CN105609475A - Ultrasonic reinforced micro-channel heat exchanger - Google Patents

Ultrasonic reinforced micro-channel heat exchanger Download PDF

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Publication number
CN105609475A
CN105609475A CN201610162798.9A CN201610162798A CN105609475A CN 105609475 A CN105609475 A CN 105609475A CN 201610162798 A CN201610162798 A CN 201610162798A CN 105609475 A CN105609475 A CN 105609475A
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CN
China
Prior art keywords
main body
channel
heat exchanger
water
ultrasonic
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Pending
Application number
CN201610162798.9A
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Chinese (zh)
Inventor
李栋
张文娣
赵孝保
朱琳
钱晨露
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Nanjing University
Nanjing Normal University
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Nanjing Normal University
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Publication date
Application filed by Nanjing Normal University filed Critical Nanjing Normal University
Priority to CN201610162798.9A priority Critical patent/CN105609475A/en
Publication of CN105609475A publication Critical patent/CN105609475A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids

Abstract

The invention provides an ultrasonic reinforced micro-channel heat exchanger. The heat exchanger comprises a shell, a water-cooling system, micro pin fins, an ultrasonic generator and an ultrasonic transducer, wherein the water-cooling system comprises a cooling water channel, a water inlet and a water outlet; the cooling water channel is arranged in the shell; the water inlet and the water outlet are connected with the cooling water channel to form the water-cooling system; the shell comprises a channel main body and an upper sealing cover; the channel main body and the upper sealing cover are connected in a sealing manner; the micro pin fins and the cooling water channel are arranged in the channel main body; the micro pin fins are arranged along the axial direction of the channel main body; the cooling water channel is formed in the spaces among the micro pin fins, and the spaces between the micro pin fins and the inner wall of the channel main body; ultrasonic transducer oscillators are distributed on the two sides of the channel main body; and the ultrasonic generator is connected with the transducer through a wire. According to the ultrasonic reinforced micro-channel heat exchanger, the ultrasonic generator is adopted to give out high-frequency signals to enable the transducer to generate ultrasonic vibration; an ultrasonic cavitation effect generated by the cooling water is changed into an ultra-turbulent flow state, so that the cooling effect is reinforced; and in addition, dirt in the channel can be cleaned at any time, and the heat transfer resistance is lowered.

