CN105527024B - Temperature measuring equipment, system and method based on light radiation - Google Patents
Temperature measuring equipment, system and method based on light radiation Download PDFInfo
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- CN105527024B CN105527024B CN201610080128.2A CN201610080128A CN105527024B CN 105527024 B CN105527024 B CN 105527024B CN 201610080128 A CN201610080128 A CN 201610080128A CN 105527024 B CN105527024 B CN 105527024B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
Abstract
The invention proposes a kind of temperature measuring equipments based on light radiation, system and method.The equipment includes: light radiation equal division device, is configured to receive the light radiation of object to be measured, is divided into the first and second light radiation, and it is projected along the first and second paths respectively；The first and second filter elements being arranged on the first and second paths are configured to receive the first and second light radiation respectively, and are filtered into the light that wavelength is the first and second wavelength；The first and second detection devices being arranged on the first and second paths are configured to the light of a length of first and second wavelength of received wave respectively and are converted into corresponding first and second photosignals parameter；Temperature determining device is configured to receive the first and second photosignal parameters, and determines the temperature of object to be measured according to the predetermined relationship of the first and second photosignal parameters and temperature.The precision, easy to use of thermometric is greatly improved in the present invention, applied widely.
Description
Technical field
The present invention relates to field of temperature measurement, in particular to a kind of temperature measuring equipment based on light radiation, system and method.
Background technique
In fields such as aerospace, metallurgy and auto manufacturings, it is often necessary to object to be measured and various online workpiece
Quick, real time monitoring is carried out, with the security performance and its quality for reducing accident potential to the maximum extent, improving product.Continue to use biography
The contact type thermometric indicator of system measures, although precision is high, must make detector contact measured object.But certain special
Occasion under (such as in engine chamber and high temperature furnace flame carry out thermometric when) be not available contact type thermometric indicator, thus
Produce contactless temperature-measuring method.Infrared measurement of temperature method just belongs to a kind of contactless temperature-measuring method, and this method passes through detection
The energy of body surface transmitting measures temperature, has wide temperature-measuring range, fast response time and unobvious destruction testing temperature field etc.
Feature is widely used in industrial various aspects.
Infrared measurement of temperature method is based primarily upon blackbody radiation theory, and black matrix is a Utopian physical model, and nature
The object (thermometric object) of middle physical presence, absorbability and radianting capacity are all smaller than black matrix, referred to as grey body.According to Planck
Radiation law, the black matrix that an absolute temperature is T, per surface area is in wavelength X1、λ2(λ1Near per wavelength) interval in
The radiant power (abbreviation spectral radiant emittance) emitted to entire hemispherical space is E0(λ, T), and the spectral radiant energy of grey body
Calculation formula are as follows: E (λ, T)=ε (λ, T) E0(λ, T), wherein ε (λ, T) is the radiance of the grey body.
Infrared measurement of temperature mainly experienced the development of three phases in the prior art.
First stage: traditional infrared measurement of temperature equipment is designed by the thermal radiation law of black matrix without exception.The design method is false
If it is proportional that the heat radiation that infrared radiation thermometer is an actually-received, which is with the spectral radiant energy E (λ, T) of measured object, therefore is being used
When infrared radiation thermometer, it is necessary to find out radiance ε (λ, T) numerical value of object to be measured, i.e. progress radiance amendment.Regrettably, should
Material, surface state, the wavelength of radiance ε (λ, T) and object to be measured, temperature and radiation condition, environmental factor etc. have multiple
Miscellaneous relationship, thus be difficult accurately to determine measurement ε (λ, T), simultaneously because the radiance of object to be measured is with temperature in some cases
Degree variation is too big, thus there is also biggish errors for traditional infrared temperature measurer.
Second stage: scientists are to solve the problems, such as that traditional infrared measurement of temperature equipment exists, and are had investigated based on unicast
Long narrow-band filtering infrared temperature-test technology.But absorption of the ambient enviroment due to there is vapor etc. to infrared ray, very
The accuracy of Single wavelength infrared measurement of temperature is affected on significantly.
Phase III: infrared temperature-test technology is filtered using dual wavelength to carry out infrared measurement of temperature.Dual wavelength filters infrared measurement of temperature
The principle of technology are as follows: the principle using corresponding energy of wavelength two neighboring in blackbody radiance curve etc. than absorption, it is red in guarantee
On the basis of outer thermometric high-acruracy survey, environment measurement error caused by object emission infrared ray absorbing is overcome.According to general
Bright gram of radiation law, the black matrix that an absolute temperature is T, per surface area λ1、λ2(λ1Near per wavelength) interval it is introversive
Radiant power (abbreviation spectral radiant emittance) E of entire hemispherical space transmitting0(λ, T) meets the variation relation of following formula:
Wherein, c is vacuum light speed c=2.99792458 × 108m/s；
H is Planck's constant, h=6.62607004 × 10-34J·s；
K is Boltzmann constant, k=1.3806488 × 10-23J/K；
C1For first radiation constant, C1=2 π hc2=3.741771790075259 × 10-16W·m2；
C2For second radiation constant, C2=hc/k=1.4387770620391 × 10-2m·K。
And the spectral radiant energy formula of grey body
Wherein, E0(λ, T) is the spectral radiant emittance of black body emission, and wavelength when λ is spectral radiance, T is black matrix
Absolute temperature, unit K, ε (λ, T) are that object temperature to be measured is T, radiance when radiation wavelength is λ, 0 < ε (λ, T)≤
1。
In classical approximation, this condition is met in the temperature-measuring range of infrared radiation thermometer, then E0(λ,
T) can approximation be reduced to Wien formula:
If wavelength is definite value, above formula is only related with temperature, can be rewritten as:
E0(T)=A0exp(B0/ T),
Wherein, A0=C1λ-5, B0=-C2/ λ, and still it is only applicable to black matrix.If by A0And B0It is considered as variable parameter A and B,
The case where then extending to grey body, the then spectral radiant energy of grey body are as follows:
E (T)=A exp (B/T)
Different from formula, the former only need to simply change A and B parameter
Value achieve that the amendment from black matrix to grey body, without determining complicated radiance function of ε (λ, T).
Principle using adjacent two wavelength etc. than absorption.Take function of the absorption energy ratio of 2 wavelength as temperature
Avoid as environment such as vapor to the factor of infrared ray absorbing and caused by measurement error.
Take λ respectively now1And λ2, then have:
E1(T)=A1(λ1)exp(B1(λ1)/T),
E2(T)=A2(λ2)exp(B2(λ2)/T)。
Above-mentioned two formula is made than being worth:
Wherein,B '=B1(λ1)-B2(λ2).Therefore, as long as determining A ' and B ' two using fitting experimental data
A parameter can be obtained the relationship between the temperature T of testee and the ratio X.That is, according to above-mentioned fitting coefficient A ' and B ',
The temperature of the radiator under available such environment.
Fig. 1 (a) shows a kind of schematic diagram of dual wavelength filtering infrared measurement of temperature equipment in the prior art.Fig. 1 (b) is shown
The structural schematic diagram of chopper wheel in Fig. 1 (a).With reference to Fig. 1 (a) and Fig. 1 (b), which filters the work of infrared measurement of temperature equipment
Method is:
A branch of light radiation that object to be measured issues passes through 9 directive reflecting mirror 8 of lens in the horizontal direction, by reflecting mirror 8 by light
Radiation reflective is to spectroscope 1 (or dichroscope).This beam light radiation is reflected and is transmitted by spectroscope 1, forms horizontal direction
On reflection the first light radiation and the transmission in vertical direction the second light radiation.The first light radiation in horizontal direction is passed through
The filter of narrow band filter 7 is that (such as wavelength is λ for light that wavelength is first wave length1Light).Wavelength is λ1Light it is anti-by reflecting mirror 6
It penetrates as simultaneously directive has the chopper wheel 5 of motor after vertical direction.The second light radiation in vertical direction is after the reflection of reflecting mirror 2
The second light radiation in horizontal direction is formed, is that (such as wavelength is λ for light that wavelength is second wave length by the filter of narrow band filter 32
Light).Wavelength is λ2Light emission to have motor chopper wheel 5.Motor drives chopper wheel to be rotated, wavelength λ2Light can
To pass through through-hole (referring to Fig. 1 (b)) the directive photosensitive sensor 4 on chopper wheel 5, wavelength λ1Light can pass through chopper wheel 5
On mirror-reflection after directive photosensitive sensor 4.It is λ that photosensitive sensor 4, which obtains wavelength,1And λ2Light energy, using amplification
Circuit, counting circuit carry out the temperature that data processing generates object to be measured, which is shown in the equipment of display.
