CN105632578A - Linear driving type X-ray monochromator and application thereof - Google Patents

Linear driving type X-ray monochromator and application thereof Download PDF

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CN105632578A
CN105632578A CN201510105438.0A CN201510105438A CN105632578A CN 105632578 A CN105632578 A CN 105632578A CN 201510105438 A CN201510105438 A CN 201510105438A CN 105632578 A CN105632578 A CN 105632578A
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support arm
flexure crystal
track
crystal
ray
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CN105632578B (en
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范真
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SHENZHEN HELEEX ANALYTICAL INSTRUMENT CO Ltd
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SHENZHEN HELEEX ANALYTICAL INSTRUMENT CO Ltd
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Abstract

The invention discloses a linear driving type X-ray monochromator and application thereof. The linear driving type X-ray monochromator includes an incidence slit, a dispersion device and an emergence slit; the dispersion device is an equiangular and equidistant virtual Rowland circle device composed of two tracks and corresponding supporting arms; the incidence slit, a flexure crystal and the emergence slit can constantly satisfy Rowland circle conditions and Prague diffraction conditions in the movement of the incidence slit, the flexure crystal and the emergence slit; an interval between the incidence slit and the flexure crystal and an interval between the flexure crystal and the emergence slit are controlled through linear driving, so that different wavelengths of monochromatized X-rays can be selected. With one such set of monochromator adopted, the monochromatization of X-rays of continuous wavelengths can be realized. The monochromator can be widely applied to devices or instruments which require the monochromatization of X-rays, such as X-ray fluorescence spectrophotometer and X-ray diffractometers.

Description

Straight line driving X ray monochromator and application thereof
Technical field
The present invention relates to Xray fluorescence spectrometer technical field, specifically disclosed a kind of straight line driving X ray monochromator and application thereof.
Background technology
XRF, i.e. X-ray fluorescence spectra analysis (XRayFluorescence). One typical Xray fluorescence spectrometer (XRF) is made up of excitaton source (X-ray tube) and detection system. X-ray tube produces incident X-rays (primary X-ray), excites sample. Element in the sample being stimulated can launch secondary x rays and characteristic fluorescence, and the secondary x rays that different elements is launched has specific energy response and wavelength characteristic. Detection system measures energy and the intensity of these secondary x rays radiating out.
Monochromatic device required for the light monochrome chemical conversion sent by light source is called monochromator, is the optical system of the light selecting a certain wavelength from the wavelength continuous print spectrum that light source is launched. Traditional monochromator is made up of entrance slit, collimating mirror, dispersion element, object lens and exit slit. Wherein dispersion element is critical component, and effect is that complex light is resolved into monochromatic light. Entrance slit is used for limiting veiling glare and enters monochromator, and collimating mirror enters dispersion element after incident beam becomes collimated light beam. Object lens will come from the parallel light focusing of dispersion element in exit slit. Exit slit is used for limiting passband width.
X ray monochromator is the device utilizing crystal diffraction effect to obtain homogeneous X-ray bundle. At present, the X ray of the continuous wavelength for being sent by X-ray tube carries out the device of monochromatization, mostly is fixed plane or concave surface crystal, and crystal is fixed, and each device can only obtain the homogeneous X-ray of a kind of wavelength.
Summary of the invention
It is an object of the invention to provide straight line driving X ray monochromator, it controls the spacing of entrance slit and flexure crystal by linear drives, realizing the different wave length of the X ray after selecting monochromatization, a set of monochromator can realize the monochromatization of the X ray of continuous wavelength.
Further object is that the application that a kind of straight line driving X ray monochromator is provided.
