CN105581773B - A kind of terahertz imaging system - Google Patents
A kind of terahertz imaging system Download PDFInfo
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- CN105581773B CN105581773B CN201410563944.XA CN201410563944A CN105581773B CN 105581773 B CN105581773 B CN 105581773B CN 201410563944 A CN201410563944 A CN 201410563944A CN 105581773 B CN105581773 B CN 105581773B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 40
- 238000001514 detection method Methods 0.000 claims abstract description 51
- 230000001702 transmitter Effects 0.000 claims description 15
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- 230000001809 detectable Effects 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 3
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- 239000000463 material Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 230000003595 spectral Effects 0.000 description 3
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 3
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- 230000001276 controlling effect Effects 0.000 description 2
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- 238000004611 spectroscopical analysis Methods 0.000 description 1
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Abstract
The invention discloses a kind of terahertz imaging systems, for being detected to detection object, including spectroscope, beam scanning device and terahertz detector, the THz wave received is reflected on beam scanning device by the spectroscope, and the beam scanning device is scanned detection object；The THz wave of detection object reflection reaches the terahertz detector after the beam scanning device and the spectroscope successively, and the THz wave received is converted into photo-signal output for analyzing processing by the terahertz detector.Terahertz imaging system provided by the invention can greatly improve the sweep speed of imaging, and control easy, low cost, be conducive to the integrated and extension of system；Simultaneously by way of reflective measurement, the terahertz imaging system is made to can be applied to being surveyed in physical examination for organism characteristic.
Description
Technical field
The present invention relates to THz wave imaging fields, more particularly to a kind of terahertz imaging system.
Background technology
THz wave refers to coherent electromagnetic radiation of the frequency in 0.1THz~10THz far infrared bands, is in electromagnetic spectrum
Specific position from middle electronics to photonic propulsion transition, because it is with unique of perspectivity, safety, spectral resolving power etc.
Neck, and show extensive learning value and application prospect.With the development of Terahertz Technology, tera-hertz spectra and it is imaged on life
It is latent that many fields such as object, medical conditions diagnosis, material science, military affairs and chemical fundamentals research show huge application
Power.Terahertz time-domain spectroscopic technology is one of the application technology of terahertz emission developed in recent years in the world, is a kind of
Emerging spectral technique is the core research and development field of terahertz light spectral technology.Coherent detection possessed by terahertz time-domain spectroscopy
Method, high temporal resolution and high sensitivity are that people present a completely new spectrum selective materials visual angle, also give spectroscopy
Researcher provides new opportunity.And terahertz time-domain spectroscopy imaging system then inherits the characteristics of spectroscopic system, and with it is common
Optical imagery unlike, THz wave imaging each pixel not only include intensity signal also with the pixel spectrum
Information, can not only be observed by respective treated image can also identify material composition, therefore obtain every country and each
Forward position research direction of interest is studied greatly.
Currently, terahertz time-domain spectroscopy imaging system has been widely used for biomedical sector.Existing commercialization is too
Mainly use technologies, the point by point scanning systems such as point by point scanning imaging knead dough battle array imaging often flat using motor in hertz imaging device
Platform carries out two-dimensional movement to sample and realizes point by point scanning (raster scanning), needs to expend longer time, cannot be satisfied to biology
Body carries out the actual demand surveyed in physical examination；Face battle array imaging technique such as focal plane detection array is imaged, based on electro optic sampling method
There is system complex and the deficiencies of equipment costliness etc. for CCD imagings etc.；In addition, for organism, it is existing too
Hertz system mostly uses greatly transmission-type and is studied, this is also dfficult to apply to survey in physical examination.
The Zhang Cunlin of Terahertz key lab of Capital Normal University, Deng towards etc. designs a kind of terahertz imaging system,
Multiple row scanning imagery (the patent No. of plane mirror, polygonal-mirror and detector array realization to object is swept using frame
CN201210117305.1).However, this scheme is higher using Terahertz detector array cost, and utilize polygonal-mirror
Scanning is susceptible to the light area of doubt of corner angle changeover portion, and certain difficulty is brought for accurately controlling.
Invention content
In view of the shortcomings of the prior art, fast, control simplicity that the present invention provides a kind of sweep speeds, control accuracy are high
And the terahertz imaging system suitable for being surveyed in physical examination.
In order to achieve the above purpose, present invention employs the following technical solutions：
A kind of terahertz imaging system, for being detected to detection object, including spectroscope, beam scanning device and too
The THz wave received is reflected on beam scanning device by hertz detector, the spectroscope, the beam scanning device
Detection object is scanned；The THz wave for detecting object reflection passes through the beam scanning device and the spectroscope successively
After reach the terahertz detector, the THz wave received is converted into photo-signal and exported by the terahertz detector
For analyzing processing.
