CN105550421B - A kind of composite polishing path - Google Patents
A kind of composite polishing path Download PDFInfo
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- CN105550421B CN105550421B CN201510900722.7A CN201510900722A CN105550421B CN 105550421 B CN105550421 B CN 105550421B CN 201510900722 A CN201510900722 A CN 201510900722A CN 105550421 B CN105550421 B CN 105550421B
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- path
- composite polishing
- polishing path
- shift term
- polar coordinates
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/10—Geometric CAD
- G06F30/17—Mechanical parametric or variational design
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2119/00—Details relating to the type or aim of the analysis or the optimisation
- G06F2119/18—Manufacturability analysis or optimisation for manufacturability
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- Theoretical Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Pure & Applied Mathematics (AREA)
- Mathematical Optimization (AREA)
- Mathematical Analysis (AREA)
- Computer Hardware Design (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Computational Mathematics (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
A kind of composite polishing path, is related to optical processing technology field.The present invention is in order to solve the problems, such as that general polar coordinates path be easy to cause optical element surface concentric circles intermediate frequency error occur, a kind of composite polishing path is constructed by way of additional offset item on the basis of general polar coordinates path, the shape of the shift term in the composite polishing path can pass through periodic function λ (κ, θi) controlled, the amplitude of shift term can pass through amplitude controlling function ζ (b, θi) be adjusted.The composite polishing path has good continuity and slickness, and polar coordinates path can be improved in the removal ability of optical element radial direction, is conducive to inhibit concentric circles intermediate frequency ripple error, and then improve processing efficiency and machining accuracy.
Description
Technical field
The present invention relates to optical manufacturing fields, and in particular to a kind of for controlling the composite polishing of machining tool motion profile
Path.
Background technique
The development of optical technology and photoelectron technology is to processing qualities such as surface figure accuracy, the surface roughnesses of optical element
Propose increasingly higher demands.In order to effectively control the processing quality of optical element surface, processing staff is generallyd use with one heart
Circle path and spiral path.This class.path be easy to state in polar coordinate system thus commonly referred to as polar coordinates path.This
The Common advantages of class.path are that algorithm is simple, are easily achieved and high in machining efficiency, and common drawback is to cause optics after processing
There is the intermediate frequency error of concentric circles in element surface.This phenomenon is since the unicity and material of the path direction of motion are gone
Caused by unicity except direction.In order to solve this problem, processing staff can use raster paths and polar coordinates path phase
In conjunction with mode remove intermediate frequency error caused by single-pathway.But the intermediate frequency error due to removing optical surface is suitable
Difficulty generally requires the cyclic process more taken turns.The thus intermediate frequency residual error greatly shadow that the single machining path in this direction generates
Processing efficiency and optical surface quality are rung.
Summary of the invention
The present invention is to solve the problems, such as that existing polar coordinates polishing path generates specific period intermediate frequency error, is provided a kind of multiple
Close polishing path.
Composite polishing path, the composite polishing path are made of m discrete point, i.e. { Pi(x, y), i=1 ... m }, the m
The calculation method of a discrete point is based on polar coordinates path and additional normal direction shift term obtains, the parsing in composite polishing path
Relationship are as follows:
In formula, ρ (a, θi) on the basis of item polar coordinates path, θiFor PiThe corresponding polar angle of point, a are control electrode coordinate pathway
The path distance control coefrficient of spacing；ζ(b,θi) be shift term amplitude controlling function, b be benchmark amplitude, λ (κ, θi) it is offset
The shape function of item, κ is the wave number occurred in circumference range for controlling shape function.
Beneficial effects of the present invention: the present invention can guarantee increase while it is circumferentially removed using composite polishing path
Radially removed ability, intermediate frequency error residuals caused by avoiding the path direction of motion single are conducive to the intermediate frequency for inhibiting optical surface
Error improves surface processing accuracy.
Detailed description of the invention
Fig. 1 is composite polishing path theory schematic diagram of the present invention.
Specific embodiment
Specific embodiment one, embodiment is described with reference to Fig. 1, composite polishing path, and the composite polishing path is by m
Discrete point is constituted, i.e. { Pi(x, y), i=1 ... m }.
The calculation method of compound path each point is based on common polar coordinates path and additional normal direction shift term obtains, multiple
It closes polishing path and follows following parsing relationship:
In formula, item on the basis of the 1st on the right side of equal sign, the 2nd, equal sign right side is shift term；ρ(a,θi) represent benchmark pole seat
Mark path, θiFor PiCorresponding polar angle (the θ of pointi=θi-1+ Δ θ, θi-1For Pi-1The corresponding polar angle of point, Δ θ are angle step, are used for
Control the density of discrete point), a is the path distance control coefrficient of control electrode coordinate pathway spacing；ζ(b,θi) be shift term vibration
Width control function, b are benchmark amplitude, usual b≤0.5a；λ(κ,θi) be shift term shape function, κ is for controlling shape letter
The wave number that number occurs in circumference range.