The present invention provides a kind of straight line driving X ray monochromator, and including entrance slit, dispersion means and exit slit, wherein, described dispersion means includes:
First track, mobile for flexure crystal order thereon, its start position is provided with entrance slit;
Second track, which is provided with exit slit, and mobile for exit slit order thereon, the start position of the second track and flexure crystal couple on the first track;
Fixing bar, for stationary curved crystal, its start position is installed with flexure crystal, the other end and the first support arm, the second support arm coupling;
First support arm, is connected to the start position of the first track and the endpoint location of fixing bar; With
Second support arm, is connected to the exit slit position of the second track and the endpoint location of fixing bar;
First support arm, the second support arm and fixing bar couple at the endpoint location of fixing bar, and the first support arm, the second support arm are identical with the length of fixing bar, are the radius of curvature of flexure crystal;
Along with flexure crystal order on the first track is mobile, accordingly, exit slit order on the second track is mobile, and entrance slit, flexure crystal and exit slit be always positioned at fixing bar, the first support arm, the second support arm three coupled end for the center of circle, on the same virtual Rowland circle that the radius of curvature of flexure crystal is radius.
The focusing diffraction of X ray be must simultaneously meet rowland condition and Bragg diffraction condition by flexure crystal. Rowland condition requires that entrance slit, flexure crystal diffraction center and exit slit should be on the Rowland circle that same radius is R, and R is the radius of curvature of flexure crystal. Bragg diffraction condition requires that X ray reflection should obey bragg's formula:
2dsin ��=n �� formula (1)
In formula (1), d is the interplanar distance of flexure crystal, unit nanometer nm;
�� is the angle of diffraction, diffraction angle=incidence angle ��1=output angle ��2;
N is diffraction progression, for the integer be more than or equal to 1, generally only considers n=1;
�� is by the X-ray wavelength of monochromatization, unit nanometer nm.
Meanwhile, in Rowland circle, there is following relation:
Sin ��=N/ (2R) formula (2)
In formula (2), R is Rowland circle radius;
N is the distance between entrance slit A and flexure crystal point S.
Formula (2) is substituted in formula (1), can obtain:
Select the spacing N of different entrance slits and flexure crystal, can after exit slit place obtains different monochromatization the X ray of certain certain fixed wave length ��, both relations meet:
N=Rn ��/d formula (3)
In formula (3), N is the spacing of entrance slit and flexure crystal; �� is by the X-ray wavelength of monochromatization; D is the interplanar distance of flexure crystal; N is diffraction progression, for the integer be more than or equal to 1; R is the radius of curvature of flexure crystal, that is to say Rowland circle radius.
When the interplanar distance of the flexure crystal used is d, when Rowland circle radius is R, if needing to obtain, at exit slit B place, the X ray that wavelength is ��, only motor need to be made to move to N and meeting formula (3) conditional.
It is also preferred that the left the first track is provided with the first slide block for driving flexure crystal order movement, the first slide block is driven by the first motor;
Second track is provided with the second slide block for driving exit slit order movement, and the second slide block is driven by the second motor;
First motor and the second motor keep acting in agreement.
First motor and the second motor keep acting in agreement, the length that can realize the first support arm, the second support arm and fixing bar is the radius of curvature of flexure crystal, and first support arm remain equal with the angle between fixing bar, the second support arm with the angle between fixing bar so that entrance slit, flexure crystal and detector are always positioned on same Rowland circle.
Preferably, described motor is linear electric motors.
It is also preferred that the left the first track is provided with the first slide block for driving flexure crystal order movement, the first slide block is driven by the first motor;
First slide block is provided with the 3rd support arm, first slide block is between the first track start position and flexure crystal position, the other end of the 3rd support arm is movably attached on fixing bar, and the 3rd support arm fixing point on the first slide block is equal with the length of the 3rd support arm to the distance of flexure crystal;
Second track is provided with the 4th support arm, one end of 4th support arm is between the second track start position and exit slit position, the other end of the 4th support arm is movably attached on fixing bar, and the 4th support arm fixing point on the second track is equal with the length of the 4th support arm to the distance of flexure crystal;
3rd support arm, the 4th support arm length equal, and both end points coupled in common are on fixing bar.
Preferably, the 3rd support arm, the position that the end points of the 4th support arm couples on fixing bar are provided with the 3rd slide block, for driving end points order movement on fixing bar of the 3rd support arm, the 4th support arm.