Wherein, the beam scanning device include the first rotatable mirror, the second rotatable mirror, scanning lens and
Reflecting mirror driving unit, the reflecting mirror driving unit drive first rotatable mirror and second pivotable reflective
Mirror is rotated around respective symmetry axis；Scanning lens is condenser lens, THz wave pass through successively first rotatable mirror,
Second rotatable mirror and the scanning lens are irradiated on detection object.
Wherein, the reflecting mirror driving unit includes two scan modules and servo drive unit, the servo-drive list
Member output control signal two scan modules of control, which respectively drive first rotatable mirror and described second, to be revolved
Turn speculum rotation.
Wherein, the symmetry axis of the symmetry axis of first rotatable mirror and second rotatable mirror is vertical.
Wherein, the symmetry axis of first rotatable mirror is perpendicular to detection object, second pivotable reflective
The symmetry axis of mirror is parallel to detection object.
Wherein, terahertz imaging system further includes femto-second laser, beam splitter and terahertz transmitter, the femtosecond laser
Device is used to the laser beam that the femto-second laser is sent out being divided into detection light and pumping for sending out laser beam, the beam splitter
Light；The pump light is scanned detection object after the terahertz transmitter, detects the THz wave warp of object reflection
The spectroscope enters the terahertz detector, and the detection quick retard unit of the light through reciprocating motion enters the terahertz
Hereby detector, the terahertz detector generate detectable signal under the collective effect of the detection light and the THz wave.
Wherein, the quick retard unit includes voice coil motor and the return mirror of light beam, and the quick retard unit is by described
Voice coil motor driving moves back and forth, and the return mirror of light beam changes light path to be projected to the terahertz detector.
Wherein, terahertz imaging system further includes Terahertz expand device and throws face mirror, and the Terahertz expand device will
The terahertz emission that the terahertz transmitter generates forms collimated light beam after expanding and projects to the spectroscope；The throwing face mirror
The THz wave that object reflection returns will be detected and focus to the terahertz detector.
Wherein, terahertz imaging system further includes the first reflector and the second reflector, and first reflector receives institute
It states the laser beam that femto-second laser is sent out and is reflected on beam splitter, second reflector receives the detection light and is reflected to
Quick retard unit.
Wherein, the terahertz transmitter includes THz source and light beam rearrangement device, and the THz source stimulated light swashs
Hair can generate THz wave, and the light beam rearrangement device includes lens, for being arranged to THz wave.
The present invention is scanned detection object by beam scanning device using THz wave, then Terahertz is utilized to visit
Device is surveyed to receive the THz wave of reflection and be converted into photo-signal output for analyzing processing.This mode can greatly improve
The sweep speed of imaging, and easy, low cost is controlled, be conducive to the integrated and extension of system；Pass through reflective survey simultaneously
The mode of amount makes the terahertz imaging system can be applied to being surveyed in physical examination for organism characteristic.
Description of the drawings
Fig. 1 is the terahertz imaging system structure diagram of the embodiment of the present invention.
Fig. 2 is the beam scanning apparatus structure schematic diagram of the terahertz imaging system of the embodiment of the present invention.
Fig. 3 is the scanning theory schematic diagram of the beam scanning device of the terahertz imaging system of the embodiment of the present invention.
Specific implementation mode
Below in conjunction with attached drawing, with embodiment, the present invention will be further described.
Refering to fig. 1, an embodiment of the present invention provides a kind of terahertz imaging systems, for being examined to detection object 100
It surveys, including spectroscope 50, beam scanning device 60 and terahertz detector 70, spectroscope 50 reflects the THz wave received
Onto beam scanning device 60, beam scanning device 60 is scanned detection object 100；Detect the terahertz that object 100 reflects
Hereby wave reaches terahertz detector 70 after beam scanning device 60 and spectroscope 50 successively, and terahertz detector 70 will receive
To THz wave be converted into photo-signal export for analyzing processing.
Fig. 2 be beam scanning device 60 structural schematic diagram, beam scanning device 60 include the first rotatable mirror 61,
Second rotatable mirror 62, scanning lens 63 and reflecting mirror driving unit (not shown), reflecting mirror driving unit driving first
Rotatable mirror 61 and the second rotatable mirror 62 are rotated around respective symmetry axis；Scanning lens 63 is condenser lens, too
Hertz wave is irradiated to detection object by the first rotatable mirror 61, the second rotatable mirror 62 and scanning lens 63 successively
On 100.Wherein, the focus of scanning lens 63 is located at 100 surface of detection object.
