CN105446274B - The monitoring method and system of a kind of semiconductor processing equipment - Google Patents
The monitoring method and system of a kind of semiconductor processing equipment Download PDFInfo
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- CN105446274B CN105446274B CN201410392280.5A CN201410392280A CN105446274B CN 105446274 B CN105446274 B CN 105446274B CN 201410392280 A CN201410392280 A CN 201410392280A CN 105446274 B CN105446274 B CN 105446274B
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Abstract
The present invention relates to the monitoring method and system of semiconductor processing equipment, system controller presets multiple addresses and stores the bool values that Logical Supervisory Control amount is corresponded with the bool values of multiple monitoring parameters respectively；The bool values of monitoring parameter or Logical Supervisory Control amount are corresponded with alarm；Controller is arranged to：Multiple monitoring parameters are scanned successively, once judging that current monitor amount meets alert if, then the bool values for storing Logical Supervisory Control amount corresponding with the bool values of current monitor amount are 1, send safety operation；Once judgement is unsatisfactory for alert if, then the bool values for storing Logical Supervisory Control amount corresponding with current monitor amount are constant；Host computer is arranged to：Once the bool values of the corresponding Logical Supervisory Control amount of bool values of the current monitor amount of Read Controller storage are 1, then alarm corresponding with the bool values of current monitor amount or Logical Supervisory Control amount of dishing out.The system can accurately and timely know that accidental alarm condition increases the safety and maintainability of equipment.
Description
Technical field
The invention belongs to microelectronic processing technique fields, and in particular to a kind of monitoring method of semiconductor processing equipment and be
System.
Background technology
Chemical vapor deposition (Chemical Vapor Deposition, hereinafter referred to as CVD) equipment is to utilize gas with various
Certain pressure intensity, temperature conditionss react to each other prepare epitaxial thin-film layer, and be integrated with precision optical machinery, electronics, physics, light
The package of the subjects such as, chemistry and computer control.Since the control signal amount of CVD equipment is big, processing step is complicated, work
Skill temperature is high and is needed simultaneously using hazardous gas, thus CVD equipment needs very high control requirement, to realize CVD equipment
Security.
For this purpose, the control system of the CVD equipment generally requires to be monitored multiple monitoring parameters, and each monitoring parameter corresponds to
A kind of alarm, corresponding alarm of dishing out when each monitoring parameter meets alert if, to notify operating personnel.Specifically,
Control system uses the control mode of " host computer+PLC ", host computer and PLC to be realized by Ethernet Device Net,
Also referring to Fig. 1 and Fig. 2, wherein, PLC scans multiple monitoring parameters using the working method of scan round, to current monitor amount
Bool value assignment, specifically, judge whether current monitor amount meets corresponding alert if, if so, PLC is to the monitoring
The bool values of amount are assigned a value of true (" 1 "), if it is not, PLC is assigned a value of the bool values of the monitoring parameter false (" 0 ")；Judge current
Whether the bool values of monitoring parameter are true, if so, PLC sends a series of safety operations, so that CVD equipment is in a safe condition,
Safety operation includes closing valve, closes heater or stop process gas inlet etc., if it is not, PLC continues to scan on work, and
Continue the bool value assignment to each monitoring parameter；Host computer starts independent thread and constantly reads PLC current monitor amounts
Bool values, and judge whether bool values are true, if it is not, then continuing to inquire about；If so, the bool values one dished out with current monitor amount
One corresponding alarm；Judge whether alarm has dished out, if so, host computer continues to read；If it is not, alarm of dishing out, teaching process
Personnel；Operating personnel carry out recovery operation to eliminate alarm, and then solve the abnormality of equipment, avoid dangerous generation.
However, using above-mentioned CVD equipment, inevitably there are following technical problems in practical applications：Due to upper
Communication has certain communication cycle between machine and PLC, i.e. and host computer is communicated at interval of the communication cycle with PLC, if
The bool values of some monitoring parameter become false from true in communication cycle, and in this case, PLC is judging bool values
For a series of safety operations can be sent during true, still, since the transformation period of bool values is less than communication cycle, upper
Host computer cannot inquire the situation that bool values are true in the case of stating, and therefore, in moment, accidental monitoring parameter variation causes this
In the case that the transformation period of the bool values of monitoring parameter is less than communication cycle, host computer can not accurately and timely know CVD equipment
Current state, so as to cause operating personnel can not the normal use CVD equipment；And if shortened between host computer and PLC
Communication cycle, this can largely increase host computer and the traffic of PLC, thus can increase the expense of master system,
It is easy to cause master system deadlock occurs or even collapses to cause that new order can not be received, so as to reduce the steady of CVD equipment
It is qualitative.
The content of the invention
It is contemplated that at least solve one of technical problem in the prior art, it is proposed that a kind of semiconductor machining is set
Standby monitoring method and system can so that accidental monitoring parameter variation causes the bool values of the monitoring parameter to host computer in moment
In the case that transformation period is less than communication cycle, the accidental alarm condition of semiconductor processing equipment can be accurately and timely known,
So as to increase the security of semiconductor processing equipment and maintainability；And it need not shorten between host computer and controller
Communication cycle, because of the traffic without increasing host computer and controller, so as to which the expense of master system will not be increased.
