CN105498380A - Vacuum filter - Google Patents
Vacuum filter Download PDFInfo
- Publication number
- CN105498380A CN105498380A CN201610042222.9A CN201610042222A CN105498380A CN 105498380 A CN105498380 A CN 105498380A CN 201610042222 A CN201610042222 A CN 201610042222A CN 105498380 A CN105498380 A CN 105498380A
- Authority
- CN
- China
- Prior art keywords
- cavity
- filter core
- cover
- cooling tube
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
- B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
- B01D46/525—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes
- B01D46/527—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes in wound arrangement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
- B01D46/0041—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
- B01D46/2411—Filter cartridges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/4218—Influencing the heat transfer which act passively, e.g. isolations, heat sinks, cooling ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2271/00—Sealings for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2271/02—Gaskets, sealings
- B01D2271/027—Radial sealings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2275/20—Shape of filtering material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Thermal Sciences (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a vacuum filter, and belongs to the field of filtration, which is used for solving the problems of cooling and dedusting of high-temperature and dust-contained gas in a vacuum working system. The vacuum filter comprises a cavity body, a diffuser and a filter element, wherein the cavity body is provided with a gas inlet connected with a specific gas pipeline and a gas outlet connected with a vacuum pump; the top end of the cavity body is provided with a top cover connected with the cavity body in a sealed mode; the cavity body is internally provided with the diffuser at the gas inlet; the filter element is installed at the center in the cavity body; the side wall of the filter element is provided with filter holes; the bottom surface of the filter element is provided with an opening leading to the gas outlet of the cavity body, thereby preventing the vacuum pump and an upstream-downstream system from being damaged by high-temperature, corrosive and dangerous dust particles, and solving the problem of too complex and frequent maintaining frequency of the vacuum pump of the vacuum filtration system. From the aspect of environment protection, gas in pipelines can be further cooled down and purified, and air pollution can be reduced.
Description
Technical field
The present invention relates to a kind of filter, be specifically related to a kind of vacuum filter.
Background technology
In photovoltaic solar and some other industry, usually specific process gas to be used, these process gas have very high temperature, and often containing dust, particularly dust has corrosivity or harmfulness, not only destroy the pipeline of vavuum pump and gas flow warp, and be discharged in air and also can bring environmental pollution.
Summary of the invention
In order to overcome the above problems, the invention provides and a kind ofly can filter special process gas, ensureing the vacuum filter that this special process gas runs under vacuum conditions.
Vacuum filter of the present invention, comprise cavity, even flow plate and filter core, wherein cavity is provided with the air inlet be connected with specific gas pipeline and the gas outlet be connected with vavuum pump, cavity top end is provided with the top cover be tightly connected with it, the inherent air inlet place of cavity arranges even flow plate, filter core is arranged on the center in cavity, and filter core sidewall is provided with filter bores, and filter core bottom surface is provided with the opening leading to cavity gas outlet.
In order to reach better effect, vacuum filter of the present invention can also take following measures:
1. described in, cavity inner bottom part is provided with the installing plate of fixing filter core, installing plate is circumferentially welded in cavity, filter core is cylindrical shell, installing plate center is provided with the installing plate of hold-down nut, screw thread depression bar is spirally connected axially across nut fixing on filter core and installing plate from filter core end face, be provided with sealing gasket along whole edge between installing plate and filter core bottom surface, filter core underrun installing plate communicates with the gas outlet of cavity bottom.This filter core mounting structure is convenient, fast, efficient, good airproof performance, and filters the open space of rear gas because filter core bottom surface and installing plate are to circulate except sealing position and nut installation position, and therefore gas circulation is fast, filter efficiency is high.
2. filter core outside to be provided with along its circumference from one end to the cooling tube that the other end is wound around, and is provided with hermetically-sealed construction between cooling tube and cavity.
3. the hermetically-sealed construction between cooling tube and cavity is: the fixed cover of welding tubular on chamber outer wall, cooling tube leads in fixed cover, adjacently with cooling tube in fixed cover be also provided with the pipe joint that internal diameter equals cooling tube, external diameter is greater than cooling tube, pipe joint one end is outside fixed cover, the external diameter of cooling tube and pipe joint mates with fixed cover internal diameter, be provided with O RunddichtringO between pipe joint and cooling tube, be spirally connected outside fixed cover locking nut, and O RunddichtringO is fixed and overlaps inner face and pipe joint end face compression.Thus not only can play the effect of sealing cooling medium, enter in cooling tube and cavity with ensureing cooling medium ne-leakage, but also play the effect of gas in seal chamber, prevent from air in cavity from entering outside air to pollute, also prevent outside air from entering purity that cavity affects gas in cavity.