Further, reflecting mirror driving unit includes that two scan module (not shown) and servo drive unit (are schemed not
Show), servo drive unit output control signal controls two scan modules and respectively drives the first rotatable mirror 61 and second
Rotatable mirror 62 rotates, and specifically, the first rotatable mirror 61 and the second rotatable mirror 62 are around respective symmetry axis
Rotation.
In the present embodiment, the symmetry axis of the symmetry axis of the first rotatable mirror 61 and the second rotatable mirror 62 hangs down
Directly.For the symmetry axis of first rotatable mirror 61 perpendicular to detection object 100, the symmetry axis of the second rotatable mirror 62 is flat
Row is in detection object 100.It is rotatable anti-that the THz wave that level is injected enters second after the reflection of the first rotatable mirror 61
Mirror 62 is penetrated, the scanning plane of detection object 100 is incident on after being focused by scanning lens 63 after the reflection of the second rotatable mirror 62
On.
Terahertz imaging system further includes femto-second laser 10, beam splitter 20 and terahertz transmitter 30, femto-second laser
10 for sending out laser beam, and beam splitter 20 is used to the laser beam that femto-second laser 10 is sent out being divided into two-way light：Detect light and pump
Pu light；Pump light therein is scanned detection object 100 after terahertz transmitter 30, and the reflection of detection object 100 is too
Hertz wave enters terahertz detector 70, detection quick retard unit 80 of the light through faster reciprocal motion therein through spectroscope 50
Into terahertz detector 70, terahertz detector 70 generates detectable signal under the collective effect of detection light and THz wave.
Here detectable signal is photo-signal.Terahertz detector 70 can be it is any can be with femtosecond laser and terahertz emission
The terahertz detection device that interaction generates detectable signal occurs, includes the Terahertz based on photoconduction sampling and electro optic sampling
Detection device, and include the light beams such as the femtosecond laser condenser lens and thz beam collimation lens for aiding in terahertz detection
Collating unit.
The first reflector 90 is additionally provided between femto-second laser 10 and beam splitter 20, for projecting femto-second laser 10
Laser beam change direction and be projected on beam splitter 20, the has also been sequentially arranged between beam splitter 20 and terahertz transmitter 30
One intermediate reflectors 93 and the first intermediate lens 110, the first intermediate lens 110 are condenser lens, what femto-second laser 10 projected
Pump light of the laser beam after 20 beam splitting of beam splitter is focused by the first intermediate lens 110 again after the reflection of the first intermediate reflectors 93
To terahertz transmitter 30.The second reflector for changing radiation direction is additionally provided between beam splitter 20 and quick retard unit 80
91, the second reflector 91 receives detection light and is reflected to quick retard unit 80.
The terahertz imaging system of the present embodiment further includes preamplifier 200 and lock-in amplifier 300, detector output
Photo-signal be transformed into voltage signal after the amplification of preamplifier 200, then by lock-in amplifier 300 be further amplified with
For being acquired analyzing processing using computer, software and relevant device etc..
Quick retard unit 80 includes voice coil motor (not shown) and the return mirror 81 of light beam, and quick retard unit 80 is by voice coil
The motor drives edge direction parallel with incident ray is quickly moved back and forth, and the return mirror 81 of light beam is for changing light path to throw
It is incident upon terahertz detector 70.It is moved, ties by ampere force effect since voice coil motor uses the power on conductor in magnetic field
There is no the mechanical structure of the complexity such as nut, lead screw of conventional motors in structure, therefore the resistance of motion is very small, so as to realize height
The reciprocating motion of speed.
Specifically, the return mirror 81 of light beam is made of incident speculum in a certain angle and outgoing reflective mirror, is played certain
Light carryover effects.The incident speculum and outgoing reflective mirror of the present embodiment are orthogonal, can be reversed by incident light
It turns back, quick retard unit 80 further includes one piece of delayed reflex mirror 82, and the parallel arrangement of delayed reflex mirror 82 is in the return mirror of light beam 81
Outgoing reflective mirror right opposite.It has also been sequentially arranged among second between quick retard unit 80 and terahertz detector 70
Reflector 94 and the second intermediate lens 120, after light is injected into the incident reflective mirror of the return mirror of light beam 81, by being emitted reflective mirror
Go out, then delayed speculum 82 vertically projects, is most focused afterwards by the second intermediate lens 120 after the reflection of the second intermediate reflectors 94
To terahertz detector 70.
