CN105509961A - Automatic detecting device and method for large-array resistance strain gauge - Google Patents
Automatic detecting device and method for large-array resistance strain gauge Download PDFInfo
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- CN105509961A CN105509961A CN201511024782.3A CN201511024782A CN105509961A CN 105509961 A CN105509961 A CN 105509961A CN 201511024782 A CN201511024782 A CN 201511024782A CN 105509961 A CN105509961 A CN 105509961A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses an automatic detecting device for a large-array resistance strain gauge. The automatic detecting device comprises a frame, a positioning and fixing mechanism, a detecting mechanism, a computer, a data acquisition board, a table digital multimeter, and an output amplification board. The positioning and fixing mechanism comprises a two-dimension mobile platform, a vacuum adsorption table, and a vacuum adsorption loop. The vacuum adsorption table comprises an adsorption table lower cover and an adsorption table upper cover. The vacuum adsorption loop comprises a vacuum pump, a vacuum filter, a vacuum degree regulating valve and a vacuum solenoid valve. The detecting mechanism comprises a first cylinder sliding table, a cylinder sliding table installation plate, a second cylinder sliding table, a pneumatic loop, a probe box, a detecting circuit board, and a spring probe array. The pneumatic loop comprises an air pump, an air filter, a reducing valve, and a pressure gauge. The invention further discloses an automatic detecting method for the large-array resistance strain gauge. The automatic detecting device is novel and reasonable in design, low in production cost, high in operation reliability, reduces worker labor intensity and product production cost, and achieves high popularization and application value.
Description
Technical field
The invention belongs to resistance strain plate production technical field, be specifically related to a kind of large array electric resistive foil gauge automatic detection device and method.
Background technology
Resistance strain plate is Analysis of Experimental Stress, test and measuring technology, automatically Test and control and weigh or the key element of force cell, have that size is little, creep is little, good anti-fatigue performance and the good feature such as stability, be widely used in diagnosis and the assessment in various machinery and engineering structure intensity and life-span, also for the Detection and measure of multiple physical quantity, the Measurement & Control of production run and scientific experiment process is realized.Resistance strain plate is mainly pasted onto elastomeric surface, elastic body is in the microdeformation (elongating or shortening) produced by load rear surface, make the foil gauge being pasted onto its surface also in company with producing distortion, after resistance strain gage distortion, its resistance will change (increase or reduce), then through corresponding metering circuit, this resistance variations is converted to electric signal (voltage or electric current) to export, measure the change of resistance, the strain of surface of elastomer can be calculated by formula, and corresponding stress.
As shown in Figure 8, resistance strain plate is primarily of sensitive grid 41, substrate 42, overlayer 43 and lead-in wire 44 composition, and sensitive grid 41 cementing agent 45 is bonded between substrate 42 and overlayer 43.In foil gauge production run, be first tightly adhered to by foil in substrate 42, substrate 42 material is generally glued membrane (phenol-formaldehyde resin modified, polyimide resin, epoxy resin etc.), and thickness is about 0.02mm ~ 0.04mm; Sensitive grid 41 material is the metal alloy paper tinsel that thickness is about 0.0025mm ~ 0.005mm, and foil is generally constantan foil, karma foil material, annealing constantan foil etc.; The shaping of sensitive grid 41 is that foil is carried out photoetching, corrosion according to certain circuit requirement, and the resistance wire finally remained in substrate 42 is sensitive grid 41.In order to improve sensitive grid 41 job stability in use and serviceable life further, also need to increase overlayer 43 on sensitive grid 41, the material of general overlayer 43 is identical with base material, thickness is about 0.01mm ~ 0.02mm, and the gross thickness of resistance strain plate is about 0.035mm ~ 0.05mm.
Resistance strain plate forms according to certain queueing discipline Etching on the metal foil plate of a 102mm × 115mm, a metal foil plate has usually the figure of multiple product.Large array electric resistive foil gauge diaphragm has a multiple resistance strain plate unit by arrayed, and each resistance strain plate unit draws 4 electrodes, as 4 measurement points.
Need single foil gauge product to separate from justifying in the foil gauge production later stage, and single foil gauge product is detected, finally carry out sorting according to testing result, need to test multinomial operating characteristic such as its Static Electro resistance, magnitude of voltage, sensitivity, thermal output, transverse sensitivity ratio, creep, strain limit and fatigue lifetives.Wherein Static Electro resistance, magnitude of voltage, sensitivity technique belong to one hundred percent inspection, and other performance index belong to bulk sampling inspection.At present, rely on manual testing completely to the resistance of foil gauge, voltage measurement, because foil gauge output is large, the workman of needs is many, and cause labour intensity large, production cost is high, and testing efficiency is low, easily makes mistakes, and is unfavorable for controlling the stability of product quality.