Present inventor has done a large amount of experiment, the temperature that discovery is measured using dual wavelength filtering infrared measurement of temperature equipment
The precision of degree relative to Single wavelength infrared measurement of temperature equipment although be significantly improved, but still there is a certain error.This hair
Bright people is it is also found that: on the one hand, the precision of dual wavelength light radiation temperature measurement is directly proportional to the average degree for the double wave that light radiation is divided into.That is:
When the number of photons or energy of the two light beams that incident light radiation is divided into are average, the precision of thermometric is higher.On the other hand,
The precision for the temperature that dual wavelength filtering infrared measurement of temperature equipment measures also is restricted by energy loss, if light radiation is in measurement process
Middle energy loss is bigger, and the precision of the temperature measured is lower.The present inventor is according to the theory of above-mentioned discovery, then against existing technologies
Middle dual wavelength filtering infrared measurement of temperature equipment discovery:
The reflection of spectroscope (or dichroscope) or efficiency of transmission be not high, and there are biggish energy losses, so making
Decline at later period temperature measurement accuracy；
The number of photons of the first light radiation and the second light radiation of spectroscope transmission and reflection or the area of energy allocation proportion
Between be about, the ratio from 1: 1 in ideal absolutely etc.
That divides has a long way to go, so later period temperature measurement accuracy is caused to decline.In addition, the dichroscope in dual wavelength filtering infrared measurement of temperature equipment
The front and back sides for relying on optical plate plate different films to realize and filter, and if necessary to select other wavelength, then need more
Change monolith dichroscope.So the precision for the temperature that dual wavelength filtering infrared measurement of temperature equipment measures is not high, and use is inconvenient,
Its adaptability is not wide.
In addition, optical detection device is being arranged as plane in traditional dual wavelength temperature measuring equipment, sensitvity constraint is in institute
The detectivity of the optical detection device of use will be seriously affected in infant laser signal detection by shot noise, essence
Spend poor, application environment is limited.
Summary of the invention
It is an object of the invention to overcome, temperature measurement accuracy in the prior art is low, temperature measuring application occasion is narrow, structure is complicated
Defect.
According to an aspect of the invention, there is provided a kind of temperature measuring equipment based on light radiation.The equipment includes:
Light radiation equal division device is configured to receive the light radiation of object to be measured, the light radiation received is divided into first
Light radiation and the second light radiation, and project first light radiation along first path, second light radiation is along being different from the
It projects in second path in one path；
The first filter element being arranged in the first path is configured to receive first light radiation, and will receive
To the first light radiation be filtered into wavelength be first wave length light；
The second filter element being arranged on second path is configured to receive second light radiation, and will receive
To the second light radiation be filtered into wavelength be second wave length light；
The first detection device of arrangement on the first path, is configured to the light of a length of first wave length of received wave and is converted
For corresponding first photosignal parameter；
The second detection device of arrangement on a second path, is configured to the light of a length of second wave length of received wave and is converted
For corresponding second photosignal parameter；
Temperature determining device is configured to receive first He from first detection device and the second detection device
Second photosignal parameter, and according to the predetermined relationship of the first and second photosignals parameter and temperature determine it is described to
Survey the temperature of object.
Present embodiment cast out traditional reflection efficiency and efficiency of transmission it is not high, can not by received light radiation carry out essence
Received light radiation is carried out accurate equal part (this using light radiation equal division device by the dichroscope (semi-transparent semi-reflecting lens) of true equal part
The equal part of the energy for being divided into number of photons and light at place), the precision of the thermometric in later period is greatly improved.
Further, the efficiency that reflection is improved using light radiation equal division device is reduced the loss of energy, further increased
The precision of the thermometric in later period.
Present embodiment structure is simple, easy to operate, can be used for it is different require thermometric occasion, it is applied widely.
The double wave measurement that the present embodiment passes through optical path or so two-way can effectively overcome conventional measurement middle benefit gas, and " radiance is repaired
Just " problem overcomes survey caused by the environment absorption of the factors such as complicated measuring condition, in-site measurement conditional fluctuation or vapor
Error is measured, the precision of thermometric is further improved.
In some embodiments, temperature measuring equipment according to claim 1, which is characterized in that the temperature determines
Device determines the temperature of object to be measured according to the following predetermined relationship:
T=B '/ln (X/A ')
Wherein, X=E1(T)/E2(T), A ', B ' are predetermined coefficient, and T is the temperature of the object to be measured, E1It (T) is described
First photosignal parameter, E2It (T) is the second photosignal parameter.
In some embodiments, the light radiation equal division device includes:
Spatial light modulator is configured to that the light radiation of the object to be measured received is divided into described according to predetermined control
One light radiation and the second light radiation, and make the first light radiation along first path injection, the second light radiation along different from first path
The second path project；
Control element is configured to carry out above-mentioned predetermined control to the spatial light modulator according to predetermined input.
What present embodiment was initiative as a result, applies to temperature measuring equipment for spatial light modulator, and thermometric is greatly improved
Precision.
In some embodiments, the spatial light modulator be selected from Digital Micromirror Device, light intensity digital modulator or
Liquid crystal light valve.
In some embodiments, the Digital Micromirror Device includes multiple micro mirrors and corresponding with the multiple micro mirror more
A turning joint, each turning joint overturns each micro mirror to preset direction according to the predetermined control, so that the multiple
Half micro mirror in micro mirror projects the light radiation of the half of the object to be measured received along first path, in the multiple micro mirror
The other half micro mirror the other half light radiation of the object to be measured received is projected along the second path for being different from first path.
Therefore, controlling DMD by FPGA may be implemented to carry out the number of photons (or light intensity) of light radiation to substantially achieve 1
: 1 accurate equal part improves the precision of thermometric.
In some embodiments, first detection device is the first point detector, and second detection device is the
Two point detectors, and
The temperature measuring equipment further includes being arranged in the first path, being located at first point detector and the space
The first convergent component between optical modulator, and be arranged on second path, be located at second point detector with it is described
The second convergent component between spatial light modulator,
First point detector is located at the optical focus of first convergent component；
Second point detector is located at the optical focus of second convergent component.
Present embodiment focuses the focal point to be formed by the way that point detector is arranged in reflection light as a result, rather than cloth
It sets at the picture plane (imaging plane) at traditional focal plane rear, not only can be convenient and detect photosignal using point detector
Parameter, and the number of photons that point detector detects can be increased, the intensity of signal is greatly increased, and shot noise is dropped
As low as the level of single pixel, measurement signal-to-noise ratio is greatly improved, improves the levels of precision of acquisition data, and then significantly
Improve the sensitivity and accuracy of measurement temperature.This device structure it is simple and can be used for it is different require thermometric occasion, be applicable in
Range is wide.
In some embodiments, the temperature measuring equipment further include:
Be arranged in the first path, first between first point detector and the spatial light modulator
Light intensity attenuation element, and
Be arranged on second path, second between second point detector and the spatial light modulator
Light intensity attenuation element.
The present apparatus can be decayed the photoelectricity of light by the way that light intensity attenuation element (such as neutral-density filter) is arranged as a result,
Signal parameter extends the service life of product to prevent strong light from improving temperature measurement accuracy to the damage of subsequent point detector.
In some embodiments, first filter element and second filter element are that center wavelength differs at least
The half of the first narrow band filter and the second narrow band filter of 10nm, first narrow band filter and the second narrow band filter is high
Wide parameter is at least 10nm.
In some embodiments, the photosignal parameter includes number of photons, current value, voltage value, appoints in resistance value
It anticipates one kind.
The universal performance of product can be enhanced, be also convenient for the dimension in later period with unrestricted choice degree by increasing point detector as a result,
Shield maintenance.
In some embodiments, the light radiation is the light radiation of infrared band.
In some embodiments, first and second point detector is selected from near-infrared, mid and far infrared, far infrared band
External photoeffect detector group, inner photoeffect detector group, any one in strong optical detector group and Weak photodetector group
Kind, wherein
The external photoeffect detector group includes: avalanche diode, vacuum photo tube, gas cell, photomultiplier transit
Pipe, image converter tube, image intensifier, pick-up tube；
The inner photoeffect detector group includes: Intrinsical photoconductive detector, doping type photoconductive detector, optomagnetic
Electrical effect detector, photogenic voltage detector；
The strong optical detector group includes: strong optical detector that is built-in or being equipped with analog-digital converter outside；
The Weak photodetector group includes: Weak photodetector that is built-in or being equipped with counter outside.
