CN105571733A - Temperature sensor, sensing apparatus and manufacturing method - Google Patents
Temperature sensor, sensing apparatus and manufacturing method Download PDFInfo
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- CN105571733A CN105571733A CN201510744652.0A CN201510744652A CN105571733A CN 105571733 A CN105571733 A CN 105571733A CN 201510744652 A CN201510744652 A CN 201510744652A CN 105571733 A CN105571733 A CN 105571733A
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- connecting terminal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/01—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions
Abstract
The invention provides a temperature sensor, a sensing apparatus and a manufacturing method. The temperature sensor is provided with a positive power supply connection terminal and a negative power supply connection terminal, at least two diodes electronically connected in series in an on-state direction arranged between the positive power supply connection terminal and the negative power supply connection terminal, a measuring connection terminal arranged between the at least two diodes, a controllable current source which is coupled to the measuring connection terminal and is configured to apply positive and negative current to the measuring connection terminal, and an analyzing processing apparatus which is configured to detect the voltage on the measuring connection terminal applied by the positive current of the current source and the negative current of the current source and compute a temperature of the detected voltage. In addition, the invention discloses a sensing apparatus and a manufacturing method.
Description
Technical field
The present invention relates to a kind of temperature sensor, a kind of sensor device and a kind of manufacture method for temperature sensor.
Background technology
There is multiple micro-electro-mechanical sensors, so-called MEMS sensor now.MEMS sensor such as may be used for sense acceleration, pressure etc.
Pressure transducer is such as consumer device---as mobile phone, housed device, combustion gas warning horn etc.
Based in the pressure transducer of MEMS, the measurement bridge be made up of resistance is applied to usually can on the diaphragm of elastic deformation under stress.
DE10231727A1 exemplarily illustrates this pressure transducer.
Resistance measurement bridge usually replaces around the transverse direction of arranging by four and the pressure drag component of longitudinal pressure sensitivity forms.Diaphragm bending causes the reverse resistance variations of adjacent resistor and therefore causes the bridge voltage that changes.
The resistance of described measurement bridge is normally very temperature sensitive.Usual way for the treatment of temperature fluctuation is the measurement of the temperature by resistance bridge self or diode.But, the only medial temperature of diaphragm can be asked at this.But the thermograde on diaphragm is crucial especially because this no longer can temperature cause and distinguish between the resistance variations that pressure causes.Described thermograde is such as caused by the operation of the component of adjacent power ruggedization.
In order to ask for thermograde, need temperature sensitive element, usually diode or resistance that at least 2 different.This not only needs additional structure space for each diode and additional terminal pad on MEMS sensor element but also on analyzing and processing loop.
Summary of the invention
The present invention disclose a kind of there is the feature of claim 1 temperature sensor, a kind of there is the sensor device of the feature of claim 7 and a kind of manufacture method with the feature of claim 9.
Therefore arrange:
Temperature sensor: there is the positive electric connecting terminal that supplies and supply electric connecting terminal with negative; Have at least two diodes, they supply electric connecting terminal and negative in series arranging with conducting direction in electric between electric connecting terminal positive; There is the measurement link described in being arranged between at least two diodes; Have controllable current source, described controllable current source is coupled with measurement link and is configured to apply positive current and negative current measuring on link; Have APU, described APU is configured to the positive current for current source and the negative current for current source detects the voltage on measurement link and distinguishes accounting temperature according to detected voltage.
In addition arrange:
Sensor device has at least one sensor element being configured to the temperature correlation detecting physical parameter and has according to temperature sensor of the present invention.
Finally arrange:
For the manufacture of the manufacture method of temperature sensor according to the present invention, described manufacture method has: provide the positive step for electric connecting terminal supplying electric connecting terminal and bear, positive for electric connecting terminal and the negative step in series arranging at least two diodes between electric connecting terminal in electric with conducting direction, the step measuring link is arranged between at least two diodes, by the step that the controllable current source being configured to apply positive current and negative current on described measurement link is coupled with measurement link, and by APU with measure the step that is coupled of link, described APU is configured to the positive current for current source and the negative current for current source detects the voltage on measurement link and distinguishes the step of accounting temperature according to detected voltage.