One of in order to solve the above problem, it is described partly to lead the present invention provides a kind of monitoring method of semiconductor processing equipment
The monitoring method of body process equipment realizes that the monitoring system includes host computer and controller, the control using monitoring system
Device is preset with multiple addresses for storage respectively and the bool values of the one-to-one Logical Supervisory Control amount of bool values of multiple monitoring parameters；
The bool values of the monitoring parameter or the Logical Supervisory Control amount are corresponded with alarm；The monitoring method comprises the following steps：
Step S1, the controller scans multiple monitoring parameters successively, and judges whether current monitor amount meets alarm
Condition, if so, entering step S2；If it is not, then enter step S3；
Step S2, the bool values of presently described monitoring parameter are assigned a value of true, then storage and the bool of presently described monitoring parameter
The bool values for being worth the corresponding Logical Supervisory Control amount are 1, and send safety operation, subsequently into step S4；
Step S3, the bool values of presently described monitoring parameter are assigned a value of false, then store corresponding with presently described monitoring parameter
The bool values of the Logical Supervisory Control amount remain unchanged, subsequently into step S4；
Step S4, the bool values that the host computer reads the presently described monitoring parameter of the controller storage are corresponding described
The bool values of Logical Supervisory Control amount；
Step S5, the host computer judge whether the bool values of presently described Logical Supervisory Control amount are 1, if so, entering step
Rapid S6；
Step S6, the host computer is dished out to be corresponded with the bool values of presently described monitoring parameter or the Logical Supervisory Control amount
Alarm.
Specifically, the controller is additionally provided with corresponds with the bool values of the monitoring parameter or the Logical Supervisory Control amount
ClearPLCAlarmDO, the monitoring method is further comprising the steps of：
Step S7, the host computer judge whether operating personnel handle the alarm, if so, entering step S8；
Step S8, the host computer will be corresponding with the bool values of presently described monitoring parameter or the Logical Supervisory Control amount described
ClearPLCAlarmDO is set to 1；
Step S9, the controller are the 1 corresponding Logical Supervisory Control of storage according to the ClearPLCAlarmDO
The bool values of amount are 0.
Specifically, it is described alarm include warning numbering and with the one-to-one warning message of the warning numbering.
Specifically, the controller scans multiple monitoring parameters successively by the way of scan round.
Specifically, the controller includes PLC.
The present invention also provides a kind of monitoring systems of semiconductor processing equipment, including host computer and controller, the control
Device is preset with multiple addresses for storage respectively and the bool values of the one-to-one Logical Supervisory Control amount of bool values of multiple monitoring parameters；
Also, the bool values of the monitoring parameter or the Logical Supervisory Control amount are corresponded with alarm；The controller is arranged to：Successively
Multiple monitoring parameters are scanned, once judging that current monitor amount meets alert if, then the bool values of presently described monitoring parameter are assigned
It is worth for true, and the bool values for storing the Logical Supervisory Control amount corresponding with the bool values of presently described monitoring parameter are 1, send peace
Full operation；Once judging that current monitor amount is unsatisfactory for alert if, then the bool values of presently described monitoring parameter are assigned a value of false,
And the bool values for storing the Logical Supervisory Control amount corresponding with presently described monitoring parameter remain unchanged；The host computer is set
For：Once read the bool values of the corresponding Logical Supervisory Control amount of bool values of the presently described monitoring parameter of the controller storage
For 1, then dish out and the bool values of presently described monitoring parameter or Logical Supervisory Control amount are alarmed correspondingly.
Specifically, the controller is additionally provided with corresponds with the bool values of the monitoring parameter or the Logical Supervisory Control amount
ClearPLCAlarmDO, the host computer is also configured to：Once judge that operating personnel handle the alarm, then it will be with working as
The preceding monitoring parameter or the corresponding ClearPLCAlarmDO of bool values of the Logical Supervisory Control amount are set to 1；The controller is set
For：Once ClearPLCAlarmDO values corresponding with the bool values of presently described monitoring parameter or the Logical Supervisory Control amount are set to 1,
The bool values for then storing presently described Logical Supervisory Control amount are 0.
Specifically, it is described alarm include warning numbering and with the one-to-one warning message of the warning numbering.
Specifically, the controller scans multiple monitoring parameters successively by the way of scan round.
Specifically, the controller includes PLC.