The terahertz imaging system of the embodiment of the present invention further includes Terahertz expand device 40 and throws face mirror 41, and Terahertz expands
Bundle device 40 forms collimated light beam after expanding the terahertz emission that terahertz transmitter 30 generates and projects to spectroscope 50；Throwing face
Mirror 41 focuses to terahertz detector 70 by the THz wave that object 100 is reflected back is detected.Specifically, the Terahertz expand device
40 can be any terahertz optics device with the effect that expands, including various lens and off axis paraboloidal mirror etc..
Wherein, terahertz transmitter 30 includes THz source and light beam rearrangement device, and wherein THz source can be based on
The photoconductive antenna THz source of photoconductive effect, the excitation of THz source stimulated light can generate THz wave；Light beam rearrangement device
Including lens, for being arranged to THz wave, the femtosecond laser condenser lens and too such as assisting THz wave to emit
Hertz light beam collimation lens etc..
The terahertz imaging system concrete operating principle is as follows：The laser beam that femto-second laser 10 is sent out passes through beam splitter 20
It is divided into detection light and pump light.Pump light therein is after one side the first intermediate reflectors 93 reflection, directive terahertz sources
Device 30 and generate terahertz emission；The terahertz emission generated by terahertz transmitter 30 is formed after Terahertz expand device 40
Collimated light beam；The terahertz emission expanded reflexes to beam scanning device 60 through spectroscope 50, is then focused into detection object
100 measurement positions are scanned；It returns, passes through through beam scanning device 60 from the terahertz emission after the detection reflection of object 100
It is finally incident on terahertz detector 70 by throwing face mirror 41 again after spectroscope 50；Detection light therein is by the second reflection
Device 91 enters quick retard unit 80 after reflecting, by the second intermediate reflectors after the light beam of quick retard unit 80 is turned back
94 reflex to terahertz detector 70.Terahertz detector 70 generates detection under the collective effect of detection light and terahertz emission
Signal；The photo-signal that terahertz detector 70 exports is converted into voltage signal through preamplifier 200, then is amplified by locking phase
Device 300 is further amplified for collection analysis processing.
In conjunction with Fig. 2 and Fig. 3, beam scanning device 60 controls two scannings using the two paths of signals of servo drive unit output
Motor respectively drives the first rotatable mirror 61, the second rotatable mirror 62 rotates, the first rotatable mirror 61 of realization,
Light beam deflection of second rotatable mirror 62 in detection 100 plane of object.First rotatable mirror 61, second is rotatable
Speculum 62 is respectively assembled on two scan modules, and each scan module is all made of the galvanometer with high dynamic response performance
Formula finite angle motor.
Such as Fig. 3, it is OXY planes that definition detection object 100, which is plane where scanning plane, the first rotatable mirror 61,
The rotary shaft of second rotatable mirror 62 is parallel with Z axis and X-axis respectively, and the first rotatable mirror 61, second is rotatable
In sustained height, the incident direction of THz wave is that X-axis is positive at the center of speculum 62.When original state, first is rotatable anti-
Penetrate the rotation angle θ of mirror 61, the second rotatable mirror 62x、θyIt is 0, the first rotatable mirror 61 and X-axis, Y-axis at this time
Initial angle is 45 °, and the initial angle of the second rotatable mirror 62 and Y-axis, Z axis is 45 °, incident THz wave warp
It impinges perpendicularly on scanning lens 63 after first rotatable mirror 61, the reflection of the second rotatable mirror 62, finally focuses on
The coordinate origin P (0,0) of X/Y plane.
When terahertz wave beam scanning imagery, scanning element and the first rotatable mirror 61, the second rotatable mirror 62
Rotation angle θx、θyAnd the focussing distance of dynamic focusing corresponds, but the relationship between them is non-linear.Thus, it is real
The accurate scan control of existing terahertz wave beam it may first have to obtain its accurate scan model, then be obtained by scan model
First rotatable mirror 61,62 rotation angle of the second rotatable mirror and scanning point coordinates and it is dynamic focus displacement distance it
Between precise functional relationship, to realize galvanometer is accurately controlled.
Ideally, the focal length F of scanning lens 63, scanning center P (0,0) to scanning element P (x, y) distance L, second
The angle theta of the wave beam that rotatable mirror 62 projects and 63 normal of scanning lens meets following relationship：
L=F × θ
The track of scanning element, is represented by scanning plane：
And due toTherefore, it can be deduced that pass through the first rotatable mirror 61, the second pivotable reflective
The rotation angle θ of mirror 62x、θyControl scanning track mathematical model be：
The first rotatable mirror 61, second rotatable mirror 62 can be accurately adjusted by above-mentioned mathematical model
Rotation angle, to realize accurately controlling for scanning track.