Advantage of the present invention
The present invention based on understanding be, the microminiaturization on the field of the sensor based on MEMS or the field of semiconductor technology develops more quickly than the microminiaturization in structure and interconnection technique.Therefore, with compared with the sensor element based on MEMS of thermometric script or Measurement of Semiconductors element, the space requirement of terminal pad increases all the time gradually, thus attempts the quantity keeping terminal pad littlely.
Now, the present invention based on design be, consider described understanding and following possibility be set: multiple temperature can be detected by single terminal pad in described possibility.
The present invention is arranged for this reason, in temperature sensor by multiple in electric the diode of arranged in series form.Measure link to be arranged in the series circuit be constituted by a diode and to be coupled with current source.
Current source produces positive current or negative current respectively on measurement link, and APU detects the voltage on the measurement link at positive current and negative current place.Positive current means, electric current flow into be measured in link, and negative current means, electric current flows out from measurement link.
If current source exports positive current to measurement link, then the electromotive force measured on link raises.Therefore, only do not flow through between the positive confession electric connecting terminal and measurement link of the series circuit be constituted by a diode or flow only through very little electric current.
In contrast, if current source exports negative current to measurement link, then the electromotive force measured on link declines.Therefore, the negative for only not flowing through between electric connecting terminal or flowing only through very little electric current of link and the series circuit that is constituted by a diode is being measured.
Therefore, the voltage drop in a part for the diode of series circuit can be detected respectively.If link and positive for the diode between electric connecting terminal and measure link and negative be arranged in different location place for the diode between electric connecting terminal will be measured, therefore can by only one measure link and detect two different temperature.
According to the measurement bridge based on MEMS that sensor device of the present invention can be such as pressure transducer.If used in described measurement bridge according to temperature sensor of the present invention, can by only one measure link and detect the different temperatures at difference place measuring bridge.
Favourable embodiment and expansion scheme is drawn by dependent claims and with reference to the description of accompanying drawing.
Arrange even number diode in one embodiment, they in series arrange in electric.Measure the centre that link especially can be arranged in series connection.Thus, realize the structure of the symmetry of temperature sensor, the structure Simplified analysis process of described symmetry.
In one embodiment, the quantity of diode so constructs for electric connecting terminal and the negative voltage applied between electric connecting terminal that supplies according to positive, makes the electric current flowing through diode be no more than first threshold.The electric current flowing through diode is interpreted as the electric current flowing through the series circuit of diode when not having electric current to be transported to measure link from current source.At this, first threshold be especially positioned at such as measure bridge common measurement electric current below, temperature sensor arranged by described measurement bridge, or described first threshold relative to measurement electric current can ignore little.
In one embodiment, positive for electric connecting terminal with measure the quantity of the diode between link and measure link and the negative quantity for the diode between electric connecting terminal so constructs, the voltage drop of corresponding maximum possible is laid respectively at be applied to positive for electric connecting terminal and negative for below the voltage between electric connecting terminal.This can realize, and the working voltage by temperature sensor carries out accurate temperature survey.
In one embodiment, the quantity of diode so constructs, and makes supply electric connecting terminal positive and measure on the diode between link or deduct the saturation voltage of APU at measurement link and the negative voltage drop for the corresponding maximum possible on the diode between electric connecting terminal corresponding to being applied to positive supply electric connecting terminal and the negative voltage between electric connecting terminal that supplies.This can realize making full use of large measurement range.
In one embodiment, APU is configured to so control controllable current source, make to measure magnitude of voltage on link be applied to positive for electric connecting terminal with negative deduct below the saturation voltage of APU for the voltage between electric connecting terminal.This can realize, and controls the electric current of the part of the series circuit through diode or regulates working point.
In one embodiment, the sensor element of temperature correlation is configured to micro-electromechanical pressure transducer element and/or gas sensor.This can realize the use of the present invention in different application.