Preferably, described motor is linear electric motors.
Adopt the 3rd support arm and the 4th support arm structure of coupling, single motor is only needed to drive flexure crystal, and by action principle that mechanism's power is conducted, the function synchronizing to drive exit slit can be realized, so that angle, the second support arm between the first support arm with fixing bar remain equal with the angle between fixing bar, so that entrance slit, flexure crystal and exit slit are always positioned on same Rowland circle.
It is also preferred that the left flexure crystal position is provided with flexure crystal bracket, for support flexure crystal, described flexure crystal bracket and fixing bar unitary design or be coupled as one.
It is also preferred that the left the length of described first support arm, the second support arm is 1mm-1000mm.
It is also preferred that the left flexure crystal is LiF (200), LiF (220), Ge (111), PET, TAIP, TAM, ADP, KAP, InSb, E.D.D.T, PE, Gypsum Fibrosum or topaz.
It is also preferred that the left flexure crystal is cylinder concave surface crystal or sphere crystal, corresponding, exit slit place can obtain the hot spot of wire or point-like respectively.
The present invention provides above-mentioned straight line driving X ray monochromator to need the application in the device of the monochromatic X ray or instrument at Xray fluorescence spectrometer, X-ray diffractometer etc.
Beneficial effects of the present invention has:
1, the straight line driving X ray monochromator of the present invention, the spacing of the entrance slit spacing with flexure crystal and flexure crystal and exit slit is controlled by linear drives, realizing the different wave length of the X ray after selecting monochromatization, a set of monochromator can realize the monochromatization of the X ray of continuous wavelength.
2, the dispersion means of the present invention, adopts be made up of two tracks and corresponding support arm and adopts the equidistantly virtual Rowland circle device of isogonism, and simple in construction is easy to maintenance, and the X-ray wavelength uninterruptedly diffraction light splitting continuously when can realize flexure crystal.
3, the Rowland circle device that isogonism is equidistantly virtual both can synchronize to drive by bi-motor, it is also possible to utilizes power conduction principle to save as single motor driving by setting up two support arms.
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
Accompanying drawing explanation
Fig. 1 is the structural principle schematic diagram of the straight line driving X ray monochromator of the present invention.
Fig. 2 is the structural representation of single motor driving X ray monochromator of the embodiment of the present invention 1.
Fig. 3 is the structural representation of the Dual-motors Driving X ray monochromator of the embodiment of the present invention 2.
In figure, 1-the first track, 2-the second track, 3-fixes bar, 4-the first support arm, 5-the second support arm, 6-the 3rd support arm, 7-the 4th support arm, 8-flexure crystal, 9-the first slide block, 10-the second slide block, 11-the 3rd slide block, 12-the first motor, 13-the second motor.
Detailed description of the invention
The present invention can be well understood to further by the specific embodiment of invention now given below, but they are not limitation of the invention. In specific embodiment, the part of not narration in detail is to adopt prior art, known technology means and industry standard to obtain.