The invention has the advantages that：
The monitoring method of semiconductor processing equipment provided by the invention, be preset in controller multiple addresses for point
Not Cun Chu with the bool values of the one-to-one Logical Supervisory Control amount of bool values of multiple monitoring parameters, and when judge current monitor amount satisfaction
During alert if, the bool values of current monitor amount are assigned a value of true, store logic corresponding with the bool values of current monitor amount and patrol
The bool for collecting monitoring parameter is 1, and sends safety operation；And when judging that current monitor amount is unsatisfactory for not alert if, currently
The bool values of monitoring parameter are assigned a value of true, and the bool for storing Logical Supervisory Control amount corresponding with the bool of current monitor amount is kept not
Become；Host computer reads the bool of the corresponding Logical Supervisory Control amount of bool values of the current monitor amount of control storage, and when this is currently patrolled
When the bool for collecting monitoring parameter is 1, dishes out and the bool of current logic monitoring parameter (or current monitor amount) alarm correspondingly,
In these cases, if in the communication cycle of host computer and controller, the bool values of some monitoring parameter are become from true
False, the bool of Logical Supervisory Control amount corresponding with the bool values of the monitoring parameter can be 1 always, i.e. the bool of the Logical Supervisory Control amount
The bool values that value has recorded the monitoring parameter in communication cycle become false from true, this compared with prior art, host computer passes through
Read the bool values of the corresponding Logical Supervisory Control amount of bool values of current monitor amount, it is possible to inquire the monitoring parameter in communication cycle
Bool values false is become from true, thus can cause host computer moment it is accidental monitoring parameter variation cause the monitoring parameter
Bool values transformation period be less than communication cycle in the case of, can accurately and timely know the idol of semiconductor processing equipment
Alarm condition is sent out, so as to increase the security of semiconductor processing equipment and maintainability；And host computer need not be shortened
Communication cycle between controller, because of the traffic without increasing host computer and controller, so as to which host computer will not be increased
The expense of system.
The monitoring system of semiconductor processing equipment provided by the invention, controller are preset with multiple addresses for depositing respectively
Storage and the bool values of the one-to-one Logical Supervisory Control amount of bool values of multiple monitoring parameters；Also, the bool values of Logical Supervisory Control amount with
Alarm corresponds；Controller is arranged to：Multiple monitoring parameters are scanned successively, once judge that current monitor amount meets alarm bar
Part, then the bool values of current monitor amount are assigned a value of true, and store current logic prison corresponding with the bool values of current monitor amount
The bool values of control amount are 1, send safety operation；Once judge that current monitor amount is unsatisfactory for alert if, then current monitor amount
Bool values are assigned a value of false, and the bool values for storing current logic monitoring parameter corresponding with current monitor amount remain unchanged；It is upper
Machine is arranged to：Once the bool values of the corresponding current logic monitoring parameter of bool values of the current monitor amount of Read Controller storage
For 1, then dish out and the bool values of current logic monitoring parameter are alarmed correspondingly, in these cases, if in host computer and control
In the communication cycle of device processed, the bool values of some monitoring parameter become false from true, controller can by with the monitoring parameter
The bool of the corresponding Logical Supervisory Control amount of bool values is arranged to 1 and keeps, i.e. the bool values of the Logical Supervisory Control amount are captured and had recorded
The bool values of monitoring parameter become false from true in communication cycle, this compared with prior art, host computer can pass through reading
The bool values of the corresponding Logical Supervisory Control amount of bool values of current monitor amount, it is possible to inquire the monitoring parameter in communication cycle
Bool values become false from true, thus can so that accidental monitoring parameter variation causes the monitoring parameter to host computer in moment
In the case that the transformation period of bool values is less than communication cycle, the accidental of semiconductor processing equipment can be accurately and timely known
Alarm condition, so as to increase the security of semiconductor processing equipment and maintainability；And need not shorten host computer and
Communication cycle between controller, because of the traffic without increasing host computer and controller, so as to which host computer system will not be increased
The expense of system.
Description of the drawings
Fig. 1 be existing CVD equipment monitoring during PLC work flow diagram；
Fig. 2 be existing CVD equipment monitoring during host computer work flow diagram；
Fig. 3 be semiconductor processing equipment provided in an embodiment of the present invention monitoring method in controller work flow diagram；
And
Fig. 4 be semiconductor processing equipment provided in an embodiment of the present invention monitoring method in host computer work flow diagram.
Specific embodiment
For those skilled in the art is made to more fully understand technical scheme, come below in conjunction with the accompanying drawings to the present invention
The monitoring method and system for the semiconductor processing equipment that embodiment provides are described in detail.
Of the invention for ease of understanding, hereinafter " monitoring parameter " refers to actual monitored amount；" current monitor amount " refers to current reality
Border monitoring parameter.
Fig. 3 be semiconductor processing equipment provided in an embodiment of the present invention monitoring method in controller work flow diagram.
Fig. 4 be semiconductor processing equipment provided in an embodiment of the present invention monitoring method in host computer work flow diagram.Please join together
Fig. 3 and Fig. 4 are read, the monitoring method of semiconductor processing equipment provided in this embodiment is realized using monitoring system, the monitoring system
Including host computer and controller, it is a pair of for storage respectively and the bool values one of multiple monitoring parameters that controller is preset with multiple addresses
The bool values for the Logical Supervisory Control amount answered, specifically, monitoring parameter and Logical Supervisory Control amount correspond, bool values of monitoring parameter and therewith
The bool values of corresponding Logical Supervisory Control amount correspond；In the present embodiment, controller includes PLC, in the data storage area of PLC
Or other data fields (for example, holding area) are preset with multiple addresses, and the quantity of address and the quantity of monitoring parameter are equal and two
Person corresponds, the data (that is, the value of the bool values of Logical Supervisory Control amount) of each addressed memory storage and corresponding monitoring
The value of the bool values of amount corresponds to, for example, the data of the first address storage are corresponding with the value of the bool values of the first monitoring parameter, the
The data of double-address storage are corresponding with the value of the bool values of the second monitoring parameter；Also, in the present embodiment, Logical Supervisory Control amount
Bool values are corresponded with alarm.