As long as meaningful, just can mutually combine described configuration and expansion scheme arbitrarily.Other possible configurations of the present invention, expansion scheme and realization had also comprised the combination clearly do not described of the feature of the present invention previously or below described by embodiment.At this especially, single aspect is also added into corresponding citation form of the present invention as improving or supplementing by those skilled in the art.
Accompanying drawing explanation
Below, the present invention is elaborated by embodiment illustrated in the schematic diagram of accompanying drawing.Accompanying drawing illustrates:
Fig. 1: according to the block diagram of a kind of embodiment of temperature sensor of the present invention;
Fig. 2: according to the block diagram of a kind of embodiment of sensor device of the present invention;
Fig. 3: according to the process flow diagram of a kind of embodiment of method of the present invention.
Illustrate as long as no other, the element that identical or function is identical is in all of the figs provided with identical reference marker with setting.
The change of diode characteristics curve is similar to all the time exponentially, and therefore observing definitely does not have come from the forward voltage that it plays diode conducting first.However, the voltage of the following stated concept still for declining on the diode when reaching common working point (measurement electric current).Diode current for voltage more than forward voltage is significantly greater than measurement electric current, and is significantly less than measurement electric current for the electric current of the voltage below forward voltage.
Embodiment
Fig. 1 illustrates the block diagram of a kind of embodiment according to temperature sensor 1 of the present invention.
Temperature sensor 1 has the positive electric connecting terminal 2 that supplies and supplies electric connecting terminal 3 with negative, arranges two diodes 4-1,4-3 between which with series circuit.Other diodes 4-1-4-4 is respectively by the explanation of three points.At this, three points in Fig. 1 do not illustrate that the electricity of series circuit interrupts.If do not arrange other diodes 4-1-4-4, then diode 4-1 is directly coupled for electric connecting terminal 2 with positive, and diode 4-3 is directly coupled for electric connecting terminal 3 with negative.
Arrange between the first diode 4-1 and the second diode 4-2 and measure link 5, described measurement link is coupled with controllable current source 6.Just to illustrating, arrange two symbols being used for current source 20,21 in FIG in current source 6, described current source alternately can be coupled with measurement link 5 by switch 23.At this, current source 20 produces negative current 7-2 and current source 21 produces positive current 7-1.
Same is APU 8 with what measure that link 5 be coupled, described APU 8 voltage 9-1,9-2 respectively when being applied to the negative current 7-2 measured on link 5 and when being applied to the positive current 7-1 measured on link 5 on detection measurement link 5.
In addition shown in Figure 1, APU 8 has analog/digital converter 15, and it detects voltage 9-1,9-2 and for each accounting temperature 11-1, the 11-2 in detected voltage 9-1,9-2.To this, analog/digital converter 15 is coupled with reference voltage 25, and described reference voltage switchably or with positive is coupled for electric connecting terminal 2 or with negative for electric connecting terminal 3.
In one embodiment, if current source 6 produces negative current 7-2, then reference voltage can be coupled for electric connecting terminal 2 with positive.In contrast, if current source 6 produces positive current 7-1, then reference voltage can be coupled for electric connecting terminal 3 with negative.But this is not that pressure is necessary.Other voltages arbitrary also can be used as reference voltage.
In order to accounting temperature 11-1,11-2, analog/digital converter 15 such as can have logical circuit, and voltage 9-1,9-2 of measuring respectively are depicted as corresponding temperature by described logical circuit.In another embodiment, the logical circuit 16 (see Fig. 2) of separation such as also can be set for this reason.
In one embodiment, current source 6 and APU 8 can be configured to the independent element of temperature sensor 1.In other embodiments, current source 6 and APU 8 can such as be arranged in ASIC etc.
Fig. 2 illustrates the block diagram of a kind of embodiment according to sensor device 12 of the present invention.
The sensor device 12 of Fig. 2 has the temperature sensor 1 according to Fig. 1.In order to clearness, the element of temperature sensor 1 is only shown at this.Temperature sensor 1 is not shown separately.
