CN105552185B - A kind of full-inorganic light emitting diode with quantum dots and preparation method thereof based on inorganic perovskite material - Google Patents

A kind of full-inorganic light emitting diode with quantum dots and preparation method thereof based on inorganic perovskite material Download PDF

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CN105552185B
CN105552185B CN201610071423.1A CN201610071423A CN105552185B CN 105552185 B CN105552185 B CN 105552185B CN 201610071423 A CN201610071423 A CN 201610071423A CN 105552185 B CN105552185 B CN 105552185B
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light emitting
inorganic
emitting diode
full
quantum dots
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CN105552185A (en
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曾海波
李建海
许蕾梦
宋继中
董宇辉
薛洁
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/14Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure

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Abstract

The invention discloses a kind of full-inorganic light emitting diode with quantum dots based on inorganic perovskite material, by ito glass, p-type oxide semi-conducting material NiO hole transmission layers, inorganic perovskite CsPbX3Quantum dot light emitting layer, N-shaped oxide semiconductor material electron transfer layer and cathode electrode material composition.It is prepared by following steps:Make hole transmission layer by depositing p-type inorganic oxide material first on ito glass, it is then spin coated onto inorganic halides perovskite quantum dot, electron transfer layer is made by magnetron sputtering deposition N-shaped inorganic oxide again, finally by the metal electrode of thermal evaporation deposition light emitting diode, the uniform full-inorganic CsPbX that shines is obtained3Perovskite light emitting diode with quantum dots.Full-inorganic light emitting diode with quantum dots luminescent spectrum halfwidth prepared by the present invention is narrow, and excitation purity is high, and stability is good, has excellent performance, and is with a wide range of applications.

