CN105449511B - Inject frequency multiplied solid laser in latch well - Google Patents
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- CN105449511B CN105449511B CN201610005589.3A CN201610005589A CN105449511B CN 105449511 B CN105449511 B CN 105449511B CN 201610005589 A CN201610005589 A CN 201610005589A CN 105449511 B CN105449511 B CN 105449511B
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- 239000007787 solid Substances 0.000 title claims abstract 3
- 230000006641 stabilisation Effects 0.000 claims abstract description 13
- 238000011105 stabilization Methods 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims description 43
- 238000010168 coupling process Methods 0.000 claims description 43
- 238000005859 coupling reaction Methods 0.000 claims description 43
- 239000013078 crystal Substances 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 3
- 238000009738 saturating Methods 0.000 claims 3
- 230000005540 biological transmission Effects 0.000 claims 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
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Abstract
一种注入锁定腔内倍频固体激光器，包括泵浦源、凸透镜、环形腔、种子激光器、相位调制光外差稳频系统和分光棱镜，本发明具有结构简单、成本低廉的特点，可产生高功率、窄线宽、频率可调的倍频激光输出。
An injection-locked intracavity frequency-doubled solid laser includes a pump source, a convex lens, a ring cavity, a seed laser, a phase-modulated light heterodyne frequency stabilization system and a beam splitting prism. The invention has the characteristics of simple structure and low cost, and can produce high Frequency doubling laser output with adjustable power, narrow linewidth and frequency.
Description
技术领域technical field
本发明涉及激光器，特别是一种注入锁定腔内倍频固体激光器。The invention relates to a laser, in particular to an injection-locked intracavity frequency doubling solid-state laser.
背景技术Background technique
一般固体激光器要产生单模光束必须在腔内插入双折射片、标准具等光学元件进行模式选择。插入光学元件增加了噪声、增加了损耗、提高了阈值、降低了斜效率。但是注入锁定技术可以克服这些缺点，注入锁定技术是将微弱的种子激光注入到大功率的激光器中，产生窄线宽、单模、高功率的激光输出。由于不需要加入额外的选频元件，因此提高了激光系统的输出性能。注入锁定激光器已在激光雷达、干涉仪、激光测量等应用领域有着重要的应用。目前，注入锁定激光器大多是脉冲激光器，能产生连续、窄线宽的激光器较少；注入锁定用低功率的种子激光器(波长为λ1)，注入锁定激光晶体，在泵浦光的作用下(波长为λ2)，产生波长为λ1的窄线宽、单模、高功率的激光输出。倍频一般有两种方式，腔内倍频和腔外倍频，两种方式各有优缺点，腔外倍频技术稳定性较好，但是倍频效率较低，腔内倍频与之相反。In order to generate single-mode beams in general solid-state lasers, optical elements such as birefringent plates and etalons must be inserted into the cavity for mode selection. Inserting optics adds noise, increases losses, increases threshold, and reduces slope efficiency. However, injection locking technology can overcome these shortcomings. Injection locking technology injects a weak seed laser into a high-power laser to produce a narrow linewidth, single-mode, high-power laser output. Since no additional frequency selection components need to be added, the output performance of the laser system is improved. Injection-locked lasers have been used in applications such as lidar, interferometer, and laser measurement. At present, most injection-locked lasers are pulsed lasers, and there are few lasers that can produce continuous and narrow linewidths; injection-locked low-power seed lasers (wavelength λ1), injection-locked laser crystals, under the action of pump light (wavelength λ2) to generate a narrow linewidth, single-mode, high-power laser output with a wavelength of λ1. There are generally two ways of frequency doubling, intracavity frequency doubling and extracavity frequency doubling. Both methods have their own advantages and disadvantages. The stability of the extracavity frequency doubling technology is better, but the frequency doubling efficiency is low, and the intracavity frequency doubling is the opposite. .
