CN105485953B - Ultra-low temperature refrigerating device - Google Patents

Ultra-low temperature refrigerating device Download PDF

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Publication number
CN105485953B
CN105485953B CN201510648594.1A CN201510648594A CN105485953B CN 105485953 B CN105485953 B CN 105485953B CN 201510648594 A CN201510648594 A CN 201510648594A CN 105485953 B CN105485953 B CN 105485953B
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cylinder body
gap
displacer
casing
refrigerant gas
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CN105485953A (en
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平塚善胜
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle

Abstract

The present invention provides a kind of ultra-low temperature refrigerating device, and project is to improve the heat exchange efficiency of ultra-low temperature refrigerating device.GM refrigeration machine (10) of the invention has the casing (36) being disposed in around expansion space (18) on the inside of the low-temperature end of cylinder body (20).The 1st gap (26) is equipped between the inner peripheral surface of cylinder body (20) and the outer peripheral surface of displacer (24).Displacer (24) has the displacer lower openings (32) that refrigerant gas is imported from built-in regenerator (12) to the 1st gap (26).The 2nd gap (38) that casing (36) will import refrigerant gas from the 1st gap (26) to expansion space (18) determines between the low-temperature end and casing (36) of cylinder body (20) and/or between the outer surface and inner surface of casing (36).

