CN105633301A - Method for reducing OLED color mixture defect and OLED display panel - Google Patents
Method for reducing OLED color mixture defect and OLED display panel Download PDFInfo
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- CN105633301A CN105633301A CN201410653388.5A CN201410653388A CN105633301A CN 105633301 A CN105633301 A CN 105633301A CN 201410653388 A CN201410653388 A CN 201410653388A CN 105633301 A CN105633301 A CN 105633301A
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Abstract
The present invention provides a method for reducing OLED color mixture defect and an OLED display panel. According to the method, a spacer layer is manufactured on a substrate for surrounding each evaporation area, during the process of OLED evaporation, evaporation gas only forms one layer of thin film on a preset evaporation area (i.e., a pixel unit area), and for a non-preset evaporation area (i.e., a non-pixel unit area), due to blocking of the circular spacer layer, the evaporation gas cannot enter the non-pixel unit area to cause shadow and color mixture situations, thereby improving device yield.
Description
Technical field
The present invention relates to display screen and manufacture field, be specifically related to a kind of method reducing OLED colour mixture defect and OLED display panel.
Background technology
Along with the development of society, mobile phone, computer, TV are required for using visual screen, and people are also more and more higher to the demand of display screen. OLED, as a kind of self-emitting display technology, adopts very thin coating of organic material and glass substrate, when there being electric current to pass through, these organic materials will be luminous, and OLED display screen visible angle is big, and can significant saving electric energy, be widely used.
In the manufacture process of OLED, need between glass substrate and metal fine mask plate to leave certain space, have influence on luminescent layer to avoid metal fine mask plate directly to contact with glass substrate, in turn result in finished product and damage. In order to realize above-mentioned space, it is necessary to be provided with wall between metal fine mask plate and glass substrate, what be generally spaced layer is arranged at the pixel region both sides needing to be deposited with in single column.
OLED preparation process generally comprises an evaporation process, uses this technique to form a tunic layer at pixel region. Owing to there is certain space between glass substrate and metal fine mask plate, and be deposited with around district and generally the obstacle being arranged to restriction evaporation scope, so according to evaporation process is deposited with the characteristic linearly carried out, the expanded range forming evaporation district in evaporation process can be caused, thus causing the shadow effect (shadoweffect) in evaporation district, and then may result in the generation risk of colour mixture (colormixing).
The partial schematic diagram during evaporation being illustrated in figure 1 in prior art OLED, has certain gap, is provided with columnar interval layer 3 in gap between substrate 1 and metal fine mask plate 2. When carrying out evaporation process, it is also desirable to substrate 1 surface between adjacent spacer 3 forms an organic film 4, namely the substrate surface of default evaporation district S1 shown in the figure forms organic film 4, but not presets evaporation district S2 and be formed without corresponding organic film.
But in a practical situation, technical staff finds to be difficulty with above-mentioned ideal situation. As it can be seen, be deposited with in units of district by one, only it is supported by two columnar interval layers 3 between substrate 1 and metal fine mask plate 2. In evaporation process, deposition material can move along with shown by arrow direction, owing between default evaporation district S1 and non-default evaporation district S2 being conducting, final not only at default evaporation district S1 formation rete 4, it is also possible to because shadow effect leaves deposition material at non-default evaporation district S2 simultaneously, and then the generation of generation colour mixture situation, reduce yield of devices.
Chinese patent (CN202786401U) discloses a kind of OLED evaporation mask plate that can improve evaporation quality, this evaporation mask plate includes at least one deposition unit being arranged on mask plate body, each deposition unit comprises in regularly arranged evaporation breach, and mask plate body is positioned at the thickness profile thickness less than this mask plate body at its deposition unit place. Evaporation mask plate disclosed in this invention, by being configured to less by the thickness of the mask plate body at its deposition unit place, thus reducing the sagging produced due to gravity impact, and then reduces the quality problems that shadow effect causes.
But this patent is in evaporation process, it would still be possible to occur deposition material to enter to non-default evaporation district, and then cause that the situation of colour mixture produces, reduce OLED yield.