The temperature sensor 1 of Fig. 2 is distinguished as follows with the temperature sensor 1 of Fig. 1: the logical circuit 16 arranging self in APU 8, voltage 9-1,9-2 that described logical circuit 16 analyzing and processing receives from analog/digital converter 15 and accounting temperature 11-1,11-2.
In addition, sensor device 12 has sensor element 13, and described sensor element 13 and four diode 4-1-4-2 and the measurement link 5 be arranged between diode 4-1-4-4 are arranged on measuring sensor 31 jointly.At this, sensor element 13 provides measured value 30, the such as pressure or acceleration etc. of physical parameter to logical circuit 16.Current source 6 and APU 8 are arranged in ASIC32 jointly.
Sensor element 13 can be such as micro-electromechanical pressure transducer element 13 and/or gas sensor 13.Other sensor type is possible equally.
The detection of two temperature 11-1,11-2 is one after the other implemented.In described exemplary embodiment, be applied to the positive saturation voltage adding APU 8 for the twice that is the maximum forward voltage of diode 4-1-4-4 of the working voltage on electric connecting terminal 2.
First, produce negative current 7-2 by current source 6, described negative current flow into negative supplying electric connecting terminal 3 for electric connecting terminal 2 by diode 4-2,4-1 and current source 6 from positive.For this reason, switch 23 is so set, current source 20 is coupled with measurement link 5.Now, diode 4-1,4-2 reduce the forward voltage 9-1 of twice.The temperature proportional of described forward voltage 9-1 and the first diode pair and the measurement of the first temperature 11 can be realized thus.
On the second diode pair be made up of diode 4-3,4-4, only reduce the significantly little saturation voltage of analyzing and processing circuit 8.Therefore the parasitic current flowing through diode 4-3,4-4 by saturation voltage can be ignored than the little multiple order of magnitude of measurement electric current usually.
After the measurement of the first temperature 4-1, produce and supply electric connecting terminal 2 through current source 6 to the positive measurement electric current 7-1 measured link 5 from positive.For this reason, switch 23 is so set, current source 21 is coupled with measurement link 5.
Now, the second diode pair be made up of diode 4-3,4-4 reduces the forward voltage 9-2 of twice, and the first diode pair be made up of diode 4-1,4-2 is considered as not conducting approx.The temperature proportional of described forward voltage 9-2 and the second diode pair and the measurement of the second temperature 12 can be realized thus.
If current source 6 produces positive current 7-1, then the reference voltage 25 of analog/digital converter 15 is coupled for electric connecting terminal 3 with negative.If current source 6 produces negative current 7-2, then the reference voltage 25 of analog/digital converter 15 is coupled for electric connecting terminal 2 with positive.
In one embodiment, logical circuit 16 such as also can according to detected temperature 11-1,11-2 correcting measuring value 30 and export the measured value 30 that corrected.
In one embodiment, the quantity of selection diode 4-1-4-2 like this, makes to flow into negative for electric current electric connecting terminal 3 relative to the common measurement electric current that flow through sensor element 13 can ignore for electric connecting terminal 2 through diode 4-1-4-2 from positive.Therefore, the series circuit of diode 4-1-4-2 is in operation and always can be considered as not conducting approx.
In one embodiment, diode 4-1,4-2 and 4-3 of selection portion branch path like this (such as the half of the sum of diode 4-1-4-2), the quantity of 4-4, make the voltage drop of the maximum possible on corresponding partial branch a little less than working voltage, namely a little less than being applied to the positive voltage supplied between electric connecting terminal 3 supplying electric connecting terminal 2 and bear.At this, the meticulous adjustment of voltage drop can be realized by the size of working point and diode 4-1-4-4.Required is limited by the voltage drop of the minimum permission of analyzing and processing circuit with the spacing of working voltage.