4. in fixed cover described in, be also provided with the spacer identical with pipe joint internal-and external diameter with pipe joint adjacent, between spacer and pipe joint, be equipped with O RunddichtringO.Thus increase sealing effectiveness further.
5. the connected mode of top cover and cavity is: the contact surface of top cover and cavity is circumferentially provided with a circle groove, is provided with O RunddichtringO, is bolted between top cover and cavity in groove.When the bolts are tightened, sealing ring is compacted thus, thus reaches sealing between top cover and cavity.
6. top cover is annular cover, is provided with the access cover be tightly connected with it on top cover top.
7. the connected mode of access cover and top cover is: the contact surface of access cover and top cover is circumferentially provided with a circle groove, O RunddichtringO is provided with in groove, access cover end face is circumferentially provided with multiple groove, be provided with the HOOK BOLTS with access cover end face groove fit outside access cover, connected by HOOK BOLTS between access cover and top cover.Its advantage is: when only needing to carry out overhauling on a large scale except filter core in whole cavity, just the set bolt of top cover all need be screwed down.And when filter core is cleaned or more renew cartridge time, only need loosen HOOK BOLTS by eave tile spins out from the groove at access cover top, and can open access cover and overhaul, tighten HOOK BOLTS after Awaiting Overhaul again, whole process is convenient, fast, efficient
8. filter core sidewall is accordion.Can filter area be increased like this, increase filter efficiency.
9. described in, installing plate end face circumference is provided with guide plate.So be convenient to the location of filter core.
Vacuum filter compact conformation of the present invention, be connected tight, irredundant waste, craft science rationally, outward appearance and internal precision; Bonding in vacuum adopts the form such as soft seal, vacuum corrugated pipe; Filter core picks and places and installs simply, firmly; Water-cooled coil pipe is tight, even, complete equipment easy accessibility.
The present invention can ensure that work system is run under vacuum conditions, also high temperature in work system, the cooling of dusty gas, dust removal problem can be solved, thus avoid high temperature, corrosivity and harmfulness dust granules to the destruction of vavuum pump, upstream and downstream system, solve vacuum filtering system intermediate pump frequency of maintenance too complexity, frequently problem.From environmental angle, can cool further, purify gas in pipeline, reduce air pollution.
The present invention is not only in photovoltaic solar sector application, or can apply in exhaust treatment system in other vacuum high-temperature dust pelletizing systems simultaneously yet.
Accompanying drawing explanation
Fig. 1 is the structural representation of vacuum filter of the present invention.
Fig. 2 is the structure chart that in Fig. 1, filter core is installed.
Fig. 3 is the structure chart that in Fig. 1, cooling tube and cavity seal.
Fig. 4 is the structure chart of top cover in Fig. 1.
Fig. 5 is the structure chart of filter core sidewall in Fig. 1.
In figure, each piece number illustrates:
1-air inlet; 2-even flow plate; 3-quick-actuating closure; 4-top cover; 5-filter core; 6-cooling tube; 7-gas outlet, 8-vavuum pump; 9-control valve; 10-vent valve; 11-cavity; 12-sealing gasket; 13-installing plate; 14-guide plate; 15-nut; 16-screw thread depression bar; 17-O RunddichtringO; 18-locking nut; 19-spacer; 20-pad; 21-fixed cover; 22-HOOK BOLTS; 23-cavity flange; 24-bolt; 25-pipe joint.
Detailed description of the invention
Below in conjunction with Fig. 1 to Fig. 5, vacuum filter of the present invention is described in further detail.
As shown in Figure 1, vacuum filter of the present invention, comprises cavity 11, top board 4, quick-actuating closure 5, even flow plate 2, cooling tube 6, filter core 5, vavuum pump 8.
Cavity 11 is cylindrical shell, bottom surface is cambered outwards arc, side is provided with air inlet 1, bottom surface is provided with gas outlet 7, air inlet 1 is connected with specific gas pipeline by control valve 9, gas outlet 7 is connected with vavuum pump 8 by control valve 9, thus under the effect of vavuum pump 8, specific process gas enters cavity 11 from air inlet 1.
Center in cavity 11 is provided with filter core 5, and filter core 5 is cylindrical shell, and sidewall is provided with filter bores, and in order to increase the area of filtration, improve the efficiency of filtering, the sidewall of filter core 5 is accordion, as shown in Figure 5.