The preparation method that Chinese patent (CN1329458A) discloses a kind of organic electroluminescence device, the method includes: on transparent glass substrate or flexible base board, deposit transparent conductive film tin indium oxide etc. are as the first electrode of device; Rotary coating the first insulating barrier while of on gap between the first electrode and electrode; First insulating barrier continues rotary coating the second insulating barrier; Above-mentioned second insulating barrier is made directly photoetching; With the second layer pattern for mask, the first insulating barrier development is formed the multiple parallel to each other vertical element orthogonal with above-mentioned first electrode; Over the second dielectric and eliminate evaporation organic layer on the transparent conductive film of two-layer insulating polymer and transparent conductive film lines gap; Evaporated metal layer on organic layer.
This preparation method that patent disclosed that a kind of organic electroluminescence device, it needs to use evaporation process, and in evaporation process, deposition material still may enter non-default evaporation district and then leave deposition material in non-default evaporation district, in turn resulting in luminescent device cannot normal operation.
Summary of the invention
The invention provides a kind of method reducing OLED colour mixture defect, it is set to ring-type by the wall between substrate and metal fine mask plate, in evaporation process, deposition material can be prevented effectively from enter the default evaporation district being bordered by pixel and then reduce the generation of colour mixture situation, improve generation yield, technique is simple simultaneously, it is not necessary to extra increase equipment and material, it is ensured that production cost.
The technical solution used in the present invention is:
A kind of method of oled panel pixel evaporation, wherein,
Thering is provided a substrate with multiple default evaporation district, multiple pixels of the plurality of default evaporation district correspondence oled panel, and close on and be additionally provided with wall on the substrate in described default evaporation district, described wall surrounds described default evaporation district;
Evaporation process is adopted to form pixel thin film in described default evaporation district;
Wherein, described pixel thin film covers the surface being arranged in described wall institute enclosing region substrate.
Above-mentioned method, wherein, described wall enclosing region comprises described default evaporation district and the non-default evaporation district of part.
Above-mentioned method, wherein, when carrying out evaporation process, it is provided that one has the mask plate of opening, and the opening of described mask plate is directed at described default evaporation district, forms pixel thin film in described default evaporation region;
In evaporation process, described wall stops that deposition material enters part beyond wall enclosing region.
Above-mentioned method, wherein, described mask plate is metal fine mask plate.
Above-mentioned method, wherein, described metal fine mask plate is invar alloy.
Above-mentioned method, wherein, the two ends up and down of described wall contact described mask plate and described substrate respectively.
Above-mentioned method, wherein, the described opening of described mask plate is horn-like, and the opening size of close described substrate is less than other end opening size.
Above-mentioned method, wherein, adopts following steps preparation to form described wall:
Thering is provided a substrate, be coated with one layer of Organic substance in described substrate surface, after exposure imaging, form wall on the substrate, described default evaporation district is surrounded by described wall.
Above-mentioned method, wherein, described Organic substance is photoresist.
Above-mentioned method, wherein, adopts a shade with annular patterns to be exposed technique.
Above-mentioned method, wherein, described substrate is glass substrate.
Present invention also offers a kind of OLED display panel simultaneously, wherein, comprise multiple OLED pixel, be positioned on a substrate, described each OLED pixel comprises OLED material and is deposited with on described substrate, and contiguous described OLED material comprises a wall;
Wherein, described OLED material is surrounded by described wall.
Above-mentioned display floater, wherein, described wall is annular.
Techniques below effect can be brought owing to present invention employs above technical scheme:
1. avoid deposition material to enter into non-evaporation district in evaporation process, it is to avoid the generation of colour mixture situation, improve the yield of OLED;
2. being fully compatible with evaporation process of the prior art, it is not necessary to increase extra equipment and material, by adopting the shade with annular patterns can prepare the wall of ring-type after being exposed and developing, technique is simple.
Accompanying drawing explanation
By reading detailed description non-limiting example made with reference to the following drawings, the present invention and feature, profile and advantage will become more apparent upon. The part that labelling instruction identical in whole accompanying drawings is identical. Deliberately it is not drawn to scale accompanying drawing, it is preferred that emphasis is the purport of the present invention is shown.