By technological fluctuation and large temperature range, always above-mentioned condition can not be followed separately by the tolerance of diode and quantity.Therefore, in one embodiment, APU 8 regulates working point with can being configured to additionally always to deduct a little less than working voltage the saturation voltage of APU 8.
Fig. 3 illustrates the process flow diagram according to a kind of embodiment for the manufacture of temperature sensor 1 according to the present invention of the present invention.According to the present invention, arrange positive for electric connecting terminal 2 with negative provide S1 for electric connecting terminal 3.In addition, between positive confession electric connecting terminal 2 and negative confession electric connecting terminal 3, in electric, at least two diode 4-1-4-4 are in series arranged with conducting direction, S2.Arrange between at least two diode 4-1-4-4 and measure link 5, S3.
Finally, controllable current source 6 and APU 8 are coupled with measurement link 5, S4 and S5.
Controllable current source 6 applies positive current and negative current 7-1,7-2 alternately to measurement link 5, and APU 8 is configured to positive current 7-1 for current source 6 and detect for the negative current 7-2 of current source 6 and measure voltage 9-1,9-2 on link 5 and according to detected voltage 9-1,9-2 accounting temperature 11-1,11-2.
In a kind of embodiment of described method, between positive confession electric connecting terminal 2 and negative confession electric connecting terminal 3, arrange even number diode 4-1-4-4.In addition, link 5 is measured in the intermediate arrangement of series connection.In addition, in one embodiment, so selecting the quantity of diode 4-1-4-4 according to being applied to positive supply electric connecting terminal 2 and the negative voltage between electric connecting terminal 3 that supplies, making the electric current flowing through diode 4-1-4-4 be no more than first threshold.
In one embodiment, so can select positive for electric connecting terminal 2 with measure the quantity of the diode 4-1-4-2 between link 5 and measure link 5 and the negative quantity for the diode 4-3-4-4 between electric connecting terminal 3, the voltage drop of corresponding maximum possible be laid respectively at be applied to positive for electric connecting terminal 2 and negative for below the voltage between electric connecting terminal 3.
In one embodiment, the quantity of selection diode 4-1-4-4 like this, makes supply electric connecting terminal 2 positive and measure on the diode 4-1-4-2 between link 5 or deduct the saturation voltage of APU 8 in the voltage drop of measurement link 5 and the negative corresponding maximum possible for the diode 4-3-4-4 between electric connecting terminal 3 corresponding to being applied to positive supply electric connecting terminal 2 and the negative voltage between electric connecting terminal 3 that supplies.
In one embodiment, described controllable current source 6 can so be implemented by adjustable ground, make to measure voltage on link 5 be applied to positive for electric connecting terminal 2 with negative deduct below the saturation voltage of APU 8 for the voltage between electric connecting terminal 3.
Although describe the present invention above by preferred embodiment, the present invention is not limited to this, but can method modify in several ways.Especially can change in every way when not departing from core of the present invention or amendment the present invention.
Claims (14)
1. a temperature sensor (1), it has:
Positive confession electric connecting terminal (2) and negative confession electric connecting terminal (3);
At least two diodes (4-1-4-4), they are in series arranged between described positive confession electric connecting terminal (2) and described negative confession electric connecting terminal (3) with conducting direction in electric;
Measure link (5), its be arranged in described between at least two diodes (4-1-4-4);
Controllable current source (6), described controllable current source (6) is coupled with described measurement link (5) and is configured to above apply positive current and negative current (7-1,7-2) described measurement link (5);
APU (8), described APU (8) is configured to, for the positive current (7-1) of described current source (6) and the voltage (9-1 detected for the negative current (7-2) of described current source (6) on described measurement link (5), 9-2) and according to detected voltage (9-1,9-2) difference accounting temperature (11-1,11-2).
2. temperature sensor according to claim 1,
Wherein, the diode that even number is in series arranged in electric is set; And/or
Wherein, described measurement link (5) is arranged in the centre of described series connection.