Description

Intensified by ultrasonic wave micro channel heat exchanger
Technical field
The present invention relates to a kind of micro channel heat exchanger that is applied to microelectronics heat radiation, relate in particular to one and utilize ultrasonicThe technology of the strengthening micro-channel heat exchange of ripple cavitation mechanism and antiscale, scale removal.
Background technology
Microelectronic is the engineering field that proposes the earliest Micro-flows and heat transfer problem, along with electronics calculatesThe fast development of machine capacity and speed and guided missile, satellite and military radar are to high-performance module and high power deviceRequirement, on the one hand the characteristic size of device is less better, develops the opposing party to sub-micron from micron dimensionThe integrated level of face device has increased progressively at a high speed with 40%~50% every year since nineteen fifty-nine. Along with carrying of integrated levelHeight, gathering way of element heat flow density will be more surprising, and the excessive temperature bringing thus can reduce the work of chipMake stability, increase error rate, the thermal stress simultaneously forming between inside modules and its external environment condition can direct shadowRing electrical property, operating frequency, mechanical strength and reliability to chip, therefore the high efficiency and heat radiation of microcomponent is wantedAsk just more and more higher. If microcomponent radiating treatment is bad, component temperature will rise, and directly affects elementPerformance, thus the overall performance of microelectronic component affected, so research microcomponent high efficient heat exchanging technology has had non-Normal important meaning.
The heat transfer means of enhanced heat exchange equipment mainly contains two kinds at present: (1) improves the coefficient of heat transfer, for example, changeThe character of heat exchanger surface or change surface texture make it heat transfer coefficient and are improved; (2) reduce the heat of conducting heatResistance, thus realize augmentation of heat transfer, and for example dirt of fixed time cleaning heat exchanger, adopts less scaling material to makeHeat exchanger etc., thermal resistance reduces, and heat transfer effect is improved.
Chinese patent " pipe type heat exchanger with heat exchange shell intensified of ultrasonic wave antiscale, scale removal " (application number:CN201220480982.5), disclose a kind of efficient shell-tube type heat transmission equipment, the distinguishing feature of this equipment isUtilize hyperacoustic cavitation mechanism, cleaning is deposited in the dirt in heat exchanger, has reduced heat transfer resistance, and raising is changedThermal effect; But this shell-and-tube heat exchanger volume is larger, can not be applied to microelectronics field of radiating, and this skillIn art, need periodical blowdown.
Chinese patent " cooling system that micro-channel is combined with water-cooled " (application number: 201420752289.8),The high strength heat-obtaining ability that this cooling system has utilized the micro-channel of hundred micron dimension sizes to have, can be by cutterThe heat that in sheet server, the microcomponent such as cpu chip produces efficiently takes out, and in the method, micro-channel hasHigh strength heat-obtaining ability can reach 100W/cm2Magnitude, far above the heating heat of current cpu chipCurrent density, heat-transfer effect is better; Chinese patent (application number: 2015100791197) mainly to pin ribShape changes, and strengthens flowing of inner fluid passage. But the above patent about micro-channel is in certain journeyOn degree, improve heat-transfer effect by conventional micro-channel heat exchanger having been done improve, but fluid produces in microchannelFlow resistance larger, only rely on to change that the layout of pin rib and shape still can not thoroughly solve; Simultaneously rightHaving relatively high expectations of cooling fluid, and can produce dirt, increase thermal resistance, worsen heat-transfer effect.
Summary of the invention
The shortcoming and deficiency that exist in order to overcome prior art, the invention provides a kind of intensified by ultrasonic wave micro-channelHeat exchanger, when ultrasonic wave is propagated in liquid, " cavitation effect " of generation aggravated the vibration of liquid, strengthens micro-The disturbance of conduit inner fluid, also reduces viscous drag, further strengthens the heat exchange of micro-channel; Meanwhile, ultrasonic waveEnergy can make to produce in processed liquid a large amount of holes and bubble, in the time that these holes and bubble are buried in oblivion rapidly,Just in particular range, form powerful pressure spike, make into dirty material and be ground into rapidly tiny dirt grain and suspendIn liquid, and cause established dirty thing be broken and come off, reduce heat transfer resistance, raising micro-channelHeat exchange property.
The technical solution adopted for the present invention to solve the technical problems is:
Intensified by ultrasonic wave micro channel heat exchanger, comprises that radiating shell, water-cooling system, micropin rib, ultrasonic wave occurDevice and ultrasonic transducer; Described water-cooling system comprises cooling water channel, water inlet and delivery port, and cooling water channel is establishedPut the inside at radiating shell, water inlet and delivery port are separately positioned on radiating shell, water inlet and delivery portCommunicate with cooling water channel respectively and form described water-cooling system, the cooling working medium of water-cooling system is deionized water or secondAlcohol; Described radiating shell comprises conduit main body and upper cover, and upper cover is connected sealing with conduit main body, conduit masterBody is made as hollow structure, is provided with described micropin rib and cooling water channel in the inside of conduit main body, and micropin rib is along conduitThe axis direction of main body distributes and arranges, and the arrangement mode of micropin rib is fork row, between micropin rib and micropin rib withSpace between the inwall of conduit main body forms described cooling water channel; The diameter of micropin rib is made as 0.1~1mm; InstituteState supersonic generator and be connected by wire with ultrasonic transducer, ultrasonic transducer is provided with multiple ultrasonic wavesEnergy device oscillator, oscillator for ultrasonic transducer distributes and is arranged on the both sides of conduit main body, the work of supersonic generatorPower is 0~100W.
Further, described micropin rib be shaped as cylinder, cuboid or gengon; The height of micropin rib withThe height of conduit main body is identical, is 0.5~1mm; The horizontal spacing of micropin rib is than being with longitudinal pitch ratio0.5~2。
Further, the number of described cooling water channel depends on the number of the micropin rib arranging in conduit main body; ColdBut the cross section of water channel is rectangle.
Further, the material of described conduit main body is red copper.
The present invention sends high-frequency signal by supersonic generator, makes ultrasonic transducer produce ultrasonic vibration,Cooling water in micro-channel is produced to ultrasonic cavitation effect, make cooling water become superturbulent flow state, strengthen cooling.Meanwhile, the high-frequency signal sending by supersonic generator, makes the cooling water in micro-channel produce ultrasonic vibration,Not only make the water velocity in micro-channel slow down, reduce the viscosity of the current of knowing clearly; But also can be at any timeClean out the dirt being deposited in micro-channel, reduce heat transfer resistance, improve the heat exchange property of micro-channel; It is concreteAdvantage is as follows:
(1) the present invention can be realized and being strengthened in micro channel heat exchanger by ultrasonic transducer and supersonic generatorThe disturbance of fluid, improves convection transfer rate, improves radiating efficiency, and heat exchange property of the present invention improves;
(2) fluid in heat exchanger of the present invention is low at the dirty prompt drop of hyperacoustic effect, has extended heat-exchange time,Strengthen heat exchange, also reduce the kinematic viscosity coefficient of liquid simultaneously, reduced to a certain extent the mobile resistance of liquidPower, thus improved micro channel heat exchanger through-current capability, strengthen operational reliability, increase the service life;
(3) in the present invention, micropin rib is fork and arranges and put, and the fork flow disturbance effect of putting of arranging arranges than in-line arrangement,Disturbance increases, and heat transfer effect will be improved;
(4) in the present invention, fluid cooling working medium selects the standard of water need not be so strict, due to hyperacoustic workWith, can reduce the formation of even knowing dirt in conduit, thereby reduce the generation of thermal resistance, strengthen heat transfer effect;
(5) ultrasonic wave micro channel heat exchanger of the present invention also can be realized online anti-scale removal, ultrasound wave descaling heat exchangingThe angle of device, corner, edge equipotential are put and also can be realized scale removal, can comprehensively clean this micro channel heat exchanger,In hyperacoustic sound field, make dirt fully mix with cooling fluid and along with fluid together flows out conduit, determinePhase blowdown; And scale suppression rate reaches as high as more than 85%, and heat transfer resistance reduces, under same case, heat-transfer effect justCan improve;
(6) shape of the rate of heat dissipation of ultrasonic wave micro channel heat exchanger of the present invention and micropin rib, size, highly,The size of quantity and ultrasonic power has very large relation; Meanwhile, hyperacoustic power is not the bigger the better,In 100W, effect is better;
(7), than shell-and-tube heat exchanger, conduit heat exchanger volume of the present invention is less, can be applied to micro-electricitySub-field of radiating.
Brief description of the drawings
Fig. 1 is the top view of ultrasonic wave micro channel heat exchanger of the present invention;
Fig. 2 is that micropin rib of the present invention is pitched the micro-channel structure chart of arranging and putting;
Fig. 3 is the geometric parameter schematic diagram that micropin rib of the present invention is arranged;