Summary of the invention
Technical matters to be solved by this invention is for above-mentioned deficiency of the prior art, provide a kind of compact conformation, novel in design rationally, realize that cost is low, functional reliability is high, practical, can enhance productivity, reduce labor strength and production cost, large array electric resistive foil gauge automatic detection device that application value is high.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of large array electric resistive foil gauge automatic detection device, it is characterized in that: comprise frame, location fixed mechanism, testing agency and computing machine, described computing machine is connected to data collecting plate card and desk type digital universal meter, the signal output part of described data collecting plate card is connected to output amplification board;
Described frame comprises upper and lower spaced upper plate and lower shoe, and is supported on the pillar between upper plate and lower shoe;
Described location fixed mechanism comprises the two-dimensional movement platform being arranged on lower shoe top, be arranged on the vacuum adsorption table of two-dimensional movement table top and the vacuum suction loop for vacuumizing vacuum adsorption table, described two-dimensional movement platform comprises X-axis mobile motor, Y-axis mobile motor, X-axis moving grating chi and Y-axis moving grating chi, described vacuum adsorption table comprises mutual fastening and the absorptive table lower cover be fixedly connected with and absorptive table upper cover, it is vacuum chamber that described absorptive table lower cover and absorptive table upper cover fasten the space formed, the upper surface of described absorptive table upper cover is provided with adsorption hole, described vacuum suction loop comprises the vacuum pump, vacuum filter, vacuum tightness variable valve and the vacuum solenoid that are connected successively by vacuum tube, and described vacuum tube is connected with described vacuum chamber, and described vacuum tightness variable valve is connected with vacuum meter, described X-axis moving grating chi is all connected with the signal input part of data collecting plate card with Y-axis moving grating chi, and described X-axis mobile motor, Y-axis mobile motor and vacuum solenoid are all connected with the output terminal exporting amplification board,
The second cylinder slide unit that described testing agency comprises the first cylinder slide unit being horizontally set on upper plate top, the cylinder slide unit installing plate be connected with the slide unit of the first cylinder slide unit and is connected with cylinder slide unit installing plate, and pneumatic circuit; The slide unit of described second cylinder slide unit is connected with probe box by web joint, described probe box inside is provided with testing circuit plate, described testing circuit plate is provided with multichannel foil gauge resistive voltage testing circuit and is connected with the signals collecting end of multichannel foil gauge resistive voltage testing circuit and passes the spring probe array of probe box downwards; Described pneumatic circuit comprises the air pump, air strainer, reduction valve and the tensimeter that are connected successively by tracheae, and described first cylinder slide unit is connected with tracheae by the first air-operated solenoid valve, and described second cylinder slide unit is connected with tracheae by the second air-operated solenoid valve; Described first air-operated solenoid valve and the second air-operated solenoid valve are all connected with the output terminal exporting amplification board, the control signal input end of multichannel foil gauge resistive voltage testing circuit is all connected with the signal output part of data collecting plate card, and the signal output part of multichannel foil gauge resistive voltage testing circuit is all connected with desk type digital universal meter by signal output interface.
Above-mentioned one large array electric resistive foil gauge automatic detection device, it is characterized in that: described pillar is made up of the aluminium section bar that many connect into framed structure, described aluminium section bar is fixedly connected with by triangle connecting rack with aluminium section bar, described aluminium section bar is fixedly connected with by screw bolt and nut with upper plate, and described aluminium section bar is fixedly connected with triangle connecting rack by bolt, nut with lower shoe.
Above-mentioned one large array electric resistive foil gauge automatic detection device, it is characterized in that: between described absorptive table lower cover and absorptive table upper cover, be provided with sealing gasket, described absorptive table lower cover, sealing gasket are fixedly connected with by absorptive table coupling bolt with absorptive table upper cover, the side of described absorptive table lower cover is provided with threaded hole, and described vacuum tube is connected with threaded hole by pneumatic joint.
Above-mentioned one large array electric resistive foil gauge automatic detection device, it is characterized in that: the upper surface of described absorptive table upper cover is provided with many levels to groove and many vertically to groove, many described levels have describedly vertically intersected to form multiple projection to groove mutually to groove and many, the quantity of described adsorption hole is multiple, and multiple adsorption hole is distributed on multiple projection; The shape of described absorptive table upper cover upper surface is rectangle, and four pin of described absorptive table upper cover upper surface are all carved with reference location line.
Above-mentioned one large array electric resistive foil gauge automatic detection device, it is characterized in that: described first cylinder slide unit is Rodless cylinder slide unit, the quantity of described testing circuit plate is two pieces, two blocks of described testing circuit plates are fixedly connected with screw by copper stud one on the other, and described spring probe array welds with the testing circuit plate on top and passes probe box downwards again after penetrating the testing circuit plate of bottom.
Above-mentioned one large array electric resistive foil gauge automatic detection device, it is characterized in that: described spring probe array is formed by organizing spring probe group more, often organizing spring probe group by for forming with corresponding four spring probes contacted of four measurement points of a resistance strain gage when measuring; Every road foil gauge resistive voltage testing circuit includes chip S1, chip S2 and the chip S3 that model is ADG84, and described signal output interface is the Wiring port P1 with four pins; 1st pin of described chip S1 connects with the output terminal VCC of power supply, and by electric capacity C1 ground connection, 4th pin of described chip S1 is connected with the 8th pin and is the first control signal input end IN1 of foil gauge resistive voltage testing circuit, 5th pin of described chip S1 is connected with first measurement point of described resistance strain gage, the 6th pin ground connection of described chip S1, the 7th pin of described chip S1 is connected with second measurement point of described resistance strain gage; 1st pin of described chip S2 connects with the output terminal VCC of power supply, and by electric capacity C2 ground connection, 4th pin of described chip S2 is connected with the 8th pin and is the second control signal input end IN2 of foil gauge resistive voltage testing circuit, 5th pin of described chip S2 is connected with the 3rd measurement point of described resistance strain gage, the 6th pin ground connection of described chip S2, the 7th pin of described chip S2 is connected with the 4th measurement point of described resistance strain gage; 1st pin of described chip S3 connects with the output terminal VCC of power supply, and by electric capacity C3 ground connection, 4th pin of described chip S3 is connected with the 8th pin and is the 3rd control signal input end IN3 of foil gauge resistive voltage testing circuit, 5th pin of described chip S3 is connected with first measurement point of described resistance strain gage, the 6th pin ground connection of described chip S3, the 7th pin of described chip S3 is connected with second measurement point of described resistance strain gage; first control signal input end IN1 of described foil gauge resistive voltage testing circuit, second control signal input end IN2 is all connected with the signal output part of data collecting plate card with the 3rd control signal input end IN3,3rd pin of described chip S1 is the first signal output part D1 of foil gauge resistive voltage testing circuit, 9th pin of described chip S1 is the secondary signal output terminal D2 of foil gauge resistive voltage testing circuit, 3rd pin of described chip S2 and the 3rd pin of described chip S3 connect and are the 3rd signal output part D3 of foil gauge resistive voltage testing circuit, 9th pin of described chip S2 and the 9th pin of described chip S3 connect and are the 4th signal output part D4 of foil gauge resistive voltage testing circuit, first signal output part D1 of every road foil gauge resistive voltage testing circuit is all connected with the 1st pin of described Wiring port P1, the secondary signal output terminal D2 of every road foil gauge resistive voltage testing circuit is all connected with the 2nd pin of described Wiring port P1,3rd signal output part D3 of every road foil gauge resistive voltage testing circuit is all connected with the 3rd pin of described Wiring port P1,4th signal output part D4 of every road foil gauge resistive voltage testing circuit is all connected with the 4th pin of described Wiring port P1.