Description

Ultra-low temperature refrigerating device
This application claims the priority based on Japanese patent application filed on October 7th, 2014 the 2014-206156th. The entire content of this Japanese application is incorporated by reference in this manual.
Technical field
The present invention relates to a kind of ultra-low temperature refrigerating devices.
Background technique
Ultra-low temperature refrigerating device be used for by changes in temperature but object be cooled to such as 100K (Kelvin) left and right to 4K or so range. For example have as ultra-low temperature refrigerating device Ji Fude-McMahon formula (GM) refrigeration machine, pulse tube refrigerating machine, sterlin refrigerator, All refrigeration machines of Sol etc..The purposes of ultra-low temperature refrigerating device is, for example, the cooling or cryogenic pump of superconducting magnet or detector etc..
Patent document 1: No. 2659684 bulletins of Japanese Patent No.
Summary of the invention
The illustrative first purpose of one embodiment of the present invention is to improve the heat exchange efficiency of ultra-low temperature refrigerating device.
A kind of embodiment according to the present invention, ultra-low temperature refrigerating device have: cylinder body axially extends;Displacer, with edge The mode that the axial direction can move back and forth is disposed in the cylinder body, and the displacer in the axial direction and the cylinder The expansion space of refrigerant gas is formed between the one end of body;And regenerator, it is built in the displacer.In the cylinder body Inner peripheral surface and the displacer outer peripheral surface between be equipped with gap, the displacer has from the regenerator to the gap Import the channel of the refrigerant gas.The ultra-low temperature refrigerating device is also equipped with casing, in the one end of the cylinder body Side is disposed in around the expansion space.Described sleeve pipe will import the refrigerant gas from the gap to the expansion space The channel of body determine between the one end and described sleeve pipe of the cylinder body and/or the outer surface of described sleeve pipe and inner surface it Between.
It can be improved the heat exchange efficiency of ultra-low temperature refrigerating device according to the present invention.
Detailed description of the invention
Fig. 1 is the schematic diagram for indicating ultra-low temperature refrigerating device involved in one embodiment of the present invention.
Fig. 2 is the diagrammatic top view of casing involved in one embodiment of the present invention.
Fig. 3 is the diagrammatic top view of casing involved in another embodiment of the invention.
Fig. 4 is the diagrammatic top view of casing involved in another embodiment of the invention.
In figure: 10-GM refrigeration machine, 12- regenerator, the expansion space 18-, 20- cylinder body, 22- cooling bench, 24- displacer, The 1st gap 26-, 32- displacer lower openings, 36- casing, the 2nd gap 38-, 40- casing canister portion, 42- cover tube bottom plate, the side 44- Portion gap, the bottom 46- gap, 48- through hole, Q- are axial.
Specific embodiment
Hereinafter, with reference to attached drawing, detailed description of embodiments of the present invention.In addition, to identical important document in explanation Identical symbol is marked, and suitably omits repeated explanation.Also, following structures are example, are not done to the scope of the present invention any It limits.
Fig. 1 is the schematic diagram for indicating ultra-low temperature refrigerating device involved in one embodiment of the present invention.Super low temperature refrigeration Machine is, for example, GM refrigeration machine 10.The GM refrigeration machine 10 of diagram is single stage.GM refrigeration machine 10 for example uses helium as system Refrigerant gas.
The ultra-low temperature refrigerating device of the cold accumulator types such as GM refrigeration machine 10 has: regenerator 12, expanding machine 14, compressor 16.Such as Shown in Fig. 1, regenerator 12 is set to expanding machine 14, and is configured to the high-pressure refrigerant from the supply of compressor 16 to expanding machine 14 Gas is pre-chilled.Expanding machine 14 has the expansion space 18 of refrigerant gas.The refrigerant gas being pre-chilled by regenerator 12 It is inflated in expansion space 18, to be further cooled by.Regenerator 12 is configured to by by expanding cooled refrigerant Gas cooling.Compressor 16 is configured to recycle refrigerant gas from regenerator 12 and after compressing it again to regenerator 12 and swollen Swollen space 18 supplies refrigerant gas.
Expanding machine 14 has cold head, which includes cylinder body 20, cooling bench 22 and displacer 24.Cylinder body 20 is refrigerant gas The closed container of body, and the hollow component to extend along axial Q.Cylinder body 20 is for example with cylindrical shape.
Cooling bench 22 surrounds expansion space 18 and is thermally connected with cylinder body 20.Cooling bench 22 for example formed as bottomed cylindrical, And it is installed on the outside of cylinder body 20.Cooling bench 22 exchanges heat as between the cooling object such as external heat source and refrigerant gas Heat exchanger function.Cooling bench 22 is also sometimes referred to as thermic load flange.
Displacer 24 and the coaxial arranging of cylinder body 20.Regenerator 12 is built in displacer 24.Displacer 24 is for example diametrically slightly Less than the cylindrical shape of cylinder body 20.Gap is equipped between the inner peripheral surface of cylinder body 20 and the outer peripheral surface of displacer 24.Hereinafter, by the sky Gap is known as the 1st gap 26.The outer peripheral surface of displacer 24 refers to the side of displacer 24, and the inner peripheral surface of cylinder body 20 refers to and displacer The surface of the opposed cylinder body 20 in 24 side.