Wherein, 1-conduit main body, 2-water inlet, 3-delivery port, 4-cooling water channel, 5-micropin rib, 6-ultrasonic waveGenerator, 7-ultrasonic transducer, 8-upper cover, 9-micro-channel angle and edge, 10-ultrasonic transducer shakesSon.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is further described.
As shown in Figure 1, the intensified by ultrasonic wave micro channel heat exchanger of the present embodiment comprise radiating shell, water-cooling system,Micropin rib 5, supersonic generator 6, ultrasonic transducer 7 and oscillator for ultrasonic transducer 10;
Wherein, water-cooling system comprises cooling water channel 4, water inlet 2 and delivery port 3, and cooling water channel 4 is arranged onThe inside of radiating shell, the cross section of cooling water channel 4 is rectangle (specifically seeing Fig. 2), water inlet 2 and going outThe mouth of a river 3 is separately positioned on radiating shell, water inlet 2 and delivery port 3 group that is connected with cooling water channel 4 respectivelyBecome water-cooling system; Cooling working medium can be deionized water water or ethanol, can reduce the generation of dirt in conduit.
Radiating shell comprises conduit main body 1 and upper cover 8, and upper cover 8 is connected sealing with conduit main body 1, reallyThe fluid of protecting in cooling water channel 4 can not overflow from gap. The material of conduit main body 1 is red copper; Conduit main body1 is made as hollow structure, and micropin rib 5 and cooling water channel 4 are set in hollow part, between micropin rib 5 and micro-Space between the inwall of pin rib 5 and conduit main body 1 forms cooling water channel 4, and the number of cooling water channel 4 is oneIndividual or multiple, the number of cooling water channel 4 is the number of the micropin rib 5 arranging in the middle of conduit main body 1.
Micropin rib 5 distributes along the axis direction of conduit main body 1; Micropin rib 5 be shaped as cylinder, cuboid,Gengon etc.; The height of micropin rib 5 is consistent with the height of conduit main body 1, is being about 0.5~1mm; Micropin rib5 diameter is within the scope of 0.1~1mm; The horizontal spacing of micropin rib 5 compares SL/ D compares S with longitudinal pitchD/ D is equalBe arranged in 0.5~2 scope (as shown in Figure 3); Micropin rib 5 is fork along runner direction and arranges and put, bosherMatter flows in this passage, and fork row more can increase the disturbance of fluid, is beneficial to heat transfer.
Supersonic generator 6 is used for sending high-frequency signal, work mesh power scope 0~100W, and ultrasonic wave is sent outRaw device 6 is connected by wire with ultrasonic transducer 7, and ultrasonic transducer 7 is used for receiving high-frequency signal alsoProduce ultrasonic vibration, ultrasonic transducer 7 has multiple oscillator for ultrasonic transducer 10, ultrasonic wave transducerDevice oscillator 10 is arranged in the both sides of conduit main body 1 along center line according to the mode of array, be convenient to hyperacoustic soundField relates to whole micro channel heat exchanger, enhanced heat exchange.
The heat transfer process of the intensified by ultrasonic wave micro channel heat exchanger of the present embodiment is as follows: by supersonic generator 6Send high-frequency signal, make oscillator for ultrasonic transducer 10 produce ultrasonic vibration by ultrasonic transducer 7,Cooling water in conduit main body 1 is produced to ultrasonic cavitation effect, make cooling water become superturbulent flow state, strengtheningCooling. Meanwhile, high-frequency signal makes the cooling water in conduit main body 1 produce ultrasonic vibration, not only makes conduitWater velocity in main body 1 slows down, and reduces the viscosity of current of knowing clearly, but also can clean out at any time heavyFall the dirt in conduit main body 1, reduce heat transfer resistance, improve the heat exchange property of conduit main body 1. ThusVisible, the intensified by ultrasonic wave micro channel heat exchanger of this present embodiment can improve heat transfer effect greatly.
Use the points for attention of the intensified by ultrasonic wave micro channel heat exchanger of the present embodiment to be:
(1) supersonic generator 6 should be by ventilating and cooling place, supersonic generator 6 and ultrasonic transducer 7Should avoid trickle or shock, ensure that it normally moves;
(2) before this intensified by ultrasonic wave micro channel heat exchanger operation, first will in cooling water channel 4, be full of cool streamBody, the fuel factor of avoiding resonance and ultrasonic transducer 7 to produce comes off conduit main body 1 and micropin rib 5;
Before intensified by ultrasonic wave micro channel heat exchanger is stopped using, the supersonic generator 6 of first stopping transport;
At intensified by ultrasonic wave micro channel heat exchanger run duration, any equipment of must not arbitrarily stopping transport.
The foregoing is only preference embodiment of the present invention, do not form the limit to protection domain of the present inventionFixed. Any any amendment of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., all shouldWithin being included in claim protection domain of the present invention.