Sectional view when Fig. 1 is carry out evaporation process in prior art;
Fig. 2 is present invention sectional view when carrying out evaporation process;
Fig. 3 is that the present invention carries out top view during evaporation process;
Fig. 4-7 prepares the flow chart of wall for the present invention;
Fig. 8 is the OLED wall schematic diagram of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described:
The invention provides a kind of method reducing OLED colour mixture defect, be applied in OLED evaporation process, in conjunction with shown in Fig. 2 and Fig. 3, it is provided that a substrate 1, it is preferred that this substrate is glass substrate.
Substrate 1 surface is formed with wall 3, and this wall 3 closes on presets evaporation district S1, it is preferred that, this wall is photoresist, and default evaporation district S1 for annular and is surrounded by this wall 3, wherein, this presets the area that evaporation district S1 area surrounds less than or equal to this wall 3 annular.
One mask plate 2 with evaporation hole is provided, this mask plate 2 is formed with wall and contacts, and just mask plate 2 evaporation hole be directed at described default evaporation district S1, vapor deposition source forms pixel thin film 4 in the region that this wall 3 annular is surrounded, furthermore, it is understood that the region that this wall 3 annular is surrounded comprises presets evaporation district S1 and the non-default evaporation district S2 of part. Preferably, this mask plate is metal fine mask plate, and material is invar alloy (Invar); Meanwhile, the opening that this metal fine mask plate is formed is horn-like, and the bottom opening near substrate is less than top opening size, when evaporation, it is ensured that deposition material more intensively forms pixel thin film at default evaporation district S1.
In the process of evaporation, the direction of evaporation is radial linearly outside along vapor deposition source, in the prior art, due between default evaporation district S1 and non-default evaporation district S2 for conducting, deposition material can enter non-default evaporation district S2 and the substrate surface in this region leaves deposition material, in turn result in shade and mixed color effect, affect the yield of OLED screen curtain. And the present invention forms the region of a Guan Bi by adopting ring-like spacer floor 3 to be surrounded by default evaporation district S1, the effect of stop is played at evaporation process intermediate interlayer 3, limit deposition material and enter into the region of non-default evaporation district S2, and then avoid causing the generation of colour mixture and shadow condition.
It is same as the preparation method that present invention also offers a kind of ring-like spacer layer, comprises the following steps:
First a substrate 1 is provided, it is preferred that this substrate 1 is glass substrate, as shown in Figure 4.
Then Photoresisting coating machines is used uniformly to be coated with one layer of Organic substance on substrate 1 surface, it is preferred that in glass substrate 1 surface-coated a layer thickness uniform light resist 5, as shown in Figure 5. Then the shade 6 adopting a customization is exposed, and selects the shade 6 with annular patterns to be exposed, as shown in Figure 6; Proceed developing process afterwards and form the residue photoresist of ring-type on substrate 1 as wall. As it is shown in fig. 7, after adopting the shade of customization to be exposed and develop, the photoresist of ring-type can be formed on glass substrate 1 surface as wall 6 '. Then on wall, place metal fine mask plate again, and make the region that the wall of ring-type surrounds be exposed to the opening that metal fine mask plate is defined, the region that the wall of this ring-type surrounds comprises required presets evaporation district S1, i.e. the pixel region of OLED and the non-default evaporation district S2 of part. Well limit due to the wall 3 of ring-type and reduce S2 region, non-default evaporation district, can stop that deposition material extends to non-default evaporation district S2 in a large number, it is to avoid cause the situation of colour mixture to produce.
Owing to the present invention adopts above technical scheme, pixel region is surrounded by the wall preparing ring-type between glass substrate 1 and metal fine mask plate 2, is then separated by ring-like spacer layer 3 between neighbor. When being deposited with, deposition material is by the opening between metal fine mask plate 2, the region that ring-like spacer layer 3 is surrounded carries out plated film, namely a rete 4 is formed in the region that the wall 3 on substrate 1 surface surrounds, owing to being separated by ring-like spacer layer 3 between neighbor, and then deposition material will not be deposited with township's woods pixel, it is to avoid cause mixed color effect.