Point detector can enhance the universal performance of product with unrestricted choice various types to meet various demands as a result,
It is also convenient for the maintenance in later period.
According to another aspect of the present invention, a kind of temp measuring system based on light radiation is provided.The system includes:
The above-mentioned temperature measuring equipment and robot scaling equipment based on light radiation,
The robot scaling equipment includes the adjustable reference light source of temperature, and the reference light source is configured in a dimensioning phase
In, light radiation equal division device described in the light radiation directive by the different temperatures being adjusted to will be connect by the light radiation equal division device
The light radiation received is divided into the first light radiation and the second light radiation, projects the first light radiation along first path, the second smooth spoke
It penetrates and is projected along the second path for being different from first path, to obtain multiple first and second photosignals parameters, and according to described
The variable of different temperatures and the first and second photosignals parameter determines the first and second photosignals parameter
With the predetermined relationship of temperature.
In some embodiments, multiple first and second photosignals of the determining different temperatures adjusted and acquisition
The predetermined relationship of parameter are as follows:
Ed1(T)i/Ed2(T)i=A ' exp (B '/Tdi),
Wherein, the natural number that i is 1 to n；A ', B ' are predetermined coefficient, TdiFor the reference light source issue i-th of temperature,
Ed1(T)iWavelength to measure when i-th calibration is the photosignal parameter of the light of first wave length, Ed2(T)iWhen being calibrated for i-th
The wavelength measured is the photosignal parameter of the light of second wave length.
In some embodiments, the robot scaling equipment further includes converting parallel light radiation for the light radiation of reference light source
Beam-expanding collimation lens.
In some embodiments, the robot scaling equipment further includes the parallel light radiation for converting the beam-expanding collimation lens
The beam splitter of light radiation equal division device described in directive.
According to a further aspect of the invention, a kind of temp measuring method based on light radiation is provided.This method comprises:
A kind of temp measuring method based on light radiation characterized by comprising
The light radiation of object to be measured is received using light radiation equal division device and the light radiation received is directly divided into
One light radiation and the second light radiation, and it is different from first light radiation along first path injection, second light radiation edge
It projects in second path of first path；
First light radiation is received in the first path, and the first light radiation received is filtered into wavelength and is
The light of first wave length；
Second light radiation is received on second path, and the second light radiation received is filtered into wavelength and is
The light of second wave length；
The light that the wavelength is first wave length is received in the first path and is converted into corresponding first photoelectricity
Signal parameter；
The light that the wavelength is second wave length is received on second path and is converted into corresponding second photoelectricity
Signal parameter；And
The temperature of the object to be measured is determined according to the predetermined relationship of the first and second photosignals parameter and temperature
Degree.
In some embodiments, the temperature of the object to be measured is determined according to the following predetermined relationship:
T=B '/ln (X/A ')
Wherein, X=E1(T)/E2(T), A ', B ' are predetermined coefficient, and T is the temperature of the object to be measured, E1It (T) is described
First photosignal parameter, E2It (T) is the second photosignal parameter.
In some embodiments, the light radiation equal division device includes:
Spatial light modulator is configured to that the light radiation of the object to be measured received is divided into described according to predetermined control
One light radiation and the second light radiation, and make the first light radiation along first path injection, the second light radiation along different from first path
The second path project；
Control element is configured to carry out above-mentioned predetermined control to the spatial light modulator according to predetermined input.
In some embodiments, the spatial light modulator is selected from Digital Micromirror Device, light intensity digital modulator or liquid
Brilliant light valve.
In some embodiments, the Digital Micromirror Device includes multiple micro mirrors and corresponding with the multiple micro mirror more
A turning joint, each turning joint overturns each micro mirror to preset direction according to the predetermined control, so that the multiple
Half micro mirror in micro mirror projects the light radiation of the half of the object to be measured received along first path, in the multiple micro mirror
The other half micro mirror the other half light radiation of the object to be measured received is projected along the second path for being different from first path.
In some embodiments, this method further comprises:
The light that the wavelength is first wave length is converged at into the first focus, and first point of spy is set in first focal point
Device is surveyed to receive the wavelength as the light of first wave length and be converted into corresponding first photosignal parameter；
The light that the wavelength is second wave length is converged at into the second focus, and is visited in second focal point setting second point
Device is surveyed to receive the wavelength as the light of second wave length and be converted into corresponding second photosignal parameter.
In some embodiments, this method further comprises:
Decay to the intensity for the light that the wavelength is first wave length；And to the strong of the light that the wavelength is second wave length
Degree is decayed.
In some embodiments, the light radiation is the light radiation of infrared band.
In some embodiments, the first wave length differs at least 10nm with the second wave length.
In some embodiments, the photosignal parameter includes number of photons, current value, voltage value, appoints in resistance value
It anticipates one kind.
In some embodiments, it is described using light radiation equal division device receive object to be measured light radiation, will receive
To light radiation be divided into the first light radiation and the second light radiation and make first light radiation along first path project, it is described
It further include scaling step before the step of second light radiation is projected along the second path for being different from first path,
The scaling step includes:
The light radiation that reference light source is received using light radiation equal division device, is divided into the first smooth spoke for the light radiation received
Penetrate with the second light radiation, and make first light radiation along first path project, second light radiation along be different from the first via
It projects in second path of diameter；
First light radiation is received in the first path, and the first light radiation received is filtered into wavelength and is
The light of first wave length；
Second light radiation is received on second path, and the second light radiation received is filtered into wavelength and is
The light of second wave length；
The light that the wavelength is first wave length is received in the first path and is converted into corresponding first photoelectricity
Signal parameter；
The light that the wavelength is second wave length is received on second path and is converted into corresponding second photoelectricity
Signal parameter；
It adjusts reference light source and issues the light radiation of multiple and different temperature, and obtain corresponding multiple first and second optical telecommunications
Number parameter；And
According to the variable of the different temperatures and the first and second photosignals parameter, first He is determined
The predetermined relationship of second photosignal parameter and temperature.
This system can carry out test thermometric before formal thermometric, to formulate by providing robot scaling equipment as a result,
Standard adjusts the temperature data measured, into one so that subsequent formal thermometric can carry out operation with the data of reference test thermometric
The precision of temperature has been turned up in degree.
In some embodiments, multiple first and second photosignals of the determining different temperatures adjusted and acquisition
The predetermined relationship of parameter are as follows:
Ed1(T)i/Ed2(T)i=A ' exp (B '/Tdi),
Wherein, the natural number that i is 1 to n；
A ', B ' are predetermined coefficient, TdiFor the temperature of i-th of reference light source, Ed1(T)iWavelength for i-th calibration is first
The photosignal parameter of the light of wavelength, Ed2(T)iWavelength for i-th calibration is the photosignal parameter of the light of second wave length.
Present embodiment cast out traditional reflection efficiency and efficiency of transmission it is not high, can not by received light radiation carry out essence
Received light radiation is carried out accurate equal part (this using light radiation equal division device by the dichroscope (semi-transparent semi-reflecting lens) of true equal part
The equal part of the energy for being divided into number of photons and light at place), the precision of the thermometric in later period is greatly improved.
Further, the efficiency that reflection is improved using light radiation equal division device is reduced the loss of energy, further increased
The precision of the thermometric in later period.
Present embodiment structure is simple, easy to operate, can be used for it is different require thermometric occasion, it is applied widely.
The present embodiment can effectively overcome " radiance amendment " problem of various objects in infrared measurement of temperature, overcome survey
Measurement error caused by the environment absorption of the factors such as complicated condition, in-site measurement conditional fluctuation or vapor is measured, is further mentioned
The high precision of thermometric.