Displacer 24 is the piston that the inner space of cylinder body 20 is separated into expansion space 18 Yu room temperature space 28.Relative to Displacer 24 is formed with expansion space 18 in the side of cylinder body 20, is formed and is had family in the other side of cylinder body 20 relative to displacer 24 Warm space 28.Therefore, the one end of the cylinder body 20 (or displacer 24) on axial Q can be known as low-temperature end, it will be on axial Q The other end of cylinder body 20 (or displacer 24) is known as temperature end.Therefore, expansion space 18 is formed in the low-temperature end of displacer 24 Between the low-temperature end of cylinder body 20, room temperature space 28 is formed between the temperature end of displacer 24 and the temperature end of cylinder body 20.
In the following description, for the sake of convenient, in order to describe the relative positional relationship between important document, room temperature side is marked sometimes It is denoted as "upper", low temperature side is labeled as "lower".For example, can be expressed as, room temperature space 28 is located at the top of displacer 24, expansion Space 18 is located at the lower section of displacer 24.
Displacer 24 is disposed in cylinder body 20 in a manner of it can move back and forth along axial Q.In the temperature end of displacer 24 It is linked with the driving portion 25 for moving back and forth displacer 24.By the reciprocating movement of displacer 24, expansion space 18 and room The volume in warm space 28 changes in a complementary fashion respectively.
It is equipped in the temperature end of displacer 24 for making refrigerant gas circulate between room temperature space 28 and regenerator 12 Displacer upper opening 30.Displacer upper opening 30 axially Q and formed.It is equipped with and is used in the low-temperature end of displacer 24 The displacer lower openings 32 for making refrigerant gas circulate between regenerator 12 and expansion space 18.Displacer lower openings 32 For the channel for importing refrigerant gas from the low-temperature end of regenerator 12 to the 1st gap 26.Displacer lower openings 32 along with axis It is formed to the orthogonal radial direction of Q.
Sealing element 34 can be set on the top in the 1st gap 26.The gas by the 1st gap 26 is blocked by sealing element 34 Body flowing.Therefore, the refrigerant gas flow between room temperature space 28 and expansion space 18 is via regenerator 12.When sealing element 34 When for such as the contact seals of sealing ring, sealing element 34 can be installed on the temperature end of displacer 24.Sealing element 34 can also be with It is non-contact seals.In addition, in one embodiment, also can permit the stream of the refrigerant gas by the 1st gap 26 Dynamic or leakage.
Also, expanding machine 14 has the casing being disposed in around expansion space 18 on the inside of the low-temperature end of cylinder body 20 36.Casing 36 and 20 arranged coaxial of cylinder body.Casing 36 is installed on the low-temperature end of cylinder body 20.It therefore, can in the outer surface of casing 36 At least one abutting part (not shown) abutted with the inner surface of cylinder body 20 is arranged.Casing 36 can be by identical with cylinder body 20 Material (such as stainless steel) formation.
Casing 36 determines the channel that refrigerant gas is imported from the 1st gap 26 to expansion space 18.The gas passage is shape At the gap between the low-temperature end of cylinder body 20 and casing 36.Hereinafter, the gap is known as the 2nd gap 38.2nd gap 38 to the 1 gap 26 is narrow.That is, the width in the 2nd gap 38 radially is smaller than the width in the 1st gap 26 radially.Casing 36 constitutes cold But the flow velocity of the refrigerant gas of platform 22 increases mechanism.
Fig. 2 is the diagrammatic top view of casing 36 involved in one embodiment of the present invention.As shown in Figures 1 and 2, it covers Pipe 36 has the casing canister portion 40 opposed with the inner peripheral surface of cylinder body 20 and the set tube bottom plate 42 opposed with the bottom of cylinder body 20.Casing In the low-temperature end of cylinder body 20, along inner circumferential surface, Q extends canister portion 40 in the axial direction.Tube bottom plate 42 is covered from casing canister portion 40 towards radial direction Inside extends.In this way, casing 36 is formed as tubular with the end.Casing canister portion 40 is, for example, the short cylinder extended along axial Q, and straight Diameter is slightly less than the internal diameter of cylinder body 20.Covering tube bottom plate 42 is the plectane for being installed on the lower end of casing canister portion 40.
As shown in Figure 1, the 2nd gap 38 includes: the side sky being formed between casing canister portion 40 and the inner peripheral surface of cylinder body 20 Gap 44 and be formed in set tube bottom plate 42 and the bottom of cylinder body 20 between and with the continuous bottom gap 46 in side gap 44.It is covering The center of tube bottom plate 42 has through hole 48, and through hole 48 is connected to bottom gap 46 with expansion space 18.It so, it is possible to make Refrigerant gas flow path extends to through hole 48.
The axial position of sleeve upper end 50 is roughly the same with the axial position of cooling bench upper end 23.Therefore, from the 1st gap 26 It is located at the height roughly the same with cooling bench upper end 23 to the gas access in the 2nd gap 38.Gas access also can be set with This different height.Also, the gas vent (i.e. through hole 48) from the 2nd gap 38 to expansion space 18 is located at and cooling bench 22 The identical radial position of bottom centre 49.Gas vent also can be set in position unlike this.
In this way, forming refrigerant gas flow path between cooling bench 22 and casing 36 by casing 36.The flow path is along cylinder The inner surface of body 20 and the bottom centre 49 that cooling bench 22 is reached from cooling bench upper end 23.The offer of casing 36 makes refrigerant gas exist The flow path that the substantially the entire area of the inner surface of cooling bench 22 is flowed in the mode parallel with the inner surface of cooling bench 22.In Fig. 1 In, the refrigerant gas flow in side gap 44 is indicated by the arrow A, the refrigerant gas in bottom gap 46 is indicated by the arrow B Body flowing.Also, it is indicated by the arrow C and is flowed by the gas of through hole 48.