The present invention as a result of reflective measurement method, solve transmission-type measurement be difficult to realize organism in physical examination
Survey problem makes terahertz wave beam be incident on detection subject surface, the terahertz wave beam of reflection is along light path by coordinating scanning lens
It returns until after spectroscope, terahertz detector is focused on through throwing face mirror.The photo-signal of detector output is put big before menstruation
Device becomes voltage signal, then is further amplified by lock-in amplifier and can be acquired analyzing processing.
The above is only the specific implementation mode of the application, it is noted that for the ordinary skill people of the art
For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications are also answered
It is considered as the protection domain of the application.
Claims (9)
1. a kind of terahertz imaging system, for being detected to detection object (100), which is characterized in that including femtosecond laser
Device (10), beam splitter (20), terahertz transmitter (30), spectroscope (50), beam scanning device (60) and terahertz detector
(70), the THz wave received is reflected on beam scanning device (60) by the spectroscope (50), the beam scanning dress
(60) are set to be scanned detection object (100)；It detects the THz wave that object (100) reflects and passes through the beam scanning successively
Device (60) and the spectroscope (50) reach the terahertz detector (70) afterwards, and the terahertz detector (70) will receive
To THz wave be converted into photo-signal export for analyzing processing；The femto-second laser (10) is used to send out laser beam,
The beam splitter (20) is used to the laser beam that the femto-second laser (10) is sent out being divided into detection light and pump light；The pumping
Light is scanned detection object (100) after the terahertz transmitter (30), the THz wave that detection object (100) reflects
Enter the terahertz detector (70), the detection quick retard unit of the light through reciprocating motion through the spectroscope (50)
(80) enter the terahertz detector (70), the terahertz detector (70) is in the detection light and the THz wave
Detectable signal is generated under collective effect.
2. terahertz imaging system according to claim 1, which is characterized in that the beam scanning device (60) includes the
One rotatable mirror (61), the second rotatable mirror (62), scanning lens (63) and reflecting mirror driving unit, the reflection
Mirror driving unit drives first rotatable mirror (61) and second rotatable mirror (62) around respective symmetrical
Shaft rotation is dynamic；Scanning lens (63) is condenser lens, and THz wave passes through first rotatable mirror (61), described the successively
Two rotatable mirrors (62) and the scanning lens (63) are irradiated on detection object (100).
3. terahertz imaging system according to claim 2, which is characterized in that the reflecting mirror driving unit includes two
Scan module and servo drive unit, the servo drive unit output control signal control two scan modules and drive respectively
Move first rotatable mirror (61) and second rotatable mirror (62) rotation.
4. terahertz imaging system according to claim 2, which is characterized in that first rotatable mirror (61)
The symmetry axis of symmetry axis and second rotatable mirror (62) is vertical.
5. terahertz imaging system according to claim 4, which is characterized in that first rotatable mirror (61)
Symmetry axis perpendicular to detection object (100), the symmetry axis of second rotatable mirror (62) is parallel to detection object
(100)。
6. terahertz imaging system according to claim 1, which is characterized in that the quick retard unit (80) includes sound
Motor and the return mirror of light beam (81) are enclosed, the quick retard unit (80) is driven by the voice coil motor and moved back and forth, the light
The return mirror of beam (81) changes light path to be projected to the terahertz detector (70).
7. terahertz imaging system according to claim 1, which is characterized in that further include Terahertz expand device (40) and
Throwing face mirror (41), after the Terahertz expand device (40) expands the terahertz emission that the terahertz transmitter (30) generates
Collimated light beam is formed to project to the spectroscope (50)；The throwing face mirror (41) will detect the Terahertz that object (100) is reflected back
Wave focuses to the terahertz detector (70).
8. terahertz imaging system according to claim 1, which is characterized in that further include the first reflector (90) and second
Reflector (91), first reflector (90) receive the laser beam that the femto-second laser (10) sends out and are reflected into beam splitter
(20) on, second reflector (91) receives the detection light and is reflected to quick retard unit (80).
9. terahertz imaging system according to claim 1, which is characterized in that the terahertz transmitter (30) includes too
Hertz source and light beam rearrangement device, the THz source stimulated light excitation can generate THz wave, the light beam rearrangement device packet
Lens are included, for being arranged to THz wave.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410563944.XA CN105581773B (en) | 2014-10-21 | A kind of terahertz imaging system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410563944.XA CN105581773B (en) | 2014-10-21 | A kind of terahertz imaging system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105581773A CN105581773A (en) | 2016-05-18 |
| CN105581773B true CN105581773B (en) | 2018-08-31 |
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