3. the temperature sensor according to any one of the preceding claims,
Wherein, the quantity of described diode (4-1-4-4), according to being applied to described positive so constructing for electric connecting terminal (2) and the described negative voltage between electric connecting terminal (3) that supplies, makes the electric current flowing through described diode (4-1-4-4) be no more than first threshold.
4. the temperature sensor according to any one of the preceding claims,
Wherein, the described positive quantity for the diode (4-1-4-2) between electric connecting terminal (2) and described measurement link (5) and described measurement link (5) and the described negative quantity for the diode (4-3-4-4) between electric connecting terminal (3) so construct, and make especially to lay respectively in the voltage drop of the corresponding maximum possible in working point place to be applied to described positive confession electric connecting terminal (2) and described negative for below the voltage between electric connecting terminal (3).
5. the temperature sensor according to any one of the preceding claims,
Wherein, the quantity of described diode (4-1-4-4) so constructs, and makes in described positive supplying on the diode (4-1-4-2) between electric connecting terminal (2) and described measurement link (5) or deduct the saturation voltage of described APU (8) described measurement link (5) and the described negative voltage drop for the corresponding maximum possible on the diode (4-3-4-4) between electric connecting terminal (3) corresponding to being applied to described positive supply electric connecting terminal (2) and the described negative voltage between electric connecting terminal (3) that supplies.
6. the temperature sensor according to any one of the preceding claims,
Wherein, described APU (8) is configured to so control described controllable current source (6), and the magnitude of voltage on described measurement link (5) is positioned at, and the voltage be applied between described positive confession electric connecting terminal (3) and described negative confession electric connecting terminal (2) deducts below the saturation voltage of described APU (8).
7. a sensor device (12), it has:
The sensor element (13) of at least one temperature correlation, described sensor element (13) is configured to detect physical parameter;
Temperature sensor according to any one of claim 1 to 6 (1).
8. sensor device according to claim 7,
Wherein, the sensor element (13) of described temperature correlation is configured to micro-electromechanical pressure transducer element (13) and/or gas sensor (13).
9., for the manufacture of a manufacture method for temperature sensor according to any one of claim 1 to 6 (1), described manufacture method has:
Confession electric connecting terminal (2) providing (S1) positive and negative confession electric connecting terminal (3);
In electric, (S2) at least two diodes (4-1-4-4) are in series arranged with conducting direction between described positive confession electric connecting terminal (2) and described negative confession electric connecting terminal (3);
Between described at least two diodes (4-1-4-4), arrange that (S3) measures link (5);
Be coupled (S4) with described measurement link (5) by controllable current source (6), described controllable current source is configured at described measurement link (5) upper applying positive current and negative current (7-1,7-2);
APU (8) is coupled (S5) with described measurement link (5), described APU (8) is configured to, for the positive current (7-1) of described current source (6) and the voltage (9-1 detected for the negative current (7-2) of described current source (6) on described measurement link (5), 9-2) and according to detected voltage (9-1,9-2) accounting temperature (11-1,11-2).
10. manufacture method according to claim 9,
Wherein, between described positive confession electric connecting terminal (2) and described negative confession electric connecting terminal (3), even number diode (4-1-4-4) is arranged;
Wherein, described in the intermediate arrangement of described series connection, link (5) is measured.
11. manufacture methods according to any one of claim 9 and 10,
Wherein, so selecting the quantity of described diode (4-1-4-4) according to being applied to described positive supply electric connecting terminal (2) and the described negative voltage between electric connecting terminal (3) that supplies, making the electric current flowing through described diode (4-1-4-4) be no more than first threshold.
12. manufacture methods according to any one of claim 9 to 11,
Wherein, the described positive quantity for the diode (4-1-4-2) between electric connecting terminal (2) and described measurement link (5) of selection like this and described measurement link (5) and the described negative quantity for the diode (4-3-4-4) between electric connecting terminal (3), make especially to lay respectively in the voltage drop of the corresponding maximum possible in working point place to be applied to described positive confession electric connecting terminal (2) and described negative for below the voltage between electric connecting terminal (3).