In movable range (hereinafter also referred to as stroke) in the axial direction of displacer 24, displacer lower openings 32 are always It is more leaned on above axial direction Q positioned at than sleeve upper end 50.Displacer lower openings 32 are always positioned at the top in the 2nd gap 38, do not enter In casing 36.Therefore, displacer lower openings 32 will not be covered due to casing 36 by cylinder body 20 (or cooling bench 22).In addition, In a kind of embodiment, at least in a part of stroke while being located at lower dead center (such as displacer 24), displacer lower openings 32 It can also be located at than sleeve upper end 50 more below axial direction Q.
Sleeve upper end 50 determines the opening for receiving the low-temperature end of displacer 24.In the stroke of displacer 24, displacement The low-temperature end of device 24 is inserted in always in casing 36.In other words, the movable range of displacer bottom surface 33 is among casing 36.Casing Upper end 50 is inserted in the lower part in the 1st gap 26, and casing canister portion 40 surrounds the low-temperature end of displacer 24.In addition, in a kind of embodiment party In formula, at least in a part of stroke while being located at top dead centre (such as displacer 24) or whole strokes, displacer bottom surface 33 can also Except casing 36.
The radial direction being formed in when displacer 24 is inserted in casing 36 between casing canister portion 40 and the low-temperature end of displacer 24 Void ratio side gap 44 is narrow.That is, the width of the radial gap is smaller than the radial width in side gap 44.It can increase as a result, logical Cross the flow in side gap 44.
Casing 36 can also provide sealing element between the low-temperature end and casing 36 of displacer 24.Sealing element can be contact Sealing element or non-contact seals part.The direct gas from the 1st gap 26 to expansion space 18 is blocked to flow by sealing element. Therefore, the refrigerant gas flow between the 1st gap 26 and expansion space 18 is via the 2nd gap 38.At this point, casing canister portion 40 Inner surface can be with the periphery face contact of the low-temperature end of displacer 24.Alternatively, be also possible to the inner surface of casing canister portion 40 with It is non-contact with a little gap between the outer peripheral surface of the low-temperature end of displacer 24.Pass through the reciprocating movement of displacer 24, displacement The low-temperature end of device 24 is slided with casing 36, or is moved in a non contact fashion.
Also, GM refrigeration machine 10 has the piping system 52 for connect compressor 16 and expanding machine 14.In piping system 52 are equipped with high pressure valve 54 and low pressure valve 56.Piping system 52 is connected to the temperature end of cylinder body 20.GM refrigeration machine 10 is configured to high pressure Refrigerant gas is supplied via high pressure valve 54 and piping system 52 to expanding machine 14 from compressor 16.Also, 10 structure of GM refrigeration machine It is vented from expanding machine 14 via piping system 52 and low pressure valve 56 to compressor 16 as low pressure refrigerant gas.
GM refrigeration machine 10, which has, is synchronously selectively opened and closed high pressure valve 54 and low pressure with the reciprocating movement of displacer 24 Valve 56 gives the confession of the refrigerant gas of expansion space 18 to switching the valve driving portion (not shown) of discharge.Valve driving portion It can be above-mentioned driving portion 25.High pressure valve 54, low pressure valve 56 and valve driving portion can also be assembled in expanding machine 14.
Then, the movement of GM refrigeration machine 10 is illustrated.Displacer 24 be located at cylinder body 20 lower dead center or its near When, high pressure valve 54 is turned on.Higher pressure refrigerant gas is supplied by high pressure valve 54 and piping system 52 to cylinder body from compressor 16 20.Refrigerant gas is flowed into regenerator 12 by displacer upper opening 30 from room temperature space 28.Refrigerant gas leads on one side Regenerator 12 is crossed to be cooled on one side.Refrigerant gas is flowed by displacer lower openings 32, the 1st gap 26 and the 2nd gap 38 Expansion space 18.During refrigerant gas flows into expansion space 18, displacer 24 is mobile to the top dead centre of cylinder body 20.By This, the volume of expansion space 18 increases.In this way, expansion space 18 is full of by higher pressure refrigerant gas.
Displacer 24 be located at cylinder body 20 top dead centre or its near when, high pressure valve 54 is closed.At the same time or than it At the time of a little later, low pressure valve 56 is turned on.The refrigerant gas of expansion space 18 is expanded and is cooled.Refrigerant gas from Cooling bench 22 absorbs heat.
Low pressure refrigerant gas is recovered by opposite path.Refrigerant gas passes through the 2nd gap from expansion space 18 38, the 1st gap 26 and displacer lower openings 32 flow into regenerator 12.Refrigerant gas cools down while passing through regenerator 12 Regenerator 12.Refrigerant gas is discharged by displacer upper opening 30 and room temperature space 28 from cylinder body 20.Refrigerant gas is logical It crosses low pressure valve 56 and piping system 52 is recycled to compressor 16.During refrigerant gas is flowed out from expansion space 18, displacement Device 24 is mobile to the lower dead center of cylinder body 20.The volume reducing of expansion space 18 as a result, low pressure refrigerant gas is from expansion space 18 Discharge.
The above are 1 cooling cycles of GM refrigeration machine 10.GM refrigeration machine 10 is by the cooling cycle repeatedly by cooling bench 22 are cooled to desired temperature.In this way, GM refrigeration machine 10 can from the hot linked cooling object (not shown) of cooling bench 22 It absorbs heat and is cooled down.Cooling bench 22 can for example be cooled to the target temperature of the range selected from about 10K to about 30K.Alternatively, cold But platform 22 can also for example be cooled to the target temperature of the range selected from about 50K to about 100K.