Above-mentioned one large array electric resistive foil gauge automatic detection device, it is characterized in that: described desk type digital universal meter is Keithley 2000 type desk type digital universal meter, 1st pin of described Wiring port P1 is connected with the INPUTHI interface of described Keithley 2000 type desk type digital universal meter, 2nd pin of described Wiring port P1 is connected with the INPUTLO interface of described Keithley 2000 type desk type digital universal meter, 3rd pin of described Wiring port P1 is connected with the SENSE Ω 4WIREHI interface of described Keithley 2000 type desk type digital universal meter, 4th pin of described Wiring port P1 is connected with the SENSE Ω 4WIRELO interface of described Keithley 2000 type desk type digital universal meter.
Above-mentioned one large array electric resistive foil gauge automatic detection device, is characterized in that: the model of described data collecting plate card is NIPCI6509, and the model of described output amplification board is HSF16M.
The invention also discloses the large array electric resistive foil gauge automatic testing method that a kind of method step is simple, realization is convenient, detection efficiency is high, it is characterized in that the method comprises the following steps:
Large array electric resistive foil gauge diaphragm is manually placed on after in vacuum adsorption table by step one, operator, the fixed instruction of input absorption on computers, and start vacuum pump, data collecting plate card drives vacuum solenoid to open by exporting amplification board output signal, vacuum pump evacuation makes to produce negative pressure in described vacuum chamber, is absorbed and fixed on the upper surface of absorptive table upper cover by large array electric resistive foil gauge diaphragm;
Step 2, on computers input start to detect instruction, first, data collecting plate card is opened by exporting amplification board output signal driving first air-operated solenoid valve, and the first cylinder slide unit drives the second cylinder slide unit and the tangential movement of spring probe array by cylinder slide unit installing plate; Then, data collecting plate card is opened by exporting amplification board output signal driving second air-operated solenoid valve, and the second cylinder slide unit drives spring probe array to move downward by web joint, makes spring probe array arrive the first group of resistance-strain blade unit place that will detect;
Step 3, operation computing machine, computing machine is by desk type digital universal meter and foil gauge resistive voltage testing circuit, the resistance of each resistance strain gage in first group of resistance-strain blade unit and voltage are measured, measurement result is exported to computing machine by desk type digital universal meter, measurement result and examination criteria compare by computing machine, and record comparative result;
After step 4, comparative result record complete, first, data collecting plate card is by exporting the commutation of amplification board output signal driving second air-operated solenoid valve, second cylinder slide unit drives spring probe array to move upward by web joint, first group of resistance-strain blade unit spring probe array being left will detect; Then, data collecting plate card drives Y-axis mobile motor by exporting amplification board output signal, Y-axis mobile motor drives vacuum adsorption table to move, displacement is fed back to computing machine by data collecting plate card by Y-axis moving grating chi, until stop after moving the width distance of one group of resistance-strain blade unit;
Step 5, data collecting plate card are again by exporting the commutation of amplification board output signal driving second air-operated solenoid valve, second cylinder slide unit drives spring probe array to move downward by web joint, next group resistance-strain blade unit place that the arrival of spring probe array will be detected;
Repeat step 3 to step 5, until all resistance strain gage unit inspections complete.
The present invention compared with prior art has the following advantages:
1, the compact conformation of the present invention's large array electric resistive foil gauge automatic detection device, rationally novel in design, convenient processing and manufacture.
2, the present invention's large array electric resistive foil gauge automatic detection device is simple to operate, applied widely, can realize the automatic detection of the large array electric resistive foil gauge of different model.
3, large array electric resistive foil gauge automatic detection device of the present invention, have employed precision mechanical transmission, computing machine controls and Pneumatic Control Technology, compared with existing manual detection, have be quick on the draw, work efficiency is high, it is little to pollute and attach troops to a unit in periphery annex is few, realize the plurality of advantages such as cost is low.
4, present invention employs the two-dimensional movement platform with grating scale, realize the movement of the large array electric resistive foil gauge be absorbed and fixed in vacuum adsorption table, displacement controllable precision can reach 0.001mm.
5, the absorption that vacuum adsorption table of the present invention can realize the large array electric resistive foil gauge of different model is fixed, and little to the wearing and tearing of large array electric resistive foil gauge, and absorption fixed efficiency is high, it is little to pollute.
6, the method step of the present invention's large array electric resistive foil gauge automatic testing method is simple, and it is convenient to realize, and detection efficiency is high.
7, the present invention can improve the detection efficiency of large array electric resistive foil gauge, and then enhances productivity, and reduces labor strength, stability contorting product quality, the competitive power of enterprise.
8, the present invention can realize large array electric resistive foil gauge rapid, accurate, automatically detect, practical, result of use is good, and application value is high.
In sum, the present invention is rationally novel in design, and realize cost low, functional reliability is high, practical, can enhance productivity, and reduce labor strength and production cost, application value is high.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the part-structure schematic diagram of the present invention's large array electric resistive foil gauge automatic detection device.
Fig. 2 is the structural representation of vacuum adsorption table of the present invention.
Fig. 3 is the syndeton schematic diagram of spring probe array of the present invention and testing circuit plate.
Fig. 4 is the annexation schematic diagram of computing machine of the present invention and other each parts.
Fig. 5 is the annexation schematic diagram in vacuum adsorption table of the present invention and vacuum suction loop.
Fig. 6 is the annexation schematic diagram of the present invention first cylinder slide unit and the second cylinder slide unit and pneumatic circuit.
Fig. 7 is the circuit theory diagrams of foil gauge resistive voltage testing circuit of the present invention.
Fig. 8 is the structural representation of existing resistance strain plate.