Embodiment 1
Incorporated by reference to referring to attached Fig. 1 and 2, a kind of single motor provided by the invention drives X ray monochromator, including entrance slit, dispersion means and exit slit; Dispersion means therein includes:
First track 1, mobile for flexure crystal 8 order thereon, its start position is X ray entrance slit A place;
Second track 2, mobile for X ray exit slit B order thereon, its start position and flexure crystal 8 are coupled in S place on the first track;
Fixing bar 3, for stationary curved crystal 8, its start position is provided with flexure crystal 8, the other end and first support arm the 4, second support arm 5 and is coupled in G place;
First support arm 4, is connected to the start position of the first track 1 and the end points G position of fixing bar 3; With
Second support arm 5, is connected to the X ray exit slit position B of the second track 2 and the end points G position of fixing bar 3;
First support arm the 1, second support arm 2 and fixing bar 3 couple in the end points G position three of fixing bar, and first support arm the 1, second support arm 2 is identical with the length of fixing bar 3, is the radius of curvature R of flexure crystal 8;
First track 1 is provided with the first slide block 9 for driving flexure crystal 8 order movement, and the first slide block is driven 12 by the first motor;
First slide block 9 is provided with the 3rd support arm 6, and its fixing point is positioned on the first slide block 9, and the other end of the 3rd support arm 6 is movably attached on fixing bar 3, and the 3rd support arm 6 fixing point is equal with the length of the 3rd support arm 6 to the distance of flexure crystal 8;
Second track 2 is provided with the 4th support arm 7, its fixing point is between the second track start position S and exit slit position B, the other end of the 4th support arm 7 is movably attached on fixing bar 3, and the 4th support arm 7 fixing point is equal with the length of the 4th support arm 7 to the distance of flexure crystal 8;
The length of the 3rd support arm the 6, the 4th support arm 7 is equal, and both end points coupled in common are on fixing bar 3;
The position that the end points of the 3rd support arm the 6, the 4th support arm 7 couples on fixing bar 3 is provided with the 3rd slide block 11, mobile for the end points order on fixing bar 3 driving the 3rd support arm the 6, the 4th support arm 7;
Along with flexure crystal S order on the first track 1 is mobile, accordingly, X ray exit slit B order on the second track 2 is mobile, and angle, the second support arm 2 between the first support arm 1 with fixing bar 3 remain equal with the angle between fixing bar 3, namely entrance slit A, flexure crystal S and exit slit B be always positioned at fixing bar, the first support arm, the second support arm three coupled end G for the center of circle, on the same virtual Rowland circle that the radius of curvature R of flexure crystal is radius.
Concrete operation principle is:
X-ray source (such as X-ray tube) sends wavelength continuous print X ray, X ray monochromator is entered from entrance slit point A, it is bent monochromatization after crystal 8 diffraction, namely can receive the X ray of single wavelength �� at exit slit B place, its wavelength X meets Bragg diffraction condition formula (1):
2dsin ��=n �� formula (1)
In formula (1), d is the interplanar distance of flexure crystal, unit nanometer nm;
�� is the angle of diffraction, diffraction angle=incidence angle ��1=output angle ��2;
N is diffraction progression, for the integer be more than or equal to 1, generally only considers n=1;
�� is by the X-ray wavelength of monochromatization, unit nanometer nm.
In the Rowland circle device that above-mentioned isogonism is equidistantly virtual, in conjunction with referring to accompanying drawing 1 it can be seen that
Sin ��=N/ (2R) formula (2)
In formula (2), R is Rowland circle radius;
N is the distance between entrance slit A and flexure crystal point S.
Formula (2) is substituted in formula (1), can obtain: select the spacing N of different entrance slits and flexure crystal, can after the monochromatization that the acquisition of exit slit place is different the X ray of certain certain fixed wave length ��, both relations meet formula:
N=Rn ��/d formula (3)
In formula (3), N is the spacing of entrance slit and flexure crystal; �� is by the X-ray wavelength of monochromatization; D is the interplanar distance of flexure crystal; N is diffraction progression, for the integer be more than or equal to 1; R is the radius of curvature of flexure crystal, that is to say Rowland circle radius.
Driving the first slide block 9 on the first track 1 to do rectilinear motion by the first motor 12, can change the spacing N of entrance slit A and flexure crystal S, entrance slit A and the spacing N of flexure crystal S can be corresponding with the step number of the first motor 12.
If needing to obtain, at exit slit B place, the X ray that wavelength is ��, only the first motor 12 need to be made to move to N and meeting the condition of formula (3).
In the present embodiment, drive motor is linear electric motors. Of course, it is possible to according to needing selection direct current generator, servomotor, motor etc. More specifically, linear electric motors are lead screw motor, and install the nut supporting with screw mandrel on the first slide block 9, and so when the screw mandrel of motor rotates, nut can drive the first slide block 9 to do straight reciprocating motion.