Described above, according to the present embodiment, by being arranged in the mode adjacent with cooling bench 22 in the inside of cylinder body 20 Casing 36 determines the refrigerant gas channel (i.e. the 2nd gap 38) from the 1st gap 26 to expansion space 18.With previous from setting The case where low-temperature end of parallel operation 24 directly sprays gas to expansion space 18 is compared, and by so determining gas passage, can press down Make the decline along the flow velocity components on the direction on the surface of cooling bench 22.It is compared with the past, it can be improved flow velocity, therefore can Improve the heat exchange efficiency of cooling bench 22.
2nd gap, 38 to the 1 gap 26 is narrow.Specifically, passing through the gas passage that region determines on the outside of casing 36 It is narrower than the gap between cylinder body 20 and displacer 24 radially.Therefore, flow velocity can improve when being flowed into gas passage from gap, So as to improve heat exchange efficiency.By estimation it is found that the flow velocity when the refrigerant gas for being flowed into expansion space 18 becomes 2 times When, the refrigerating capacity of refrigeration machine improves about 5% to about 10%.Therefore, the big large-scale refrigeration machine of refrigerating capacity, passes through application Casing 36 involved in present embodiment and obtain refrigerating capacity incrementss it is bigger.The typical system of this large size refrigeration machine Cold is single stage.Therefore, present embodiment is suitble to powerful single stage (for example, having 100W or more under 10K And the single-stage under the single stage or 70K of 300W refrigerating capacity below with 500W or more and 1kW refrigerating capacity below Refrigeration machine).
Also, it according to the present embodiment, can be improved by the fairly simple operation that casing 36 is installed on cylinder body 20 The heat exchange efficiency of refrigeration machine.The heat exchange effect of refrigeration machine can be easily improved by increasing casing 36 on previous refrigeration machine Rate.
More than, according to embodiment, the present invention is described.The present invention is not limited to above embodiment, Neng Goujia With various design alterations and can have various modifications example, and this variation also belongs to the scope of the present invention, this point by Those skilled in the art are approved.
Casing 36 is not necessarily required to have set tube bottom plate 42.In one embodiment, casing 36 only has ferrule sleeve Portion 40.It may be said that the diameter of the through hole 48 of lower end is identical as the diameter of casing canister portion 40.
Fig. 3 is the diagrammatic top view of casing 136 involved in another embodiment of the present invention.As shown in figure 3, can also be with Bumps are formed in the outer surface of casing 136 (such as casing canister portion).At this point it is possible to make protrusion 142 and cylinder body 20 (or cooling bench 22) inner surface contact, to form refrigerant gas channel 146 between recess portion 144 and the inner surface of cylinder body 20.Refrigerant Gas passage 146 is set along the axial direction of cylinder body 20.With the inner surface of dotted line diagram cylinder body 20.
Equally, bumps can also be formed in the bottom surface of set tube bottom plate.At this point, can also make to be formed in set tube bottom plate and cylinder body Between gas passage radially set.
As alternative scheme, bumps can also be formed in the inner surface of cylinder body.At this point it is possible to make the outer of protrusion and casing Surface contact, to form the channel of refrigerant gas between recess portion and the outer surface of casing.
Fig. 4 is the diagrammatic top view of casing 236 involved in another embodiment of the present invention.Casing 236 (such as casing Canister portion) gas passage can also be determined between the outer surface of casing 236 238 and inner surface 240.The gas passage is also possible to It is formed in the through hole 242 of casing 236.Through hole 242 is set along the axial direction of cylinder body.This through hole also can be set in set Tube bottom plate, through hole can be set along radial direction at this time.
In one embodiment, gas passage (such as Fig. 1 or the gas shown in Fig. 3 being formed between cylinder body and casing Body channel) it can also (such as gas shown in Fig. 4 be logical with the gas passage that is formed between the outer surface of casing and inner surface Road) it is applied in combination.For example, it is also possible to form gas passage between casing canister portion and cylinder body, and make and this continuous gas Channel is formed in set tube bottom plate as through hole.Alternatively, through hole can also be formed in casing canister portion, and make continuous with this Gas passage is formed between set tube bottom plate and cylinder body.
In one embodiment, for containment sheath, the outer diameter of the low-temperature end of displacer can be set as slightly smaller than high Wen Duan.Alternatively, the internal diameter of the low-temperature end of cylinder body or cooling bench can also be set as to the temperature end slightly larger than cylinder body.
It in one embodiment, can also be in the low of at least one grade in two-stage type (or other multi-stags) refrigeration machine Sleeve is arranged in warm end.
In the above-described embodiment, it is illustrated by taking GM refrigeration machine 10 as an example, but it is not limited to this.In a kind of embodiment party In formula, casing also be can be set in the other kinds of system for having the displacer for being built-in with regenerator, the cylinder body for accommodating displacer Cold.
The GM refrigeration machine 10 or other refrigeration machines for having casing involved in embodiment are also used as superconducting magnet, low Warm pump, X-ray detector, infrared sensor, quantum photonic detector, semiconductor detector, dilution refrigeration machine, He3 refrigeration Cooling body or liquid body in machine, insulation demagnetization refrigeration machine, helium liquefaction machine, cryostat etc..