Description of reference numerals:
1-upper plate; 2-the first cylinder slide unit; 3-cylinder slide unit installing plate;
4-the second cylinder slide unit; 5-web joint; 6-probe box;
7-copper stud; 8-testing circuit plate; 9-spring probe array;
10-Y-axis moving grating chi; 11-two-dimensional movement platform; 12-X-axis moving grating chi;
13-vacuum adsorption table; 13-1-absorptive table lower cover; 13-2-absorptive table upper cover;
13-3-adsorption hole; 13-4-sealing gasket; 13-5-absorptive table coupling bolt;
13-6-threaded hole; 13-7-projection; 13-8-reference location line;
14-large array electric resistive foil gauge diaphragm; 15-Y-axis mobile motor;
16-X-axis mobile motor; 17-lower shoe; 18-triangle connecting rack;
19-aluminium section bar; 20-air pump; 21-air strainer;
22-reduction valve; 23-tensimeter; 24-tracheae;
25-vacuum solenoid; 26-the first air-operated solenoid valve; 27-vacuum meter;
28-vacuum tightness variable valve; 29-vacuum filter; 30-vacuum pump;
31-vacuum tube; 32-the second air-operated solenoid valve; 33-pneumatic joint;
34-screw; 35-computing machine; 36-data collecting plate card;
37-desk type digital universal meter; 38-export amplification board; 39-signal output interface;
40-foil gauge resistive voltage testing circuit; 41-sensitive grid;
42-substrate; 43-overlayer; 44-lead-in wire;
45-cementing agent.
Embodiment
As shown in Figure 1 and Figure 4, large array electric resistive foil gauge automatic detection device of the present invention, comprise frame, location fixed mechanism, testing agency and computing machine 35, described computing machine 35 is connected to data collecting plate card 36 and desk type digital universal meter 37, the signal output part of described data collecting plate card 36 is connected to and exports amplification board 38;
Described frame comprises upper and lower spaced upper plate 1 and lower shoe 17, and is supported on the pillar between upper plate 1 and lower shoe 17;
Described location fixed mechanism comprises the two-dimensional movement platform 11 being arranged on lower shoe 17 top, be arranged on the vacuum adsorption table 13 at two-dimensional movement platform 11 top and the vacuum suction loop for vacuumizing vacuum adsorption table 13, described two-dimensional movement platform 11 comprises X-axis mobile motor 16, Y-axis mobile motor 15, X-axis moving grating chi 12 and Y-axis moving grating chi 10, composition graphs 2, described vacuum adsorption table 13 comprises mutual fastening and the absorptive table lower cover 13-1 be fixedly connected with and absorptive table upper cover 13-2, it is vacuum chamber that described absorptive table lower cover 13-1 and absorptive table upper cover 13-2 fastens the space formed, the upper surface of described absorptive table upper cover 13-2 is provided with adsorption hole 13-3, composition graphs 5, described vacuum suction loop comprises the vacuum pump 30, vacuum filter 29, vacuum tightness variable valve 28 and the vacuum solenoid 25 that are connected successively by vacuum tube 31, described vacuum tube 31 is connected with described vacuum chamber, and described vacuum tightness variable valve 28 is connected with vacuum meter 27, described X-axis moving grating chi 12 is all connected with the signal input part of data collecting plate card 36 with Y-axis moving grating chi 10, and described X-axis mobile motor 16, Y-axis mobile motor 15 and vacuum solenoid 25 are all connected with the output terminal exporting amplification board 38,
The second cylinder slide unit 4 that described testing agency comprises the first cylinder slide unit 2 being horizontally set on upper plate 1 top, the cylinder slide unit installing plate 3 be connected with the slide unit of the first cylinder slide unit 2 and is connected with cylinder slide unit installing plate 3, and pneumatic circuit; The slide unit of described second cylinder slide unit 4 is connected with probe box 6 by web joint 5, composition graphs 3, described probe box 6 inside is provided with testing circuit plate 8, described testing circuit plate 8 is provided with multichannel foil gauge resistive voltage testing circuit 40 and is connected with the signals collecting end of multichannel foil gauge resistive voltage testing circuit 40 and passes the spring probe array 9 of probe box 6 downwards; Composition graphs 6, described pneumatic circuit comprises the air pump 20, air strainer 21, reduction valve 22 and the tensimeter 23 that are connected successively by tracheae 24, described first cylinder slide unit 2 is connected with tracheae 24 by the first air-operated solenoid valve 26, and described second cylinder slide unit 4 is connected with tracheae 24 by the second air-operated solenoid valve 32; Described first air-operated solenoid valve 26 and the second air-operated solenoid valve 32 are all connected with the output terminal exporting amplification board 38, the control signal input end of multichannel foil gauge resistive voltage testing circuit 40 is all connected with the signal output part of data collecting plate card 36, and the signal output part of multichannel foil gauge resistive voltage testing circuit 40 is all connected with desk type digital universal meter 37 by signal output interface 39.During concrete enforcement, described first cylinder slide unit 2 is bolted to connection at upper plate 1 top, cylinder slide unit installing plate 3 is fixedly connected with by the slide unit of bolt with the first cylinder slide unit 2, web joint 5 is fixedly connected with by the slide unit of bolt with the second cylinder slide unit 4, and described probe box 6 is fixedly connected with web joint 5 by bolt.
As shown in Figure 1, in the present embodiment, described pillar is made up of the aluminium section bar 19 that many connect into framed structure, described aluminium section bar 19 is fixedly connected with by triangle connecting rack 18 with aluminium section bar 19, described aluminium section bar 19 is fixedly connected with by screw bolt and nut with upper plate 1, and described aluminium section bar 19 is fixedly connected with triangle connecting rack 18 by bolt, nut with lower shoe 17.
As shown in Figure 2, in the present embodiment, sealing gasket 13-4 is provided with between described absorptive table lower cover 13-1 and absorptive table upper cover 13-2, described absorptive table lower cover 13-1, sealing gasket 13-4 are fixedly connected with by absorptive table coupling bolt 13-5 with absorptive table upper cover 13-2, the side of described absorptive table lower cover 13-1 is provided with threaded hole 13-6, and described vacuum tube 31 is connected with threaded hole 13-6 by pneumatic joint 33.The upper surface of described absorptive table upper cover 13-2 is provided with many levels to groove and many vertically to groove, many described levels have describedly vertically intersected to form multiple projection 13-7 to groove mutually to groove and many, the quantity of described adsorption hole 13-3 is multiple, and multiple adsorption hole 13-3 is distributed on multiple projection 13-7; The shape of described absorptive table upper cover 13-2 upper surface is rectangle, and four pin of described absorptive table upper cover 13-2 upper surface are all carved with reference location line 13-8.By arranging sealing gasket 13-4, the gap air leak between absorptive table lower cover 13-1 and absorptive table upper cover 13-2 can be avoided, affecting quick formation and the maintenance of vacuum tightness needed for described vacuum chamber; By arranging reference location line 13-8, facilitating and large array electric resistive foil gauge diaphragm is accurately located.