As the bottom mounting plate 13 in Fig. 2 cavity 11, installing plate 13 is circumferentially welded in the lower arcuate surface of cavity 11, installing plate 11 center is fixed with nut 15, and screw thread depression bar 16 is spirally connected axially across filter core 5 and nut 15 from filter core 5 end face, thus is fixed on installing plate 13 by filter core 5.For the ease of picking and placeing of filter core 5, installing plate 13 end face is circumferentially with the guide plate 14 of setting.Filter core 5 bottom surface is ring surface, be tightly connected by sealing gasket 12 between ring surface and installing plate 13, installing plate 12 is opening except the structure of hold-down nut 15, thus make to communicate with gas outlet 7 large area in filter core 5, make the outflow filter more fast of the gas after filtration, filter efficiency is further enhanced.
Cavity 11 inherence is closed on air inlet 1 place and is provided with even flow plate 2, and process gas enters cavity 11 from air inlet 1, through even flow plate 2, around the filter core that gas is evenly distributed in cavity 11 more, and increased efficiency.
Be provided with cooling tube 6 in filter core 5 outside, cooling tube 6 from along filter core 5 circumference from and lower winding, the two ends of cooling tube 6 are led to outside cavity 11 respectively.As shown in Figure 3, at the fixed cover 21 of cooling tube 6 outside weldings tubulose on cavity 11 outer wall, cooling tube 6 leads in fixed cover 21, cooling tube 6 is followed successively by fixed cover 21, the spacer 19 communicated with cooling tube 6 and pipe joint 25, three's internal diameter is identical, spacer 19 is identical with the external diameter of pipe joint 25 and be all greater than the external diameter of cooling tube 6, the internal diameter of fixed cover 21 and the external diameter of this three adapt, cooling tube 6, O RunddichtringO 17 is provided with between spacer 19 and pipe joint 25, because spacer 19 external diameter is greater than cooling tube 6, therefore 0 type circle both sides between spacer 19 and cooling tube 6 are inwall and spacer 19 end face of fixed cover 21, be provided with locking nut 18 outside fixed cover 21, tighten locking nut 18, thus the O RunddichtringO 17 between pipe joint 25, spacer 19 and cooling tube 6 is compressed, play sealing function.O RunddichtringO 17 wherein between fixed cover 21 and spacer 19 plays the effect sealing gas in outside air and cavity, and fixed cover 21 internal diameter is chamfered transition face, can play better sealing effectiveness; O RunddichtringO 17 between spacer 19 and pipe joint 25 plays the effect sealing cooling medium, enters in cooling tube with ensureing cooling medium ne-leakage.Also be provided with pad 20 between locking nut 18 and pipe joint 25, be convenient to adjustable pipe joint 25, spacer 19 and the error in length between cooling tube and fixed cover 21.
As shown in Figure 4, cavity 11 top is provided with cavity flange 23, and top cover 4 is connected with cavity 11 by bolt 24.
Top cover 4 bottom surface is circumferentially provided with a circle groove, is provided with O RunddichtringO 7 in groove, between top cover 4 and cavity flange 23 under the effect of bolt 24, completes sealing by O RunddichtringO 7.When only needing to carry out overhauling on a large scale except filter core 5 in whole cavity 11, just the bolt 24 of top cover 4 all need be screwed down.
For the ease of opening soon top cover 4, conveniently overhaul filter core 5, top cover 4 is annular cover, and top cover 4 top is also provided with quick-actuating closure 3, and quick-actuating closure 3 is connected with top cover 4 by HOOK BOLTS 22.In like manner structure between top cover 4 and cavity flange 23, is provided with O RunddichtringO 7 between quick-actuating closure 3 and top cover 4; And quick-actuating closure 3 end face is circumferentially with the groove matched with the eave tile of HOOK BOLTS 22, thus when eave tile embeds in groove and HOOK BOLTS 22 is tightened, between quick-actuating closure 3 and top cover 4, complete sealing.And when filter core is cleaned or more renew cartridge time, only need loosen HOOK BOLTS 22 eave tile is spun out from the groove at quick-actuating closure 3 top, can open quick-actuating closure 3 to overhaul, tighten HOOK BOLTS 22 again after Awaiting Overhaul, whole process is convenient, fast, efficient.
As shown in Figure 1, quick-actuating closure 3 top is also provided with vent valve 10, when needs are to when overhauling in cavity 11, can open vent valve 10 and abolish process environments in cavity 11, make cavity 11 external and internal pressure identical, thus open top cover 4 or quick-actuating closure 3.