Claims (3)

1. a kind of ultra-low temperature refrigerating device, which is characterized in that have:
Cylinder body axially extends;
Displacer is disposed in the cylinder body in a manner of it can move back and forth along the axial direction, and the institute in the axial direction State the expansion space that refrigerant gas is formed between displacer and the one end of the cylinder body;And
Regenerator is built in the displacer,
Gap is equipped between the inner peripheral surface of the cylinder body and the outer peripheral surface of the displacer, the displacer has from the storage Cooler imports the channel of the refrigerant gas to the gap,
The ultra-low temperature refrigerating device is also equipped with casing, and the expansion space is disposed on the inside of the one end of the cylinder body Around,
Described sleeve pipe will be determined from the gap to the channel that the expansion space imports the refrigerant gas in the cylinder body One end and described sleeve pipe between and/or the outer surface and inner surface of described sleeve pipe between, wherein pass through described sleeve pipe determine The channel it is narrower than the gap;
Wherein, described sleeve pipe has: canister portion, opposed with the inner peripheral surface of the cylinder body;And bottom plate, the bottom pair with the cylinder body It sets,
Include: side gap by the channel that described sleeve pipe determines, be formed in described sleeve pipe canister portion and the cylinder body Between inner peripheral surface;And bottom gap, it is formed between the bottom plate of described sleeve pipe and the bottom of the cylinder body and empty with the side Gap is continuous.
2. ultra-low temperature refrigerating device according to claim 1, which is characterized in that
The bottom plate of described sleeve pipe has through hole at center, and the through hole connects the bottom gap and the expansion space It is logical.
3. ultra-low temperature refrigerating device according to claim 1 or 2, which is characterized in that
The ultra-low temperature refrigerating device is single stage.
CN201510648594.1A 2014-10-07 2015-10-08 Ultra-low temperature refrigerating device Active CN105485953B (en)

Applications Claiming Priority (2)

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JP2014-206156 2014-10-07
JP2014206156A JP2016075429A (en) 2014-10-07 2014-10-07 Cryogenic refrigeration machine

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