As shown in Figure 3, in the present embodiment, described first cylinder slide unit 2 is Rodless cylinder slide unit, the quantity of described testing circuit plate 8 is two pieces, two blocks of described testing circuit plates 8 are fixedly connected with screw 34 by copper stud 7 one on the other, and described spring probe array 9 welds with the testing circuit plate 8 on top and passes probe box 6 downwards again after penetrating the testing circuit plate 8 of bottom.
As shown in Figure 3 and Figure 7, in the present embodiment, described spring probe array 9 forms by organizing spring probe group more, often organizing spring probe group to be made up of four spring probes, often organizing spring probe group by for forming with corresponding four spring probes contacted of four measurement points of a resistance strain gage when measuring; Every road foil gauge resistive voltage testing circuit 40 includes chip S1, chip S2 and the chip S3 that model is ADG84, and described signal output interface 39 is for having the Wiring port P1 of four pins; 1st pin of described chip S1 connects with the output terminal VCC of power supply, and by electric capacity C1 ground connection, 4th pin of described chip S1 is connected with the 8th pin and is the first control signal input end IN1 of foil gauge resistive voltage testing circuit 40,5th pin of described chip S1 is connected with first measurement point of described resistance strain gage, the 6th pin ground connection of described chip S1, the 7th pin of described chip S1 is connected with second measurement point of described resistance strain gage; 1st pin of described chip S2 connects with the output terminal VCC of power supply, and by electric capacity C2 ground connection, 4th pin of described chip S2 is connected with the 8th pin and is the second control signal input end IN2 of foil gauge resistive voltage testing circuit 40,5th pin of described chip S2 is connected with the 3rd measurement point of described resistance strain gage, the 6th pin ground connection of described chip S2, the 7th pin of described chip S2 is connected with the 4th measurement point of described resistance strain gage; 1st pin of described chip S3 connects with the output terminal VCC of power supply, and by electric capacity C3 ground connection, 4th pin of described chip S3 is connected with the 8th pin and is the 3rd control signal input end IN3 of foil gauge resistive voltage testing circuit 40,5th pin of described chip S3 is connected with first measurement point of described resistance strain gage, the 6th pin ground connection of described chip S3, the 7th pin of described chip S3 is connected with second measurement point of described resistance strain gage; first control signal input end IN1 of described foil gauge resistive voltage testing circuit 40, second control signal input end IN2 is all connected with the signal output part of data collecting plate card 36 with the 3rd control signal input end IN3,3rd pin of described chip S1 is the first signal output part D1 of foil gauge resistive voltage testing circuit 40,9th pin of described chip S1 is the secondary signal output terminal D2 of foil gauge resistive voltage testing circuit 40,3rd pin of described chip S2 and the 3rd pin of described chip S3 connect and are the 3rd signal output part D3 of foil gauge resistive voltage testing circuit 40,9th pin of described chip S2 and the 9th pin of described chip S3 connect and are the 4th signal output part D4 of foil gauge resistive voltage testing circuit 40, first signal output part D1 of every road foil gauge resistive voltage testing circuit 40 is all connected with the 1st pin of described Wiring port P1, the secondary signal output terminal D2 of every road foil gauge resistive voltage testing circuit 40 is all connected with the 2nd pin of described Wiring port P1,3rd signal output part D3 of every road foil gauge resistive voltage testing circuit 40 is all connected with the 3rd pin of described Wiring port P1,4th signal output part D4 of every road foil gauge resistive voltage testing circuit 40 is all connected with the 4th pin of described Wiring port P1.
In the present embodiment, described desk type digital universal meter 37 is Keithley 2000 type desk type digital universal meter 37, 1st pin of described Wiring port P1 is connected with the INPUTHI interface of described Keithley 2000 type desk type digital universal meter 37, 2nd pin of described Wiring port P1 is connected with the INPUTLO interface of described Keithley 2000 type desk type digital universal meter 37, 3rd pin of described Wiring port P1 is connected with the SENSE Ω 4WIREHI interface of described Keithley 2000 type desk type digital universal meter 37, 4th pin of described Wiring port P1 is connected with the SENSE Ω 4WIRELO interface of described Keithley 2000 type desk type digital universal meter 37.
Specifically, as shown in Figure 7, described resistance strain gage is equivalent to resistance bridge R1, two links on a diagonal line of described resistance bridge R1 are respectively the measuring junction 1S1B corresponding with first of described resistance strain gage measurement point and the measuring junction 1S2B corresponding with second measurement point of described resistance strain gage, and two links on another article of diagonal line of described resistance bridge R1 are respectively and the 3rd of described resistance strain gage the measuring junction 2S1B that measurement point the is corresponding and measuring junction 2S2B corresponding with the 4th measurement point of described resistance strain gage.
In the present embodiment, chip S1, chip S2 and chip S3 are the inner switching device containing two independently single-pole double-throw switch (SPDT)s, and this device has ultralow conducting resistance, is less than 0.4 Ω in whole temperature range.
During concrete use, computing machine 35 timesharing is to the resistance between the first measurement point of each resistance strain gage that multichannel foil gauge resistive voltage testing circuit 40 connects and the second measurement point, and the zero-point voltage between the 3rd measurement point of each resistance strain gage and the 4th measurement point is measured, to not being now the foil gauge resistive voltage testing circuit 40 that the resistance strain gage measured connects, export " 1 " logic high to the first control signal input end IN1 of foil gauge resistive voltage testing circuit 40, second control signal input end IN2 and the 3rd control signal input end IN3, to the foil gauge resistive voltage testing circuit 40 that the resistance strain gage now carrying out measuring resistance connects, export " 0 " logic low, " 1 " logic high, " 0 " logic low respectively to the first control signal input end IN1, the second control signal input end IN2 of foil gauge resistive voltage testing circuit 40 and the 3rd control signal input end IN3, to the foil gauge resistive voltage testing circuit 40 that the resistance strain gage now carrying out measuring voltage connects, export " 0 " logic low, " 0 " logic low, " 1 " logic high respectively to the first control signal input end IN1, the second control signal input end IN2 of foil gauge resistive voltage testing circuit 40 and the 3rd control signal input end IN3.