发明内容Contents of the invention
本发明的主要目的在于提供一种注入锁定腔内倍频固体激光器,本发明具有结构简单、成本低廉的特点，可产生高功率、窄线宽、频率可调的倍频激光输出。The main purpose of the present invention is to provide an injection-locked intracavity frequency-doubled solid-state laser. The present invention has the characteristics of simple structure and low cost, and can produce frequency-doubled laser output with high power, narrow line width and adjustable frequency.
本发明的技术解决方案如下：Technical solution of the present invention is as follows:
一种注入锁定腔内倍频固体激光器，包括泵浦源、凸透镜、环形腔、种子激光器、相位调制光外差稳频系统和分光棱镜，所述的环形腔包括泵浦光输入耦合镜、激光晶体、第一凹面镜、光隔离器、平面反射镜、种子光输入耦合镜、输出耦合镜、倍频晶体和第二凹面镜；An injection-locked intracavity frequency-doubling solid-state laser, comprising a pumping source, a convex lens, a ring cavity, a seed laser, a phase-modulated light heterodyne frequency stabilization system, and a beam splitting prism, wherein the ring cavity includes a pump light input coupling mirror, a laser crystal, a first concave mirror, an optical isolator, a plane reflector, a seed light input coupling mirror, an output coupling mirror, a frequency doubling crystal and a second concave mirror;
沿所述的种子激光器输出的种子光方向依次是种子光输入耦合镜、泵浦光输入耦合镜、激光晶体、第一凹面镜、光隔离器、平面反射镜、第二凹面镜、倍频晶体、输出耦合镜和种子光输入耦合镜构成环形腔，Along the direction of the seed light output by the seed laser is the seed light input coupling mirror, the pump light input coupling mirror, the laser crystal, the first concave mirror, the optical isolator, the plane reflector, the second concave mirror, and the frequency doubling crystal. , the output coupling mirror and the seed light input coupling mirror form a ring cavity,
沿所述的泵浦源输出的泵浦光方向依次是所述的凸透镜、输入耦合镜；The direction of the pump light output along the pump source is the convex lens and the input coupling mirror in turn;
在所述的种子光输入耦合镜的反射光方向是所述的分光棱镜，在所述的分光棱镜的反射光束方向通过光纤与所述的相位调制光外差稳频系统的输入端相连，该相位调制光外差稳频系统的输出端的压电陶瓷贴设在所述的平面反射镜的背面；The reflected light direction of the seed light input coupling mirror is the beam splitting prism, and the reflected beam direction of the beam splitting prism is connected to the input end of the phase modulation light heterodyne frequency stabilization system through an optical fiber. The piezoelectric ceramic at the output end of the phase modulation optical heterodyne frequency stabilization system is attached to the back of the plane mirror;
所述泵浦光输入耦合镜镀有对泵浦光高透，种子光高反的膜；所述的第一凹面镜为镀有对种子光高反的膜，对泵浦光高透的膜；所述的平面反射镜镀有对种子光高反、对泵浦光高透的膜；所述的种子光输入耦合镜为平面镜，镀有对种子光部分透射的膜；所述的第二凹面镜镜镀有对种子光高反的膜；所述的输出耦合镜为凹面镜，镀有对种子光的高反对倍频光高透的膜。The pump light input coupling mirror is coated with a film that is highly transparent to the pump light and highly reflective to the seed light; the first concave mirror is coated with a film that is highly reflective to the seed light and highly transparent to the pump light. ; The plane reflector is coated with a film that is highly reflective to the seed light and highly transparent to the pump light; the described seed light input coupling mirror is a plane mirror, coated with a film that partially transmits the seed light; the second The concave mirror is coated with a film that is highly reflective to the seed light; the output coupling mirror is a concave mirror coated with a film that is highly resistant to the seed light and highly transparent to the frequency-doubled light.
所述的种子激光器为低功率窄线宽可调谐激光器。The seed laser is a low-power narrow-linewidth tunable laser.