Monitoring method provided in this embodiment comprises the following steps：
Step S1, controller scan multiple monitoring parameters successively, and judge whether current monitor amount meets alert if, if
It is then to enter step S2；If it is not, then enter step S3；
Step S2, the bool values of current monitor amount are assigned a value of true, then store corresponding with the bool values of current monitor amount
The bool values of Logical Supervisory Control amount are 1, and send safety operation, so that semiconductor equipment returns to safe condition as early as possible, subsequently into
Step S4；That is, the bool values of Logical Supervisory Control amount are expressed as monitoring parameter for 1 correspondence meets alert if, Logical Supervisory Control amount
Bool values for 0 correspond to represent monitoring parameter be unsatisfactory for alert if；
Step S3, the bool values of current monitor amount are assigned a value of false, then store Logical Supervisory Control corresponding with current monitor amount
The bool values of amount remain unchanged, subsequently into step S4；
Step S4, the bool of the corresponding Logical Supervisory Control amount of bool values of the current monitor amount of host computer Read Controller storage
Value；
Step S5, host computer judges whether the bool values of current logic monitoring parameter are 1, if so, entering step S6；
Step S6, host computer is dished out alarms correspondingly with the bool values of current logic monitoring parameter, with teaching process people
Member's processing.
The monitoring method that lower mask body introduces semiconductor processing equipment provided in this embodiment is how to solve the prior art
Present in technical problem.Specifically, if in the communication cycle of host computer and controller, the bool values of some monitoring parameter by
True becomes false, and the bool of Logical Supervisory Control amount corresponding with the bool values of the monitoring parameter can be caused according to step S2 and S3
1 and to keep, i.e. the bool values of the Logical Supervisory Control amount capture and have recorded the bool values of the monitoring parameter in communication cycle by true
Become false, this is patrolled compared with prior art, according to step S4 host computers by the way that the bool values for reading current monitor amount are corresponding
Collect the bool values of monitoring parameter, it is possible to which the bool values for inquiring the monitoring parameter in communication cycle become false from true, thus can
So that host computer is in moment, accidental monitoring parameter variation causes the transformation period of the bool values of the monitoring parameter to be less than communication cycle
In the case of, it can accurately and timely know the accidental alarm condition of semiconductor processing equipment, add so as to increase semiconductor
The security and maintainability of construction equipment；And the communication cycle between host computer and controller need not be shortened, because without
Increase the traffic of host computer and controller, so as to which the expense of master system will not be increased.
In the step S1 of the present embodiment, it is preferable that the scan mode of controller may be employed the mode of scan round according to
The multiple monitoring parameters of secondary scanning, according to judge current monitor amount it is no meet alert if realization to the bool values of current monitor amount and
The bool values of corresponding Logical Supervisory Control amount carry out assignment.Certainly, the present invention is not limited thereto, in practical applications, can
Specifically to set scan mode according to actual needs.
In the step S6 of the present embodiment, specifically, above-mentioned alarm includes warning numbering and is corresponded with warning numbering
Warning message, in this case, step S6 be specially first host computer inquiry current logic monitoring parameter bool values correspondence
Warning numbering, obtain corresponding warning message further according to the warning numbering, dish out alarm then according to the warning message.
It is readily appreciated that, in the present embodiment, judges whether current monitor amount meets alert if by controller, not only may be used
To greatly reduce the overhead of host computer, and the burden of the communication between host computer and controller can be reduced, and then made
It is succinct, clear to design；It can also avoid host computer during communication abnormality between host computer and controller that from can not grasping safety simultaneously
The risk being sent on controller, so as to greatly improve the security of semiconductor equipment.
It (that is, carries out " reading dynamic since host computer is only capable of being read out the bool values of the Logical Supervisory Control amount of controller memory storage
Make "), it is impossible to directly the bool values of the Logical Supervisory Control amount of controller memory storage are modified and (that is, carry out " writing action "), because
This, in this embodiment, it is preferred that, controller is additionally provided with one-to-one with the bool values of Logical Supervisory Control amount
ClearPLCAlarmDO specifically, carries out " writing action " to the ClearPLCAlarmDO of controller by host computer, then passes through
Controller carries out " writing action " according to the ClearPLCAlarmDO to the bool values of corresponding Logical Supervisory Control amount, therefore,
In this case, monitoring method provided in this embodiment is further comprising the steps of：
Step S7, host computer judge whether operating personnel handle alarm, if so, entering step S8；
ClearPLCAlarmDO corresponding with the bool values of current logic monitoring parameter is set to 1 by step S8, host computer；
Step S9, controller are 1 according to the ClearPLCAlarmDO, store corresponding current logic monitoring parameter
Bool values are 0, that is to say, that current monitor amount is unsatisfactory for alert if after alert process, so that semiconductor machining is set
It is standby to recover to normal condition.
It is readily appreciated that, by above-mentioned steps S7-S9, can cause after operating personnel are to alert process so that currently patrolling
The bool values for collecting monitoring parameter are 0, thus can cause monitoring method continuous work provided in this embodiment.