When the first control signal input end IN1 is " 0 " logic low, second control signal input end IN2 be " 1 " logic high and the 3rd control signal input end IN3 for " 0 " logic low time, the S1B pin of described chip S1 and the conducting of S2B pin, i.e. the 5th pin of described chip S1 and the 7th pin conducting, the S1A pin of described chip S2 and the conducting of S2A pin, i.e. the 2nd pin of described chip S2 and the 10th pin conducting, the S1B pin of described chip S3 and the conducting of S2B pin, i.e. the 5th pin of described chip S3 and the 7th pin conducting, first signal output part D1 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 1S1B of described resistance bridge R1 connects, the secondary signal output terminal D2 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 1S2B of described resistance bridge R1 connects, 3rd signal output part D3 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 1S1B of described resistance bridge R1 connects, 4th signal output part D2 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 1S2B of described resistance bridge R1 connects, now, computing machine 35 exports four-wire ohm measurement instruction, the resistance between the measuring junction 1S1B of described resistance bridge R1 and measuring junction 1S2B two ends can be measured, namely the resistance between the first measurement point of resistance strain gage and the second measurement point has been measured.
When the first control signal input end IN1 is " 0 " logic low, second control signal input end IN2 be " 0 " logic low and the 3rd control signal input end IN3 for " 1 " logic high time, the S1B pin of described chip S1 and the conducting of S2B pin, i.e. the 5th pin of described chip S1 and the 7th pin conducting, the S1B pin of described chip S2 and the conducting of S2B pin, i.e. the 5th pin of described chip S2 and the 7th pin conducting, the S1A pin of described chip S3 and the conducting of S2A pin, i.e. the 2nd pin of described chip S3 and the 10th pin conducting, first signal output part D1 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 1S1B of described resistance bridge R1 connects, the secondary signal output terminal D2 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 1S2B of described resistance bridge R1 connects, 3rd signal output part D3 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 2S1B of described resistance bridge R1 connects, 4th signal output part D2 of described foil gauge resistive voltage the testing circuit 40 and measuring junction 2S2B of described resistance bridge R1 connects, now, computing machine 35 exports four-wire ohm measurement instruction, the measuring junction 1S1B of described Keithley 2000 type desk type digital universal meter 37 to described resistance bridge R1 and the electric current of measuring junction 1S2B output 1mA, described Keithley 2000 type desk type digital universal meter 37 can measure the zero-point voltage between the measuring junction 2S1B of described resistance bridge R1 and measuring junction 2S2B two ends, namely the zero-point voltage between the 3rd measurement point of resistance strain gage and the 4th measurement point has been measured.
In the present embodiment, the model of described data collecting plate card 36 is NIPCI6509, and the model of described output amplification board 38 is HSF16M.
One of the present invention large array electric resistive foil gauge automatic testing method, comprises the following steps:
Large array electric resistive foil gauge diaphragm 14 is manually placed on after in vacuum adsorption table 13 by step one, operator, input absorption fixed instruction on computing machine 35, and start vacuum pump 30, data collecting plate card 36 drives vacuum solenoid 25 to open by exporting amplification board 38 output signal, vacuum pump 30 vacuumizes and makes to produce negative pressure in described vacuum chamber, is absorbed and fixed on the upper surface of absorptive table upper cover 13-2 by large array electric resistive foil gauge diaphragm 14;
Step 2, on computing machine 35 input start to detect instruction, first, data collecting plate card 36 outputs signal driving first air-operated solenoid valve 26 by output amplification board 38 and opens, and the first cylinder slide unit 2 drives the second cylinder slide unit 4 and spring probe array 9 tangential movement by cylinder slide unit installing plate 3; Then, data collecting plate card 36 outputs signal driving second air-operated solenoid valve 32 by output amplification board 38 and opens, second cylinder slide unit 4 drives spring probe array 9 to move downward by web joint 5, makes spring probe array 9 arrive the first group of resistance-strain blade unit place that will detect; Namely four spring probe branch correspondences in each group of spring probe in described spring probe array 9 contact with four measurement points of corresponding resistance strain gage.
Step 3, operation computing machine 35, computing machine 35 is by desk type digital universal meter 37 and foil gauge resistive voltage testing circuit 40, the resistance of each resistance strain gage in first group of resistance-strain blade unit and voltage are measured, measurement result is exported to computing machine 35 by desk type digital universal meter 37, measurement result and examination criteria compare by computing machine 35, and record comparative result; During concrete enforcement, described examination criteria is GB/T13992-92 " strain ga(u)ge " standard.
After step 4, comparative result record complete, first, data collecting plate card 36 outputs signal driving second air-operated solenoid valve 32 by output amplification board 38 and commutates, second cylinder slide unit 4 drives spring probe array 9 to move upward by web joint 5, first group of resistance-strain blade unit spring probe array 9 being left will detect; Then, data collecting plate card 36 outputs signal driving Y-axis mobile motor 15 by exporting amplification board 38, Y-axis mobile motor 15 drives vacuum adsorption table 13 to move, displacement is fed back to computing machine 35 by data collecting plate card 36 by Y-axis moving grating chi 10, until stop after moving the width distance of one group of resistance-strain blade unit; Like this, spring probe array 9 just reaches directly over next group resistance-strain blade unit that will detect;
Step 5, data collecting plate card 36 again output signal driving second air-operated solenoid valve 32 by output amplification board 38 and commutate, second cylinder slide unit 4 drives spring probe array 9 to move downward by web joint 5, next group resistance-strain blade unit place that spring probe array 9 arrival will be detected;
Repeat step 3 to step 5, until all resistance strain gage unit inspections complete.