Detailed description of the invention
Fig. 1 (a) is a kind of structural schematic diagram of dual wavelength temperature measuring equipment in the prior art；
Fig. 1 (b) is the structural schematic diagram of chopper wheel in Fig. 1 (a)；
Fig. 2 is the structural schematic diagram of the temperature measuring equipment based on light radiation of one embodiment of the present invention；
Fig. 3 (a) is multiple micro-mirror structure schematic diagrames in the DMD of one embodiment of the present invention；
Fig. 3 (b) is two panels micro-mirror structure schematic diagram in Fig. 3 (a)；
Fig. 4 is the structural schematic diagram of the temperature measuring equipment based on light radiation of another embodiment of the present invention；
Fig. 5 is the structural schematic diagram of the temp measuring system based on light radiation of one embodiment of the present invention；
Fig. 6 is the flow diagram of the temp measuring method based on light radiation of one embodiment of the present invention；
The flow diagram for the step of Fig. 7 is the calibration of one embodiment of the present invention.
Specific embodiment
In order to keep the purposes, technical schemes and advantages of invention clearer, in the following with reference to the drawings and specific embodiments to hair
It is bright to be described in further detail.Although showing disclosure exemplary embodiment in attached drawing, it being understood, however, that can be with each
Kind form is realized the present invention and be should not be limited by the embodiments set forth herein.It is to be able on the contrary, providing these embodiments
The more thorough explanation present invention, and the scope of the present invention can be fully disclosed to those skilled in the art.
Fig. 2 shows the present invention is based on one embodiment of the structure chart of the temperature measuring equipment of light radiation.With reference to Fig. 2, the survey
Warm equipment includes: light radiation equal division device 2, the first filter element 3-1, the second filter element 4-1, the first detection device 3-4,
Two detection device 4-4, and the temperature determining device 5 being connect respectively with the first detection device 3-4, the second detection device 4-4.It should
The connection relationship of all parts of temperature measuring equipment and the process of processing light radiation can be described as follows:
Object to be measured (such as human body or electric light, figure in do not indicated) issues light radiation to light radiation equal division device 2
(such as infra-red radiation, ultraviolet radioactive or visible light).Light radiation equal division device 2 receives the light radiation of object to be measured, will receive
To light radiation be divided into the first light radiation and the second light radiation, and make the first light radiation along first path (such as temperature measuring equipment
The path in left arm direction) project, the second light radiation along the second path (path in the right arm direction of such as temperature measuring equipment) project.Arrangement
The first filter element 3-1 on the first path receives first light radiation, and the first light radiation received is filtered into
Wavelength is that (such as wavelength is λ for the light of first wave length1Unicast light).The the second filter element 4-1 of arrangement on a second path connects
It receives the second light radiation, and the second light radiation received is filtered into light that wavelength is second wave length (such as wavelength is λ2List
The glistening light of waves, wherein λ1With λ2It differs, works as λ1With λ2For adjacent band wavelength when, effect is best, because working as λ1With λ2When infinite approach,
ε1(λ1, T) and ≈ ε2(λ2, T), then
A '=A1(λ1)/A2(λ2)=(ε1(λ1, T) and C1λ1 -5)/(ε2(λ2, T) and C1λ2 -5)≈(λ1/λ2)-5,
B '=B1(λ1)-B2(λ2)=- C2/λ1-(-C2/λ2),
But λ1With λ2Closer, the requirement to detector sensitivity and accuracy is higher, in addition in view of environment is made an uproar
Sound and detector intrinsic noise (such as dark counting etc.) larger impact caused by the thermometric accuracy of system, λ1With λ2In practical survey
Impossible infinite approach in amount, thus the radiance ε under two radiation wavelengths1(λ1, T) and ε2(λ2, T) can not simple cancellation, and
It needs to determine predetermined relationship by calibration).The the first a length of first wave of detection device 3-4 received wave of arrangement on the first path
Long light is simultaneously converted into corresponding first photosignal parameter.The the second detection device 4-4 of arrangement on a second path connects
It receives the light that wavelength is second wave length and is converted into corresponding second photosignal parameter.The reception of temperature determining device 5 comes from
The first and second photosignal parameters of first detection device 3-4 and the second detection device 4-4, and according to described first and second
The predetermined relationship of the temperature of photosignal parameter and the object to be measured determines the temperature of object to be measured.
In embodiments of the present invention, light radiation equal part is meant that: by the number of photons or energy of the light radiation received
Amount is pressedRatio section be allocated.In the present embodiment, it can achieve 1:
The ratio of 1 mean allocation, at this point, the effect of thermometric is best.It follows that the ratio of the equal part of embodiment of the present inventionMuch ratios that light radiation distributes in dichroscope than in the prior artAverage degree it is much higher.Due to thermometric precision with
The raising of average degree and improve, so, the temperature measurement accuracy of present embodiment is more much higher than the precision of the prior art.
With continued reference to Fig. 2, temperature determining device 5 includes divider 5-1 and computing element 5-2.Wherein, divider 5-1 points
It is not connect with the first detection device 3-4 and the second detection device 4-4.Computing element 5-2 is connect with divider 5-1.Divider 5-1
For calculating the photosignal parameters E for the light that wavelength is first wave length1(T) join with wavelength for the photosignal of the light of second wave length
Measure E2(T) ratio X between.Computing element 5-2 is used for according to the first and second photosignal parameters Es1(T) and E2(T) with it is described
The predetermined relationship of the temperature of object to be measured determines the temperature of object to be measured.
Divider is provided separately for the ratio operation that operation frequency is higher, operation significance level is high in this equipment as a result, so that
Ratio operation is distinguished with other logical operations, optimizes the structure of temperature measuring equipment, is reduced operation mistake, is shortened operation
Time, improve operational precision.In addition, this hardware configuration can also be realized in a manner of software module.
In the present embodiment, temperature determining device determines the temperature of object to be measured according to following predetermined relationship:
T=B '/ln (X/A ')
Wherein, X=E1(T)/E2(T), A ', B ' are predetermined coefficient, and T is the temperature of object to be measured, E1It (T) is the first photoelectricity
Signal parameter, E2It (T) is the second photosignal parameter.
Referring again to Fig. 2, light radiation equal division device includes: spatial light modulator 2-1 and control element 2-2.Wherein, space
The light radiation of the object to be measured received is divided into first light radiation and the second light according to predetermined control by optical modulator 2-1
Radiation, and project the first light radiation along the second path for being different from first path along first path injection, the second light radiation.Control
Element 2-2 processed to the spatial light modulator carry out predetermined control (such as by load exposure mask (in Digital Image Processing, mask
For two-dimensional matrix array) it is in 0-1 matrix 0 and 1 quantity to control, the contents of the section will continue to introduce further below).
In the present embodiment, spatial light modulator can select Digital Micromirror Device (Digital Micromirror
Device, DMD), any one in light intensity digital modulator or liquid crystal light valve.Because of DMD), light intensity digital modulator or liquid
Brilliant light valve is existing product, therefore, only the distribution light radiation of DMD equivalent is described in detail below, remaining product is no longer
It repeats.
Fig. 3 (a) shows multiple micro-mirror structure schematic diagrames in the DMD of one embodiment of the present invention.Fig. 3 (b) is shown
Two panels micro-mirror structure schematic diagram in Fig. 3 (a).
It include multiple micro mirrors and multiple rotating hinges corresponding with the multiple micro mirror with reference to such as Fig. 3 (a) and Fig. 3 (b), DMD
Chain, each turning joint can according to predetermined control by each micro mirror to preset direction (such as with a vertical+12 degree and-
12 degree) overturning, so that the half micro mirror in the multiple micro mirror is by the light radiation of the half of the object to be measured received along first
Path is projected, the other half the light radiation edge of the object to be measured received is different from by the other half micro mirror in the multiple micro mirror
It projects in second path of first path.
In the present embodiment, DMD can select TI (Texas Instruments) company that can be obtained in the market to produce
ModelThe device of 0.7 XGA2XLVDS DMD.Control element can select FPGA (programmable gate array chip),
FPGA model are as follows: Xilinx Virtex5 application FPGA.
It is as follows by the principle of the distribution of preset ratio that FPGA controls DMD progress light radiation:
After DMD power-up, using electrostatic absorption principle ,+12 degree can be presented in multiple micro mirrors in DMD and -12 degree (also have plenty of
+ 10 degree and -10 degree) direction deflection.Assuming that DMD has 1000 micro mirrors, when 500 micro mirror overturnings are+12 degree, 500 micro-
When mirror overturning is spent for -12, it is 48 degree (degree × 2 12 degree × 2+12) that a branch of light radiation of directive DMD at this time, which will be reflected into angle,
Equal part two-beam radiation.The how many micro mirror deflection to+12 degree and -12 degree respectively in specific FPGA control DMD, but
It is in 0-1 matrix 0 and 1 quantity to control by load exposure mask (in Digital Image Processing, mask is two-dimensional matrix array).Example
When such as loading 0, micro mirror overturning is+12 degree, and when loading 1, micro mirror overturning is -12 degree.So wanting the tool of control two-beam radiation
Body ratio (can with when any ratio, such as equal part 50%: 50% or 20%: 80%), need to only control 0 and 1 in matrix
Ratio.Therefore, controlling DMD by FPGA may be implemented the number of photons (or light intensity) of light radiation carrying out 1: 1 equal part.By
In DMD be existing product, so details are not described herein for its more specific structure.