Adopt the 3rd support arm and the 4th support arm structure of coupling, single motor is only needed to drive flexure crystal, and by action principle that mechanism's power is conducted, the function synchronizing to drive X ray exit slit can be realized, so that angle, the second support arm between the first support arm with fixing bar remain equal with the angle between fixing bar, so that entrance slit, flexure crystal and exit slit are always positioned on same Rowland circle, to meet Bragg diffraction condition.
The action principle of its power conduction is: the first motor drives the first slide block to move on the first track with flexure crystal, fixing bar and the first interorbital angle are along with change, pull the variable angle between the 3rd support arm and fixing bar, namely pull the 3rd slide block order on fixing bar mobile, thus with the angle between the 4th support arm and fixing bar along with change, namely pull the second slide block order on the second track mobile, and pull the angle between the second track and fixing bar along with change, thus driving the second support arm order on the second track mobile, due to the first support arm, second support arm, fixing bar three is coupled, thus pulling the first support arm and the first interorbital angle along with change, so that its angle is equal all the time, to ensure that entrance slit, flexure crystal and X ray exit slit three are always positioned on same virtual Rowland circle.
Certainly, the flexure crystal of the present invention can adopt flexure crystal bracket to carry, in this enforcement, and flexure crystal bracket and fixing bar unitary design, naturally it is also possible to adopt the design being coupled as integral type.
For track length, arm length be chosen as existing general knowledge, be limited mainly by flexure crystal radius of curvature R determine, it is advantageous to, the first support arm, the second support arm length select within the scope of 1mm-1000mm.
Selection for flexure crystal, can carry out according to the needs of detection sample, such as select LiF (200), LiF (220), Ge (111), PET, TAIP, TAM, ADP, KAP, InSb, E.D.D.T, PE, Gypsum Fibrosum or topaz.
Flexure crystal can select columned concave surface crystal, correspondence, and exit slit place can obtain the hot spot of wire; Flexure crystal can also select dome shape concave surface crystal, and correspondence, exit slit place can obtain the hot spot of point-like.
A kind of Xray fluorescence spectrometer that the present embodiment provides, including excitation of X-rays source, sample room and detector, wherein, the X ray that excitation of X-rays source sends is after single motor of the above embodiments 1 drives X ray monochromator monochromatization, entering back into sample room and irradiate sample excite secondary X-ray, then detector accepts secondary X-ray and is analyzed.
The X ray sent by the x-ray source excited carries out monochrome, then with monochromatic x-ray bombardment sample, element of interest obtain elemental characteristic fluorescence and be detected in selective excitation sample, is conducive to being greatly improved launching efficiency, reducing the background noise of the fluorescence Spectra that detector receives.
Embodiment 2
Incorporated by reference to referring to accompanying drawing 1 and 3, a kind of Dual-motors Driving X ray monochromator provided by the invention, including entrance slit, dispersion means and exit slit; Dispersion means therein includes:
First track 1, mobile for flexure crystal 8 order thereon, its start position is X ray entrance slit A;
Second track 2, mobile for exit slit B order thereon, its start position and flexure crystal 8 be the coupling of S place on the first track;
Fixing bar 3, for stationary curved crystal 8, its start position S place is provided with flexure crystal 8, the other end and first support arm the 4, second support arm 5 and is coupled in G place;
First support arm 4, is connected to the start position A of the first track 1 and endpoint location G of fixing bar 3; With
Second support arm 5, is connected to the exit slit position B of the second track 2 and endpoint location G of fixing bar 3;
First support arm the 4, second support arm 5 and fixing bar 3 couple in the endpoint location G three of fixing bar, and first support arm the 4, second support arm 5 is identical with the length of fixing bar 3, is the radius of curvature R of flexure crystal;
First track 1 is provided with the first slide block 9 for driving flexure crystal 8 order movement, and the first slide block 9 is driven by the first motor 12;
Second track 2 is provided with the second slide block 10 for driving exit slit B order movement, and the second slide block 10 is driven by the second motor 13;
First motor 12 and the second motor 13 keep acting in agreement;
Along with flexure crystal 8 order on the first track 1 is mobile, corresponding, exit slit B order on the second track 2 is mobile, and angle, the second support arm between the first support arm with fixing bar remains equal with the angle between fixing bar; Namely entrance slit A, flexure crystal S and exit slit B be always positioned at fixing bar, the first support arm, the second support arm three coupled end G for the center of circle, on the same virtual Rowland circle that the radius of curvature R of flexure crystal is radius.