In the present embodiment, by above-mentioned steps S7-S9, ClearPLCAlarmDO has been set to 1 expression operating personnel
Processing alarm.But the present invention is not limited thereto, in practical applications, can also ClearPLCAlarmDO be set to 0 expression
The processed alarm of operating personnel, specifically, if operating personnel handle alarm, ClearPLCAlarmDO is set to 0, and according to this
ClearPLCAlarmDO is set to 0 and the bool values of Logical Supervisory Control amount is stored as 0.
It should be noted that in the present embodiment, the bool values of Logical Supervisory Control amount correspond to for 1 is expressed as monitoring parameter satisfaction report
Alert condition, the bool values of Logical Supervisory Control amount correspond to for 0 represents that monitoring parameter is unsatisfactory for alert if.But the present invention does not limit to
In this, in practical applications, it is also possible that the bool values of Logical Supervisory Control amount are expressed as monitoring parameter for 0 correspondence meets alarm bar
Part, the bool values of Logical Supervisory Control amount correspond to for 1 represents that monitoring parameter is unsatisfactory for alert if, in this case, specifically, if control
When device processed judges that current monitor amount meets alert if, Logical Supervisory Control amount corresponding with the bool values of current monitor amount is stored
Bool values are 0, similarly, if current monitor amount is unsatisfactory for alert if, store Logical Supervisory Control corresponding with current monitor amount
The bool values of amount remain unchanged；Host computer judges whether the bool values of current logic monitoring parameter are 0, if so, entering step S6；
In step S7-S9, if judging the processed alarm of operating personnel, host computer causes ClearPLCAlarmDO to take according to aforesaid way
It is worth to represent the value of the processed alarm of operating personnel, controller stores corresponding according to the value of ClearPLCAlarmDO
The bool values of current logic monitoring parameter are 1.
It should also be noted that, in the present embodiment, the bool values of Logical Supervisory Control amount and the bool values one of monitoring parameter are a pair of
Should, bool values and the alarm of Logical Supervisory Control amount correspond, that is to say, that the bool values of monitoring parameter, the bool of Logical Supervisory Control amount
Value and alarm three correspond, therefore, in monitoring system provided in this embodiment, it is also possible that the bool values of monitoring parameter
It is corresponded with alarm, accordingly, in step s 6, host computer is dished out to be reported correspondingly with the bool values of current monitor amount
It is alert, it is handled with teaching process personnel.
In addition, Logical Supervisory Control amount bool values and monitoring parameter bool values correspond, the bool values of Logical Supervisory Control amount with
ClearPLCAlarmDO correspond, that is to say, that the bool values of Logical Supervisory Control amount, the bool values of monitoring parameter and
ClearPLCAlarmDO is corresponded；Therefore, in monitoring system provided in this embodiment, the bool values of monitoring parameter can be caused
It is corresponded with ClearPLCAlarmDO, accordingly, in step s 8, host computer will be corresponding with the bool values of current monitor amount
ClearPLCAlarmDO be set to 1.
It should also be noted that, controller is sent after safety operation and in step in the step S2 of the present embodiment
After the bool values of S3 storages Logical Supervisory Control amount corresponding with the bool values of current monitor remain unchanged, controller continuation is then swept
It retouches；If host computer judges the bool values of current logic monitoring parameter not for 1 in step s 5, host computer continues Read Controller and deposits
The bool values of the corresponding Logical Supervisory Control amount of bool values of the current monitor amount of storage；If judging in the step s 7, operating personnel are untreated
After alarm and after step S9, the bool values that host computer continues the current monitor amount of Read Controller storage are corresponding
The bool values of Logical Supervisory Control amount.
It is further to note that in practical applications, if the alert if associated by monitoring parameter changes, it can lead to
Cross the program of modification controller；, it is necessary to ensure the bool values of monitoring parameter when if the quantity of monitoring parameter needs to increased or decrease
It is corresponded with the bool values of Logical Supervisory Control amount and the bool values of Logical Supervisory Control amount is corresponded with alarm.
In addition it should also be noted that, in the present embodiment, Logical Supervisory Control amount is corresponded with monitoring parameter, therefore, in step
Rapid S1 only needs whether to meet alert if according to current monitor amount, is 1 or in step in step S2 storage Logical Supervisory Control amounts
S3 storages Logical Supervisory Control amount remains unchanged.But the present invention is not limited thereto, in practical applications, Logical Supervisory Control amount may be used also
To be corresponded with multiple monitoring parameters with certain logical relation, in this case, needed in step sl according to multiple
Whether monitoring parameter meets alert if, and whether multiple monitoring parameters meet above-mentioned logical relation, if so, just can be in step S2
It is 1 to store Logical Supervisory Control amount, is remained unchanged if it is not, Logical Supervisory Control amount just can be stored in step S3.It is readily appreciated that, in this feelings
Under condition, the bool values of Logical Supervisory Control amount, the bool values of multiple monitoring parameters with certain logical relation and alarm three are one by one
It is corresponding.