13. manufacture methods according to any one of claim 9 to 12,
Wherein, the quantity of the described diode of selection like this (4-1-4-4), makes in described positive supplying on the diode (4-1-4-2) between electric connecting terminal (2) and described measurement link (5) or deduct the saturation voltage of described APU (8) described measurement link (5) and the described negative voltage drop for the corresponding maximum possible on the diode (4-3-4-4) between electric connecting terminal (3) corresponding to being applied to described positive supply electric connecting terminal (2) and the described negative voltage between electric connecting terminal (3) that supplies.
14. manufacture methods according to any one of claim 9 to 11, described manufacture method has: so regulate described controllable current source (6), and the voltage on described measurement link (5) is positioned at, and the voltage be applied between described positive confession electric connecting terminal (2) and described negative confession electric connecting terminal (3) deducts below the saturation voltage of described APU (8).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014222612.0A DE102014222612A1 (en) | 2014-11-05 | 2014-11-05 | Temperature sensor, sensor device and manufacturing method |
| DE102014222612.0 | 2014-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105571733A true CN105571733A (en) | 2016-05-11 |
| CN105571733B CN105571733B (en) | 2019-07-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510744652.0A Active CN105571733B (en) | 2014-11-05 | 2015-11-04 | Temperature sensor, sensor device and manufacturing method |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN105571733B (en) |
| CH (1) | CH710368B1 (en) |
| DE (1) | DE102014222612A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080297955A1 (en) * | 2007-05-30 | 2008-12-04 | Infineon Technologies Agam Campeon | Sensor temperature compensation |
| DE102009027243A1 (en) * | 2009-06-26 | 2010-12-30 | Robert Bosch Gmbh | Temperature sensor signal processing device for determining temperature of oil of automatic transmission in motorvehicle, has output interface with output terminal, which is connected with sensor terminal and outputs processed sensor signal |
| CN102313610A (en) * | 2010-03-31 | 2012-01-11 | 微软公司 | Be used for the temperature survey and the control of laser and light emitting diode |
| CN102998016A (en) * | 2011-09-07 | 2013-03-27 | 英飞凌科技奥地利有限公司 | Temperature evaluation circuit |
| CN103162852A (en) * | 2013-03-20 | 2013-06-19 | 上海理工大学 | Method for detecting junction temperature of alternating current light emitting diode based on threshold voltage |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10231727A1 (en) | 2002-07-13 | 2004-01-22 | Robert Bosch Gmbh | Micromechanical pressure sensor device and corresponding measuring arrangement |
-
2014
- 2014-11-05 DE DE102014222612.0A patent/DE102014222612A1/en active Pending
-
2015
- 2015-08-17 CH CH01179/15A patent/CH710368B1/en not_active IP Right Cessation
- 2015-11-04 CN CN201510744652.0A patent/CN105571733B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080297955A1 (en) * | 2007-05-30 | 2008-12-04 | Infineon Technologies Agam Campeon | Sensor temperature compensation |
| DE102009027243A1 (en) * | 2009-06-26 | 2010-12-30 | Robert Bosch Gmbh | Temperature sensor signal processing device for determining temperature of oil of automatic transmission in motorvehicle, has output interface with output terminal, which is connected with sensor terminal and outputs processed sensor signal |
| CN102313610A (en) * | 2010-03-31 | 2012-01-11 | 微软公司 | Be used for the temperature survey and the control of laser and light emitting diode |
| CN102998016A (en) * | 2011-09-07 | 2013-03-27 | 英飞凌科技奥地利有限公司 | Temperature evaluation circuit |
| CN103162852A (en) * | 2013-03-20 | 2013-06-19 | 上海理工大学 | Method for detecting junction temperature of alternating current light emitting diode based on threshold voltage |
Also Published As
| Publication number | Publication date |
|---|---|
| CH710368B1 (en) | 2019-06-28 |
| DE102014222612A1 (en) | 2016-05-12 |
| CH710368A2 (en) | 2016-05-13 |
| CN105571733B (en) | 2019-07-05 |
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