In the present embodiment, described motor is lead screw motor, and installs the nut supporting with screw mandrel on the first slide block 9, and so when the screw mandrel of motor rotates, nut can drive the first slide block 9 to do straight reciprocating motion. Of course, it is possible to according to needing selection direct current generator, servomotor, motor etc.
First motor 12 and the second motor 13 keep acting in agreement, the length that can realize first support arm the 4, second support arm 5 and fixing bar 3 is the radius of curvature R of flexure crystal, and first support arm 4 remain equal with the angle between fixing bar 3, the second support arm 5 with the angle between fixing bar 3 so that entrance slit A, flexure crystal S and exit slit B are always positioned on same virtual Rowland circle.
Concrete operation principle is:
X-ray source (such as X-ray tube) sends wavelength continuous print X ray, X ray monochromator is entered from entrance slit point A, it is bent monochromatization after crystal 8 diffraction, namely can receive the X ray of single wavelength �� at exit slit B place, its wavelength X meets Bragg diffraction condition formula (1):
2dsin ��=n �� formula (1)
In formula (1), d is the interplanar distance of flexure crystal, unit nanometer nm;
�� is the angle of diffraction, diffraction angle=incidence angle ��1=output angle ��2;
N is diffraction progression, for the integer be more than or equal to 1, generally only considers n=1;
�� is by the X-ray wavelength of monochromatization, unit nanometer nm.
In the Rowland circle device that above-mentioned isogonism is equidistantly virtual, in conjunction with referring to accompanying drawing 1 it can be seen that
Sin ��=N/ (2R) formula (2)
In formula (2), R is Rowland circle radius;
N is the distance between entrance slit A and flexure crystal point S.
Formula (2) is substituted in formula (1), can obtain: select the spacing N of different entrance slits and flexure crystal, can after the monochromatization that the acquisition of exit slit place is different the X ray of certain certain fixed wave length ��, both relations meet formula:
N=Rn ��/d formula (3)
In formula (3), N is the spacing of entrance slit and flexure crystal; �� is by the X-ray wavelength of monochromatization; D is the interplanar distance of flexure crystal; N is diffraction progression, for the integer be more than or equal to 1; R is the radius of curvature of flexure crystal, that is to say Rowland circle radius.
Driving the first slide block 9 on the first track 1 to do rectilinear motion by the first motor 12, the second motor 13 drives exit slit B to do rectilinear motion, and keeps acting in agreement; Spacing N with the spacing N and exit slit B of synchronous change entrance slit A and flexure crystal S with flexure crystal S.
Certainly, the flexure crystal of the present invention can adopt flexure crystal bearing bracket, in this enforcement, and flexure crystal bracket and fixing bar unitary design.
For track length, arm length be chosen as existing general knowledge, be limited mainly by flexure crystal radius of curvature determine, it is advantageous to, the first support arm, the second support arm length select within the scope of 1mm-1000mm.
Selection for flexure crystal, can carry out according to the needs of detection sample, such as select LiF (200), LiF (220), Ge (111), PET, TAIP, TAM, ADP, KAP, InSb, E.D.D.T, PE, Gypsum Fibrosum or topaz.
Flexure crystal can select columned concave surface crystal, correspondence, and exit slit place can obtain the hot spot of wire; Flexure crystal can also select dome shape concave surface crystal, and correspondence, exit slit place can obtain the hot spot of point-like.