The above; it is only preferred embodiment of the present invention; not the present invention is imposed any restrictions, every above embodiment is done according to the technology of the present invention essence any simple modification, change and equivalent structure change, all still belong in the protection domain of technical solution of the present invention.
Claims (9)
1. a large array electric resistive foil gauge automatic detection device, it is characterized in that: comprise frame, location fixed mechanism, testing agency and computing machine (35), described computing machine (35) is connected to data collecting plate card (36) and desk type digital universal meter (37), the signal output part of described data collecting plate card (36) is connected to and exports amplification board (38);
Described frame comprises upper and lower spaced upper plate (1) and lower shoe (17), and is supported on the pillar between upper plate (1) and lower shoe (17);
Described location fixed mechanism comprises the two-dimensional movement platform (11) being arranged on lower shoe (17) top, be arranged on the vacuum adsorption table (13) at two-dimensional movement platform (11) top and the vacuum suction loop for vacuumizing vacuum adsorption table (13), described two-dimensional movement platform (11) comprises X-axis mobile motor (16), Y-axis mobile motor (15), X-axis moving grating chi (12) and Y-axis moving grating chi (10), described vacuum adsorption table (13) comprises mutual fastening and the absorptive table lower cover (13-1) be fixedly connected with and absorptive table upper cover (13-2), it is vacuum chamber that described absorptive table lower cover (13-1) and absorptive table upper cover (13-2) fasten the space formed, the upper surface of described absorptive table upper cover (13-2) is provided with adsorption hole (13-3), described vacuum suction loop comprises the vacuum pump (30), vacuum filter (29), vacuum tightness variable valve (28) and the vacuum solenoid (25) that are connected successively by vacuum tube (31), described vacuum tube (31) is connected with described vacuum chamber, and described vacuum tightness variable valve (28) is connected with vacuum meter (27), described X-axis moving grating chi (12) is all connected with the signal input part of data collecting plate card (36) with Y-axis moving grating chi (10), and described X-axis mobile motor (16), Y-axis mobile motor (15) and vacuum solenoid (25) are all connected with the output terminal exporting amplification board (38),
The second cylinder slide unit (4) that described testing agency comprises the first cylinder slide unit (2) being horizontally set on upper plate (1) top, the cylinder slide unit installing plate (3) be connected with the slide unit of the first cylinder slide unit (2) and is connected with cylinder slide unit installing plate (3), and pneumatic circuit; The slide unit of described second cylinder slide unit (4) is connected with probe box (6) by web joint (5), described probe box (6) inside is provided with testing circuit plate (8), described testing circuit plate (8) is provided with multichannel foil gauge resistive voltage testing circuit (40) and is connected with the signals collecting end of multichannel foil gauge resistive voltage testing circuit (40) and passes the spring probe array (9) of probe box (6) downwards; Described pneumatic circuit comprises the air pump (20), air strainer (21), reduction valve (22) and the tensimeter (23) that are connected successively by tracheae (24), described first cylinder slide unit (2) is connected with tracheae (24) by the first air-operated solenoid valve (26), and described second cylinder slide unit (4) is connected with tracheae (24) by the second air-operated solenoid valve (32); Described first air-operated solenoid valve (26) and the second air-operated solenoid valve (32) are all connected with the output terminal exporting amplification board (38), the control signal input end of multichannel foil gauge resistive voltage testing circuit (40) is all connected with the signal output part of data collecting plate card (36), and the signal output part of multichannel foil gauge resistive voltage testing circuit (40) is all connected with desk type digital universal meter (37) by signal output interface (39).
2. according to one according to claim 1 large array electric resistive foil gauge automatic detection device, it is characterized in that: described pillar is made up of the aluminium section bar (19) that many connect into framed structure, described aluminium section bar (19) is fixedly connected with by triangle connecting rack (18) with aluminium section bar (19), described aluminium section bar (19) is fixedly connected with by screw bolt and nut with upper plate (1), and described aluminium section bar (19) is fixedly connected with triangle connecting rack (18) by bolt, nut with lower shoe (17).
3. according to one according to claim 1 large array electric resistive foil gauge automatic detection device, it is characterized in that: between described absorptive table lower cover (13-1) and absorptive table upper cover (13-2), be provided with sealing gasket (13-4), described absorptive table lower cover (13-1), sealing gasket (13-4) is fixedly connected with by absorptive table coupling bolt (13-5) with absorptive table upper cover (13-2), the side of described absorptive table lower cover (13-1) is provided with threaded hole (13-6), described vacuum tube (31) is connected with threaded hole (13-6) by pneumatic joint (33).
4. according to one according to claim 1 large array electric resistive foil gauge automatic detection device, it is characterized in that: the upper surface of described absorptive table upper cover (13-2) is provided with many levels to groove and many vertically to groove, many described levels have describedly vertically intersected to form multiple projection (13-7) to groove mutually to groove and many, the quantity of described adsorption hole (13-3) is multiple, and multiple adsorption hole (13-3) is distributed on multiple projection (13-7); The shape of described absorptive table upper cover (13-2) upper surface is rectangle, and four pin of described absorptive table upper cover (13-2) upper surface are all carved with reference location line (13-8).
5. according to one according to claim 1 large array electric resistive foil gauge automatic detection device, it is characterized in that: described first cylinder slide unit (2) is Rodless cylinder slide unit, the quantity of described testing circuit plate (8) is two pieces, two pieces of described testing circuit plates (8) are fixedly connected with screw (34) by copper stud (7) one on the other, and described spring probe array (9) is welded with the testing circuit plate (8) on top and passed probe box (6) downwards after penetrating the testing circuit plate (8) of bottom.