Present invention also offers a kind of OLED display panel, as shown in Figure 8, comprise multiple OLED pixel (not shown), each OLED pixel is respectively positioned on a substrate 1, each OLED pixel comprises OLED material and is deposited with in default evaporation district S1 on substrate 1, and contiguous each OLED material comprises a wall 3; Wherein, OLED material is surrounded by wall 3.
Further, please continue to refer to Fig. 8, present invention also offers a kind of OLED wall, this wall 3 is annular and the default evaporation district S1 and the non-default evaporation district S2 of part on basic 1 surface is surrounded, and its material is photoresist. When carrying out OLED evaporation, the one metal fine mask plate with evaporation hole is provided, and by the default evaporation district S1 (specifically can refer to the present invention and accompanying drawing 2 is described) of evaporation hole alignment substrate surface, vapor deposition source forms a pixel thin film at the non-default evaporation district S2 of default evaporation district S1 and part, and this film size is subject to the restriction of ring-like spacer layer. Owing to evaporation district S1 for annular and is surrounded by OLED wall 3 provided by the invention completely, when being deposited with, wall 3 forms the effect stopped, deposition material is made only to form pixel thin film at single pixel coverage, pixel thin film then will not be formed in its adjacent non-pixel region, the situation avoiding colour mixture produces, and improves product yield.
In sum, owing to present invention employs above technical scheme, when carrying out evaporation process, the wall preparing ring-type at substrate surface can be good at playing barrier effect, avoid deposition material to enter the non-default evaporation district being bordered by pixel and in turn result in the situation of colour mixture, improve the yield of OLED.
Above presently preferred embodiments of the present invention is described. It is to be appreciated that the invention is not limited in above-mentioned particular implementation, the equipment and the structure that are not wherein described in detail to the greatest extent are construed as and are practiced with the common mode in this area; Any those of ordinary skill in the art, without departing under technical solution of the present invention ambit, all may utilize the method for the disclosure above and technology contents and technical solution of the present invention is made many possible variations and modification, or it being revised as the Equivalent embodiments of equivalent variations, this has no effect on the flesh and blood of the present invention. Therefore, every content without departing from technical solution of the present invention, the technical spirit of the foundation present invention, to any simple modification made for any of the above embodiments, equivalent variations and modification, all still falls within the scope of technical solution of the present invention protection.
Claims (13)
1. the method for an oled panel pixel evaporation, it is characterised in that
Thering is provided a substrate with multiple default evaporation district, multiple pixels of the plurality of default evaporation district correspondence oled panel, and close on and be additionally provided with wall on the substrate in described default evaporation district, described wall surrounds described default evaporation district;
Evaporation process is adopted to form pixel thin film in described default evaporation district;
Wherein, described pixel thin film covers the surface being arranged in described wall institute enclosing region substrate.
2. the method for claim 1, it is characterised in that described wall enclosing region comprises described default evaporation district and the non-default evaporation district of part.
3. method as claimed in claim 1 or 2, it is characterised in that when carrying out evaporation process, it is provided that has the mask plate of opening, and the opening of described mask plate is directed at described default evaporation district, forms pixel thin film in described default evaporation region;
In evaporation process, described wall stops that deposition material enters part beyond wall enclosing region.
4. the method for claim 1, it is characterised in that described mask plate is metal fine mask plate.
5. method as claimed in claim 4, it is characterised in that described metal fine mask plate is invar alloy.
6. method as claimed in claim 3, it is characterised in that the two ends up and down of described wall contact described mask plate and described substrate respectively.
7. method as claimed in claim 3, it is characterised in that the described opening of described mask plate is horn-like, and the opening size of close described substrate is less than other end opening size.
8. the method for claim 1, it is characterised in that adopt following steps preparation to form described wall:
Thering is provided a substrate, be coated with one layer of Organic substance in described substrate surface, after exposure imaging, form wall on the substrate, described default evaporation district is surrounded by described wall.
9. method as claimed in claim 8, it is characterised in that described Organic substance is photoresist.
10. method as claimed in claim 8, it is characterised in that adopt a shade with annular patterns to be exposed technique.