Fig. 4 shows the structural schematic diagram of the temperature measuring equipment based on light radiation of another embodiment of the present invention.The figure
Show the embodiment of several deformations.Fig. 4 embodiment is that the deformation that carries out on the basis of above-mentioned Fig. 2 embodiment obtains.?
This describes emphatically the two difference, and the same or similar place of the two repeats no more.
The first embodiment of temperature measuring equipment shown in Fig. 4 are as follows:
The embodiment is to increase the first convergent component 3-3 and the second convergent component 4- on the basis of Fig. 2 embodiment
3.Connection relationship between each component and each component of the temperature measuring equipment of the embodiment can be with are as follows:
First detection device 3-4 is the first point detector, and the second detection device 4-4 is the second point detector.First assembles
Element 3-3 is arranged in the first path, between first point detector and first filter element.Second meeting
Poly- element 4-3 is arranged on second path, between second point detector and second filter element.First
Point detector 3-4 is located at the optical focus of first convergent component.Second point detector 4-4 is located at the light of the second convergent component
Focal point.
Present embodiment focuses the focal point to be formed by the way that point detector is arranged in reflection light, passes without being arranged on
At the picture plane (imaging plane) at the focal plane rear of system, it not only can be convenient and detect photosignal parameter using point detector,
And the number of photons that point detector detects can be increased, the intensity of signal is greatly increased, and shot noise is reduced to
Measurement signal-to-noise ratio is greatly improved in the level of single pixel, improves the levels of precision of acquisition data, and then increases substantially
The sensitivity and accuracy of measurement temperature.This device structure is simple and can be used for different requiring thermometric occasion, the scope of application
Extensively.
Second of embodiment of temperature measuring equipment shown in Fig. 4 are as follows:
The embodiment be increased on the basis of above-mentioned first embodiment arrangement on the first path, first filter
The first light intensity attenuation element 3-2 between element 3-1 and the first convergent component 3-3, and arrangement on a second path, second filter
The second light intensity attenuation element 4-2 between element 4-1 and the second convergent component 4-3.
The present apparatus can be decayed the photoelectricity of light by the way that light intensity attenuation element (such as neutral-density filter) is arranged as a result,
Signal parameter extends the service life of product to prevent strong light from improving temperature measurement accuracy to the damage of subsequent point detector.
The third embodiment of temperature measuring equipment shown in Fig. 4 are as follows:
Increase lens 1 on the basis of the respective embodiments described above, it, can be with so that the light radiation of object to be measured enters main optical path
Directive light radiation equal division device 2.
Wherein, first embodiment eliminates the first light intensity attenuation element 3-2 and the second light intensity relative to second embodiment
Attenuating elements 4-2, the effect of light intensity attenuation also accordingly disappears as a result, but compared with the existing technology, and present embodiment still can be with
Technical problem is solved, corresponding technical effect is reached.Fig. 2 embodiment eliminates the first convergence relative to Fig. 3 first embodiment and receives
Part 3-3 and the second convergent component 4-3.The effect assembled as a result, also accordingly disappears, but compared with the existing technology, present embodiment
Still it can solve technical problem, reach corresponding technical effect.It will be understood to those skilled in the art that can be according to reality
Perhaps special requirement carries out option and installment to above-mentioned each element or carries out multiple combinations configuration measurement accuracy.For example, in light intensity
In king-sized situation, muti-piece light intensity attenuation element can be set.
Referring to Fig. 4, the working method of the thermometric of the temperature measuring equipment of a preferred embodiment is described below, it specifically can be with
It is:
The light radiation of object to be measured (such as human body or electric light, figure in do not indicated) can pass through 1 directive light of lens
Radiate equal division device 2.Number of photons and the energy of light radiation (are put down the received light radiation equal part that is averaged by light radiation equal division device 2
Distribute) it is reflected into the two-beam radiation on both arms direction.The first optical filtering member is respectively disposed on left arm direction in both arms
Part 3-1, the first light intensity attenuation element 3-2, the first convergent component 3-3 and the first detection device 3-4.First beam light radiation is by the
One filter element 3-1 is filtered into the light that wavelength is first wave length, and wavelength is that the light of first wave length passes through the first light intensity attenuation element
3-2 carries out light intensity attenuation, is assembled using the first convergent component 3-3, and the first detection device 3-4 is the in the wavelength of convergence
The light of a length of first wave length of focal plane received wave where the optical focus of one wavelength carrys out the light of a length of first wave length of probing wave
Photosignal parameter.
This equipment is symmetrical set.Equally, the second filter element 4- is respectively disposed on the right arm direction in both arms
1, the second light intensity attenuation element 4-2, the second convergent component 4-3 and the second detection device 4-4.Second beam light radiation is by the second filter
Optical element 4-1 be filtered into wavelength be second wave length light, wavelength be first wave length light by the second light intensity attenuation element 4-2 into
Row light intensity attenuation is assembled using the second convergent component 4-3, and the second detection device 4-4 is first wave in the wavelength of convergence
The light of a length of second wave length of focal plane received wave where long optical focus carrys out the photoelectricity of the light of a length of second wave length of probing wave
Signal parameter.
The wavelength that temperature determining device 5 receives the first detection device 3-4 and the second detection device 4-4 detection respectively is first
The photosignal parameter and wavelength of the light of wavelength are the photosignal parameter of the light of second wave length, and are carried out to the object to be measured
Thermometric.
In some embodiments, in order to keep the wavelength of filtered unicast different, the first filter element and described second
Filter element is the first narrow band filter and the second narrow band filter that center wavelength differs 10nm or more, the first narrowband filter
The halfwidth parameter of mating plate and the second narrow band filter is 10nm or more.
Because according to narrow band bandwidth theory, the narrower effect of narrow band filter is better；Central wavelength is closer to better.But
Bandwidth is narrower, and the heat radiation that can be detected with the photosignal parameter detecting element that narrow band filter is used cooperatively is fewer, additional
Central wavelength it is close, excessively high requirement is proposed to detector sensitivity and accuracy, and ambient noise and detection at this time
Device intrinsic noise (such as dark counting) also affects greatly the thermometric accuracy to system.So above-mentioned excellent scarce measuring
On the basis of point, by largely testing, the halfwidth FWHM of the narrow band filter of selection generally should be in 10nm or more, middle cardiac wave
It is best that long CWL generally differs 10nm or more effect.In addition, this equipment can use different filter elements (such as narrow band filter)
It is filtered to obtain unicast light, then the unicast light is assembled to collect and is detected at for detector, reduce the interference of unrelated light, mention
The high precision of temperature collection.
In the present embodiment, the light radiation is infrared ray radiation.
In the present embodiment, first and second point detector is selected from near-infrared, mid and far infrared, far infrared band
Any one in external photoeffect detector group, inner photoeffect detector group, strong optical detector group and Weak photodetector group,
Wherein,
The external photoeffect detector group includes: avalanche diode, vacuum photo tube, gas cell, photomultiplier transit
Pipe, image converter tube, image intensifier, pick-up tube；
The inner photoeffect detector group includes: Intrinsical photoconductive detector, doping type photoconductive detector, optomagnetic
Electrical effect detector, photogenic voltage detector；
The strong optical detector group includes: strong optical detector that is built-in or being equipped with analog-digital converter outside；
The Weak photodetector group includes: Weak photodetector that is built-in or being equipped with counter outside.
In the present embodiment, the photosignal parameter include number of photons, it is current value, voltage value, any in resistance value
It is a kind of.
Point detector can enhance the universal performance of product with unrestricted choice various types to meet various demands as a result,
It is also convenient for the maintenance in later period.
Fig. 5 shows the structural schematic diagram of the temp measuring system based on light radiation of one embodiment of the present invention.The figure can
To there is the embodiment of several deformations.The differences of these modes of texturing is described emphatically herein, they it is same or similar it
Place repeats no more.