Description

A kind of full-inorganic light emitting diode with quantum dots and its system based on inorganic perovskite material Preparation Method
Technical field
The present invention relates to a kind of full-inorganic light emitting diode with quantum dots and preparation method thereof based on inorganic perovskite material, Belong to quanta point electroluminescent device technical field.
Background technology
Light emitting diode (LED) is widely used in fields such as display, illumination and backlights, because of its excellent luminous efficiency and Device performance, which has gradually replaced traditional fluorescent lamp, becomes the light source of a new generation.Organic Light Emitting Diode (OLED) is sent out with quantum dot Optical diode (QLED) is considered as two big Main ways of the following LED development.Unique quantum effect assigns semiconductor-quantum-point Material emission Wavelength tunable, the features such as emission spectrum peak width is narrow, quantum efficiency is high, semiconductor-quantum-point material are shining two The fields such as pole pipe, display and solar cell have applications well foreground.So far, most of light emitting diode with quantum dots Luminescent layer is all made of cadmium based quantum dot, and preparation process is cumbersome, and stability is in urgent need to be improved.Recently, inorganic perovskite quantum dot (CsPbX3, X=Cl, Br, I) and excellent photoelectric properties cause extensive concern, easily solution synthesis, high-quantum efficiency (being more than 80%) and narrow glow peak (being less than 30nm) make inorganic perovskite material become new research hotspot, are expected to break through QLED necks Application problem in domain.
Hole transmission layer and electron transport layer materials in common QLED mostly use organic material.1 (Highly of document Efficient Quantum-Dot Light-Emitting Diodes with DNA-CTMA as a Combined Hole- Transporting and Electron-Blocking Layer, ACS Nano 2009,3,737-743) utilize PEDOT: PSS, TPD, DNA-CTMA do hole transmission layer, TPBi, and Alq3 does electron transfer layer, however these organic materials are sufficiently expensive, And be vulnerable to the influence of oxygen and moisture in atmospheric environment and reduce performance, cause QLED preparation process to require stringent, increases Cost.Compared with organic transport layer material, inorganic material has higher electronics, hole mobility, and has in air good Stability, therefore inorganic carrier transport layer material in the light emitting diode have huge application potential.
Invention content
The purpose of the present invention is to provide a kind of full-inorganic light emitting diode with quantum dots based on inorganic perovskite material and Preparation method.
To achieve the goals above, technical scheme is as follows:A kind of full-inorganic based on inorganic perovskite material Light emitting diode with quantum dots, including ito glass, p-type oxide semi-conducting material NiO hole transmission layers, inorganic perovskite CsPbX3Quantum dot light emitting layer, N-shaped oxide semiconductor material electron transfer layer and cathode electrode material composition, the cathode electricity Pole material is Ag or Al, and the full-inorganic light emitting diode with quantum dots is prepared by following steps:
Step 1, make hole transmission layer in clean ito glass surface depositing p-type oxide semiconductor material NiO, go forward side by side Row heat treatment;
Step 2, CsPbX is taken3The dispersion liquid of quantum dot is spin-coated on through step 1 treated device surface;
Step 3, the surface magnetic control sputtering depositing n-type oxide semiconductor material after step 2 spin coating makees electron transfer layer, Last thermal evaporation deposition cathode electrode material obtains full-inorganic light emitting diode with quantum dots.
Preferably, in step 1, the deposition of hole transport layer uses spin-coating method or magnetron sputtering method, the p-type oxygen The deposition thickness of compound semi-conducting material NiO is 25~50nm, and heat treatment temperature is 300 DEG C~450 DEG C.
Preferably, in step 2, the CsPbX3X in quantum dot is that Cl, Br, I element or arbitrary the two combine, CsPbX3The dispersion liquid of quantum dot is CsPbX3Quantum dot is dispersed in normal octane solvent, a concentration of 10~15mg/ of dispersion liquid ML, spin speed are 1500~2000r/min, and spin-coating time is 45~60s.
Preferably, in step 3, the N-shaped oxide semiconductor material is ZnO or TiO2, deposition thickness be 40~ 60nm;The cathode electrode material is Ag or Al, and deposition thickness is 80~100nm.
Compared with prior art, it is an advantage of the invention that:The present invention uses the device architecture of full-inorganic, using oxide half Conductor material improves device stability as electron transfer layer and hole transmission layer while reducing cost;Nothing is used simultaneously Machine perovskite CsPbX3Quantum dot improves its luminous efficiency as luminescent layer, light-emitting diode luminance produced by the present invention it is high and It has excellent performance, is with a wide range of applications.
Description of the drawings
Fig. 1 is the structural schematic diagram of the light emitting diode of the present invention.
Fig. 2 is the current density of light emitting diode prepared by embodiment 2 with applied voltage variation relation figure.
Fig. 3 is the electroluminescent collection of illustrative plates of light emitting diode prepared by embodiment 3.
Specific implementation mode
Below by embodiment and attached drawing, the invention will be further described.
The present invention a kind of full-inorganic light emitting diode with quantum dots based on inorganic perovskite material, structure as shown in Figure 1, Including ito glass, it is deposited on p-type oxide semi-conducting material NiO hole transmission layers, the inorganic perovskite on ito glass surface CsPbX3Quantum dot light emitting layer, N-shaped oxide semiconductor material electron transfer layer and cathode electrode material, preparation method are as follows: Hole transport is made by the p-type oxide NiO of 25~50nm of spin coating or magnetron sputtering deposition first on clean ito glass Layer, spin-on inorganic perovskite CsPbX3 quantum dot light emitting layers again after 300 DEG C~450 DEG C heat treatments, then pass through magnetron sputtering deposition N-shaped the oxide ZnO or TiO of 40~60nm2Make electron transfer layer, the cathode electrode material of last 80~100nm of thermal evaporation deposition Expect Ag or Al, finally obtains luminous uniform full-inorganic CsPbX3Perovskite light emitting diode with quantum dots.
Embodiment 1
Step 1, take ito glass through acetone, vacuum drying after ethyl alcohol and deionized water cleaning passes through magnetron sputtering deposition The NiO of 20nm thickness makees hole transmission layer, in air through 350 DEG C of processing 15min;
Step 2, the CsPbBr of appropriate 10mg/mL high―temperature nucleis is taken3Quantum dot dispersion liquid is spin-coated on the device after step 1 processing Part surface, rotating speed 1500r/min, spin-coating time 45s;
Step 3, electron transfer layer, reheating are made in the surface after step 2 spin coating by the ZnO of magnetron sputtering deposition 40nm thickness Ag (or Al) electrode of one layer of 80nm of hydatogenesis is made and is based on CsPbBr3Full-inorganic light emitting diode with quantum dots.
Embodiment 2
Step 1, take ito glass through acetone, vacuum drying after ethyl alcohol and deionized water cleaning passes through magnetron sputtering deposition The NiO of 40nm thickness makees hole transmission layer, in air through 450 DEG C of processing 10min;
Step 2, the CsPbBr of appropriate 15mg/mL high―temperature nucleis is taken3Quantum dot dispersion liquid is spin-coated on the device after step 1 processing Part surface, rotating speed 2000r/min, spin-coating time 45s;
Step 3, electron transfer layer, reheating are made in the surface after step 2 spin coating by the ZnO of magnetron sputtering deposition 50nm thickness Ag (or Al) electrode of one layer of 100nm of hydatogenesis is made and is based on CsPbBr3Full-inorganic light emitting diode with quantum dots, device The current density of part and application voltage relationship figure are as shown in Figure 2, it can be seen that the startup voltage of device is relatively low, meets energy-saving Demand.
Embodiment 3
Step 1, take ito glass through acetone, vacuum drying after ethyl alcohol and deionized water cleaning passes through magnetron sputtering deposition The NiO of 20nm thickness makees hole transmission layer, in air through 350 DEG C of processing 15min;
Step 2, the CsPbBr of appropriate 10mg/mL high―temperature nucleis is taken3Quantum dot dispersion liquid is spin-coated on the device after step 1 processing Part surface, rotating speed 1500r/min, spin-coating time 45s;
Step 3, the TiO that the surface after step 2 spin coating passes through magnetron sputtering deposition 40nm thickness2Make electron transfer layer, then Ag (or Al) electrode of one layer of 80nm of thermal evaporation deposition is made and is based on CsPbBr3Full-inorganic light emitting diode with quantum dots.
Electroluminescent (EL) spectrum of full-inorganic light emitting diode with quantum dots device manufactured in the present embodiment as shown in figure 3, With very pure glow peak, without other miscellaneous peaks, and the halfwidth of emission peak is narrow, only 30nm or so.
Embodiment 4
Step 1, take ito glass through acetone, vacuum drying after ethyl alcohol and deionized water cleaning passes through magnetron sputtering deposition The NiO of 20nm thickness makees hole transmission layer, in air through 350 DEG C of processing 15min;
Step 2, the CsPbIBr of appropriate 10mg/mL high―temperature nucleis is taken2Quantum dot dispersion liquid is spin-coated on after step 1 processing Device surface, rotating speed 1500r/min, spin-coating time 45s;
Step 3, electron transfer layer, reheating are made in the surface after step 2 spin coating by the ZnO of magnetron sputtering deposition 40nm thickness Ag (or Al) electrode of one layer of 80nm of hydatogenesis is made and is based on CsPbIBr2Full-inorganic light emitting diode with quantum dots.