Benchmark polar coordinates path is spiral of Archimedes as a preferred embodiment, i.e.,
A is the path distance control coefrficient of control electrode coordinate pathway spacing in formula, and A Ji meter is indicated in this formula (2)
The screw pitch of moral helix, and usual a ∈ (0,10], a=6 is taken herein.
Shape function is trigonometric function as a preferred embodiment, i.e.,
λ(κ,θi)=sin (κ θi) (3)
The vibration period of the add on method item shift term is T=2 π/κ, takes κ=8.3 herein
Amplitude controlling function is piecewise function as a preferred embodiment, i.e.,
B=10, θ are taken herein02 π are taken as constant.
According to the determination of above scheme, the analytical formula of each coordinate points in composite polishing path are as follows:
Amplitude controlling function ζ (b, θ in formulai) expression formula such as formula (4) it is described.
Composite polishing path can be obtained according to the value of formula (5) and each term coefficient described above.As shown in Figure 1, i.e.
For a kind of composite polishing path that item generates on the basis of spiral of Archimedes.
The amplitude of add on method item shift term described in present embodiment is controllable.And when add on method item shift term amplitude is 0
When, it is polar coordinates path that composite polishing path, which is degenerated,.
Claims (6)
1. composite polishing path, which is made of m discrete point, i.e. { Pi(x, y), i=1 ... m }, characterized in that
The calculation method of the m discrete point is based on polar coordinates path and additional normal direction shift term obtains, composite polishing path
Parsing relationship are as follows:
In formula, ρ (a, θi) on the basis of item polar coordinates path, θiFor PiThe corresponding polar angle of point, a are control electrode coordinate pathway spacing
Path distance control coefrficient；ζ(b,θi) be shift term amplitude controlling function, b be benchmark amplitude, λ (κ, θi) it is shift term
Shape function, κ are the wave number occurred in circumference range for controlling shape function；
The polar coordinates path is spiral of Archimedes, i.e.,
The amplitude controlling function is piecewise function, i.e.,
B is constant, θ02 π are taken as constant.
2. composite polishing path according to claim 1, which is characterized in that the θi=θi-1+ Δ θ, θi-1For Pi-1Point pair
The polar angle answered, Δ θ are angle step, and the Δ θ is used to control the density of discrete point.
3. composite polishing path according to claim 1 or 2, which is characterized in that the value range of b are as follows: b≤0.5a.
4. composite polishing path according to claim 3, which is characterized in that the amplitude of the add on method item shift term can
Control.
5. composite polishing path according to claim 4, which is characterized in that the additional normal direction shift term is period letter
Number, vibration period T=2 π/κ of the periodic function.
6. composite polishing path according to claim 5, which is characterized in that the add on method item shift term amplitude is 0
When, it is polar coordinates path that composite polishing path, which is degenerated,.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510900722.7A CN105550421B (en) | 2015-12-09 | 2015-12-09 | A kind of composite polishing path |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510900722.7A CN105550421B (en) | 2015-12-09 | 2015-12-09 | A kind of composite polishing path |
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| Publication Number | Publication Date |
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| CN105550421A CN105550421A (en) | 2016-05-04 |
| CN105550421B true CN105550421B (en) | 2019-01-25 |
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| CN201510900722.7A Expired - Fee Related CN105550421B (en) | 2015-12-09 | 2015-12-09 | A kind of composite polishing path |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3538318B1 (en) * | 2016-11-08 | 2024-01-03 | ABB Schweiz AG | Method of polishing a work piece and system therefor |
| CN111079889B (en) * | 2019-12-13 | 2022-07-05 | 吉林大学 | Improved decomposition-based multi-target particle swarm planning spiral polishing track method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008057983A (en) * | 2006-08-29 | 2008-03-13 | Ulvac Japan Ltd | Device and method for evaluating lens polishing precision |
| CN101274822A (en) * | 2008-03-31 | 2008-10-01 | 中国人民解放军国防科学技术大学 | Planning method for ion beam polishing path |
| CN102019572A (en) * | 2010-11-01 | 2011-04-20 | 中国人民解放军国防科学技术大学 | Polishing process adopting combined spiral polishing path |
-
2015
- 2015-12-09 CN CN201510900722.7A patent/CN105550421B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008057983A (en) * | 2006-08-29 | 2008-03-13 | Ulvac Japan Ltd | Device and method for evaluating lens polishing precision |
| CN101274822A (en) * | 2008-03-31 | 2008-10-01 | 中国人民解放军国防科学技术大学 | Planning method for ion beam polishing path |
| CN102019572A (en) * | 2010-11-01 | 2011-04-20 | 中国人民解放军国防科学技术大学 | Polishing process adopting combined spiral polishing path |
Non-Patent Citations (1)
| Title |
|---|
| 极坐标数控专用木工铣床设计与仿真研究;潘俊萍;《中国优秀硕士学位论文全文数据库 工程科技I辑》;20111015(第10期);第6-13页 * |
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| CN105550421A (en) | 2016-05-04 |
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