First embodiment:
Referring to Fig. 5, which includes: above-mentioned temperature measuring equipment and robot scaling equipment 6.
Robot scaling equipment 6 may include the adjustable reference light source 6-1 of temperature (for example, the lamp of different capacity can be provided
Bubble), beam-expanding collimation lens 6-2 and beam splitter 6-3.Beam splitter 6-3 is arranged between object 7 to be measured and lens 1.Reference light source 6-
1, beam-expanding collimation lens 6-2 and the conllinear setting of beam splitter 6-3 level, beam-expanding collimation lens 6-2 setting is in reference light source 6-1 and divides
Between beam device 6-3.Wherein, reference light source 6-1 is used for the light radiation directive light radiation of the different temperatures of adjusting in dimensioning phase
Equal division device 2, and the light radiation received is divided into the first light radiation and the second light radiation by light radiation equal division device 2, make
First light radiation projects (such as left arm direction path), the second light radiation along the second path (such as right arm direction path) along first path
It projects, to obtain multiple first and second photosignals parameters, and determine multiple first Hes of the different temperatures and acquisition that adjust
The predetermined relationship of second photosignal parameter.Beam-expanding collimation lens 6-2 is used to convert directional light for the light radiation of reference light source
Radiation.Light radiation equal division device described in the parallel light radiation directive that beam splitter 6-3 is used to convert on beam-expanding collimation lens.
Second embodiment:
Reduce beam splitter 6-3 on the basis of first embodiment, the function of the beam splitter is reduced therewith.But this is implemented
Mode still can solve technical problem, realize corresponding technical effect.
Third embodiment:
Reduce beam-expanding collimation lens 6-2 on the basis of second embodiment, the function of the beam-expanding collimation lens is therewith
It reduces.But this embodiment still can solve technical problem, realize corresponding technical effect.
In the above-described embodiment, multiple first and second photosignals of the determining different temperatures adjusted and acquisition
The predetermined relationship of parameter are as follows:
Ed1(T)i/Ed2(T)i=A ' exp (B '/Tdi),
Wherein, the multiple is n, the natural number that i is 1 to n；
A ', B ' are predetermined coefficient, TdiFor the temperature of i-th of reference light source, Ed1(T)iWavelength for i-th calibration is first
The photosignal parameter of the light of wavelength, Ed2(T)iWavelength for i-th calibration is the photosignal parameter of the light of second wave length.
This system can carry out test thermometric using the standard sources of different capacity as a result, by measure multi-group data come
Determine the fitting coefficient in test.Wherein, fitting algorithm utilizes known test or truthful data, then looks for a model pair
During its rule is simulated, a process of unknown parameter in model is sought.To ensure the practical thermometric mistake in the later period
The temperature measured is obtained in journey according to the fitting coefficient.Present embodiment carries out test thermometric by test of many times survey, improves
The precision of practical thermometric.In addition, present embodiment utilizes beam-expanding collimation lens 6-2 by the light conversion of standard sources at parallel
Light reduces light because of error caused by assembling or scattering.It can be to the greatest extent by standard sources using beam splitter 6-3
Light be all transferred to lens, improve the transmission efficiency of light.
It will be understood to those skilled in the art that can be according to Surveying Actual Precision or special requirement to above-mentioned each element
Option and installment is carried out, or carries out multiple combinations configuration.
This system can carry out test thermometric before formal thermometric, to formulate by providing robot scaling equipment as a result,
Standard adjusts the temperature data measured, into one so that subsequent formal thermometric can carry out operation with the data of reference test thermometric
The precision of temperature has been turned up in degree.
The working method of the thermometric of the temp measuring system of present embodiment is referred to the description of above-mentioned temperature measuring equipment.It needs
Illustrate, before the test of calibration, by beam splitter 6-3, beam-expanding collimation lens 6-2 and standard sources 2-1 immigration system,
Guarantee that the reflection direction of beam splitter 6-3 on lens 1 and DMD2-1 main shaft optical path, guarantees that the light radiation of standard sources enters system
Main shaft optical path, and standard sources and 7 position of object to be measured are conjugated, wait calibrate after again by beam splitter 6-3, expand standard
Straight lens 6-2 and standard sources 6-1 removes system.
Fig. 6 is the flow diagram of the temp measuring method based on light radiation of one embodiment of the present invention.It, should shown in Fig. 6
Method the following steps are included:
S601: it is connect using light radiation equal division device (can use the light radiation equal division device in Fig. 2 and Fig. 4 embodiment)
It receives the light radiation (such as infra-red radiation, ultraviolet radioactive or visible light) of object to be measured (such as human body or electric light) and directly will
The light radiation equal part (concept of equal part can be with reference to the concept of equal part in above-mentioned temperature measuring equipment herein) received is the first smooth spoke
Penetrate with the second light radiation, and make the first light radiation along first path (path in the left arm direction of such as temperature measuring equipment) project, second
Light radiation is projected along the second path (path in the right arm direction of such as temperature measuring equipment)；
S602: receiving the first light radiation on the path in above-mentioned left arm direction, and being filtered into wavelength is first wave
Long light (such as wavelength is λ1Unicast light)；
S603: receiving the second light radiation on the path in above-mentioned right arm direction, and being filtered into wavelength is the second wave
Long light (such as wavelength is λ2Unicast light)；
S604: a length of λ of received wave on the path in above-mentioned left arm direction1Unicast light and be converted into corresponding
One photosignal parameters E1(T)；
S605: a length of λ of received wave on the path in above-mentioned right arm direction2Unicast light and be converted into corresponding
Two photosignal parameters Es2(T)；
S606: according to the first and second photosignals parameters E1(T) and E2(T) it is determined with the predetermined relationship of temperature
The temperature of object (such as human body or electric light) to be measured.
In the present embodiment, the temperature determining device determines the temperature of object to be measured according to following predetermined relationship:
T=B '/ln (X/A ')
Wherein, X=E1(T)/E2(T), A ', B ' are predetermined coefficient, and T is the temperature of object to be measured, E1It (T) is the first photoelectricity
Signal parameter, E2It (T) is the second photosignal parameter.
In the present embodiment, light radiation equal division device includes: spatial light modulator and control element.Wherein, spatial light
Modulator is used to that the light radiation of the object to be measured received to be divided into first light radiation and the second light according to predetermined control
Radiation, and project the first light radiation along the second path for being different from first path along first path injection, the second light radiation.Control
Element processed is used to carry out predetermined control to the spatial light modulator.
In the present embodiment, the spatial light modulator selects DMD, light intensity digital modulator or liquid crystal light valve.
In the present embodiment, DMD includes multiple micro mirrors and multiple turning joints corresponding with the multiple micro mirror, each
Turning joint overturns each micro mirror to preset direction according to the predetermined control, so that the half micro mirror in the multiple micro mirror
The light radiation of the half of the object to be measured received is projected along first path, the other half micro mirror in the multiple micro mirror will connect
The other half light radiation of the object to be measured received is projected along the second path for being different from first path.
In the present embodiment, this method further include:
The light that the wavelength is first wave length is converged at into the first focus, and first point of spy is set in first focal point
Device is surveyed to receive the wavelength as the light of first wave length and be converted into corresponding first photosignal parameter；
The light that the wavelength is second wave length is converged at into the second focus, and is visited in second focal point setting second point
Device is surveyed to receive the wavelength as the light of second wave length and be converted into corresponding second photosignal parameter.
In the present embodiment, this method further include:
Decay to the intensity for the light that the wavelength is first wave length；And to the strong of the light that the wavelength is second wave length
Degree is decayed.
In the present embodiment, the light radiation is infrared ray radiation.
In the present embodiment, the first wave length differs at least 10nm with the second wave length.
In the present embodiment, the photosignal parameter include number of photons, it is current value, voltage value, any in resistance value
It is a kind of.
In the present embodiment, first and second point detector is selected from near-infrared, mid and far infrared, far infrared band
Any one in external photoeffect detector group, inner photoeffect detector group, strong optical detector group and Weak photodetector group,
Wherein,
The external photoeffect detector group includes: avalanche diode, vacuum photo tube, gas cell, photomultiplier transit
Pipe, image converter tube, image intensifier, pick-up tube；
The inner photoeffect detector group includes: Intrinsical photoconductive detector, doping type photoconductive detector, optomagnetic
Electrical effect detector, photogenic voltage detector；
The strong optical detector group includes: strong optical detector that is built-in or being equipped with analog-digital converter outside；
The Weak photodetector group includes: Weak photodetector that is built-in or being equipped with counter outside.