Claims (5)

1. a kind of full-inorganic light emitting diode with quantum dots based on inorganic perovskite material, which is characterized in that by ito glass, p-type Oxide semiconductor material NiO hole transmission layers, inorganic perovskite CsPbX3Quantum dot light emitting layer, N-shaped oxide semiconductor material Expect electron transfer layer and cathode electrode material composition, is made by following steps:
Step 1, make hole transmission layer in clean ito glass surface depositing p-type oxide semiconductor material NiO, and carry out heat Processing;
Step 2, CsPbX is taken3The dispersion liquid of quantum dot is spin-coated on through step 1 treated device surface;
Step 3, the surface magnetic control sputtering depositing n-type oxide semiconductor material after step 2 spin coating makees electron transfer layer, finally Thermal evaporation deposition cathode electrode material obtains full-inorganic light emitting diode with quantum dots, and the N-shaped oxide semiconductor material is ZnO or TiO2
2. full-inorganic light emitting diode with quantum dots according to claim 1, which is characterized in that the cathode electrode material For Ag or Al.
3. full-inorganic light emitting diode with quantum dots according to claim 1, which is characterized in that in step 1, the deposition Hole transmission layer uses spin-coating method or magnetron sputtering method, and the deposition thickness of the p-type oxide semi-conducting material NiO is 25~ 50nm, heat treatment temperature are 300 DEG C~450 DEG C.
4. full-inorganic light emitting diode with quantum dots according to claim 1, which is characterized in that described in step 2 CsPbX3X in quantum dot is Cl, Br, I element or arbitrary the two combination, CsPbX3The dispersion liquid of quantum dot is CsPbX3Amount Son point is dispersed in normal octane solvent, a concentration of 10~15mg/mL of dispersion liquid, and spin speed is 1500~2000r/min, rotation The painting time is 45~60s.
5. full-inorganic light emitting diode with quantum dots according to claim 1, which is characterized in that in step 3, the N-shaped Oxide semiconductor material is ZnO or TiO2, deposition thickness is 40~60nm;The cathode electrode material is Ag or Al, Deposition thickness is 80~100nm.
CN201610071423.1A 2016-02-01 2016-02-01 A kind of full-inorganic light emitting diode with quantum dots and preparation method thereof based on inorganic perovskite material Expired - Fee Related CN105552185B (en)

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CN106450042B (en) * 2016-09-26 2020-03-31 Tcl集团股份有限公司 Metal oxide, QLED and preparation method
CN106450021A (en) * 2016-11-24 2017-02-22 南方科技大学 Organic electroluminescent device and preparation method thereof
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