As another technical solution, the present embodiment provides a kind of monitoring system of semiconductor processing equipment, including upper
Position machine and controller.Wherein, it is a pair of for storage respectively and the bool values one of multiple monitoring parameters to be preset with a group address for controller
The bool values for the Logical Supervisory Control amount answered, specifically, monitoring parameter and Logical Supervisory Control amount correspond, bool values of monitoring parameter and therewith
The bool values of corresponding Logical Supervisory Control amount correspond；In the present embodiment, controller includes PLC, in the data storage area of PLC
Or other data fields (for example, holding area) are preset with multiple addresses, and the quantity of address and the quantity of monitoring parameter are equal and two
Person corresponds, the data (that is, the value of the bool values of Logical Supervisory Control amount) of each addressed memory storage and corresponding monitoring
The value of the bool values of amount corresponds to；Also, the bool values of Logical Supervisory Control amount are corresponded with alarm；Controller is arranged to：According to
The secondary multiple monitoring parameters of scanning, once judging that current monitor amount meets alert if, then the bool values of current monitor amount are assigned a value of
True, and the bool values for storing current logic monitoring parameter corresponding with the bool values of current monitor amount are 1, send safety operation,
That is, the bool values of Logical Supervisory Control amount are expressed as monitoring parameter for 1 correspondence meets alert if, the bool values of Logical Supervisory Control amount
It is corresponded to for 0 and represents that monitoring parameter is unsatisfactory for alert if；And once judge that current monitor amount is unsatisfactory for alert if, then it is current to supervise
The bool values of control amount are assigned a value of false, and the bool values for storing current logic monitoring parameter corresponding with current monitor amount are kept not
Become；Host computer is arranged to：Once the corresponding current logic monitoring parameter of bool values of the current monitor amount of Read Controller storage
Bool values for 1, then dish out and the one-to-one alarm of the bool values of current logic monitoring parameter.
Since the course of work of the monitoring system of semiconductor processing equipment provided in this embodiment is provided with above-described embodiment
Monitoring method it is similar, details are not described herein.
The monitoring system that lower mask body introduces semiconductor processing equipment provided in this embodiment is how to solve the prior art
Present in technical problem.Specifically, if in the communication cycle of host computer and controller, the bool values of some monitoring parameter by
True becomes false, and the bool of Logical Supervisory Control amount corresponding with the bool values of the monitoring parameter can be arranged to 1 and protected by controller
It holds, i.e. the bool values of the Logical Supervisory Control amount capture and have recorded the bool values of the monitoring parameter in communication cycle to be become from true
False, this compared with prior art, host computer can be by the corresponding Logical Supervisory Control amount that reads the bool values of current monitor amount
Bool values, it is possible to which the bool values for inquiring the monitoring parameter in communication cycle become false from true, thus can cause upper
Machine causes the transformation period of the bool values of the monitoring parameter less than in the case of communication cycle in moment accidental monitoring parameter variation, can
Accurately and timely to know the accidental alarm condition of semiconductor processing equipment, so as to increase the peace of semiconductor processing equipment
Full property and maintainability；And the communication cycle between host computer and controller need not be shortened, because without increasing host computer
With the traffic of controller, so as to which the expense of master system will not be increased.
In this embodiment, it is preferred that the scan mode of controller may be employed scan round mode scan successively it is more
A monitoring parameter, according to judging that the no alert if that meets of current monitor amount realizes to the bool values of current monitor amount and correspond to therewith
Logical Supervisory Control amount bool values carry out assignment.Certainly, the present invention is not limited thereto, in practical applications, can be according to reality
Border needs specific setting scan mode.
Specifically, in the control system alarm include warning numbering and with the one-to-one warning message of warning numbering,
In this case, host computer is arranged to：Once the corresponding warning numbering of bool values of current logic monitoring parameter is inquired about, then basis
The warning numbering obtains corresponding warning message, dishes out alarm further according to the warning message.
It is readily appreciated that, in the present embodiment, judges whether current monitor amount meets alert if by controller, not only may be used
To greatly reduce the overhead of host computer, and the burden of the communication between host computer and controller can be reduced, and then made
It is succinct, clear to design；It can also avoid host computer during communication abnormality between host computer and controller that from can not grasping safety simultaneously
The risk being sent on controller, so as to greatly improve the security of semiconductor equipment.
Based on the reason for similar to above-mentioned first embodiment, it is preferable that controller is additionally provided with and Logical Supervisory Control amount
The one-to-one ClearPLCAlarmDO of bool values, in this case, host computer is also configured to：Once judge operator
Member's processing alarm, then be set to 1 by ClearPLCAlarmDO corresponding with the bool values of current logic monitoring parameter；Controller is set
For：Once ClearPLCAlarmDO corresponding with the bool values of current logic monitoring parameter is set to 1, then current logic monitoring is stored
The bool values of amount are 0, that is to say, that current monitor amount is unsatisfactory for alert if after alert process, so that semiconductor adds
Construction equipment recovers to normal condition, so that monitoring method continuous work provided in this embodiment.