It is corresponding with the technical effect in temperature measuring equipment embodiment in the technical effect in temp measuring method above-described embodiment,
This is repeated no more.
The flow diagram for the step of Fig. 7 is the calibration of one embodiment of the present invention.In the present embodiment, described
The light radiation received is divided into the first light radiation and second by the light radiation that object to be measured is received using light radiation equal division device
Light radiation, and make first light radiation along first path injection, second light radiation along second different from first path
It further include scaling step before the step of path is projected.As shown in fig. 7, the scaling step includes:
S701: it is connect using light radiation equal division device (can use the light radiation equal division device in Fig. 2 and Fig. 4 embodiment)
The light radiation for receiving reference light source (such as the adjustable light bulb of temperature, the modes such as specific adjustable electric current, voltage to adjust), will
The light radiation equal part (concept of equal part can be with reference to the concept of equal part in above-mentioned temperature measuring equipment herein) received is the first smooth spoke
Penetrate with the second light radiation, and make first light radiation along first path (path in the left arm direction of such as temperature measuring equipment) project,
Second light radiation is projected along the second path (path in the right arm direction of such as temperature measuring equipment) for being different from first path.
S702: first light radiation is received in the first path, and the first light radiation received is filtered into
Wavelength is that (such as wavelength is λ for the light of first wave length1Unicast light).
S703: second light radiation is received on second path, and the second light radiation received is filtered into
Wavelength is that (such as wavelength is λ for the light of second wave length2Unicast light).
S704: it is λ that the wavelength is received in the first path1Unicast light and be converted into corresponding first light
Electric signal parameters E1(T)。
S705: it is λ that the wavelength is received on second path2Unicast light and be converted into corresponding second light
Electric signal parameters E2(T)。
S706: adjusting the current or voltage of light bulb, so that the temperature that light bulb issues light radiation becomes Td2, and obtain corresponding
Photosignal parameters Ed1(T)2And Ed2(T)2.Multiple and different temperature T are issued by the available light bulb of such methoddiLight radiation,
And obtain corresponding multiple first and second photosignals parameters Esd1(T)iAnd Ed2(T)i。
S707: according to the variable of above-mentioned different temperatures and the first and second photosignal parameters, described first is determined
With the predetermined relationship of the second photosignal parameter and temperature.
In the present embodiment, multiple and different temperature of the determination multiple first and second photosignals parameters and adjusting
Predetermined relationship are as follows:
Ed1(T)i/Ed2(T)i=A ' exp (B '/Tdi),
Wherein, the multiple is n, the natural number that i is 1 to n；
A ', B ' are predetermined coefficient, TdiFor the temperature of i-th of reference light source, Ed1(T)iWavelength for i-th calibration is first
The photosignal parameter of the light of wavelength, Ed2(T)iWavelength for i-th calibration is the photosignal parameter of the light of second wave length.
Specific implementation may is that
In calibration, standard sources irradiates beam-expanding collimation lens with the light of the first electric current, voltage, resistance, passes through beam splitting
Device, lens reach DMD.Keep the same frame light radiation of DMD constant, the exposure mask of load is the equal 0-1 matrix of 1 and 0 quantity.Control
The closure of each micro mirror, overturning in element control DMD processed, so that the frame light radiation received is divided into the first light radiation by DMD
With the second light radiation, and make first light radiation along first path project, second light radiation along be different from first path
The second path project.Wherein: the first light radiation reaches first point of detection by the first narrow band filter, the first convergent component
Device obtains the first photosignal parameters Ed1(T)1.Second light radiation reaches the by the second narrow band filter, the second convergent component
Two point detectors obtain the second photosignal parameters Ed2(T)1。Ed1(T)1And Ed2(T)1Ratio X is obtained by divider1, X1=
Ed1(T)1/Ed2(T)1；
The different equivalent current or voltage or resistance of adjustment criteria light source can calculate under different current or voltages or resistance
Series of temperature T1, T2, T3...Tdi, corresponding E is measured by this systemd1(T)iWith Ed2(T)iRatio X1, X2, X3...Xi,
Keeping DMD to fix, a frame is constant, and the exposure mask loaded on DMD is the equal 0-1 matrix of 1 and 0 quantity.Followed by formula fitting
Obtain corresponding coefficient to get the light radiation temperature curve formula of the radiator (i.e. reference light source) arrived under such environment.That is: it determines
Fitting coefficient (i.e. above-mentioned predetermined coefficient) A ' and B ', in which:
Ed1(T)1/Ed2(T)1=A ' exp (B '/Td1)
Ed1(T)2/Ed2(T)2=A ' exp (B '/Td2)
Ed1(T)3/Ed2(T)3=A ' exp (B '/Td3)
……
Ed1(T)=A1(λ1)exp(B1(λ1)/T)
Ed2(T)=A2(λ2)exp(B2(λ2)/T)
A '=A1(λ1)/A2(λ2), B '=B1(λ1)-B2(λ2)。
It specifically can be and obtain corresponding coefficient A ' and B ' using formula fitting, obtain the light of the radiator under such environment
Radiation temperature curve equation；Then the calculation formula under this coefficient is set by computer program, that is, can measure or monitors
Radiation temperature in any case.During practical thermometric, the polynomial expansion of utilization index form obtains polynomial system
Number, or fitting coefficient is obtained using the fit equation of other complexity.
Present embodiment effectively overcomes " radiance amendment " problem of various objects in infrared measurement of temperature as a result, overcomes
Measurement error caused by the environment of the factors such as measuring condition is complicated, in-site measurement conditional fluctuation or vapor absorbs, is realized
High-precision temperature measurement.
In the present embodiment, during practical thermometric, the meter under this coefficient can be set by computer program
Formula is calculated, that is, can measure or monitor radiation temperature in any case.It can use the polynomial expansion of exponential form, obtain
Polynomial coefficient, or fitting coefficient is obtained using the fit equation of other complexity, it can realize in the actual operation process more
High-precision measurement.Here it is (a certain specific object to be measured under physical condition really to be found out using the experimental method of situ calibration
Object, grey body and non-black-body) heat radiation rule, and give calibration, the rule recycled to carry out temperature prison under the conditions of original
It surveys or many implicit parameters under the physical condition is calibrated in thermometric, i.e. utilization " method of substitution ".
In present embodiment, temperature determining device (such as divider, computing element) can be by single-chip microcontroller, fpga chip, meter
The replacement such as calculation machine, server.Data operation can be executed by program module.Program may include routine, program, target journey
Sequence, component, logic, data structure etc., they execute specific task or realize specific abstract data type.Department of computer science
System/server can be implemented in distributed cloud computing environment, and in distributed cloud computing environment, task is by passing through communication network
What the remote processing devices of link executed.In distributed cloud computing environment, it includes storage equipment that program module, which can be located at,
On Local or Remote computing system storage medium.
Finally it should be noted that property the above examples are only used to illustrate the technical scheme of the present invention and are not limiting.Although
The invention is described in detail with reference to an embodiment, it should be appreciated by those of ordinary skill in the art that skill of the invention
Art scheme is modified or replaced equivalently, and without departure from the spirit and scope of technical solution of the present invention, should all be covered at this
In the scope of the claims of invention.
Claims (19)
1. a kind of temperature measuring equipment based on light radiation characterized by comprising
Spatial light modulator is configured to that the light radiation of the object to be measured received is divided into the first light radiation according to predetermined control
With the second light radiation, and make the first light radiation along first path project, the second light radiation along be different from first path the second tunnel
Diameter projects；The spatial light modulator be Digital Micromirror Device, the Digital Micromirror Device include multiple micro mirrors and with it is described more
The corresponding multiple turning joints of a micro mirror, each turning joint turn over each micro mirror to preset direction according to the predetermined control
Turn, so that the half micro mirror in the multiple micro mirror penetrates the light radiation of the half of the object to be measured received along first path
Out, the other half micro mirror in the multiple micro mirror is by the other half light radiation of the object to be measured received along different from the first via
It projects in second path of diameter；
The first filter element being arranged in the first path, be configured to receive first light radiation, and will receive
First light radiation is filtered into the light that wavelength is first wave length；
The second filter element being arranged on second path, be configured to receive second light radiation, and will receive
Second light radiation is filtered into the light that wavelength is second wave length；
The first point detector of arrangement on the first path, is configured to the light of a length of first wave length of received wave and is converted into phase
The the first photosignal parameter answered；
The second point detector of arrangement on a second path, is configured to the light of a length of second wave length of received wave and is converted into phase
The the second photosignal parameter answered；
It is arranged in the first path, first between first point detector and the spatial light modulator assembles
Element, first point detector are located at the optical focus of first convergent component；
It is arranged on second path, second between second point detector and spatial light modulator assembles member
Part, second point detector are located at the optical focus of second convergent component；
Temperature determining device is configured to receive described first and second from first point detector and the second point detector
Photosignal parameter, and determined according to the predetermined relationship of the first and second photosignals parameter and temperature it is described to be measured right
The temperature of elephant.
