention is as shown in Figure 1, comprise camera bellows 1, shooting device 2 industrial computer 3 and the main PC of evaporator, comprising platform 11 and the oled substrate 12 being positioned on platform and position transducer 13 in described camera bellows 1, described oled substrate is fixed on platform by vacuum suck; Described ccd video camera is installed in vacuum unit 1 and is connected with industrial computer signal by circuit, and described I2C bus is for obtaining the contraposition graphic information of OLED metal mask plate and by described circuit, described contraposition graphic information is passed to industrial computer; Described industrial computer is connected by the main PC signal of circuit and evaporator, for communicating between the main PC of industrial computer and evaporator.
Here OLED metal mask plate alignment device also comprises the indicating meter realizing signal with industrial computer and being connected, for information such as display and control parameter and states.
Here industrial computer PC main with evaporator realizes signal especially by I2C bus and is connected.
Here industrial computer comprises image pick-up card, data processing unit and input/output interface.
Here shooting device 2 is specially high definition ccd video camera.
The principle of work of described alignment device is: after the substrate being loaded with the tested part of OLED arrives test zone, position transducer produces trivet tri-colour triggering level signal because receiving substrate information in place camera bellows door is closed, image pick-up card sends signal and triggers high accuracy CCD camera and carry out figure collection after receiving trivet tri-colour triggering level signal, the annular LED illumination being now positioned at camera bellows is mended photosystem and is in the state of opening and obtains contraposition image more accurately with auxiliary ccd video camera.
The contraposition graphic information that high definition ccd video camera collects is passed to figure capture card by signal connecting line road and is input to the data handling system of industrial computer after the conversion of figure capture card, after being processed by software analysis, the contraposition image of tested oled substrate is displayed in indicating meter end. User can according to position accuracy demand, desired location standard, and imports these data into data handling system, calculates the final location parameter adjusted value of evaporator by data handling system, i.e. the error value in X, Y, �� tri-directions. By exporting, I2C bus passes to the main PC of evaporator to parameter adjustment value, and then to contraposition parameter and then adjustment, it is to increase the precision of contraposition.
High definition ccd video camera is when carrying out image and gather, tested oled substrate is in the state do not lighted, and the organic materials figure steaming plating is not easily differentiated, for ensureing that the image collected is easy to by system identification, photosystem is mended in special employing annular LED illumination, it is to increase the resolving power of figure.
In order to ensure the precision of test, adopt vacuum suction system to be adsorbed on platform by tested oled substrate, avoid causing miscount because the minute movement of substrate causes image deviations.
The those of ordinary skill of this area, it will be appreciated that embodiment described here is the principle in order to help reader understanding the present invention, should be understood to that protection scope of the present invention is not limited to such special statement and embodiment. The those of ordinary skill of this area can make various other various concrete distortion and combination of not departing from essence of the present invention according to these technology disclosed by the invention enlightenment, and these distortion and combination are still in protection scope of the present invention.
Claims (2)
1. a metal mask plate alignment device, comprise camera bellows, shooting device, industrial computer and the main PC of evaporator, it is characterized in that, comprising platform and the oled substrate being positioned on platform and position transducer in described camera bellows, described oled substrate is fixed on platform by vacuum suck;
Described shooting device is installed in vacuum unit and is connected with industrial computer signal by circuit, and described ccd video camera is for obtaining the contraposition graphic information of OLED metal mask plate and by described circuit, described contraposition graphic information is passed to industrial computer;
Described industrial computer is connected by the main PC signal of circuit and evaporator, for communicating between the main PC of industrial computer and evaporator;
Described OLED metal mask plate alignment device also comprises the indicating meter realizing signal with industrial computer and being connected, for information such as display and control parameter and states;
Described industrial computer PC main with evaporator realizes signal especially by I2C bus and is connected.
2. metal mask plate alignment device according to claim 1, described industrial computer comprises image pick-up card, data processing unit and input/output interface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410724843.6A CN105648400A (en) | 2014-12-03 | 2014-12-03 | Alignment device for metal mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410724843.6A CN105648400A (en) | 2014-12-03 | 2014-12-03 | Alignment device for metal mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105648400A true CN105648400A (en) | 2016-06-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410724843.6A Pending CN105648400A (en) | 2014-12-03 | 2014-12-03 | Alignment device for metal mask plate |
Country Status (1)
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| CN (1) | CN105648400A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106601654A (en) * | 2016-12-28 | 2017-04-26 | 武汉华星光电技术有限公司 | Placement method and device |
| WO2018205361A1 (en) * | 2017-05-08 | 2018-11-15 | 武汉华星光电技术有限公司 | Vapour deposition apparatus |
| WO2019033535A1 (en) * | 2017-08-16 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | Evaporation machine platform device |
-
2014
- 2014-12-03 CN CN201410724843.6A patent/CN105648400A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106601654A (en) * | 2016-12-28 | 2017-04-26 | 武汉华星光电技术有限公司 | Placement method and device |
| CN106601654B (en) * | 2016-12-28 | 2019-04-30 | 武汉华星光电技术有限公司 | It throws piece method and throws sheet devices |
| WO2018205361A1 (en) * | 2017-05-08 | 2018-11-15 | 武汉华星光电技术有限公司 | Vapour deposition apparatus |
| WO2019033535A1 (en) * | 2017-08-16 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | Evaporation machine platform device |
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Application publication date: 20160608 |