本发明的技术效果：Technical effect of the present invention:
本发明首次将注入锁定和腔内倍频在一个腔内进行。注入锁定产生的激光直接进行腔内倍频。传统注入锁定和腔内倍频在两个腔内进行，激光注入锁定后输出腔外，再耦合进倍频腔，至少需要9块腔镜，而本发明是在一个腔内完成只需要6块腔镜，减少了成本，减少了腔镜的造成的损耗，效率至少提高了10％，降低了难度。由于加入了相位调制光外差稳频系统，保持种子光和环形腔共振，增加种子光的腔内功率。该系统激光调谐性能取决于种子光性能，可以克服固体激光器调谐范围窄、调谐麻烦的缺点。The present invention performs injection locking and intracavity frequency doubling in one cavity for the first time. The laser generated by injection locking is directly frequency-doubled in the cavity. Traditional injection locking and intracavity frequency doubling are carried out in two cavities. After laser injection is locked and output outside the cavity, and then coupled into the frequency doubling cavity, at least 9 cavity mirrors are required, while the present invention only needs 6 pieces to complete in one cavity. The cavity mirror reduces the cost and the loss caused by the cavity mirror, improves the efficiency by at least 10%, and reduces the difficulty. Due to the addition of a phase-modulated optical heterodyne frequency stabilization system, the resonance between the seed light and the ring cavity is maintained, and the intracavity power of the seed light is increased. The laser tuning performance of the system depends on the properties of the seed light, which can overcome the disadvantages of narrow tuning range and troublesome tuning of solid-state lasers.
附图说明Description of drawings
图1为本发明注入锁定腔内倍频固体激光器的结构示意图。FIG. 1 is a schematic structural diagram of an injection-locked intracavity frequency-doubled solid-state laser according to the present invention.
具体实施方式Detailed ways
为便于对本发明的结构及达到的效果有进一步的了解，现配合附图并举较佳实施例详细说明如下:In order to have a further understanding of the structure of the present invention and the effect achieved, the preferred embodiments are now described in detail as follows in conjunction with the accompanying drawings:
如图1所示，由图可见，本发明注入锁定腔内倍频固体激光器，包括泵浦源1、凸透镜2环形腔3、种子激光器4、相位调制光外差稳频系统5和分光棱镜6，所述的环形腔3包括泵浦光输入耦合镜30、激光晶体31、第一凹面镜32、光隔离器33、平面反射镜34、种子光输入耦合镜35、输出耦合镜36、倍频晶体37、第二凹面镜38；As shown in Figure 1, it can be seen from the figure that the injection-locked intracavity frequency-multiplied solid-state laser of the present invention includes a pump source 1, a convex lens 2, an annular cavity 3, a seed laser 4, a phase-modulated optical heterodyne frequency stabilization system 5, and a beam-splitting prism 6 , the annular cavity 3 includes a pump light input coupling mirror 30, a laser crystal 31, a first concave mirror 32, an optical isolator 33, a plane mirror 34, a seed light input coupling mirror 35, an output coupling mirror 36, a frequency doubling Crystal 37, second concave mirror 38;
沿种子激光器4输出的种子光方向依次是种子光输入耦合镜35、泵浦光输入耦合镜30、激光晶体31、第一凹面镜32、光隔离器33、平面反射镜34、第二凹面镜38、倍频晶体37、输出耦合镜36和种子光输入耦合镜35构成环形腔3；The direction of the seed light output along the seed laser 4 is the seed light input coupling mirror 35, the pump light input coupling mirror 30, the laser crystal 31, the first concave mirror 32, the optical isolator 33, the plane reflector 34, the second concave mirror 38. The frequency doubling crystal 37, the output coupling mirror 36 and the seed light input coupling mirror 35 form the annular cavity 3;
沿所述的泵浦源1输出的泵浦光方向依次是所述的凸透镜2、输入耦合镜30；The direction of the pump light output along the pump source 1 is the convex lens 2 and the input coupling mirror 30 in sequence;