2. temperature measuring equipment according to claim 1, which is characterized in that the temperature determining device is according to as follows described pre-
Determine the temperature that relationship determines object to be measured:
T=B '/ln (X/A ')
Wherein, X=E1(T)/E2(T), A ', B ' are predetermined coefficient, and T is the temperature of the object to be measured, E1It (T) is described first
Photosignal parameter, E2It (T) is the second photosignal parameter.
3. temperature measuring equipment according to claim 1 or 2 characterized by comprising
Control element is configured to carry out above-mentioned predetermined control to the spatial light modulator according to predetermined input.
4. temperature measuring equipment according to claim 1, which is characterized in that the temperature measuring equipment further include:
It is arranged in the first path, the first light intensity between first point detector and the spatial light modulator
Attenuating elements, and be arranged on second path, second between second point detector and spatial light modulator
Light intensity attenuation element.
5. temperature measuring equipment according to claim 4, which is characterized in that first filter element and the second optical filtering member
Part be center wavelength differ at least 10nm the first narrow band filter and the second narrow band filter, first narrow band filter and
The halfwidth parameter of second narrow band filter is at least 10nm.
6. temperature measuring equipment according to claim 5, which is characterized in that the photosignal parameter includes number of photons, electric current
Value, voltage value, any one in resistance value.
7. temperature measuring equipment according to claim 6, which is characterized in that the light radiation is the light radiation of infrared band.
8. temperature measuring equipment according to claim 7, which is characterized in that
First and second point detector be selected from near-infrared, mid and far infrared, far infrared band external photoeffect detector group,
Any one in inner photoeffect detector group, strong optical detector group and Weak photodetector group, wherein
The external photoeffect detector group includes: avalanche diode, vacuum photo tube, gas cell, photomultiplier tube, change
As pipe, image intensifier, pick-up tube；
The inner photoeffect detector group includes: Intrinsical photoconductive detector, doping type photoconductive detector, photomagnetoelectric effect
Answer detector, photogenic voltage detector；
The strong optical detector group includes: strong optical detector that is built-in or being equipped with analog-digital converter outside；
The Weak photodetector group includes: Weak photodetector that is built-in or being equipped with counter outside.
9. a kind of temp measuring system based on light radiation characterized by comprising
Such as temperature measuring equipment and robot scaling equipment of any of claims 1-8 based on light radiation,
The robot scaling equipment includes the adjustable reference light source of temperature, and the reference light source is configured in a dimensioning phase,
Spatial light modulator described in light radiation directive by the different temperatures being adjusted to, the light that will be received by the spatial light modulator
Radiation is divided into the first light radiation and the second light radiation, makes the first light radiation along first path injection, the second light radiation along difference
It is projected in the second path of first path, to obtain multiple first and second photosignals parameters, and according to the different temperatures
With the variable of the first and second photosignals parameter, according to Ed1(Tdi)/Ed2(Tdi)=A ' exp (B '/Tdi), wherein
The multiple first and second photosignals parameter is n the first and second photosignal parameters, the natural number that i is 1 to n；A',
B ' is predetermined coefficient, TdiFor i-th of temperature of the reference light source, Ed1(Tdi) it is the first optical telecommunications measured when i-th calibration
Number parameter, Ed2(Tdi) it is the second photosignal parameter measured when i-th calibration, determine first and second optical telecommunications
The predetermined relationship of number parameter and temperature.
10. temp measuring system according to claim 9, which is characterized in that the robot scaling equipment further includes by reference light source
Light radiation is converted into the beam-expanding collimation lens of parallel light radiation.
11. temp measuring system according to claim 10, which is characterized in that the robot scaling equipment further includes expanding standard for described
The beam splitter of spatial light modulator described in the parallel light radiation directive of straight lens conversion.
12. a kind of temp measuring method based on light radiation characterized by comprising
Using spatial light modulator according to predetermined control by the light radiation of the object to be measured received be divided into the first light radiation and
Second light radiation, and make the first light radiation along first path injection, the second light radiation along the second path for being different from first path
It projects；The spatial light modulator be Digital Micromirror Device, the Digital Micromirror Device include multiple micro mirrors and with it is the multiple
The corresponding multiple turning joints of micro mirror, each turning joint overturn each micro mirror to preset direction according to the predetermined control,
So that the half micro mirror in the multiple micro mirror projects the light radiation of the half of the object to be measured received along first path, institute
The other half micro mirror in multiple micro mirrors is stated by the other half light radiation of the object to be measured received along different from first path
It projects in the second path；
First light radiation is received in the first path, and it is first that the first light radiation received, which is filtered into wavelength,
The light of wavelength；
Second light radiation is received on second path, and it is second that the second light radiation received, which is filtered into wavelength,
The light of wavelength；
The light that the wavelength is first wave length is converged at into the first focus, and the first point detector is set in first focal point
To receive the wavelength as the light of first wave length and be converted into corresponding first photosignal parameter；
The light that the wavelength is second wave length is converged at into the second focus, and the second point detector is set in second focal point
To receive the wavelength as the light of second wave length and be converted into corresponding second photosignal parameter；And
The temperature of the object to be measured is determined according to the predetermined relationship of the first and second photosignals parameter and temperature.
13. temp measuring method according to claim 12, which is characterized in that the temperature of the object to be measured is according to following institute
It states predetermined relationship to determine: T=B '/ln (X/A ')
Wherein, X=E1(T)/E2(T), A ', B ' are predetermined coefficient, and T is the temperature of the object to be measured, E1It (T) is described first
Photosignal parameter, E2It (T) is the second photosignal parameter.
14. temp measuring method according to claim 12 or 13 characterized by comprising
Above-mentioned predetermined control is carried out to the spatial light modulator according to predetermined input using control element.
15. temp measuring method according to claim 14, it is characterised in that further comprise:
Decay to the intensity for the light that the wavelength is first wave length；And
Decay to the intensity for the light that the wavelength is second wave length.
16. temp measuring method according to claim 15, which is characterized in that the light radiation is the light radiation of infrared band.
17. temp measuring method according to claim 16, which is characterized in that the first wave length is differed with the second wave length
At least 10nm.
18. temp measuring method according to claim 17, which is characterized in that the photosignal parameter includes number of photons, electricity
Flow valuve, voltage value, any one in resistance value.
19. temp measuring method according to claim 18, which is characterized in that utilize spatial light modulator according to predetermined described
The light radiation of the object to be measured received is divided into the first light radiation and the second light radiation by control, and makes the first light radiation along the
It further include scaling step before the step of one path is projected, the second light radiation is projected along the second path for being different from first path,
The scaling step includes:
The light radiation that reference light source issues multiple and different temperature is adjusted, the light spoke of reference light source is received using spatial light modulator
It penetrates, the light radiation received is divided into the first light radiation and the second light radiation, and project the first light radiation along first path,
Second light radiation is projected along the second path for being different from first path, to obtain multiple first and second photosignals parameters；With
And
According to the variable of the different temperatures and the first and second photosignals parameter, according to Ed1(Tdi)/Ed2(Tdi)=
A’exp(B’/Tdi), wherein the multiple first and second photosignals parameter is n the first and second photosignal parameters, i
For 1 to n natural number；A ', B ' are predetermined coefficient, TdiFor i-th of temperature of the reference light source, Ed1(Tdi) determine for i-th
The the first photosignal parameter measured when mark, Ed2(Tdi) it is the second photosignal parameter measured when i-th calibration, it determines
The predetermined relationship of the first and second photosignals parameter and temperature.
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