During work, under the draft effect of vavuum pump 8, gas enters cavity 11 by air inlet 1, gas is first through even flow plate 2, pass from the gap between cooling tube 6 after gas uniform dispersion, high-temperature gas cools fast, enters filter core 5 subsequently complete filtration by the sidewall of filter core 5, can remove the gas containing corrosivity or harmfulness (really up to the mark, chance moisture change is glutinous) dust granules in gas;
For the situation that dust in up-stream system is too much, often need frequently to change and cleaning filter core 5, replacement operation of the present invention is simple, quick, first up-stream system and the control valve between vavuum pump 8 and cavity 11 9, and cut-out associates with upstream and downstream system; Then vent valve 10 is opened, vacuum breaker; Without the need to other instruments, hand turns on quick-actuating closure 3 upper hookhead bolt 22, can open quick-actuating closure 3; Hand turns on screw thread depression bar 16, i.e. replaceable cartridge 5.
Vacuum filter of the present invention has the effect of vacuum, water-cooled, Chalk-dust filtering:
1. vacuum.Equipment sealing property, withstand voltage properties all meet high-vacuum apparatus standard, and interface adopts standard to connect soon, easy to connect, efficient, and top cover adopts vacuum flange to compress the sealing of O RunddichtringO, and adopts HOOK BOLTS so that fast assembling-disassembling; Intake-outlet adopts locking nut to screw, and compresses O RunddichtringO, reaches the double effects of vacuum seal and water pipe sealing.
2. water-cooled.Outside filter core, close arrangement cooling water pipe, makes high-temperature gas first lower the temperature before entering filter core; Avoid the destruction to filter core, vavuum pump, upstream and downstream system;
3. dedusting.Air inlet, under the draft effect of vavuum pump, by even flow plate, water cooling tube, sucks and enters filter core, after filtration after net filtration, enter vavuum pump, discharge, thus avoid high temperature, corrosivity and harmfulness dust granules to the destruction of vavuum pump, upstream and downstream system.
As mentioned above, plan content given in conjunction with the accompanying drawings and embodiments, can derive similar technical scheme.In every case be the content not departing from technical solution of the present invention, any simple modification done above embodiment according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (10)
1. a vacuum filter, it is characterized in that: comprise cavity, even flow plate and filter core, wherein cavity is provided with the air inlet be connected with specific gas pipeline and the gas outlet be connected with vavuum pump, cavity top end is provided with the top cover be tightly connected with it, the inherent air inlet place of cavity arranges even flow plate, filter core is arranged on the center in cavity, and filter core sidewall is provided with filter bores, and filter core bottom surface is provided with the opening leading to cavity gas outlet.
2. vacuum filter according to claim 1, it is characterized in that: described cavity inner bottom part is provided with the installing plate of fixing filter core, installing plate is circumferentially welded in cavity, filter core is cylindrical shell, installing plate center is provided with the installing plate of hold-down nut, screw thread depression bar is spirally connected axially across nut fixing on filter core and installing plate from filter core end face, and be provided with sealing gasket along whole edge between installing plate and filter core bottom surface, filter core underrun installing plate communicates with the gas outlet of cavity bottom.
3. vacuum filter according to claim 2, is characterized in that: described filter core outside to be provided with along its circumference from one end to the cooling tube that the other end is wound around, and is provided with hermetically-sealed construction between cooling tube and cavity.
4. vacuum filter according to claim 3, it is characterized in that: the hermetically-sealed construction between cooling tube and cavity is: the fixed cover of welding tubular on chamber outer wall, cooling tube leads in fixed cover, adjacently with cooling tube in fixed cover be also provided with the pipe joint that internal diameter equals cooling tube, external diameter is greater than cooling tube, pipe joint one end is outside fixed cover, the external diameter of cooling tube and pipe joint mates with fixed cover internal diameter, O RunddichtringO is provided with between pipe joint and cooling tube, be spirally connected outside fixed cover locking nut, and O RunddichtringO is fixed and overlaps inner face and pipe joint end face compression.
5. vacuum filter according to claim 4, is characterized in that: in described fixed cover, is also provided with the spacer identical with pipe joint internal-and external diameter with pipe joint adjacent, be equipped with O RunddichtringO between spacer and pipe joint.
6. according to the arbitrary described vacuum filter of claim 2 to 5, it is characterized in that: the connected mode of top cover and cavity is: the contact surface of top cover and cavity is circumferentially provided with a circle groove, is provided with O RunddichtringO, is bolted between top cover and cavity in groove.
7. vacuum filter according to claim 6, is characterized in that: top cover is annular cover, is provided with the access cover be tightly connected with it on top cover top.