A kind of X-ray diffractometer, including x-ray source, sample room and X-ray detector, wherein, the X ray that x-ray source sends is after the Dual-motors Driving X ray monochromator monochromatization of the above embodiments 2, entering back into sample room and irradiate sample excite secondary X-ray, then X-ray detector accepts secondary X-ray and is analyzed.
The X ray sent by the x-ray source excited carries out monochrome, then with monochromatic x-ray bombardment sample, is conducive to being greatly improved launching efficiency, reducing the background noise of the spectrum that X-ray detector receives. Except Xray fluorescence spectrometer that the linear drives X ray monochromator of the present invention is mentioned except can be applicable to above-described embodiment, X-ray diffractometer, it is also possible to be widely used in other similar devices needing the monochromatic X ray or instrument. Further, it is also possible to be applied to medical science or biological field, the X ray sent in excitation of X-rays source carries out monochromatization, and obtains wire or the X-ray beam of some shaped laser spot, is then irradiated in biological living or tissue sample, and then analyzes sample structure or composition.
Above disclosed it is only the preferred embodiments of the present invention, certainly can not limit the interest field of the present invention, the equivalent variations therefore made according to the present patent application the scope of the claims with this, still belong to the scope that the present invention contains.

Claims (10)

1. a straight line driving X ray monochromator, including entrance slit, dispersion means and exit slit, it is characterised in that:
Described dispersion means includes:
First track, mobile for flexure crystal order thereon, its start position is provided with entrance slit;
Second track, which is provided with exit slit, and mobile for exit slit order thereon, the start position of the second track and flexure crystal couple on the first track;
Fixing bar, for stationary curved crystal, its start position is installed with flexure crystal, the other end and the first support arm, the second support arm coupling;
First support arm, is connected to the start position of the first track and the endpoint location of fixing bar; With
Second support arm, is connected to the exit slit position of the second track and the endpoint location of fixing bar;
First support arm, the second support arm and fixing bar couple at the endpoint location of fixing bar, and the first support arm, the second support arm are identical with the length of fixing bar, are the radius of curvature of flexure crystal;
Along with flexure crystal order on the first track is mobile, accordingly, exit slit order on the second track is mobile, and entrance slit, flexure crystal and exit slit be always positioned at fixing bar, the first support arm, the second support arm three coupled end for the center of circle, on the same virtual Rowland circle that the radius of curvature of flexure crystal is radius.
2. straight line driving X ray monochromator according to claim 1, it is characterized in that: select the spacing of different entrance slits and flexure crystal, can obtain the X ray of the different certain fixed wave length of monochromatization at exit slit place, both relations meet equation below:
N=Rn ��/d
In formula, N is the spacing of entrance slit and flexure crystal; �� is by the X-ray wavelength of monochromatization; D is the interplanar distance of flexure crystal; N is diffraction progression, for the integer be more than or equal to 1; R is the radius of curvature of flexure crystal, that is to say Rowland circle radius.
3. straight line driving X ray monochromator according to claim 1 and 2, it is characterised in that: the first track is provided with the first slide block for driving flexure crystal order movement, and the first slide block is driven by the first motor;
Second track is provided with the second slide block for driving exit slit order movement, and the second slide block is driven by the second motor;
First motor and the second motor keep acting in agreement.
4. straight line driving X ray monochromator according to claim 1 and 2, it is characterised in that:
First track is provided with the first slide block for driving flexure crystal order movement, and the first slide block is driven by the first motor;
First slide block is provided with the 3rd support arm, first slide block is between the first track start position and flexure crystal position, the other end of the 3rd support arm is movably attached on fixing bar, and the 3rd support arm fixing point on the first slide block is equal with the length of the 3rd support arm to the distance of flexure crystal;
Second track is provided with the 4th support arm, one end of 4th support arm is between the second track start position and exit slit position, the other end of the 4th support arm is movably attached on fixing bar, and the 4th support arm fixing point on the second track is equal with the length of the 4th support arm to the distance of flexure crystal;
3rd support arm, the 4th support arm length equal, and both end points coupled in common are on fixing bar.