在所述的种子光输入耦合镜35的反射光方向是所述的分光棱镜6，在所述的分光棱镜6的反射光束方向通过光纤与所述的相位调制光外差稳频系统5的输入端相连，该相位调制光外差稳频系统5的输出端的压电陶瓷贴设在所述的平面反射镜34的背面；The reflected light direction of the seed light input coupling mirror 35 is the dichroic prism 6, and the reflected light beam direction of the dichroic prism 6 passes through the optical fiber and the input of the phase-modulated light heterodyne frequency stabilization system 5 The piezoelectric ceramics at the output end of the phase modulation optical heterodyne frequency stabilization system 5 are attached to the back of the plane mirror 34;
所述泵浦光输入耦合镜30镀有对泵浦光高透种子光高反的膜；所述的第一凹面镜32为镀有对种子光高反的膜，对泵浦光高透的膜；所述的平面反射镜34镀有对种子光高反、对泵浦光高透的膜；所述的种子光输入耦合镜35为平面镜，镀有对种子光部分透射的膜；所述的第二凹面镜镜38镀有对种子光高反的膜；所述的输出耦合镜36为凹面镜，镀有对种子光的高反对倍频光高透的膜。The pump light input coupling mirror 30 is coated with a film with high transparency to the pump light and high reflection to the seed light; the first concave mirror 32 is coated with a film with high reflection to the seed light and has a high transparency to the pump light. film; the plane mirror 34 is coated with a film that is highly reflective to the seed light and highly transparent to the pumping light; the described seed light input coupling mirror 35 is a plane mirror, coated with a film that partially transmits the seed light; The second concave mirror 38 is coated with a film that is highly reflective to the seed light; the output coupling mirror 36 is a concave mirror coated with a film that is highly resistant to the seed light and highly transparent to the frequency-doubled light.
下面是本发明实施例的有关参数：Below is the relevant parameter of the embodiment of the present invention:
泵浦源1发出的泵浦光(波长λ2)依次经过凸透镜2、泵浦光输入耦合镜30、入射进激光晶体31；所述的种子激光器4发出的低功率的种子光(波长为λ1)依次经过所述的种子光输入耦合镜35、泵浦光输入耦合镜30到激光晶体31上，在泵浦光的作用下，所述的激光晶体31产生高功率的激光输出(波长为λ1)，该输出光依次经过第一凹面镜32、光隔离器33、平面反射镜34、第二凹面镜38、经所述的倍频晶体37内倍频，该倍频晶体37输出波长λ1/2的倍频光，经过输出耦合镜36输出腔外，经倍频晶体后剩余的波长为λ1的光经过所述的输出耦合镜36反射、种子光输入耦合镜35透射与种子激光器发出的种子光经过种子光输入耦合镜35反射光干涉后进入所述的相位调制光外差稳频系统5；所述的压电陶瓷控制所述的平面反射镜34产生运动实现稳频。The pumping light (wavelength λ2) emitted by the pumping source 1 passes through the convex lens 2, the pumping light input coupling mirror 30, and enters the laser crystal 31 in sequence; the low-power seed light (wavelength λ1) emitted by the seed laser 4 After passing through the seed light input coupling mirror 35 and the pump light input coupling mirror 30 to the laser crystal 31 in turn, under the action of the pump light, the laser crystal 31 produces high-power laser output (wavelength is λ1) , the output light passes through the first concave mirror 32, the optical isolator 33, the plane reflector 34, the second concave mirror 38 in turn, and the frequency is doubled in the frequency doubling crystal 37, and the frequency doubling crystal 37 outputs the wavelength λ1/2 The frequency-doubled light is output outside the cavity through the output coupling mirror 36, and the remaining light with a wavelength of λ1 after the frequency-doubled crystal is reflected by the output coupling mirror 36, transmitted by the seed light input coupling mirror 35 and the seed light emitted by the seed laser After being interfered with by the seed light input coupling mirror 35, the reflected light enters the phase-modulated light heterodyne frequency stabilization system 5; the piezoelectric ceramic controls the plane mirror 34 to generate motion to achieve frequency stabilization.
实验表明，本发明具有结构简单、成本低廉的特点，可产生高功率、窄线宽、频率可调的倍频激光输出。Experiments show that the invention has the characteristics of simple structure and low cost, and can generate frequency-doubled laser output with high power, narrow line width and adjustable frequency.
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