6. according to one according to claim 1 large array electric resistive foil gauge automatic detection device, it is characterized in that: described spring probe array (9) is formed by organizing spring probe group more, often organizing spring probe group by for forming with corresponding four spring probes contacted of four measurement points of a resistance strain gage when measuring; Every road foil gauge resistive voltage testing circuit (40) includes chip S1, chip S2 and the chip S3 that model is ADG84, and described signal output interface (39) is for having the Wiring port P1 of four pins; 1st pin of described chip S1 connects with the output terminal VCC of power supply, and by electric capacity C1 ground connection, 4th pin of described chip S1 is connected with the 8th pin and is the first control signal input end IN1 of foil gauge resistive voltage testing circuit (40), 5th pin of described chip S1 is connected with first measurement point of described resistance strain gage, the 6th pin ground connection of described chip S1, the 7th pin of described chip S1 is connected with second measurement point of described resistance strain gage; 1st pin of described chip S2 connects with the output terminal VCC of power supply, and by electric capacity C2 ground connection, 4th pin of described chip S2 is connected with the 8th pin and is the second control signal input end IN2 of foil gauge resistive voltage testing circuit (40), 5th pin of described chip S2 is connected with the 3rd measurement point of described resistance strain gage, the 6th pin ground connection of described chip S2, the 7th pin of described chip S2 is connected with the 4th measurement point of described resistance strain gage; 1st pin of described chip S3 connects with the output terminal VCC of power supply, and by electric capacity C3 ground connection, 4th pin of described chip S3 is connected with the 8th pin and is the 3rd control signal input end IN3 of foil gauge resistive voltage testing circuit (40), 5th pin of described chip S3 is connected with first measurement point of described resistance strain gage, the 6th pin ground connection of described chip S3, the 7th pin of described chip S3 is connected with second measurement point of described resistance strain gage; first control signal input end IN1 of described foil gauge resistive voltage testing circuit (40), second control signal input end IN2 is all connected with the signal output part of data collecting plate card (36) with the 3rd control signal input end IN3,3rd pin of described chip S1 is the first signal output part D1 of foil gauge resistive voltage testing circuit (40), 9th pin of described chip S1 is the secondary signal output terminal D2 of foil gauge resistive voltage testing circuit (40), 3rd pin of described chip S2 and the 3rd pin of described chip S3 connect and are the 3rd signal output part D3 of foil gauge resistive voltage testing circuit (40), 9th pin of described chip S2 and the 9th pin of described chip S3 connect and are the 4th signal output part D4 of foil gauge resistive voltage testing circuit (40), first signal output part D1 of every road foil gauge resistive voltage testing circuit (40) is all connected with the 1st pin of described Wiring port P1, the secondary signal output terminal D2 of every road foil gauge resistive voltage testing circuit (40) is all connected with the 2nd pin of described Wiring port P1,3rd signal output part D3 of every road foil gauge resistive voltage testing circuit (40) is all connected with the 3rd pin of described Wiring port P1,4th signal output part D4 of every road foil gauge resistive voltage testing circuit (40) is all connected with the 4th pin of described Wiring port P1.
7. according to one according to claim 6 large array electric resistive foil gauge automatic detection device, it is characterized in that: described desk type digital universal meter (37) is Keithley 2000 type desk type digital universal meter (37), 1st pin of described Wiring port P1 is connected with the INPUTHI interface of described Keithley 2000 type desk type digital universal meter (37), 2nd pin of described Wiring port P1 is connected with the INPUTLO interface of described Keithley 2000 type desk type digital universal meter (37), 3rd pin of described Wiring port P1 is connected with the SENSE Ω 4WIREHI interface of described Keithley 2000 type desk type digital universal meter (37), 4th pin of described Wiring port P1 is connected with the SENSE Ω 4WIRELO interface of described Keithley 2000 type desk type digital universal meter (37).
8. according to one according to claim 1 large array electric resistive foil gauge automatic detection device, it is characterized in that: the model of described data collecting plate card (36) is NIPCI6509, the model of described output amplification board (38) is HSF16M.
9. the method utilizing automatic detection device as claimed in claim 1 to carry out large array electric resistive foil gauge automatically to detect, it is characterized in that, the method comprises the following steps:
Large array electric resistive foil gauge diaphragm (14) is manually placed on after in vacuum adsorption table (13) by step one, operator, in computing machine (35) upper input absorption fixed instruction, and start vacuum pump (30), data collecting plate card (36) drives vacuum solenoid (25) to open by exporting amplification board (38) output signal, vacuum pump (30) vacuumizes and makes to produce negative pressure in described vacuum chamber, is absorbed and fixed on the upper surface of absorptive table upper cover (13-2) by large array electric resistive foil gauge diaphragm (14);
Step 2, start to detect instruction in the upper input of computing machine (35), first, data collecting plate card (36) is opened by exporting amplification board (38) output signal driving first air-operated solenoid valve (26), and the first cylinder slide unit (2) drives the second cylinder slide unit (4) and spring probe array (9) tangential movement by cylinder slide unit installing plate (3); Then, data collecting plate card (36) is opened by exporting amplification board (38) output signal driving second air-operated solenoid valve (32), second cylinder slide unit (4) drives spring probe array (9) to move downward by web joint (5), makes spring probe array (9) arrive the first group of resistance-strain blade unit place that will detect;
Step 3, operation computing machine (35), computing machine (35) is by desk type digital universal meter (37) and foil gauge resistive voltage testing circuit (40), the resistance of each resistance strain gage in first group of resistance-strain blade unit and voltage are measured, measurement result is exported to computing machine (35) by desk type digital universal meter (37), measurement result and examination criteria compare by computing machine (35), and record comparative result;
After step 4, comparative result record complete, first, data collecting plate card (36) is by exporting amplification board (38) output signal driving second air-operated solenoid valve (32) commutation, second cylinder slide unit (4) drives spring probe array (9) to move upward by web joint (5), first group of resistance-strain blade unit spring probe array (9) being left will detect; Then, data collecting plate card (36) drives Y-axis mobile motor (15) by exporting amplification board (38) output signal, Y-axis mobile motor (15) drives vacuum adsorption table (13) mobile, displacement is fed back to computing machine (35), until stop after moving the width distance of one group of resistance-strain blade unit by data collecting plate card (36) by Y-axis moving grating chi (10);
Step 5, data collecting plate card (36) are again by exporting amplification board (38) output signal driving second air-operated solenoid valve (32) commutation, second cylinder slide unit (4) drives spring probe array (9) to move downward by web joint (5), next group resistance-strain blade unit place that spring probe array (9) arrival will be detected;
Repeat step 3 to step 5, until all resistance strain gage unit inspections complete.
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