5. straight line driving X ray monochromator according to claim 4, it is characterized in that: the 3rd support arm, the position that the end points of the 4th support arm couples on fixing bar are provided with the 3rd slide block, for driving end points order movement on fixing bar of the 3rd support arm, the 4th support arm.
6. the straight line driving X ray monochromator according to claim 3 or 4, it is characterised in that: flexure crystal position is provided with flexure crystal bracket, for support flexure crystal.
7. the straight line driving X ray monochromator according to claim 3 or 4, it is characterised in that: described first support arm, the second support arm length be 1mm-1000mm.
8. the straight line driving X ray monochromator according to claim 3 or 4, it is characterised in that: flexure crystal is LiF (200), LiF (220), Ge (111), PET, TAIP, TAM, ADP, KAP, InSb, E.D.D.T, PE, Gypsum Fibrosum or topaz.
9. the straight line driving X ray monochromator according to claim 3 or 4, it is characterised in that: flexure crystal is cylinder concave surface crystal or sphere crystal.
10. a straight line driving X ray monochromator according to any one of claim 1 to 9 application in the device or instrument of the monochromatic X ray.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108072445A (en) * 2017-12-07 2018-05-25 山东航天电子技术研究所 A kind of deep space extreme ultraviolet/soft X-ray monochromatic instrument

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01132943A (en) * 1987-10-16 1989-05-25 Philips Gloeilampenfab:Nv X rays analyzer
JPH0666736A (en) * 1992-08-17 1994-03-11 Rigaku Corp X-ray spectroscope and exafs measuring instrument
JPH06109662A (en) * 1992-09-29 1994-04-22 Rigaku Corp X-ray analyzer
JP2001066268A (en) * 1999-08-26 2001-03-16 Rigaku Corp X-ray spectrograph and xafs measuring device
CN101093200A (en) * 2007-05-14 2007-12-26 北京逸东机电技术开发有限公司 Consecutive diffractive spectrum of curved crystal on X ray, control method and device for detection
CN201034952Y (en) * 2007-04-28 2008-03-12 天津中泽科技有限公司 Detecting analyzer of complex displacement type continuous reading analyse RoHS dictate trace elements
CN101581680A (en) * 2008-12-25 2009-11-18 中国建筑材料检验认证中心 Hyperbolic crystal X-ray fluorescence spectrum analyzer and operating method thereof
CN201436585U (en) * 2008-12-25 2010-04-07 中国建筑材料检验认证中心 Hyperbolic crystal X fluorescence spectrum analyzer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01132943A (en) * 1987-10-16 1989-05-25 Philips Gloeilampenfab:Nv X rays analyzer
JPH0666736A (en) * 1992-08-17 1994-03-11 Rigaku Corp X-ray spectroscope and exafs measuring instrument
JPH06109662A (en) * 1992-09-29 1994-04-22 Rigaku Corp X-ray analyzer
JP2001066268A (en) * 1999-08-26 2001-03-16 Rigaku Corp X-ray spectrograph and xafs measuring device
CN201034952Y (en) * 2007-04-28 2008-03-12 天津中泽科技有限公司 Detecting analyzer of complex displacement type continuous reading analyse RoHS dictate trace elements
CN101093200A (en) * 2007-05-14 2007-12-26 北京逸东机电技术开发有限公司 Consecutive diffractive spectrum of curved crystal on X ray, control method and device for detection
CN101581680A (en) * 2008-12-25 2009-11-18 中国建筑材料检验认证中心 Hyperbolic crystal X-ray fluorescence spectrum analyzer and operating method thereof
CN201436585U (en) * 2008-12-25 2010-04-07 中国建筑材料检验认证中心 Hyperbolic crystal X fluorescence spectrum analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108072445A (en) * 2017-12-07 2018-05-25 山东航天电子技术研究所 A kind of deep space extreme ultraviolet/soft X-ray monochromatic instrument

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