8. vacuum filter according to claim 7, it is characterized in that: the connected mode of access cover and top cover is: the contact surface of access cover and top cover is circumferentially provided with a circle groove, O RunddichtringO is provided with in groove, access cover end face is circumferentially provided with a circle groove, be provided with the HOOK BOLTS with access cover end face groove fit outside access cover, compressed by HOOK BOLTS between access cover and top cover.
9. vacuum filter according to claim 1 or 2 or 3 or 4 or 5 or 7 or 8, is characterized in that: filter core sidewall is accordion.
10. vacuum filter according to claim 1 or 2 or 3 or 4 or 5 or 7 or 8 or 9, is characterized in that: described installing plate end face circumference is provided with guide plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610042222.9A CN105498380A (en) | 2016-01-22 | 2016-01-22 | Vacuum filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610042222.9A CN105498380A (en) | 2016-01-22 | 2016-01-22 | Vacuum filter |
Publications (1)
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CN105498380A true CN105498380A (en) | 2016-04-20 |
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ID=55706913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610042222.9A Pending CN105498380A (en) | 2016-01-22 | 2016-01-22 | Vacuum filter |
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CN (1) | CN105498380A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106861315A (en) * | 2017-02-25 | 2017-06-20 | 秦皇岛同力达环保能源股份有限公司 | A kind of high temperature membrane dedusting component and high temperature film dust-remover |
CN107138001A (en) * | 2017-06-30 | 2017-09-08 | 中国科学院工程热物理研究所 | Grain bed dedusting and heat-exchange integrated device and method |
CN107551688A (en) * | 2017-09-28 | 2018-01-09 | 常州剑湖金城车辆设备有限公司 | A kind of filter separator for vacuum excrement collector system |
CN109069972A (en) * | 2016-05-03 | 2018-12-21 | 曼·胡默尔有限公司 | Filter for installation, especially pneumatic filter |
CN109847466A (en) * | 2018-11-27 | 2019-06-07 | 珠海市广源信科技有限公司 | A kind of vacuum filter |
CN110960931A (en) * | 2018-10-01 | 2020-04-07 | 河南一轮电子科技有限公司 | Vacuum piping trap device, vacuum piping trap system, and piping cleaning method |
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JP2001129335A (en) * | 1999-11-05 | 2001-05-15 | Ckd Corp | Vacuum filter |
CN102824798A (en) * | 2012-08-10 | 2012-12-19 | 上虞晶信机电科技有限公司 | Filter for vacuum system of single crystal furnace |
CN204768182U (en) * | 2015-07-31 | 2015-11-18 | 郭应辉 | Dry filter equipment |
CN205360855U (en) * | 2016-01-22 | 2016-07-06 | 青岛赛瑞达电子科技有限公司 | Vacuum filter |
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2016
- 2016-01-22 CN CN201610042222.9A patent/CN105498380A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001129335A (en) * | 1999-11-05 | 2001-05-15 | Ckd Corp | Vacuum filter |
CN102824798A (en) * | 2012-08-10 | 2012-12-19 | 上虞晶信机电科技有限公司 | Filter for vacuum system of single crystal furnace |
CN204768182U (en) * | 2015-07-31 | 2015-11-18 | 郭应辉 | Dry filter equipment |
CN205360855U (en) * | 2016-01-22 | 2016-07-06 | 青岛赛瑞达电子科技有限公司 | Vacuum filter |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109069972A (en) * | 2016-05-03 | 2018-12-21 | 曼·胡默尔有限公司 | Filter for installation, especially pneumatic filter |
CN106861315A (en) * | 2017-02-25 | 2017-06-20 | 秦皇岛同力达环保能源股份有限公司 | A kind of high temperature membrane dedusting component and high temperature film dust-remover |
CN106861315B (en) * | 2017-02-25 | 2022-11-18 | 秦皇岛同力达环保能源股份有限公司 | High temperature membrane dust removal subassembly and high temperature membrane dust remover |
CN107138001A (en) * | 2017-06-30 | 2017-09-08 | 中国科学院工程热物理研究所 | Grain bed dedusting and heat-exchange integrated device and method |
CN107551688A (en) * | 2017-09-28 | 2018-01-09 | 常州剑湖金城车辆设备有限公司 | A kind of filter separator for vacuum excrement collector system |
CN110960931A (en) * | 2018-10-01 | 2020-04-07 | 河南一轮电子科技有限公司 | Vacuum piping trap device, vacuum piping trap system, and piping cleaning method |
CN109847466A (en) * | 2018-11-27 | 2019-06-07 | 珠海市广源信科技有限公司 | A kind of vacuum filter |
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