11. the method for claim 1, it is characterised in that described substrate is glass substrate.
12. an OLED display panel, it is characterised in that comprise multiple OLED pixel, being positioned on a substrate, described each OLED pixel comprises OLED material and is positioned on described substrate, and contiguous described OLED material comprises a wall;
Wherein, described OLED material is surrounded by described wall.
13. display floater as claimed in claim 12, it is characterised in that described wall is annular.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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CN201410653388.5A CN105633301A (en) | 2014-11-17 | 2014-11-17 | Method for reducing OLED color mixture defect and OLED display panel |
TW104112502A TW201619415A (en) | 2014-11-17 | 2015-04-17 | Method for pixel evaporating of OLED panel and OLED display panel thereof |
JP2015225156A JP2016100339A (en) | 2014-11-17 | 2015-11-17 | Oled panel pixel thin film deposition method and oled display panel |
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CN201410653388.5A CN105633301A (en) | 2014-11-17 | 2014-11-17 | Method for reducing OLED color mixture defect and OLED display panel |
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CN201410653388.5A Pending CN105633301A (en) | 2014-11-17 | 2014-11-17 | Method for reducing OLED color mixture defect and OLED display panel |
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CN (1) | CN105633301A (en) |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1722917A (en) * | 2004-06-25 | 2006-01-18 | Lg.菲利浦Lcd株式会社 | Organic electroluminescence device and fabrication method thereof |
CN101049049A (en) * | 2004-10-28 | 2007-10-03 | 先锋株式会社 | Organic electroluminescence display panel and method for manufacturing the same |
CN103311445A (en) * | 2012-12-24 | 2013-09-18 | 上海天马微电子有限公司 | OLED (Organic Light Emitting Diode) encapsulation structure and forming method thereof |
CN103545457A (en) * | 2013-10-28 | 2014-01-29 | 京东方科技集团股份有限公司 | Luminescent device, array substrate, display device and method for manufacturing luminescent device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3401356B2 (en) * | 1995-02-21 | 2003-04-28 | パイオニア株式会社 | Organic electroluminescent display panel and method of manufacturing the same |
JP3809758B2 (en) * | 1999-10-28 | 2006-08-16 | ソニー株式会社 | Display device and manufacturing method of display device |
JP4078813B2 (en) * | 2001-06-12 | 2008-04-23 | ソニー株式会社 | Film forming apparatus and film forming method |
JP3481232B2 (en) * | 2002-03-05 | 2003-12-22 | 三洋電機株式会社 | Manufacturing method of organic electroluminescence panel |
JP4233882B2 (en) * | 2003-01-30 | 2009-03-04 | 株式会社アルバック | Manufacturing method of mask for vapor deposition |
JP5534093B1 (en) * | 2013-01-11 | 2014-06-25 | 大日本印刷株式会社 | Metal mask and metal mask manufacturing method |
-
2014
- 2014-11-17 CN CN201410653388.5A patent/CN105633301A/en active Pending
-
2015
- 2015-04-17 TW TW104112502A patent/TW201619415A/en unknown
- 2015-11-17 JP JP2015225156A patent/JP2016100339A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1722917A (en) * | 2004-06-25 | 2006-01-18 | Lg.菲利浦Lcd株式会社 | Organic electroluminescence device and fabrication method thereof |
CN101049049A (en) * | 2004-10-28 | 2007-10-03 | 先锋株式会社 | Organic electroluminescence display panel and method for manufacturing the same |
CN103311445A (en) * | 2012-12-24 | 2013-09-18 | 上海天马微电子有限公司 | OLED (Organic Light Emitting Diode) encapsulation structure and forming method thereof |
CN103545457A (en) * | 2013-10-28 | 2014-01-29 | 京东方科技集团股份有限公司 | Luminescent device, array substrate, display device and method for manufacturing luminescent device |
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US11155913B2 (en) | 2017-01-24 | 2021-10-26 | Boe Technology Group Co., Ltd. | Evaporation mask plate, manufacturing method thereof and evaporation method |
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JP2016100339A (en) | 2016-05-30 |
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