In the present embodiment, ClearPLCAlarmDO is set to the 1 processed alarm of expression operating personnel.But the present invention is simultaneously
It is not limited to this, in practical applications, can also ClearPLCAlarmDO be set to the 0 processed alarm of expression operating personnel, specifically
Ground, host computer are also configured to：Once judge that operating personnel handle alarm, then it will be corresponding with the bool values of current logic monitoring parameter
ClearPLCAlarmDO be set to 0；Controller is arranged to：It is once corresponding with the bool values of current logic monitoring parameter
ClearPLCAlarmDO is set to 0, then the bool values for storing current logic monitoring parameter are 0.
It should be noted that in the present embodiment, the bool values of Logical Supervisory Control amount correspond to for 1 is expressed as monitoring parameter satisfaction report
Alert condition, the bool values of Logical Supervisory Control amount correspond to for 0 represents that monitoring parameter is unsatisfactory for alert if.But the present invention does not limit to
In this, in practical applications, it is also possible that the bool values of Logical Supervisory Control amount are expressed as monitoring parameter for 0 correspondence meets alarm bar
Part, the bool values of Logical Supervisory Control amount correspond to for 1 represents that monitoring parameter is unsatisfactory for alert if, in this case, specifically, control
Device is arranged to：Scan multiple monitoring parameters successively, once judge that current monitor amount meets alert if, then storage and current monitor
The bool values of the corresponding current logic monitoring parameter of bool values of amount are 0；And once judge that current monitor amount is unsatisfactory for alarm bar
Part, then the bool values for storing current logic monitoring parameter corresponding with current monitor amount remain unchanged；Host computer is arranged to：Once
The bool values of the corresponding current logic monitoring parameter of bool values of the current monitor amount of Read Controller storage are 0, then dish out with working as
The bool values of preceding Logical Supervisory Control amount are alarmed correspondingly.
It should also be noted that, in the present embodiment, Logical Supervisory Control amount bool values and the bool values of monitoring parameter correspond,
The bool values of Logical Supervisory Control amount are corresponded with alarm, that is to say, that the bool values of monitoring parameter, the bool values of Logical Supervisory Control amount with
And alarm three corresponds, therefore, in monitoring system provided in this embodiment, it is also possible that the bool values of monitoring parameter and report
Alert to correspond, accordingly, host computer is arranged to：Once the bool values of the current monitor amount of Read Controller storage are corresponding
The bool values of current logic monitoring parameter are 1, then dish out and alarm correspondingly with the bool values of current logic monitoring parameter, to wait
Operating personnel are handled.
In addition, Logical Supervisory Control amount bool values and monitoring parameter bool values correspond, the bool values of Logical Supervisory Control amount with
ClearPLCAlarmDO correspond, that is to say, that the bool values of Logical Supervisory Control amount, the bool values of monitoring parameter and
ClearPLCAlarmDO is corresponded；Therefore, in monitoring system provided in this embodiment, controller is additionally provided with and monitoring parameter
The one-to-one ClearPLCAlarmDO of bool values, host computer is also configured to：Once judge that operating personnel handle alarm,
ClearPLCAlarmDO corresponding with the bool values of current monitor amount is then set to 1；Controller is arranged to：Once with current prison
The corresponding ClearPLCAlarmDO of bool values of control amount is set to 1, then the bool values for storing current logic monitoring parameter are 0.
It should also be noted that, in the present embodiment, controller is also configured to：Once send safety operation in controller
Afterwards and after the bool values for storing Logical Supervisory Control amount corresponding with the bool values of current monitor remain unchanged, then control
Device continuation then scans；Host computer is also configured to：Once judge the bool values of current logic monitoring parameter not for 1, judgement operation
Personnel it is untreated alarm and after step s 5, then continue Read Controller storage current monitor amount bool values it is corresponding
The bool values of Logical Supervisory Control amount.
It is further to note that in practical applications, if the alert if associated by monitoring parameter changes, it can lead to
Cross the program of modification controller；, it is necessary to ensure the bool values of monitoring parameter when if the quantity of monitoring parameter needs to increased or decrease
It is corresponded with the bool values of Logical Supervisory Control amount and the bool values of Logical Supervisory Control amount is corresponded with alarm.