Claims (7)

1. intensified by ultrasonic wave micro channel heat exchanger, is characterized in that, described micro channel heat exchanger comprise radiating shell,Water-cooling system, micropin rib, supersonic generator and ultrasonic transducer; Described water-cooling system comprise cooling water channel,Water inlet and delivery port, cooling water channel is arranged on the inside of radiating shell, and water inlet and delivery port are separately positioned onOn radiating shell, water inlet and delivery port communicate with cooling water channel respectively and form described water-cooling system, water-cooling systemCooling working medium be deionized water or ethanol;
Described radiating shell comprises conduit main body and upper cover, and upper cover is connected sealing with conduit main body, conduit masterBody is made as hollow structure, is provided with described micropin rib and cooling water channel in the inside of conduit main body, and micropin rib is along conduitThe axis direction of main body distributes and arranges, and the arrangement mode of micropin rib is fork row, between micropin rib and micropin rib withSpace between the inwall of conduit main body forms described cooling water channel; The diameter of micropin rib is made as 0.1~1mm;
Described supersonic generator is connected by wire with ultrasonic transducer, and ultrasonic transducer is provided with multiple superAcoustic wave transducer oscillator, oscillator for ultrasonic transducer distributes and is arranged on the both sides of conduit main body, supersonic generatorOperating power be 0~100W.
2. intensified by ultrasonic wave micro channel heat exchanger as claimed in claim 1, is characterized in that, described micropin ribBe shaped as cylinder, cuboid or gengon.
3. intensified by ultrasonic wave micro channel heat exchanger as claimed in claim 1, is characterized in that, described micropin ribHeight is identical with the height of conduit main body, is 0.5~1mm.
4. the intensified by ultrasonic wave micro channel heat exchanger as described in claim 1,2 or 3, is characterized in that, described micro-The horizontal spacing of pin rib is than being 0.5~2 with longitudinal pitch ratio.
5. the intensified by ultrasonic wave micro channel heat exchanger as described in claim 1,2 or 3, is characterized in that, described coldBut the number of water channel depends on the number of the micropin rib arranging in conduit main body.
6. the intensified by ultrasonic wave micro channel heat exchanger as described in claim 1,2 or 3, is characterized in that, described coldBut the cross section of water channel is rectangle.
7. the intensified by ultrasonic wave micro channel heat exchanger as described in claim 1,2 or 3, is characterized in that described grooveThe material of road main body is red copper.
CN201610162798.9A 2016-03-21 2016-03-21 Ultrasonic reinforced micro-channel heat exchanger Pending CN105609475A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106767042A (en) * 2016-12-30 2017-05-31 南京师范大学 Intensified by ultrasonic wave spirality micro-channel descaling heat exchanger
CN107949246A (en) * 2017-11-27 2018-04-20 南京师范大学 Data center module rotates micro channel heat exchanger with noise-reduction type ultrasonic wave
WO2018210067A1 (en) * 2017-05-17 2018-11-22 华为技术有限公司 Radiator and communication device
CN108871040A (en) * 2018-07-11 2018-11-23 华南理工大学 A kind of heat exchanger based on oval focusing ultrasonic wave augmentation of heat transfer principle
CN109346423A (en) * 2018-10-09 2019-02-15 德淮半导体有限公司 Semiconductor device and its working method
CN114337533A (en) * 2021-12-28 2022-04-12 杭州电子科技大学 Photovoltaic heat absorbing plate adopting phase change heat transfer and liquid cooling

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CN204230227U (en) * 2014-12-03 2015-03-25 中国科学院工程热物理研究所 The cooling system that micro-channel is combined with water-cooled
CN104658992A (en) * 2015-02-13 2015-05-27 西安电子科技大学 Novel micro heat sink provided with pin-fin array
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CN101196380A (en) * 2007-12-27 2008-06-11 上海交通大学 Pipe type heat exchanger with heat exchange shell intensified by ultrasonic wave
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Publication number Priority date Publication date Assignee Title
CN106767042A (en) * 2016-12-30 2017-05-31 南京师范大学 Intensified by ultrasonic wave spirality micro-channel descaling heat exchanger
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CN107949246B (en) * 2017-11-27 2019-07-23 南京师范大学 Data center computer room rotates micro channel heat exchanger with noise-reduction type ultrasonic wave
CN108871040A (en) * 2018-07-11 2018-11-23 华南理工大学 A kind of heat exchanger based on oval focusing ultrasonic wave augmentation of heat transfer principle
CN108871040B (en) * 2018-07-11 2023-09-26 华南理工大学 Heat exchanger based on elliptic ultrasonic focusing enhanced heat transfer principle
CN109346423A (en) * 2018-10-09 2019-02-15 德淮半导体有限公司 Semiconductor device and its working method
CN114337533A (en) * 2021-12-28 2022-04-12 杭州电子科技大学 Photovoltaic heat absorbing plate adopting phase change heat transfer and liquid cooling

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