In addition it should also be noted that, in the present embodiment, Logical Supervisory Control amount is corresponded with monitoring parameter, therefore, control
Device is arranged to only need whether to meet alert if according to current monitor amount, if so, storage Logical Supervisory Control amount is 1, if it is not, depositing
Storage Logical Supervisory Control amount remains unchanged.But the present invention is not limited thereto, in practical applications, Logical Supervisory Control amount can also be with
Multiple monitoring parameters with certain logical relation correspond, and in this case, controller is arranged to need according to multiple
Whether monitoring parameter meets alert if, and whether multiple monitoring parameters meet above-mentioned logical relation, if so, storage Logical Supervisory Control amount
For 1, if it is not, storage Logical Supervisory Control amount remains unchanged.It is readily appreciated that, it is in this case, the bool values of Logical Supervisory Control amount, multiple
The bool values of monitoring parameter with certain logical relation and alarm three correspond.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, the essence of the present invention is not being departed from
In the case of refreshing and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a kind of monitoring method of semiconductor processing equipment, the monitoring method of the semiconductor processing equipment is real using monitoring system
Existing, the monitoring system includes host computer and controller, which is characterized in that the controller is preset with multiple addresses for distinguishing
Storage and the bool values of the one-to-one Logical Supervisory Control amount of bool values of multiple monitoring parameters；The monitoring parameter or the Logical Supervisory Control
The bool values of amount are corresponded with alarm；The monitoring method comprises the following steps：
Step S1, the controller scans multiple monitoring parameters successively, and judges whether current monitor amount meets alert if,
If so, enter step S2；If it is not, then enter step S3；
Step S2, the bool values of presently described monitoring parameter are assigned a value of true, then storage and the bool values pair of presently described monitoring parameter
The bool values for the Logical Supervisory Control amount answered are 1, and send safety operation, subsequently into step S4；
Step S3, the bool values of presently described monitoring parameter are assigned a value of false, then store corresponding with presently described monitoring parameter described
The bool values of Logical Supervisory Control amount remain unchanged, subsequently into step S4；
Step S4, the host computer read the corresponding logic of bool values of the presently described monitoring parameter of the controller storage
The bool values of monitoring parameter；
Step S5, the host computer judges whether the bool values of presently described Logical Supervisory Control amount are 1, if so, entering step S6；
Step S6, the host computer is dished out to be reported correspondingly with the bool values of presently described monitoring parameter or the Logical Supervisory Control amount
It is alert.
2. the monitoring method of semiconductor processing equipment according to claim 1, which is characterized in that the controller is also set up
There are the one-to-one ClearPLCAlarmDO of bool values with the monitoring parameter or the Logical Supervisory Control amount, the monitoring method
It is further comprising the steps of：
Step S7, the host computer judge whether operating personnel handle the alarm, if so, entering step S8；
Step S8, the host computer will be corresponding with the bool values of presently described monitoring parameter or the Logical Supervisory Control amount described
ClearPLCAlarmDO is set to 1；
Step S9, the controller are the 1 corresponding Logical Supervisory Control amount of storage according to the ClearPLCAlarmDO
Bool values are 0.
3. the monitoring method of semiconductor processing equipment according to claim 1, which is characterized in that the alarm includes alarm
Number and with the one-to-one warning message of the warning numbering.
4. the monitoring method of semiconductor processing equipment according to claim 1, which is characterized in that the controller is used and followed
The mode of ring scanning scans multiple monitoring parameters successively.
5. the monitoring method of semiconductor processing equipment according to claim 1, which is characterized in that the controller includes
PLC。
6. a kind of monitoring system of semiconductor processing equipment, including host computer and controller, which is characterized in that the controller is pre-
Equipped with multiple addresses for storage respectively and the bool values of the one-to-one Logical Supervisory Control amount of bool values of multiple monitoring parameters；And
And the bool values of the monitoring parameter or the Logical Supervisory Control amount are corresponded with alarm；
The controller is arranged to：Multiple monitoring parameters are scanned successively, once judge that current monitor amount meets alert if,
Then the bool values of presently described monitoring parameter are assigned a value of true, and store it is corresponding with the bool values of presently described monitoring parameter described in patrol
The bool values for collecting monitoring parameter are 1, send safety operation；Once judge that current monitor amount is unsatisfactory for alert if, then it is presently described
The bool values of monitoring parameter are assigned a value of false, and store the bool values of the Logical Supervisory Control amount corresponding with presently described monitoring parameter
It remains unchanged；
The host computer is arranged to：Once read the corresponding institute of bool values of the presently described monitoring parameter of the controller storage
The bool values for stating Logical Supervisory Control amount are 1, then dish out one-to-one with the bool values of presently described monitoring parameter or Logical Supervisory Control amount
Alarm.
7. the monitoring system of semiconductor processing equipment according to claim 6, which is characterized in that the controller is also set up
There is the one-to-one ClearPLCAlarmDO of bool values with the monitoring parameter or the Logical Supervisory Control amount, the host computer is also
It is arranged to：Once judge that operating personnel handle the alarm, then by with presently described monitoring parameter or the Logical Supervisory Control amount
The corresponding ClearPLCAlarmDO of bool values is set to 1；
The controller is arranged to：It is once corresponding with the bool values of presently described monitoring parameter or the Logical Supervisory Control amount
ClearPLCAlarmDO values are set to 1, then the bool values for storing presently described Logical Supervisory Control amount are 0.
8. the monitoring system of semiconductor processing equipment according to claim 6, which is characterized in that the alarm includes alarm
Number and with the one-to-one warning message of the warning numbering.
9. the monitoring system of semiconductor processing equipment according to claim 6, which is characterized in that the controller is used and followed
The mode of ring scanning scans multiple monitoring parameters successively.
10. the monitoring system of semiconductor processing equipment according to claim 6, which is characterized in that the controller includes
PLC。
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| CN100511620C (en) * | 2005-12-05 | 2009-07-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Equipment alarm and interlocking treatment method |
| CN103760876B (en) * | 2014-01-29 | 2018-06-22 | 北京北方华创微电子装备有限公司 | The storage method and storage device of warning message |
| CN103809577B (en) * | 2014-03-04 | 2016-06-01 | 北京七星华创电子股份有限公司 | A kind of warning for semiconductor processing equipment focuses on method |
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